JP2002033074A - Quadrupole electrode application voltage generation circuit for quadrupole mass spectrometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect a wave accurately even if a high frequency voltage is small, provide phase detection characteristic having the linear property over a wide range, and dispense with minute adjustment of a phase detection circuit every time a quadrupole mass spectrometer is used. SOLUTION: A quadrupole electrode application high frequency voltage detected in a high frequency transformer 109 is heterodyne-detected by a frequency converter 12 and an ideal rectifier 16 through an attenuator 10 to generate a voltage indicating an envelope of an applied high frequency voltage. The ideal rectifier 16 is constituted by a combination of diodes and operation amplifiers to provide ideal rectification characteristic. In addition to the method, a system in which a phase of the applied high frequency voltage is synchronized with a phase of a high frequency signal having the same frequency as the frequency to multiply them by a multiplier in order to detect an envelope and a system in which the applied high frequency voltage is switched by the phase- synchronized high frequency signal having the same frequency as high frequency of the frequency to detect an envelope in an analog switch are disclosed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer for measuring a partial pressure in a pressure measuring device for measuring a vacuum pressure below the atmospheric pressure.

[0002]

2. Description of the Related Art In a quadrupole mass spectrometer for partial pressure measurement in a pressure measuring device, opposing electrodes of quadrupole electrodes are connected to each other, and a voltage obtained by adding a high frequency voltage and a DC voltage at a certain ratio is applied to the four electrodes. By applying the voltage to the pole electrode, a so-called mass separation action is performed in which only ions corresponding to a specific mass-to-charge ratio (M / e) are selectively sieved. In a quadrupole mass spectrometer, in order to obtain a continuous mass spectrum from M / e = 1, a voltage obtained by modulating a high-frequency voltage and a DC voltage with a reference sweep voltage waveform, a reference sawtooth wave, is applied to the quadrupole electrode. I do.

A conventional circuit for generating a controlled voltage applied to the quadrupole of a quadrupole mass spectrometer is shown in FIG. FIG.
The sine-wave high-frequency voltage (frequency is approximately in the range of 1 MHz to 5 MHz) oscillated by the crystal oscillator 101 as shown in FIG.
P1) Amplify at 102 and control circuit (not shown)
Is multiplied by the reference sawtooth wave 120 input from the multiplier 103 and the amplitude of the high frequency is amplitude-modulated. The modulation output is high-frequency amplifier 2 that drives high-frequency transformer 109.
(RFAMP2) 104 and the high-frequency transformer 10
9 drives the primary coil 109a1. A high frequency voltage of about 100 V by the high frequency transformer 109 is 1000
The voltage is increased to V or more, and is superimposed on a separately sent DC voltage and applied to the quadrupole electrode 116. Two coils 109b1 forming the secondary side of the high-frequency transformer 109,
Each of 109b2 has a variable capacitor 11 in parallel.
0 and 111 are connected, and the capacitance is adjusted so as to tune to the oscillation frequency of the crystal oscillator 101. And
By taking the tuning, the circuit is brought into a parallel resonance state, the maximum voltage of the high frequency voltage is obtained, and the driving RFAM
The power of P2 104 is also minimized. High frequency transformer 10
In FIG. 9, a coil 109a2 of another winding is provided on the primary side of the high-frequency transformer 109 to monitor the voltage applied to the quadrupole electrode, and the high-frequency voltage proportional to the voltage applied to the quadrupole electrode is directly detected (note that the secondary side May be detected by inserting a voltage dividing circuit or the like into the circuit). The detected high-frequency voltage is subjected to envelope detection by a detection circuit 108, a pulsating component is removed by a low-pass filter 107, and further compared with a voltage of a reference sawtooth wave 120 from a control circuit by a comparator 105.
Then, the error is sent to the PID controller 106 to correct the error. Since the DC voltage superimposed on the high-frequency voltage must maintain a certain ratio with the high-frequency voltage, the detection voltage of the high-frequency voltage is extracted, and the + DC amplifier (+ DCAMP) 112 and -DC Amplifier (-DCA
MP) 113 to generate a pair of positive and negative DC voltages having the same magnitude and applying the same to the quadrupole electrodes via the respective coils 109b1 and 109b2 on the secondary side of the high-frequency transformer 109. The secondary coils 109b1 and 109b1
The capacitor 114 inserted between the high-frequency transformer b2 and the high-frequency transformer 109 serves to pass a high-frequency voltage and prevent the passage of a direct-current voltage, and includes + DCAMP 112 and -DCAMP 113 and secondary coils 109b1 and 109b of the high-frequency transformer 109.
9b2 and the choke 11 inserted between them.
Reference numerals 7 and 118 denote high frequency voltages from the secondary coils 109b1 and 109b2 to + DCAMP 112 and -DCAMP.
The purpose of this is to prevent the sneaking around 113.

