JP2001341040A - Frame clamping device and cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To confirm that a frame clamping device for fixing a frame operates normally and the frame is positively fixed when machining a workpiece supported by the frame. SOLUTION: This frame clamping device includes at least a frame support part supporting the frame supporting the workpiece from an outer circumferential side, a frame pressing part sandwiching the frame between it and the frame support part, and a driving part positioning the frame pressing part in a sandwiching position and an open position. It is also provided with a sandwiching confirming means 28 confirming whether or not the frame pressing part is positioned in the sandwiching position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frame clamping device which is disposed on the outer periphery of a chuck table for holding a workpiece in a processing apparatus and fixes a frame supporting the workpiece, and the frame clamping device. And a cutting device comprising the same.

[0002]

2. Description of the Related Art For example, when a semiconductor wafer is cut using a cutting device, the semiconductor wafer W is integrated with a frame F via a holding tape T on a chuck table 15 as shown in FIG. Will be retained.

Here, the chuck table 15 is provided with a suction portion 17 for sucking and holding a semiconductor wafer, and four frame clamp devices 80 are arranged on the outer periphery thereof in the illustrated example. Each of the frame clamp devices is composed of a pair of guide rails 81 and a clamp portion 82 that can move within a required range along the guide rails 81. The clamp portion 82 supports the mounted frame F from below. Support portion 84 and frame support portion 84
Pressing unit 83 for pressing the frame F supported by the frame from above, and a driving unit 85 for driving the frame pressing unit 83 to rotate.
It is composed of

When holding the frame F, the frame F
Of each of the clamp portions 82 according to the size of the guide rail 8.
1 and fixed along the frame pusher 83
The frame F is placed on the frame supporting portion 84 with the frame open position (open position), and the driving portion 85 rotates the frame pressing portion 83 by 90 degrees. 83 and vertically.

When this process is performed for all four frame clamp devices, the semiconductor wafer W is suction-held on the chuck table 15 and the frame F is fixed by the four frame clamp devices 80 as shown in FIG.

Here, in order to prevent the frame F from hindering the cutting operation, and to prevent the holding tape T from being pulled by its own weight, thereby adversely affecting the cutting accuracy, the surface of the frame supporting portion 84 is made to have a surface. It is located below the suction part 17.

The driving section 85 is constructed as shown in FIG. 18. The inside of the driving section 85 is composed of a first chamber 86, a rotating section 87 and a second chamber 88 as shown in FIG. The rotation shaft 89 of the second member 87 is
Of the first chamber 86 and the second chamber 88 are fixed by screws.

The second chamber 88 is provided with a rotation restricting portion (not shown) for restricting the rotation of the rotating shaft 89, a forward rotation air inflow portion 91, and a reverse rotation air inflow portion 92.
When air is blown into the forward rotation air inflow portion 91, the rotation shaft 89 rotates 90 degrees in the direction of arrow A in FIG. 90 degrees in the direction of.

As shown in FIG. 18, a frame pushing portion 83 is fixed to the rotating shaft 89, and rotates with the rotation of the rotating shaft 89. Accordingly, when air is blown into the forward rotation air inflow portion 91, the frame pushing portion 83 is positioned at the holding position, the frame F is held between the frame support portion 84, and when air is blown into the reverse rotation air inflow portion 92,
The frame pressing portion 83 is located at the open position.

Thus, the semiconductor wafer W is attracted to the attracting portion 17 and the frame F is held by the frame clamping device 8.
0, the chuck table 15 moves in the X-axis direction and the alignment means 100 detects a street to be cut, as shown in FIG.
Further, as the chuck table 15 moves in the same direction and the cutting means 102 having the rotating blade 101 descends in the + Z-axis direction, the rotating blade 10 rotates at a high speed while supplying cutting water from the cutting water supply nozzle 103.
1 is cut into the street of the semiconductor wafer W to perform cutting.

[0011]

However, FIG.
If the frame clamp device 80 is not fixed at a position suitable for the size of the frame F as shown in FIG. 4A, or if the frame F is transported and placed in a shifted state, the frame F should be properly fixed. Can not.

