JP2001512619A5 - - Google Patents

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Publication number
JP2001512619A5
JP2001512619A5 JP1998536972A JP53697298A JP2001512619A5 JP 2001512619 A5 JP2001512619 A5 JP 2001512619A5 JP 1998536972 A JP1998536972 A JP 1998536972A JP 53697298 A JP53697298 A JP 53697298A JP 2001512619 A5 JP2001512619 A5 JP 2001512619A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998536972A
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English (en)
Japanese (ja)
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JP4286911B2 (ja
JP2001512619A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US1998/003564 external-priority patent/WO1998037627A1/en
Publication of JP2001512619A publication Critical patent/JP2001512619A/ja
Publication of JP2001512619A5 publication Critical patent/JP2001512619A5/ja
Application granted granted Critical
Publication of JP4286911B2 publication Critical patent/JP4286911B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP53697298A 1997-02-24 1998-02-24 プラズマ処理方法及びプラズマ処理システム Expired - Fee Related JP4286911B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US80560897A 1997-02-24 1997-02-24
US08/805,608 1997-02-24
PCT/US1998/003564 WO1998037627A1 (en) 1997-02-24 1998-02-24 Series powered, parallel output radio frequency generator

Publications (3)

Publication Number Publication Date
JP2001512619A JP2001512619A (ja) 2001-08-21
JP2001512619A5 true JP2001512619A5 (https=) 2005-10-06
JP4286911B2 JP4286911B2 (ja) 2009-07-01

Family

ID=25192023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53697298A Expired - Fee Related JP4286911B2 (ja) 1997-02-24 1998-02-24 プラズマ処理方法及びプラズマ処理システム

Country Status (6)

Country Link
US (1) US6384540B1 (https=)
EP (1) EP0962048B1 (https=)
JP (1) JP4286911B2 (https=)
KR (1) KR20000075660A (https=)
DE (1) DE69815506T2 (https=)
WO (1) WO1998037627A1 (https=)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6579805B1 (en) * 1999-01-05 2003-06-17 Ronal Systems Corp. In situ chemical generator and method
US6549071B1 (en) 2000-09-12 2003-04-15 Silicon Laboratories, Inc. Power amplifier circuitry and method using an inductance coupled to power amplifier switching devices
US6917245B2 (en) 2000-09-12 2005-07-12 Silicon Laboratories, Inc. Absolute power detector
US6856199B2 (en) * 2000-10-10 2005-02-15 California Institute Of Technology Reconfigurable distributed active transformers
US6538515B2 (en) 2001-01-19 2003-03-25 Telefonaktiebolaget Lm Ericsson (Publ) Power amplifier and method of operating a power amplifier having multiple output-power modes
GB2376819A (en) * 2001-06-21 2002-12-24 Ericsson Telefon Ab L M Electronic circuit having series connected circuit blocks
US6828859B2 (en) * 2001-08-17 2004-12-07 Silicon Laboratories, Inc. Method and apparatus for protecting devices in an RF power amplifier
US6771123B2 (en) * 2002-04-19 2004-08-03 Bose Corporation Multichannel power amplifying
US6894565B1 (en) 2002-12-03 2005-05-17 Silicon Laboratories, Inc. Fast settling power amplifier regulator
US6897730B2 (en) 2003-03-04 2005-05-24 Silicon Laboratories Inc. Method and apparatus for controlling the output power of a power amplifier
US7375035B2 (en) * 2003-04-29 2008-05-20 Ronal Systems Corporation Host and ancillary tool interface methodology for distributed processing
US7429714B2 (en) * 2003-06-20 2008-09-30 Ronal Systems Corporation Modular ICP torch assembly
US7307475B2 (en) 2004-05-28 2007-12-11 Ixys Corporation RF generator with voltage regulator
JP2006287817A (ja) * 2005-04-04 2006-10-19 Tokyo Electron Ltd マイクロ波発生装置、マイクロ波供給装置、プラズマ処理装置及びマイクロ波発生方法
US7729672B2 (en) * 2006-03-22 2010-06-01 Qualcomm, Incorporated Dynamic bias control in power amplifier
US7777567B2 (en) 2007-01-25 2010-08-17 Mks Instruments, Inc. RF power amplifier stability network
US7755452B2 (en) * 2007-02-27 2010-07-13 Coherent, Inc. Power combiner
US8592966B2 (en) * 2007-06-22 2013-11-26 Cree, Inc. RF transistor packages with internal stability network including intra-capacitor resistors and methods of forming RF transistor packages with internal stability networks including intra-capacitor resistors
EP2382705B1 (en) 2008-12-24 2014-06-25 Nxp B.V. Power amplifier
WO2010121968A1 (en) * 2009-04-24 2010-10-28 Osram Gesellschaft mit beschränkter Haftung Amplifier for electrodeless high intensity discharge (ehid) lamps with multiple stages, variable supply voltage, biasing and tuning, ehid-system and method for operating an ehid-system
US7970037B2 (en) * 2009-06-10 2011-06-28 Coherent, Inc. Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
US7965211B1 (en) * 2009-11-09 2011-06-21 Rockwell Collins, Inc. High power DAC power amplifier
US20110285473A1 (en) 2010-05-24 2011-11-24 Coherent, Inc. Impedance-matching transformers for rf driven co2 gas discharge lasers
US8648665B2 (en) 2010-10-06 2014-02-11 Coherent, Inc. Impedance-matching circuits for multi-output power supplies driving CO2 gas-discharge lasers
US9020456B2 (en) * 2012-06-12 2015-04-28 The Regents Of The University Of Michigan Ultra-low-power radio for short-range communication
US9392681B2 (en) 2012-08-03 2016-07-12 Schlumberger Technology Corporation Borehole power amplifier
US20140035588A1 (en) * 2012-08-03 2014-02-06 Schlumberger Technology Corporation Borehole particle accelerator
WO2014094738A2 (de) 2012-12-18 2014-06-26 TRUMPF Hüttinger GmbH + Co. KG Arclöschverfahren und leistungsversorgungssystem mit einem leistungswandler
KR102027628B1 (ko) 2012-12-18 2019-10-01 트럼프 헛팅거 게엠베하 + 코 카게 고주파수 전력을 생산하기 위한 방법 및 부하에 전력을 공급하기 위한 전력 컨버터를 갖는 전력 공급 시스템
US9130536B2 (en) 2013-07-23 2015-09-08 Tokyo Electron Limited Radio frequency signal splitter and matcher
US10373794B2 (en) 2015-10-29 2019-08-06 Lam Research Corporation Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
US10043636B2 (en) 2015-12-10 2018-08-07 Lam Research Corporation Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
US10553465B2 (en) * 2016-07-25 2020-02-04 Lam Research Corporation Control of water bow in multiple stations
US10264663B1 (en) 2017-10-18 2019-04-16 Lam Research Corporation Matchless plasma source for semiconductor wafer fabrication
US10304663B1 (en) * 2018-07-19 2019-05-28 Lam Research Corporation RF generator for generating a modulated frequency or an inter-modulated frequency
DE102019134463B3 (de) 2019-12-16 2021-05-12 TRUMPF Hüttinger GmbH + Co. KG Hochfrequenz-Hochspannungs-Stromleiter-Vorrichtung

