JP2002014051A - Method and equipment for inspecting defect of porous ceramic member - Google Patents

Method and equipment for inspecting defect of porous ceramic member

Info

Publication number
JP2002014051A
JP2002014051A JP2000192924A JP2000192924A JP2002014051A JP 2002014051 A JP2002014051 A JP 2002014051A JP 2000192924 A JP2000192924 A JP 2000192924A JP 2000192924 A JP2000192924 A JP 2000192924A JP 2002014051 A JP2002014051 A JP 2002014051A
Authority
JP
Japan
Prior art keywords
porous ceramic
ceramic member
light
defect
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000192924A
Other languages
Japanese (ja)
Other versions
JP4030252B2 (en
JP2002014051A5 (en
Inventor
Takafumi Hoshino
孝文 星野
Norihiko Yamamura
範彦 山村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP2000192924A priority Critical patent/JP4030252B2/en
Publication of JP2002014051A publication Critical patent/JP2002014051A/en
Publication of JP2002014051A5 publication Critical patent/JP2002014051A5/ja
Application granted granted Critical
Publication of JP4030252B2 publication Critical patent/JP4030252B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for inspecting the defect of a porous ceramic member inexpensively and safely with high accuracy and productivity. SOLUTION: In the method for inspecting a defect existing in a porous ceramic member, the porous ceramic member has a large number of through holes in the longitudinal direction. The porous ceramic member is columnar and the through holes are filled, at one end parts thereof, with a filler in checker pattern. The through holes not filled with the filler at one end part are filled, at the other end parts, thereof, with the filler. Light is radiated from one end of the porous ceramic member so as to be in parallel with the through hole thereof and the light leaking to the other end of the porous ceramic member is detected, thus inspecting the defect of the porous ceramic member.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多孔質セラミック
部材の欠陥の検出を行うための多孔質セラミック部材の
欠陥検査方法、及び、この多孔質セラミック部材の欠陥
検査に用いられる検査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting a defect in a porous ceramic member for detecting a defect in a porous ceramic member, and an inspection apparatus used for the defect inspection of the porous ceramic member.

【0002】[0002]

【従来の技術】バス、トラック等の車両や建設機械等の
内燃機関から排出される排気ガス中に含有されるパティ
キュレートが環境や人体に害を及ぼすことが最近問題と
なっている。この排気ガスを多孔質セラミックを通過さ
せることにより、排気ガス中のパティキュレートを捕集
して排気ガスを浄化するセラミックフィルタが種々提案
されている。
2. Description of the Related Art Recently, it has become a problem that particulates contained in exhaust gas discharged from internal combustion engines such as vehicles such as buses and trucks and construction machines cause harm to the environment and human bodies. Various ceramic filters have been proposed which purify the exhaust gas by collecting the particulates in the exhaust gas by passing the exhaust gas through a porous ceramic.

【0003】セラミックフィルタは、通常、図3に示す
ような多孔質セラミック部材30が複数個結束されてセ
ラミックフィルタ40を構成している。また、この多孔
質セラミック部材30は、図4に示すように、長手方向
に多数の貫通孔31が並設され、貫通孔31同士を隔て
る隔壁33がフィルタとして機能するようになってい
る。
[0003] In the ceramic filter, a plurality of porous ceramic members 30 as shown in FIG. As shown in FIG. 4, the porous ceramic member 30 has a large number of through holes 31 arranged in a longitudinal direction, and a partition wall 33 separating the through holes 31 functions as a filter.

【0004】即ち、多孔質セラミック部材30に形成さ
れた貫通孔31は、図4(b)に示すように、排気ガス
の入口側又は出口側の端部のいずれかが充填材32によ
り目封じされ、一の貫通孔31に流入した排気ガスは、
必ず貫通孔31を隔てる隔壁33を通過した後、他の貫
通孔31から流出するようになっており、排気ガスがこ
の隔壁33を通過する際、パティキュレートが隔壁33
部分で捕捉され、排気ガスが浄化される。このとき多孔
質セラミック部材30に欠陥が存在すると、パティキュ
レートがこの欠陥を通過してしまい、このような多孔質
セラミック部材を用いたセラミックフィルタでは、充分
に排気ガスを浄化することができない。
[0004] That is, as shown in FIG. 4 (b), the through hole 31 formed in the porous ceramic member 30 is plugged with a filler 32 at one of the exhaust gas inlet and outlet ends. The exhaust gas flowing into one through hole 31 is
After passing through the partition 33 which always separates the through-hole 31, it flows out from the other through-holes 31. When exhaust gas passes through this partition 33, the particulates
The part is trapped and the exhaust gas is purified. At this time, if a defect is present in the porous ceramic member 30, the particulates pass through the defect, and a ceramic filter using such a porous ceramic member cannot sufficiently purify exhaust gas.

【0005】従って、このような欠陥がセラミックフィ
ルタに存在するか否かを確認する検査が必要となる。し
かしながら、セラミックフィルタを製造してから、この
ような検査を行うと時間的、コスト的な無駄が多いた
め、セラミックフィルタを製造する前の多孔質セラミッ
ク部材30の段階で、多孔質セラミック部材30に欠陥
が存在するか否かの検査を行う。従来、このような欠陥
の有無を確認する方法としては、多孔質セラミック部材
30にX線を照射し、該X線の透過率から欠陥の有無を
確認する方法等が用いられていた。
[0005] Therefore, it is necessary to carry out an inspection for confirming whether or not such a defect exists in the ceramic filter. However, if such an inspection is performed after the ceramic filter is manufactured, there is a lot of waste in terms of time and cost. Therefore, in the stage of the porous ceramic member 30 before the ceramic filter is manufactured, the porous ceramic member 30 is not used. An inspection is performed to determine whether a defect exists. Conventionally, as a method of confirming the presence or absence of such a defect, a method of irradiating the porous ceramic member 30 with X-rays and confirming the presence or absence of the defect based on the transmittance of the X-ray has been used.

