JP2001331910A - Magnetic head, its manufacturing method and magnetic reproducing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase impedance of a magnetic impedance element(MI element) to enhance output and to suppress a leakage magnetic field from a magnetic body gap due to the energizing to the MI element, in a magnetic head using the MI element. SOLUTION: A first and a second MI elements 22 and 23 constituted of conductive metal thin films 2 and 2' and soft magnetic body films 4, 5, 4' and 5' disposed on both surfaces thereof, respectively, are disposed in magnetic paths of ring type magnetic cores 1 and 1' on both sides of the surface of a gap 7, respectively. Electrodes are provided at both end parts of the conductive metal thin films in a direction of the width of the gap and electrodes on one side in the direction of the width of the gap of the electrodes of the conductive metal thin films of the first and the second MI element are connected with each other and high frequency carrier signal current is applied to the electrodes through the electrodes of the other sides. Thud the impedance is increased as the number of intersections of a magnetic circuit and the high frequency current and generated magnetic fluxes are cancelled each other at a gap part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-sensitivity active magnetic head and a high-density magnetic reproducing apparatus using a novel high-frequency impedance change.

[0002]

2. Description of the Related Art FIG. 6 is a technical report of IEICE MR95-8.
0 shows the structure and operating principle of a magneto-impedance element (abbreviated as MI element) using a change in magnetic impedance and a head reported in FIG. The MI element shown in FIG. 6 includes a detection conductor film 64 made of a conductive metal thin film and a track width 65.
This is a structure sandwiched by the soft magnetic cores 68 and 69. The soft magnetic cores 68 and 69 are made of a laminated film of a permalloy film 66 and a SiO ₂ film 67. UH
A high-frequency signal is applied from a high-frequency transmitter 70 in the F band to the detection conductor film 64 via a resistor 71, and a current 72 flows. Thereby, the terminals 73 provided at both ends of the detection conductor thin film 64
And 74, based on the change in magnetic impedance between the terminals. That is, when there is no signal magnetic field generated from the magnetization 76 on the magnetic recording medium 75, the voltage between the terminals 73 and 74 corresponds to the product of the current 72 and the impedance between the terminals 73 and 74 of the detection conductor thin film 64. A UHF carrier signal voltage is generated. When a signal magnetic field from the magnetic recording medium 75 is received, the easy magnetization direction of the magnetization of the soft magnetic cores 68 and 69 of the element is oriented in the track width direction.
It is tilted from the orientation direction, and the magnetic impedance decreases.
Therefore, the UHF carrier signal is detected in a form where it is AM-modulated by the signal magnetic field of the magnetic recording medium. By performing AM detection on this signal, the magnetic recording medium 75 is detected.
The upper signal magnetization 76 can be read.

[0003] If this head is realized, it is expected that about ten times the output can be obtained as compared with a giant MR head currently under development. FIG. 7 shows an operation curve of the MI element shown in FIG. The above element was determined by applying a dc magnetic field at the center of the Helmholtz coil with the carrier signal frequency set to 1.0 GHz. As can be seen from FIG. 7, in order to reproduce a signal with high sensitivity and obtain a waveform with small distortion, it is necessary to set a DC bias at 77 points. In the above model, a carrier signal and a DC current are passed through a conductor to generate a DC magnetic field, which is used as a bias. In this way, a large rate of change in impedance (the ratio between the case where the applied magnetic field is zero and the case where a predetermined magnetic field is applied) can be obtained, but the track width tends to become narrower as the density of magnetic recording becomes higher. There is.

[0004]

In this case, the high-frequency signal voltage decreases in proportion to the decrease in the track width.
It is required to make the configuration as large as possible in impedance. Further, when a high-frequency carrier signal or a DC bias current is applied to the conductive metal film, the magnetization of the magnetic material may be erased due to the leakage magnetic field from the magnetic material gap, and it is necessary to reduce the leakage magnetic field from the gap as much as possible. Was.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a high-output high-frequency impedance type magnetic head which solves the above problems, increases the impedance of the MI element, and suppresses the leakage magnetic field from the magnetic material gap. .