FIG. 6 is a diagram showing a configuration of the detection circuit 108 and the low-pass filter 107 shown in FIG. The detection circuit 108 has a diode D and a resistor R, and the low-pass filter 107 is composed of a capacitor C and a resistor R connected in parallel between the cathode of the diode D and circuit ground. Note that the diode D may be a diode. The conventional detection circuit 108 employs a method of rectifying a high-frequency voltage by using a diode or a diode as described above.

However, although this method is simple, the physical characteristics of the element greatly affect the method. As shown in FIG. 2, the VI characteristic of the diode D has a dead zone where current hardly flows when the voltage is small, so that a signal having a small amplitude cannot be detected and linearity cannot be obtained in a wide range. . In addition, the temperature fluctuation of the VI characteristic of the diode D cannot be ignored, and the VI characteristic is directly used for detection, so that the detection voltage has a large temperature coefficient. Furthermore, in order to avoid the above-mentioned dead zone, detection is performed by superimposing a positive DC voltage, that is, by offsetting the detection position. However, the offset voltage is changed so as to cancel the temperature fluctuation of the VI characteristic of the diode. It is difficult to perform the adjustment, and in practice, it is required to perform manual fine adjustment which is difficult each time a temperature fluctuation occurs.

[0006]

SUMMARY OF THE INVENTION The present invention makes it possible to accurately detect a detection voltage of a high-frequency voltage applied to a quadrupole electrode, which is necessary to generate a DC voltage applied to the quadrupole electrode, even when the high-frequency voltage is small. It is another object of the present invention to provide a quadrupole mass spectrometer quadrupole electrode applied voltage generation circuit having a detection circuit which has linearity in a wide range of detection characteristics and does not need to be finely adjusted each time it is used.

[0007]

In order to solve the above-mentioned problems, a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer for applying a superimposed voltage of direct current and high frequency to a quadrupole electrode to perform a mass separation action is provided. A high-frequency voltage generator, a modulator for amplitude-modulating a high-frequency voltage generated by the high-frequency voltage generator with a reference sweep voltage, and a boosted high-frequency modulated high-frequency voltage modulated by the modulator. A booster that applies a voltage to the quadrupole electrode; and a DC voltage generator that generates a DC voltage based on a high-frequency voltage applied to the quadrupole electrode by the booster, wherein the DC voltage generator includes the booster. The quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to the present invention, comprising a detection unit for detecting an envelope level of the modulated high-frequency voltage applied to the quadrupole electrode by the unit. A detector for converting the modulated high-frequency voltage applied to the quadrupole electrode to a frequency lower than the frequency of the high-frequency voltage; and a frequency conversion unit having an ideal rectification characteristic, and converting the modulated high-frequency voltage to a lower frequency by the frequency conversion unit. An ideal rectifier for detecting the modulated high-frequency voltage with the ideal rectification characteristics.

In order to solve the above-mentioned problems, a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer according to the present invention is characterized in that the detection unit comprises: a modulated high-frequency voltage applied to the quadrupole electrode; It is characterized by comprising multiplying means for detecting the envelope level of the modulated high-frequency voltage by multiplying the modulated high-frequency voltage by a high-frequency signal having the same frequency as that of the high-frequency voltage and synchronized with the phase of the modulated high-frequency voltage.

