JP2001327494A - Ultrasonic probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic probe capable of being subjected to autoclave sterilization and capable of being prevented from capacity deterioration, or the like. SOLUTION: A first matching layer 26, a second matching layer 25 and an acoustic lens 24 are successively laminated on the ultrasonic emitting surface of a piezoelectric vibrator 27 and, when the transmission and reception of ultrasonic waves are performed on the side of the living body coming into contact with the acoustic lens 24, the acoustic lens 24 exposed to the outer surface is formed of fluororubber having airtight function against steam and the second matching layer 25 is formed of foamed aluminum to arrange the coefficients of linear expansion of the constituent materials of the ultrasonic probe 21, and the generation of heat stress at the time of autoclave sterilization is suppressed and the deterioration of characteristics caused by the internal penetration of steam is prevented by the fluororubber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe provided in an ultrasonic endoscope or the like and transmitting and receiving ultrasonic waves.

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open No. 3-40534 discloses a technology for heat resistance of a medical ultrasonic probe.
As a technique for reducing the gas permeability of steam or the like, Japanese Patent Application Laid-Open No. 2-297347 and Utility Model Registration No. 257
0405 and JP-A-4-181896.

[0003] As a means for sterilizing an ultrasonic probe used in an ultrasonic endoscope or the like constituting an ultrasonic diagnostic apparatus in a body cavity, an immersion method represented by glutaraldehyde or the like is a main sterilizing means. However, since a long sterilization time is required, autoclave sterilization that can be sterilized in a short time is desired,
Autoclave sterilization was not possible due to the structural problems of the ultrasonic probe.

In general, an ultrasonic probe includes, in order from the outer surface, a silicone rubber as an acoustic lens, an epoxy resin as a matching layer, a mixture of an inorganic material powder and an epoxy resin also as a matching layer, and a piezoelectric ceramic. Since the laminates have different coefficients of linear expansion, thermal stress is likely to be generated when heat is applied.

[0005] In particular, the rubber exposed to steam during autoclave sterilization and the resin thereunder are greatly affected, and larger deformation occurs. As a technique capable of suppressing the occurrence of such thermal stress, as disclosed in Japanese Patent Application Laid-Open No. Hei 3-40534, the use of a porous metal for the matching layer makes the linear expansion coefficients of the constituent materials uniform. Things are disclosed.

[0006]

However, Japanese Patent Application Laid-Open No.
Since the technique disclosed in Japanese Patent No. 40534 is aimed at adjusting the acoustic impedance, when exposed to steam such as in an autoclave, the steam that has passed through the silicone rubber having a high gas permeability easily becomes bubbles in the matching layer. The steam is adsorbed on. Therefore, the remaining steam becomes water after the sterilization treatment and remains in the material, so that the acoustic impedance changes from a desired value, affecting the ultrasonic image and deteriorating the image quality.

Further, as a substitute for silicone rubber having high gas permeability, fluorine rubber having low gas permeability or a parylene coating (Japanese Utility Model Laid-Open No. 2-297347) (utility model registration number 257040)
5). However, there is no disclosure of an acoustic lens such as an autoclave that has both high heat and hermeticity (steam tightness) against water vapor.

[0008] Further, since fluorine-based rubber has a larger attenuation than silicone rubber, a method of improving gas permeability by coating a fluorine-based resin on silicone rubber has been disclosed (Japanese Patent Application Laid-Open No. 4-181896). ). However, since an acoustic discontinuity surface is formed on the lens, multiple echoes appear in the ultrasonic image, and the image quality is degraded.

(Object of the Invention) The present invention has been made in view of the above points, and has as its object to provide an ultrasonic probe that can be sterilized in an autoclave and that can prevent performance deterioration and the like.

[0010]

