JP2001318017A - Differential pressure and pressure transmitter - Google Patents

Differential pressure and pressure transmitter

Info

Publication number
JP2001318017A
JP2001318017A JP2000135626A JP2000135626A JP2001318017A JP 2001318017 A JP2001318017 A JP 2001318017A JP 2000135626 A JP2000135626 A JP 2000135626A JP 2000135626 A JP2000135626 A JP 2000135626A JP 2001318017 A JP2001318017 A JP 2001318017A
Authority
JP
Japan
Prior art keywords
pressure
cover
transmitter
diaphragm
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000135626A
Other languages
Japanese (ja)
Other versions
JP3583347B2 (en
Inventor
Yutaka Doi
裕 土居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP2000135626A priority Critical patent/JP3583347B2/en
Publication of JP2001318017A publication Critical patent/JP2001318017A/en
Application granted granted Critical
Publication of JP3583347B2 publication Critical patent/JP3583347B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PROBLEM TO BE SOLVED: To easily carry out attaching and detaching work for a cover in an atmospheric pressure side by simple structure, and to make dust, an insect and the like easily removed even when they come into an inside of the cover. SOLUTION: The disklike cover 27 is composed of a cover body 27A having a size substantially same to a sideface 8 in the atmospheric pressure side of a detector body 24, and for covering a seal diaphragm 9, and four supporting parts 27B foldedly formed in an outer circumference of the cover body 27A with equal spacing. The cover body 27A is separated from the detector body 24 to form a proper gap G, by fixing the supporting parts 27B onto the body 24.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、大気圧を基準圧と
してプロセス流体やタンク内の圧力を測定する差圧・圧
力発信器に関し、特に大気圧側を覆うカバーの取付構造
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a differential pressure / pressure transmitter for measuring a pressure in a process fluid or a tank using atmospheric pressure as a reference pressure, and more particularly to a structure for mounting a cover for covering the atmospheric pressure side.

【0002】[0002]

【従来の技術】各種プロセス流体の圧力等を測定するた
めに用いられるこの種の差圧・圧力発信器の利用方法と
しては、プロセス流体の2点間の圧力差を利用して測
定する方法、真空圧を基準圧として測定する方法、
大気圧を基準圧として測定する方法の3種類があり、本
発明は特にの大気圧を基準圧として測定する差圧・圧
力発信器に関する。
2. Description of the Related Art As a method of using such a type of differential pressure / pressure transmitter used for measuring the pressure or the like of various process fluids, there are a method of utilizing a pressure difference between two points of a process fluid, A method of measuring with a vacuum pressure as a reference pressure,
There are three types of methods for measuring with atmospheric pressure as a reference pressure, and the present invention particularly relates to a differential pressure / pressure transmitter for measuring with atmospheric pressure as a reference pressure.

【0003】大気圧を基準圧として測定する場合は、発
信器本体に取付けられる2つのシールダイアフラムのう
ちの一方を大気圧に開放し、他方にプロセス流体圧を導
くことにより測定するもので、例えば、石油精製プラン
トにおける高温反応塔等の密閉タンクにおいては、タン
ク内圧を大気圧との圧力差によって検出することによ
り、液面高さやタンク内圧を測定している。
When the atmospheric pressure is measured as a reference pressure, one of two seal diaphragms attached to the transmitter body is opened to the atmospheric pressure, and the measurement is performed by introducing the process fluid pressure to the other. In a closed tank such as a high-temperature reaction tower in a petroleum refining plant, the liquid level and the tank internal pressure are measured by detecting the tank internal pressure from the pressure difference from the atmospheric pressure.

【0004】図5は従来の大気圧基準型の差圧・圧力発
信器の一部を破断して示す正面図で、発信器本体2と、
ヘッダー3と、発信器本体2の両側面に複数個のボルト
4およびナット5によって共締め固定された大気圧側と
測定圧側のカバー6,7等で差圧・圧力発信器1を構成
している。発信器本体2は圧肉の円板状に形成されて大
気圧側の側面8に大気圧側のシールダイアフラム9が外
周部を溶接することによって配設され、これを前記大気
圧側カバー6によって保護している。大気圧側カバー6
とシールダイアフラム9との間には大気圧室10が形成
されており、この大気圧室10をカバー6に形成した大
気開放用溝11によって外部に連通させている。したが
って、大気圧側シールダイアフラム9には大気圧Poが
加わる。
FIG. 5 is a front view showing a part of a conventional differential pressure / pressure transmitter of the atmospheric pressure standard type.
The differential pressure / pressure transmitter 1 is constituted by the header 3 and the covers 6 and 7 on the atmospheric pressure side and the measurement pressure side, which are fixed together on both sides of the transmitter main body 2 by a plurality of bolts 4 and nuts 5. I have. The transmitter main body 2 is formed in a thick disk shape, and an atmospheric pressure side seal diaphragm 9 is disposed on the atmospheric pressure side surface 8 by welding an outer peripheral portion thereof. Protected. Atmospheric pressure side cover 6
An atmospheric pressure chamber 10 is formed between the seal diaphragm 9 and the atmospheric pressure chamber 10, and the atmospheric pressure chamber 10 is communicated with the outside by an atmosphere opening groove 11 formed in the cover 6. Therefore, the atmospheric pressure Po is applied to the atmospheric pressure side seal diaphragm 9.