[0006]

According to the present invention, there is provided a magnetic head comprising:
As a basic configuration, a ring-shaped magnetic core having a gap, a conductive metal thin film, and a soft magnetic film disposed on both surfaces thereof are provided in a magnetic path of the ring-shaped magnetic core. And a magneto-impedance element (hereinafter, referred to as MI element) in which electrodes are provided at both ends of the conductive metal thin film in the width direction of the gap.
Current applying means for applying a high-frequency carrier signal current between the I element portion and the electrode of the conductive metal thin film via a predetermined resistor; and applying a bias magnetic field for applying a DC bias magnetic field to the conductive metal thin film. Means, and a circuit for detecting and amplifying high-frequency AM signals modulated from the electrodes of the conductive metal thin film and for performing high-frequency amplification, wherein a change in impedance between the electrodes of the conductive metal thin film is changed by an external magnetic field. Is detected as a change in the high-frequency carrier signal. In order to solve the above-described problem, the MI element unit includes first and second MI elements provided on both sides of a gap surface of the ring-shaped magnetic core, and the first and second MI elements are provided. Of the respective electrodes provided on the conductive metal thin film of the MI element, the electrodes on one side in the width direction of the gap are connected to each other, and the high-frequency carrier signal current is passed through the electrode on the other side. Is applied.

According to this configuration, by using the first MI element and the second MI element arranged symmetrically on the gap surface, the number of crossings between the magnetic circuit and the high-frequency current increases, and the impedance is increased. And the output can be greatly improved. Further, the magnetic field leaking from the gap due to the energization of the high-frequency carrier signal or the DC bias signal is canceled, and the erasure of the signal magnetization on the magnetic recording medium is suppressed.

In the above configuration, preferably, the first
And the second MI element is arranged at a position symmetrical with respect to the gap plane.

Preferably, in the above configuration, a DC bias is applied by superimposing a DC current on the high-frequency carrier signal current and applying a current.

Further, in the above configuration, preferably,
A permanent magnet film for applying a DC bias magnetic field to the soft magnetic film of the MI element portion is provided, and the permanent magnet film is arranged so that its polarity is the same as the surface of the magnetic recording medium.

Further, in the above configuration, preferably,
The permanent magnet film is a conductive material film.

Further, in the above configuration, preferably,
The permanent magnet film is arranged at a position symmetrical with respect to the gap plane.

Further, in the above configuration, preferably,
Among the soft magnetic films constituting the first and second MI elements, the thickness of the soft magnetic film disposed on the window side of the ring-shaped magnetic core is larger than the thickness of the outer soft magnetic film. The configuration is as follows.

Further, in the above configuration, preferably,
Each of the first and second MI elements has a configuration in which the conductive metal thin film is sandwiched between a soft magnetic film and a permanent magnet film.

Further, in the above configuration, preferably,
A first soft magnetic film formed on a non-magnetic substrate, a permanent magnet film formed in a region (hereinafter referred to as a Z region) in which a part of the first soft magnetic film is removed, and the permanent magnet film A first magnetic head half including a conductive metal thin film formed on the conductive metal thin film, a second soft magnetic film formed on the conductive metal thin film, and an insulating film formed in the Z region; A gap formed by a gap material layer provided on the magnetic head half, and an insulating film, a second soft magnetic film, and a conductive film formed symmetrically with respect to the gap surface with respect to the first magnetic head half. The structure includes a metal thin film and a second magnetic head half including the first soft magnetic film.

In a method of manufacturing a magnetic head according to the present invention, a step of forming a first soft magnetic film on a substrate, and etching a part of the first soft magnetic film to the surface of the substrate to form a recess. Forming, forming a permanent magnet film in the recess, forming a conductive metal thin film on the permanent magnet film in the recess, forming a second soft magnetic film on the conductive metal film. And a step of forming an insulating film on the second soft magnetic film in the concave portion by pressing and fixing the two single-sided cores via a non-magnetic gap film. It is characterized by comprising.