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3445782A (en) 1966-07-28 1969-05-20 Gen Dynamics Corp High-power amplifier utilizing hybrid combining circuits
US4383203A (en) 1981-06-29 1983-05-10 Litek International Inc. Circuit means for efficiently driving an electrodeless discharge lamp
US4590437A (en) 1984-04-27 1986-05-20 Gte Laboratories Incorporated High frequency amplifier
US4590436A (en) 1984-04-27 1986-05-20 Gte Laboratories Incorporated High voltage, high frequency amplifier circuit
US4631493A (en) * 1985-03-18 1986-12-23 Eaton Corporation Circuit for DC biasing
US4980810A (en) 1989-05-25 1990-12-25 Hughes Aircraft Company VHF DC-DC power supply operating at frequencies greater than 50 MHz
US5121084A (en) 1990-03-29 1992-06-09 Hughes Aircraft Company Balance and protection for stacked RF amplifiers
US5118997A (en) 1991-08-16 1992-06-02 General Electric Company Dual feedback control for a high-efficiency class-d power amplifier circuit
JP2710467B2 (ja) 1992-04-16 1998-02-10 アドバンスド エナージィ インダストリーズ,インコーポレイテッド プロセシング・プラズマのac特性を特徴付ける装置
US5306986A (en) 1992-05-20 1994-04-26 Diablo Research Corporation Zero-voltage complementary switching high efficiency class D amplifier
GB2289810A (en) * 1994-05-20 1995-11-29 Microelectronics Tech Inc An r.f. switch using transistors as switch and gain elements
DE4438463C1 (de) 1994-10-27 1996-02-15 Fraunhofer Ges Forschung Verfahren und Schaltung zur bipolaren pulsförmigen Energieeinspeisung in Niederdruckplasmen

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