JP2002031082A - Molecular pump - Google Patents
Molecular pumpInfo
- Publication number
- JP2002031082A JP2002031082A JP2000220009A JP2000220009A JP2002031082A JP 2002031082 A JP2002031082 A JP 2002031082A JP 2000220009 A JP2000220009 A JP 2000220009A JP 2000220009 A JP2000220009 A JP 2000220009A JP 2002031082 A JP2002031082 A JP 2002031082A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic body
- molecular pump
- casing
- coil
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は半導体、液晶製造装
置等に用いられる分子ポンプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a molecular pump used for a semiconductor, a liquid crystal manufacturing apparatus and the like.
【０００２】[0002]
【従来の技術】半導体や液晶の製造装置等において、し
ばしば使用される複合分子ポンプは、ハウジング内にタ
ーボ分子ポンプ部とねじ溝真空ポンプ部とを順次配列し
て有しており、これらポンプによって凝縮性を有する気
体の排気を行なっている。2. Description of the Related Art A complex molecular pump often used in a semiconductor or liquid crystal manufacturing apparatus has a turbo molecular pump section and a thread groove vacuum pump section sequentially arranged in a housing. Exhaust of gas with condensability.
【０００３】前記凝縮性を有する気体が前記ポンプ内に
凝着するのを防止するために、従来はケーシングの外周
にヒーターを巻き付けて加熱を行ない、該ケーシングか
らの熱伝達によって内部のねじ溝真空ポンプ部のステー
タ等の温度を８０℃程度に昇温させるようにしていた。Conventionally, in order to prevent the condensable gas from adhering to the inside of the pump, a heater is conventionally wound around the outer periphery of a casing, and heat is transferred from the casing to form an internal thread groove vacuum. The temperature of the stator and the like of the pump section was raised to about 80 ° C.
【０００４】[0004]
【発明が解決しようとする課題】しかし、ねじ溝真空ポ
ンプ部のステータの温度を８０℃程度に昇温させるため
には、前記ケーシングを１００℃以上に加熱する必要が
あり、このため、ケーシングの外側にやけど防止用のカ
バーを設置する必要があった。However, in order to raise the temperature of the stator of the thread groove vacuum pump to about 80 ° C., it is necessary to heat the casing to 100 ° C. or more. It was necessary to install a cover to prevent burns on the outside.
【０００５】又、熱伝導や熱放射による熱損失が多く、
加熱効率が悪いという問題があった。In addition, heat loss due to heat conduction and heat radiation is large,
There was a problem that the heating efficiency was poor.
【０００６】本発明はこれらの問題点を解消し、ケーシ
ングの外部の温度上昇が抑えられると共に加熱効率の良
い加熱装置を備えた分子ポンプを提供することを目的と
する。An object of the present invention is to solve these problems and to provide a molecular pump provided with a heating device capable of suppressing a rise in temperature outside the casing and having high heating efficiency.
【０００７】[0007]
【課題を解決するための手段】本発明は上記の目的を達
成すべく、ケーシングの一部を高電気抵抗を有する強磁
性材料からなる第１磁性体に形成すると共に該第１磁性
体の内周部に交流電源と接続したコイルを巻設し、更に
該コイルの内周部に低電気抵抗を有する強磁性材料から
なる第２磁性体を設置して、これら第１磁性体と第２磁
性体とが前記コイルを取り囲む構造としたことを特徴と
する。According to the present invention, in order to achieve the above object, a part of a casing is formed of a first magnetic body made of a ferromagnetic material having a high electric resistance, and a part of the first magnetic body is formed of the first magnetic body. A coil connected to an AC power supply is wound around the periphery, and a second magnetic body made of a ferromagnetic material having a low electric resistance is installed around the inner periphery of the coil. A body surrounds the coil.
【０００８】[0008]
【発明の実施の形態】本発明の第１の実施の形態を図１
により説明する。FIG. 1 shows a first embodiment of the present invention.
This will be described below.