SUMMARY OF THE INVENTION An array-like vibrator group comprising a piezoelectric vibrator having electrodes and an acoustic matching layer joined to the front side for transmitting and receiving ultrasonic waves, and electrically connected to each array-like vibrator. The ultrasonic probe containing the conductive part, the backing material that absorbs ultrasonic waves to the back side, and the cable group that transmits electric signals to each array transducer, By using a metal / glass containing bubbles and arranging a vapor-tight material on the acoustic emission surface side of the acoustic matching layer, the vapor-tight material prevents water vapor from entering during autoclave sterilization. By using metal / glass containing air bubbles in the acoustic matching layer even when exposed to high temperatures during autoclave sterilization, it is possible to prevent deterioration and prevent thermal deformation and peeling. it can Unishi to have.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 and 2 relate to a first embodiment of the present invention, and FIG. 1 shows an appearance of an ultrasonic endoscope provided with the first embodiment of the present invention. FIG. 2 shows the structure of the ultrasonic probe. As shown in FIG. 1, an ultrasonic endoscope 1 includes an elongated insertion section 2 inserted into a body cavity, a wide operation section 3 formed at a rear end of the insertion section 2, and an operation section 3, an eyepiece 4 formed at the rear end, a universal cord 5 extending outside from the operation unit 3, and a universal cord 5
, An endoscope connector 6 provided at an end of the endoscope, an ultrasonic cable 7 extending from the endoscope connector 6, and an ultrasonic connector 8 provided at an end of the ultrasonic cable 7, The ultrasonic connector 8 is detachably connected to an ultrasonic observation device (not shown).

The insertion portion 2 has a distal end hard portion 9 formed of a hard member from the distal end, a bendable bending portion 10 formed adjacent to the rear end of the distal end hard portion 9, and a bending portion 10. A long, flexible portion 11 extending from the rear end of the operation section 10 to the front end of the operation section 3 is sequentially provided.

The operating section 3 is provided with an angle knob 12 for performing a bending operation. By rotating the angle knob 12, the bending section 10 can be bent. The operation unit 3 is provided with an air / water supply button 13 for performing air / water supply operations and a suction button 14 for performing suction. A treatment tool insertion port (hereinafter, simply referred to as “insertion port”) 15 for inserting a treatment tool is provided near the front end of the operation unit 3. The insertion port 15 is a treatment tool (not shown) formed in the insertion unit 2. The treatment instrument channel communicates with the channel, and a treatment instrument outlet (simply referred to as an outlet or a projecting port) opened at the slope 16 of the distal end hard portion 9 serves as an outlet.

A light guide (not shown) is inserted into the insertion section 2, and the rear end of the light guide reaches a light guide connector 17 provided on the endoscope connector 6 at the end of the universal cord 5. By connecting the light guide connector 17 to a light source device (not shown), illumination light is supplied from the light source device. The illumination light is transmitted by the light guide, and is emitted from the distal end surface fixed to the distal end hard portion 9 to the front side of the illumination window 18 through the illumination lens attached to the illumination window 18 on the inclined portion 16. Illuminates a subject such as an affected part in a body cavity.

An observation window 19 is provided on the slope 16, and an optical image is formed at an image forming position by an objective lens attached to the observation window 19. And transmits the image formed on the front end surface to the rear end surface on the eyepiece 4 side. Then, the image transmitted through the eyepiece of the eyepiece 4 can be magnified and observed. An ultrasonic probe 21 as an ultrasonic transmitting and receiving unit for transmitting and receiving ultrasonic waves is attached to the outer case 22 at the distal end of the distal end hard portion 9.

The outer end member of the ultrasonic endoscope 1 is formed of a material having airtightness against water vapor during autoclave sterilization and heat resistance against high temperatures at that time so that autoclave sterilization can be performed. .

Next, the configuration of the ultrasonic probe 21 will be described with reference to FIG. FIG. 2 shows the ultrasonic probe 21 in a cross section in a direction perpendicular to the longitudinal direction of the insertion section 2. FIG.
As shown in FIG. 3, the ultrasonic probe 21
Are fixed to an outer case 22 attached to the distal end hard portion 9, an acoustic lens 24 that sequentially focuses ultrasonic waves in a predetermined direction from the outer surface, and a second (acoustic) matching layer 2 for matching.
5, a first (acoustic) matching layer 26, a piezoelectric vibrator 27 as an acoustic-electric conversion element, a backing material 28 for absorbing and attenuating ultrasonic waves on the back side are laminated in this order, and connected to the electrodes of the piezoelectric vibrator 27. The wiring member 30 is connected to the substrate 31.

The piezoelectric vibrator 27 is composed of a so-called array (ultrasonic) vibrator group having a number of vibrator elements formed in an interdigital manner in a direction perpendicular to the plane of FIG.
The wiring members 30 are connected to the electrodes of the transducer elements.