【0006】しかしながら、このようなX線を用いる方
法は費用がかかるため、製造コストの高騰を招き、ま
た、X線は人体に対して有害であるため、作業に危険を
伴うものであった。
[0006] However, such a method using X-rays is costly, resulting in an increase in manufacturing costs. In addition, since X-rays are harmful to the human body, the work is dangerous.

【0007】更に、図5に示すように、多孔質セラミッ
ク部材30の軸方向と垂直な方向からX線を照射するこ
とにより、このX線の透過率から多孔質セラミック部材
30の欠陥の有無を確認することができるが、充填材3
2付近に存在する欠陥についてはX線が透過する厚さが
厚くなるため、欠陥の存在を正確に確認することが困難
であった。また、X線を多孔質セラミック部材30の軸
方向から照射しても、同様に充填材付近の欠陥の存在を
正確に確認することは困難であった。
Further, as shown in FIG. 5, by irradiating X-rays from a direction perpendicular to the axial direction of the porous ceramic member 30, the presence or absence of a defect in the porous ceramic member 30 is determined from the transmittance of the X-rays. It can be confirmed that the filler 3
As for the defect existing in the vicinity of No. 2, the thickness through which the X-rays are transmitted becomes thick, so that it was difficult to accurately confirm the existence of the defect. Further, even when X-rays are irradiated from the axial direction of the porous ceramic member 30, it is difficult to accurately confirm the presence of defects near the filler similarly.

【0008】[0008]

【発明が解決しようとする課題】本発明は、これらの問
題を解決するためになされたもので、多孔質セラミック
部材の欠陥を安価で安全に、しかも、精度よく検出する
ことができる多孔質セラミック部材の欠陥検査方法、及
び、上記多孔質セラミック部材の検査方法に用いられる
検査装置を提供することを目的とするものである。
SUMMARY OF THE INVENTION The present invention has been made in order to solve these problems, and a porous ceramic member capable of detecting a defect of a porous ceramic member at low cost, safely, and accurately. It is an object of the present invention to provide a defect inspection method for a member and an inspection device used for the method for inspecting a porous ceramic member.

【0009】[0009]

【課題を解決するための手段】本発明の多孔質セラミッ
ク部材の欠陥検査方法は、多孔質セラミック部材に存在
する欠陥の検出を行う欠陥検査方法であって、上記多孔
質セラミック部材は、その長手方向に多数の貫通孔が並
設され、上記貫通孔の一端部は、市松模様に充填材が充
填されており、かつ、他端部は、上記一端部に充填材が
充填されていない貫通孔に充填材が充填されている柱状
の多孔質セラミック部材であり、上記多孔質セラミック
部材の欠陥の検出は、上記多孔質セラミック部材の一端
から上記多孔質セラミック部材の貫通孔に平行になるよ
うに光を照射し、上記多孔質セラミック部材の他端部に
漏洩してくる光を検出することにより行うことを特徴と
するものである。
According to the present invention, there is provided a method for inspecting a defect of a porous ceramic member, the method comprising detecting a defect present in the porous ceramic member. A large number of through holes are juxtaposed in the direction, one end of the through hole is filled with a filler in a checkered pattern, and the other end is a through hole in which the one end is not filled with the filler. Is a columnar porous ceramic member filled with a filler, and the detection of the defect of the porous ceramic member is performed so that one end of the porous ceramic member is parallel to the through hole of the porous ceramic member. The method is characterized by irradiating light and detecting light leaking to the other end of the porous ceramic member.

【0010】また、本発明の多孔質セラミック部材の欠
陥検査装置は、多孔質セラミック部材に存在する欠陥の
検出を行う欠陥検査装置であって、上記多孔質セラミッ
ク部材は、その長手方向に多数の貫通孔が並設され、上
記貫通孔の一端部は、市松模様に充填材が充填されてお
り、かつ、他端部は、上記一端部に充填材が充填されて
いない貫通孔に充填材が充填されている柱状の多孔質セ
ラミック部材であり、上記欠陥検査装置は、上記多孔質
セラミック部材の一端から上記多孔質セラミック部材の
貫通孔に平行になるように光を照射する光照射手段と、
上記多孔質セラミック部材の他端部に漏洩してくる光を
検出する光検出手段と、上記多孔質セラミック部材を、
上記光照射手段と上記光検出手段とを結ぶ直線と上記貫
通孔とが平行になるように、上記光照射手段と上記光検
出手段との間に前記多孔質セラミック部材を移動させた
後、上記多孔質セラミック部材の一端部から上記充填材
で目封じされた貫通孔を含む全ての貫通孔に光が照射さ
れるように、上記多孔質セラミック部材を逐次移動させ
るように構成された移動手段とを備えていることを特徴
とするものである。
Further, the defect inspection apparatus for a porous ceramic member according to the present invention is a defect inspection apparatus for detecting a defect existing in the porous ceramic member, wherein the porous ceramic member has a large number in its longitudinal direction. Through holes are provided side by side, one end of the through hole is filled with a filler in a checkered pattern, and the other end is filled with a filler in a through hole where the one end is not filled with a filler. A column-shaped porous ceramic member that is filled, wherein the defect inspection device is configured to irradiate light from one end of the porous ceramic member so as to be parallel to a through hole of the porous ceramic member;
Light detection means for detecting light leaking to the other end of the porous ceramic member, the porous ceramic member,
After moving the porous ceramic member between the light irradiating means and the light detecting means, such that a straight line connecting the light irradiating means and the light detecting means and the through hole are parallel to each other, A moving means configured to sequentially move the porous ceramic member so that light is irradiated from one end of the porous ceramic member to all through holes including the through hole sealed with the filler. It is characterized by having.

【0011】[0011]

【発明の実施の形態】以下、本発明の多孔質セラミック
部材の欠陥検査方法及び欠陥検査装置の実施形態につい
て、図面を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a method and an apparatus for inspecting defects of a porous ceramic member according to the present invention will be described with reference to the drawings.

