JP2002055097A - Method for determination sulfonic acid type anionic surfactant in copper electrolytic solution - Google Patents

Method for determination sulfonic acid type anionic surfactant in copper electrolytic solution

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Publication number
JP2002055097A
JP2002055097A JP2000242145A JP2000242145A JP2002055097A JP 2002055097 A JP2002055097 A JP 2002055097A JP 2000242145 A JP2000242145 A JP 2000242145A JP 2000242145 A JP2000242145 A JP 2000242145A JP 2002055097 A JP2002055097 A JP 2002055097A
Authority
JP
Japan
Prior art keywords
sulfonic acid
anionic surfactant
type anionic
acid type
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000242145A
Other languages
Japanese (ja)
Inventor
Kimihiko Fujita
公彦 富士田
Takao Ito
隆雄 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP2000242145A priority Critical patent/JP2002055097A/en
Publication of JP2002055097A publication Critical patent/JP2002055097A/en
Pending legal-status Critical Current

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling

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  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Electrolytic Production Of Metals (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method, capable of selectively determination a sulfonic acid type anionic surfactant of about 1 ppm in a solution such as an electrolytic solution or a plating solution, containing several - several ten g/l of heavy metal ions and a very small amount of the sulfonic acid type anionic surfactant. SOLUTION: The method for determining the sulfonic acid type anionic surfactant in the electrolytic solution includes a process (1) for treating heavy metal ions contained in the copper electrolytic solution or plating solution with a complex-forming agent, a processing (2) for forming a methylene blue aqueous solution in order to drive a compound soluble in an organic solvent from the water soluble sulfonic acid type anionic surfactant contained in the solution, a process (3) for bringing the treated solution into contact with the methylene blue aqueous solution to form an aqueous solution of a methylene blue complex of the sulfonic acid type anionic surfactant, a process (4) for bringing an aqueous solution of the complex into contact with an organic solvent for forming an extract, a process (5) for measuring the absorbancy of the extract at a measuring wavelength of 650 nm by an ultraviolet spectrophotometer, and a process (6) for inserting the measured absorbancy in the correlation of the sulfonic acid type anionic surfactant and absorbancy to calculate the amount of the sulfonic acid type anionic surfactant.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、銅電解液又はメッ
キ液に利用されるスルフォン酸型陰イオン界面活性剤に
関し、具体的には、銅電解液またはメッキ液からスルフ
ォン酸型陰イオン界面活性剤を選択的に抽出し、それを
定量する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sulfonic acid type anionic surfactant used for a copper electrolyte or a plating solution, and more specifically, to a sulfonic acid type anionic surfactant from a copper electrolyte or a plating solution. The present invention relates to a method for selectively extracting an agent and quantifying the same.

【0002】[0002]

【従来の技術】電解銅は、主に硫酸銅を溶解した硫酸性
銅電解液をアノードとカソードの間で電解し、銅イオン
をカソードに電着させることにより、得られる。
2. Description of the Related Art Electrolytic copper is mainly obtained by electrolyzing a sulfated copper electrolytic solution in which copper sulfate is dissolved between an anode and a cathode and electrodepositing copper ions on the cathode.

【0003】銅電解では、電解むらが大きな問題であ
り、カソード表面における電着の平滑化を図るために、
通常は、にかわ、チオ尿素、スルフォン酸型陰イオン界
面活性剤などの有機系添加剤を微量添加している。
[0003] In copper electrolysis, uneven electrolysis is a major problem. In order to smooth electrodeposition on the cathode surface,
Normally, trace amounts of organic additives such as glue, thiourea and sulfonic acid type anionic surfactant are added.

【0004】従来技術では、銅電解液への添加に関し、
にかわ、チオ尿素については、消費量、添加のタイミン
グが定量的に確立されているが、スルフォン酸型陰イオ
ン界面活性剤の定量方法は、未だ確立されておらず、そ
の添加のタイミングは専ら経験に頼っていて、その効能
も未だ明らかにされていない。
[0004] In the prior art, regarding the addition to the copper electrolyte,
For thiourea, the amount of consumption and the timing of addition of thiourea have been quantitatively established, but the method of quantifying sulfonic acid-type anionic surfactants has not been established yet, and the timing of addition has been exclusively determined. And its efficacy has not yet been revealed.

