JP2001311678A - Method for judging presence/absence of air leak of sealed container - Google Patents

Method for judging presence/absence of air leak of sealed container

Info

Publication number
JP2001311678A
JP2001311678A JP2000129659A JP2000129659A JP2001311678A JP 2001311678 A JP2001311678 A JP 2001311678A JP 2000129659 A JP2000129659 A JP 2000129659A JP 2000129659 A JP2000129659 A JP 2000129659A JP 2001311678 A JP2001311678 A JP 2001311678A
Authority
JP
Japan
Prior art keywords
value
pressure
determination
measurement
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000129659A
Other languages
Japanese (ja)
Inventor
Akira Fukushima
彰 福島
Hidekazu Yoshioka
秀和 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HITTO KAIHATSU KENKYUSHO KK
Omron Corp
Original Assignee
HITTO KAIHATSU KENKYUSHO KK
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HITTO KAIHATSU KENKYUSHO KK, Omron Corp, Omron Tateisi Electronics Co filed Critical HITTO KAIHATSU KENKYUSHO KK
Priority to JP2000129659A priority Critical patent/JP2001311678A/en
Publication of JP2001311678A publication Critical patent/JP2001311678A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for judging the presence or absence of an air leak in a sealed container wherein a judgment accuracy can be maintained by reducing misjudgments even when the measurement environment changes or a measuring apparatus changes with time. SOLUTION: A CPU 30 included in a judging body part 20 measures pressure for judging a leak. Every time sealed container is judged as a good product without any air leak, an average-calculating part 42 calculates a moving average value of a predetermined number of measured pressure values including the latest data. A judging value-calculating part 44 adds a judgment allowance value to the moving average value and calculates an updated judging value. While sequentially updating the updated judging value, the CPU 30 judges a leak on the basis of the judging value which follows the change with time of the measurement environment and the measuring apparatus.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、密閉容器のエアリ
ーク有無判定方法、特に密閉容器のエアリーク有無判定
を行う時に、判定環境の変化に伴う判定誤差を最小限に
抑えることのできる密閉容器のエアリーク有無判定方法
の改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for judging the presence or absence of air leaks in a closed container, and more particularly to the method for judging the presence or absence of air leaks in a closed container. It relates to the improvement of the presence / absence determination method.

【0002】[0002]

【従来の技術】例えばマイクロ電子部品であるシールリ
レー等は、プラスチック容器内に可動接点と励磁コイル
とが収納され、この容器をシールすることによって密封
された小型小電力リレー素子を得ることができる。この
様なシールリレーは密閉することにより、容器内で密閉
された空気あるいは不活性ガスがリレーの可動部やその
他の内部部品を安定した状態に保つと共に、当該内部部
品が塵埃等の影響を受けないことから長期間に渡ってマ
イクロ電子部品の安定した作動特性を保つことを可能に
している。もちろん、密封容器は前述したようなマイク
ロ電子部品ばかりでなく、医療用、食品用、その他広範
囲の分野に適用可能であり、同様に密閉容器内の物体の
安定化や保護を行うことができる。
2. Description of the Related Art For example, a sealed relay or the like which is a microelectronic component has a movable contact and an exciting coil housed in a plastic container, and by sealing this container, a sealed small and small power relay element can be obtained. . By sealing such a sealed relay, air or inert gas sealed in the container keeps the movable parts and other internal parts of the relay in a stable state, and the internal parts are affected by dust and the like. As a result, the stable operation characteristics of the microelectronic component can be maintained for a long period of time. Of course, the sealed container can be applied not only to the microelectronic component as described above, but also to medical, food, and other wide fields, and can stabilize and protect objects in the sealed container.

【0003】この様な密封容器は、製造時におけるシー
ル不良、容器自体の破損や通孔その他の存在によって完
全な密封状態を保つことができない場合がある。この様
な密閉状態が害された密閉容器は、エアリークを起こし
ている不良品として確実に除去されなければならない。
この判別を行うためにエアリーク有無判定方法が幾つか
提案されている。
[0003] Such a hermetically sealed container may not be able to maintain a completely sealed state due to poor sealing at the time of manufacture, breakage of the container itself, or the presence of through holes or the like. Such a hermetically sealed container whose airtightness has been impaired must be reliably removed as a defective product having an air leak.
In order to make this determination, several methods for determining the presence or absence of air leak have been proposed.