According to another aspect of the present invention, there is provided a method of manufacturing a magnetic head, comprising: forming a first soft magnetic film on a substrate; and etching a part of the first soft magnetic film to a substrate surface. Forming a permanent magnet film in the concave portion, forming a conductive metal thin film on the permanent magnet film in the concave portion, forming a second conductive film on the conductive metal film.
Forming a non-magnetic insulating film on the second soft magnetic film in the concave portion;
Smoothing the soft magnetic material and the insulating film, forming a non-magnetic film on the smoothed surface, and forming the Z in which the concave portion is formed.
Forming an insulating film on the non-magnetic film in the region, forming a second magnetic film on the insulating film in the Z region, and forming a conductive film on the second soft magnetic film in the Z region. Forming a metal film, forming a permanent magnet film on the conductive metal film in the Z region, forming a first soft magnetic film thereon, and forming the first soft magnetic film in the Z region in each of the above steps A step of flattening the gap between the formed convex portion and the other region, and a step of forming an insulator film thereon.

Any one of the above magnetic heads, or a magnetic head manufactured by any one of the above manufacturing methods, and a recording medium for holding a signal recorded on the recording medium for reproduction by the magnetic head. Means, and a positioning means for positioning the magnetic head at a designated position on the recording medium.

[0019]

(Embodiment 1) FIG. 1 is a sectional view of a ring-type MI head according to Embodiment 1 of the present invention. The first position is symmetrical with respect to the gap plane (a)-(a ′).
And the second MI element section 23 are formed. The MI element unit 22 is arranged in series with the magnetic cores 1 and 6 made of a soft magnetic film and having a thickness larger than the soft magnetic films 4 and 5 with the conductive metal thin film 2 interposed therebetween. Also, M
The I element portion 23 is arranged in series with the magnetic cores 1 'and 6' made of a soft magnetic film, which are thicker than the soft magnetic films 4 'and 5' and sandwich the conductive metal film 2 '. .
These are a configuration in which the gap surfaces (a)-(a ') are joined together.

FIG. 2 shows a schematic diagram of the MI head viewed from the arrow A side in FIG. 1 and a connection diagram for signal detection. The magnetic cores 1 and 1 'are formed substantially symmetrically with respect to the gap plane (a)-(a'). Also the first
End portion 2 of conductive metal thin film 2 penetrating MI element portion 22 of FIG.
8 and 29 and the ends 30 and 31 of the conductive metal thin film 2 ′ penetrating the second MI element section 23, which are on the same side with respect to the track TW of the magnetic cores 1 and 1 ′ The electrodes 32, 33 at 29 and 31 are connected. Further, a first pair of electrode terminals 40 and 41 and a second pair of electrode terminals 34 and 35 are provided at respective ends 28 and 30 on the other side with respect to the track TW.

By applying a high-frequency carrier signal from a high-frequency transmitter 25 and a DC bias current from a DC power supply 26 to a second pair of electrode terminals 34 and 35 via a resistor 27, an arrow is applied to the conductive metal thin film 2. 38, a current is applied to the conductive metal thin film 2 'in the direction of arrow 39. A high-frequency amplifier 42 is connected to the first pair of electrode terminals 40 and 41. In this way, the AM-modulated high-frequency signal supplied through the first pair of electrode terminals 40 and 41 is amplified by the high-frequency amplifier 42, and passes through the AM detector included in the high-frequency amplifier 42 so that the signal is Demodulated.

The features of the present invention thus configured will be described. The current described below means the high-frequency carrier signal current and the direct current. However, considering the instantaneous moment, the direct current treatment may be used. With this configuration, in FIG. 1, the current 3 is applied to the inside of the conductive metal thin film 2 of the first MI element unit 22 perpendicular to the plane of the drawing, while the conductive metal thin film of the second element unit 23 is In 2 ′, a current 3 ′ flows in a direction toward the front from the page.