【０００９】図１は第１の実施の形態の複合分子ポンプ
１の縦断面図を示し、１ａが吸気口、１ｂが排気口であ
る。FIG. 1 is a longitudinal sectional view of a composite molecular pump 1 according to a first embodiment, wherein 1a is an intake port, and 1b is an exhaust port.
【００１０】複合分子ポンプ１はターボ分子ポンプ部２
とねじ溝真空ポンプ部３とからなり、ターボ分子ポンプ
部２は複数段の動翼段２ａと複数段の静翼段２ｂとから
なる。The composite molecular pump 1 is a turbo molecular pump unit 2
The turbo molecular pump unit 2 includes a plurality of moving blade stages 2a and a plurality of stationary blade stages 2b.
【００１１】動翼段２ａはロータ４の上部に固定されて
おり、静翼段２ｂは上部ケーシング６ａに固定されてい
る。The moving blade stage 2a is fixed to the upper part of the rotor 4, and the stationary blade stage 2b is fixed to the upper casing 6a.
【００１２】尚、前記上部ケーシング６ａはアルミ合金
等の非磁性材料からなっている。The upper casing 6a is made of a non-magnetic material such as an aluminum alloy.
【００１３】前記ねじ溝真空ポンプ部３は２パス式で、
前記ロータ４の下部に形成された円筒状部４ａの外側に
該円筒状部４ａと僅かな間隙を存して配設された第１ス
テータ３ａと、前記円筒状部４ａの内側に前記円筒状部
４ａと僅かな間隙を存して配設された第２ステータ３ｂ
とからなる。The thread groove vacuum pump section 3 is of a two-pass type.
A first stator 3a disposed outside the cylindrical portion 4a formed at the lower portion of the rotor 4 with a slight gap from the cylindrical portion 4a; and a cylindrical member 4a inside the cylindrical portion 4a. The second stator 3b disposed with a slight gap from the portion 4a
Consists of
【００１４】即ち、本実施の形態のねじ溝真空ポンプ部
３は、前記円筒状部４ａの外周に設けた第１ねじ溝４ｂ
と、前記第２ステータ３ｂの外周に設けた第２ねじ溝３
ｃの２つのねじ溝を有している。That is, the screw groove vacuum pump section 3 of the present embodiment is provided with a first screw groove 4b provided on the outer periphery of the cylindrical portion 4a.
And a second thread groove 3 provided on the outer periphery of the second stator 3b.
c has two thread grooves.
【００１５】尚、前記ロータ４は回転シャフト５に固定
されており、該回転シャフト５は磁気軸受７等により回
動自在に支承されている。The rotor 4 is fixed to a rotating shaft 5, and the rotating shaft 5 is rotatably supported by a magnetic bearing 7 or the like.
【００１６】前記第１ステータ３ａは軟鋼などの抵抗率
が１０×１０−８乃至２０×１０− ８Ωｍの低電気抵抗
を有する強磁性材料からなり、該第１ステータ３ａが第
２磁性体を形成している。[0016] The first stator 3a resistivity such as mild steel 10 × 10 -8 to 20 × 10 - a ferromagnetic material having a low electrical resistance of 8 [Omega] m, the first stator 3a is a second magnetic body Has formed.
【００１７】又、前記上部ケーシング６ａの下方で複数
のブラケット６ｂ、６ｃ、６ｄ及び６ｅからなる中間ケ
ーシング部は、Ｓｉ−Ｆｅ合金又はＡｌ−Ｆｅ合金など
の高電気抵抗を有する強磁性材料からなり、これら６ｂ
乃至６ｅが第１磁性体を形成している。Further, an intermediate casing portion including a plurality of brackets 6b, 6c, 6d and 6e below the upper casing 6a is made of a ferromagnetic material having a high electric resistance such as a Si-Fe alloy or an Al-Fe alloy. , These 6b
6e form a first magnetic body.
