JP2001330546A - Positioning device and near-field optical microscope using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a positioning device capable of accurately and easily moving objects on a stage by a desired amount. SOLUTION: This positioning device can move the objects 111 and 132 on the stage 137 by a desired amount in a direction substantially perpendicular to an optical axis C. This positioning device 130 is characterized by having transfer control means 124 and 126, commanding a series of operations in which the objects 111 and 132 are transferred from the stage 137 onto a holder 138 by a transfer means 128 before the amount of movement in the direction substantially perpendicular to the optical axis becomes the desired amount, one of the stage 137 and the holder 138 is a specified amount moved or angle-changed relative to the other by an adjustment means 140 from the reference position C in the direction substantially perpendicular to the optical axis with the object 111 placed on the holder 138, and then the objects 111 and 132 are transferred from the holder 138 onto the stage 137 by the transfer means 128.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device and a near-field optical microscope using the same, and more particularly to an improvement of a moving mechanism in a direction substantially orthogonal to an optical axis of a sample.

[0002]

2. Description of the Related Art In recent years, a near-field optical microscope based on a principle different from a general optical microscope or an electron microscope has been developed, and its application is expected. This near-field optical microscope detects so-called evanescent light. For example, as shown in FIG. 1, a minute sample 11 is placed on a flat substrate 12, and excitation is performed from the back side of the substrate 12. When the excitation light 16 from the laser 14 is incident at an angle that causes total reflection, all the propagating light is reflected, but the evanescent light 1 is located near the surfaces of the substrate 12 and the sample 11.
A surface wave called 8 is generated. This surface wave is localized in a region around the object surface within a distance of the light wavelength.

A sharp probe 20 suspended from a near-field head 19 is inserted into the field of the evanescent light 18 to scatter the evanescent light 18, and the scattered light intensity is detected by a detector 22. The distance between the tip of the probe 20 and the surface of the sample can be defined by processing the data with the computer 24. Therefore, according to the near-field optical microscope, when the computer 24, the stage controller 26, and the like scan the surface of the sample 11 while moving the substrate 12 up and down by the stage 28 so that the scattered light intensity becomes constant, the sample It is possible to accurately grasp irregularities of the sample 11 without contact with the sample 11.

In addition, since the tip of the probe 20 exists only in the field of the evanescent light 18 and does not contact the sample 11 itself, the probe 20 is not in contact with the sample 11, is not destroyed, and is smaller than the light wavelength. You can observe things. By the way, in the near-field optical microscope, in order to further improve the measurement accuracy, a method of preparing a probe and a measurement method have been mainly focused on so far, but recently, positioning of the probe in a surface direction of the sample has been focused. Accuracy has also been emphasized.

First, conventionally, as such a positioning device, for example, a positioning device using a piezo or the like having a high repeatability of a driving amount as a driving source has been used. The stage is moved by fixing one end of the piezo to the wall surface of the stage, fixing the other end, applying a voltage to the piezo, and expanding and contracting the piezo. However, in this positioning device, although the repeatability of the drive amount is high, the position is determined by the expansion and contraction of the piezo itself, so that the drive range of the piezo itself is limited. Thus, the maximum movement amount of the stage is limited to the driving range of the piezo.

Therefore, in order to obtain a movement amount larger than the driving range of the piezo, a positioning device as shown in FIG. 2 is often used. In FIG.
0 is placed on the mounting portion 31 of the stage 28 and the sample 11
, A piezo 34 having one end attached to the right side of the base 32, and an electric circuit 35 for applying a saw-tooth-like voltage to the piezo 34. Then, when a voltage is applied from the electric circuit 35 to the piezo 34, the same applies to FIG.
As shown in FIG. 7, the piezo 34 expands and contracts in the left-right direction in the figure, and the base 32 moves on the mounting portion 31 of the stage 28 so as to slide to the left, for example, by using its inertia. .

[0007]

However, in the positioning device 30 having the above-described configuration, a movement amount larger than the driving range of the piezo can be obtained. Is determined by unstable factors such as friction with the mounting portion 31, and the absolute accuracy is low.