【0004】例えば、差圧式と称される判定方法では、
圧力バランス検出器を挟んで接続された二つの密閉槽を
準備し、一方の密閉槽に被測定密閉容器を収納し、他方
の密閉槽にエアリークの無い基準密閉容器を収納する。
この状態で、各密閉槽を減圧または加圧して同一の一定
圧空間を形成する。もし、被測定密閉容器にリークが存
在すれば、被測定密閉容器の内部空間が密閉槽の内部空
間と同化することになり二つの密閉槽の圧力バランスが
崩れる。この崩れを検出することによりリークの有無判
定を行うことができる。しかし、この方法の場合、二つ
の密閉槽内の圧力を安定化させるために充分な平衡時間
を必要とし、検査時間の短縮が計れなかったり、前記密
閉槽の内圧を安定化させるためには、充分に大きな加圧
源或いは減圧源が必要となり、装置が大型化してしまう
という欠点がある。また、密閉槽内の圧力が安定した
後、徐々にエアリークする非完全リーク、いわゆる小リ
ーク、中リークに関しては、圧力バランスの崩れを検出
できるが、完全リーク(大きな穴等により激しいリーク
を起こす大リーク)が存在する場合、加圧または減圧の
開始時には既に被測定密閉容器の内部空間が密閉槽の内
部空間と同化しているため、完全リークが正確に検出で
きない虞がある。
For example, in a determination method called a differential pressure type,
Two sealed tanks connected to each other with a pressure balance detector interposed therebetween are prepared. One sealed tank stores a sealed container to be measured, and the other sealed tank stores a reference sealed container without air leak.
In this state, each closed tank is depressurized or pressurized to form the same constant pressure space. If a leak exists in the measured closed container, the internal space of the measured closed container is assimilated with the internal space of the closed tank, and the pressure balance between the two closed tanks is lost. By detecting the collapse, it is possible to determine whether or not there is a leak. However, in the case of this method, a sufficient equilibration time is required to stabilize the pressure in the two closed tanks, and the inspection time cannot be reduced, or in order to stabilize the internal pressure of the closed tank, There is a disadvantage that a sufficiently large pressurizing source or depressurizing source is required, and the apparatus becomes large. In addition, in the case of non-complete leaks that gradually leak air after the pressure in the sealed tank is stabilized, so-called small leaks and medium leaks, the imbalance in pressure can be detected. However, complete leaks (large leaks due to large holes etc. If there is a leak, the internal space of the container to be measured is already assimilated with the internal space of the closed vessel at the start of pressurization or depressurization, so there is a possibility that a complete leak cannot be detected accurately.

【0005】これに対して、直圧式と称される判定方法
がある。この方法は、まず、リーク検出対象である被測
定密閉容器を所定容積の測定槽に投入し、密閉すること
により測定槽を所定の初期槽内圧力にする。その後、初
期槽内圧力を所定量変化させる。この圧力の所定量変化
は、測定槽の容積を密閉状態で前記所定容積から変化さ
せることによって行ってもよいし、測定槽の容積を密閉
状態で前記所定容積に維持したまま、何らかの手段によ
って加圧または減圧して行ってもよい。そして、測定槽
の所定量変化開始からその後の圧力変化を測定する。こ
の時、被測定密閉容器にエアリークが存在すれば、その
圧力変化は、エアリークが存在しない場合と異なる。こ
の方法によれば、被測定密閉容器にエアリークが存在す
る場合、当該被測定密閉容器の内部空間が測定槽の内部
空間と同化し、実質的な内部容積が増加するため(測定
槽の容積を変化させて圧力を所定量変化させている場合
でもその変化後の容積に対して更に変化する)、測定中
の圧力がエアリークが存在しない場合に対して上昇(測
定槽を減圧した場合)または下降(測定槽を加圧した場
合)する。この圧力変化に基づいてエアリークの有無を
判定する。この時、測定準備のために圧力バランスを安
定化させる必要が無いので、測定槽の圧力を所定量変化
させるのみの容易な構成で迅速な判定を行うことが可能
になる。また、測定槽の圧力変化に基づき判定を行うの
で、大リーク、中リーク、小リークのいずれの判定も行
うことができる。
On the other hand, there is a determination method called a direct pressure type. In this method, first, a sealed container to be measured, which is a leak detection target, is charged into a measurement tank having a predetermined volume, and the measurement tank is sealed to have a predetermined initial tank pressure. Thereafter, the initial tank pressure is changed by a predetermined amount. The change in the predetermined amount of the pressure may be performed by changing the volume of the measurement tank from the predetermined volume in a closed state, or may be performed by some means while maintaining the volume of the measurement tank in the closed state at the predetermined volume. It may be carried out under pressure or reduced pressure. Then, the pressure change after the start of the change of the predetermined amount in the measuring tank is measured. At this time, if an air leak exists in the measured closed container, the pressure change is different from the case where no air leak exists. According to this method, when an air leak exists in the closed container to be measured, the internal space of the closed container to be measured is assimilated with the internal space of the measuring tank, and the substantial internal volume increases (the volume of the measuring tank is reduced). Even when the pressure is changed by a predetermined amount by changing the pressure, the pressure further changes with respect to the changed volume), and the pressure during measurement rises (when the measurement tank is depressurized) or falls with respect to the case where there is no air leak. (When the measuring tank is pressurized). The presence or absence of an air leak is determined based on this pressure change. At this time, since it is not necessary to stabilize the pressure balance in preparation for measurement, it is possible to make a quick determination with a simple configuration in which the pressure in the measurement tank is only changed by a predetermined amount. In addition, since the determination is made based on the change in the pressure of the measurement tank, any of the large leak, the medium leak, and the small leak can be determined.

【0006】[0006]

