JP2002023812A - Automatic control system and automatic control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a PLC capable of performing the registration and retrieval of data to a database by operating necessary communication in a necessary timing. SOLUTION: This automatic control system is constructed by constituting a host computer 5 having a D/B (database) 9 as a server and a PLC 1 as a client. The PLC 1 is provided with a D/B communication I/O 3 being an input and output device for outputting a D/B registration and retrieval request corresponding to the data structure of the D/B 9, and the D/B communication I/O 3 is controlled by a control program 6, and the D/B registration and retrieval request is transmitted to the host computer 5 so that the host computer 5 can perform the registration and retrieval of data to a D/B file 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic control system and an automatic control method using a programmable logic controller (hereinafter, PLC) for controlling an automatic machine (automatic machine).

[0002]

2. Description of the Related Art A PLC is an electronic device suitable for controlling the operation of an automatic machine or the like in a programmable manner. For example, it receives data necessary for a polishing operation, which is used in a semiconductor wafer polishing apparatus or the like and is transmitted from a computer having a database for management, and controls the polishing apparatus based on the data, or information on the polishing apparatus. Is transmitted in response to a request from the computer. FIG. 14 is a block diagram showing a configuration of a conventional system for exchanging data with a database in a host computer via a communication cable from a PLC. First, from the description of the hardware, reference numeral 101 denotes a PLC, and a plurality of I / Os for connection with external devices such as an Ethernet communication I / O (input / output device) and a memory communication I / O.
An I / O unit 102 having O is provided. 103
Is a communication cable, and the host computer 104 and the PLC 10
The transmission and reception of 1 data is performed via the communication cable 103. Next, the software will be described.
C101 has a control program 105 for controlling the inside of the PLC 101. The host computer 104 has a “data reading, writing, and D / B (database) registration / retrieval program” 106 for reading / writing data to / from the PLC 101 and registering / retrieving data to / from the D / B 109. The D / B 109 includes a D / B program 10.
7 for managing the D / B file 108.

Next, the operation of FIG. 14 will be described.
First, when registering data in the D / B 109, the host computer 104 periodically executes the “data reading, writing, and D / B registration / search program” 106,
It periodically checks whether there is any change in the data in the PLC 101. If there is a change here, the data is read out and D /
The data is output to B109 as registration data. Next, the host computer 104 executes the D / B program 107 to store the data in the D / B file 108,
Registration of data in / B109 is completed.

When searching the D / B 109, the host computer 104 periodically executes a “data reading, writing, and D / B registration, search program” 106 to output search instruction data from the PLC 101. Check regularly that If the search instruction data is output here, the host computer 104 executes the “data reading, writing, and D / B registration, search program” 106 based on the search instruction data to search for the D / B 109. . That is, by executing the D / B program 107, the D / B
The data stored in the file 108 is extracted, and the search result data is output to the PLC 101.

[0005]

By the way, in the above-mentioned system, the timing at which the data is required depends on the PLC, whether registering the data of the PLC in the database or searching the database. Since the data is monitored periodically from the host computer, there is a problem that data may be missed due to a deviation in the timing of the periodic monitoring. In addition, PLC
However, even when there is no request from the server and there is no need for communication, there is a problem that the communication load increases because the host computer performs communication periodically. Further, since the database is not directly used by the PLC, there is a problem that the system becomes complicated.

The present invention has been made in view of such circumstances, and has as its object to use a PLC capable of performing necessary communication at necessary timing, and registering and searching data in a database. An object of the present invention is to provide an automatic control system and an automatic control method.

[0007]

In order to solve the above-mentioned problems, in an automatic control system using a PLC according to the present invention, the PLC includes a search instruction for searching data necessary for controlling the automatic machine from a database. And a control means for outputting a registration instruction for registering operation information of the automatic machine in the database, and a search instruction and a registration instruction output by the control means are converted into a search request and a registration request corresponding to the database. And an input / output device for converting and transmitting the converted data to a computer.

In the automatic control system using a PLC according to the present invention, the input / output device includes a storage unit for storing data structure information in a database and information corresponding to data to be searched and registered in the database. Receiving a search instruction or a registration instruction output from the control means, reading corresponding information related to the search instruction or the registration instruction from the storage means, and converting the search instruction or the registration instruction into a search request or a registration request corresponding to the data structure of the database. And a conversion means for outputting to a computer.

In an automatic control system using a PLC according to the present invention, the input / output device includes a buffer memory for storing output data of the control means for a predetermined time.

[0010] In the automatic control system using the PLC according to the present invention, the control means outputs a registration instruction for registering information input from the outside into a database.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a system using a PLC according to the first embodiment of the present invention. Reference numeral 1 denotes a PLC having an I / O unit 2 having a plurality of input / output devices and a control program 6,
One of the O units 2 is a D / B communication I / O 3 which is an input / output device dedicated to a database. D / B communication I / O
Reference numeral 3 sends data for registration to the D / B 9 or issues a search request and receives the data of the result. A communication cable 4 exchanges data between the PLC 1 and the computer via the communication cable 4. Reference numeral 5 denotes a host computer (computer) having a D / B (database) 9
/ B9 has a D / B file 8 and a D / B program 7 for managing it.