【0012】本発明の多孔質セラミック部材の欠陥検査
方法は、多孔質セラミック部材に存在する欠陥の検出を
行う欠陥検査方法であって、上記多孔質セラミック部材
は、その長手方向に多数の貫通孔が並設され、上記貫通
孔の一端部は、市松模様に充填材が充填されており、か
つ、他端部は、上記一端部に充填材が充填されていない
貫通孔に充填材が充填されている柱状の多孔質セラミッ
ク部材であり、上記多孔質セラミック部材の欠陥の検出
は、上記多孔質セラミック部材の一端から上記多孔質セ
ラミック部材の貫通孔に平行になるように光を照射し、
上記多孔質セラミック部材の他端部に漏洩してくる光を
検出することにより行うことを特徴とするものである。
[0012] The defect inspection method for a porous ceramic member according to the present invention is a defect inspection method for detecting a defect present in a porous ceramic member, wherein the porous ceramic member has a large number of through holes in a longitudinal direction thereof. Are arranged side by side, one end of the through hole is filled with a filler in a checkered pattern, and the other end is filled with a filler in a through hole in which the one end is not filled with a filler. Is a columnar porous ceramic member, and the detection of the defect of the porous ceramic member is performed by irradiating light from one end of the porous ceramic member so as to be parallel to a through hole of the porous ceramic member,
The detection is performed by detecting light leaking to the other end of the porous ceramic member.

【0013】まず、本発明で検査の対象となる多孔質セ
ラミック部材について、図1(a)及び(b)を参照し
ながら説明する。図1(a)は、上記多孔質セラミック
部材の一形態を示す斜視図であり、図1(b)は、図1
(a)のA−A線断面図である。
First, a porous ceramic member to be inspected in the present invention will be described with reference to FIGS. 1 (a) and 1 (b). FIG. 1A is a perspective view showing one embodiment of the porous ceramic member, and FIG.
FIG. 3A is a sectional view taken along line AA of FIG.

【0014】上記多孔質セラミック部材は、図1(a)
に示すように、その長手方向に多数の貫通孔11が並設
され、貫通孔11の一端部は、市松模様に充填材12が
充填されており、かつ、他端部は、一端部に充填材12
が充填されていない貫通孔11に充填材12が充填され
ている柱状のものである。
The porous ceramic member is shown in FIG.
As shown in the figure, a large number of through holes 11 are arranged in the longitudinal direction, one end of the through hole 11 is filled with a filler 12 in a checkered pattern, and the other end is filled with one end. Lumber 12
Is a columnar shape in which the filler 12 is filled in the through holes 11 not filled with the filler.

【0015】上記多孔質セラミック部材の内部は、図1
(b)に示すように隔壁13が形成されている。そのた
め、一の貫通孔11に流入した気体は、必ず貫通孔11
を隔てる隔壁13を通過した後、他の貫通孔11から流
出するようになっており、気体中に粉体等の隔壁13を
通過できない物質が存在している場合、隔壁13を通過
できない物質は、気体がこの隔壁13を通過する際、隔
壁13部分で捕捉されることとなる。また、図1(a)
に示した多孔質セラミック部材10は、四角柱形状であ
るが、欠陥検査の対象となる多孔質セラミック部材の形
状は、四角柱形状に限定されず、三角柱や五角柱形状で
あってもよく、円柱形状であってもよい。
The inside of the porous ceramic member is shown in FIG.
The partition 13 is formed as shown in FIG. Therefore, the gas flowing into one through hole 11 must be
After passing through the partition 13 separating the partition wall 13, it flows out from the other through-hole 11. If there is a substance such as powder in the gas that cannot pass through the partition 13, the substance that cannot pass through the partition 13 is When the gas passes through the partition 13, the gas is trapped at the partition 13. FIG. 1 (a)
Although the porous ceramic member 10 shown in (1) has a square pillar shape, the shape of the porous ceramic member to be subjected to the defect inspection is not limited to the square pillar shape, and may be a triangular pillar or a pentagonal pillar shape. It may be cylindrical.

【0016】多孔質セラミック部材10は、例えば、セ
ラミック粉末とバインダーと分散媒液との混合組成物を
調製後、この混合組成物を押出成形機を用いて成形し、
得られた成形体の貫通孔に市松模様に充填剤を充填した
後、乾燥、脱脂を行い、焼成することにより製造する。
上記セラミック粉末としては特に限定されず、例えば、
炭化珪素、窒化珪素、窒化アルミニウム、窒化硼素、窒
化チタン、炭化チタン等の非酸化物系セラミックの粉
末;アルミナ、コージェライト、ムライト、シリカ、ジ
ルコニア、チタニア等の酸化物系セラミックの粉末等を
挙げることができる。これらのなかでは、耐熱性に優れ
る炭化珪素、窒化珪素、窒化アルミニウム等の粉末が好
ましい。
The porous ceramic member 10 is prepared by, for example, preparing a mixed composition of a ceramic powder, a binder, and a dispersion medium, and then molding the mixed composition using an extruder.
After the filler is filled in a checkered pattern in the through-holes of the obtained molded body, drying, degreasing and firing are performed.
The ceramic powder is not particularly limited, for example,
Non-oxide ceramic powders such as silicon carbide, silicon nitride, aluminum nitride, boron nitride, titanium nitride, and titanium carbide; and oxide ceramic powders such as alumina, cordierite, mullite, silica, zirconia, and titania. be able to. Among these, powders of silicon carbide, silicon nitride, aluminum nitride, and the like having excellent heat resistance are preferable.

【0017】これらセラミック粉末の粒径は特に限定さ
れるものではないが、後の焼成過程で収縮が少ないもの
が好ましく、例えば、0.3〜50μm程度の平均粒子
径を有する粉末100重量部と0.1〜1.0μm程度
の平均粒子径を有する粉末5〜65重量部とを組み合わ
せたものが好ましい。
The particle size of these ceramic powders is not particularly limited, but it is preferable that the shrinkage is small in the subsequent firing step, for example, 100 parts by weight of a powder having an average particle size of about 0.3 to 50 μm. What combined with 5 to 65 weight part of powder which has an average particle diameter of about 0.1-1.0 micrometer is preferable.