Further, in order to solve the above-mentioned problems, a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer according to the present invention, wherein a detection unit of the quadrupole electrode applies a modulated high-frequency voltage applied to a quadrupole electrode to the modulated high-frequency voltage. And a switching unit for extracting a positive side or a negative side of the modulated high-frequency voltage waveform by switching with a high-frequency signal having the same frequency as the frequency of the modulated high-frequency voltage and phase-synchronized with the modulated high-frequency voltage. I do.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer according to the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a first preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to the present invention, mainly showing a detection circuit portion. In FIG.
Components denoted by the same reference numerals as those in FIG. 5 indicate the same or similar components, and description thereof will not be repeated. In FIG. 1, reference numeral 10 denotes an attenuator connected to the primary coil 109a2 of the high-frequency transformer 109, reference numeral 12 denotes a frequency converter in which the attenuator 10 is connected to a first input terminal, and reference numeral 14 denotes a frequency. Reference numeral 16 denotes a local oscillator connected to a second input terminal of the converter 12.
Reference numeral 18 designates an ideal rectifier whose input is connected to the output of ideal rectifier 16 and whose output is + DCAMP 112 and -DCAMP shown in FIG.
11 shows a low-pass filter connected to 113 and / or the error amplifier 106, respectively. The attenuator 10
This is for attenuating the high-frequency voltage detected from the primary coil 109a2 of the high-frequency transformer 109 to a level suitable for frequency conversion by the frequency converter 12, and can be omitted when the detection level is appropriate. . The ideal rectifier 16 can perform rectification only on the order of at most 10 kHz, and therefore cannot perform rectification at a high frequency in the range of 1 MHz to 5 MHz of the high-frequency voltage applied to the quadrupole electrode. . Therefore, a frequency converter 12 is provided, and the local oscillator 1
4 generates a high-frequency signal having a frequency separated by about 10 kHz from the frequency of the detected high-frequency voltage. The frequency converter 12 is configured by using a dual-gate FET transistor TR1, and an attenuator 10 is connected to one gate G1.
However, the local oscillator 14 is connected to the other gate G2. The drain of the FET transistor TR1
A band-pass filter is provided to pass the low-frequency voltage whose frequency has been converted and to block other high-frequency voltages and DC components. This bandpass filter is composed of a transformer Tr and a capacitor C, and an FET transistor TR1 is connected to an intermediate tap of a primary coil of the transformer Tr.
Are connected in parallel between both ends of the primary coil, and the ideal rectifier 1 is connected to the secondary coil.
6 inputs are connected. The inductance of the primary coil of the transformer Tr and the capacitance of the capacitor C are selected so as to be tuned to the frequency-converted low frequency. Further, in this embodiment, a single-tuned band-pass filter using a transformer is used. However, the present invention is not limited to this, and may be of any type. Further, a high-pass filter and a low-pass filter may be used. In short, a filter configuration having a function of passing a low-frequency voltage whose frequency has been converted and blocking a high-frequency voltage and a DC component may be used.

The ideal rectifier 16 is known and is constituted by a combination of a diode and an operational amplifier. Specifically, as shown in FIG. 1, the cathode of the diode D1 is connected to the minus terminal of the operational amplifier OP1. The anode is connected to the output of the operational amplifier OP1, the cathode of the diode D2 is connected to the output of the operational amplifier OP1, the anode forms the output of the ideal rectifier 16, and the resistor R3 is connected to the minus terminal of the operational amplifier OP1 and the diode D2. The positive terminal of the operational amplifier OP1 is connected to the circuit ground. A combination of the frequency converter 12 and the ideal rectifier 16 constitutes a well-known heterodyne detection system. The low-pass filter 18 is a known low-pass active filter using an operational amplifier OP2, a capacitor C2, and a resistor R5. In the present invention, the configuration of the low-pass filter 18 is not limited to this configuration, but may be any configuration as long as it has low-pass characteristics.

Next, the operation of the detection circuit configured as described above will be described below. The high-frequency voltage detected by the primary coil 109a2 of the high-frequency transformer 109 and proportional to the high-frequency voltage applied to the quadrupole electrode is attenuated to an appropriate level via the attenuator 10, and the FE of the frequency converter 12
It is provided to the gate G1 of the T transistor TR1. The frequency of this high frequency voltage is f1. Since a local signal (frequency is represented as f2) from the local oscillator 14 is given to the gate G2 of the FET transistor TR1, the frequency f is supplied to the drain of the FET transistor TR1.
1 is converted to a frequency (f1-f).
2) The low frequency voltage is generated. At this time, harmonic components such as f1 + f2 and DC components also occur, so these unnecessary components are removed by a band-pass filter including the transformer Tr and the capacitor C, and only the low-frequency voltage is reduced to the ideal rectifier 16.
Given to. The characteristics of the ideal rectifier 16 having the above configuration are known, have the VI characteristics as shown in FIG. 2, and have no dead zone. Therefore, even when the amplitude of the low-frequency voltage input to the ideal rectifier 16 is small, the ideal rectifier 16 can perform the detection according to the magnitude of the amplitude.

The quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to the first preferred embodiment of the present invention uses the ideal rectifier configured as described above for a quadrupole electrode applied high frequency voltage detection circuit. Therefore, accurate detection is possible even when the amplitude of the high-frequency voltage applied to the quadrupole electrode is small, the linearity is wide in a wide range, and there is no adjustment portion. Further, the temperature coefficient of the detection voltage of the ideal rectifier as a whole is significantly reduced because the temperature fluctuation of the detection voltage of the diode D2 is suppressed by the negative feedback of the operational amplifier OP1.

Next, a second preferred embodiment of a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer will be described below with reference to FIG. FIG. 3 is a diagram showing a second preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to the present invention, mainly showing a detection circuit portion. 3, components denoted by the same reference numerals as those in FIG. 5 indicate the same or similar components, and description thereof will not be repeated. In FIG. 3, reference numeral 30 denotes a multiplier in which a first input is connected to the primary coil 109a2 of the high-frequency transformer 109, a second input is connected to the output of the crystal oscillator 101, and the output is connected to the low-pass filter 107. Indicates a container. The multiplier 30 can be constituted by a commercially available semiconductor IC performing a mathematical function. The oscillation frequency of the crystal oscillator 101 is f1. High frequency transformer 10
9, the high-frequency voltage proportional to the quadrupole electrode applied high-frequency voltage (frequency f1) detected by the primary coil 109a2 and the harmonic voltage (frequency f1) from the crystal oscillator 101 are synchronized in phase (or opposite phase). Input to the multiplier 30. When the output harmonic voltage of the crystal oscillator 101 is input to the multiplier 30 without adjustment, and when the voltages of the two are not synchronized with the required in-phase (or anti-phase) relationship, for example, the output of the crystal oscillator 101 and the multiplier 30 A phase adjusting means such as a delay line may be provided therebetween. Since the frequencies of the two high-frequency voltages input to the multiplier 30 match, as shown in the output of the multiplier 30 in FIG. The envelope waveform will be detected. The fact that twice the high-frequency component also occurs in the actual circuit of the multiplier 30 is the same as in the conventional detection circuit shown in FIG. 2, but this component is removed by the low-pass filter 107 as in the conventional example. In this embodiment, the output of the crystal oscillator 101 is branched and directly input to the multiplier 30, but the present invention is not necessarily limited to this, and a PLL (phase locked loop) using a variable voltage controlled oscillator or the like may be used. A voltage synchronized with the high-frequency voltage applied to the quadrupole electrode may be generated by using the same.

The synchronous relationship between the detected high-frequency voltage in the multiplier 30 and the high-frequency signal from the crystal oscillator 101 is preferably completely in phase or in opposite phase, but the present invention is not limited to this, and the present invention is not limited to this. It can work even if it is out of phase.

In the quadrupole electrode applied voltage generation circuit for the quadrupole mass spectrometer according to the second preferred embodiment of the present invention, a semiconductor IC multiplier which performs a mathematical function is used as a quadrupole electrode applied high frequency voltage detection circuit. Since it is used, it is possible to detect accurately even when the amplitude of the high-frequency voltage applied to the quadrupole electrode is small, has linearity over a wide range, and has no adjustment portion, so that it is not necessary to make fine adjustments each time it is used.

Next, a third preferred embodiment of a quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer will be described below with reference to FIG. FIG. 4 is a diagram showing a third preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to the present invention, mainly showing a detection circuit portion. 4, components denoted by the same reference numerals as those in FIG. 5 indicate the same or similar components, and description thereof will not be repeated. In FIG. 4, reference numeral 40 denotes a semiconductor analog switch including a MOS-FET or the like having a high switching speed and a low on-resistance, and constitutes a detection circuit according to the third preferred embodiment. The analog switch 40 includes a primary coil 109 a of the high-frequency transformer 109.
A semiconductor switch unit 42 having a first input terminal connected to the second input terminal, a second input terminal connected to the circuit ground, and an output terminal connected to the low-pass filter 107; Buffer amplifier 4 for outputting a signal for switching switch section 42
4 is included.