[0008] For this reason, there is room for improvement in use of a near-field optical microscope for measuring a finer sample, even if a general microscope or the like has sufficient accuracy. In addition, in order to obtain high-precision positioning accuracy, the configuration is complicated, and it is necessary to avoid an increase in cost and an increase in size. Technology did not exist. SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the related art, and has as its object to accurately and easily move a desired amount of a target object on a stage, and to use near-field optics using the same. It is to provide a microscope.

[0009]

According to a first aspect of the present invention, there is provided a positioning apparatus including a stage, a holder, an adjusting unit, a transfer unit, and a transfer control unit. And Here, an object is placed on the stage. The target object of the stage is temporarily placed on the holder. The adjusting means is capable of moving or changing the angle of the other of the stage and the holder by a predetermined amount in a direction substantially perpendicular to the optical axis from a reference position in a state where the target object is placed on the holder. I do.

[0010] The transfer means transfers the object between the stage and the holder without changing a position in a direction substantially orthogonal to an optical axis. The transfer control means transfers the target object of the stage to the holder by the transfer means until the amount of movement of the target object on the stage in a direction substantially orthogonal to the optical axis becomes a desired amount. While the target object is placed on the stage, the adjusting means moves the other of the stage and the holder by a predetermined amount or a predetermined angle from the reference position in a direction substantially orthogonal to the optical axis, and changes the angle by a predetermined angle. A series of operations for transferring the target object of the holder to the stage by the changing means are performed.

[0011] In the present invention, the stage may include:
An opening is provided in the mounting portion of the object, and the object is mounted with at least a part of the object positioned above the opening, and the holder is disposed below the stage opening. It is possible to transfer the target of the stage mounting portion through the opening without changing the position in a direction substantially orthogonal to the optical axis, the transfer control means, the transfer control means by the transfer means By narrowing the vertical distance between the stage and the holder, the target object is transferred from the stage to the holder, and in a state where the target object is placed on the holder, the adjusting means adjusts the one of the stage and the holder. On the other hand, move or change the angle by a predetermined amount from the reference position,
It is preferable that the object is transferred from the holder to the stage by increasing the distance between the stage and the holder without changing the position in the direction substantially orthogonal to the optical axis by the transfer means.

Further, in the present invention, as the adjusting means, a piezo stage capable of moving or changing the angle of the stage by a predetermined amount in a direction substantially perpendicular to the optical axis from a reference position is used, and the holder is connected to the optical axis. It is also preferable that the absolute position is provided on the reference position so that the absolute position in the direction substantially orthogonal to the reference position does not change. Further, in the present invention, as the transfer means, a stepping motor or a piezo element which can move up and down with respect to one of the stage and the holder without changing the position in a direction substantially orthogonal to the optical axis may be used. This is preferable in that a driving amount with high repetition accuracy can be obtained.

Further, the near-field optical microscope according to the present invention obtains information on the measured surface of the sample from the scattered light generated when the optical stylus enters the field of the evanescent light on the measured surface of the sample. The near-field optical microscope is characterized in that the positioning device is used to perform positioning in a direction substantially orthogonal to the optical axis of the optical probe and the surface to be measured.

The term "object" as used herein refers to a base or an object on which a sample is placed. When the stage is moved relative to the holder, assuming that the desired moving direction of the target object on the stage is the X direction, the stage is moved from the reference position in a direction opposite to the desired moving direction (X direction) (-X direction). Direction). On the other hand, when the holder is moved with respect to the stage, the holder is moved from the reference position in a desired moving direction (X direction) of the object.

[0015]

DETAILED DESCRIPTION OF THE INVENTION First, a near-field optical microscope, compared to a general optical microscope or an electron microscope, is a non-contact, non-destructive sample capable of observing a sample smaller than the value of light wavelength. Recently, a positioning device has been required to have higher positioning accuracy than a general optical microscope or electron microscope. However, conventionally, in the near-field optical microscope, the preparation of the probe and the improvement of the measuring method have been mainly performed, so that the development of the positioning technology capable of obtaining a certain large amount of movement more accurately has been delayed.

