JP2002031062A - Liquid jetting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jetting device allowing the structure and manufacturing process to be simplified and the costs to be reduced. SOLUTION: The liquid jetting device is composed of a nozzle plate 17 in which a nozzle opening 3 is bored, a passage forming plate 13 furnished with a pressure generating chamber 2 in communication with the nozzle opening 3 and an ink storing chamber 4 in communication thereto to serve as a passage space other than the pressure generating chamber 2, a vibrating plate 11 laminated on the plate 13 to seal the opening, and a piezoelectric oscillator 6 of deflective vibration mode to vibrate the plate 11 for generating a pressure in the chamber 2. Because the pressure generating chamber 2 and ink storing chamber 4 are formed in one passage forming plate 13, a recording head can be constituted with less number of parts and the structure and manufacturing process can be simplified and the costs be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid ejecting apparatus for ejecting a liquid droplet from a nozzle opening by vibrating a piezoelectric vibrator.

[0002]

2. Description of the Related Art A liquid ejecting apparatus using a piezoelectric vibrator (in the following description, an example in which the present invention is applied to an ink jet type recording head, and is referred to as a "recording head") is generally provided with an upper surface as shown in FIG. An actuator unit 1 on which a piezoelectric vibrator 6 is adhered and a pressure generating chamber 2 corresponding to the piezoelectric vibrator 6 is formed, and a nozzle opening 3 and an ink storage chamber 4 are formed and adhered on the lower surface of the actuator unit 1 The pressure generating chamber 2 is configured to generate pressure by the vibration of the piezoelectric vibrator 6 and eject ink droplets from the nozzle openings 3.

The actuator unit 1 includes a pressure generating chamber forming plate 1 in which a space for forming a pressure generating chamber 2 is formed.
0, a vibrating plate 11 located on the upper surface of the pressure generating chamber forming plate 10 and closing the upper opening of the space, and a communication hole forming plate 14 located on the lower surface of the pressure generating chamber forming plate 10. . The communication hole forming plate 14 has a communication hole 12 for communicating the ink storage chamber 4 and the pressure generating chamber 2, and a communication path 8 for communicating the pressure generating chamber 2 and the nozzle opening 3.

In the actuator unit 1, a common lower electrode 19 is formed on the upper surface of the vibration plate 11. Then, a flat plate-shaped piezoelectric vibrator 6 is formed on the upper surface of the lower electrode 19, and on the upper surface of the piezoelectric vibrator 6,
An individual upper electrode 20 is formed. Then, a drive signal is input to the piezoelectric vibrator 6 via the lower electrode 19 and the upper electrode 20.

On the other hand, the flow channel unit 5 includes an ink storage chamber forming plate 1 in which a space for forming the ink storage chamber 4 is formed.
6, a nozzle plate 17 having a nozzle opening 3 formed therein and located on the lower surface of the ink storage chamber forming plate 16, and a supply port forming plate 1 located on the upper surface of the ink storage chamber forming plate 16.
And 8. The ink storage chamber forming plate 16
Is formed with a communication passage 8 for communicating the pressure generating chamber 2 with the nozzle opening 3. The supply port forming plate 18 is provided with an ink supply port 9 for supplying ink from the ink storage chamber 4 to the pressure generation chamber 2 through the communication hole 12, and the pressure generation chamber 2 and the nozzle opening 3. Is formed in the communication passage 8 for communicating the.

The actuator unit 1 includes a vibration plate 11 made of ceramics and a pressure generating chamber forming plate 1.
0, a communication hole forming plate 14 is laminated and integrally fired. On the other hand, in the flow channel unit 5, a supply port forming plate 18, an ink storage chamber forming plate 16, and a nozzle plate 17 made of stainless steel are laminated via an adhesive layer 15. The actuator unit 1 and the flow path unit 5 are joined via an adhesive layer 15.

