JP2001324459A5 - - Google Patents

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Publication number
JP2001324459A5
JP2001324459A5 JP2000148583A JP2000148583A JP2001324459A5 JP 2001324459 A5 JP2001324459 A5 JP 2001324459A5 JP 2000148583 A JP2000148583 A JP 2000148583A JP 2000148583 A JP2000148583 A JP 2000148583A JP 2001324459 A5 JP2001324459 A5 JP 2001324459A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000148583A
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Japanese (ja)
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JP4505946B2 (en
JP2001324459A (en
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Priority to JP2000148583A priority Critical patent/JP4505946B2/en
Priority claimed from JP2000148583A external-priority patent/JP4505946B2/en
Publication of JP2001324459A publication Critical patent/JP2001324459A/en
Publication of JP2001324459A5 publication Critical patent/JP2001324459A5/ja
Application granted granted Critical
Publication of JP4505946B2 publication Critical patent/JP4505946B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000148583A 2000-05-16 2000-05-16 Charged particle beam apparatus and probe control method Expired - Lifetime JP4505946B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000148583A JP4505946B2 (en) 2000-05-16 2000-05-16 Charged particle beam apparatus and probe control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000148583A JP4505946B2 (en) 2000-05-16 2000-05-16 Charged particle beam apparatus and probe control method

Publications (3)

Publication Number Publication Date
JP2001324459A JP2001324459A (en) 2001-11-22
JP2001324459A5 true JP2001324459A5 (en) 2006-09-07
JP4505946B2 JP4505946B2 (en) 2010-07-21

Family

ID=18654586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000148583A Expired - Lifetime JP4505946B2 (en) 2000-05-16 2000-05-16 Charged particle beam apparatus and probe control method

Country Status (1)

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JP (1) JP4505946B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009277953A (en) * 2008-05-16 2009-11-26 Hitachi High-Technologies Corp Measuring method and inspecting apparatus
DE102010010937A1 (en) * 2009-10-26 2011-04-28 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method and device for producing a Fresnel zone plate
EP2823489A2 (en) 2012-03-08 2015-01-14 Max-Planck-Gesellschaft zur Förderung der Wissenschaften Method of producing a fresnel zone plate for applications in high energy radiation
TWI664658B (en) * 2014-06-30 2019-07-01 日商日立高新技術科學股份有限公司 Automatic sample making device
US20230168274A1 (en) * 2021-11-30 2023-06-01 Innovatum Instruments Inc. Probe tip x-y location identification using a charged particle beam

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2708547B2 (en) * 1989-05-10 1998-02-04 株式会社日立製作所 Device porting method
JP3577839B2 (en) * 1996-06-04 2004-10-20 株式会社日立製作所 Defect inspection method and apparatus
US6538254B1 (en) * 1997-07-22 2003-03-25 Hitachi, Ltd. Method and apparatus for sample fabrication

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