【0005】一方、発信器本体2の測定圧側の側面12
には、測定圧側シールダイアフラム13が同じく外周部
を溶接することによって配設され、これを前記測定圧側
カバー7によって覆っている。この測定圧側カバー7に
は、プロセス流体14を前記測定圧側シールダイアフラ
ム13に導く配管15が接続されている。
On the other hand, the side surface 12 of the transmitter body 2 on the measurement pressure side
The measurement pressure side seal diaphragm 13 is also provided by welding the outer peripheral portion, and is covered by the measurement pressure side cover 7. A pipe 15 for guiding a process fluid 14 to the measurement pressure side seal diaphragm 13 is connected to the measurement pressure side cover 7.

【0006】大気圧側シールダイアフラム9に大気圧P
oが加わり、測定圧側シールダイアフラム13にプロセ
ス流体圧P1を導くと、両ダイアフラム9,13はその
圧力に応じて変位し、この変位が封入液16a,16b
を介して図示しない半導体圧力センサ等の圧力検出手段
に伝達され、その差圧(P1−Po)が検出される。
Atmospheric pressure P is applied to the atmospheric pressure side seal diaphragm 9.
When o is applied and the process fluid pressure P1 is led to the measurement pressure side seal diaphragm 13, both diaphragms 9, 13 are displaced in accordance with the pressure, and this displacement is caused by the filling liquids 16a, 16b.
Through a pressure sensor (not shown) such as a semiconductor pressure sensor, and the differential pressure (P1-Po) is detected.

【0007】[0007]

【発明が解決しようとする課題】上記した従来の大気圧
基準型の差圧・圧力発信器1においては、大気圧側のシ
ールダイアフラム9を破損や塵埃、虫の付着等から保護
するためにカバー6によって覆っている。しかしなが
ら、従来のカバー6はシールダイアフラム9と近接して
取付けられているので、大気に開放される隙間17が非
常に狭く、この隙間17に小さなゴミが侵入したり、虫
が侵入して巣を作ったりすると、大気圧室10を塞いで
しまうため、測定誤差が生じるという問題があった。ま
た、隙間が詰まった場合、その詰まったものを取り除く
ためにはボルト4を外してカバー6を発信器本体2から
外すかまたはナット5を緩めてカバー6を発信器本体2
から離間させて詰まったものを取り除くしかなく、その
作業が煩わしいという問題があった。特に、詰まったも
のを取り除いた後、ナット5を締め付けてカバー6,7
を固定したとき、締め具合が緩いと発信器本体2とカバ
ー7との間のシール性が低下するため、プロセス流体1
4が漏洩するおそれがある。
In the above-mentioned conventional atmospheric pressure reference type differential pressure / pressure transmitter 1, a cover for protecting the seal diaphragm 9 on the atmospheric pressure side from damage, adhesion of dust, insects and the like is provided. Covered by 6. However, since the conventional cover 6 is mounted close to the seal diaphragm 9, the gap 17 opened to the atmosphere is very narrow, and small dust enters the gap 17 or insects enter the nest. If it is made, the atmospheric pressure chamber 10 is closed, and there is a problem that a measurement error occurs. When the gap is clogged, to remove the clogged one, the bolt 4 is removed and the cover 6 is removed from the transmitter main body 2 or the nut 5 is loosened to remove the cover 6 from the transmitter main body 2.
There is no other choice but to remove the clogged object by separating from it, and there is a problem that the operation is troublesome. In particular, after removing the clogging, tighten the nut 5 to cover
Is fixed, the sealing performance between the transmitter body 2 and the cover 7 is reduced if the tightening is loose.
4 may leak.

【0008】本発明は上記した従来の問題を解決するた
めになされたもので、その目的とするところは、簡単な
構造で大気圧側のカバーの取付け、取外し作業を容易に
行うことができ、またゴミ、虫等がカバーの内部に侵入
したとしても容易に取り除くことができるようにした差
圧・圧力発信器を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems. It is an object of the present invention to easily attach and remove an atmospheric pressure side cover with a simple structure. Another object of the present invention is to provide a differential pressure / pressure transmitter capable of easily removing dust and insects even if they enter the inside of the cover.

【0009】上記目的を達成するために第1の発明は、
発信器本体の大気圧側シールダイアフラムをカバーで覆
った差圧・圧力発信器において、前記カバーを、前記大
気圧側シールダイアフラムを覆うカバー本体と、前記発
信器本体に固定され前記カバー本体を前記発信器本体か
ら離間させて支持する支持部とで構成したものである。
In order to achieve the above object, a first invention is to provide
In the differential pressure / pressure transmitter in which the atmospheric pressure side seal diaphragm of the transmitter body is covered with a cover, the cover is fixed to the transmitter body and the cover body covering the atmospheric pressure side seal diaphragm. And a supporting portion that is separated from the transmitter main body and supported.

