JP2001326358A5 - - Google Patents
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- Publication number
- JP2001326358A5 JP2001326358A5 JP2000143255A JP2000143255A JP2001326358A5 JP 2001326358 A5 JP2001326358 A5 JP 2001326358A5 JP 2000143255 A JP2000143255 A JP 2000143255A JP 2000143255 A JP2000143255 A JP 2000143255A JP 2001326358 A5 JP2001326358 A5 JP 2001326358A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000143255A JP4683691B2 (ja) | 2000-05-16 | 2000-05-16 | 半導体装置の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000143255A JP4683691B2 (ja) | 2000-05-16 | 2000-05-16 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001326358A JP2001326358A (ja) | 2001-11-22 |
| JP2001326358A5 true JP2001326358A5 (zh) | 2007-07-12 |
| JP4683691B2 JP4683691B2 (ja) | 2011-05-18 |
Family
ID=18650100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000143255A Expired - Fee Related JP4683691B2 (ja) | 2000-05-16 | 2000-05-16 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4683691B2 (zh) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10150200A (ja) * | 1996-11-19 | 1998-06-02 | Sharp Corp | 薄膜トランジスタおよびその製造方法 |
| JP4776766B2 (ja) * | 1999-10-26 | 2011-09-21 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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2000
- 2000-05-16 JP JP2000143255A patent/JP4683691B2/ja not_active Expired - Fee Related