The magnetic flux generated by the currents 3 and 3 'actually has a distribution, but for the sake of simplicity, is schematically indicated by a solid line. That is, the first MI
The magnetic flux 9 flowing through the soft magnetic films 5 and 4 of the element section 22 flows in the direction of arrow 15. The magnetic flux flowing through the soft magnetic films 4 ′ and 5 ′ of the second MI element section 23 is
, The magnetic flux 11 flows in the direction of arrow 21.

On the other hand, the magnetic flux generated by the current 3 ′ flowing in the conductive metal thin film 2 ′ of the second MI element section 23 is shown by a broken line. The magnetic flux 9 ′ flowing through the magnetic films 4 ′ and 5 ′ of the second MI element 23 flows in the direction of arrow 18. The magnetic flux flowing through the magnetic films 4 and 5 of the first MI element unit 22 is
The magnetic flux 10 'is in the direction of arrow 14 and the magnetic flux 11' is in the direction of arrow 12.
Flows in the direction of

In the soft magnetic film of the gap portion 7 in FIG.
The magnetic flux generated from the first MI element unit 22 and the magnetic flux generated from the second MI element unit 23 are opposite to each other as shown by arrows 16 and 17, and are canceled. Also, in the magnetic cores 1 and 1 ', the directions of the magnetic fluxes are reversed as shown by arrows 43 and 44, and are the directions of canceling out.
Thus, particularly, the leakage magnetic field from the tip of the gap 7 is extremely small, and the problem of erasing signal magnetization on the magnetic recording medium is solved.

In the soft magnetic film 4 of the first MI element section 22, the magnetic flux 9 generated from the current 3 and the magnetic flux 11 'generated from the current 3' reinforce each other as shown by arrows 14 and 15. It takes shape. On the other hand, in the magnetic film 5 of the first MI element section 22, as shown by arrows 13 and 12, a magnetic flux 10 generated from the current 3 and a magnetic flux 11 'generated from the current 3'.
Is a form that cancels out. However, in the soft magnetic film 5, the magnitude of the magnetic flux 10 generated from the current 3 is not larger than that of the magnetic flux 11 'generated from the current 3'.
Contributes slightly. From these, during operation,
It can be seen that the soft magnetic film 4 mainly facing the window 8 contributes to the generation of impedance. Similarly, the second MI
In the soft magnetic film 4 ′ of the element portion 23, they strengthen each other as shown by arrows 18 and 19, and in the soft magnetic film 5 ′, they cancel each other out as shown by arrows 21 and 20.

Therefore, the thicknesses of the soft magnetic films 4 and 4 'forming the MI element portion are changed to the soft magnetic films 5 and 5', respectively.
If the configuration is made larger so that the operating magnetic field of the DC bias becomes the same, a magnetic circuit having high efficiency for the MI effect can be formed. The impedance is proportional to the square of the number of crossings between the current and the magnetic path,
With the above-described configuration, the number of crossings becomes two, so that the impedance is increased as compared with the conventional example, and a four-fold output is obtained.

(Embodiment 2) M in Embodiment 2
The I head is an example in which a DC bias magnetic field is applied by a magnet, and FIG. 3 is a sectional view thereof. FIG. 4 shows a side view and a connection diagram as viewed from the arrow B side in FIG. The operation of the high-frequency carrier signal is the same as that of the first embodiment, and the description is omitted.