【００１８】即ち、シリコン（Ｓｉ）を４．５パーセン
ト含むＳｉ−Ｆｅ合金は６２．５×１０−８Ωｍの抵抗
率を有しており、これは軟鋼の抵抗率の３．１倍乃至
６．３倍に相当する。That is, a Si—Fe alloy containing 4.5% silicon (Si) has a resistivity of 62.5 × 10 −8 Ωm, which is 3.1 to 6 times the resistivity of mild steel. .3 times.
【００１９】又、アルミニウム（Ａｌ）を１６パーセン
ト含むＡｌ−Ｆｅ合金は１．４６×１０−６Ωｍ抵抗率
を有しており、これは軟鋼の抵抗率の７．３倍乃至１
４．６倍に相当する。尚、これら合金のシリコン又はア
ルミニウムの含有量を少なくすると、これら含有量に略
比例して抵抗率が減少することが知られている。The Al—Fe alloy containing 16% aluminum (Al) has a resistivity of 1.46 × 10 −6 Ωm, which is 7.3 times to 1 times the resistivity of mild steel.
Equivalent to 4.6 times. It is known that when the content of silicon or aluminum in these alloys is reduced, the resistivity decreases substantially in proportion to the content.
【００２０】８はコイルで円環状に形成されており、前
記第１磁性体の各ブラケット６ｂ乃至６ｅと前記第２磁
性体の第１ステータ３ａとにより、該コイル８は周囲を
取り囲まれている。Reference numeral 8 denotes a coil, which is formed in an annular shape. The coil 8 is surrounded by the brackets 6b to 6e of the first magnetic body and the first stator 3a of the second magnetic body. .
【００２１】６ｆは下部ケーシングで、アルミ合金等の
非磁性材料からなる。Reference numeral 6f denotes a lower casing made of a nonmagnetic material such as an aluminum alloy.
【００２２】前記上部ケーシング６ａと前記中間ケーシ
ング部との間、及び前記下部ケーシング６ｆと前記中間
ケーシングとの間には、それぞれ断熱材９ａ又は９ｂを
介在させてケーシング相互間の熱伝達を阻むようにして
いる。A heat insulating material 9a or 9b is interposed between the upper casing 6a and the intermediate casing portion and between the lower casing 6f and the intermediate casing so as to prevent heat transfer between the casings. I have.
【００２３】次に本実施の形態の複合分子ポンプ１の作
動及び効果について説明する。Next, the operation and effects of the composite molecular pump 1 according to this embodiment will be described.
【００２４】複合分子ポンプ１のコイル８に交流電圧を
印加すると、該コイル８を取り囲む磁性体内に交番磁界
が誘起され、この交番磁界によって磁性体内に渦電流を
生じ、ジュール熱が発生する。When an AC voltage is applied to the coil 8 of the composite molecular pump 1, an alternating magnetic field is induced in the magnetic material surrounding the coil 8, and the alternating magnetic field generates an eddy current in the magnetic material, generating Joule heat.
【００２５】第２磁性体を形成する第１ステータ３ａは
低電気抵抗であるため、流れる渦電流量が大となり、発
熱量も大となる。一方、第１磁性体を形成する各ブラケ
ット６ｂ乃至６ｅは高電気抵抗であるため、第１磁性体
側の発熱量は第２磁性体側よりも少なくなる。Since the first stator 3a forming the second magnetic body has a low electric resistance, the amount of flowing eddy current increases and the amount of heat generated also increases. On the other hand, since the brackets 6b to 6e forming the first magnetic body have high electric resistance, the amount of heat generated on the first magnetic body side is smaller than that on the second magnetic body side.
【００２６】このようにして、昇温の必要な第１ステー
タ３ａをブラケット６ｂ、６ｃ、６ｄ及び６ｅからなる
中間ケーシング部よりも高温に昇温させて、凝縮性を有
する気体がねじ溝真空ポンプ部３に凝着するのを防止す
ることができる。In this way, the temperature of the first stator 3a, which needs to be raised, is raised to a higher temperature than that of the intermediate casing portion composed of the brackets 6b, 6c, 6d, and 6e, so that condensable gas is supplied to the screw groove vacuum pump Adhesion to the part 3 can be prevented.