Although not shown in the figure, the PLC 1
It also has a PU (Central Processing Unit) and memories such as ROM and RAM. The control program 6 has a database registration / search program. Control unit is D / B
It controls the communication I / O3, checks the status of the D / B communication I / O3, and gives input / output instructions to the D / B communication I / O3. There are two D / B communication I / O3 states, one representing the communication state and the other representing the state of the buffer memory. In the communication state, there are four types: communication, communication success, communication failure, and communication stop. Similarly, the buffer memory state includes four types of buffering, buffering success, buffering failure, and buffering stop.
There are types.

Next, FIG. 2 shows the D / B communication I / O3 described above.
FIG. 3 is a block diagram showing the configuration of FIG. Reference numeral 30 denotes a control unit (control means) including a CPU, a memory, and a control program 6 built in the PLC 1 shown in FIG. The interface unit 31 exchanges data between the control unit 30 and the inside of the D / B communication I / O3. Central processing unit 32 is D / B
It controls the communication I / O3. The storage device 33 holds the following data. First, “PL”, which is data input / output from the PLC 1 via the interface unit 31.
The C data “33a” is held. The “PLC data” 33a (for example, address or data type) is “upper computer identification address” for specifying the upper computer 5 and “data structure information of the D / B file 8”. D / B table name,
The "correspondence information" 33b in which the correspondence with the "D / B field name" is set and stored for each processing method is stored (storage means). In addition, “instruction” which is information for determining an instruction such as “registration, search, and processing end” from the control unit 30.
33c is held. In addition, a parameter for specifying data received by the interface unit 31 and a “parameter” 33d which is a parameter corresponding to a setting identification name for identifying a setting for each processing method are stored. Also, D /
The "I / O state" 33e indicating the communication state of the B communication I / O3 and the state of the buffer memory is held. Furthermore, D /
In consideration of the case where a large amount of registration data is generated in the B communication I / O3 such that it cannot be processed at the time of data registration, a procedure of temporarily storing data to be registered first, and then sequentially registering data can be selected. I have to. "Buffer" (buffer memory) 3 as a storage area at that time
3f is provided. The communication processing device (conversion means) 34, based on the input data, for example, SQL (Structure)
A language dedicated to a database, such as d Query Language, is created and converted into data that can control the D / B program 7 built in the D / B 9 for communication. The date / time calculation device 35 measures the time to be referred to when adding time information to data managed by the D / B communication I / O3. The timer 36 generates a timing at which the central processing unit 32 periodically checks the buffer memory and performs a data registration process.

Next, the operation of the above-described embodiment will be described with reference to FIGS. When registering data from the PLC 1 to the D / B 9, that is, when the control unit 30 executes a database registration program in the control program 6, the following operation is performed. First, the control unit 30 stores data to be registered via the interface unit 31 in the storage device 33.
Is stored as "PLC data" 33a. Next, the control unit 30 checks the status information of the D / B communication I / O3. In other words, the D / B communication I /
“I / O state” in the storage device 33 which is the state information of O3
33e is read and output to the control unit 30 via the interface unit 31. As a result, D / B communication I / O3
Is a communication stop state, that is, a state in which communication can be started, the control unit 30 stores the "parameter" 33d and the "PLC data" 33a in the storage device 33 in the central processing unit 32.
, A parameter which is a setting identifier corresponding to the registration data is set. Next, when the control unit 30 transmits a registration instruction to the D / B communication I / O 3 via the interface unit 31, the central processing unit 32 stores the “instruction” in the storage device 33.
The registration instruction is determined with reference to 33c. Next, the control unit 3
0 starts communication with the host computer 5 via the D / B communication I / O3.

Next, the communication processing device 34 uses the "correspondence information" 33b to register the D / B to be registered based on the set parameters.
The corresponding setting information such as the table name and the field name in the file 8 is read. Next, the communication processing device 34 determines whether or not to buffer the data in the "buffer" 33d based on the above-described correspondence setting information. In the case of buffering, time information is acquired from the date / time counting device 35 and buffered together, and is periodically checked at the timing when the timer 36 is generated and waits for sequential execution. still,
If no buffering is performed, it is executed immediately. Next, as an execution process, the communication processing device 34 creates a registration SQL statement (registration request) from the read correspondence setting information. next,
The communication processing device 34 transmits the SQL statement for registration to the host computer 5. The host computer 5 executes the registration SQL statement to control the D / B program 7 and register data in the D / B file 8.

Next, when the PLC 1 requests the D / B 9 to search for data, that is, when the control unit 30 executes a database search program in the control program 6, the following operation is performed. The control unit 30 firstly receives the D / B communication I /
Check the I / O state of O3. If the communication is possible, the control unit 30 sets the parameter corresponding to the setting identification name for search in the central processing unit 32 based on the “parameter” 33d and the “PLC data” 33a in the storage device 33. . Next, the control unit 30 transmits a search instruction to the D / B communication I / O 3 via the interface unit 31, and the central processing unit 32 determines the search instruction by referring to the “instruction” 33 c in the storage device 33. Next, the control unit 30 controls the D / B communication I /
Communication with the host computer 5 is started via O3.

The communication processing unit 34 stores correspondence setting information necessary for communication from the storage device 33 based on the set parameters.
Read more. The communication processing device 34 uses the correspondence setting information and the search condition in the parameter to search for a SQL sentence (search request).
Create Next, the communication processing device 34 transmits a search SQL sentence to the host computer 5. Upper computer 5 is SQ for search
By executing the L statement, the D / B program 7 is controlled and data is searched from the D / B file 8. The host computer 5 stores the search result in the communication processing device 3 of the D / B communication I / O3.
Output to 4. The central processing unit 32 includes a communication processing unit 34
Store the received search result in the "PLC data" 33a. Then, the control unit 30 via the interface 31
Search results can be used. PLC by the above operation
1 retrieves data from the D / B 9.

