JP2001311803A5 - - Google Patents
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- Publication number
- JP2001311803A5 JP2001311803A5 JP2000132897A JP2000132897A JP2001311803A5 JP 2001311803 A5 JP2001311803 A5 JP 2001311803A5 JP 2000132897 A JP2000132897 A JP 2000132897A JP 2000132897 A JP2000132897 A JP 2000132897A JP 2001311803 A5 JP2001311803 A5 JP 2001311803A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000132897A JP2001311803A (ja) | 2000-04-27 | 2000-04-27 | 光学素子、光学素子の製造方法および光学系 |
| SG200102386A SG96617A1 (en) | 2000-04-27 | 2001-04-26 | Optical device, optical system, method of production of same, and mold for production of same |
| US09/842,021 US6825995B2 (en) | 2000-04-27 | 2001-04-26 | Optical device, optical system, method of production of same, and mold for production of same |
| EP01401118A EP1151796B1 (en) | 2000-04-27 | 2001-04-27 | Immersion lens, optical system incorporating same, method of production of same, and mold for production of same |
| DE60126444T DE60126444T2 (de) | 2000-04-27 | 2001-04-27 | Immersionslinse, optisches System mit dieser Linse, Herstellungsverfahren und Gussform für diese Linse |
| KR1020010023016A KR100793720B1 (ko) | 2000-04-27 | 2001-04-27 | 광학 시스템 |
| US10/758,182 US6972912B2 (en) | 2000-04-27 | 2004-01-16 | Optical device, optical system, method of production of same, and mold for production of same |
| US10/758,184 US6985310B2 (en) | 2000-04-27 | 2004-01-16 | Optical device, optical system, method of production of same, and mold for production of same |
| US11/103,577 US6992842B2 (en) | 2000-04-27 | 2005-04-12 | Optical device, optical system, method of production of same, and mold for production of same |
| US11/223,947 US7256950B2 (en) | 2000-04-27 | 2005-09-13 | Optical device, optical system, method of production of same, and mold for production of same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000132897A JP2001311803A (ja) | 2000-04-27 | 2000-04-27 | 光学素子、光学素子の製造方法および光学系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001311803A JP2001311803A (ja) | 2001-11-09 |
| JP2001311803A5 true JP2001311803A5 (US20040097461A1-20040520-C00035.png) | 2007-04-19 |
Family
ID=18641504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000132897A Abandoned JP2001311803A (ja) | 2000-04-27 | 2000-04-27 | 光学素子、光学素子の製造方法および光学系 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001311803A (US20040097461A1-20040520-C00035.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI245930B (en) | 2000-10-04 | 2005-12-21 | Sony Corp | Optical element, metal mold for producing optical element and production method for optical element |
| JP2003167102A (ja) | 2001-12-04 | 2003-06-13 | Sony Corp | 光学素子及びその製造方法 |
| US9939605B2 (en) * | 2015-08-06 | 2018-04-10 | Qualcomm Incorporated | Submicron wafer alignment |
| JP7280804B2 (ja) * | 2019-10-24 | 2023-05-24 | 浜松ホトニクス株式会社 | 固浸レンズユニット及び半導体検査装置 |
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2000
- 2000-04-27 JP JP2000132897A patent/JP2001311803A/ja not_active Abandoned