[0007]

However, in the above-mentioned recording head, the pressure generating chamber 2, the ink storage chamber 4, and the ink supply port 9 are formed by the pressure generation chamber forming plate 10, the ink storage chamber forming plate 16, and the supply port forming plate, respectively. 18 are formed on a separate plate. For this reason, it is necessary to stack a plurality of parts in order to communicate the pressure generating chamber 2 with the ink storage chamber 4 and the nozzle opening 3, which complicates the structure and the manufacturing process and causes an increase in cost. In addition, since the actuator unit 1 is made of ceramics and the flow path unit 5 is made of stainless steel, and these are joined with an adhesive, distortion or peeling occurs due to a difference in the thermal contraction rate or the linear expansion coefficient of the bonded portion. There is a risk. Further, since the ink comes into direct contact with the stainless steel or the adhesive, for example, an ink having an etching action on the stainless steel or an ink that elutes the adhesive cannot be used, and the characteristics and characteristics of the ink used are In fact, there are some limitations in the field of application.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and a first object of the present invention is to provide a liquid ejecting apparatus capable of simplifying a structure and a manufacturing process and reducing costs. It is a second object of the present invention to provide a liquid ejecting apparatus in which the type of liquid to be used and the field of application are reduced and the restriction is reduced.

[0009]

In order to achieve the above object, a liquid ejecting apparatus according to the present invention comprises a nozzle plate having a nozzle opening, a pressure generating chamber communicating with the nozzle opening, and a pressure generating chamber. A flow path forming plate in which a flow path space other than the communicating pressure generating chamber is formed; a vibrating plate laminated on the flow path forming plate to seal an opening; and vibrating the vibrating plate to apply pressure to the pressure generating chamber. And a piezoelectric vibrator in a bending vibration mode that generates the vibration.

That is, in the liquid ejecting apparatus according to the present invention, the nozzle plate having the nozzle opening formed therein, the pressure generating chamber communicating with the nozzle opening, and the passage space other than the pressure generating chamber communicating with the pressure generating chamber are formed. And a formed flow path forming plate. As described above, since the pressure generating chamber and the flow path space other than the pressure generating chamber communicating with the pressure generating chamber are formed in one flow path forming plate, the recording head is configured as compared with the related art. The number of parts is reduced, the structure and the manufacturing process are simplified, and the cost can be reduced.

In the liquid ejecting apparatus according to the present invention, the flow path space other than the pressure generating chamber may be a liquid storing chamber for storing liquid supplied to the pressure generating chamber, or may be provided from the liquid storing chamber to the pressure generating chamber. When a liquid supply path forming plate provided with a liquid supply path for supplying liquid and a communication path for communicating the nozzle opening with the pressure generation chamber is provided, the pressure generation chamber and the liquid storage are formed in one flow path formation plate. A chamber is formed, the number of parts constituting the recording head is reduced correspondingly, the structure and the manufacturing process are simplified, and the cost can be reduced.

In the liquid ejecting apparatus according to the present invention, a supply port for supplying liquid from the liquid supply path to the pressure generating chamber, and a liquid supply path and the liquid storage chamber are provided between the liquid supply path forming plate and the flow path forming plate. When a supply port forming plate having a communication hole for communicating the pressure is laminated, the liquid supply port exists between the pressure generation chamber and the liquid supply path, so that the pressure fluctuation in the pressure generation chamber is The transmission to the storage chamber is alleviated, and crosstalk through the liquid storage chamber is suppressed.

In the liquid ejecting apparatus according to the present invention, both the supply port forming plate and the liquid supply path forming plate, or a portion of the liquid supply path forming plate corresponding to the liquid storage chamber, forms a part of the liquid storage chamber. Is formed, a space serving as a liquid storage chamber is also provided in the supply port forming plate and the liquid supply path forming plate, so that the space can be effectively utilized, and the capacity of the liquid storage chamber can be provided with a margin. Thus, the flow path resistance is reduced, and the crosstalk via the liquid storage chamber is also reduced.

In the liquid ejecting apparatus according to the present invention, the flow path space other than the pressure generating chamber may be a liquid supply path for supplying liquid to the pressure generating chamber, or may be supplied to the pressure generating chamber via the liquid supply path. When a liquid storage chamber forming plate in which a liquid storing chamber for storing liquid to be formed is formed is provided, a pressure generating chamber and a liquid supply path are formed in one flow path forming plate, and the recording head is correspondingly formed. The number of constituent parts is reduced, the structure and the manufacturing process are simplified, and the cost can be reduced.