【発明が解決しようとする課題】上述した直圧式による
判定方法は、シンプルな構成で迅速かつ容易に小リー
ク、中リーク、大リークの判定を行うことができるが、
判定の基準となる測定槽内の圧力は、測定環境の変化に
大きく左右されてしまう。特に、僅かな圧力変化により
リーク判定を行う小リーク判定を行う場合、絶対湿度等
の変動により測定圧力差が僅かに変動しても設定された
判定値から逸脱してしまう。従来、判定値は固定値が使
用されているため、例えば、本来良品と判定されるべき
被測定密閉容器が不良品と判定されてしまうことがあ
る。また、逆に不良品が良品と判定されてしまう場合も
ある。厳密に管理された測定室等で判定を行えば、上述
のような誤判定は低減できるが、実際の生産ラインの環
境を厳密に管理することは大変困難である。更に、測定
槽を含む測定システムは、シール部材等により密閉状態
を形成しているが、経時変化によりシール状態が変動す
る場合があり、上述と同様な誤判定を招いてしまう場合
がある。また、判定環境の変化により測定圧力が変化す
る場合、連続して不良判定を行う場合が多く、作業者は
その度に、不良確認や測定システムの確認作業を強いら
れ、作業者負荷の増大を招いてしまうという問題もあ
る。
According to the above-described direct pressure type determination method, small, medium, and large leaks can be determined quickly and easily with a simple configuration.
The pressure in the measurement tank, which serves as a criterion for determination, is greatly affected by changes in the measurement environment. In particular, when performing a small leak determination that performs a leak determination based on a slight pressure change, even if the measured pressure difference fluctuates slightly due to a change in the absolute humidity or the like, it deviates from the set determination value. Conventionally, since a fixed value is used as the determination value, for example, a measured closed container that should be originally determined to be a good product may be determined to be a defective product. Conversely, a defective product may be determined as a non-defective product. If the determination is made in a strictly controlled measurement room or the like, the above-described erroneous determination can be reduced, but it is very difficult to strictly control the actual environment of the production line. Furthermore, in a measurement system including a measurement tank, a sealed state is formed by a seal member or the like. However, the sealed state may fluctuate due to aging, which may cause the same erroneous determination as described above. In addition, when the measurement pressure changes due to a change in the determination environment, the failure determination is often performed continuously, and the worker is forced to confirm the failure and check the measurement system each time, thereby increasing the worker load. There is also a problem of inviting.

【0007】本発明は上記従来の課題に鑑みなされたも
のであり、その目的は、測定環境の変化や測定機の経時
変化、すなわち判定環境の変化が生じた場合でも誤判定
を低減し、判定精度を維持すると共に、作業者の負荷を
低減することのできる密閉容器のエアリーク有無判定方
法を提供することである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has as its object to reduce erroneous determination even when a change in the measurement environment or a change in the measuring device with time, that is, a change in the determination environment, is achieved. An object of the present invention is to provide a method for judging the presence or absence of air leak in a closed container which can maintain accuracy and reduce a load on an operator.

【0008】[0008]

【課題を解決するための手段】上記のような目的を達成
するために、本発明は、所定の初期槽内圧力を有し、か
つ所定容積の密閉空間を有する測定槽に被測定密閉容器
を投入し、前記初期槽内圧力を所定量変化させた時の測
定槽内圧力の圧力変化値に基づいて被測定密閉容器のエ
アリークの有無を判定する密閉容器のエアリーク有無判
定方法であって、エアリーク無しと判定された所定数の
被測定密閉容器の圧力変化値の平均値を算出し、当該平
均値に判定余裕値を加算して更新判定値を算出するステ
ップと、前記更新判定値に基づき後続の被測定密閉容器
の判定を行い、エアリーク無しと判定された被測定密閉
容器の圧力変化値を前記平均値算出の最新データとして
含むステップと、を含むことを特徴とする。
SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method in which a sealed container to be measured is placed in a measuring tank having a predetermined initial tank pressure and a closed space having a predetermined volume. A method for determining the presence or absence of air leak in a sealed container to be measured based on a pressure change value of the pressure in the measurement tank when the initial pressure in the tank is changed by a predetermined amount. Calculating an average value of the pressure change values of the predetermined number of sealed containers to be measured determined to be absent, and adding an allowance margin value to the average value to calculate an update determination value; and Determining the sealed container to be measured, and including the pressure change value of the measured sealed container determined to have no air leak as the latest data for calculating the average value.

【0009】この構成によれば、良品と判定された最新
の圧力変化値を用いて常に平均値を更新するので、測定
環境の変化や測定機の経時変化が生じて測定圧力が変動
しても、その変動分を考慮した平均値に判定余裕値を加
算して更新判定値を得ることが可能になり、誤判定を防
止することができる。
According to this configuration, the average value is constantly updated using the latest pressure change value determined as a non-defective product. Therefore, even if the measurement pressure changes due to a change in the measurement environment or a change with time in the measurement device. In addition, it is possible to obtain the updated determination value by adding the determination margin value to the average value in consideration of the variation, thereby preventing erroneous determination.

【0010】上記のような目的を達成するために、本発
明は、上記構成において、測定状況に応じて、少なくと
も平均値の算出データ数または判定余裕値の設定変更を
行うステップを含むことを特徴とする。
In order to achieve the above object, the present invention is characterized in that, in the above-mentioned configuration, the method includes a step of changing at least the number of calculation data of the average value or the setting of the judgment allowance value according to the measurement situation. And

【0011】この構成によれば、判定精度を容易に調整
することができる。
According to this configuration, the determination accuracy can be easily adjusted.

【0012】上記のような目的を達成するために、本発
明は、上記構成において、前記更新判定値が異常更新値
を越えて更新された場合、警報出力を行うステップを含
むことを特徴とする。
[0012] In order to achieve the above object, the present invention is characterized in that, in the above configuration, a step of outputting an alarm when the update determination value is updated beyond an abnormal update value is provided. .