Therefore, in the present invention, the first characteristic is that, although a single driving can obtain only a predetermined driving range, such as a piezo element, a very high repetition accuracy of the driving amount can be obtained. That is, a movement amount larger than the range of the driving source is obtained while making full use of the features possessed. Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

For this reason, in the present embodiment, as shown in an enlarged view in FIG. 3, a piezo stage (stage) 137, which can be minutely positioned in the XYZ directions, and a holder 138, which are used in a near-field optical microscope, For example, an adjusting unit including a piezo driving unit 140 that drives the piezo stage 137 and an XYZ stage 1 that can be driven by, for example, a stepping motor used in the near-field optical microscope
A transfer means using a vertical movement (Z direction) function of 28,
A transfer control unit including a computer 124 and a stage controller 126 is provided.

The portions corresponding to those of the above-mentioned prior art are denoted by reference numeral 100, and description thereof is omitted. In the figure,
The piezo stage 137 has an opening 136 in the mounting portion 131, and the base 13 is placed on the opening 136.
2 is placed. The sample 111 is placed on the base 132. The probe (optical stylus) 120 is located substantially on the center axis (reference position) C of the piezo stage 137.

The holder 138 has an optical axis (reference position) C
The XYZ stage 128 moves in the Z direction, that is, can move up and down, so that the absolute position in the direction substantially perpendicular to the upper direction is not changed and is located below the opening 136 and on the reference position C. The adjusting means including the piezo drive unit 140 and the like has, for example, an upper end provided on the near-field head 119 and a lower end provided on the upper surface of the stage 137.

The piezo drive unit 140 allows the piezo stage 137 fixed to the lower end to be moved along the center axis without changing the absolute position of the upper end fixed to the near-field head 119 in a direction substantially orthogonal to the reference position C. (Reference position) The angle can be changed based on C. As described above, in the present embodiment, the piezo stage 137 capable of fine positioning used in the near-field optical microscope is also used as an adjusting unit of the positioning device.

The holder 138 is mounted on the XYZ stage 12
8, the holder 138 is moved up and down by the XYZ stage 128 in order to transfer the base 132 on which the sample 111 is placed between the piezo stage 137 and the holder 138 without affecting the position in the XY directions. It is possible.
As described above, in the present embodiment, the vertical movement function of the XYZ stage 128 used in the near-field optical microscope is also used as the transfer device of the positioning device.

A transfer control means comprising a computer 124, a stage controller 126 and the like is used, for example, in a near-field optical microscope, controls the vertical movement of the XYZ stage 128, moves the holder 138 upward, and then moves the piezo stage 137. The upper base 132 is moved onto the holder 136, and the piezo stage 137 is driven by the piezo driving unit 140 in a predetermined driving amount in an arbitrary XY direction (direction substantially orthogonal to the optical axis C). The holder 138 is moved downward, the base 132 on the holder 138 is transferred to the piezo stage 137, and this operation is repeated as necessary to perform positioning of an arbitrary amount.

That is, as shown in FIG. 4, the base 132 on the piezo stage 137 is
Transfer to That is, as shown in FIG.
When the holder 138 is moved upward by the Z stage 128, the holder 138 is moved from the opening 136 to the piezo stage 1.
37, the base 132 is lifted from the mounting section 131, and the base 132 of the piezo stage 137 is placed in the holder 138.
Transfer to the top.

The piezo stage 137 is driven by a predetermined drive amount in an arbitrary XY direction. That is, if the desired moving direction of the sample 111 is to the left in the drawing, the piezo driving unit 140 controls the piezo stage 1 as shown in FIG.
The piezo drive unit 140 is rotated by a predetermined amount in the counterclockwise direction in the figure so as to shift 37 from the center position C to the right in the direction opposite to the desired movement direction.