As described above, the PLC 1 can register and retrieve necessary data in the D / B 9 of the host computer 5 at a necessary timing, and can cause periodic sampling caused by the conventional host computer. Also, an increase in communication load can be prevented. Conventionally, D /
B, a program for searching and registering data was required. However, since the program was no longer necessary, as shown in the first embodiment of the present invention, the CPU of the host computer 5
The load on the device is reduced. Also, in the case where program management is performed in a system including a plurality of PLCs and a host computer, a simpler program configuration can be achieved by installing a D / B search / registration program in the PLC, thereby facilitating program maintenance and customization. I do.

Next, a second embodiment of the present invention will be described. FIG. 3 shows a CMP apparatus (semiconductor polishing apparatus) and S
Polishing combined with CR equipment (semiconductor cleaning equipment)
It is a figure showing the schematic structure about a washing system.
Reference numeral 40 denotes a data management PC (computer), which is a PLC 41 for an SCR device (automatic machine) and a CMP device (automatic machine).
And the communication PLC 4 respectively. The PLC 41 has an input device using a bar code 43. Although not shown in FIG. 3, the data management PC 40 is a D / B storing data for controlling the CMP device and the SCR device and operation information (automatic machine information) of the device.
(Database).

Next, the operation of the polishing / cleaning system having the above configuration will be described with reference to FIG. Generally, since the above two devices process complicated polishing processes and cleaning processes, it is necessary to specify a large number of recipes (parameters) for each process. Further, operation information such as processing condition information, operation information, and alarm information of the apparatus is stored in the D /
It is necessary to save to B. In this embodiment, the data management PC 40 is a server, and the PLC 41 and the PLC 42 are clients.
Reference numeral 42 allows a user to search for a necessary recipe when necessary. As a search procedure, first, the PLC 41 and the PLC 42
The QL sentence is transmitted to the data management PC 40. Data management P
The C40 searches for a recipe for operating each device stored in the D / B based on the SQL sentence for search, and outputs the result to each PLC. Based on the searched recipe, the PLC 41 and the PLC 42 use the SCR device and the C
Controls the MP device.

The PLC 41 and the PLC 42 transmit D / D of the data management PC 40 with respect to the operation information of each device.
Register with B. As a registration procedure, the PLC 41 and the PLC 42 use the registration SL for the operation information of each device.
The Q sentence is transmitted to the data management PC 40. Data management PC
40 registers the operation information in the D / B based on the registration SLQ sentence. When information such as process identification information, device identification information, date and time, and product lot number is input from the barcode 43, the PLC 41 creates an SQL statement for registration from the input information and transmits it to the data management PC 40.
The data management PC 40 receives the registration SQL statement and registers the information input from the barcode 43 in the D / B.

Next, the PLC 41 will be described in detail. FIG. 4 is a block diagram showing a schematic configuration of the PLC 41 of FIG. Although not shown in the figure, the PLC 41
And a control unit (control means) for controlling the inside of the PLC by a program described below. A recipe search program 51 receives a recipe ID (recipe identification number) from the SCR device and outputs a search SQL sentence to the data management PC 40 based on the received recipe ID. After that, the data management PC 4
0 searches D / B based on the SQL sentence for search, and PL
The search result is output to C41. Recipe search program 5
1 receives the search result via the D / B communication I / O 57. A device control program 52 controls the operation of the SCR device based on the recipe data (device control information) as a search result.

The PLC 41 collects the operation information of the SCR device and registers the operation information in the D / B in the data management PC 40. Reference numeral 53 denotes an alarm information registration program, which operates based on information relating to an alarm among the operation information output by the device control program 52, and converts the alarm information into a SQL statement for registration and outputs it. An operation information registration program 54 operates based on information on the operation state of the SCR device among the operation information output from the device control program 52, and performs D / B communication I / O.
By controlling 57, the operation information is converted into a registration SQL statement and transmitted to the data management PC 40. Reference numeral 55 denotes a processing result information registration program, which operates based on the processing result information among the operation information output from the device control program 52, and controls the D / B communication I / O 57 to process the SCR device processing result information. Is converted into an SQL statement for registration and transmitted to the data management PC 40. A processing start information registration program 56 operates based on the setting information input from the barcode 43 and controls the D / B communication I / O 57 to control the SC.
The processing start information of the R device is converted into a registration SQL statement and transmitted to the data management PC 40. Although not shown, an I / O unit for taking in bar code data is added to the PLC 41 as necessary.

The D / B communication I / O 57 is an I / O unit provided in the PLC 41 exclusively for communication with the data management PC 40. Reference numeral 58 denotes a correspondence information setting unit, and the D / B communication I /
Recipe information, alarm information, operation information, processing result information, processing start information, and data management PC 4 output from O57
This is a storage device (storage means) for storing setting information on the correspondence with the data in D / B in 0. Reference numeral 59 denotes a conversion unit (conversion means) which converts information coming from the PLC 41 into an SQL statement for controlling D / B in the data management PC 40,
The data is transmitted to the data management PC 40. Data management PC
It also receives data from 40. Reference numeral 60 denotes a buffer (buffer memory) which temporarily stores registration information together with time data in case a registration request is output from the registration programs 53 to 56 during the communication of the conversion unit 59.