In the present embodiment, the first MI element section 22
The permanent magnet films 43 and 44 are disposed on the side surfaces of the soft magnetic film 5 and the second MI element section 23, respectively. The polarities of the two permanent magnet films 43 and 44 are opposite to the medium facing surface (b) −
It is the same toward the (b ′) side. With this configuration, the magnetic flux generated from the permanent magnet films 43 and 44 is the first M
It flows through the soft magnetic films of the I element section 22 and the second MI element section 23 to generate a bias magnetic field. The operation will be described. The magnetic flux 45 generated from the permanent magnet film 43 flows in the direction of the arrow 46 in the soft magnetic film 5 of the first MI element portion, and returns to the permanent magnet film. Further, the magnetic flux 50 'generated from the permanent magnet film 44 flows in the direction of the arrow 53, so that the magnetic flux 50' reinforces each other. Among the soft magnetic films 4, the permanent magnet film 4
The magnetic flux 47 from 3 and the magnetic flux 49 'from the permanent magnet film 44 reinforce each other as shown by arrows 48 and 54, respectively. Similarly, among the soft magnetic films 4 'and 5' of the second MI element unit 23, the magnetic fluxes from the permanent magnet films 43 and 44 reinforce each other, and it is possible to set an efficient DC bias magnetic field.

In the magnetic cores 1 and 1 ', the magnetic flux generated from the permanent magnet film 43 and the magnetic flux generated from the permanent magnet film 44 cancel each other as shown by arrows 57 and 58, respectively. Similarly, the gaps between the magnetic cores 6 and 6 'cancel each other as shown by arrows 55 and 56. Therefore, the leakage magnetic field from the gap 7 is extremely small, and the problem of erasing the signal magnetization on the magnetic medium is solved. Further, similarly to the first embodiment, there is an effect that the impedance increases four times and the output increases.

(Embodiment 3) FIG. 5 is a sectional view of an MI head according to Embodiment 3. Embodiments 1 and 2
From the above, it was found that, out of the soft magnetic films of the MI element portion, the soft magnetic films 4 and 4 ′ in contact with the window 8 effectively act on the impedance. The present embodiment takes this result into consideration. That is, the soft magnetic films 5 and 5 'of the second embodiment are removed, and permanent magnet films 43 and 44 for applying a DC bias magnetic field are formed at the positions.

Te on a NiTiMg ceramic substrate 59
A first soft magnetic film made of TaN is formed, and a portion sandwiched between alternate long and short dash lines (c ′)-(c) and (d ′)-(d) by ion beam etching (hereinafter referred to as Z). The first magnetic film (referred to as a region) is removed. Thus, the upper portion of the remaining portion of the first soft magnetic film becomes the magnetic core 1 and the lower portion becomes the magnetic core 6. Next, on the Z region and the magnetic cores 1 and 6, C
A permanent magnet film such as oCrPt is formed, and the permanent magnet film 43 is formed only in the Z region by a photolithography technique. After further forming the conductive metal film 2 made of Cu,
A second soft magnetic film 4 made of FeTaN having a smaller thickness than the first soft magnetic film is formed. Further, an alumina film as an insulator film is formed, and the alumina film 60 is left only in the Z region by using a photolithography technique and a polishing process.
Next, an insulating film 61 made of SiO ₂ is formed to form the gap 7. Alumina film 60 ′ is symmetrical with respect to this gap plane,
The second soft magnetic film 4 ′, the conductive metal film 2 ′ made of Cu, the permanent magnet film 43 ′, and the magnetic cores 1 ′ and 6 ′ made of the first soft magnetic film are photolithographically and mechanically processed. To form a magnetic head.

In the magnetic head thus configured, the second pair of electrode terminals 36 and 37 connected to the terminals 34 and 35 of the conductive metal films 2 and 2 ′ transmit high-frequency waves in the same manner as in the second embodiment. A high-frequency carrier signal is applied from the device 25 via the resistor 27, and the high-frequency signal AM-modulated by the magnetic flux generated from the magnetization 63 of the magnetic recording medium 62 is converted to a high-frequency signal connected to the first pair of electrode terminals 40 and 41. It was reproduced by the amplifier 42. As described in the second embodiment, since the number of crossings between the magnetic circuit and the current is 2, an output four times that of the related art is obtained. As in the second embodiment, the DC bias magnetic field did not leak out of the gap, and there was no phenomenon of erasing the magnetization 63 written on the magnetic recording medium 62. In addition, when conductive hard magnetic materials are used as the permanent magnet films 43 and 44, the area of the lead through which the high-frequency current flows becomes large, so that the impedance of the lead portion, which does not change due to the signal magnetic field, decreases, and the impedance change rate can be increased. I understood.