【0018】上記バインダーとしては特に限定されず、
例えば、メチルセルロース、カルボキシメチルセルロー
ス、ヒドロキシエチルセルロース、ポリエチレングリコ
ール、フェノール樹脂、エポキシ樹脂等を挙げることが
できる。上記バインダーの配合量は、通常、セラミック
粉末100重量部に対して、1〜10重量部程度が好ま
しい。
The binder is not particularly limited.
For example, methylcellulose, carboxymethylcellulose, hydroxyethylcellulose, polyethylene glycol, phenol resin, epoxy resin and the like can be mentioned. Usually, the amount of the binder is preferably about 1 to 10 parts by weight based on 100 parts by weight of the ceramic powder.

【0019】上記分散媒液としては特に限定されず、例
えば、ベンゼン等の有機溶媒;メタノール等のアルコー
ル、水等を挙げることができる。上記分散媒液は、混合
組成物の粘度が一定範囲内となるように、適量配合され
る。これらセラミック粉末とバインダーと分散媒液等と
は、アトライター等で混合された後、ニーダー等で充分
に混練され、押出成形装置に投入される。
The dispersion medium is not particularly restricted but includes, for example, organic solvents such as benzene; alcohols such as methanol, and water. The dispersion medium is mixed in an appropriate amount so that the viscosity of the mixed composition falls within a certain range. The ceramic powder, the binder, the dispersion medium, and the like are mixed by an attritor or the like, then sufficiently kneaded by a kneader or the like, and then put into an extrusion molding apparatus.

【0020】次に、本発明の多孔質セラミック部材の欠
陥検査方法について図1(b)を参照しながら説明す
る。本発明の多孔質セラミック部材の欠陥検査方法は、
貫通孔11の一端部から光を貫通孔11と平行な方向に
照射した後、その貫通孔11の他端部に漏洩してくる光
の有無を検出することにより欠陥14の有無を検査する
ものである。
Next, a method for inspecting a porous ceramic member for defects according to the present invention will be described with reference to FIG. The defect inspection method of the porous ceramic member of the present invention,
After irradiating light from one end of the through hole 11 in a direction parallel to the through hole 11, the presence or absence of the defect 14 is detected by detecting the presence or absence of light leaking to the other end of the through hole 11. It is.

【0021】即ち、充填材12又は充填材12と隔壁1
3との間等に欠陥14が存在する場合には、貫通孔11
の一端部から照射された光は、欠陥14を通過した後、
貫通孔11の他端部に到達する(光路α)。従って、こ
の到達する光の有無を検出することにより、欠陥14を
検出することができる。
That is, the filler 12 or the filler 12 and the partition 1
3 and the like, when the defect 14 exists,
The light emitted from one end of the
The light reaches the other end of the through hole 11 (optical path α). Therefore, the defect 14 can be detected by detecting the presence or absence of the reaching light.

【0022】一方、充填材12又は充填材12と隔壁1
3との間等に欠陥14が存在しない場合には、貫通孔1
1の一端部から照射された光は、充填材12を通過する
ことができず、そのため、貫通孔11の他端部に光が検
出されることはない(光路β)。従って、貫通孔11の
他端部で光が検出されない多孔質セラミック部材10に
は欠陥14が存在しないことがわかる。上記欠陥検査方
法を実施することにより、多孔質セラミック部材10に
欠陥14が存在するか否かを検査することができる。
On the other hand, the filler 12 or the filler 12 and the partition 1
If no defect 14 exists between the through hole 1 and
The light emitted from one end of the first hole 1 cannot pass through the filler 12, so that no light is detected at the other end of the through hole 11 (optical path β). Therefore, it can be seen that no defect 14 exists in the porous ceramic member 10 in which no light is detected at the other end of the through hole 11. By performing the above-described defect inspection method, it is possible to inspect whether or not the defect 14 exists in the porous ceramic member 10.

【0023】照射する光の種類としては特に限定されな
いが、可視光線であることが好ましい。また、この光は
白色光であっても、単色光であってもよい。光の漏洩の
有無を目視で観測することができるからであり、また、
これらの光は多孔質セラミック部材10や充填材12を
透過することがないからである。
The type of light to be irradiated is not particularly limited, but is preferably visible light. This light may be white light or monochromatic light. This is because the presence or absence of light leakage can be visually observed,
This is because such light does not pass through the porous ceramic member 10 or the filler 12.

【0024】このように、本発明の欠陥検査方法は、貫
通孔の一端部から照射された光が、その貫通孔の他端部
に漏洩したか否かにより、欠陥の存在の有無を判別する
ため、X線照射で欠陥の有無を判別する方法に比べ、安
価で安全に、しかも、正確に欠陥の有無を判別すること
ができ、また、破壊検査と異なり全数検査をすることが
できる。
As described above, according to the defect inspection method of the present invention, the presence or absence of a defect is determined based on whether or not the light emitted from one end of the through hole leaks to the other end of the through hole. Therefore, as compared with the method of determining the presence or absence of a defect by X-ray irradiation, the presence or absence of a defect can be determined cheaply, safely, and accurately, and a 100% inspection can be performed unlike a destructive inspection.