【0005】銅、ニッケル、コバルトなどの重金属イオ
ンを含まない一般的な水溶液中におけるスルフォン酸型
陰イオン界面活性剤の定量方法には、吸光度法(JIS
K−0101、JIS K−0102等)がある。こ
れによれば、スルフォン酸型陰イオン界面活性剤の濃度
水準を0〜200μgの範囲で変化させて定量した場
合、前記濃度水準と吸光度(0〜0.45)との間の関
係は良好な直線性を示す。これらの定量方法を利用し
て、銅電解液中におけるスルフォン酸型陰イオン界面活
性剤を定量することが検討されているが、従来技術で
は、銅電解液中におけるスルフォン酸型陰イオン界面活
性剤の定量方法を確立するまでに未だ至っていない。
A method for determining a sulfonate-type anionic surfactant in a general aqueous solution not containing heavy metal ions such as copper, nickel and cobalt includes an absorbance method (JIS).
K-0101, JIS K-0102, etc.). According to this, when the concentration level of the sulfonic acid type anionic surfactant was changed and quantified in the range of 0 to 200 μg, the relationship between the concentration level and the absorbance (0 to 0.45) was good. Shows linearity. The use of these determination methods has been studied to determine the amount of the sulfonic acid type anionic surfactant in the copper electrolyte solution. However, in the prior art, the sulfonic acid type anionic surfactant in the copper electrolyte solution has been studied. Has not yet been established until the establishment of a method for quantification.

【0006】銅電解液中におけるスルフォン酸型陰イオ
ン界面活性剤の定量を阻害する要因として、次のような
問題があると考えられる。
The following problems are considered to be factors that hinder the determination of the sulfonic acid type anionic surfactant in the copper electrolyte.

【0007】1)前記定量方法では、イオン対が形成さ
れ、中性となった形態で抽出を行うため、銅電解液をあ
らかじめ水酸化ナトリウムで中和する。中和は、スルフ
ォン酸型陰イオン界面活性剤を有機相に完全に抽出さ
せ、定量試料のメチレンブルーと反応させるために行
う。しかし、銅電解液中の銅、ニッケル、コバルトなど
の重金属イオンの水酸化物沈殿が生じ、中和点では液が
泥状になる。このために、スルフォン酸型陰イオン界面
活性剤と定量試料のメチレンブルーとの反応を阻害し
て、定量値に対して負の誤差を生じる可能性がある。
[0007] 1) In the above-mentioned quantitative method, in order to perform extraction in a neutral form in which an ion pair is formed, the copper electrolyte is neutralized in advance with sodium hydroxide. The neutralization is performed in order to completely extract the sulfonic acid type anionic surfactant into the organic phase and react with the methylene blue of the quantitative sample. However, hydroxide precipitation of heavy metal ions such as copper, nickel, and cobalt in the copper electrolyte occurs, and the solution becomes muddy at the neutralization point. For this reason, there is a possibility that the reaction between the sulfonic acid type anionic surfactant and methylene blue of the quantitative sample is inhibited, and a negative error is caused with respect to the quantitative value.

【0008】2)スルフォン酸型陰イオン界面活性剤が
メチレンブルーと反応し、スルフォン酸型陰イオン界面
活性剤のメチレンブルーコンプレックスを生じたとして
も、これが前記重金属イオンの水酸化物沈殿に吸着され
る。このために、前記コンプレックスが抽出用有機溶剤
に抽出されなくなり、定量値に対して負の誤差を生じる
可能性がある。
2) Even if the sulfonic acid type anionic surfactant reacts with methylene blue to form a methylene blue complex of the sulfonic acid type anionic surfactant, this is adsorbed on the hydroxide precipitate of the heavy metal ion. For this reason, the complex cannot be extracted by the organic solvent for extraction, and a negative error may be caused with respect to the quantitative value.

【0009】3)スルフォン酸型陰イオン界面活性剤と
一緒に添加されるにかわやチオ尿素の影響が考えられ
る。例えば、銅電解液は非常に硫酸性が強く、添加時に
は加温されているので、添加されたにかわ、あるいはそ
の分解物は、硫酸を触媒として、種々のアミノ酸に徐々
に分解する。これらの分解物が、スルフォン酸型陰イオ
ン界面活性剤の定量に際し、スルフォン酸型陰イオン界
面活性剤と同様な挙動をするので、定量値に対して正の
誤差を生じる可能性がある。
3) The effect of glue or thiourea can be considered when added together with the sulfonic acid type anionic surfactant. For example, since the copper electrolyte has a very strong sulfuric acid property and is heated at the time of addition, the added electrolyte or its decomposition product gradually decomposes into various amino acids using sulfuric acid as a catalyst. These decomposition products behave in the same manner as the sulfonic acid type anionic surfactant in quantifying the sulfonic acid type anionic surfactant, so that a positive error may be caused in the quantitative value.