The wiring member 30 is connected to one end of the substrate 31, and the other end of the wiring member 30 to which the wiring member 30 is not attached is connected to an internal wiring member (not shown) on the side of (the distal end hard portion 9 of) the ultrasonic endoscope 1. The signal cable group) is extended and connected to an ultrasonic observation apparatus to which the ultrasonic connector 8 of FIG. 1 is connected, and transmits signals for transmitting and receiving ultrasonic waves. The acoustic lens 24 is formed so as to surround the second matching layer 25, the first matching layer 26, and a part of the housing 32, and is fitted into an opening of the outer case 22 so that the ultrasonic radiation surface of the acoustic lens 24 is outside. It is adhesively fixed so as to be exposed.

In the ultrasonic probe 21 of the present embodiment, the second
The matching layer 25 is specifically made of foamed aluminum (as a heat-resistant metal or glass containing air bubbles), and the linear expansion coefficients of the constituent materials of the ultrasonic probe 21 are made uniform (the heat in autoclave sterilization). The acoustic lens 24 is made of fluorine rubber, which is a vapor-tight material having a good air-tightness function against steam and also a heat-resistant material having heat resistance to high temperatures during autoclave sterilization. To prevent steam from entering inside.

That is, the first matching layer 26 and the second matching layer 25 are sequentially joined to the front surface of the piezoelectric vibrator 27 for transmitting and receiving ultrasonic waves, and the acoustic lens 2 is placed on the second matching layer 25.
And the second matching layer 25 on the acoustic lens 24 side is made of foamed aluminum (the ultrasonic probe 2).
(1) The linear expansion coefficients of the constituent materials are made uniform, and the acoustic lens 24 on the front surface (the ultrasonic wave emitting surface side) is made of a fluorine rubber which is also a vapor-tight material and a heat-resistant material.

The acoustic lens 24 is made of fluorine rubber so that the acoustic impedance is close to the acoustic impedance of the living body, so that ultrasonic waves can be transmitted and received efficiently (with less reflection) with the living body. (This acoustic lens 2
4 also has a matching layer function).

In the two acoustic matching layers, the first matching layer 26 on the side of the piezoelectric vibrator 27 has, for example, a crystalline property having an intermediate value between the acoustic impedance of the piezoelectric vibrator 27 and the acoustic impedance of the second matching layer 25. It is made of glass.

Next, the operation of the present embodiment will be described. By using a fluorine-based rubber for the acoustic lens 24, the acoustic lens 24 has high resistance to gas permeability, and steam during autoclave sterilization does not permeate the inside of the acoustic lens 24. Further, due to the high heat resistance of fluororubber, thermal deformation during autoclave sterilization can be reduced.

The acoustic impedance of the fluoro rubber used for the acoustic lens 24 is 1.6 MRayl,
The first matching layer 26 is made of crystalline glass (acoustic impedance 1).
4 MRayl), the well-known ideal 3
Acoustic matching by layers is possible.

The density of the foamed aluminum forming the second matching layer 25 can be set to, for example, 0.6 g / cm 3 by adjusting the porosity. Since the speed of sound of aluminum is about 6500 m / s, the acoustic impedance is about 3.9 MRayl. This is connected to the second matching layer 25
And Further, the porosity of the foamed aluminum is adjusted to make the constituent material, in this case, the acoustic lens 2 before and after the constituent material.
4 and the first matching layer 26 can absorb a difference in linear expansion coefficient. The value of the first matching layer 26 is close to the linear expansion coefficient of the piezoelectric vibrator 27.

It is to be noted that the foamed aluminum is known from LOR in the United States, and the crystalline glass is known from Ishihara Yakuhin. That is, by using the ultrasonic probe 21 of the present embodiment, the outer surface of the acoustic lens 24 is brought into contact with a living body, and the array-like vibrator group constituting the piezoelectric vibrator 27 of the ultrasonic probe 21 is electrically connected. By applying a transmission signal to be scanned, the ultrasonic wave is emitted in a convex shape, and the reflected ultrasonic wave at the part where the acoustic impedance on the living body is changing is received on the reverse return path and converted to an electric signal. To the ultrasonic observation device side.

In this case, the piezoelectric vibrator 27 is excited, and the ultrasonic waves radiated from the front surface thereof are efficiently emitted from the two matching layers with almost no reflection. Can be radiated. Also, the ultrasonic waves reflected on the living body side can be received efficiently. Therefore, an ultrasonic tomographic image with good S / N can be displayed on the monitor surface of the ultrasonic observation apparatus, and accurate ultrasonic diagnosis can be easily performed.