【0010】第2の発明は上記第1の発明において、カ
バー本体の少なくとも一部をメッシュ構造としたもので
ある。
According to a second aspect, in the first aspect, at least a part of the cover body has a mesh structure.

【0011】第3の発明は上記第1の発明において、カ
バー本体と発信器本体との間の隙間をメッシュ構造で覆
ったものである。
According to a third aspect, in the first aspect, a gap between the cover main body and the transmitter main body is covered with a mesh structure.

【0012】本発明においては、カバー本体と発信器本
体との間に適宜な隙間が形成されているので、小さなゴ
ミはこの隙間から落下して内部に留まらない。虫の場合
は出入りが容易で内部に巣を作りにくい。また、ゴミや
虫が内部に入ったとしてもカバーを外さないで隙間から
ゴミや虫を除去することができる。支持部による固定構
造としては、係合部と係止部の係合や止めねじ等が考え
られる。メッシュ構造はカバー内部の視認が容易で、ゴ
ミや虫が侵入しているか否かを容易に確認できる。ま
た、カバー本体の周囲からのゴミ、虫等の侵入を防止で
きる。
In the present invention, since an appropriate gap is formed between the cover main body and the transmitter main body, small dust drops from this gap and does not stay inside. In the case of insects, it is easy to get in and out and it is difficult to create a nest inside. Further, even if dust or insects enter the inside, the dust or insects can be removed from the gap without removing the cover. As the fixing structure by the support portion, engagement between the engagement portion and the engagement portion, a set screw, or the like can be considered. The mesh structure makes it easy to see the inside of the cover, and can easily check whether dust or insects have entered. In addition, intrusion of dust, insects, and the like from around the cover body can be prevented.

【0013】[0013]

【発明の実施の形態】以下、本発明を図面に示す実施の
形態に基づいて詳細に説明する。図1は本発明を受圧ア
ダプタを備えた大気圧基準型の差圧・圧力発信器に適用
した一実施の形態を示す断面図、図2は基準圧側カバー
の斜視図である。なお、従来技術で示した構成部材と同
一のものについては同一符号をもって示し、その説明を
適宜省略する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. FIG. 1 is a sectional view showing an embodiment in which the present invention is applied to an atmospheric pressure reference type differential pressure / pressure transmitter provided with a pressure receiving adapter, and FIG. 2 is a perspective view of a reference pressure side cover. Note that the same components as those described in the related art are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

【0014】プロセス流体の性質によっては標準的なダ
イアフラムでは腐食等の問題が起きることがある。これ
を解決するためにプロセス流体の容器、配管等にアダプ
タを介して差圧・圧力発信器を取付け、このアダプタに
設けた耐腐食性の接液ダイアフラムによってプロセス流
体圧を受け、その変位を圧力伝達媒体を介して発信器の
シールダイアフラムに伝えるようにしている。また、特
に高温のプロセス流体から発信器を保護する場合も同様
な構造のアダプタを用いており、本発明においてはこの
ようなアダプタを受圧アダプタと称する。
Depending on the nature of the process fluid, problems such as corrosion may occur with standard diaphragms. In order to solve this, a differential pressure / pressure transmitter is attached to the process fluid container, piping, etc. via an adapter, and the process fluid pressure is received by the corrosion resistant wetted diaphragm provided on this adapter, and the displacement is applied to the pressure. The signal is transmitted to the seal diaphragm of the transmitter via the transmission medium. In addition, an adapter having a similar structure is used to protect the transmitter from a particularly high-temperature process fluid. In the present invention, such an adapter is referred to as a pressure receiving adapter.

【0015】図1において、差圧・圧力発信器20は、
発信器本体2とアダプタ取付部材22を備え、このアダ
プタ取付部材22に受圧アダプタ23を着脱可能に取付
けている。前記発信器本体2は、検出器ボディ24とヘ
ッダー3とからなり、検出器ボディ24の測定圧側の側
面12と大気圧側の側面8に前記アダプタ取付部材22
とカバー27がそれぞれ取付けられている。
In FIG. 1, a differential pressure / pressure transmitter 20 is
The transmitter body 2 and an adapter mounting member 22 are provided, and a pressure receiving adapter 23 is detachably mounted on the adapter mounting member 22. The transmitter body 2 includes a detector body 24 and a header 3. The adapter mounting member 22 is attached to the side surface 12 on the measurement pressure side and the side surface 8 on the atmospheric pressure side of the detector body 24.
And a cover 27 are respectively attached.