【0010】[0010]

【発明が解決しようとする課題】従って、本発明の目的
は、銅電解液中におけるスルフォン酸型陰イオン界面活
性剤を定量する方法を提供することである。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method for determining a sulfonic acid type anionic surfactant in a copper electrolyte.

【0011】又、本発明の目的は、数g/l〜数十g/
l程度の重金属イオンと、微量のスルフォン酸型陰イオ
ン界面活性剤とを含む電解液やメッキ液のような溶液に
対して、1ppm程度のスルフォン酸型陰イオン界面活
性剤を選択的に定量できる方法を提供することである。
Further, the object of the present invention is to provide several g / l to several tens g / l.
About 1 ppm of a sulfonic acid type anionic surfactant can be selectively determined with respect to a solution such as an electrolytic solution or a plating solution containing about 1 heavy metal ion and a trace amount of a sulfonic acid type anionic surfactant. Is to provide a way.

【0012】[0012]

【課題を解決するための手段】銅電解液またはメッキ液
に含まれるスルフォン酸型陰イオン界面活性剤を定量す
る本発明の方法は、次の各工程からなる。
The method of the present invention for quantifying a sulfonic acid type anionic surfactant contained in a copper electrolytic solution or a plating solution comprises the following steps.

【0013】1)銅電解液またはメッキ液に含まれる重
金属イオンを錯形成剤で処理して処理液を生成する工
程、 2)前記銅電解液またはメッキ液に含まれる水溶性スル
フォン酸型陰イオン界面活性剤を有機溶剤に可溶な化合
物に誘導体化するために、スルフォン酸型陰イオン界面
活性剤のイオン対であるメチレンブルーを水溶液中に一
定量添加してメチレンブルー水溶液を生成する工程、 3)前記処理液と前記メチレンブルー水溶液とを接触さ
せて、スルフォン酸型陰イオン界面活性剤のメチレンブ
ルーコンプレックスが溶解した水溶液にする工程、 4)前記メチレンブルーコンプレックスが溶解した水溶
液を有機溶剤に接触させて、前記メチレンブルーコンプ
レックスを有機溶剤に選択的に抽出して抽出液を生成す
る工程、 5)前記抽出液について分光光度計により吸光度を測定
する工程、この場合、紫外線分光光度計を用いて、測定
波長650nmとするのが好ましい。
1) a step of treating heavy metal ions contained in the copper electrolyte or plating solution with a complexing agent to form a treatment solution; 2) a water-soluble sulfonic acid type anion contained in the copper electrolyte or plating solution. A step of adding a fixed amount of methylene blue, which is an ion pair of a sulfonic acid type anionic surfactant, to an aqueous solution in order to derivatize the surfactant into a compound soluble in an organic solvent, 3) producing an aqueous methylene blue solution; Contacting the treatment liquid with the aqueous solution of methylene blue to form an aqueous solution in which a methylene blue complex of a sulfonic acid type anionic surfactant is dissolved; 4) contacting the aqueous solution in which the methylene blue complex is dissolved with an organic solvent; A step of selectively extracting the methylene blue complex into an organic solvent to produce an extract; A step of measuring the absorbance of the discharged liquid with a spectrophotometer, in this case, it is preferable to set the measurement wavelength to 650 nm using an ultraviolet spectrophotometer.

【0014】6)測定された吸光度をスルフォン酸型陰
イオン界面活性剤と吸光度との相関関係に挿入して、ス
ルフォン酸型陰イオン界面活性剤の量を求める工程。
6) inserting the measured absorbance into the correlation between the sulfonic acid type anionic surfactant and the absorbance to determine the amount of the sulfonic acid type anionic surfactant.

【0015】錯形成剤がアンモニアまたはエチレンジア
ミン四酢酸が好ましく、この添加により、銅電解液また
はメッキ液に含まれる重金属イオンが水溶性アンミン錯
体になる。この水溶性アンミン錯体が安定である水素イ
オン濃度範囲であるpH8以上pH12以下で抽出液を
生成するのが望ましい。また、紫外線分光光度計による
吸光度測定では、スルフォン酸型陰イオン界面活性剤の
メチレンブルーコンプレックス以外の妨害成分をあらか
じめ紫外線分光光度計により波長スキャンし、スルフォ
ン酸型陰イオン界面活性剤のメチレンブルーコンプレッ
クスの測定波長に妨害を与えず且つ高感度で定量できる
最適定量波長を選択して定量を行うのが望ましい。
The complexing agent is preferably ammonia or ethylenediaminetetraacetic acid. By the addition, heavy metal ions contained in the copper electrolyte or the plating solution are converted to a water-soluble ammine complex. It is desirable to generate an extract at pH 8 or more and pH 12 or less, which is a hydrogen ion concentration range in which the water-soluble ammine complex is stable. In addition, in the absorbance measurement using an ultraviolet spectrophotometer, interference components other than the methylene blue complex of the sulfonic acid type anionic surfactant are scanned in advance with an ultraviolet spectrophotometer to measure the methylene blue complex of the sulfonic acid type anionic surfactant. It is desirable to carry out quantification by selecting an optimal quantification wavelength that does not interfere with the wavelength and can quantify with high sensitivity.