Also, due to damage to the air supply path, etc., the air supply to the forward rotation air inflow section 91 shown in FIGS. In the case where the frame is pressed or an obstacle is interposed between the frame pressing portion 83 and the frame supporting portion 84, the frame pressing portion 83 is not properly positioned at the holding position, and the frame F cannot be completely fixed.

As described above, when cutting is performed in a state where the frame F is not properly clamped, each part constituting the cutting means 102 is damaged by contact with the frame F, or a workpiece such as a semiconductor wafer W is processed. May also damage. Therefore, when processing the workpiece supported by the frame, there is a problem in confirming that the frame clamp device operates normally and the frame is securely fixed.

[0014]

As a specific means for solving the above-mentioned problems, the present invention relates to a frame clamping device provided on the outer periphery of a chuck table, which supports a frame holding a workpiece. A frame supporting portion, a frame pressing portion for holding the frame between the frame supporting portions, and a driving portion for positioning the frame pressing portion at the holding position and the open position; and whether the frame pressing portion is positioned at the holding position. To provide a frame clamp device provided with a pinch confirming means for confirming whether the frame is clamped.

In this frame clamp device, the pinching confirmation means includes at least an air inflow section and an air outflow section, and opening and closing means for opening or closing an air passage from the air inflow section to the air outflow section. An air supply source and a pressure gauge are connected to the air inflow section, and it is confirmed whether or not the frame pusher is positioned at the clamping position based on the measurement value of the pressure gauge. The confirmation means is provided in the drive section, and when the frame push section is positioned at the holding position, the air passage from the air inflow section to the air outflow section is opened by the opening and closing means formed in the drive section. Alternatively, the closing and holding confirmation means is provided on the frame supporting portion, and the opening / closing means is provided with a switch portion capable of moving forward and backward with respect to the surface of the frame supporting portion. The switch is pressed when the frame supported by the frame support is pressed down while being positioned at the clamping position, and the air passage from the air inlet to the air outlet is opened or closed. Additional requirements.

According to the frame clamp device configured as described above, it is possible to confirm whether or not the frame is properly clamped. Therefore, for example, the frame clamp device itself may be out of order or the frame may not be properly positioned. If the frame is not mounted on the frame or the frame is not properly clamped by some obstacle, it is possible to avoid the cutting being performed as it is by confirming that in advance. .

Further, when the sandwiching confirmation means is constituted by using the air inflow section, the air outflow section, and the opening / closing means, there is no leakage even if cutting water is supplied, so that no malfunction occurs.

The present invention is also a cutting apparatus comprising at least a chuck table for holding a workpiece supported by a frame, and cutting means for cutting the workpiece held on the chuck table. Provided is a cutting device in which the above-mentioned frame clamp device is disposed on the outer periphery of a table.

According to the cutting device configured as described above,
The workpiece can be cut while the frame is securely held.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS As an embodiment of the present invention, FIG.
The cutting device 10 and the frame clamp device mounted thereon will be described.

For example, when a semiconductor wafer is cut using the cutting apparatus 10, the semiconductor wafer W to be cut is placed in the cassette 11 while being held integrally with the frame F via the holding tape T. Multiple are accommodated.

The semiconductor wafers W accommodated in the cassette 11 in a state of being integrated with the frame F
Then, the sheets are taken out one by one into the temporary storage area 13, then sucked by the conveying means 14, and conveyed to the chuck table 15 by the turning movement of the conveying means 14.

As shown in FIG. 2, the chuck table 15 has a suction passage 1 serving as a passage for air for sucking a workpiece.
6a comprises a base 16 formed at the center and a suction part 17 for sucking the workpiece by the suction force supplied from the suction passage 16a. It is fixed by screwing. Although only one frame clamp device 20 is shown in FIG. 2, it is preferable that two or more frame clamp devices 20 are provided, and four are provided.

As shown in FIG. 3, the frame clamp device 20 includes a pair of guide rails 21 protruding to the outer peripheral side of the chuck table 15 and a clamp portion 22 for fixing the frame F. The guide rail 21 is loosely fitted in the sliding hole 23, and the clamp portion 22 slides on the guide rail 21 to move in a required range. When the fixing member 24 is pulled, the clamp portion 22 can be slid in an unlocked state, and the fixed member 24 can be fitted into the fitted portion 25 provided on the guide rail 21 to be in a locked state, thereby clamping the clamp member 22. The part 22 can be fixed. Thus, the position of the clamp portion 22 can be adjusted according to the size of the frame F.

