JP2002020557A - Solvent-resistant fluororubber composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluororubber composition having modified solvent resistance while hardly damaging the properties possessed by a conventional synthetic rubber. SOLUTION: This solvent-resistant fluororubber composition comprises 100 pts.wt. terpolymer rubber of ethylene or propylene, tetrafluoroethylene and a perfluoro(alkyl vinyl ether), about 0.5-10 pts.wt. polyfunctional unsaturated compound, and about 0.5-5 pts.wt. organic peroxide.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a solvent-resistant fluororubber composition. More specifically, the present invention relates to a solvent-resistant fluororubber composition suitably used as a molding material for a rubber component used in a wet process of a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art Generally, polar rubbers such as nitrile rubber and fluoro rubber are resistant to non-polar solvents such as n-hexane and toluene, and non-polar rubbers such as EPDM and butyl rubber are resistant to polar solvents such as ketones and esters. However, few rubber compositions are resistant to both of these solvents. Tetrafluoroethylene-perfluoro (methyl vinyl ether) copolymer rubber and propylene-tetrafluoroethylene copolymer rubber have considerable resistance to both of these solvents, but both have the disadvantage of poor low-temperature properties. Is very expensive.

In a wet process of a semiconductor manufacturing apparatus,
Because the components are exposed to polar solvents, non-polar solvents, acids, alkalis and various other liquids and gases, expensive rubbers such as tetrafluoroethylene-perfluoro (methyl vinyl ether) The fact is that copolymer rubber must be used.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a fluororubber composition having improved solvent resistance without substantially impairing the performance of the conventional synthetic rubber.

[0005]

SUMMARY OF THE INVENTION The object of the present invention is as follows.
Contains 100 parts by weight of a terpolymer rubber of ethylene or propylene, tetrafluoroethylene and perfluoro (alkyl vinyl ether), about 0.5 to 10 parts by weight of a polyfunctional unsaturated compound and about 0.5 to 5 parts by weight of an organic peroxide And a solvent-resistant fluororubber composition.

[0006]

DETAILED DESCRIPTION OF THE INVENTION Ethylene [E] or propylene
[P], tetrafluoroethylene [TFE] and perfluoro
(Alkyl vinyl ether), preferably perfluoro
As the terpolymer rubber of (methyl vinyl ether) [FMVE], commercially available products, for example, those of Viton ETP series manufactured by DuPont Dow Elastomers and the like can be used as they are.

The terpolymer rubber can be crosslinked with an organic peroxide used in a proportion of about 0.5 to 5 parts by weight, preferably about 1 to 4 parts by weight, per 100 parts by weight thereof. As the organic peroxide, for example, tertiary butyl peroxide, dicumyl peroxide, tertiary butyl cumyl peroxide, 1,1-di (tertiary butylperoxy) -3,3,5-trimethylcyclohexane, 5-dimethyl-2,5-di (tert-butylperoxy) hexane, 2,5-dimethyl-2,5-di (tert-butylperoxy) hexyne-3,1,3-di (tert-butylperoxy) (Oxyisopropyl) benzene, 2,5-dimethyl-2,5-di (benzoylperoxy) hexane, tertiary butylperoxybenzoate, tertiary butylperoxyisopropyl carbonate, n-butyl-4,4-di (tertiary Butyl peroxy) valerate and the like are used.

When an organic peroxide crosslinking agent is used, a polyfunctional unsaturated compound is preferably used in combination as a crosslinking aid. Examples of the polyfunctional unsaturated compound used in an amount of about 0.5 to 10 parts by weight, preferably about 1 to 8 parts by weight, per 100 parts by weight of the terpolymer rubber include, for example, triallyl isocyanurate, triallyl cyanurate, Trimethylallyl isocyanurate, ethylene glycol dimethacrylate, trimethylolpropane trimethacrylate and the like are used.

[0009] If the proportion of the organic peroxide and the polyfunctional unsaturated compound is lower than this, a sufficient crosslink density cannot be obtained, while if the proportion is higher than this, foaming occurs and vulcanization molding is performed. No product can be obtained, or even if it is obtained, only products with reduced rubber elasticity and elongation can be obtained.

In the rubber composition, in addition to the above essential components, a reinforcing agent represented by carbon black, a filler such as talc, clay, graphite, calcium silicate, stearic acid, palmitic acid, paraffin wax, etc. Various additives generally used in the rubber industry, such as a processing aid, an acid acceptor such as zinc oxide and magnesium oxide, an antioxidant, and a plasticizer, are appropriately added and used as necessary.

The rubber composition is prepared by kneading using a kneading machine such as an intermix, kneader, Banbury mixer or an open roll, and the crosslinking thereof is carried out by an injection molding machine, a compression molding machine, a vulcanizing press. For example, it is generally carried out by heating at about 150 to 200 ° C. for about 3 to 60 minutes, and if necessary, secondary crosslinking by heating at about 150 to 250 ° C. for about 1 to 24 hours.