【0016】前記検出器ボディ24は、円板状の2つの
ボディ24a,24bを電子ビーム溶接等によって一体
的に接合することにより形成されるもので、両側面8,
12に前記シールダイアフラム9,13が外周部を溶接
されることにより配設されている。シールダイアフラム
9,13は、通常燐青銅、ベリリウム銅などの薄膜状金
属板を塑性加工することで円板状に形成されている。加
工形成に際しては、外周固定部より内側部分で圧力を受
ける部分、すなわち受圧部に半径方向に波形の襞を同心
円状に付けることで、ダイアフラムのコンプライアンス
を大きくし、言い換えればダイアフラムを柔らかくし、
荷重−変位の式を満足する線形域を広くしている。な
お、前記検出器ボディ24の両側面8,12でシールダ
イアフラム9,13の受圧部と対向する部分は、これら
のダイアフラムと同形の波形の襞が半径方向に同心円状
に形成されることにより着底部8a,12aを形成して
いる。これは、シールダイアフラム9,13に所定圧以
上の過大圧力が作用したとき、シールダイアフラムを着
底部8a,12aに着底させることでシールダイアフラ
ムの塑性変形、破損等を防止するとともに、後述する半
導体圧力センサ30に所定値以上の圧力が加わらないよ
うにするためである。
The detector body 24 is formed by integrally joining two disk-shaped bodies 24a and 24b by electron beam welding or the like.
The seal diaphragms 9 and 13 are disposed on the outer peripheral portion 12 by welding the outer peripheral portions. The seal diaphragms 9 and 13 are generally formed in a disk shape by plastically processing a thin metal plate such as phosphor bronze or beryllium copper. At the time of forming the work, the part receiving the pressure in the inner part from the outer peripheral fixing part, that is, by applying a wavy fold in the radial direction to the pressure receiving part concentrically, to increase the compliance of the diaphragm, in other words, to soften the diaphragm,
The linear range that satisfies the load-displacement equation is widened. The portions of both sides 8 and 12 of the detector body 24 facing the pressure-receiving portions of the seal diaphragms 9 and 13 are attached by forming wavy folds of the same shape as these diaphragms concentrically in the radial direction. The bottom portions 8a and 12a are formed. This prevents the seal diaphragms 9 and 13 from being plastically deformed or damaged by causing the seal diaphragms to land on the bottom portions 8a and 12a when an excessive pressure equal to or more than a predetermined pressure acts on the seal diaphragms 9 and 13. This is to prevent pressure exceeding a predetermined value from being applied to the pressure sensor 30.

【0017】また、検出器ボディ24の内部中央には、
ボディ24a,24bの接合面に設けた内室31を2つ
のボディ内室31a,31bに仕切るセンターダイアフ
ラム32が外周縁部を溶接することによって配設されて
いる。前記各シールダイアフラム9,13の裏面と検出
器ボディ24の側面8,12との間には、ダイアフラム
室33a,33bが形成されており、これらのダイアフ
ラム室33a,33bと前記各ボディ内室31a,31
bは、封入回路34a,34bによってそれぞれ連通し
ている。前記センターダイアフラム32の外周固定部よ
り内側部分は受圧部を形成し、この受圧部には、前記シ
ールダイアフラム9,13と同様に波形の襞が半径方向
に同心円状に形成されている。前記ボディ内室31a,
31bの内壁面にも、センターダイアフラム32と同形
の波形の襞が半径方向に同心円状に形成されている。前
記封入回路34a,34bには、封入液封入用孔35
a,35bから圧力伝達媒体であるプロピレングリコー
ル、シリコーンオイル等の封入液16a,16bがそれ
ぞれ封入されている。封入液封入孔35a,35bは、
ボール36によってそれぞれ封止され、このボール36
の抜けを止めねじ37によって防止している。
At the center of the inside of the detector body 24,
A center diaphragm 32 that partitions the inner chamber 31 provided on the joint surface between the bodies 24a and 24b into two body inner chambers 31a and 31b is provided by welding the outer peripheral edges. Diaphragm chambers 33a and 33b are formed between the back surfaces of the seal diaphragms 9 and 13 and the side faces 8 and 12 of the detector body 24, and these diaphragm chambers 33a and 33b and the body inner chamber 31a are formed. , 31
b is communicated with each other by the sealing circuits 34a and 34b. A portion inside the outer peripheral fixed portion of the center diaphragm 32 forms a pressure receiving portion. In this pressure receiving portion, corrugated folds are formed concentrically in the radial direction similarly to the seal diaphragms 9 and 13. The body inner chamber 31a,
Also on the inner wall surface of 31b, corrugated folds having the same shape as the center diaphragm 32 are formed concentrically in the radial direction. The sealing circuits 34a and 34b are provided with holes 35 for sealing liquid.
Filled liquids 16a and 16b such as propylene glycol and silicone oil, which are pressure transmission media, are filled from a and 35b, respectively. The filled liquid filling holes 35a and 35b are
Each ball is sealed by a ball 36,
Is prevented by a set screw 37.

【0018】前記ヘッダー3は、検出器ボディ24の外
周面に一体的に接合されており、内部に前記半導体圧力
センサ30と信号処理回路が組み込まれている。半導体
圧力センサ30は、半導体ダイアフラム30aを有し、
その表裏面に前記封入液16a,16bが封入回路34
c,34dを介して導かれている。
The header 3 is integrally joined to the outer peripheral surface of the detector body 24, and incorporates the semiconductor pressure sensor 30 and a signal processing circuit inside. The semiconductor pressure sensor 30 has a semiconductor diaphragm 30a,
On the front and back surfaces, the filling liquids 16a and 16b are filled with a filling circuit 34.
c, 34d.