The clamp portion 22 is mounted on the frame F
4 includes a frame supporting portion 26 for supporting the frame F from below, a frame pressing portion 27 for pressing the frame F supported by the frame supporting portion 26 from above, and a driving portion 28 for driving the frame pressing portion 27 to rotate. As shown in FIG.
The frame F can be sandwiched between the lower surface of the frame pushing section 27 and the frame supporting section 26 by being driven by the frame pushing section 8 to position the frame pushing section 27 at the sandwiching position. FIG. 3 shows a state in which the frame pusher 27 is positioned in the open state.

Here, as shown in FIG. 5, the driving unit 28 is an air actuator composed of a first chamber 29, an opening / closing means 30, and a second chamber 31, and The rotating shaft 32 loosely fits into a central hole 33 formed in the second chamber 31 and also loosely fits into a central hole (not shown) formed in the first chamber 29. Second chamber 31
Are fixed by screws and configured as shown in FIG.
The rotation shaft 32 protrudes outward from the first chamber 29 and the second chamber 31. A frame pushing portion 27 is fixed to a rotating shaft 32 protruding from the first chamber 29 and the second chamber 31, and the frame pushing portion 27 rotates with the rotation of the rotating shaft 32.

As shown in FIG. 5, the first chamber 2
In 9, a tubular air inflow portion 34 is provided to penetrate the back plate 35. On the other hand, the second chamber 31 is provided with an air outflow portion 36 penetrating the front plate 37. Further, a through hole 38 is formed in the opening / closing means 30, and when the opening / closing means 30 is positioned at a fixed position, the air inflow portion 34 and the air outflow portion 36 communicate with each other through the through hole 38. ing.

As shown in FIGS. 5 and 6, the second chamber 31 is provided with a forward rotation air inflow section 39 and a reverse rotation air inflow section 40, and air is blown into the forward rotation air inflow section 39. 5, the rotating shaft 32 is rotated, for example, 90 degrees in the direction of the arrow A in FIG. 5 to rotate the frame pushing portion 27 in the direction of the arrow A to position the frame pressing portion 27 at the clamping position, and air is blown into the reverse rotation air inflow portion 40. Sometimes the rotation axis 32
Rotates in the direction of arrow B to rotate the frame pusher 27 in the direction of arrow B to position it in the open position.

FIG. 7 shows the second chamber 3 shown in FIG.
1 shows a state viewed from the opposite side, and the rotation range of the opening / closing means 30 is, for example, 9
A rotation restricting portion 41 for restricting the rotation to 0 degrees is formed. That is, when the opening / closing means 30 rotates, the two contact portions 30a, 30b formed on the opening / closing means 30 shown in FIG. The configuration is such that the portion 27 is positioned at either the holding position or the opening position.

The frame clamp device 20 constructed as described above is, for example, a chuck table 1 as shown in FIG.
Four are arranged on the outer periphery of the number 5. And, as shown,
Each frame clamp device 20a, 20b, 20
c, the air inflow portion and the air outflow portion provided in 20d are connected in series, for example, using tubes 44 for adjacent frame clamp devices, and a pressure gauge 42 is connected to the air inflow portion of the frame clamp device 20a. Further, an air supply source 43 is connected to the pressure gauge 42.

When the frame F is fixed by the frame clamp devices 20a, 20b, 20c, and 20d under such a connection form, air is supplied to the forward rotation air inflow portion 39 of each frame clamp device. Each frame pressing portion 27 is rotated to be positioned at the holding position, and the frame supporting portions 2 are set for all the frame clamping devices.
The frame F is sandwiched between the frame 6 and the frame pressing portion 27.

When the frame pushing portion 27 is located at the open position, the through hole 38 is located as shown in FIG. 9, and the air passage from the air inflow portion 34 to the air outflow portion 36 is closed. However, when the frame pressing portion 27 is positioned at the holding position, the through hole 38 rotates to the position shown in FIG. 10 and the air flow passage from the air inflow portion 34 to the air outflow portion 36 communicates. It is opened through the hole 38.