Here, the details of the setting in the correspondence information setting section 58 will be described. The correspondence information setting unit 58 needs to store the setting information for each of the recipe, the alarm information, the operation information, the processing result information, and the processing start information, and also store the “setting identification name” for identifying them. In addition, for alarm information, operation information, processing result information, and processing start information, setting information for buffering in the buffer 60 and setting information for automatically buffering time data are also stored. Also, of course, the data management PC 40
Also, setting information for accessing the D / B in the storage area is stored. For example, when communicating by the TCP / IP method, five “setting identifiers” and setting information belonging thereto are defined as follows. Recipe information Data management PC communication address, database name, database table name, buffering setting (= No),
Correspondence between recipe ID field and PLC address, recipe data fields 1, 2, 3,.
3. Correspondence of alarm information Data management PC communication address, database name, database table name, buffering setting (= occurrence time field name), correspondence between alarm data field and PLC address Operating information Data management PC communication address, database name, Database table name, buffering setting (= occurrence time field name), correspondence between operating data field and PLC address Processing result information Data management PC communication address, database name, database table name, buffering setting (= occurrence time field name), Correspondence between processing result data field and PLC address Processing start information Data management PC communication address, database name, database table name, buffering setting (= occurrence time field name), processing start data By holding the field and corresponding higher configuration information of the PLC addresses, control, PLC
41 can create a registration SQL sentence and a search SQL sentence via the D / B communication I / O 57 and transmit them to the data management PC 40.

Next, the operation of the PLC 41 having the above configuration will be described. First, the recipe search program 51 will be described with reference to the flowchart shown in FIG. The recipe search program 51 is executed by the control unit 50 when the PLC 41 wants to search for a recipe from the D / B in the data management PC 40, and performs the following operation. First, the control unit 50
Checks whether the state of the D / B communication I / O 57 is communication stopped (step S2). If the result of the check is "No", step S2 is repeated until the communication is stopped. If the result of the check is “Yes”, communication is possible, and the recipe information is set as the “setting identifier” for the search and the recipe ID is set as the search condition (step S
3). Next, the control unit 50 issues a search instruction to the D / B communication I / O 57, whereby the conversion unit 59 of the D / B communication I / O 57 corresponds to the setting information corresponding to the set “setting identification name”. Read from the information setting unit 58, create a search SQL statement based on the setting information and the above search conditions, and perform data management P
It transmits to C40 (step S4). Although not shown, the data management PC 40 that has received the search SQL statement
Searches for D / B based on the search SQL sentence and outputs the search result. The control unit 50 receives the recipe, which is the search result, via the D / B communication I / O 57 and stores it in the built-in memory. In the meantime, the control unit 50 controls the D / B
The communication status of the communication I / O 57 is checked to determine whether the communication has been completed (step S5). If the result of the check is "communicating", the D / B communication I / O 57 is communicating, and step S5 is repeated until the communication ends, "communication success or communication failure". Next, when the terminated communication succeeds or fails, it is determined whether the recipe stored in the memory of the PLC 41 is used or not used. Next, a processing end instruction is issued (step S6). As a result, the communication state of the D / B communication I / O 57 becomes “communication stopped”. Thus, the operation of the recipe search ends (step S7). still,
Although not shown, when the recipe is used in step S6, the control unit 50 executes the device control program 5 based on the recipe data input by the recipe search program 51.
2 to control the SCR device.

Next, the alarm information registration program will be described with reference to the flowchart shown in FIG. The alarm information registration program is executed by the control unit 50 when the PLC 41 wants to register alarm information in the data management PC 40, and performs the following operation. First, the control unit 50
Checks whether there is a change in the alarm information from the device control program 52 (step S11). If the result of the check is "no change", step S11 is repeated until there is a change in the alarm information. When the result of the check becomes "change", the control unit 50 outputs alarm information to the D / B communication I / O 57 (step S12).
Thereby, registration information to be registered in the D / B of the data management PC 40 is set. Next, the control unit 50 controls the D / B communication I
It is checked whether the buffering of / O57 is stopped (step S13). And the result is "
If “No”, the step S13 is repeated until the buffering stops. If the checked result is “Yes”, the buffering is possible, and the control unit 50 sets the alarm information in the “setting identifier” (step S14). ).
Next, the control unit 50 issues a registration instruction to the D / B communication I / O 57, whereby the registration instruction including the alarm information to be registered in the buffer 60 is stored (step S15). Next, the control unit 50 controls the buffer 6 of the D / B communication I / O 57.
The status of 0 is checked to determine whether or not the buffering has been completed (step S16). If the confirmed result is “buffering”, the D / B communication I / O 57
Is buffering, and repeats step S16 until the buffering ends, "buffering successful or buffering failure". Next, when the completed buffering succeeds or fails, it is determined whether to issue a registration instruction again or not. Next, the control unit 50 sets D /
A processing end instruction is issued to the B communication I / O 57 (step S1).
7). Although not shown, the conversion unit 59 periodically checks whether there is a registration instruction buffered in the buffer 60. Here, when there is a buffered registration instruction and the communication with the data management PC 40 is stopped, the conversion unit 59 executes the registration instruction. Conversion section 59
Reads the setting information from the correspondence information setting unit 58 based on the registration instruction from the buffer 60, creates an SQL statement for registration based on the setting information and the registration instruction, and starts transmission to the data management PC 40. Further, the data management PC 40 registers the alarm information in the D / B based on the received registration SQL statement.