【0013】ここで、異常更新値とは、判定の更新値の
限界値であり、通常の測定環境の変化、例えば、湿度や
温度等の変化による圧力変動では越えない値である。す
なわち、異常更新値を越える場合は、測定機の経時劣化
による密閉不良や、センサ精度低下による圧力変化の疑
いがあることになる。この構成によれば、誤判定を防止
しつつ、測定機の故障を容易に発見可能であり、エアリ
ーク有無判定を継続的にスムーズに行うことができる。
Here, the abnormal update value is a limit value of the update value of the determination, and is a value which is not exceeded by a change in the normal measurement environment, for example, a pressure change due to a change in humidity, temperature, or the like. That is, if the value exceeds the abnormal update value, there is a possibility that the sealing failure due to the deterioration of the measuring device with time or the pressure change due to the decrease in the sensor accuracy. According to this configuration, it is possible to easily find a failure of the measuring device while preventing erroneous determination, and it is possible to continuously and smoothly determine whether or not there is an air leak.

【0014】[0014]

【発明の実施の形態】以下、本発明の好適な実施の形態
(以下、実施形態という)を図面に基づき説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention (hereinafter referred to as embodiments) will be described below with reference to the drawings.

【0015】図1は本実施形態のエアリーク有無判定方
法を実現するエアリーク検出装置10の基本構成概念を
説明する概略説明図である。図1のエアリーク検出装置
10は、直圧式のエアリーク検出装置で、特に、測定槽
の圧力を所定量変化させるために測定槽に対して減圧を
行うタイプのものである。すなわち、エアリーク検出装
置10は、被測定密閉容器、例えばマイクロ電子部品で
あるシールリレー(以下、ワークという)12を収納し
検査を行う測定槽14と、当該測定槽14に複数の切換
バルブ(本実施形態では4個の切換バルブVa,Vb,V
c,Vd)を介して接続された減圧装置16と、前記測定
槽14の近傍に配置され測定槽14内の槽内圧力を検出
可能な圧力センサ18と、減圧装置16、圧力センサ1
8、各切換バルブVa,Vb,Vc,Vd等の制御及び検出
値等に関する演算を行い所定の判定出力を行う判定部を
含む判定本体部20等で構成されている。
FIG. 1 is a schematic explanatory diagram for explaining the basic configuration concept of an air leak detection device 10 for realizing the air leak presence / absence determination method of the present embodiment. The air leak detection device 10 shown in FIG. 1 is a direct pressure type air leak detection device, which is of a type that depressurizes the measurement tank in order to change the pressure in the measurement tank by a predetermined amount. In other words, the air leak detection device 10 includes a measurement tank 14 for housing and inspecting a sealed container to be measured, for example, a seal relay (hereinafter, referred to as a work) 12 as a microelectronic component, and a plurality of switching valves (for In the embodiment, four switching valves Va, Vb, V
c, Vd), a pressure sensor 18 disposed near the measuring tank 14 and capable of detecting a pressure in the measuring tank 14, a depressurizing apparatus 16, and a pressure sensor 1.
8. It is composed of a determination main unit 20 and the like including a determination unit which performs control on the control of each switching valve Va, Vb, Vc, Vd, and the like, and performs a predetermined determination output.

【0016】前記測定槽14は、例えば、ヒンジ等で接
続された上部筐体14aと下部筐体14bで構成された
開閉自在なケースで、上部筐体14aと下部筐体14b
を接合した状態(閉状態)でほぼ中央部にワーク12を
収納する測定室22を形成する。この測定室22の周囲
には、閉状態における当該測定室22の気密を確保する
ために、気密シール部材として例えばOリング24が配
置される。従って、上部筐体14aと下部筐体14bと
により、所定容積の実質的密閉空間を有する測定室22
を形成することが可能になる。なお、測定室22は圧力
変化等によって、内壁面が変形したりしないように、上
部筐体14aと下部筐体14b全体または内壁面が金属
や硬質樹脂等で形成されている。
The measuring tank 14 is, for example, an openable and closable case composed of an upper case 14a and a lower case 14b connected by a hinge or the like. The upper case 14a and the lower case 14b
A measurement chamber 22 for accommodating the work 12 is formed substantially at the center in a state in which are joined (closed state). For example, an O-ring 24 is arranged around the measurement chamber 22 as an airtight seal member in order to secure airtightness of the measurement chamber 22 in a closed state. Therefore, the measurement chamber 22 having a substantially closed space with a predetermined volume is formed by the upper housing 14a and the lower housing 14b.
Can be formed. Note that the entire upper housing 14a and lower housing 14b or the inner wall surface is formed of metal, hard resin, or the like so that the inner wall surface of the measurement chamber 22 is not deformed due to a pressure change or the like.

【0017】一方、前記減圧装置16は、真空ポンプ1
6aとレギュレータ16bを有する減圧タンク16cで
構成され、減圧タンク16c内を常に所定の圧力に維持
できるように成っている。また、切換バルブVa,Vb,
Vdは、測定槽14と減圧装置16とを連通接続する流
路26を選択的に開閉している。特に、切換バルブVa
と切換バルブVbとの間に形成される空間は、前記測定
槽14に対して、異なる圧力状態を形成可能な基準圧力
室28を規定している。また、切換バルブVcは、大気
開放用の弁であり、流路26及び測定槽14の測定室2
2の圧力を大気開放する場合に開かれる。
On the other hand, the pressure reducing device 16 is provided with the vacuum pump 1
The pressure reducing tank 16c includes a pressure reducing tank 16c having a pressure regulator 6a and a regulator 16b, so that the inside of the pressure reducing tank 16c can always be maintained at a predetermined pressure. Further, the switching valves Va, Vb,
Vd selectively opens and closes a flow path 26 that connects and connects the measurement tank 14 and the pressure reducing device 16. In particular, the switching valve Va
The space formed between the pressure chamber and the switching valve Vb defines a reference pressure chamber 28 capable of forming a different pressure state with respect to the measurement tank 14. The switching valve Vc is a valve for opening to the atmosphere, and is provided with the flow path 26 and the measurement chamber 2 of the measurement tank 14.
Opened when the pressure of 2 is released to the atmosphere.