In the connection configuration shown in FIG. 8, if the frame pressing portions 27 of all the frame clamp devices are properly positioned at the clamping positions, the frame clamp device 20a is supplied from the air supply source 43 via the pressure gauge 42. The air flowing from the air inflow portion of the frame clamp device 20a, the air inflow portion, the air inflow portion of the frame clamp device 20b, the air inflow portion, the air inflow portion of the frame clamp device 20C, The air reaches an air outflow portion of the frame clamp device 20d through an air outflow portion, an air inflow portion of the frame clamp device 20d, and a through hole, and is discharged therefrom.

On the other hand, the frame clamp devices 20a, 20
b, 20c, and 20d, any one of the frame pressing portions 2
If 7 is not properly positioned at the holding position, the flow of air is hindered because the air inlet and the air outlet do not communicate with each other in the frame clamp device,
The air does not reach the air outlet of the frame clamp device 20d.

Therefore, depending on whether or not the air flowing from the air inflow section of the frame clamp apparatus 20a reaches the air outflow section of the frame clamp apparatus 20d, whether or not all the frame pressing sections 27 are properly positioned at the holding position is determined. Can be determined. That is, the air inflow section 34, the air outflow section 36, and the opening / closing means 30 constitute a pinching confirmation means.

In the example of FIG. 8, all the frame pressing portions 27
Pressure gauge 4 when is properly positioned in the clamping position
The measured value of the pressure of the air by 2 becomes low, and the measured value of the pressure becomes high when any of the frame pressing portions is not properly positioned at the clamping position. It can be determined whether the frame pressing portion 27 is located at the holding position, that is, whether the frame F is properly fixed.

By performing the determination in this manner, it is possible to prevent the cutting from being performed in a state where the frame F is not fixed. There is no problem of cutting the area other than the streets that must not be cut. Further, even when the frame F is in a floating state, each part constituting the cutting means is not damaged due to the contact between the frame F and the cutting means.

The opening / closing means 50 shown in FIG. 11 may be used instead of the opening / closing means 30 shown in FIG. The opening / closing means 50 in FIG. 11 is provided with a long hole 51 and a blocking part 52 instead of the through hole 38 in the opening / closing means 30 shown in FIG. When the frame pushing portion 27 is positioned at the holding position, the air inflow portion 34 formed in the first chamber 29 and the air outflow formed in the second chamber 31 shown in FIG. The communication with the part 36 is cut off. On the other hand, when the opening / closing means 50 is positioned at a position other than the holding position including the open position, the air inlet section 34 and the air outlet section 36 are configured to communicate with each other by the long holes 51.

With such a configuration, when the frame pressing portion 27 is positioned at the holding position, the air flow is obstructed by the blocking portion 52 and the air is not discharged from the air outflow portion 36. On the other hand, the frame pusher 2
When even 7 is slightly deviated from the holding position, air is discharged from the air outlet 36.

Accordingly, when the frame pressing portion 27 is located at the holding position, the measured value of the pressure is high, and when the frame pressing portion 27 is not located at the holding position, the measured value of the pressure is low. , It can be confirmed whether or not the frame F is properly held.

Next, as a second embodiment of the present invention,
The frame clamp device 60 shown in FIG. 12 will be described. Parts that are configured in the same manner as the frame clamp device 20 shown in FIG.

The frame clamp device 60 shown in FIG. 12 comprises a pair of guide rails 21 and a clamp portion 61 for moving the required range by sliding the guide rails 21 and fixing the frame F. 61 is
The frame clamp device 20 is similar to the frame clamp device 20 shown in FIG. 3 in that the frame F is pressed and fixed from above when the rotating frame pressing portion 27 is positioned at the holding position, but the frame supporting portion 62 and the driving portion 63 is different.

The frame support 62 is provided on the guide rail 21.
In addition to the pair of sliding holes 62a that loosely fit in the
4 and an air outlet 65, as shown in FIG.
Normally, the air inflow portion 64 and the air outflow portion 65 communicate with each other via a flow passage 66 inside.