In the liquid ejecting apparatus according to the present invention, when a space constituting a part of the liquid storage chamber is formed in a portion corresponding to the liquid storage chamber of the flow path formation plate, The space that can be used as a liquid storage chamber is also provided, so that the space can be used effectively, the capacity of the liquid storage chamber can be spared, the flow path resistance is reduced, and the crosstalk through the liquid storage chamber is also reduced. You.

In the liquid ejecting apparatus of the present invention, when the vibrating plate, the flow path forming plate, and the nozzle plate are formed of ceramics, all the flow paths in contact with the liquid are formed of ceramics. The liquid resistance of the road is dramatically improved. Therefore, the type of liquid used is not limited. For example, a liquid having an etching action on stainless steel or a liquid that elutes an adhesive can be used, and there is almost no limitation on the characteristics of the liquid used. In addition, since the chemical stability of the flow path is improved and the elution of the organic substance is eliminated, it can be used in, for example, the food field, the medical field, and the like, and there is almost no limitation in the application field.

In the liquid ejecting apparatus of the present invention, when the laminated body of the flow path forming plate, the vibration plate, and the nozzle plate is integrally formed without the interposition of the adhesive layer, the bonding operation is unnecessary. In addition, there is no risk of occurrence of strain or separation due to differences in the thermal shrinkage and the coefficient of linear expansion.

In the liquid ejecting apparatus of the present invention, the laminate of the flow path forming plate, the vibration plate, and the nozzle plate is formed by laminating green sheets of a ceramic material corresponding to the flow path forming plate, the sealing plate, and the nozzle plate, respectively. When formed by firing, it is suitable for manufacturing a ceramic product in which a green sheet laminate is fired.

In the liquid ejecting apparatus according to the present invention, the nozzle plate has no nozzle opening, and a notch recess is formed on an inner peripheral surface of a space corresponding to the pressure generating chamber of the flow path forming plate, and After the green sheets of the ceramic material corresponding to the channel forming plate, the vibration plate, and the nozzle plate are laminated, respectively, the nozzle opening is formed by connecting the cutout recess to the outside. A so-called edge type recording head in which an opening is formed can be relatively easily formed of ceramics.

[0020]

Next, embodiments of the present invention will be described in detail.

FIGS. 1 to 3 show one embodiment of the liquid ejecting apparatus of the present invention. This embodiment shows an example in which the liquid ejecting apparatus of the present invention is applied to an ink jet recording head. The recording head includes a nozzle plate 17 in which a plurality of nozzle openings 3 are formed, a supply path forming plate 21 in which a communication passage 8 communicating with the nozzle plate is formed, and a nozzle opening 17 through the communication passage 8. A flow path forming plate 13 in which a pressure generating chamber 2 communicating with 3 is formed, and a vibration plate 11 laminated on the flow path forming plate 13 are provided.

In the flow path forming plate 13, in addition to the pressure generating chambers 2, an ink storage chamber 4 for storing ink supplied to the pressure generating chambers 2 is provided as a flow path space communicating with each of the pressure generating chambers 2. Are formed. Further, the supply path forming plate 2
In 1, an ink supply path 7 that supplies the ink in the ink storage chamber 4 to the pressure generating chambers 2 is provided so as to correspond to each pressure generating chamber 2. That is, in the flow path forming plate 13, each pressure generating chamber 2 and the ink storage chamber 4 are not in communication with each other, and the ink supply paths 7 formed in the supply path forming plate 21 are not connected.
The pressure generating chamber 2 and the ink storage chamber 4 communicate with each other via the. The pressure generating chamber 2, the ink storage chamber 4,
A space corresponding to the ink supply path 7 vertically passes through the flow path forming plate 13 or the supply path forming plate 21.

In this example, the nozzle openings 3 are arranged so as to form two nozzle rows, and the pressure generating chamber 2 is also
Two rows are provided so as to correspond to the nozzle rows.
Further, a common ink storage chamber 4 is provided in each row of the pressure generation chambers 2.