In the above example, the soft magnetic film is made of FeT
Although aN was used, any of an Fe-based, Co-based metal magnetic film, or oxide magnetic film having an excellent effective magnetic permeability at 1 GHz can be used. Although an example using SiO ₂ as the gap material has been described, all non-magnetic materials such as alumina and Cu are effective. As a substrate,
Although an example using a NiTiMg ceramic substrate is shown,
Other ceramics such as AlTiC, glass-based materials, and carbon substrates are also effective. In addition, Co is used as a permanent magnet film.
Although CrPt was used, all hard magnetic materials such as SmCo and Fe-based materials are effective.

[0035]

According to the present invention, the number of crossings between the magnetic circuit and the high-frequency current is increased by using the first and second MI element sections symmetrically arranged on the gap plane. The impedance is increased, and the output can be significantly improved. Further, the magnetic field leaking from the gap due to the energization of the high-frequency carrier signal or the DC bias signal is canceled, and the erasure of the signal magnetization on the magnetic recording medium is suppressed.

[Brief description of the drawings]

FIG. 1 is a sectional view of an MI head according to a first embodiment of the present invention.

FIG. 2 is a connection diagram of an MI head according to the first embodiment of the present invention.

FIG. 3 is a sectional view of an MI head according to a second embodiment of the present invention.

FIG. 4 is a connection diagram of an MI head according to a second embodiment of the present invention.

FIG. 5 is a sectional view of an MI head according to a third embodiment of the present invention.

FIG. 6 is a perspective view showing the configuration and operation of a conventional MI head.

FIG. 7 is a graph showing the operation principle of a conventional MI head.

[Explanation of symbols]

1, 1 'magnetic core (first soft magnetic film) 2, 2' conductive metal film 3, 3 'current 4, 4', 5, 5 'second soft magnetic film 6, 6' magnetic core (First soft magnetic film) 7 Gap 8 Window 9, 9 ', 10, 10', 11, 11 'Magnetic flux 12, 13, 14, 15, 16, 17, 18, 19, 2,
0, 21 Arrow indicating the direction of magnetic flux 22 First MI element section 23 Second MI element section 25 High-frequency oscillator 26 DC power supply 27 Resistance 28, 29 Conductive metal thin film of first MI element 30, 31 Second Conductive metal thin film 32, 33, 34, 35 electrode 36, 37 Second pair of electrode terminals 38, 39 Current direction 40, 41 First pair of electrode terminals 42 High frequency amplifier 43 First permanent Magnet film 44 Second permanent magnet film 45, 47, 49, 49 ', 50, 50' Magnetic flux 46, 48, 51, 52, 53, 54, 55, 56, 5
7,58 arrows 59 substrate 60, 60 indicating the direction of the magnetic flux 'insulating film 61 non-magnetic film 62 magnetic recording medium 63 magnetized 64 detects conductive film 65 track width 66 permalloy film 67 SiO ₂ film 68 and 69 soft magnetic film 70 High frequency oscillator 71 Resistance 72 Current 73, 74 Electrode terminal 75 Magnetic recording medium 76 Magnetization 77 DC bias

Claims (12)