The operation of the detection circuit configured as described above will be described below. The high frequency signal from the crystal oscillator 101 switches the switch section 42 between the first input terminal and the second input terminal via the buffer amplifier 44 of the analog switch 40. The switching timing is such that the switch unit 42 is connected to the first input terminal while the quadrupole electrode applied high-frequency voltage waveform detected from the primary coil 109a2 of the high-frequency transformer 109 is on the positive side (or the negative side). (Or positive) while connected to a second input terminal connected to circuit ground. When switching is performed in this manner, the output of the switch section 42 of the analog switch 40 is output to the positive side (or the negative side) of the quadrupole electrode applied high-frequency voltage waveform as shown in the corresponding part of FIG. ) Can be extracted. The frequency of the high-frequency voltage applied to the quadrupole electrode is the same as the oscillation frequency of the crystal oscillator 101, and since there is no particular delay element, phase synchronization can generally be achieved without phase adjustment. Phase synchronization means such as a delay line may be provided between the buffer amplifier 44 and the buffer amplifier 44 to achieve phase synchronization. Note that it is preferable to completely extract only the positive side (or the negative side) of the quadrupole electrode applied high-frequency voltage waveform by synchronizing the phases. If the part of ()) can be extracted, it can operate. The operation of the analog switch 40 is exactly the same as the detection of the diode. However, since the switch is a switch, even when the amplitude of the high frequency voltage applied to the quadrupole electrode is small, a small amplitude can be accurately output. Detection can be performed accurately.

A quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to a third preferred embodiment of the present invention uses the analog switch configured as described above for a quadrupole electrode applied high frequency voltage detection circuit. Therefore, accurate detection is possible even when the amplitude of the high-frequency voltage applied to the quadrupole electrode is small, the linearity is wide in a wide range, and there is no adjustment portion. Further, since the detection voltage is generated by the analog switch, the detection voltage does not fluctuate in temperature.

In the above embodiment, the detection circuit for generating the DC voltage applied to the quadrupole electrode has been described. However, this detection circuit is applied to the quadrupole electrode similarly to the prior art circuit shown in FIG. As a circuit for generating a detection voltage to be applied to the error amplifier in order to make the magnitude of the high-frequency voltage to be a desired value, or as a detection circuit for generating a detection voltage to be applied to the error amplifier independent of the DC voltage generation It is also possible to use.

In the above embodiment, the high-frequency voltage for detection is converted to the primary coil 109 of the high-frequency transformer 109.
a2, the present invention is not limited to this configuration. In other words, a quadrupole electrode 1 is inserted, for example, by inserting a voltage dividing circuit on the secondary side.
Any method may be used as long as a high-frequency voltage proportional to the high-frequency voltage applied to 16 is detected.

[0023]

According to one aspect of the present invention, the detecting unit converts the modulated high-frequency voltage applied to the quadrupole electrode into a frequency lower than the frequency of the high-frequency voltage, and the ideal rectification characteristic. And an ideal rectifier for detecting the modulated high-frequency voltage converted to a low frequency by the frequency conversion means with the ideal rectification characteristic, so that even when the amplitude of the quadrupole electrode applied high-frequency voltage is small, , And has linearity over a wide range, and there is no adjustment part, so there is no need to make fine adjustments each time it is used.
Further, according to an embodiment of the present invention, the temperature coefficient of the detection voltage of the ideal rectifier as a whole is significantly reduced because the temperature coefficient of the detection voltage of the diode D2 is suppressed by the negative feedback of the operational amplifier OP1.

According to another aspect of the present invention, the detection section has a modulated high-frequency voltage applied to the quadrupole electrode, a frequency equal to the frequency of the modulated high-frequency voltage, and And a multiplying means for multiplying the high-frequency signal phase-synchronized with the high-frequency signal to detect an envelope level of the modulated high-frequency voltage. Since it has linearity and has no adjustment portion, there is no need to make fine adjustments each time it is used.

According to still another aspect of the present invention, the detector switches the modulated high-frequency voltage applied to the quadrupole electrode with a high-frequency signal having the same frequency as the modulated high-frequency voltage, Is provided, a small amplitude can be accurately output even when the amplitude of the high-frequency voltage applied to the quadrupole electrode is small, that is, the small amplitude can be accurately detected. In addition, there is no need to make fine adjustments each time it is used since it has linearity over a wide range and has no adjustment portion.
Further, since the detection voltage is generated by the analog switch, the detection voltage does not fluctuate in temperature.

[Brief description of the drawings]

FIG. 1 is a diagram showing a first preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer of the present invention, mainly showing a detection circuit portion.

FIG. 2 is a diagram showing VI characteristics of a diode D and rectification characteristics of an ideal rectifier.

FIG. 3 is a diagram showing a second preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer of the present invention, mainly showing a detection circuit portion.

FIG. 4 is a diagram mainly showing a detection circuit portion of a third preferred embodiment of a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer of the present invention.

FIG. 5 shows a conventional circuit for generating a controlled voltage applied to the quadrupole of a quadrupole mass spectrometer.