On the other hand, a comb-shaped lower electrode 19 is formed on the upper surface of the diaphragm 11. Each comb tooth portion 19A of the lower electrode 19 is formed in a portion corresponding to the pressure generating chamber 2. Further, a flat-plate-shaped piezoelectric vibrator 6 is formed on the upper surface of each comb tooth portion 19A of the lower electrode 19, and an individual upper electrode 2 is formed on the upper surface of the piezoelectric vibrator 6.
0 is formed. A drive signal is applied to each piezoelectric vibrator 6 via the upper electrode 20 and the lower electrode 19.

The supply path forming plate 21 is laminated on the nozzle plate 17, the flow path forming plate 13 is laminated on the supply path forming plate 21, and the flow path on the upper surface of the flow path forming plate 13 is formed. Piezoelectric vibrator 6 and upper electrode 20 so as to close the opening
The diaphragm 11 on which the lower electrode 19 is formed is laminated.

In the recording head, when a drive signal is applied to the piezoelectric vibrator 6, the piezoelectric vibrator 6 contracts in the horizontal direction. At this time, the lower surface side of the piezoelectric vibrator 6 fixed to the vibration plate 11 does not contract, but only the upper surface side contracts. Therefore, the piezoelectric vibrator 6 and the vibration plate 11 bend downward and compress the pressure generating chamber 2. . When the pressure in the pressure generating chamber 2 rises, the ink in the pressure generating chamber 2 is ejected from the nozzle openings 3 as ink droplets, and dots are formed on recording paper or the like to perform printing. Next, when the piezoelectric vibrator 6 is discharged and returns to the original state, the pressure in the pressure generating chamber 2 is reduced, and new ink is supplied from the ink storage chamber 4 to the pressure generating chamber 2 through the ink supply path 7.

The recording head as described above can be manufactured, for example, as follows. That is, first, a green sheet molded body of ceramics is prepared, and the green sheet molded body is punched out.
Parts corresponding to the flow path forming plate 13, the supply path forming plate 21, and the vibration plate 11 are formed. At this time, the ink storage chamber 4, the pressure generating chamber 2, the ink supply path 7, the communication path 8, the nozzle opening 3
Is formed by punching or the like.

Then, green sheet molded bodies corresponding to the nozzle plate 17, the supply path forming plate 21, the flow path forming plate 13, and the vibrating plate 11 are laminated in a predetermined order and then fired, so that an adhesive is interposed therebetween. And a recording head integrally formed of ceramics can be obtained.

The ceramic material forming the recording head is not particularly limited, and various materials can be used. For example, silicon carbide, titanium carbide,
Various carbides such as chromium carbide, niobium carbide, vanadium carbide, zirconium carbide, molybdenum carbide, boron carbide,
Zirconium oxide (zirconia), aluminum oxide,
Various oxides such as magnesium oxide, silicon oxide, titanium oxide, and beryllium oxide; various nitrides such as aluminum nitride, silicon nitride, beryllium nitride, and boron nitride; various borides such as zirconium boride, chromium boride, and titanium boride And complex compounds such as sialon and the like. These are used alone or in combination.

Among them, zirconia, which has excellent mechanical strength and toughness and excellent corrosion resistance, is particularly suitable as a material for a liquid ejecting apparatus.

In the recording head, one flow path forming plate 1
Since the pressure generating chamber 2 and the ink storage chamber 4 are formed in 3, the number of parts constituting the recording head is reduced correspondingly, the structure and the manufacturing process are simplified, and the cost can be reduced. In addition, since the vibration plate 11, the flow path forming plate 12, the supply path forming plate 21, and the nozzle plate 17 are formed of ceramics, and the flow paths in contact with the ink are all formed of ceramics, the ink resistance of the flow paths is reduced. Improve dramatically. Therefore, there is no limitation on the type of ink used. For example, ink having an etching effect on stainless steel or ink that elutes an adhesive can be used, and there is almost no restriction on the characteristics of the ink used.
In addition, since the chemical stability of the flow path is improved and the elution of the organic substance is eliminated, it can be used in, for example, the food field, the medical field, and the like, and there is almost no limitation in the application field.