Next, the operation information registration program will be described with reference to the flowchart shown in FIG. This operation information registration program is executed when the PLC 41 stores the operation information in the data management PC.
This is executed by the control unit 50 when the user wants to register the information in 40, and performs the following operation. First, the control unit 50 checks whether there is any change in the operation information from the device control program 52 (step S21). And the result is "
If "no change", step S21 is repeated until there is a change in the operation information.
The control unit 50 outputs the operation information to the D / B communication I / O 57 (Step S22). Thereby, the data management PC 40
The registration information to be registered in the D / B is set. Next, the control unit 50 checks whether the buffering of the D / B communication I / O 57 has been stopped (step S23). Then, if the confirmed result is “No”, the step S23 is repeated until the buffering is stopped. If the result of confirmation is "Yes", buffering is possible,
The control unit 50 sets the operation information in the “setting identifier” (step S24). Next, the control unit 50 issues a registration instruction to the D / B communication I / O 57, and thereby the buffer 60
A registration instruction including operation information to be registered is stored (step S25). Next, the control unit 50 controls the D / B communication I / O
The state of the buffer 60 at 57 is checked to determine whether the buffering has been completed (step S26).
If the result of the check is “buffering”, D /
The B communication I / O 57 is in the process of buffering, and repeats step S26 until the buffering ends, "buffering successful or buffering failure". Next, when the completed buffering succeeds or fails, it is determined whether to issue a registration instruction again or not. next,
The control unit 50 issues a processing end instruction to the D / B communication I / O 57 (step S27). Although not shown, the conversion unit 59 periodically checks whether there is a registration instruction buffered in the buffer 60. Here, when there is a buffered registration instruction and communication with the data management PC 40 is stopped, the conversion unit 59 executes the registration instruction. The conversion unit 59 reads the setting information from the correspondence information setting unit 58 based on the registration instruction from the buffer 60, creates an SQL statement for registration based on the setting information and the registration instruction, and starts transmission to the data management PC 40. . In addition, data management P
C40 registers operation information in D / B based on the received registration SQL statement.

Next, the processing result information registration program will be described with reference to the flowchart shown in FIG. The processing result information registration program is executed by the control unit 50 when the PLC 41 wants to register the processing result information in the data management PC 40, and performs the following operation. First, the control unit 50
Confirms whether the processing is completed or not completed, based on the processing result information from the apparatus control program 52 (step S
31). If the result of the check is “uncompleted”, step S31 is repeated until the processing is completed. When the result of the confirmation is “completed”, the control unit 50 outputs the processing result information to the D / B communication I / O 57 (step S32).
Thereby, registration information to be registered in the D / B of the data management PC 40 is set. Next, the control unit 50 controls the D / B communication I
It is checked whether the buffering of / O57 is stopped (step S33). And the result is "
If "No", step S33 is repeated until the buffering is stopped. If the checked result is "Yes", buffering is possible, and the control unit 50 sets the processing result information to "setting identifier" (step S34).
Next, the control unit 50 issues a registration instruction to the D / B communication I / O 57, whereby the registration instruction including the processing result information to be registered in the buffer 60 is stored (step S35). Next, the control unit 50 controls the buffer 6 of the D / B communication I / O 57.
The status of 0 is checked to determine whether or not the buffering has been completed (step S36). If the result of the check is “buffering”, the D / B communication I / O 57
Are buffering, and repeat step S36 until the buffering ends, "buffering successful or buffering failure". Next, when the completed buffering succeeds or fails, it is determined whether to issue a registration instruction again or not. Next, the control unit 50 sets D /
A processing end instruction is issued to the B communication I / O 57 (step S3
7). Although not shown, the conversion unit 59 periodically checks whether there is a registration instruction buffered in the buffer 60. Here, when there is a buffered registration instruction and communication with the data management PC 40 is stopped, the conversion unit 59 executes the registration instruction. Converter 59
Reads the setting information from the correspondence information setting unit 58 based on the registration instruction from the buffer 60, creates an SQL statement for registration based on the setting information and the registration instruction, and starts transmission to the data management PC 40. Further, the data management PC 40 registers the processing result information in the D / B based on the received registration SQL statement.

Next, the processing start information registration program will be described with reference to the flowchart shown in FIG. This processing start information registration program is executed by the control unit 50 when the PLC 41 wants to register the processing start information input from the barcode 43 in the data management PC 40, and performs the following operation. First, the control unit 50 checks whether or not there is an input from the barcode 43 (step S4).
1). If the result of the check is "no input", step S41 is repeated until there is an input. When the result of the confirmation is “input”, the control unit 50 sets the processing start information to D /
Output to the B communication I / O 57 (step S42). Thereby, registration information to be registered in the D / B of the data management PC 40 is set. Next, the control unit 50 controls the D / B communication I / O
It is confirmed whether or not the buffering of 57 is stopped (step S43). Then, if the confirmed result is “No”, the step S43 is repeated until the buffering is stopped. If the result of the check is “Yes”, buffering is possible, and the control unit 50 sets “Setting identifier”.
Is set as the processing start information (step S44). Next, the control unit 50 issues a registration instruction to the D / B communication I / O 57, whereby the registration instruction including the processing start information to be registered in the buffer 60 is stored (step S45). Next, the control unit 50 controls the buffer 6 of the D / B communication I / O 57.
The status of 0 is checked to determine whether or not the buffering has been completed (step S46). If the result of the check is “buffering”, the D / B communication I / O 57
Are buffering, and repeat step S46 until the buffering ends, "buffering successful or buffering failure". Next, when the completed buffering succeeds or fails, it is determined whether to issue a registration instruction again or not. Next, the control unit 50 sets D /
A processing end instruction is issued to the B communication I / O 57 (step S4).
7). Although not shown, the conversion unit 59 periodically checks whether there is a registration instruction buffered in the buffer 60. Here, when there is a buffered registration instruction and communication with the data management PC 40 is stopped, the conversion unit 59 executes the registration instruction. Converter 59
Reads the setting information from the correspondence information setting unit 58 based on the registration instruction from the buffer 60, creates an SQL statement for registration based on the setting information and the registration instruction, and starts transmission to the data management PC 40. Further, the data management PC 40 registers the processing start information in the D / B based on the received registration SQL statement. The other operations are the same as those of the PLC 41 described above except that the bar code 43 is not input to the PLC 42.