After being used for ultrasonic diagnosis in this way,
By autoclaving the ultrasonic endoscope 1 with an autoclave sterilizer, sterilization can be performed in a short time. In this case, particularly, the acoustic lens 24 facing the outer surface of the ultrasonic probe 21 is formed of fluorine-based rubber having vapor tightness and heat resistance, so that it is possible to prevent water vapor from entering the inside, and to perform linear expansion. By reducing the difference in coefficient, thermal deformation can also be prevented.

This embodiment has the following effects. The acoustic lens 24, which is exposed to the steam of autoclave sterilization, is made of fluorine-based rubber and has a steam-tight function.
It is possible to prevent the image quality from deteriorating due to the invasion of water vapor.

Further, by suppressing the thermal deformation of the acoustic lens 24 and the thermal deformation of the second matching layer 25, the thermal stress can be reduced, and the occurrence of thermal distortion and peeling of the internal structure during sterilization can be suppressed. Further, when a peroxide vulcanization system is used as a vulcanizing agent for the fluororubber, steam resistance is further improved.

(Modification of First Embodiment) Next, a modification of the first embodiment of the present invention will be described with reference to FIG. This modification is the same as the first embodiment except that the first matching layer 26 of the ultrasonic probe 21 shown in FIG. 2 is made of porous aluminum or a porous glass material, and the second matching layer 25 is made of polyimide. is there. Other configurations are the same as those of the first embodiment.

Next, the operation of this modification will be described. Porous aluminum has a different manufacturing method from the foamed aluminum of the first embodiment, and is manufactured by powder metallurgy. The biggest difference is that the distribution of porosity and pore diameter can be easily adjusted. Specifically, the porosity can be adjusted up to about 40%, and the pore diameter can be adjusted from several nm to several μm. Therefore, the porosity is 40%
In this case, the acoustic impedance is slightly less than 10 MRayl. The porous glass is known as Vycor glass from Corning and has an acoustic impedance of 9 MRa.
yl.

When a polyimide having an acoustic impedance of 3 MRayl is used for the second matching layer 5, the acoustic matching condition close to the well-known ideal two-layer acoustic matching is obtained. Also,
The polyimide used for the second matching layer 25 has a low gas permeability (excellent in steam resistance), and the vapor during autoclave sterilization does not permeate the acoustic lens 24 more. further,
The polyimide is hardly deformed by heat, and can have a linear expansion coefficient close to that of the first matching layer 26 and the piezoelectric vibrator 27.

This modification has the following effects. The autoclave sterilization vapor transmitted through the acoustic lens 24 can be made vapor-tight by the second matching layer 25. Further, by suppressing thermal deformation in the second matching layer 25, thermal stress can be reduced, and thermal distortion of the internal structure during sterilization can be suppressed. As a second modified example, the acoustic lens 24 may be configured so that the density of the fluororesin particles of the fluororubber is increased toward the acoustic radiation surface side. The acoustic lens 24 having such characteristics can be manufactured as follows.

An aqueous paint in which fluororesin particles are dispersed in a fluororubber is applied to a silicone rubber substrate,
When baked at a temperature of about 0 degrees, the fluororesin concentrates on the surface of the coating film. In this case, since the density of the fluororesin continuously changes from the surface to the inside thereof, when this resin is used for the acoustic lens 24, the acoustic discontinuity can be eliminated. In addition, the resistance to vapor permeation can be made higher than that of the fluorine-based rubber (the function of vapor-tightness can be made higher).

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 3 shows an ultrasonic probe 21 'according to the second embodiment. The description of the same parts as in the first embodiment is omitted.

As shown in FIG. 3, the acoustic lens 24 is formed of silicone rubber having a smaller ultrasonic attenuation than the case of the fluorine-based resin, and the outer surface of the acoustic lens 24 formed of the silicone rubber has a good quality. A fluorine resin coating 35 having vapor tightness and heat resistance was applied. Although the outer surface is coated in FIG. 3, the outer surface may be provided at the interface with the second matching layer 25. In this case, the same effect is obtained. Other configurations are the same as those of the first embodiment.

Next, the operation of the present embodiment will be described. Fluorine-based resin has high resistance to gas permeability, and does not allow steam during autoclave sterilization to pass through to the acoustic lens. Furthermore, heat deformation during autoclave sterilization can be reduced due to the high heat resistance of the fluororesin.