6 is a diagram illustrating a configuration of a detection circuit and a low-pass filter 107 illustrated in FIG. 5;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Attenuator 12 Frequency converter 14 Local oscillator 16 Ideal rectifier 18 Low-pass filter 30 Multiplier 40 Analog switch 101 Crystal oscillator 102 High-frequency amplifier 1 (RFAMP1) 104 High-frequency amplifier 2 (RFAMP2) 105 Comparator 106 PID controller 107 Low-pass filter 108 Detection Circuit 109 High-frequency transformer 116 Quadrupole electrode 112 + DC amplifier (+ DCAMP) 113-DC amplifier (-DCAMP)

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Seiji Hiroki 801 Mukaiyama, Naka-cho, Naka-machi, Naka-gun, Ibaraki Pref. F-term in Remufu Craft Co., Ltd. (reference) 5C038 JJ06 JJ07

Claims (4)

[Claims] A quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer for applying a superimposed voltage of direct current and high frequency to a quadrupole electrode to perform a mass separation action, comprising: a high frequency voltage generation unit; A modulator for amplitude-modulating a high-frequency voltage generated by the generator with a reference sweep voltage; a booster for boosting the high-frequency voltage modulated by the modulator and applying the boosted modulated high-frequency voltage to the quadrupole electrode And a DC voltage generator for generating a DC voltage based on the high-frequency voltage applied to the quadrupole electrode by the booster, wherein the DC voltage generator is configured to receive the DC voltage applied to the quadrupole electrode by the booster. In a quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer, which has a detection unit for detecting an envelope level of a modulated high-frequency voltage, the detection unit includes a detector applied to the quadrupole electrode. Frequency conversion means for converting the modulated high-frequency voltage to a frequency lower than the frequency of the high-frequency voltage, and having the ideal rectification characteristic, the modulated high-frequency voltage converted to a low frequency by the frequency conversion means is converted by the ideal rectification characteristic. A quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer, comprising: an ideal rectifier for detecting the voltage. 2. The quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer according to claim 1, wherein said ideal rectifier is constituted by a combination of a diode and an operational amplifier. 3. A quadrupole electrode applied voltage generating circuit for a quadrupole mass spectrometer for applying a superimposed DC and high frequency voltage to a quadrupole electrode to perform a mass separation action, comprising: a high-frequency voltage generating unit; A modulator for amplitude-modulating a high-frequency voltage generated by the generator with a reference sweep voltage; a booster for boosting the high-frequency voltage modulated by the modulator and applying the boosted modulated high-frequency voltage to the quadrupole electrode And a DC voltage generator for generating a DC voltage based on the high-frequency voltage applied to the quadrupole electrode by the booster, wherein the DC voltage generator is configured to receive the DC voltage applied to the quadrupole electrode by the booster. In a quadrupole mass spectrometer quadrupole electrode applied voltage generation circuit having a detection unit for detecting an envelope level of a modulated high-frequency voltage, the detection unit includes a detector applied to the quadrupole electrode. Multiplying means for detecting the envelope level of the modulated high-frequency voltage by multiplying the modulated high-frequency voltage by a high-frequency signal having the same frequency as the frequency of the modulated high-frequency voltage and phase-synchronized with the modulated high-frequency voltage. A quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer. 4. A quadrupole electrode applied voltage generation circuit for a quadrupole mass spectrometer for applying a superimposed voltage of direct current and high frequency to a quadrupole electrode to perform a mass separation action, comprising: a high-frequency voltage generation unit; A modulator for amplitude-modulating a high-frequency voltage generated by the generator with a reference sweep voltage; a booster for boosting the high-frequency voltage modulated by the modulator and applying the boosted modulated high-frequency voltage to the quadrupole electrode And a DC voltage generator for generating a DC voltage based on the high-frequency voltage applied to the quadrupole electrode by the booster, wherein the DC voltage generator is configured to receive the DC voltage applied to the quadrupole electrode by the booster. In a quadrupole mass spectrometer quadrupole electrode applied voltage generation circuit having a detection unit for detecting an envelope level of a modulated high-frequency voltage, the detection unit includes a detector applied to the quadrupole electrode. Switching the modulated high-frequency voltage with a high-frequency signal having the same frequency as the frequency of the modulated high-frequency voltage and phase-synchronized with the modulated high-frequency voltage to extract the positive or negative side of the modulated high-frequency voltage waveform Means for generating a voltage applied to a quadrupole electrode for a quadrupole mass spectrometer.