【0016】[0016]

【発明の実施の形態】図1に、本発明による銅電解液中
のスルフォン酸型陰イオン界面活性剤の定量方法のフロ
ーチャートを示す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a flow chart of a method for quantifying a sulfonic acid type anionic surfactant in a copper electrolyte according to the present invention.

【0017】この方法は、スルフォン酸型陰イオン界面
活性剤のイオン対であるメチレンブルーを水溶液中に一
定量添加してメチレンブルー水溶液を生成する工程が、
分液漏斗1及び分液漏斗2の2系列からなる。分液漏斗
1及び分液漏斗2では、25mlの水と、5mlのアル
カリ性ホウ酸ナトリウムと、2.5mlのメチレンブル
ーと、5mlのクロロホルムとを混合し、浸とうし、水
相とクロロホルム相とに分離し、クロロホルムを用い
て、水相中に含まれるメチレンブルー中の不純物をあら
かじめ取り除いておく。この時、クロロホルムに色が着
かなくなるまで、この操作を繰り返す。この水相がメチ
レンブルー水溶液である。また、分液漏斗2には硫酸
1.5mlを添加しておく。一方、10mlの銅電解液
またはメッキ液をアンモニア水でpH=11に調整し、
重金属イオンを錯形成を行う。
In this method, a step of adding a fixed amount of methylene blue, which is an ion pair of a sulfonic acid type anionic surfactant, to an aqueous solution to form an aqueous methylene blue solution,
It consists of two series, a separating funnel 1 and a separating funnel 2. In separatory funnel 1 and separatory funnel 2, 25 ml of water, 5 ml of alkaline sodium borate, 2.5 ml of methylene blue and 5 ml of chloroform are mixed, immersed, and separated into an aqueous phase and a chloroform phase. Separate, and remove the impurities in methylene blue contained in the aqueous phase using chloroform in advance. At this time, this operation is repeated until no color is formed on chloroform. This aqueous phase is an aqueous methylene blue solution. Also, 1.5 ml of sulfuric acid is added to the separating funnel 2. On the other hand, 10 ml of copper electrolyte or plating solution was adjusted to pH = 11 with aqueous ammonia,
Complexes heavy metal ions.

【0018】分液漏斗1で得た前記水相と、錯形成した
銅電解液またはメッキ液とを混合し、5mlのクロロホ
ルムを添加して、浸とうし、水相とクロロホルム相とに
分離する。このクロロホルム相と分液漏斗2で得た前記
水相とを混合し、浸とうし、水相とクロロホルム相とに
分離する。こうして得たクロロホルム相が、メチレンブ
ルーコンプレックスが溶解した水溶液であり、このクロ
ロホルム相を有機溶剤に接触させて、25mlにして、
UV形で吸光度測定を行う。
The aqueous phase obtained in the separatory funnel 1 is mixed with a complexed copper electrolytic solution or plating solution, 5 ml of chloroform is added, and the mixture is immersed to separate into an aqueous phase and a chloroform phase. . The chloroform phase and the aqueous phase obtained by the separating funnel 2 are mixed, immersed, and separated into an aqueous phase and a chloroform phase. The chloroform phase thus obtained is an aqueous solution in which the methylene blue complex is dissolved. The chloroform phase is brought into contact with an organic solvent to make 25 ml,
The absorbance measurement is performed in the UV form.

【0019】本発明では、銅電解液を水酸化ナトリウム
で中和することを前提とする銅電解液中のスルフォン酸
型陰イオン界面活性剤の定量に対して、次の改良を特徴
とする。
The present invention is characterized by the following improvements with respect to the determination of a sulfonic acid type anionic surfactant in a copper electrolyte on the premise that the copper electrolyte is neutralized with sodium hydroxide.

【0020】1)前記重金属の水酸化物沈殿を水溶性の
アンミン錯体に置換するために、水酸化ナトリウムによ
る前処理からアンモニア水による前処理に変更する。
1) In order to replace the heavy metal hydroxide precipitate with a water-soluble ammine complex, the pretreatment with sodium hydroxide is changed to a pretreatment with aqueous ammonia.