This embodiment has the following effects. Since the fluorine rubber has a larger attenuation than the silicone rubber, the sensitivity of the acoustic lens 24 can be made higher than that of the fluorine rubber alone by securing the main material of the acoustic lens 24 to the silicone rubber having a small attenuation, and the vapor tightness is ensured. be able to. The other effects are the same as those of the first embodiment.

(Third Embodiment) Next, a third embodiment of the present invention will be described with reference to FIG. The description of the same parts as in the first embodiment is omitted. In the ultrasonic probe 41 according to the third embodiment shown in FIG. 4, the second matching layer 25 is provided so as to directly face the outer surface, and the outer surface has a predetermined radius of curvature as shown in FIG. And has a concave surface curved.

The difference from the first embodiment in structure is the second matching layer 25. Further, the difference from the first embodiment in terms of material is that the outer case 22 and the second matching layer 25 are different.
Was made the same, and this material was used as a heat-resistant resin.

Next, the operation of the present embodiment will be described. It is known that the acoustic impedance for optimal acoustic matching is 8.5 MRayl for the first matching layer and 2.4 MRayl for the second matching layer. Taking polyarylate as an example of the acoustic characteristics of the heat-resistant resin, the sound velocity is 2340.
m / s and the acoustic impedance is 2.9 MRayl. In other words, if a heat-resistant resin is used for the second matching layer 25, it will be closer to the ideal value of acoustic matching.

Further, since the second matching layer 25 has a curved surface, the second matching layer 25 also has a lens function for focusing at a predetermined distance. Therefore, a conventional silicone rubber acoustic lens is not required. In addition, since the outer surface is made of the same material as the outer case 22, the linear expansion coefficients of the entire outer surface can be matched.

Further, the heat-resistant resin has low gas permeability,
The water vapor at the time of autoclave sterilization is not permeated into the first matching layer 26. The following are examples of the heat-resistant resin.

Polyetherimide resin (Ultem), polyimide resin (Imidalloy), polyphenylene sulfide (Ryton), polyetheretherketone (P
EEK), polyethersulfone (Victrex), polysulfone, polyarylate (U polymer), modified imidized resin (Marekka), polyaminobismaleimide (kerimidoquinel), triazine-based heat-resistant polymer (BT resin), isocyanurate- Oxazolidone resin (ISOX resin), SP polyimide resin (Vespel), wholly aromatic polyimide (Nitomid M).

This embodiment has the following effects. By matching the linear expansion coefficients of the components of the outer case 22 and the ultrasonic probe 41, generation of thermal stress during autoclave sterilization is suppressed. Furthermore, by suppressing the permeation of the vapor into the first matching layer 26, it is possible to secure the vapor tightness inside the first matching layer 26.

[Supplementary Notes] An array-like vibrator group consisting of a piezoelectric vibrator having electrodes and an acoustic matching layer joined to the front side for transmitting and receiving ultrasonic waves, a conductive part electrically connected to each array-like vibrator, In an ultrasonic probe containing a backing material that absorbs ultrasonic waves and a cable group that transmits electric signals to each of the arrayed transducers, a metal / glass containing bubbles is used for an acoustic matching layer. An ultrasonic probe, wherein a vapor-tight material is disposed on the acoustic radiation surface side of the acoustic matching layer.

2. The second matching layer on the sound emitting surface side of the acoustic matching layer, wherein foamed aluminum is used as the metal / glass containing bubbles and an acoustic lens made of fluorine rubber is used as a vapor-tight material. Ultrasonic probe. 3. 3. The ultrasonic probe according to claim 2, wherein crystalline glass is used for the first matching layer on the side of the piezoelectric vibrator in the acoustic matching layer.

4. The first matching layer on the side of the piezoelectric vibrator in the acoustic matching layer is made of porous aluminum as the metal / glass containing bubbles and polyimide is used as the vapor-tight material in the second matching layer. The described ultrasonic probe. 5. The first matching layer on the side of the piezoelectric vibrator in the acoustic matching layer uses porous glass as the metal / glass containing the bubbles, and uses polyimide as the second matching layer as a vapor-tight material. The described ultrasonic probe.

6. 2. The ultrasonic probe according to claim 1, wherein an acoustic lens is provided on the acoustic radiation surface side of the acoustic matching layer, and the vapor-tight material is formed by applying a moisture-proof coating to an interface of the acoustic lens. 7. 2. The ultrasonic probe according to claim 2, wherein the vulcanizing agent for the fluorine rubber of the acoustic lens is a peroxide vulcanizing system.