The base 132 on the holder 138 is transferred onto the piezo stage 137. That is, as shown in FIG. 7C, when the holder 138 is moved down by the XYZ stage 128 while the tilt angle of the piezo stage 137 in FIG.
The base 132 on the mounting 38 is the mounting portion 1 of the piezo stage 137.
Since the base 132 is placed on the base 31, the base 132 on the holder 138 is moved onto the placement part 131 of the piezo stage 137.

Then, as shown in FIG. 2D, the piezo stage 13 shown in FIG.
When the tilt angle of 7 is returned to the original angle, the sample 111 is moved on the piezo stage 137 by a predetermined driving amount of the piezo driving unit 140.
It is moving in a desired moving direction (left side in the figure). As a result, when the above operations (1) to (4) are repeated the required number of times, the sample 111 can be accurately driven on the piezo stage 137 in the direction of the surface to be measured. That is, the sample 111
Since the amount of one drive in the X and Y directions is determined by the accuracy of the fine movement positioning of the piezo drive unit 140, very high accuracy and repeatability can be maintained.

Moreover, the piezo stage 137 and the holder 1
38 can be easily performed by using the relatively large driving amount of the stepping motor used in the XYZ stage 128, and by repeating this operation a desired number of times, the driving range of one time of the piezo can be reduced. Even if the movement amount is large, the sample 111 can be quickly moved while maintaining the extremely high accuracy and repetition accuracy of the piezo drive unit 140.

A highly accurate positioning device, not only a near-field optical microscope, but also a simplification and downsizing of the configuration is desired. Therefore, in the present invention, the second characteristic is that the mechanism of the positioning device is also used for each component used in the near-field optical microscope. For this reason, in the present embodiment, as described above, the adjusting means of the positioning device is used for the piezo stage 13 used in the near-field optical microscope.
7, the transfer means is also used for a vertical movement function of an XYZ stage 128 driven by a stepping motor or the like used in a near-field optical microscope.

The transfer control means of the positioning device of the present invention is provided by a computer 1 used in a near-field optical microscope.
24, the stage controller 126 and the like. As a result, positioning can be performed with existing components used in the near-field optical microscope without requiring an additional electric circuit. Therefore, compared to a case where a driving mechanism, an electric circuit, and the like are newly provided, the configuration is simplified and the device is downsized.
In addition, since the positioning operation can be performed from the outside of the sample chamber by the operation from the computer 124 or the like, the positioning operation can be easily performed in an environment where a hand cannot be used in the sample chamber or the like as in a near-field optical microscope. It becomes possible.

As described above, according to the near-field optical microscope using the positioning device 130 according to the present embodiment, XYZ
The sample 111 is moved to the piezo stage 1 by the stage 128.
37 to a holder 138, and a piezo drive unit 140
After the piezo stage 137 is driven by a predetermined drive amount in an arbitrary XY direction, the sample 111 of the holder 138 is moved by the XYZ stage 128.
By repeating the transfer to the required number of times, the positioning of the sample 111 on the piezo stage 137 in the XY direction by a desired amount can be performed with a very high repetitive driving accuracy of the piezo.

In this embodiment, the function of each member of the positioning device is defined by the vertical movement function of the piezo stage 137 and the XYZ stage 128 used in the near-field optical microscope.
By using the stage controller 126 and the computer 124 together, new components such as an electric circuit are not required separately, so that the configuration can be simplified and downsized.

In the above-described configuration, an example has been described in which the positioning apparatus of the present invention is applied to the stage drive of a near-field optical microscope. Even if the amount is large, a high positioning accuracy is required and a sufficient effect can be obtained.However, the present invention is not limited to this, and can be applied not only to general microscopes but also to all types of positioning. is there.

Also, an example in which an XYZ stage 128 or the like driven by a stepping motor or the like used in a near-field optical microscope is used as a transfer means has been described. It is also possible to use a vertical movement function such as a piezo drive unit 140 driven by a piezo or the like. In the above-described configuration, the example in which the angle of the piezo stage 137 is changed has been described.
X of the piezo stage 137 by the XYZ stage 128
The movement in the Y direction may be performed.