【0021】2)前処理をアルカリ性側に留める。アン
モニア水による前処理でも、pHが7程度では、水酸化
物沈殿が大量に残留するから、この水酸化物沈殿が完全
に水溶性のアンミン錯体に変化するpH範囲にするため
である。
2) Keep the pretreatment on the alkaline side. Even with the pretreatment with aqueous ammonia, if the pH is about 7, a large amount of hydroxide precipitate remains, so that the hydroxide precipitate is brought into a pH range that completely changes to a water-soluble ammine complex.

【0022】アンモニア水で処理しても、最初は水酸化
物沈殿が生成し、アンモニア濃度が高くなることによっ
て、銅、ニッケル、コバルトのカウンターイオンが水酸
基からアンモニアに置換される。
Even when treated with aqueous ammonia, initially, hydroxide precipitates are formed, and the ammonia concentration is increased, whereby the counter ions of copper, nickel and cobalt are replaced with ammonia from hydroxyl groups.

【0023】3)スルフォン酸型陰イオン界面活性剤の
メチレンブルーコンプレックスの定量に及ぼすにかわや
チオ尿素などの成分の妨害を定量的に把握する。
3) To quantitatively grasp the interference of components such as glue and thiourea on the determination of the methylene blue complex of the sulfonic acid type anionic surfactant.

【0024】銅電解液の前処理をアンモニア水で行っ
て、重金属を水溶性のアンミン錯体にすることで、銅電
解液中のスルフォン酸型陰イオン界面活性剤を選択的に
定量することについて、以下に詳述する。
The pretreatment of the copper electrolyte with aqueous ammonia to convert the heavy metal into a water-soluble ammine complex, thereby selectively quantifying the sulfonic acid type anionic surfactant in the copper electrolyte. Details will be described below.

【0025】1)銅電解液の前処理をアンモニア水で行
い、アルカリ側に留めると、銅電解液中の重金属は水溶
性のアンミン錯体になり、水酸化物沈殿が生じない。こ
のため、スルフォン酸型陰イオン界面活性剤のメチレン
ブルーコンプレックスの生成が妨害されない。従って、
スルフォン酸型陰イオン界面活性剤が抽出用有機溶剤に
良好に抽出され、定量値の精度が良好になる。
1) When the pretreatment of the copper electrolyte is performed with aqueous ammonia and the alkaline side is maintained, the heavy metal in the copper electrolyte becomes a water-soluble ammine complex and hydroxide precipitation does not occur. Therefore, the formation of the methylene blue complex of the sulfonic acid type anionic surfactant is not hindered. Therefore,
The sulfonic acid type anionic surfactant is well extracted into the extraction organic solvent, and the accuracy of the quantitative value is improved.

【0026】2)スルフォン酸型陰イオン界面活性剤の
メチレンブルーコンプレックスの定量は、紫外線分光光
度計の波長スキャン測定をモニターすることにより行
う。波長スキャン測定では、妨害成分影響を受けない波
長を選択することが可能である。従って、定量値の精度
が高くなる。
2) The quantitative determination of the methylene blue complex of the sulfonic acid type anionic surfactant is performed by monitoring the wavelength scan measurement of an ultraviolet spectrophotometer. In the wavelength scan measurement, it is possible to select a wavelength that is not affected by an interference component. Therefore, the accuracy of the quantitative value is increased.

【0027】本発明の定量方法における諸因子について
説明する。
Various factors in the quantification method of the present invention will be described.

【0028】1)銅電解液中のスルフォン酸型陰イオン
界面活性剤の定量 図1に示される本発明の定量方法で、銅電解液中におけ
るスルフォン酸型陰イオン界面活性剤の濃度水準(添加
量)を変化させたときの吸光度との関係は図2に示すよ
うに良好な直線性を示す。
1) Determination of Sulfonate-Type Anionic Surfactant in Copper Electrolyte According to the quantitative method of the present invention shown in FIG. The relationship with the absorbance when changing the amount) shows good linearity as shown in FIG.

【0029】2)銅電解液に含まれる重金属のアンミン
錯体への変化 図1に示される本発明の定量方法で、銅電解液の前処理
において、銅電解液10mlに50ml程度のアンモニ
ア水を添加することで、銅電解液に含まれる銅やニッケ
ルなどの重金属のほとんどがアンミン錯体に変化し、可
溶化する。
2) Change of heavy metal contained in copper electrolyte to ammine complex In the pretreatment of copper electrolyte, about 50 ml of aqueous ammonia is added to 10 ml of copper electrolyte by the quantitative method of the present invention shown in FIG. By doing so, most of heavy metals such as copper and nickel contained in the copper electrolyte are changed into ammine complexes and are solubilized.