In the flow passage 66, an opening / closing means 69 comprising an elastic portion 67 and a switch portion 68 is interposed.
As shown in FIG.
And when pressed by the frame pressing portion 27 from above, the flow passage 66 is blocked by the elastic portion 67 so that air does not flow.

Therefore, the frame F and the frame pressing portion 27
The elastic portion 67 is configured so that the flow passage 66 is closed only when there is a load due to both of them, and the flow passage 66 is opened when there is a load only by the frame F and a load only by the frame pressing portion 27. If the air flowing in from the air inflow portion 64 shown in FIG. 12 flows out of the air outflow portion 65, whether the frame F is not properly mounted or the frame pushing portion 27 is not in the holding position is determined. Or
It can be determined that the frame F is not properly placed and that the frame pressing portion 27 is not at the holding position. That is, the air inflow section 64, the air outflow section 66, and the opening / closing means 6
9 together constitute a pinching confirmation means.

On the other hand, when the air that has flowed in from the air inflow portion 64 does not flow out of the air outflow portion 65, it is determined that the frame F is properly mounted and the frame pressing portion 27 is positioned at the holding position. be able to.

For example, as shown in FIG. 15, four frame clamp devices 60 are arranged around the chuck table 15, and the air clamp provided in each of the frame clamp devices 60a, 60b, 60c, and 60d. The inflow portions are connected, for example, in parallel using a tube 70 to adjacent frame clamp devices, and further, a pressure gauge 42 is connected to an air inflow portion of the frame clamp device 60a, and an air supply source 43 is connected to the pressure gauge 42. connect.

In this connection mode, if at least one of the four frame clamp devices does not properly hold the frame F, air flows out from the air outlet of the frame clamp device. The measured value of the pressure due to is low. On the other hand, when the frame F is properly held in all the frame clamp devices, the air does not flow out from any of the air outflow portions, so that the measured value of the pressure increases. As described above, it is possible to confirm whether or not the frame F is properly held based on the measured value of the pressure.

[0049]

As described above, according to the frame clamping device of the present invention, it is possible to confirm whether or not the frame is properly clamped. If the frame is not placed in the proper position or the frame is not properly held by some obstacle, it is necessary to confirm that in advance and the cutting will be performed as it is. Can be avoided.
Therefore, when the frame is not stably fixed and floats, the cutting means and the frame come into contact with each other to damage the cutting means, or when the position of the frame is misaligned, cut the area other than the area to be cut. Will not be lost.

Further, if the holding confirmation means is constituted by the air inflow section, the air outflow section, and the opening / closing means, there is no electric leakage even if the cutting water is supplied, so that the holding state is ensured without causing malfunction. Can be confirmed.

Further, according to the cutting device provided with the above-mentioned frame clamp device, the work can be cut while the frame is securely held, so that the cutting means and the work can be damaged. There is no.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of an embodiment of a cutting device according to the present invention.

FIG. 2 is a perspective view showing an example of a chuck table and a frame clamp device according to the present invention, which constitute the cutting device.

FIG. 3 is a perspective view showing a configuration of the frame clamp device.

FIG. 4 is a perspective view showing a state in which a frame pressing portion constituting the frame clamping device is positioned at a holding position.

FIG. 5 is an exploded perspective view showing a configuration of a drive unit constituting the frame clamp device.

FIG. 6 is a perspective view showing the driving unit and a frame pressing unit.

FIG. 7 is a perspective view showing a first chamber constituting the driving unit.

FIG. 8 is a perspective view showing an example in which four frame clamp devices are provided around a chuck table.

FIG. 9 is a front view showing a state of the opening / closing means when a frame pressing portion constituting the frame clamping device is positioned at an open position.

FIG. 10 is a front view showing a state of the opening / closing means when a frame pressing portion constituting the frame clamping device is positioned at a holding position.

FIG. 11 is a perspective view showing a second example of the opening / closing means.

FIG. 12 is a perspective view showing a second embodiment of the frame clamp device according to the present invention.

FIG. 13 is a cross-sectional view showing a sandwiching confirmation unit included in the frame clamp device according to the second embodiment.

FIG. 14 is a cross-sectional view illustrating a state of the holding confirmation unit when the frame pressing unit is positioned at the holding position.