【0019】前記アダプタ取付部材22は、貫通孔から
なる連通孔40を有する異径の円筒体に形成され、大径
部22Aの背面が接合面を形成し前記検出器ボディ24
の測定圧側の側面に溶接によって固定されることによ
り、前記シールダイアフラム13を覆っている。連通孔
40は、一端が背面側に開口することにより前記シール
ダイアフラム13の表面側の室、すなわちシールダイア
フラム13とアダプタ取付部材22との間に形成された
表側室41に連通し、シールダイアフラム13と対向し
ている。一方、他端はアダプタ取付部材22の先端面に
開口することにより大気開放側開口端を形成している。
また、前記大径部22Aの内部には、アダプタ取付部材
22の洗浄時に用いられる洗浄用孔44が形成されてお
り、この洗浄用孔44をボール45と止めねじ46とか
らなる封止手段47によって封止している。アダプタ取
付部材22の小径部22Bは、前記受圧アダプタ23の
取付部を形成するもので、外周に雄ねじ48が形成され
受圧アダプタ23がシール部材49を介して螺合してい
る。
The adapter mounting member 22 is formed in a cylindrical body of different diameter having a communication hole 40 formed of a through hole, and a back surface of the large diameter portion 22A forms a joint surface.
Is fixed to the side surface on the measurement pressure side by welding to cover the seal diaphragm 13. The communication hole 40 communicates with a chamber on the front surface of the seal diaphragm 13, that is, a front side chamber 41 formed between the seal diaphragm 13 and the adapter mounting member 22 by opening one end to the back side, and the seal diaphragm 13 is opened. And is facing. On the other hand, the other end is opened at the distal end surface of the adapter mounting member 22 to form an open end on the atmosphere opening side.
Further, a cleaning hole 44 used for cleaning the adapter mounting member 22 is formed inside the large-diameter portion 22A, and the cleaning hole 44 is formed by a sealing means 47 comprising a ball 45 and a set screw 46. Sealing. The small diameter portion 22B of the adapter mounting member 22 forms a mounting portion for the pressure receiving adapter 23. An external thread 48 is formed on the outer periphery, and the pressure receiving adapter 23 is screwed via a seal member 49.

【0020】前記受圧アダプタ23は、先端側外周面に
フランジ51を一体に有する円筒体に形成され、このフ
ランジ51がプロセス流体14の配管15にシール部材
52を介して密接され、クランプ装置53によって固定
されている。受圧アダプタ23の前記配管15との接合
面には、ステンレス鋼等の耐腐食性に優れた材料によっ
て形成された接液ダイアフラム55が外周部を溶接する
ことによって取付けられている。接液ダイアフラム55
の外周固定部より内側部分は受圧部を形成し、この受圧
部には、波形の襞が半径方向に同心円状に形成されてい
る。また、この受圧部と対向する受圧アダプタ23の接
合面にも同形の波形の襞が半径方向に同心円状に形成さ
れて着底部54を形成している。
The pressure receiving adapter 23 is formed in a cylindrical body integrally having a flange 51 on the outer peripheral surface on the distal end side, and the flange 51 is closely attached to the pipe 15 of the process fluid 14 via a sealing member 52, and is clamped by a clamp device 53. Fixed. A liquid contacting diaphragm 55 made of a material having excellent corrosion resistance such as stainless steel is attached to the joint surface of the pressure receiving adapter 23 with the pipe 15 by welding the outer peripheral portion. Wetted diaphragm 55
A pressure receiving portion is formed on the inner side of the outer peripheral fixed portion of the, and a corrugated fold is formed concentrically in the radial direction on the pressure receiving portion. Also, the same-shaped corrugated folds are formed concentrically in the radial direction on the joint surface of the pressure-receiving adapter 23 facing the pressure-receiving portion to form the bottoming portion 54.

【0021】また、受圧アダプタ23は、背面側に開口
し前記アダプタ取付部材22の雄ねじ48が螺合するね
じ孔56を有し、内部には導圧路57と封入用孔58が
形成されている。導圧路57は、一端が前記接液ダイア
フラム55の裏面と前記受圧アダプタ23との間に形成
されたダイアフラム室60に連通し、他端が前記ねじ孔
56に開口することにより前記アダプタ取付部材22の
連通孔40に連通している。そして、導圧路57には、
封入液61が前記封入用孔58から封入されている。こ
の封入液61は、前記ダイアフラム室60、連通孔40
および表側室41にも封入される。なお、62はボー
ル、63は止めねじである。
The pressure receiving adapter 23 has a screw hole 56 which is opened on the back side and into which the male screw 48 of the adapter mounting member 22 is screwed. A pressure guiding path 57 and a sealing hole 58 are formed inside. I have. One end of the pressure guide path 57 communicates with a diaphragm chamber 60 formed between the back surface of the liquid contacting diaphragm 55 and the pressure receiving adapter 23, and the other end is opened to the screw hole 56 so that the adapter mounting member is formed. It communicates with 22 communication holes 40. And, in the pressure guiding path 57,
A filling liquid 61 is filled from the filling hole 58. The filled liquid 61 is filled in the diaphragm chamber 60 and the communication hole 40.
Also, it is sealed in the front side chamber 41. In addition, 62 is a ball and 63 is a set screw.