【0030】3)銅電解液の中和処理における水素イオ
ン濃度 図1に示される本発明の定量方法で、銅電解液の前処理
において、銅電解液10mlに50ml以上のアンモニ
ア水を添加すると、水素イオン濃度は11以上になる。
この水素イオン濃度が重金属のアンミン錯体への変化に
必要であると考えられる。
3) Hydrogen ion concentration in the neutralization treatment of the copper electrolyte In the pretreatment of the copper electrolyte according to the quantitative method of the present invention shown in FIG. The hydrogen ion concentration becomes 11 or more.
It is considered that this hydrogen ion concentration is necessary for changing heavy metals to ammine complexes.

【0031】4)銅電解液に含まれるにかわの影響 表1に示すように、通常の銅電解液に加える量の0倍量
(測定ブランク)、10倍量および100倍量のにかわ
を添加して、80℃で3時間加熱して調整した疑似電解
液を本発明の方法で定量したときの、紫外線分光光度計
の波長650nmの吸光度の結果を、銅電解液(にかわ
などの添加なし)の一例の結果とともに、表2に示す。
4) Influence of glue contained in copper electrolyte As shown in Table 1, 0 times (measurement blank), 10 times and 100 times the amount of glue added to a normal copper electrolyte were added. When the simulated electrolyte prepared by heating at 80 ° C. for 3 hours was quantified by the method of the present invention, the result of the absorbance at a wavelength of 650 nm of the ultraviolet spectrophotometer was compared with that of the copper electrolyte (without addition of glue or the like). The results are shown in Table 2 together with the results of one example.

【0032】[0032]

【表1】 [Table 1]

【0033】[0033]

【表2】 [Table 2]

【0034】10倍量のにかわを添加した場合は、測定
ブランクと同程度の吸光度であり、スルフォン酸型陰イ
オン界面活性剤の定量へ及ぼす影響が小さいといえる。
これに対して、100倍量のにかわを添加した場合は、
通常の銅電解液と同程度のレベルの吸光度であり、スル
フォン酸型陰イオン界面活性剤の定量へ及ぼす影響が大
きいといえる。
When 10 times the amount of glue was added, the absorbance was about the same as that of the measurement blank, and it can be said that the influence on the quantitative determination of the sulfonic acid type anionic surfactant was small.
On the other hand, when glue was added 100 times the amount,
The absorbance is at the same level as that of a normal copper electrolyte, and can be said to have a large effect on the determination of the sulfonate-type anionic surfactant.

【0035】従って、通常の銅電解液に加える量のにか
わは、銅電解液中のスルフォン酸型陰イオン界面活性剤
の定量へ及ぼす影響が殆ど無いといえる。
Therefore, it can be said that the amount of glue added to the ordinary copper electrolyte has almost no effect on the determination of the sulfonic acid type anionic surfactant in the copper electrolyte.

【0036】5)紫外線分光光度計の波長スキャン測定
におけるにかわの影響 表2に示した試料のメチレンブルーコンプレックスを紫
外線分光光度計で600〜700nmの範囲で波長スキ
ャン測定して、図3に示す結果を得た。
5) Influence of glue on wavelength scan measurement of ultraviolet spectrophotometer The methylene blue complex of the sample shown in Table 2 was subjected to wavelength scan measurement in the range of 600 to 700 nm with an ultraviolet spectrophotometer, and the result shown in FIG. 3 was obtained. Obtained.

【0037】10倍量のにかわを添加した場合は、測定
ブランクと同程度の吸光度であり、スルフォン酸型陰イ
オン界面活性剤の定量へ及ぼす影響が小さいといえる。
これに対して、100倍量のにかわを添加した場合は、
650nm以上の波長では通常の銅電解液(にかわなど
の添加なし)と同程度のレベルの吸光度であり、650
nm以下の波長では吸光度が大きくなり、スルフォン酸
型陰イオン界面活性剤の定量へ及ぼす影響は大きいとい
える。
When 10 times the amount of glue was added, the absorbance was about the same as that of the measurement blank, and it can be said that the influence on the quantitative determination of the sulfonic acid type anionic surfactant was small.
On the other hand, when glue was added 100 times the amount,
At a wavelength of 650 nm or more, the absorbance is about the same level as that of a normal copper electrolyte solution (without addition of glue or the like).
At a wavelength of nm or less, the absorbance increases, and it can be said that the influence on the determination of the sulfonic acid type anionic surfactant is large.