In the above configuration, the piezo stage 13
7, the angle can be changed, but the holder 138 has its optical axis C
Although the example in which the absolute position in the direction substantially perpendicular to the axis is not changed has been described, the absolute position in the direction substantially orthogonal to the optical axis C of the piezo stage 137 is not changed and X
The YZ stage 128 may allow the holder 138 to move in the X and Y directions.

As described above, piezos and bimorphs are very preferable as a driving source of a minute distance positioning device because they have very high repetition accuracy of a driving amount, and are particularly effective in a near-field optical microscope. Therefore, a minute distance positioning device using the following piezo or bimorph is also preferably used.

<Micro-distance positioning device using piezo>
Since a positioning device used in a near-field optical microscope or the like requires higher feed accuracy than a positioning device used in a general microscope or the like, a piezo is used for driving. However, in the device that determines the position using the expansion and contraction of the piezo itself, the driving range of the piezo itself is limited,
A movement amount larger than the driving range of the piezo cannot be obtained.

Therefore, conventionally, in order to obtain a movement amount larger than the driving range of the piezo itself, the piezo is attached to an object and a voltage such as a sawtooth is applied to utilize the inertial force due to the expansion and contraction of the piezo. Then, it is conceivable to drive the target object to slide on the mounting portion. However, in such a positioning device, although a movement amount larger than the driving range of the piezo itself is obtained, an object much heavier than the piezo itself can be driven because the piezo itself uses inertial force due to its own weight. Can not.

Further, since the piezo and the target object need to be in close mechanical contact with each other at all times, they are usually adhered to each other. In addition, it is easily desorbed even under extreme conditions such as low and high temperatures,
In particular, there is a problem when used in a sample room controlled at an extremely low temperature or the like as in a near-field optical microscope. Therefore, when a piezo is used as a driving source in a positioning device, particularly a positioning device used in a near-field optical microscope, it is preferable to use the one shown in FIG.

FIG. 5 is a view of the positioning device as viewed from above. The portions corresponding to those in FIG. In the figure, a positioning device 230 includes, on a base 232, an installation portion 241 provided with a groove or the like for pressing and pressing one of the laminated piezos 240 against the base 232 without bonding one of the stacked piezos 240. 24
A mechanism is provided for pressing the load serving as the weight 244 via the spring 242 to the other of the zeros.

The sawtooth, sinusoidal, rectangular or pulsed voltage from the stage controller 226 used in the near-field optical microscope is applied to the piezo 240. The piezo 240 is extended by the application of such a voltage, and the weight 244 repelled by the extension is returned by the spring 242, and the piezo 240 or the base 232 is extended.
Utilizing the inertial force generated by hitting itself, the stage 228 can be moved.

For example, a piezo 24 as shown in FIG.
By applying a saw-tooth voltage to 0, the piezo 240 expands to the right in the figure ((B) in the figure), and flips the weight 244 in the extending direction, that is, to the right ((C) in the figure).
reference). Weight 244 repelled by the extension force of piezo 240
Is returned by the spring 242 and strikes the piezo 240 (FIG. 3D). The base 232 can be moved, for example, to the left in the drawing on the stage mounting portion by utilizing the inertial force generated thereby.

As a result, such a positioning device 230
Uses the weight 244 instead of the piezo itself as the inertial force, and therefore can drive even an object having a mass larger than the piezo 240. In addition, since only external compressive force acts on the piezo 240 at all times, the probability that the piezo 240 will break itself is small and the life is long. Also, since the piezo 240 is not mechanically bonded to the base 232 or the like,
As long as the piezo 240 operates, it operates even under severe conditions, for example, in a sample room of a near-field optical microscope adjusted to a low temperature.

Further, by using the stage controller 226 and the computer 224 used in the near-field optical microscope for driving the piezo 240, the configuration can be simplified as compared with a case where these parts are separately provided. The two positioning devices 230 can be driven in both front and rear directions by facing the front and rear of the side wall of the base 232.