The data management PC 40 has a D
FIG. 10 shows a schematic configuration as one embodiment of / B. Reference numeral 61 denotes alarm information D / B, which is a D / B in which alarm information is registered. Reference numeral 62 denotes operation information D / B, which is a D / B in which operation information is registered. 63 is processing result information D
/ B, which is the D / B in which the processing result information is registered. 6
4 is a recipe information D / B, which is a D in which the recipe information is registered.
/ B. Data can be specified for each of the four D / Bs by a D / B name, a D / B table name, a D / B field name, and the like defined in each D / B.
The name matches the name stored in the correspondence information setting section 58 of the communication I / O 57.

The operation of the data management PC 40 having the above configuration will be described. When an SQL statement is sent from the PLC 41 and the PLC 42, the data management PC 40 transmits a D / D
The D / B management program in B is controlled to perform the processing according to the instruction in the SQL statement. Data management PC
Performs registration and retrieval of data stored in the D / B with almost no load on the CPU,
Answer the request from C42.

According to the second embodiment described above, the PL
The C41 communicates with the data management PC 40 via the D / B communication I / O 57 and the communication cable 4, and
Data can be directly registered and searched as a client to the D / B within 0, so that it can be registered immediately from the information source (PLC 41) by synergistic effect with the reduction of the load on the host computer (data management PC 40). In addition, data is not lost due to the conventional sampling delay. Conventionally, in a system development environment, maintenance of both a D / B registration / retrieval program in a host computer and a processing program in a PLC is required, but a second embodiment of the present invention As described above, by using the host computer (data management PC 40) as a D / B server and incorporating a D / B registration / search program in the PLC 41, the system to be maintained becomes single (only the PLC) and maintenance is easy. Become.

In the development of a D / B registration / search program, ladders, SFCs,
Since a visualized development tool such as a flowchart can be used, it is easier to create and debug than a conventional programming environment using a C language or the like in a high-level computer. Further, the customization / maintenance of software by the user is further facilitated by the simplification of the algorithm, the unification of the development environment, and the visualized development tools described above. Further, in the present embodiment, the communication action is performed from the PLC 41 serving as a client, and the average communication load is smaller than that in the conventional system in which the communication action is performed from a host computer. Further, since the PLC 41 executes the database registration / retrieval program which was performed by the conventional upper computer, the upper computer (data management P
The load of C40) can be reduced.

Next, a third embodiment of the present invention will be described. Fig. 11 collects operation information, production results information, environmental information, etc. from the factory equipment, and uses such information to efficiently produce, accurately respond to customers by grasping the status of the factory, and provide defective products. FIG. 1 is a block diagram illustrating a schematic configuration of an embodiment of an operation data collection system for realizing provision of data that can be used for post-mortem analysis at the time of occurrence. Reference numeral 70 denotes a data management PC (computer) to which a plurality of PLCs are connected via the communication cable 4.
, Are PLCs, and newly provided sensors 73, 71,.
An existing air conditioner 74 and a barcode reader 75 are connected. Although not shown, a manufacturing apparatus (automatic machine) is also connected, and provides operation information and production result information to the PLC 71. The new sensor 73 and the existing air conditioner 74 provide the PLC 71 with environmental information such as temperature and humidity. The bar code reader 75 reads out the process pass (production result) information of the product, for example, by reading the lot number of the product as a bar code. Although not shown in FIG. 11, the data management PC 70 has a D / B (database) for storing data (automatic machine information) collected by the PLC 71.

Next, the operation of the operation data collection system having the above configuration will be described with reference to FIG. PLC7
1 collects operation information and production result information of the connected manufacturing apparatus, and also collects environmental information from the new sensor 73 and the existing air conditioner 74. Further, the product information before the device is operated is input from the barcode reader 75 as production result information. The above collected information is stored in the PLC 71
Accesses and registers the D / B in the management PC 70 as a client.