(Functions and Effects of Supplementary Notes 2-3, 6, and 7) The acoustic lens, which is exposed to the steam of autoclave sterilization, is made of a fluorine-based rubber or a fluorine-based resin coating, so that the inside is more vapor-tight than the onkyo lens. can do. Further, by suppressing the thermal deformation of the acoustic lens and the thermal deformation of the second matching layer, the thermal stress can be reduced, and the thermal distortion of the internal structure during sterilization can be suppressed.

8. The ultrasonic probe according to claim 1, wherein a heat-resistant resin material is used for the outer case. 9. Polyetherimide resin (Ultem), polyimide resin (Imidalloy), polyphenylene sulfide (Ryton), polyether ether ketone (PEEK), polyether sulfone (Victrex), polysulfone, polyarylate (U) Polymer), modified imidized resin (Marekka), polyaminobismaleimide (kerimide quinel), triazine-based heat-resistant polymer (BT resin), isocyanurate-oxazolidone resin (ISOX resin), SP polyimide resin (Vespel), wholly aromatic polyimide 8. The ultrasonic probe according to claim 8, wherein (Nitomid M) is used.

(Functions and Effects of Supplementary Notes 4, 5, 8, and 9) By matching the linear expansion coefficients of the outer case and the ultrasonic probe,
Reduces thermal stress during autoclave sterilization. Furthermore, by suppressing the permeation of vapor into the first matching layer, the inside can be made more vapor-tight than the first matching layer.

[0055]

As described above, according to the present invention, an array-shaped vibrator group composed of a piezoelectric vibrator having electrodes and an acoustic matching layer joined to the front side for transmitting and receiving ultrasonic waves, Ultrasonic probe containing a conductive part electrically connected to the transducer, a backing material that absorbs ultrasonic waves to the back side, and a cable group that transmits electric signals to each array transducer By using a metal or glass containing air bubbles for the acoustic matching layer and disposing a vapor-tight material on the acoustic emission surface side of the acoustic matching layer, the penetration of steam into the interior during autoclave sterilization can be prevented. By using a dense material to prevent deterioration of properties, even if exposed to high temperatures during autoclave sterilization, the acoustic matching layer can be made of metal or glass containing air bubbles to make the coefficient of linear expansion of the constituent materials uniform. , Deformation and peeling can be prevented.

[Brief description of the drawings]

FIG. 1 is an external view showing the entirety of an ultrasonic endoscope provided with a first embodiment of the present invention.

FIG. 2 is a sectional view showing the structure of the ultrasonic probe according to the first embodiment of the present invention.

FIG. 3 is a sectional view showing the structure of an ultrasonic probe according to a second embodiment of the present invention.

FIG. 4 is a sectional view showing a structure of an ultrasonic probe according to a third embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Ultrasonic endoscope 2 ... Insertion part 3 ... Operation part 9 ... Hard tip part 21 ... Ultrasonic probe 22 ... Outer case 24 ... Acoustic lens 25 ... 1st (sound) matching layer 26 ... 2nd (sound) ) Matching layer 27 Piezoelectric vibrator 28 Backing material 30 Wiring material 31 Substrate 32 Housing

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Sayuri Sato 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Inventor Shinya Masuda 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Inventor Hiroshi Tatsuno 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd. (72) Inventor Mitsumasa Okada 2-43-2, Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd. F term (reference) 4C301 EE20 FF04 GB21 GB27 GB34 5D019 AA14 AA22 EE05 FF04 GG02 GG03 GG06

Claims (3)

[Claims] 1. An array-shaped vibrator group comprising a piezoelectric vibrator having electrodes, an acoustic matching layer joined to a front side for transmitting and receiving ultrasonic waves, and a conductive portion electrically connected to each array-shaped vibrator. The ultrasonic probe, which contains a backing material that absorbs ultrasonic waves to the back side and a cable group that transmits electric signals to each array transducer, contains bubbles in the acoustic matching layer. An ultrasonic probe comprising metal / glass and a vapor-tight material disposed on an acoustic radiation surface side of the acoustic matching layer. 2. A method according to claim 1, wherein the second matching layer on the sound emitting surface side of the acoustic matching layer uses aluminum foam as the metal / glass containing bubbles and an acoustic lens made of fluorine rubber as a vapor-tight material. The ultrasonic probe according to claim 1, wherein 3. The ultrasonic probe according to claim 2, wherein crystalline glass is used for the first matching layer on the side of the piezoelectric vibrator in the acoustic matching layer.