Further, in the recording head, when the laminated body of the flow path forming plate 13, the vibration plate 11, the supply path forming plate 21, and the nozzle plate 17 is integrally formed without the interposition of the adhesive layer. In addition, there is no need for a bonding operation, and there is no possibility of occurrence of distortion or peeling due to differences in the thermal shrinkage and the linear expansion coefficient. Further, since it has a laminated structure, it is suitable for production from a green sheet molded body of ceramics.

FIG. 4 shows a liquid ejecting apparatus according to a second embodiment of the present invention. In this recording head, the supply path forming plate 2
In the part corresponding to the ink storage chamber 4,
Is formed. The other parts are the same as those in the first embodiment, and the same parts are denoted by the same reference numerals.

In this recording head, the supply path forming plate 21 is also provided with the space 22 serving as the ink storage chamber 4 so that the space can be used effectively, and the capacity of the ink storage chamber 4 can be provided with a margin. The resistance is reduced, and the crosstalk via the ink storage chamber 4 is also reduced. Other than that,
The same operation and effect as those of the first embodiment are provided.

FIG. 5 shows a liquid ejecting apparatus according to a third embodiment of the present invention. In this recording head, the flow path forming plate 13
An ink supply port 9 for supplying ink from the ink supply path 7 to the pressure generation chamber 2 and a communication hole 12 for communicating the ink storage chamber 4 with the ink supply path 7 between the ink supply path 7 and the supply path forming plate 21.
And a supply port forming plate 18 in which a communication path 8 for communicating the nozzle opening 3 and the pressure generating chamber 2 are formed.
The other parts are the same as those in the first embodiment, and the same parts are denoted by the same reference numerals.

In this recording head, since the ink supply port 9 exists between the pressure generating chamber 2 and the ink supply path 7, the transmission of the pressure fluctuation in the pressure generating chamber 2 to the ink storage chamber 4 is reduced. In addition, crosstalk via the ink storage chamber 4 is suppressed. Otherwise, the same operation and effect as those of the first embodiment are exerted.

FIGS. 6 and 7 show a liquid ejecting apparatus according to a fourth embodiment of the present invention. This recording head has no supply path forming plate 21 and has an ink storage chamber 4 for storing ink supplied to the pressure generation chamber 2 and a communication path 8 for communicating the pressure generation chamber 2 with the nozzle opening 3. An ink storage chamber forming plate 16 is provided. An ink supply path 7 for supplying the ink in the ink storage chamber 4 to the pressure generating chamber 2 is formed in the flow path forming plate 13 as a flow path space other than the pressure generating chamber 2 communicating with the pressure generating chamber 2. I have. The other parts are the same as those in the first embodiment, and the same parts are denoted by the same reference numerals.

In this recording head, one channel forming plate 1
Since the pressure generating chamber 2 and the ink supply path 7 are formed in 3, the number of parts constituting the recording head is reduced correspondingly, the structure and the manufacturing process are simplified, and the cost can be reduced. Otherwise, the same operation and effect as those of the first embodiment are exerted.

FIG. 8 shows a liquid ejecting apparatus according to a fifth embodiment of the present invention. This recording head is basically the fourth
This is the same structure as the recording head according to the embodiment. In the recording head, a space 22 that forms a part of the ink storage chamber 4 is formed in a portion of the flow path forming plate 13 corresponding to the ink storage chamber 4. Other than that, the fourth embodiment is the same as the fourth embodiment, and the same parts are denoted by the same reference numerals.

In this recording head, the space 22 serving as the ink storage chamber 4 is also provided in the flow path forming plate 13 so that the space can be effectively utilized, and the capacity of the ink storage chamber 4 can be provided with a margin. The resistance is reduced, and the crosstalk via the ink storage chamber 4 is also reduced. Except for the above, the same operation and effect as those of the fourth embodiment can be obtained.