FIG. 15 is a perspective view showing an example in which four frame clamp devices according to the second embodiment are provided around a chuck table.

FIG. 16 is a perspective view showing a semiconductor wafer, a chuck table, and a conventional frame clamp device integrated with a frame via a holding tape.

FIG. 17 is a front view showing a state in which the frame is fixed using the conventional frame clamp device.

FIG. 18 is a perspective view showing a drive unit and a frame pushing unit that constitute the conventional frame clamp device.

FIG. 19 is an exploded perspective view showing a configuration of the driving unit.

FIG. 20 is a perspective view showing a state in which a semiconductor wafer is cut using a cutting unit while a frame is fixed using a conventional frame clamp device.

FIG. 21 is a perspective view showing a state in which the frame is shifted and fixed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Cutting apparatus 11 ... Cassette 12 ... Carry-in / out means 13 ... Temporary placement area 14 ... Transport means 15 ... Chuck table 16 ... Base 17 ... Suction part 20 ... Frame clamp apparatus 21 ... Guide rail 22 ... Clamp part 23 ... Sliding Hole 24 ... Fixing member 25 ... Fit to fit 26 ... Frame support 27 ... Frame pusher 28 ... Driver 29 ... First chamber 30 ... Opening / closing means 30a, 30b ... Abutment part 31 ... Second chamber 32 ... Rotating shaft 33 Central hole 34 Air inlet 35 Back plate 36 Air outlet 37 Front plate 38 Through hole 39 Forward air inlet 40 Reverse air inlet 41 Rotation restricting parts 41a, 41b Wall part 42 ... Pressure gauge 43 ... Air supply source 44 ... Tube 50 ... Opening / closing means 51 ... Elongated hole 52 ... Blocking part 60 ... Frame clamp device 61 ... Clamp Bump part 62 ... Frame support part 62a ... Sliding hole 63 ... Drive part 64 ... Air inflow part 65 ... Air outflow part 66 ... Flow passage 67 ... Elastic part 68 ... Switch part 69 ... Opening / closing means ... 80 ... Frame clamp device 81 ... Guide rail 82 ... Clamping part 83 ... Frame pushing part 84 ... Frame supporting part 85 ... Drive part 86 ... First chamber 87 ... Rotating part 88 ... Second chamber 89 ... Rotating shaft 90 ... Center hole 91 ... Front air inflow Part 92: Reverse air inflow part 100: Alignment means 101: Rotating blade 102: Cutting means 103: Cutting water supply nozzle W: Semiconductor wafer T: Holding tape F: Frame

Claims (6)

[Claims] 1. A frame clamping device provided on an outer periphery of a chuck table, comprising: a frame supporting portion for supporting a frame holding a workpiece; and a frame pressing portion for holding the frame by the frame supporting portion. And a drive unit for positioning the frame pressing unit at the holding position and the opening position, and a frame clamping device provided with a holding confirmation unit for checking whether the frame pressing unit is positioned at the holding position. . 2. The holding means comprises at least an air inlet and an air outlet, and an opening / closing means for opening or closing an air passage from the air inlet to the air outlet. Item 2. The frame clamp mechanism according to Item 1. 3. An air supply source and a pressure gauge are connected to the air inflow section, and it is confirmed whether or not the frame pressing section is positioned at the holding position based on a measurement value of the pressure gauge. Item 3. The frame clamp device according to Item 2. 4. The pinching confirmation means is provided in the driving section, and when the frame pressing section is positioned at the pinching position, the opening and closing means formed in the driving section extends from the air inflow section to the air outflow section. The frame clamp device according to claim 2 or 3, wherein the air flow path is opened or closed. 5. The frame confirming means is provided on the frame supporting portion, and the opening / closing means includes a switch portion capable of moving forward and backward with respect to the surface of the frame supporting portion. 4. The air flow path from the air inflow section to the air outflow section is opened or closed when the switch section is pressed down when the frame supported by the support section is pressed down. Frame clamp device. 6. A cutting apparatus comprising at least a chuck table for holding a workpiece supported by a frame, and cutting means for cutting the workpiece held by the chuck table, wherein the chuck table comprises: A cutting device, wherein the frame clamp device according to claim 1 is disposed on an outer periphery of the cutting device.