【0022】図1および図2において、前記カバー27
は、薄い金属板をプレス加工することによって形成され
るもので、検出器ボディ24の大気圧側の側面と略同一
の大きさを有し前記シールダイアフラム9を覆う円板状
のカバー本体27Aと、このカバー本体27Aの外周に
等間隔おいて折り曲げ形成された4つの支持部27Bと
で構成されている。支持部27Bは、前記検出器ボディ
24に固定されることにより、前記カバー本体27Aを
前記シールダイアフラム9と検出器ボディ24から離間
させている。支持部27Bの固定構造としては、例えば
支持部27Bを適宜な幅と弾性を有する板状に形成して
内側面に断面形状が三角形の係合部66を突設し、この
係合部66を検出器ボディ24側に形成した係止部に係
合させることにより着脱自在に固定したり、あるいは支
持部27BをL字形に形成してその先端部を止めねじで
検出器ボディ24に固定すればよい。したがって、カバ
ー27の取付け、取外し作業が容易で、カバー本体27
Aによりシールダイアフラム9を確実に保護することが
できる。また、検出器ボディ24の大気圧側の側面とカ
バー本体27Aとの間には支持部27Bによって仕切ら
れた上下、左右の4方向に開放する適宜な隙間Gが形成
されているので、ゴミが侵入しても内部に溜まったりせ
ず、また虫が巣を作ったりし難く、さらにゴミや虫がカ
バー27の内側に入ったとしてもカバー27を取り外す
ことなく容易に取り除くことができる。
In FIG. 1 and FIG.
Is formed by pressing a thin metal plate, and has a disk-shaped cover main body 27A having substantially the same size as the atmospheric pressure side surface of the detector body 24 and covering the seal diaphragm 9. And four support portions 27B bent at equal intervals on the outer periphery of the cover main body 27A. The support portion 27B separates the cover main body 27A from the seal diaphragm 9 and the detector body 24 by being fixed to the detector body 24. As a fixing structure of the support portion 27B, for example, the support portion 27B is formed in a plate shape having an appropriate width and elasticity, and an engagement portion 66 having a triangular cross section is protruded from an inner surface thereof. If it is detachably fixed by engaging with a locking portion formed on the detector body 24 side, or if the support portion 27B is formed in an L-shape and its tip is fixed to the detector body 24 with a set screw. Good. Therefore, the work of attaching and detaching the cover 27 is easy, and
With A, the sealing diaphragm 9 can be reliably protected. Also, between the side surface on the atmospheric pressure side of the detector body 24 and the cover main body 27A, there are formed appropriate gaps G separated by the support portion 27B and opened in four directions, up, down, left, and right, so that dust is formed. Even if it invades, it does not accumulate inside, it is difficult for insects to form nests, and even if dust or insects enter the inside of the cover 27, it can be easily removed without removing the cover 27.

【0023】図3および図4にカバーの他の実施の形態
を示す。図3はカバー本体27A’をリング状に形成し
て中央の開口67を金網68で覆うことによりメッシュ
構造とした例を示す。図4は隣り合う支持部27B間を
同じく金網68で覆うことによりメッシュ構造とした例
を示す。このようなメッシュ構造、特に図3に示すメッ
シュ構造にした場合はカバー内部の様子が見えるので、
ゴミや虫が侵入したか否かを容易に視認することがで
き、図4に示すメッシュ構造とした場合はゴミや虫の侵
入を確実に防止することができる。
FIGS. 3 and 4 show another embodiment of the cover. FIG. 3 shows an example in which the cover main body 27A 'is formed in a ring shape and the central opening 67 is covered with a wire mesh 68 to form a mesh structure. FIG. 4 shows an example in which a mesh structure is formed by similarly covering between adjacent support portions 27B with a wire mesh 68. In the case of such a mesh structure, particularly the mesh structure shown in FIG. 3, the inside of the cover can be seen,
Whether or not dust or insects have invaded can be easily visually recognized, and when the mesh structure shown in FIG. 4 is employed, intrusion of dust or insects can be reliably prevented.