[0012]

The fluororubber composition according to the present invention can provide a crosslinked product having excellent solvent resistance while maintaining the properties of a conventional synthetic rubber such as vulcanizate properties and low-temperature properties. The fluororubber composition of the present invention having such characteristics is a sealing material that comes into contact with almost all solvents from a polar solvent to a nonpolar solvent, for example, a molding material such as an O-ring, a packing, a gasket, an oil seal, and a valve. It is particularly suitable as a molding material for rubber parts that can be suitably used even in a wet process of a semiconductor manufacturing apparatus using various liquids and gases.

[0013]

Next, the present invention will be described with reference to examples.

Example 1 E-TFE-FMVE terpolymer rubber 100 parts by weight (ETP500 manufactured by Dupont Dow Elastomer Co.) MT carbon black 30 亜 鉛 zinc oxide 3 〃 2,5-dimethyl-2,5-di 3 butyl peroxy) hexane 3 〃 triallyl isocyanurate 3 〃 The above components are kneaded with a kneader and an open roll, and the kneaded material is subjected to primary crosslinking at 170 ° C. for 30 minutes by a vulcanizing press and 200 ° C. Oven cross-linking (secondary cross-linking) was performed to obtain a sheet cross-linked product of 150 × 150 × 2 mm.

The following items were measured for the obtained sheet-like crosslinked product. Normal physical properties: Measured according to JIS K-6253, K-6251 Solvent resistance: In non-polar solvent toluene, polar solvent methyl ethyl ketone, acid 90% sulfuric acid or alkali 30% potassium hydroxide aqueous solution Measure the volume change rate after immersion for 168 hours at a specified temperature in accordance with JIS K-6258. Low temperature characteristics: Measure TR-10 value in accordance with JIS K-6261.

Example 2 In Example 1, white carbon (Nipsil LP, a product of Nippon Silica) was replaced with 30 parts by weight of MT carbon black.
20 parts by weight were used.

COMPARATIVE EXAMPLE 1 In Example 1, the same amount of vinylidene fluoride-tetrafluoroethylene-polymer was used instead of the E-TFE-FMVE terpolymer rubber.
Hexafluoropropene terpolymer rubber (Viton GF manufactured by DuPont Dow Elastomer Co.) was used.

Comparative Example 2 In Example 1, the same amount of TFE-P copolymer rubber (Nippon Synthetic Rubber Products AFLAS 150P) was used in place of the E-TFE-FMVE terpolymer rubber.

Comparative Example 3 In Example 1, the amount of the organic peroxide was changed to 8 parts by weight. This rubber composition was foamed during cross-linking molding, and molding was impossible.

Comparative Example 4 Ethylene-propylene copolymer rubber 100 parts by weight (Japanese synthetic rubber product EP33) SRF carbon black 75 亜 鉛 zinc oxide 5 〃 2,5-dimethyl-2,5-di (tert-butylperoxy) Kneading, crosslinking, and measurement were performed in the same manner as in Example 1 using each of the above components of hexane 2% triallyl isocyanurate 3% or more.

The measurement results in the above Examples and Comparative Examples are shown in the following table. Table Measurement items Actual-1 Actual-2 ratio-1 Ratio-2 ratio-4 [Physical properties] Hardness (Durometer A) 80 81 79 75 80 Tensile strength (MPa) 15.0 13.1 20.9 18.0 18.2 Elongation (%) 200 180 230 250 230 [Solvent resistance] 40 ° C toluene (%) +9 +10 +11 +60> +100 23 ° C methyl ethyl ketone (%) +19 +19> +100 +80 +12 23 ° C 90% H ₂ SO ₄ (%) +1 +1 +5 +5 +70 100 ° C 30% KOH (%) +6 +6 Dissolution +1 +2 [Low-temperature characteristics] TR-10 value (° C) -11 -10 -7 +2- 42

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Claims (4)

[Claims] 1. A terpolymer rubber of ethylene or propylene, tetrafluoroethylene and perfluoro (alkyl vinyl ether), 100 parts by weight, a polyfunctional unsaturated compound, about 0.5 to 10 parts by weight, and an organic peroxide, about 0.5 to 10 parts by weight. Solvent-resistant fluororubber composition containing 5 parts by weight. 2. The solvent-resistant fluororubber composition according to claim 1, which is used as a molding material for a sealing material. 3. A rubber component used in a wet process of a semiconductor manufacturing apparatus.
The solvent-resistant fluororubber composition described in the above. 4. The solvent-resistant fluororubber composition according to claim 3, wherein the rubber component is a sealing material.