【0025】次に、本発明の多孔質セラミック部材の欠
陥検査装置について、図2を参照しながら説明する。本
発明の多孔質セラミック部材の欠陥検査装置は、多孔質
セラミック部材に存在する欠陥の検出を行う欠陥検査装
置であって、上記多孔質セラミック部材は、その長手方
向に多数の貫通孔が並設され、上記貫通孔の一端部は、
市松模様に充填材が充填されており、かつ、他端部は、
上記一端部に充填材が充填されていない貫通孔に充填材
が充填されている柱状の多孔質セラミック部材であり、
上記欠陥検査装置は、上記多孔質セラミック部材の一端
から上記多孔質セラミック部材の貫通孔に平行になるよ
うに光を照射する光照射手段と、上記多孔質セラミック
部材の他端部に漏洩してくる光を検出する光検出手段
と、上記多孔質セラミック部材を、上記光照射手段と上
記光検出手段とを結ぶ直線と上記貫通孔とが平行になる
ように、上記光照射手段と上記光検出手段との間に前記
多孔質セラミック部材を移動させた後、上記多孔質セラ
ミック部材の一端部から上記充填材で目封じされた貫通
孔を含む全ての貫通孔に光が照射されるように、上記多
孔質セラミック部材を逐次移動させるように構成された
移動手段とを備えていることを特徴とするものである。
Next, a defect inspection apparatus for a porous ceramic member according to the present invention will be described with reference to FIG. The defect inspection device for a porous ceramic member according to the present invention is a defect inspection device for detecting a defect existing in the porous ceramic member, and the porous ceramic member has a large number of through holes arranged in a longitudinal direction thereof. And one end of the through hole is
The checkerboard pattern is filled with filler, and the other end is
A pillar-shaped porous ceramic member in which the filler is filled in the through hole in which the one end is not filled with the filler,
The defect inspection device is a light irradiation unit that irradiates light from one end of the porous ceramic member so as to be parallel to a through hole of the porous ceramic member, and leaks to the other end of the porous ceramic member. Light detecting means for detecting incoming light; and the porous ceramic member, wherein the light irradiating means and the light detecting means are arranged such that a straight line connecting the light irradiating means and the light detecting means is parallel to the through hole. After moving the porous ceramic member between the means, so that light is irradiated from one end of the porous ceramic member to all through holes including the through hole plugged with the filler, Moving means configured to sequentially move the porous ceramic member.

【0026】図2(a)は、本発明の多孔質セラミック
部材の欠陥検査装置の一部を模式的に示した平面図であ
り、(b)は、多孔質セラミック部材が移動する方向を
示した正面図である。本発明の多孔質セラミック部材の
欠陥検査装置において検査の対象となる多孔質セラミッ
ク部材の欠陥は、上記本発明の多孔質セラミック部材の
欠陥検査方法において説明したものと同様である。
FIG. 2A is a plan view schematically showing a part of the defect inspection apparatus for a porous ceramic member according to the present invention, and FIG. 2B shows the direction in which the porous ceramic member moves. FIG. The defect of the porous ceramic member to be inspected by the defect inspection apparatus for a porous ceramic member according to the present invention is the same as that described in the defect inspection method for a porous ceramic member according to the present invention.

【0027】図2(a)に示したように、本発明の多孔
質セラミック部材の欠陥検査装置20は、光を照射する
光照射手段21と、光を検出する光検出手段22と、図
示はしないが、多孔質セラミック部材10を所定の位置
に移動させる移動手段とを備えている。
As shown in FIG. 2A, a defect inspection apparatus 20 for a porous ceramic member according to the present invention comprises a light irradiation means 21 for irradiating light, a light detection means 22 for detecting light, and Although not shown, a moving means for moving the porous ceramic member 10 to a predetermined position is provided.

【0028】ここで、多孔質セラミック部材10とは、
上記多孔質セラミック部材の欠陥検査方法で説明した多
孔質セラミック部材10と同様のものである。
Here, the porous ceramic member 10 is
This is the same as the porous ceramic member 10 described in the above-described method for inspecting the porous ceramic member for defects.

【0029】光照射手段21としては、多孔質セラミッ
ク部材10の貫通孔に平行に光を照射することができる
ものであれば特に限定されず、例えば、電球等を用いた
照射装置、サーチライト、発光ダイオード、レーザー等
任意の手段を挙げることができる。また、照射される光
は、可視光線であることが好ましい。多孔質セラミック
部材の欠陥検査方法で記載した理由と同様の理由によ
る。
The light irradiating means 21 is not particularly limited as long as it can irradiate light in parallel with the through-hole of the porous ceramic member 10. For example, an irradiating device using a light bulb or the like, a search light, Any means such as a light emitting diode and a laser can be used. Further, it is preferable that the irradiated light is a visible light. The reason is the same as that described in the method for inspecting defects of a porous ceramic member.

【0030】また、光検出手段22としては、光を検出
することができるものであれば任意の手段を挙げること
ができるが、CCDカメラを用いることが好ましい。C
CDカメラと表示装置とを配線で接続することにより、
光の漏洩を目視で容易に確認することができるととも
に、多孔質セラミック部材10が所定の位置にあるかど
うかの確認もすることができるからである。また、CC
Dカメラに光が入射すると、電流が逃れるので、この電
流を検出し、コンピュータ等に入力することにより、光
が漏洩したか否かを自動的に判定することができる。
As the light detecting means 22, any means can be used as long as it can detect light, but it is preferable to use a CCD camera. C
By connecting the CD camera and the display device with wiring,
This is because light leakage can be easily confirmed visually, and whether the porous ceramic member 10 is at a predetermined position can be confirmed. Also, CC
When light enters the D camera, the current escapes. Therefore, by detecting this current and inputting it to a computer or the like, it is possible to automatically determine whether or not light has leaked.

【0031】また、この光照射手段21と光検出手段2
2とは同一線上に固定されている。光照射手段21から
多孔質セラミック部材10の貫通孔に平行に照射された
光の漏洩の有無を光検出手段22が検出するからであ
る。
The light irradiation means 21 and the light detection means 2
2 is fixed on the same line. This is because the light detection unit 22 detects whether or not the light irradiated from the light irradiation unit 21 in parallel to the through hole of the porous ceramic member 10 has leaked.