FIG. 12 is a block diagram showing a schematic configuration of one embodiment of the PLC 71 shown in FIG. Reference numeral 79 denotes a control unit (control means) that controls the inside of the PLC 71 by a CPU and a memory such as a ROM and a RAM, which are not shown in the drawing, and a program described below. Reference numeral 80 denotes a D / B communication I / O,
An I / O unit dedicated to communication between the PC 71 and the data management PC 70. An apparatus control program 81 collects operation information from a connected manufacturing apparatus and environmental information from a sensor or the like, and transfers the collected information to each program in the PLC 71. Reference numeral 82 denotes an operation information registration program, and the device control program 8
1 operates based on the information on the operation information among the operation information output by 1 and transmits the operation information to the data management PC 70 via the D / B communication I / O 80. As described above, the operation information of the manufacturing apparatus is registered in the D / B in the data management PC 70. Reference numeral 83 denotes an environment information registration program, which operates based on information relating to the environment information among the operation information output by the device control program 81, and transmits the environment information to the data management PC 70 via the D / B communication I / O 80. I do. As described above, the environment information around the manufacturing apparatus is registered in the D / B in the PC 70 for data management. Reference numeral 84 denotes a production result information registration program, which operates based on information on production result information among the operation information output by the device control program 81, and performs D / B
Production performance information is transferred to data management P via communication I / O 80
Send to C70. Thus, the data management PC 70
The production result information read from the barcode reader 75 is registered in the D / B in the table.

Next, regarding the D / B communication I / O 80,
D / B communication I / O 57 of FIG. 4 described in the second embodiment
And the configuration is the same except for the data in the correspondence information setting unit 85. In the correspondence information setting unit 85, the data configuration may be the same, but the data such as the setting identifier must be associated with the operation information, the production result information, and the environment information. FIG. 13 shows a schematic configuration of an embodiment of the D / B constructed in the data management PC 70 shown in FIG. Reference numeral 90 denotes operation information D / B.
And D / B in which the operation information is registered. Reference numeral 91 denotes production result information D / B, which is a D / B in which production result information is registered.
It is. Reference numeral 92 denotes environment information D / B, which is a D / B in which environment information is registered.

Next, the operation of the PLC 71 having the above configuration will be described with reference to the drawings. When operation information is input to the PLC 71 from a manufacturing device connected to the outside, the device control program 81 receives the operation information and outputs it as operation information regarding operation. Based on this, the control unit 79 executes the operation information registration program 82. Operation information registration program 82
Is similar to the other registration operations described in the second embodiment described above, and data to be registered is first temporarily stored in the buffer 87. The buffer 87 is periodically checked, and if there is data, the correspondence information setting unit 8
5 for registration by the conversion unit 86 that has read the setting information from
Converted to sentence. And the SQL statement for registration is D / B
It is transmitted to the management PC 70 via the communication I / O 80. As described above, the operation information is registered in the D / B of the management PC 70. When environment information is input to the PLC 71 from the newly installed sensor 73 connected to the outside, the device control program 81 receives the information and outputs it as operation information relating to the environment. On the basis of this, the control unit 79 sets the environment information registration program 8
3 and thereafter, the operation is the same as that of the operation information registration program 82, and the environment information is registered in the D / B in the management PC 70. When production result information is input to the PLC 71 from a barcode reader 75 connected to the outside, the device control program 81 receives this and outputs it as operation information relating to production results. Based on that, the control unit 79
Executes the production result information registration program 84, and thereafter registers the production result information in the D / B in the management PC 70 in the same manner as described above.

By the operation described above, the PLC 71
A conventional data management PC communicates with a database by communicating with the data management PC 70 via a / B communication I / O 80 and directly registering data as a client to a D / B in the data management PC 70. Compared to the case where the registration / search program was executed, the data management PC 7
The load of 0 is reduced. In addition, since a PC that was conventionally required for data collection is no longer required, equipment costs can be reduced.
In addition, the information can be registered immediately from the information source (PLC 71), and data is not lost due to a delay in sampling performed by the conventional data management PC. In addition, customization / maintenance of the system by the user requires that there is no need to create a program for the PC, that the development environment is unified into a PLC, and that the development tools (ladder, SFC, flowchart) visualized by the PLC It becomes simpler by using. Further, since data can be immediately registered in the database from the PLC, the data can be used in real time as much as possible.

[0041]

As described above, according to the present invention,
The control means provided in the PLC outputs a search instruction for searching data necessary for controlling the automatic machine from the database, and outputs a registration instruction for registering operation information of the automatic machine in the database. Next, the input / output device included in the PLC converts the search instruction and the registration instruction output by the control means into a search request and a registration request corresponding to the database, and transmits the request to the computer. In particular, the storage means included in the input / output device stores data structure information in the database and correspondence information between data to be searched and registered in the database. Next, the conversion means included in the input / output device receives a search instruction or a registration instruction output by the control means, reads corresponding information related to the search instruction or the registration instruction from the storage means, and issues the search instruction or the registration instruction. It converts it into a search request or registration request corresponding to the data structure of the database and outputs the request to the computer. As described above, it is possible to access the database as a client, and there is an effect that there is no data leakage unlike sampling from a conventional computer, and data can be registered and searched reliably. Also, there is an effect of reducing the load on a computer which has conventionally been used to control registration and search in a database. In addition, since the information can be directly registered in the database from the automatic machine, the data in the database can be used in real time as much as possible, thereby judging the state of the automatic machine and registering the control parameters from the PLC to the D / B, PLC
Has the effect that the control parameters can be searched from the D / B to control the automatic machine. Further, even in an intelligent autonomous decentralized system in which a function for judging a state is incorporated in the automatic machine itself and information is extracted from the D / B, the use of the PLC has an effect of simplifying the construction. .

