JP2001332483A5 - - Google Patents
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- Publication number
- JP2001332483A5 JP2001332483A5 JP2000153321A JP2000153321A JP2001332483A5 JP 2001332483 A5 JP2001332483 A5 JP 2001332483A5 JP 2000153321 A JP2000153321 A JP 2000153321A JP 2000153321 A JP2000153321 A JP 2000153321A JP 2001332483 A5 JP2001332483 A5 JP 2001332483A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000153321A JP4046458B2 (ja) | 2000-05-24 | 2000-05-24 | 処理ユニットおよび処理システム |
| TW090110294A TW490721B (en) | 2000-05-24 | 2001-04-30 | Substrate processing unit, substrate processing system, and substrate processing apparatus |
| KR1020010028397A KR100807178B1 (ko) | 2000-05-24 | 2001-05-23 | 기판처리유니트, 기판처리시스템 및 기판처리장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000153321A JP4046458B2 (ja) | 2000-05-24 | 2000-05-24 | 処理ユニットおよび処理システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001332483A JP2001332483A (ja) | 2001-11-30 |
| JP2001332483A5 true JP2001332483A5 (enExample) | 2005-09-22 |
| JP4046458B2 JP4046458B2 (ja) | 2008-02-13 |
Family
ID=18658597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000153321A Expired - Fee Related JP4046458B2 (ja) | 2000-05-24 | 2000-05-24 | 処理ユニットおよび処理システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4046458B2 (enExample) |
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2000
- 2000-05-24 JP JP2000153321A patent/JP4046458B2/ja not_active Expired - Fee Related