【００２７】又、コイル８を第１磁性体と第２磁性体と
で取り囲んで磁路を形成したので、漏洩磁束損失が少な
く、少ない消費電力で効率的にねじ溝真空ポンプ部の加
熱を行なえる。Further, since the magnetic path is formed by surrounding the coil 8 with the first magnetic material and the second magnetic material, the leakage magnetic flux loss is small, and the screw groove vacuum pump can be efficiently heated with low power consumption. You.
【００２８】尚、前記中間ケーシング部を複数のブラケ
ット６ｂ乃至６ｅに分割したのは分子ポンプの分解組立
て上の便宜を図ったものであり、分割箇所は本実施例と
異なってもよい。The intermediate casing is divided into a plurality of brackets 6b to 6e for the convenience of disassembling and assembling the molecular pump, and the division may be different from that of the present embodiment.
【００２９】本発明の第２の実施の形態を図２により説
明する。A second embodiment of the present invention will be described with reference to FIG.
【００３０】図２は第２の実施の形態の複合分子ポンプ
１０の縦断面図を示し、アルミ合金等の非磁性の材料か
らなるケーシング１１の外周部に円環状のコイル８を巻
設し、該ケーシング１１の内周部の前記コイル８と相対
する位置に低電気抵抗を有する強磁性材料からなる第１
ステータ３ａを配置している。FIG. 2 is a longitudinal sectional view of a composite molecular pump 10 according to a second embodiment. An annular coil 8 is wound around an outer periphery of a casing 11 made of a nonmagnetic material such as an aluminum alloy. A first portion made of a ferromagnetic material having a low electric resistance is provided at a position on the inner peripheral portion of the casing 11 opposite to the coil 8.
The stator 3a is arranged.
【００３１】即ち、前記第１の実施の形態における第１
磁性体を排除して、第２磁性体だけを有する構造とし
た。That is, the first embodiment of the first embodiment
A structure having only the second magnetic body without the magnetic body was adopted.
【００３２】本実施の形態もコイル８に交流電圧を印加
することにより、第１ステータ３ａを加熱して凝着防止
を行なう。In the present embodiment, by applying an AC voltage to the coil 8, the first stator 3a is heated to prevent adhesion.
【００３３】本実施の形態は、前記第１の実施の形態よ
りも漏洩磁束損失は増大するが、分子ポンプの製造コス
トを低減することができる。In the present embodiment, although the leakage magnetic flux loss increases as compared with the first embodiment, the manufacturing cost of the molecular pump can be reduced.
【００３４】尚、前記第１の実施の形態及び前記第２の
実施の形態において、これら分子ポンプ１及び１０は複
合分子ポンプであるとしたが、これらはターボ分子ポン
プ部を有しないねじ溝真空ポンプのみからなるものであ
ってもよい。In the first embodiment and the second embodiment, it is assumed that the molecular pumps 1 and 10 are composite molecular pumps, but they are thread groove vacuum having no turbo molecular pump. It may be composed of only a pump.
【００３５】[0035]
【発明の効果】このように本発明によれば、分子ポンプ
のケーシングの外周温度を余り上昇させないで、ねじ溝
真空ポンプ部の温度を上昇させてガスの凝着の防止を図
ることができると共に、加熱のための消費電力を少なく
できる効果を有する。As described above, according to the present invention, it is possible to prevent gas adhesion by increasing the temperature of the screw groove vacuum pump without increasing the outer peripheral temperature of the casing of the molecular pump. This has the effect of reducing power consumption for heating.
【図１】本発明の分子ポンプの第１の実施の形態の縦断
面図である。FIG. 1 is a longitudinal sectional view of a first embodiment of a molecular pump according to the present invention.
【図２】本発明の分子ポンプの第２の実施の形態の縦断
面図である。FIG. 2 is a longitudinal sectional view of a second embodiment of the molecular pump of the present invention.