Also, in the automatic control system using the PLC, the input / output device includes a buffer memory for storing the output data of the control means for a certain period of time, so that the output data amount of the control means is reduced to the next stage. Even if the processing amount of the conversion means is exceeded, there is an effect that data is not lost. In the automatic control system using the PLC, the control means outputs a registration instruction for registering information input from the outside into a database,
Compared with the related art, a computer having a control unit for registering information input from the outside into the database is not required, and the system can be more easily constructed. This has the effect of simplifying system maintenance and customization.
In the development of a data transfer program with the D / B of the automatic control system using the PLC, a kind of visualized CASE (Computer Aided) is used.
A software development environment for PLC, which can also be referred to as a software engineering tool, can be used, which has the effect of facilitating program maintenance, customization, and debugging. Furthermore, PLC
Since the data transfer program can be developed only in the program development environment for the application, the development environment can be unified, and the maintenance and customization can be further simplified.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a configuration of an automatic control system for a PLC and a host computer according to a first embodiment of the present invention.

FIG. 2 shows a D / B communication I according to the first embodiment of the present invention.
FIG. 3 is a block diagram showing a configuration of / O.

FIG. 3 is a block diagram showing a configuration of a semiconductor polishing and cleaning system according to a second embodiment of the present invention.

FIG. 4 is a block diagram showing a configuration of a PLC according to a second embodiment of the present invention.

FIG. 5 is a flowchart of an operation of a recipe search program.

FIG. 6 is a flowchart illustrating an operation of an alarm information registration program.

FIG. 7 is a flowchart illustrating the operation of an operation information registration program.

FIG. 8 is a flowchart illustrating the operation of a processing result information registration program.

FIG. 9 is a flowchart illustrating the operation of a processing start information registration program.

FIG. 10 is a block diagram showing a configuration of a database in a data management PC according to a second embodiment of the present invention.

FIG. 11 is a block diagram showing a configuration of an operation data collection system according to a third embodiment of the present invention.

FIG. 12 is a block diagram showing a configuration of a PLC according to a third embodiment of the present invention.

FIG. 13 is a block diagram illustrating a configuration of a database in a data management PC according to a third embodiment of the present invention.

FIG. 14 is a block diagram showing a configuration of a conventional system of a PLC and a host computer.

[Explanation of symbols]

Reference Signs List 1 PLC (programmable logic controller) 2 I / O unit (input / output device) 3 D / B communication I / O (database communication input / output) 4 communication cable 5 host computer 6 control program 7 D / B program 8 D / B File 9 D / B (database) 30 control unit (control means) 31 interface unit 32 central processing unit 33 storage device 34 communication processing unit 35 date / time counter 40 data management PC (computer) 41 PLC (for SCR) 42 PLC ( 43) bar code 50 control unit (control means) 51 recipe search (extraction) program 52 device control program 53 alarm information registration program 54 operation information registration program 55 processing result information registration program 56 processing start information registration program 57 D / B Communication I / O 5 Corresponding information setting unit (storage unit) 59 conversion unit (conversion unit) 60 buffer 61 alarm information D / B 62 operation information D / B 63 processing result information D / B 64 recipe information D / B 70 data management PC (computer) 71 PLC 73 New sensor 74 Existing air conditioner 75 Barcode reader 79 Control unit (control means) 80 D / B communication I / O 81 Device control program 82 Operation information registration program 83 Environmental information registration program 84 Production result information registration program 85 Compatible Information setting unit (storage unit) 86 conversion unit (conversion unit) 87 buffer 90 operation information D / B 91 production result information D / B 92 environment information D / B 101 PLC 102 I / O unit 103 communication cable 104 host computer 105 control Program 106 data reading, writing and D / B registration, Search program 107 D / B program 108 D / B file 109 D / B (database)

Claims (7)

[Claims] An automatic control system using a programmable logic controller that exchanges data with a database in a computer connected via a communication cable and controls an automatic machine based on the data, wherein the programmable logic controller Control means for outputting a search instruction for searching the database for data necessary for controlling the automatic machine from the database, and outputting a registration instruction for registering the automatic machine information of the automatic machine in the database. An input / output device that converts the search instruction and the registration instruction output by the control means into a search request and a registration request corresponding to the database, and transmits the request to the computer. system. 2. The input / output device includes: storage means for storing data structure information in the database; and correspondence information between data to be searched for and registered in the database; and the search instruction output by the control means, Receiving a registration instruction, reading the correspondence information related to the search instruction or the registration instruction from the storage unit, and converting the search instruction or the registration instruction into the search request or the registration request corresponding to the data structure of the database. The automatic control system according to claim 1, further comprising: a conversion unit that outputs the data to the computer. 3. The automatic control system according to claim 1, wherein said input / output device includes a buffer memory for storing output data of said control means for a predetermined time. 4. The automatic control according to claim 1, wherein said control means outputs a registration instruction for registering in said database based on information inputted from outside. system. 5. An automatic control system using a programmable logic controller for transmitting and receiving data to and from a database in a computer connected via a communication cable and controlling the automatic machine, wherein the programmable logic controller comprises: Transmitting a search request corresponding to the data structure of the database to the computer in order to search data required for control of the database from the database; andthe computer outputting a search result according to the search request. Controlling the automatic machine based on the search result by the programmable logic controller. 6. A request for registering the automatic machine information corresponding to a data structure in the database in order for the programmable logic controller to register automatic machine information on the automatic machine in the database in the computer. 6. The automatic control method according to claim 5, further comprising: transmitting the automatic machine information to the database in accordance with the registration request. 7. The automatic machine according to claim 6, wherein the automatic machine information is operating state information of the automatic machine, environmental information around the automatic machine, and performance information of the automatic machine. Control method.