【0024】上記した構造からなる差圧・圧力発信器2
0において、シールダイアフラム9と接液ダイアフラム
55に大気圧Poとプロセス流体14の圧力P1をそれ
ぞれ加えると、これらのダイアフラム9,55はその圧
力に応じて変位する。シールダイアフラム9の変位は、
封入液16aを介してセンターダイアフラム32に伝達
される。一方、接液ダイアフラム55の変位は、封入液
61を介してシールダイアフラム13に伝達される。こ
のため、シールダイアフラム13も変位し、このシール
ダイアフラム13の変位がさらに封入液16bを介して
センターダイアフラム32に伝達される。これによって
センターダイアフラム32は差圧(P1ーPo)に応じ
て変位し、この変位が封入液16a,16bを介して半
導体圧力センサ30の半導体ダイアフラム30aに伝達
される。したがって、半導体ダイアフラム30aは、差
圧(P1−Po)に応じて歪み、その歪量が電気信号に
変換されて取り出されることにより、プロセス流体14
の液面高さ、タンク内圧等を測定することができる。
The differential pressure / pressure transmitter 2 having the above structure
At 0, when the atmospheric pressure Po and the pressure P1 of the process fluid 14 are respectively applied to the seal diaphragm 9 and the liquid contact diaphragm 55, these diaphragms 9, 55 are displaced in accordance with the pressure. The displacement of the seal diaphragm 9 is
It is transmitted to the center diaphragm 32 via the filling liquid 16a. On the other hand, the displacement of the liquid contact diaphragm 55 is transmitted to the seal diaphragm 13 via the filling liquid 61. Therefore, the seal diaphragm 13 is also displaced, and the displacement of the seal diaphragm 13 is further transmitted to the center diaphragm 32 via the filling liquid 16b. As a result, the center diaphragm 32 is displaced according to the differential pressure (P1−Po), and this displacement is transmitted to the semiconductor diaphragm 30a of the semiconductor pressure sensor 30 via the sealed liquids 16a and 16b. Therefore, the semiconductor diaphragm 30a is distorted in accordance with the differential pressure (P1-Po), and the amount of the distortion is converted into an electric signal and taken out, thereby obtaining the process fluid 14a.
, The tank internal pressure, etc. can be measured.

【0025】なお、上記した実施の形態においては受圧
アダプタ23を備えた差圧・圧力発信器に適用した例を
示したが、本発明はこれに何等限定されるものではな
く、検出器本体の両側面に大気圧側と測定圧側のカバー
を取付けた大気開放型の差圧・圧力発信器にもそのまま
適用することができる。
In the above-described embodiment, an example is shown in which the present invention is applied to a differential pressure / pressure transmitter provided with the pressure receiving adapter 23. However, the present invention is not limited to this. The present invention can also be applied to an open-to-atmosphere type differential pressure / pressure transmitter in which covers on the atmospheric pressure side and the measurement pressure side are attached to both sides.

【0026】[0026]

【発明の効果】以上説明したように本発明に係る差圧・
圧力発信器は、大気圧側のシールダイアフラムを覆うカ
バー本体と、このカバー本体を支持する支持部とで大気
圧側のカバーを構成し、支持部を発信器本体に固定して
カバー本体と発信器本体との間に所要の隙間を形成する
ように構成したので、カバーの構造が簡単で安価に製作
でき、また取付け、取外し作業も容易で、ゴミや虫がカ
バーの内側に入っても溜まり難く、また、たとえ溜まっ
たとしてもカバーを外すことなく容易に取り除くことが
できる。また、本発明は、カバーの一部をメッシュ構造
としているので、ゴミや虫が侵入しているか否かを容易
に確認することができ、特にカバー本体と発信器本体と
の間の隙間をメッシュ構造で覆うと、ゴミや虫の侵入を
確実に防止することができる。
As described above, according to the present invention, the differential pressure
The pressure transmitter has a cover on the atmospheric pressure side composed of a cover body that covers the seal diaphragm on the atmospheric pressure side and a support portion that supports the cover body, and the support portion is fixed to the transmitter body to transmit the signal to the cover body. The cover is simple and inexpensive because it is designed to form a required gap between the container and the main unit.It is easy to install and remove. It is difficult, and even if accumulated, it can be easily removed without removing the cover. Further, according to the present invention, since a part of the cover has a mesh structure, it is possible to easily confirm whether dust or insects are invading, and in particular, a gap between the cover main body and the transmitter main body is meshed. Covering with a structure can surely prevent intrusion of dust and insects.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明を受圧アダプタを備えた大気圧基準型
の差圧・圧力発信器に適用した一実施の形態を示す断面
図である。
FIG. 1 is a sectional view showing an embodiment in which the present invention is applied to an atmospheric pressure reference type differential pressure / pressure transmitter having a pressure receiving adapter.

【図2】 基準圧側カバーの斜視図である。FIG. 2 is a perspective view of a reference pressure side cover.

【図3】 カバーの他の実施の形態を示す斜視図であ
る。
FIG. 3 is a perspective view showing another embodiment of the cover.

【図4】 カバーのさらに他の実施の形態を示す斜視図
である。
FIG. 4 is a perspective view showing still another embodiment of the cover.

【図5】 従来の差圧・圧力発信器の一部を破断して示
す正面図である。
FIG. 5 is a partially cutaway front view of a conventional differential pressure / pressure transmitter.