【0038】従って、通常の銅電解液に加える量のにか
わは、銅電解液中のスルフォン酸型陰イオン界面活性剤
の定量へ及ぼす影響が殆ど無いといえる。なお、測定ブ
ランクに60μgのスルフォン酸型陰イオン界面活性剤
を添加した場合のメチレンブルーコンプレックスを紫外
線分光光度計で600〜700nmの範囲で波長スキャ
ン測定した結果も図3に示す。吸光度のピーク値に関し
て、銅電解液単独の場合の測定波長とスルフォン酸型陰
イオン界面活性剤単独の場合の測定波長が近いことがわ
かる。
Therefore, it can be said that the amount of glue added to the ordinary copper electrolyte has almost no effect on the determination of the sulfonic acid type anionic surfactant in the copper electrolyte. FIG. 3 also shows the results of wavelength scan measurement of the methylene blue complex in the range of 600 to 700 nm using an ultraviolet spectrophotometer when 60 μg of the sulfonic acid type anionic surfactant was added to the measurement blank. Regarding the peak value of the absorbance, it can be seen that the measurement wavelength in the case of the copper electrolyte alone is close to the measurement wavelength in the case of the sulfonate-type anionic surfactant alone.

【0039】[0039]

【実施例】図1に示した定量方法で、実際に銅電解液中
のスルフォン酸型陰イオン界面活性剤を定量した結果、
当該銅電解液中のスルフォン酸型陰イオン界面活性剤の
含有量は2.4ppmであることが分かった。
EXAMPLE As a result of actually quantifying a sulfonic acid type anionic surfactant in a copper electrolyte by the quantification method shown in FIG.
It was found that the content of the sulfonic acid type anionic surfactant in the copper electrolyte was 2.4 ppm.

【0040】[0040]

【発明の効果】銅電解液中のスルフォン酸型陰イオン界
面活性剤の定量の精度が高くなり、銅電解液におけるス
ルフォン酸型陰イオン界面活性剤の寄与を調査する手が
かりになること大である。
According to the present invention, the accuracy of the determination of the sulfonic acid type anionic surfactant in the copper electrolytic solution is improved, and it is a great clue to investigate the contribution of the sulfonic acid type anionic surfactant in the copper electrolytic solution. .

【0041】本発明は、重金属を含有するメッキ液にも
適用できる。
The present invention can be applied to a plating solution containing a heavy metal.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明による銅電解液中のスルフォン酸型陰
イオン界面活性剤の定量方法を示すフローチャート。
FIG. 1 is a flowchart showing a method for quantifying a sulfonic acid type anionic surfactant in a copper electrolyte according to the present invention.

【図2】 本発明による銅電解液中のスルフォン酸型陰
イオン界面活性剤の定量方法において、吸光度とスルフ
ォン酸型陰イオン界面活性剤の量との関係を示すグラ
フ。
FIG. 2 is a graph showing the relationship between the absorbance and the amount of a sulfonic acid type anionic surfactant in the method for quantifying a sulfonic acid type anionic surfactant in a copper electrolyte according to the present invention.

【図3】 本発明による銅電解液中のスルフォン酸型陰
イオン界面活性剤の定量方法に使用する紫外線分光光度
計の波長スキャン測定における吸光度と波長との関係を
示すグラフ。
FIG. 3 is a graph showing the relationship between the absorbance and the wavelength in a wavelength scan measurement of an ultraviolet spectrophotometer used in the method for quantifying a sulfonic acid type anionic surfactant in a copper electrolyte according to the present invention.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G042 AA01 BD18 CA10 CB03 DA06 DA08 FA06 FA11 FB02 GA05 HA07 2G054 AA02 CA30 CB01 CE01 CE10 EA04 GB01 4K058 AA10 BA21 BB02 CA09 FC05 FC12 FC19  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G042 AA01 BD18 CA10 CB03 DA06 DA08 FA06 FA11 FB02 GA05 HA07 2G054 AA02 CA30 CB01 CE01 CE10 EA04 GB01 4K058 AA10 BA21 BB02 CA09 FC05 FC12 FC19