【0018】一方、判定本体部20は、制御演算部(C
PU)30を中心に構成され、当該CPU30には、判
定経過や判定結果、その他警報等を含む各種情報を表示
するディスプレイ32、判定経過や判定結果等に各種デ
ータを記憶するメモリ34、判定に関する各種設定を行
う設定器36、主に切換バルブVa,Vb,Vc,Vdの開
閉制御を行う制御入出力部38、圧力センサ18の測定
値をディジタル変換するA/Dコンバータ40等を含ん
でいる。
On the other hand, the determination main unit 20 includes a control operation unit (C
PU) 30, the CPU 30 has a display 32 for displaying various information including determination progress, determination results, and other alarms, a memory 34 for storing various data in the determination progress, determination results, and the like, It includes a setting unit 36 for performing various settings, a control input / output unit 38 for mainly controlling the opening and closing of the switching valves Va, Vb, Vc, Vd, an A / D converter 40 for digitally converting the measured value of the pressure sensor 18 and the like. .

【0019】図2には、エアリーク検出装置10で、ワ
ーク12のエアリーク判定を行う場合に後述のような手
順で圧力測定を行った場合の圧力変化が示されている。
なお、図2に示す圧力変化は、良品に対する測定を行っ
た場合の圧力変化である。
FIG. 2 shows a pressure change when the air leak detection device 10 performs a pressure measurement according to a procedure described later when the air leak of the work 12 is determined.
In addition, the pressure change shown in FIG. 2 is a pressure change when a measurement is performed on a good product.

【0020】ワーク12のエアリーク判定を行う場合、
まず、判定準備として、測定槽14の測定室22に判定
対象のワーク12を投入する。この時、判定本体部20
は、切換バルブVa,Vbのみ開き、測定槽14と、切換
バルブVa,Vbで規定される基準圧力室28とを連通す
る。続いて、測定槽14の上部筐体14aと下部筐体1
4bを密着させ(蓋閉め動作)、測定槽14を実質的密
閉状態にする。この蓋閉め動作により測定室22を含む
空間の内部圧力は上昇してしまうので、判定本体部20
は、切換バルブVa,Vbに続いて、切換バルブVcを開
放し、測定室22及び基準圧力室28の圧力を大気圧
(P0=1013×10Pa)にする。次に、切換バ
ルブVa,Vcを閉じ、切換バルブVdを開放する。この
操作により、基準圧力室28を含む空間が減圧装置16
に接続され、減圧装置16で制御される。この時、減圧
装置16では、例えば、PV=0.4kgf/cm
(392×10Pa)に減圧する。この状態で、切
換バルブVb,Vdを閉じる。すなわち、全ての切換バル
ブを閉じて、基準圧力状態値P1(大気圧から392×
10Pa減圧した状態)の所定容積を有する基準圧力
室28を形成し、判定本体部20は測定準備を完了す
る。
When the air leak of the work 12 is determined,
First, as preparation for determination, the work 12 to be determined is put into the measurement chamber 22 of the measurement tank 14. At this time, the judgment body 20
Opens only the switching valves Va and Vb, and connects the measuring tank 14 with the reference pressure chamber 28 defined by the switching valves Va and Vb. Subsequently, the upper housing 14a and the lower housing 1 of the measurement tank 14
4b is brought into close contact (lid closing operation) to bring the measuring tank 14 into a substantially sealed state. Since the internal pressure of the space including the measurement chamber 22 increases due to the lid closing operation,
Opens the switching valve Vc following the switching valves Va and Vb, and sets the pressure in the measurement chamber 22 and the reference pressure chamber 28 to the atmospheric pressure (P0 = 1013 × 10 2 Pa). Next, the switching valves Va and Vc are closed, and the switching valve Vd is opened. By this operation, the space including the reference pressure chamber 28 is
And is controlled by the decompression device 16. At this time, in the pressure reducing device 16, for example, PV = 0.4 kgf / cm
2 (392 × 10 2 Pa). In this state, the switching valves Vb and Vd are closed. That is, all the switching valves are closed, and the reference pressure state value P1 (from atmospheric pressure to 392 ×
The reference pressure chamber 28 having a predetermined volume of (10 2 Pa reduced pressure) is formed, and the determination main unit 20 completes the measurement preparation.

【0021】判定本体部20に測定開始信号が与えられ
ると、切換バルブVaのみを開放し、測定槽14(測定
室22)と基準圧力室22とを連通させ、測定槽14
(測定室22)の内部圧力を変化(減圧)させる(図2
の経過時間A)。
When a measurement start signal is given to the judgment main body 20, only the switching valve Va is opened, and the measuring tank 14 (measuring chamber 22) and the reference pressure chamber 22 are communicated.
The internal pressure of the (measurement chamber 22) is changed (reduced pressure) (FIG. 2).
Elapsed time A).