【0032】上記移動手段としては特に限定されず、例
えば、ロボットアーム等で多孔質セラミック部材10を
支持し、移動させることができる。また、この移動手段
は、多孔質セラミック部材10の一の貫通孔を光照射手
段21と光検出手段22とが形成する直線上に移動させ
た後、充填材で目封じされた貫通孔を含む多孔質セラミ
ック部材10の全ての貫通孔について逐次移動するよう
に構成されている。ここで、図2(b)に、多孔質セラ
ミック部材10の移動方向23を屈曲した矢印で示して
いるが、本発明の多孔質セラミック部材の欠陥検査装置
で、多孔質セラミック部材の移動方向はこれに限定され
るものではなく、例えば、図2(b)の移動方向23を
90°回転させた方向や螺旋状等の移動方向を挙げるこ
とができる。
The moving means is not particularly limited. For example, the porous ceramic member 10 can be supported and moved by a robot arm or the like. Further, the moving means includes a through hole sealed by a filler after moving one through hole of the porous ceramic member 10 on a straight line formed by the light irradiation means 21 and the light detection means 22. All the through holes of the porous ceramic member 10 are configured to sequentially move. Here, in FIG. 2 (b), the moving direction 23 of the porous ceramic member 10 is indicated by a bent arrow, but the moving direction of the porous ceramic member in the porous ceramic member defect inspection apparatus of the present invention is as follows. The present invention is not limited to this, and examples thereof include a direction obtained by rotating the moving direction 23 in FIG. 2B by 90 ° and a moving direction such as a spiral.

【0033】次に、本発明の多孔質セラミック部材の欠
陥検査装置を使用した欠陥検査方法について説明する。
まず、充填材を充填し焼成した多孔質セラミック部材を
製造する。次に、この多孔質セラミック部材をロボット
アーム等で支持、固定した後、光照射手段と光検出手段
とが形成する直線上に移動させる。
Next, a defect inspection method using the defect inspection apparatus for a porous ceramic member according to the present invention will be described.
First, a porous ceramic member filled with a filler and fired is manufactured. Next, the porous ceramic member is supported and fixed by a robot arm or the like, and then moved on a straight line formed by the light irradiation means and the light detection means.

【0034】このとき、上記光照射手段が照射する光が
上記多孔質セラミック部材の一の貫通孔に平行に照射さ
れるように、上記多孔質セラミック部材を移動させる。
また、上記一の貫通孔は、多孔質セラミック部材の四隅
に形成されたいずれか1の貫通孔であることが好まし
い。多孔質セラミック部材を移動させる際の移動方向を
単純なものとすることができるからである。
At this time, the porous ceramic member is moved so that the light irradiated by the light irradiation means is irradiated in parallel to one through hole of the porous ceramic member.
Further, the one through hole is preferably any one of the four through holes formed at the four corners of the porous ceramic member. This is because the moving direction when moving the porous ceramic member can be simplified.

【0035】多孔質セラミック部材を所定の位置に移動
させた後、光照射手段からレーザー等を多孔質セラミッ
ク部材の貫通孔と平行に照射する。そして、CCDカメ
ラ等の光検出手段が漏洩してくる光の有無を検出する。
ここで、光の漏洩が確認されなければ、次の貫通孔が光
照射手段と光検出手段とが形成する直線上にくるように
多孔質セラミック部材を移動させ、同様の検査を行う。
同様の検査を充填材で目封じされた貫通孔を含む全ての
貫通孔について逐次行うことにより、多孔質セラミック
部材の欠陥の有無を検査する。
After moving the porous ceramic member to a predetermined position, a laser or the like is irradiated from a light irradiation means in parallel with the through-hole of the porous ceramic member. Then, light detecting means such as a CCD camera detects the presence or absence of leaking light.
Here, if light leakage is not confirmed, the same inspection is performed by moving the porous ceramic member so that the next through hole is on a straight line formed by the light irradiation means and the light detection means.
The same inspection is sequentially performed on all the through-holes including the through-hole sealed with the filler, thereby inspecting the porous ceramic member for defects.

【0036】また、CCDカメラ等の光検出手段に光の
漏洩が検出されると、その時点で上記ロボットアーム等
が多孔質セラミック部材を欠陥品として生産ラインから
はじき出すようになっている。貫通孔の全てについて検
査した後、多孔質セラミック部材をはじき出すように設
定していてもよいが、この場合、時間的無駄が多いため
光の漏洩が確認された時点ではじき出すように設定され
ていることが好ましい。
When light leakage is detected by a light detecting means such as a CCD camera, the robot arm or the like repels the porous ceramic member as a defective product from the production line at that time. After inspecting all of the through holes, the porous ceramic member may be set to repel, but in this case, it is set to repel at the time when light leakage is confirmed due to much waste of time. Is preferred.

【0037】このような一連の検査工程は、コンピュー
タ等の制御手段により自動的に制御をしながら行う。即
ち、上記コンピュータ等の制御手段が、光照射手段、光
検出手段、移動手段等の各手段と接続されており、多孔
質セラミック部材の移動、光の照射、光の漏洩の確認、
多孔質セラミック部材のはじき出し等の各制御を自動的
に行うようになっている。また、ディスプレイ等の表示
手段を光検出手段と直接に、又は、上記制御手段を介し
て接続することにより、各検査過程を目視により確認す
ることができるようにもなっている。
Such a series of inspection steps are performed while being automatically controlled by control means such as a computer. That is, the control unit such as the computer is connected to each unit such as a light irradiation unit, a light detection unit, and a movement unit, and the movement of the porous ceramic member, the irradiation of light, the confirmation of light leakage,
Each control such as popping out of the porous ceramic member is automatically performed. Further, by connecting display means such as a display directly to the light detection means or via the control means, each inspection process can be visually confirmed.

【0038】本発明の多孔質セラミック部材の欠陥検査
装置の制御をコンピュータ等の制御手段で行うことによ
り、多孔質セラミック部材の欠陥検査を迅速に、しか
も、正確に行うことができるとともに、ディスプレイ等
の表示手段を設けることで検査状況を目視で逐一チェッ
クすることができる。
By controlling the defect inspection apparatus for a porous ceramic member of the present invention by a control means such as a computer, the defect inspection of the porous ceramic member can be performed quickly and accurately, and the display and the like can be controlled. Inspection status can be checked visually one by one by providing the display means.