[Claims] 1. A ring-shaped magnetic core having a gap, a conductive metal thin film and soft magnetic films disposed on both surfaces thereof are provided in a magnetic path of the ring-shaped magnetic core, A predetermined resistance is provided between an MI element portion including a magneto-impedance element (hereinafter, referred to as an MI element) in which electrodes are provided at both ends in a width direction of the gap of the conductive metal thin film, and an electrode of the conductive metal thin film. Current applying means for applying a high-frequency carrier signal current through the conductive metal thin film; bias magnetic field applying means for applying a DC bias magnetic field to the conductive metal thin film; and AM-modulated high frequency detected from an electrode of the conductive metal thin film. A circuit for detecting a carrier signal and amplifying the high-frequency signal. In a magnetic head that detects a change in a signal, the MI element unit includes first and second MI elements disposed on both sides of a gap surface of the ring-shaped magnetic core, respectively. Among the electrodes provided on the conductive metal thin film of the second MI element, the electrodes on one side in the width direction of the gap are connected to each other, and the high-frequency carrier is connected via the electrode on the other side. A magnetic head to which a signal current is applied. 2. The magnetic head according to claim 1, wherein the first and second MI elements are arranged at positions symmetrical with respect to the gap plane. 3. The magnetic head according to claim 1, wherein a DC bias is applied by superimposing a DC current on the high-frequency carrier signal current and applying a current. 4. A permanent magnet film for applying a DC bias magnetic field to the soft magnetic film of the MI element portion, wherein the permanent magnet film is arranged so that its polarity is the same as the surface of the magnetic recording medium. 2. The magnetic head according to claim 1, wherein: 5. The magnetic head according to claim 4, wherein the permanent magnet film is a conductive material film. 6. The magnetic head according to claim 1, wherein the permanent magnet film is arranged at a position symmetrical with respect to the gap plane. 7. The thickness of the soft magnetic material film disposed on the window side of the ring-shaped magnetic core among the soft magnetic material films constituting the first and second MI elements is set to the thickness of the outer soft magnetic material film. 2. The magnetic head according to claim 1, wherein the magnetic head is configured to have a thickness larger than the thickness. 8. The magnetic head according to claim 1, wherein the first and second MI elements have a configuration in which the conductive metal thin film is sandwiched between a soft magnetic film and a permanent magnet film. 9. A first soft magnetic film formed on a non-magnetic substrate, and a permanent magnet film formed in a region (hereinafter referred to as a Z region) in which a part of the first soft magnetic film is removed. A first magnetic head half including a conductive metal thin film formed on the permanent magnet film, a second soft magnetic film formed on the conductive metal thin film, and an insulating film formed in the Z region A gap formed by a gap material layer provided on the first magnetic head half; an insulating film formed symmetrically to the first magnetic head half with respect to the gap surface; A second film including a body film, a conductive metal thin film, and a first soft magnetic film;
2. A magnetic head half according to claim 1.
The magnetic head as described. 10. A step of forming a first soft magnetic film on a substrate, a step of forming a concave portion by etching a part of the first soft magnetic film to the substrate surface, Forming a magnet film, forming a conductive metal thin film on the permanent magnet film in the recess, forming a second soft magnetic film on the conductive metal film, and forming a second soft magnetic film on the recess. Forming a magnetic head by pressing and fixing two single-sided cores manufactured by a process including a process of forming an insulating film on a soft magnetic film through a non-magnetic gap film. Head manufacturing method. 11. A step of forming a first soft magnetic film on a substrate, a step of forming a concave portion by etching a part of the first soft magnetic film to a substrate surface, and a step of permanently forming the concave portion in the concave portion. Forming a magnet film, forming a conductive metal thin film on the permanent magnet film in the recess, forming a second soft magnetic film on the conductive metal film, Forming a non-magnetic insulating film on the second soft magnetic film, and smoothing the second soft magnetic material and the insulating film;
Forming a non-magnetic film on the smoothed surface, forming an insulating film on the non-magnetic film in the Z region in which the recess is formed, and forming a second magnetic film on the insulating film in the Z region Forming a conductive metal film on the second soft magnetic film in the Z region; forming a permanent magnet film on the conductive metal film in the Z region; Forming a first soft magnetic film, flattening the gap between the protrusion formed in the Z region and the other region in each of the above steps, and further forming an insulator film thereon And a method for manufacturing a magnetic head. 12. A magnetic head according to any one of claims 1 to 9, or a magnetic head manufactured by the manufacturing method according to claim 10 or 11, and a signal recorded on a recording medium, A magnetic reproducing apparatus comprising: means for holding a recording medium for reproduction by a head; and positioning means for positioning a magnetic head at a designated position on the recording medium.