【0022】判定本体部20は、切換バルブVaのみを
開放した状態で圧力センサ18を制御して、経過時間B
と経過時間C時点の測定室22の圧力を測定する。続い
て、判定本体部20は、切換バルブVa,Vb,Vdを所
定時間(例えば、経過時間C−D間)開放し、測定室2
2を基準圧力室28の当初の基準圧力状態値P1まで減
圧し、切換バルブVaを閉じて、所定時間経過(経過時
間E)後、測定室22の圧力(PXd)を測定する。この
時、ワーク12にエアリークが存在しない場合、測定室
22の圧力センサ18の測定値はPXd=PVとなる。さ
らに、判定本体部20は、PXd測定後、所定時間(経過
時間F、例えば、2秒)後の測定室22の圧力(PXc)
を測定し、エアリーク判定のための圧力測定を終了す
る。
The determination main unit 20 controls the pressure sensor 18 in a state where only the switching valve Va is opened, and
And the pressure in the measurement chamber 22 at the time point C. Subsequently, the determination main unit 20 opens the switching valves Va, Vb, and Vd for a predetermined time (for example, between elapsed times CD) and sets the measurement chamber 2
2 is reduced to the initial reference pressure state value P1 of the reference pressure chamber 28, the switching valve Va is closed, and after a lapse of a predetermined time (elapsed time E), the pressure (PXd) of the measurement chamber 22 is measured. At this time, if there is no air leak in the work 12, the measurement value of the pressure sensor 18 in the measurement chamber 22 becomes PXd = PV. Further, the determination body 20 determines the pressure (PXc) of the measurement chamber 22 after a predetermined time (elapsed time F, for example, 2 seconds) after the measurement of PXd.
Is measured, and the pressure measurement for air leak determination is completed.

【0023】前述したように、ワーク12のエアリーク
には、大リーク、中リーク、小リークがある。各リーク
の検出は、各測定値に基づく圧力比を基準圧力比と比較
することによって行うことができるが、図2に示すよう
な良品(基準品)が示す基準圧力変化と実際の測定圧力
変化とを比較することによっても行うことができる。例
えば、大リーク(ワーク12に大きな穴があき基準圧力
室22の連通と同時にリークするもの)が存在する場
合、図2における経過時間A−C間の圧力変化値が基準
圧力変化に対してプラス方向にスライドする。また中リ
ーク(大きな穴ではないがリークが顕著に現れる)の場
合、経過時間B−C間の短時間における圧力変化勾配が
基準圧力変化に対して大きくなる。さらに、小リーク
(微小な穴でありリークがゆっくり起きる)の場合、経
過時間E−F間の比較的長時間における圧力変化勾配が
基準圧力変化に対して大きくなる。
As described above, the air leak of the work 12 includes a large leak, a medium leak, and a small leak. The detection of each leak can be performed by comparing the pressure ratio based on each measured value with the reference pressure ratio, and the reference pressure change of the non-defective product (reference product) as shown in FIG. Can also be performed by comparing For example, when there is a large leak (a large hole is formed in the work 12 and leaks at the same time as the communication with the reference pressure chamber 22), the pressure change value between the elapsed times A and C in FIG. Slide in the direction. Further, in the case of a medium leak (not a large hole but a remarkable leak), the pressure change gradient in the short time between the elapsed times B and C becomes larger than the reference pressure change. Further, in the case of a small leak (a minute hole, and the leak occurs slowly), the pressure change gradient over a relatively long time between the elapsed times EF becomes larger than the reference pressure change.

【0024】このように、良品(エアリーク無し)と不
良品(エアリーク有り)は、測定圧力を比較することに
より判定できる。従って、ワーク12の形状ばらつき等
を考慮して、基準圧力に所定の判定余裕値を加味した判
定値を設定し、その判定値と測定値との比較を行うこと
により、エアリークの有無判定を所定の精度で行うこと
ができる。
As described above, a good product (without air leak) and a defective product (with air leak) can be determined by comparing measured pressures. Therefore, in consideration of the variation in the shape of the work 12, etc., a judgment value in which a predetermined judgment allowance value is added to the reference pressure is set, and the judgment value is compared with the measured value to judge whether or not there is an air leak. Accuracy.

【0025】ところで、圧力は、湿度や温度等の測定環
境の変動や測定装置の経時劣化等により変化してしま
う。この判定環境の変化に基づく圧力変化の影響は、比
較的長時間で僅かな圧力変化を観察する小リーク判定時
に大きく影響する。つまり、判定環境が変動したことに
より測定圧力値が増減すると、固定された判定値に基づ
き許容される範囲に納まっていたワーク12がリークを
有する不良品であると判定されたり、逆に不良品がリー
ク無しと判定されてしまう。
The pressure changes due to fluctuations in the measurement environment such as humidity and temperature, aging of the measurement device, and the like. The influence of the pressure change based on the change of the determination environment greatly affects the small leak determination in which a slight pressure change is observed for a relatively long time. In other words, when the measured pressure value increases or decreases due to a change in the determination environment, the work 12 that has fallen within the allowable range based on the fixed determination value is determined to be a defective product having a leak, or conversely, a defective product. Is determined to have no leak.