FIGS. 9 and 10 show a liquid ejecting apparatus according to a sixth embodiment of the present invention. This recording head has basically the same structure as the recording head of the fourth embodiment. In the recording head, a space 22 that forms a part of the ink storage chamber 4 is provided in a portion of the flow path forming plate 13 corresponding to the ink storage chamber 4 so as to correspond to each pressure generating chamber 2. Other than that, the fourth embodiment is the same as the fourth embodiment, and the same parts are denoted by the same reference numerals.

In this recording head, the space 22 serving as the ink storage chamber 4 is also provided in the flow path forming plate 13 so that the space can be effectively utilized, and the capacity of the ink storage chamber 4 can be provided with a margin. The resistance is reduced, and the crosstalk via the ink storage chamber 4 is also reduced. Except for the above, the same operation and effect as those of the fourth embodiment can be obtained.

FIGS. 11 and 12 show a liquid ejecting apparatus according to a seventh embodiment of the present invention. In this recording head, only one row of pressure generating chambers 2 is formed, and the nozzle plate 1
The nozzle opening 3 is not formed in 7. A cutout recess 23 is formed on the inner peripheral surface of the space corresponding to the pressure generating chamber 2 of the flow path forming plate 13 opposite to the ink storage chamber 4. After laminating green sheets of ceramic material corresponding to the flow path forming plate 13, the supply path forming plate 21, the vibration plate 11, and the nozzle plate 17, respectively, the laminate is cut along a chain line B, and the cut is formed. The notched recess 23 communicates with the outside to form a nozzle opening. Otherwise, it is the same as the first embodiment,
Similar parts are denoted by the same reference numerals.

In this recording head, a so-called edge type recording head having a nozzle opening formed at an end of the recording head can be relatively easily formed of ceramics. Otherwise, the same operation and effect as those of the first embodiment are exerted.

In each of the above embodiments, the nozzle plate 17, the flow path forming plate 13, the ink storage chamber forming plate 16,
Although an example is shown in which each plate such as the supply path forming plate 21 is formed from ceramics, the present invention is not limited to this, and each plate may be formed of a metal material such as stainless steel, nickel, chromium, single crystal silicon, or a photosensitive material. It can also be formed from a functional glass material or the like.

Further, in each of the above-described embodiments, an example in which the liquid ejecting apparatus of the present invention is applied to an ink jet recording head is described. However, the present invention is not limited to this. It can be used as fuel and used as a fuel injection device for an internal combustion engine. Further, the present invention can be applied to the formation of an organic light emitting layer of a display body in which an organic light emitting layer is formed on a transparent electrode formed in a matrix on a transparent substrate. As described above, in the liquid ejecting apparatus of the present invention, various liquids can be applied as the liquid to be ejected, and can be applied to various industrial fields.

[0047]

As described above, according to the liquid ejecting apparatus of the present invention, the pressure generating chamber and the flow path space other than the pressure generating chamber communicating with the pressure generating chamber are formed in one flow path forming plate. Since the recording head is formed, the number of parts constituting the recording head is reduced as compared with the related art, and the structure and the manufacturing process are simplified, so that the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a liquid ejecting apparatus according to the present invention.

FIG. 2 is an explanatory diagram showing a flow channel structure of the liquid ejecting apparatus.

FIG. 3 is a sectional view taken along line AA of the liquid ejecting apparatus.

FIG. 4 is a sectional view showing a second embodiment of the liquid ejecting apparatus according to the present invention.

FIG. 5 is a sectional view showing a third embodiment of the liquid ejecting apparatus according to the present invention.

FIG. 6 is an explanatory view showing a flow channel structure of a liquid ejection apparatus according to a fourth embodiment of the present invention.

FIG. 7 is a sectional view showing the liquid ejecting apparatus.

FIG. 8 is a sectional view showing a fifth embodiment of the liquid ejecting apparatus according to the present invention.

FIG. 9 is an explanatory diagram illustrating a flow channel structure of a liquid ejecting apparatus according to a sixth embodiment of the present invention.

FIG. 10 is a sectional view showing the liquid ejecting apparatus.

FIG. 11 is an explanatory view showing a flow channel structure of a liquid ejection apparatus according to a seventh embodiment of the present invention.