【0039】このように、本発明の多孔質セラミック部
材の欠陥検査装置は、貫通孔の一端部から照射された光
が、その貫通孔の他端部に漏洩したか否かにより多孔質
セラミック部材の欠陥の有無を判別するため、X線照射
で欠陥を判別する方法に比べ、安価で安全に、しかも、
正確に欠陥の有無を判別することができる。また、破壊
検査とは異なり、全数検査を行うことができる。また、
漏洩してくる光を検出すると直ちに欠陥と判別すること
ができるため生産性が高い。
As described above, the defect inspection apparatus for a porous ceramic member according to the present invention uses the porous ceramic member according to whether or not the light irradiated from one end of the through hole leaks to the other end of the through hole. In order to determine the presence or absence of a defect, compared to a method of determining a defect by X-ray irradiation, it is cheaper, safer, and
The presence or absence of a defect can be accurately determined. Also, unlike the destructive inspection, a 100% inspection can be performed. Also,
When the leaked light is detected, it can be immediately determined to be a defect, so that the productivity is high.

【0040】[0040]

【実施例】以下に実施例を掲げて本発明を更に詳しく説
明するが、本発明はこれら実施例のみに限定されるもの
ではない。
The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.

【0041】実施例1 炭化珪素粉末に有機バインダー、水等を加えて混練した
後、押し出し成形を行い、ハニカム形状の成形体を作製
し、続いて、乾燥、脱脂、焼成を行うことにより、図1
に示すような平均気孔径が5〜20μmで、1cm2
たりのセル数が31個で、隔壁の厚さが0.3mmの多
孔質セラミック部材を作製した。
Example 1 An organic binder, water, etc. were added to a silicon carbide powder and kneaded, followed by extrusion molding to produce a honeycomb-shaped molded body, followed by drying, degreasing, and firing. 1
A porous ceramic member having an average pore diameter of 5 to 20 μm, 31 cells per cm 2 , and a partition wall thickness of 0.3 mm was prepared as shown in FIG.

【0042】次に、得られた多孔質セラミック部材につ
いて、図2に示した多孔質セラミック部材の欠陥検査装
置20を用いて欠陥の有無を検査し、欠陥のある多孔質
セラミック部材と欠陥のない多孔質セラミック部材とに
分別した。
Next, the obtained porous ceramic member is inspected for defects using the porous ceramic member defect inspection apparatus 20 shown in FIG. It was separated into a porous ceramic member.

【0043】次に、各多孔質セラミック部材の充填材付
近を多孔質セラミック部材の軸方向と垂直方向に切断し
て欠陥の有無を目視で確認した。
Next, the vicinity of the filler of each porous ceramic member was cut in a direction perpendicular to the axial direction of the porous ceramic member, and the presence or absence of defects was visually checked.

【0044】その結果、本発明の多孔質セラミック部材
の欠陥検査装置20により欠陥が検出された多孔質セラ
ミック部材では、充填材と隔壁との間に欠陥が確認さ
れ、一方、欠陥が検出されなかった多孔質セラミック部
材では、欠陥は確認されなかった。
As a result, in the porous ceramic member in which a defect was detected by the porous ceramic member defect inspection apparatus 20 of the present invention, a defect was confirmed between the filler and the partition wall, while no defect was detected. No defects were found in the porous ceramic member.

【0045】[0045]

【発明の効果】本発明の多孔質セラミック部材の欠陥検
査方法は、上述の通りであるので、多孔質セラミック部
材の欠陥を安価で安全に、しかも、精度よく検出するこ
とができ、かつ、生産性が高いものである。
The method for inspecting defects of a porous ceramic member according to the present invention is as described above. Therefore, the defect of the porous ceramic member can be detected at low cost, safely and accurately, and the production can be performed. It is highly likely.

【0046】また、本発明の多孔質セラミック部材の欠
陥検査装置は、上述の通りであるので、この検査装置を
用いることにより、安価で安全に、しかも、精度よく、
かつ、高い生産性で多孔質セラミック部材の欠陥を検出
することができる。
The defect inspection apparatus for a porous ceramic member according to the present invention is as described above. Therefore, by using this inspection apparatus, it is possible to provide a low-cost, safe, and accurate apparatus.
In addition, defects of the porous ceramic member can be detected with high productivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は、本発明の検査対象である多孔質セラ
ミック部材の一例を模式的に示した斜視図であり、
(b)は、(a)のA−A線断面図である。
FIG. 1A is a perspective view schematically showing an example of a porous ceramic member to be inspected according to the present invention,
(B) is a sectional view taken along line AA of (a).

【図2】(a)は、本発明の多孔質セラミック部材の欠
陥検査装置の一実施形態の一部を模式的に示した部分平
面図であり、(b)は、本発明の多孔質セラミック部材
の欠陥検査装置の多孔質セラミック部材の移動方向の一
例を示した正面図である。
FIG. 2 (a) is a partial plan view schematically showing a part of one embodiment of a porous ceramic member defect inspection apparatus of the present invention, and FIG. 2 (b) is a porous ceramic of the present invention. It is the front view which showed an example of the moving direction of the porous ceramic member of the member defect inspection apparatus.

【図3】セラミックフィルタを模式的に示す斜視図であ
る。
FIG. 3 is a perspective view schematically showing a ceramic filter.

【図4】(a)は、セラミックフィルタを構成する多孔
質セラミック部材を模式的に示す斜視図であり、(b)
は、(a)のA−A線断面図である。
FIG. 4A is a perspective view schematically showing a porous ceramic member constituting a ceramic filter, and FIG.
FIG. 2 is a sectional view taken along line AA of FIG.

【図5】従来行われてきたX線照射による欠陥の検出の
一実施形態を模式的に示した断面図である。
FIG. 5 is a cross-sectional view schematically showing one embodiment of a conventional defect detection by X-ray irradiation.