【0026】そこで、本実施形態においては、判定環境
の変化を考慮した判定値を採用している。判定値に判定
環境の変化を考慮するために、本実施形態においては、
良品判定が行われる度に、その時の圧力測定値を用い
て、判定値の更新を行う。具体的には、最新の圧力測定
値を含む所定数の圧力測定値の平均値を求め、その平均
値に判定余裕値を加算して判定値を算出する。そのた
め、図1に示す判定本体部20のCPU30は、平均値
算出部42と判定値算出部44を含んでいる。
Therefore, in the present embodiment, a judgment value in consideration of a change in the judgment environment is adopted. In order to consider a change in the determination environment in the determination value, in the present embodiment,
Each time a non-defective item is determined, the determined value is updated using the pressure measurement value at that time. Specifically, an average value of a predetermined number of pressure measurement values including the latest pressure measurement value is obtained, and a judgment margin value is added to the average value to calculate a judgment value. Therefore, the CPU 30 of the determination main unit 20 illustrated in FIG. 1 includes an average value calculation unit 42 and a determination value calculation unit 44.

【0027】図3には、判定本体部20が行う具体的な
判定値(更新判定値)の算出手順が示されている。ま
た、図4には、更新判定値の生成とそれによる判定概念
を説明する説明図が示されている。
FIG. 3 shows a specific procedure for calculating a judgment value (update judgment value) performed by the judgment main unit 20. FIG. 4 is an explanatory diagram illustrating generation of an update determination value and a concept of determination based on the generation.

【0028】まず、更新判定値算出準備として、基準品
の測定を行う(S100)。この基準品は、全くエアリ
ークが無いことが確認されているワーク12であり、前
述した手順で、通常の判定を行う環境で行われる。そし
て小リーク検出期間(図2における経過時間E−F)に
おける測定圧力値(圧力変化量)P0(図4参照)を算
出する(S101)。続いて、算出した測定値に基づい
て、初期判定値J0を決定する(S102)。この初期
判定値J0は、更新判定値が算出可能になるまで有効な
判定値であり、前記測定値P0に所定の判定余裕値(ワ
ーク12の形状ばらつき等による測定値ばらつきを考慮
した管理幅)を加算したものである。この初期判定値J
0は、図1における設定器36により作業者によって設
定される固定値である(図4における判定ラインL0の
水平部分)。
First, a reference product is measured in preparation for calculating an update determination value (S100). This reference product is the work 12 for which it has been confirmed that there is no air leak at all, and is performed in an environment where a normal determination is made in the above-described procedure. Then, a measured pressure value (pressure change amount) P0 (see FIG. 4) in the small leak detection period (elapsed time EF in FIG. 2) is calculated (S101). Subsequently, an initial determination value J0 is determined based on the calculated measurement value (S102). The initial judgment value J0 is a judgment value that is valid until the update judgment value can be calculated, and a predetermined judgment margin value (a management width in consideration of the measurement value variation due to the shape variation of the work 12, etc.) is added to the measurement value P0. Is added. This initial judgment value J
0 is a fixed value set by the operator with the setting device 36 in FIG. 1 (the horizontal portion of the determination line L0 in FIG. 4).

【0029】そして、判定本体部20は、初期判定値J
0に基づいて設定器36で設定された所定サンプル数
(例えば、50個)の良品データが蓄積されるまでワー
ク12に対してリーク判定を行い、良品判定されたワー
ク12の測定値のみを順次メモり34に蓄積する(S1
03)。なお、図4において、判定ラインL0(この時
点では、平行部分のみ)より高い圧力変化量が検出され
たワーク12が不良品(×表示)である。
Then, the judgment main unit 20 sets the initial judgment value J
The leak determination is performed for the work 12 until the non-defective data of a predetermined number of samples (for example, 50) set by the setting unit 36 based on 0 is accumulated, and only the measured values of the non-defective work 12 are sequentially determined. It is stored in the memory 34 (S1
03). In FIG. 4, the work 12 in which a pressure change amount higher than the determination line L0 (at this time, only the parallel portion) is detected is a defective product (x display).

【0030】一方、CPU30に含まれる平均値算出部
42は、常時メモリ34からのデータを読み出し、平均
値を算出する。そして、所定サンプル数のデータが取得
できた時点で、初期平均値を確定し、その初期平均値に
前記判定余裕値を加算して、更新判定値J1を生成し
(S104)、CPU30で判定基準としている初期判
定値J0を更新判定値J1に更新する(S105)。前述
したように、この更新判定値J1が生成されるまで、固
定値である初期判定値J0によるリーク判定が行われる
が、この時算出される圧力変化量は、現在の判定環境
(現在の湿度や温度や測定装置の状態に基づく環境)下
で得られたデータであるため、更新判定値J1には、判
定環境が加味されていることになる。
On the other hand, an average value calculation section 42 included in the CPU 30 always reads data from the memory 34 and calculates an average value. Then, when data of a predetermined number of samples can be obtained, the initial average value is determined, the judgment margin value is added to the initial average value, and an update judgment value J1 is generated (S104). Is updated to the update determination value J1 (S105). As described above, until the update determination value J1 is generated, the leak determination is performed based on the fixed initial determination value J0. The amount of pressure change calculated at this time depends on the current determination environment (current humidity And the environment based on the temperature and the state of the measuring device), the update determination value J1 includes the determination environment.