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 次の各工程からなる、銅電解液またはメ
ッキ液中のスルフォン酸型陰イオン界面活性剤の定量方
法: 1)銅電解液またはメッキ液に含まれる重金属イオンを
錯形成剤で処理して処理液を生成する工程、 2)前記銅電解液またはメッキ液中に含まれる水溶性ス
ルフォン酸型陰イオン界面活性剤を有機溶剤に可溶な化
合物に誘導体化するために、スルフォン酸型陰イオン界
面活性剤のイオン対であるメチレンブルーを水溶液中に
一定量添加して、メチレンブルー水溶液を生成する工
程、 3)前記処理液と前記メチレンブルー水溶液とを接触さ
せて、スルフォン酸型陰イオン界面活性剤のメチレンブ
ルーコンプレックスが溶解した水溶液にする工程、 4)前記メチレンブルーコンプレックスが溶解した水溶
液を有機溶剤に接触させて、前記メチレンブルーコンプ
レックスを有機溶剤に選択的に抽出して抽出液を生成す
る工程、 5)前記抽出液について吸光度を測定する工程、 6)測定された吸光度をスルフォン酸型陰イオン界面活
性剤と吸光度との相関関係に挿入して、スルフォン酸型
陰イオン界面活性剤の量を求める工程。
1. A method for quantifying a sulfonic acid type anionic surfactant in a copper electrolyte or plating solution, comprising the following steps: 1) Heavy metal ions contained in the copper electrolyte or plating solution are complexed with a complexing agent. 2) a process in which a water-soluble sulfonic acid type anionic surfactant contained in the copper electrolyte solution or the plating solution is derivatized into a compound soluble in an organic solvent; Adding a fixed amount of methylene blue, which is an ion pair of the anionic surfactant, to an aqueous solution to generate an aqueous methylene blue solution; 3) bringing the treatment liquid into contact with the aqueous methylene blue solution to form a sulfonic acid-type anionic interface; A step of preparing an aqueous solution in which the methylene blue complex of the activator is dissolved, 4) contacting the aqueous solution in which the methylene blue complex is dissolved with an organic solvent Selectively extracting the methylene blue complex into an organic solvent to produce an extract; 5) measuring the absorbance of the extract; 6) measuring the absorbance with a sulfonic acid type anionic surfactant and the absorbance Determining the amount of the sulfonic acid type anionic surfactant by interpolating the amount of the sulfonic acid type anionic surfactant.
【請求項2】 錯形成剤がアンモニアまたはエチレンジ
アミン四酢酸である請求項1記載の方法。
2. The method according to claim 1, wherein the complexing agent is ammonia or ethylenediaminetetraacetic acid.
【請求項3】 水素イオン濃度範囲であるpH8以上1
2以下で抽出液を生成する請求項1または請求項2に記
載の方法。
3. A hydrogen ion concentration range of pH 8 to 1
3. A method according to claim 1 or claim 2, wherein the extract is produced in 2 or less.
【請求項4】 スルフォン酸型陰イオン界面活性剤のメ
チレンブルーコンプレックス以外の妨害成分をあらかじ
め紫外線分光光度計により波長スキャンし、スルフォン
酸型陰イオン界面活性剤のメチレンブルーコンプレック
スの測定波長に妨害を与えない最適定量波長を選択し
て、紫外線分光光度計による吸光度測定を行う請求項1
〜3のいずれかに記載の方法。
4. An interference component other than the methylene blue complex of the sulfonic acid type anionic surfactant is scanned in advance with an ultraviolet spectrophotometer to prevent interference with the measurement wavelength of the methylene blue complex of the sulfonic acid type anionic surfactant. 2. The method according to claim 1, wherein an optimum quantitative wavelength is selected, and absorbance is measured by an ultraviolet spectrophotometer.
A method according to any one of claims 1 to 3.
JP2000242145A 2000-08-10 2000-08-10 Method for determination sulfonic acid type anionic surfactant in copper electrolytic solution Pending JP2002055097A (en)

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Publication Number Publication Date
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Family

ID=18733206

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Country Status (1)

Country Link
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010243446A (en) * 2009-04-09 2010-10-28 Ohbayashi Corp Method of measuring concentration of anionic surfactant
JP2010540974A (en) * 2007-10-09 2010-12-24 シーアールシー ケア プロプライエタリー リミテッド Detection of anionic surfactant
JP2011174113A (en) * 2010-02-23 2011-09-08 Pan Pacific Copper Co Ltd Electrolytic refiner for copper and electrolytic refining method for copper using the same
CN115060718A (en) * 2022-08-16 2022-09-16 广东环凯生物技术有限公司 Kit and method for rapidly determining anionic surfactant for water

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010540974A (en) * 2007-10-09 2010-12-24 シーアールシー ケア プロプライエタリー リミテッド Detection of anionic surfactant
JP2010243446A (en) * 2009-04-09 2010-10-28 Ohbayashi Corp Method of measuring concentration of anionic surfactant
JP2011174113A (en) * 2010-02-23 2011-09-08 Pan Pacific Copper Co Ltd Electrolytic refiner for copper and electrolytic refining method for copper using the same
CN115060718A (en) * 2022-08-16 2022-09-16 广东环凯生物技术有限公司 Kit and method for rapidly determining anionic surfactant for water
CN115060718B (en) * 2022-08-16 2022-11-29 广东环凯生物技术有限公司 Kit and method for rapidly determining anionic surfactant for water

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