１、１０ 分子ポンプ ３ ねじ溝真空ポンプ部 ３ａ 第２磁性体（ステータ） ６ｂ、６ｃ、６ｄ、６ｅ 第１磁性体（ブラケット） ８ コイル ９ａ、９ｂ 断熱材 1, 10 molecular pump 3 screw groove vacuum pump section 3a second magnetic body (stator) 6b, 6c, 6d, 6e first magnetic body (bracket) 8 coil 9a, 9b heat insulating material
Claims (4)
−８Ωｍ以上の高電気抵抗を有する強磁性材料からなる
第１磁性体に形成すると共に該第１磁性体の内周部に交
流電源と接続したコイルを巻設し、更に該コイルの内周
部に抵抗率２０×１０−８Ωｍ以下の低電気抵抗を有す
る強磁性材料からなる第２磁性体を設置して、これら第
１磁性体と第２磁性体とが前記コイルを取り囲む構造と
したことを特徴とする分子ポンプ。(1) A part of a casing is formed to have a resistivity of 60 × 10
A first magnetic body made of a ferromagnetic material having a high electric resistance of −8 Ωm or more, and a coil connected to an AC power supply is wound around an inner periphery of the first magnetic body. A second magnetic body made of a ferromagnetic material having a low electrical resistance of 20 × 10 −8 Ωm or less is provided in the portion, and the first magnetic body and the second magnetic body surround the coil. A molecular pump characterized in that:
に交流電源と接続したコイルを巻設すると共に、該ケー
シングの内周部に抵抗率２０×１０−８Ωｍ以下の低電
気抵抗を有する強磁性材料からなる第２磁性体を設置し
たことを特徴とする分子ポンプ。2. A coil connected to an AC power supply is wound around an outer peripheral portion of a casing made of a non-magnetic material, and a low electric resistance having a resistivity of 20 × 10 −8 Ωm or less is formed on an inner peripheral portion of the casing. A molecular pump comprising a second magnetic body made of a magnetic material.
空ポンプ部のステータに形成したことを特徴とする請求
項１又は請求項２に記載の分子ポンプ。3. The molecular pump according to claim 1, wherein the second magnetic body is formed on a stator of a screw groove vacuum pump section of the molecular pump.
両端部に断熱材を配設したことを特徴とする請求項１に
記載の分子ポンプ。4. The molecular pump according to claim 1, wherein heat insulating materials are provided at upper and lower ends of the first magnetic body of the casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000220009A JP4566354B2 (en) | 2000-07-21 | 2000-07-21 | Molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000220009A JP4566354B2 (en) | 2000-07-21 | 2000-07-21 | Molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002031082A true JP2002031082A (en) | 2002-01-31 |
| JP4566354B2 JP4566354B2 (en) | 2010-10-20 |
Family
ID=18714692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000220009A Expired - Lifetime JP4566354B2 (en) | 2000-07-21 | 2000-07-21 | Molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4566354B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003269370A (en) * | 2002-03-12 | 2003-09-25 | Boc Edwards Technologies Ltd | Pump device |
| JP2009150398A (en) * | 2007-12-20 | 2009-07-09 | Edwards Ltd | Vacuum pump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3659725B2 (en) * | 1996-01-12 | 2005-06-15 | アイカ工業株式会社 | Connection method of non-magnetic material by high frequency induction heating |
| JPH09324789A (en) * | 1996-06-05 | 1997-12-16 | Daikin Ind Ltd | Vacuum pump |
| JPH1016435A (en) * | 1996-06-28 | 1998-01-20 | Sony Corp | Electromagnetic induction heating bookbinding device |
-
2000
- 2000-07-21 JP JP2000220009A patent/JP4566354B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003269370A (en) * | 2002-03-12 | 2003-09-25 | Boc Edwards Technologies Ltd | Pump device |
| JP2009150398A (en) * | 2007-12-20 | 2009-07-09 | Edwards Ltd | Vacuum pump |
| US8608459B2 (en) | 2007-12-20 | 2013-12-17 | Edwards Limited | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4566354B2 (en) | 2010-10-20 |
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