FIG. 12 is a sectional view taken along line AA of the liquid ejecting apparatus.

FIG. 13 is a sectional view showing a conventional liquid ejecting apparatus.

[Explanation of symbols]

 2 Pressure generating chamber 3 Nozzle opening 4 Ink storage chamber 6 Piezoelectric vibrator 11 Vibrating plate 13 Flow path forming plate 17 Nozzle plate

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Noriko Tsukada 3-5-5 Yamato, Suwa City, Nagano Prefecture Seiko Epson Corporation (72) Inventor Munehide Kanaya 3-3-5 Yamato Suwa City, Nagano Prefecture Seiko -Epson Corporation (72) Inventor Toshikah Zhang 3-3-5 Yamato, Suwa-shi, Nagano Seiko-Epson Corporation F-term (reference) 2C057 AF40 AF93 AG14 AG92 AG93 AP02 AP22 AP26 AQ01 AQ02 AQ10 BA03 BA14 3H077 AA06 BB10 CC02 CC09 CC13 DD06 EE34 EE37 FF03 FF07 FF08 FF14 FF36

Claims (12)

[Claims] A nozzle plate having a nozzle opening formed therein, a pressure generating chamber communicating with the nozzle opening, and a flow path forming plate formed with a flow path space other than the pressure generating chamber communicating with the pressure generating chamber. A liquid comprising: a vibrating plate laminated on the flow path forming plate to seal an opening; and a flexural mode piezoelectric vibrator for vibrating the vibrating plate to generate pressure in a pressure generating chamber. Injection device. 2. The liquid ejecting apparatus according to claim 1, wherein the flow path space other than the pressure generation chamber is a liquid storage chamber for storing liquid supplied to the pressure generation chamber. 3. A liquid supply path forming plate having a liquid supply path for supplying liquid from the liquid storage chamber to the pressure generation chamber and a communication path for communicating the nozzle opening with the pressure generation chamber. Liquid ejector. 4. A supply port for supplying liquid from the liquid supply path to the pressure generating chamber and a communication hole for communicating the liquid supply path with the liquid storage chamber are provided between the liquid supply path forming plate and the flow path forming plate. 4. The formed supply port forming plate is laminated.
The liquid ejecting apparatus according to claim 1. 5. A space constituting a part of the liquid storage chamber is formed in a portion corresponding to the liquid storage chamber of both the supply port forming plate and the liquid supply path forming plate or the liquid supply path forming plate. Item 5. The liquid ejecting apparatus according to item 3 or 4. 6. The liquid ejecting apparatus according to claim 1, wherein the flow path space other than the pressure generating chamber is a liquid supply path for supplying a liquid to the pressure generating chamber. 7. The liquid ejecting apparatus according to claim 6, further comprising a liquid storage chamber forming plate in which a liquid storage chamber for storing a liquid to be supplied to the pressure generating chamber via the liquid supply path is formed. 8. The liquid ejecting apparatus according to claim 7, wherein a space constituting a part of the liquid storage chamber is formed in a portion of the flow path forming plate corresponding to the liquid storage chamber. 9. The liquid ejecting apparatus according to claim 1, wherein the vibrating plate, the flow path forming plate, and the nozzle plate are formed of ceramic. 10. The liquid ejecting apparatus according to claim 9, wherein the laminated body of the flow path forming plate, the vibration plate, and the nozzle plate is integrally formed without interposing an adhesive layer. 11. A laminate of the flow path forming plate, the vibration plate and the nozzle plate is formed by laminating and firing green sheets of ceramic material corresponding to the flow path forming plate, the sealing plate and the nozzle plate, respectively. The liquid ejecting apparatus according to claim 10. 12. The nozzle plate has no nozzle opening, and a notch recess is formed in an inner peripheral surface of a space corresponding to the pressure generating chamber of the flow path forming plate.
2. A nozzle opening is formed by laminating a ceramic material green sheet corresponding to each of a vibration plate and a nozzle plate, and then communicating the notch recess with the outside.
2. The liquid ejecting apparatus according to claim 1.