The positioning device 230 is mounted on the base 2
By combining them in the 32 orthogonal directions, it is possible to move to any position in the XY axis directions. Further, in the above configuration, the base 2
Although the example in which the stage 32 is moved on the mounting portion of the stage has been described, the stage itself may be driven without using another driving source by providing such a positioning device 230 on the stage itself.

<Micro-Distance Positioning Apparatus Using Bimorph> In a positioning apparatus used in a near-field optical microscope or the like, a high feed accuracy is required, and therefore, a piezo is frequently used as a driving source. However, in some cases, it cannot be said that the resonance frequency of the entire system is kept high and a sufficient drive amount is simultaneously secured. Therefore, in a near-field optical microscope or the like, when it is necessary to keep the resonance frequency of the entire system high and simultaneously secure a sufficient driving amount, it is preferable to use a positioning device as shown in FIG.

The parts corresponding to those in FIG.
00 is added and the description is omitted. A positioning device 330 shown in the figure is a hanging fine movement stage from a near-field head 319. The upper end of the bimorph piezo 348, 350 is fixed to the near-field head 319, and the lower end of the bimorph piezo 348, 350 is attached to the stage 3.
28, respectively. The bimorph piezos 348 and 350 are also used as columns for hanging the stage 328 from the near-field head 319.

Then, a voltage is applied to the bimorph type piezos 348 and 350 from the stage controller 326, and the bimorph type piezos 348 and 350 are simultaneously bent in the same direction, whereby the stage 328 is moved to the sample 31.
1 is movable in the direction of the surface to be measured. That is, as shown in FIG. 8A, the stage controller 326 drives the stage 328 rightward by simultaneously bending the two piezos 348 and 350 rightward in the drawing.

Thus, the probe 320 fixed on the central axis (reference position) C of the near-field head 319 is the sample 3
11 is located to the left in the direction of the surface to be measured. On the other hand, the stage controller 326 controls two piezos 348, 35
As shown in FIG. 8B, the stage 328 is driven to the left by simultaneously bending 0 to the left in the figure.
Thus, the probe 3 fixed to the near-field head 319
Reference numeral 20 is located on the right side of the sample 311 in the direction of the surface to be measured.

As a result, such a positioning device 330
In this case, not only a high repetition accuracy of the piezo driving amount can be obtained, but also a necessary driving amount can be secured in a state where the resonance frequency of the system is further increased. Also, Piezo 348,
By using the stage controller 326 and the computer 324 used in the near-field optical microscope for driving the 350, the configuration can be simplified as compared with a case where these parts are separately provided.

[0050]

As described above, according to the positioning apparatus of the present invention, the moving means in the direction substantially perpendicular to the optical axis of the target on the stage is moved by the transfer means until the moving amount becomes the desired amount. The object is transferred to the holder, and the adjusting means moves the other of the stage and the holder by a predetermined amount in a direction substantially perpendicular to the optical axis from the reference position in a state where the object is placed on the holder. It is provided with a transfer control means for performing a series of operations of changing and transferring the target object of the holder to the stage by the transfer means, so that the desired amount of the target object on the stage can be moved accurately and easily. Can be done. Further, as the transfer means, a stepping motor or a piezo element which can move up and down without changing the position of one of the stage and the holder with respect to the direction substantially orthogonal to the optical axis is used. By using a stage and using a piezo as the adjusting means, the positioning accuracy can be further improved. According to the near-field optical microscope of the present invention, since the positioning device is used, accurate and easy positioning of the optical stylus and the surface to be measured of the sample in a direction substantially orthogonal to the optical axis is easy. Can be done.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a schematic configuration of a near-field optical microscope.

FIG. 2 is an explanatory diagram of a general positioning device used for a near-field optical microscope.

FIG. 3 is an explanatory diagram of a schematic configuration of a positioning device according to an embodiment of the present invention.

FIG. 4 is an explanatory view of the operation of the positioning device shown in FIG.

FIG. 5 is an explanatory diagram showing a schematic configuration of a positioning device suitably used for a near-field optical microscope or the like as viewed from above.