【符号の説明】[Explanation of symbols]

1…差圧・圧力発信器、2…発信器本体、3…ヘッダ
ー、6…大気圧側カバー、7…測定圧側カバー、8…大
気圧側の側面、9…大気圧側シールダイアフラム、13
…測定圧側シールダイアフラム、27…カバー、27
A,27’…カバー本体、27B…支持部、68…金
網。
DESCRIPTION OF SYMBOLS 1 ... Differential pressure / pressure transmitter, 2 ... Transmitter main body, 3 ... Header, 6 ... Atmospheric pressure side cover, 7 ... Measurement pressure side cover, 8 ... Atmospheric pressure side side, 9 ... Atmospheric pressure side seal diaphragm, 13
... Measurement pressure side seal diaphragm, 27 ... Cover, 27
A, 27 ': cover body, 27B: support, 68: wire mesh.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 発信器本体の大気圧側シールダイアフラ
ムをカバーで覆った差圧・圧力発信器において、 前記カバーを、前記大気圧側シールダイアフラムを覆う
カバー本体と、前記発信器本体に固定され前記カバー本
体を前記発信器本体から離間させて支持する支持部とで
構成したことを特徴とする差圧・圧力発信器。
1. A differential pressure / pressure transmitter in which an atmospheric pressure side seal diaphragm of a transmitter main body is covered with a cover, wherein the cover is fixed to the cover main body covering the atmospheric pressure side seal diaphragm and the transmitter main body. A differential pressure / pressure transmitter, wherein the cover main body is configured to be separated from the transmitter main body and supported.
【請求項2】 請求項1記載の差圧・圧力発信器におい
て、 カバー本体の少なくとも一部をメッシュ構造としたこと
を特徴とする差圧・圧力発信器。
2. The differential pressure / pressure transmitter according to claim 1, wherein at least a part of the cover main body has a mesh structure.
【請求項3】 請求項1記載の差圧・圧力発信器におい
て、 カバー本体と発信器本体との間の隙間をメッシュ構造で
覆ったことを特徴とする差圧・圧力発信器。
3. The differential pressure / pressure transmitter according to claim 1, wherein a gap between the cover main body and the transmitter main body is covered with a mesh structure.
JP2000135626A 2000-05-09 2000-05-09 Differential pressure / pressure transmitter Expired - Lifetime JP3583347B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000135626A JP3583347B2 (en) 2000-05-09 2000-05-09 Differential pressure / pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000135626A JP3583347B2 (en) 2000-05-09 2000-05-09 Differential pressure / pressure transmitter

Publications (2)

Publication Number Publication Date
JP2001318017A true JP2001318017A (en) 2001-11-16
JP3583347B2 JP3583347B2 (en) 2004-11-04

Family

ID=18643677

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3583347B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009222606A (en) * 2008-03-17 2009-10-01 Sanki Eng Co Ltd Internal pressure measuring opening, and drip proof hood used therefor
JP2009540271A (en) * 2006-06-07 2009-11-19 キストラー ホールディング アクチエンゲゼルシャフト Membrane protector for sensor having a film
DE102018206210A1 (en) * 2018-04-23 2019-10-24 Continental Automotive Gmbh Cover arrangement for a sensor and pedestrian protection sensor for a vehicle

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198034U (en) * 1981-06-13 1982-12-16
JPS5888140U (en) * 1981-12-09 1983-06-15 横河電機株式会社 pressure transmitter
JPH0232027U (en) * 1988-08-24 1990-02-28
JPH03223637A (en) * 1989-11-13 1991-10-02 Fuji Electric Co Ltd Differential-pressure detecting device
JPH0536352U (en) * 1991-10-17 1993-05-18 コパル電子株式会社 Freon gas sensor
JPH05164638A (en) * 1991-12-10 1993-06-29 Toray Ind Inc Pressure sensor
JPH089620Y2 (en) * 1989-05-29 1996-03-21 株式会社共和電業 Pore water pressure gauge
JPH116777A (en) * 1997-06-17 1999-01-12 Doriko Kk Gap hydraulic gage and gap hydraulic-pressure measuring method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198034U (en) * 1981-06-13 1982-12-16
JPS5888140U (en) * 1981-12-09 1983-06-15 横河電機株式会社 pressure transmitter
JPH0232027U (en) * 1988-08-24 1990-02-28
JPH089620Y2 (en) * 1989-05-29 1996-03-21 株式会社共和電業 Pore water pressure gauge
JPH03223637A (en) * 1989-11-13 1991-10-02 Fuji Electric Co Ltd Differential-pressure detecting device
JPH0536352U (en) * 1991-10-17 1993-05-18 コパル電子株式会社 Freon gas sensor
JPH05164638A (en) * 1991-12-10 1993-06-29 Toray Ind Inc Pressure sensor
JPH116777A (en) * 1997-06-17 1999-01-12 Doriko Kk Gap hydraulic gage and gap hydraulic-pressure measuring method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009540271A (en) * 2006-06-07 2009-11-19 キストラー ホールディング アクチエンゲゼルシャフト Membrane protector for sensor having a film
JP2013190445A (en) * 2006-06-07 2013-09-26 Kistler Holding Ag Membrane protection for sensor having membrane, sensor having membrane, and membrane protection
JP2009222606A (en) * 2008-03-17 2009-10-01 Sanki Eng Co Ltd Internal pressure measuring opening, and drip proof hood used therefor
US11828886B2 (en) 2018-03-21 2023-11-28 Continental Automotive Gmbh Cover assembly for a sensor and pedestrian protection sensor for a vehicle
DE102018206210A1 (en) * 2018-04-23 2019-10-24 Continental Automotive Gmbh Cover arrangement for a sensor and pedestrian protection sensor for a vehicle

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