【符号の説明】[Explanation of symbols]

10、30 多孔質セラミック部材 11、31 貫通孔 12、32 充填材 13、33 隔壁 14 欠陥 20 多孔質セラミック部材の欠陥検査装置 21 光照射手段 22 光検出手段 40 セラミックフィルタ 10, 30 Porous ceramic member 11, 31 Through hole 12, 32 Filler 13, 33 Partition wall 14 Defect 20 Defect inspection device for porous ceramic member 21 Light irradiation means 22 Light detection means 40 Ceramic filter

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 多孔質セラミック部材に存在する欠陥の
検出を行う欠陥検査方法であって、前記多孔質セラミッ
ク部材は、その長手方向に多数の貫通孔が並設され、前
記貫通孔の一端部は、市松模様に充填材が充填されてお
り、かつ、他端部は、前記一端部に充填材が充填されて
いない貫通孔に充填材が充填されている柱状の多孔質セ
ラミック部材であり、前記多孔質セラミック部材の欠陥
の検出は、前記多孔質セラミック部材の一端から前記多
孔質セラミック部材の貫通孔に平行になるように光を照
射し、前記多孔質セラミック部材の他端部に漏洩してく
る光を検出することにより行うことを特徴とする多孔質
セラミック部材の欠陥検査方法。
1. A defect inspection method for detecting a defect present in a porous ceramic member, wherein the porous ceramic member has a plurality of through holes arranged in a longitudinal direction thereof, and one end of the through hole. Is a pillar-shaped porous ceramic member in which a checkerboard pattern is filled with a filler, and the other end is filled with a filler in a through hole in which the one end is not filled with the filler, The detection of the defect of the porous ceramic member is performed by irradiating light from one end of the porous ceramic member so as to be parallel to a through hole of the porous ceramic member and leaking to the other end of the porous ceramic member. A defect inspection method for a porous ceramic member, which is performed by detecting incoming light.
【請求項2】 多孔質セラミック部材に存在する欠陥の
検出を行う欠陥検査装置であって、前記多孔質セラミッ
ク部材は、その長手方向に多数の貫通孔が並設され、前
記貫通孔の一端部は、市松模様に充填材が充填されてお
り、かつ、他端部は、前記一端部に充填材が充填されて
いない貫通孔に充填材が充填されている柱状の多孔質セ
ラミック部材であり、前記欠陥検査装置は、前記多孔質
セラミック部材の一端から前記多孔質セラミック部材の
貫通孔に平行になるように光を照射する光照射手段と、
前記多孔質セラミック部材の他端部に漏洩してくる光を
検出する光検出手段と、前記多孔質セラミック部材を、
前記光照射手段と前記光検出手段とを結ぶ直線と前記貫
通孔とが平行になるように、前記光照射手段と前記光検
出手段との間に前記多孔質セラミック部材を移動させた
後、前記多孔質セラミック部材の一端部から前記充填材
で目封じされた貫通孔を含む全ての貫通孔に光が照射さ
れるように、前記多孔質セラミック部材を逐次移動させ
るように構成された移動手段とを備えていることを特徴
とする多孔質セラミック部材の欠陥検査装置。
2. A defect inspection apparatus for detecting a defect existing in a porous ceramic member, wherein the porous ceramic member has a large number of through holes arranged in a longitudinal direction thereof, and one end of the through hole. Is a pillar-shaped porous ceramic member in which a checkerboard pattern is filled with a filler, and the other end is filled with a filler in a through hole in which the one end is not filled with the filler, The defect inspection apparatus, light irradiation means for irradiating light from one end of the porous ceramic member so as to be parallel to the through hole of the porous ceramic member,
Light detection means for detecting light leaking to the other end of the porous ceramic member, and the porous ceramic member,
After moving the porous ceramic member between the light irradiating means and the light detecting means, so that a straight line connecting the light irradiating means and the light detecting means and the through hole are parallel to each other, A moving means configured to sequentially move the porous ceramic member so that light is applied to all through holes including a through hole sealed with the filler from one end of the porous ceramic member; A defect inspection apparatus for a porous ceramic member, comprising:
JP2000192924A 2000-06-27 2000-06-27 Porous ceramic member defect inspection method, porous ceramic member manufacturing method, and porous ceramic member defect inspection apparatus Expired - Lifetime JP4030252B2 (en)

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JP2005274179A (en) * 2004-03-23 2005-10-06 Hitachi Metals Ltd Honeycomb body inspection device
JP2009300455A (en) * 2009-09-15 2009-12-24 Hitachi Metals Ltd Inspection device and inspection method for honeycomb body
JP2010249798A (en) * 2009-03-23 2010-11-04 Ngk Insulators Ltd Inspection device of plugged honeycomb structure and inspection method of plugged honeycomb structure
JP2012500969A (en) * 2008-08-22 2012-01-12 コーニング インコーポレイテッド Defect detection system and method for ceramic filter body
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Publication number Priority date Publication date Assignee Title
WO2005040773A1 (en) * 2003-10-28 2005-05-06 Ngk Insulators, Ltd. Method of inspecting unevenness of partition surface of honeycomb structure and inspecting device
US7596274B2 (en) 2003-10-28 2009-09-29 Ngk Insulators, Ltd. Method of inspecting unevenness of partition surface of honeycomb structure and inspecting device
JP2005274179A (en) * 2004-03-23 2005-10-06 Hitachi Metals Ltd Honeycomb body inspection device
JP4618532B2 (en) * 2004-03-23 2011-01-26 日立金属株式会社 Honeycomb body inspection device
JP2012500969A (en) * 2008-08-22 2012-01-12 コーニング インコーポレイテッド Defect detection system and method for ceramic filter body
JP2015121545A (en) * 2008-08-22 2015-07-02 コーニング インコーポレイテッド Methods for detecting defects in ceramic filter bodies
JP2010249798A (en) * 2009-03-23 2010-11-04 Ngk Insulators Ltd Inspection device of plugged honeycomb structure and inspection method of plugged honeycomb structure
CN104677303A (en) * 2009-03-23 2015-06-03 日本碍子株式会社 Inspection device of plugged honeycomb structure and inspection method of plugged honeycomb structure
JP2009300455A (en) * 2009-09-15 2009-12-24 Hitachi Metals Ltd Inspection device and inspection method for honeycomb body
CN108802042A (en) * 2018-04-11 2018-11-13 江苏阿瑞斯智能设备有限公司 A kind of ceramic catalyst carrier defect inspection method, device and electronic equipment
CN108802042B (en) * 2018-04-11 2020-09-01 江苏阿瑞斯智能设备有限公司 Ceramic catalyst carrier defect detection method and device and electronic equipment

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