6 is an explanatory diagram of the operation of the positioning device shown in FIG.

FIG. 7 is an explanatory diagram of a schematic configuration of a positioning device suitably used for a near-field optical microscope or the like.

8 is an explanatory diagram of the operation of the positioning device shown in FIG.

[Explanation of symbols]

 111 Sample (Object) 124 Computer (Transfer Control Unit) 126 Stage Controller (Transfer Control Unit) 128 XYZ Stage (Transfer Unit) 137 Piezo Stage (Stage) 130 Positioning Device 138 Holder 140 Piezo Drive Unit (Adjustment Unit)

Continuation of the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) H02N 2/00 H02N 2/00 B H02P 8/00 303 H02P 8/00 303A (72) Inventor Takato Narita Hachioji-shi, Tokyo 2967-5, Ishikawa-cho, Japan Nippon Bunko Co., Ltd. (72) Inventor Tatsuya Miyajima 2967, Ishikawa-cho, Hachioji-shi, Tokyo, Japan 5 (72) Inventor Motoichi Otsu 3-chome Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Prefecture No. 2 F-term in Kanagawa Academy of Science and Technology (Reference) 5H303 AA20 BB01 BB07 BB17 CC01 DD03 DD14 DD20 MM01 5H580 AA03 AA04 AA05 AA10 FA04 HH01

Claims (5)

[Claims] 1. A positioning device capable of moving a target object on a stage in a direction substantially orthogonal to an optical axis by a desired amount, wherein the stage on which the target object is mounted, and the target object of the stage are temporarily A holder mounted on the holder, and in a state where the target object is mounted on the holder, the other of the stage and the holder is moved or angled by a predetermined amount in a direction substantially perpendicular to the optical axis from a reference position from a reference position. Changeable adjusting means; transfer means for transferring the object between the stage and the holder without changing a position in a direction substantially orthogonal to an optical axis; and an object on the stage. The transfer means transfers the target from the stage to the holder until the amount of movement in the direction substantially perpendicular to the optical axis becomes a desired amount. In the state where the target is placed on the holder, Adjusting means A series of operations for moving or changing the angle of one of the holder and the holder from the reference position by a predetermined amount in a direction substantially orthogonal to the optical axis, and transferring the object from the holder to the stage by the transfer means. And a transfer control means for performing the transfer. 2. The positioning device according to claim 1, wherein the stage is provided with an opening in a mounting portion of the object, and the stage is provided with at least a part of the object positioned above the opening. The holder is disposed below the stage opening, and transfers the target of the stage mounting portion via the opening without changing a position in a direction substantially orthogonal to the optical axis. The transfer control means can transfer the target object from the stage to the holder by reducing the vertical distance between the stage and the holder by the transfer means, and the target object can be transferred to the holder. In the mounted state, the other of the stage and the holder is moved or changed in angle by a predetermined amount from the reference position with respect to one of the stage and the holder, and the position in the direction substantially orthogonal to the optical axis is changed by the transfer means. And without, by increasing the distance between the stage and the holder, the positioning device characterized by transferring the desired product from the holder on the stage. 3. The positioning device according to claim 1, wherein a piezo stage capable of moving or changing an angle of the stage by a predetermined amount in a direction substantially orthogonal to an optical axis from a reference position is used as the adjustment unit. A positioning device, wherein the holder is provided on a reference position so that an absolute position in a direction substantially orthogonal to the optical axis does not change. 4. The positioning device according to claim 1, wherein the transfer means does not change the position of one of the stage and the holder relative to one of the stage and the holder in a direction substantially orthogonal to an optical axis. A positioning device characterized by using a vertically movable stepping motor or a piezo element. 5. A scattered light generated by making an optical stylus enter a field of evanescent light on a surface to be measured of a sample.
In a near-field optical microscope for obtaining information on a surface to be measured of the sample, positioning using a positioning device according to any one of claims 1 to 4 in a direction substantially orthogonal to the optical axis of the optical needle and the surface to be measured. A near-field optical microscope characterized by performing the following.