【0031】CPU30は、更新判定値J1を得ると、
当該更新判定値J1に基づいてリーク判定を行い、良品
と判定された場合(S106)、当該良品判定を行った
時に取得した最新の圧力測定値(最新データ)を含む所
定サンプル数のデータ、つまり、使用サンプル数が50
個であると設定されている場合、(S103)で取得し
た2番目から50番目のデータと合わせた50個のデー
タに基づき、平均値算出部42が移動平均値(最終的に
は、図4中のラインHを形成する)を算出し、判定値算
出部44が判定余裕値を加算した更新判定値J2を算出
する(S107)。そして、CPU30は判定基準とし
ていた更新判定値J1を更新判定値J2に更新する(S1
08)。
When the CPU 30 obtains the update judgment value J1,
Leak determination is performed based on the updated determination value J1, and when it is determined to be non-defective (S106), data of a predetermined number of samples including the latest pressure measurement value (latest data) acquired at the time of performing the non-defective determination, that is, , 50 samples used
If the number is set as the number of data, the average value calculation unit 42 determines the moving average value (finally, FIG. 4) based on the 50 data including the second to 50th data acquired in (S103). Then, the judgment value calculation unit 44 calculates an update judgment value J2 to which the judgment margin value is added (S107). Then, the CPU 30 updates the update determination value J1 used as the determination criterion to the update determination value J2 (S1).
08).

【0032】以下、同様に、更新された更新判定値に基
づいて良品判定が行われる度に、平均値算出部42によ
る移動平均値の更新及び、その移動平均値に基づく更新
判定値(J3・・・)を生成し更新を行う。その結果、
判定環境に追従した判定値によるリーク判定を行うこと
ができる。もちろん、この時、リークが存在する不良品
に対しては、必要に応じてデータを保存するのみで、判
定値の更新等には利用しない。また、ディスプレ32に
図4に示すような変移データを表示し、判定状態をモニ
タするようにしてもよい。このような表示を行うことに
より、作業者は判定環境の変化の把握が容易であり、エ
アリーク判定管理を容易に行うことができる。
Similarly, every time a non-defective item is determined based on the updated update determination value, the moving average value is updated by the average value calculation unit 42 and the update determination value (J3 ·・ ・) Is generated and updated. as a result,
Leak determination can be performed based on a determination value that follows the determination environment. Of course, at this time, for a defective product having a leak, only data is stored as necessary, and the data is not used for updating the determination value. Also, the transition data as shown in FIG. 4 may be displayed on the display 32 to monitor the determination state. By performing such a display, the operator can easily grasp the change in the determination environment and can easily perform the air leak determination management.

【0033】上述したように、更新判定値を順次生成し
更新を繰り返すことにより、図4に示すように、実質的
に判定環境の変化に追従した判定ラインL0を得ること
ができる。その結果、固定の判定値に基づいて判定を行
う場合に比べて、判定環境の変化によるリーク有無の誤
判定が低減され、測定者の管理負荷等も低減することが
できる。なお、設定器36により、移動平均値を算出す
る際のサンプル数の変更が可能なので、装置の演算負荷
とのバランスを考慮しつつサンプル数を増加することに
より安定した信頼度の高い更新判定値を得ることも可能
になる。また、管理幅に関しても設定器36により適宜
変更可能なので、容易に判定精度の調整を行うことがで
きる。
As described above, by sequentially generating the update determination value and repeating the update, it is possible to obtain the determination line L0 substantially following the change of the determination environment as shown in FIG. As a result, erroneous determination of the presence / absence of a leak due to a change in the determination environment is reduced as compared with the case where the determination is performed based on the fixed determination value, and the management load of the measurer can be reduced. Since the number of samples when calculating the moving average value can be changed by the setting unit 36, a stable and highly reliable update determination value can be obtained by increasing the number of samples while considering the balance with the operation load of the apparatus. It is also possible to obtain. In addition, the management width can be appropriately changed by the setting device 36, so that the determination accuracy can be easily adjusted.

【0034】ところで、前述したように圧力測定値に基
づいて、更新判定値の生成を繰り返す場合、エアリーク
検出装置10側の経時変化による性能劣化、例えば、測
定槽14の密閉不良や切換バルブVa等の動作不良、圧
力センサ18の精度低下等が発生した場合にも更新判定
値は順次変化して、例えば図4に判定ラインL1,L2,
L3等で示すようになる場合がある。このような場合、
エアリーク検出装置10側の異常が原因の場合、判定結
果に対する信頼度が低下する。そこで、このような装置
異常の疑いを検出するために、本実施形態のエアリーク
検出装置10は、更新判定値に対して異常更新値を設定
している。図4の場合、上限異常更新値がラインS1で
示され、下限異常更新値がラインS2で示されている。
判定本体部20はラインS1,S2を越えて更新判定値が
算出された場合、判定異常であると判断して、判定作業
の中止を促す警報(ブザーやメッセージ等の音声警報や
画面表示やランプ点灯等によるシグナル警報等)を出力
し、エアリーク検出装置10の管理者に通報する。管理
者は、この警報を確認すると、例えば、装置の点検を行
うことになる。その結果、装置に劣化等異常が存在すれ
ば、異常箇所の修復を行った後、図3に示す手順に従っ
て、再度、初期判定値J0からの設定を行う。一方、装
置側に異常が認められない場合、測定環境の確認を行っ
た後、測定環境の変化による変動であると判断できれ
ば、ラインS1,S2の修正を行い、判定ラインL1等に
よる判定を継続する。このように、判定値を自動更新す
る場合でも、装置性能の維持管理を実施し、信頼度の高
いリーク判定を行うことができる。
As described above, when the generation of the update determination value is repeated based on the pressure measurement value, performance degradation due to a change with time on the air leak detection device 10 side, for example, poor sealing of the measurement tank 14, switching valve Va, etc. In the case where the operation failure of the pressure sensor 18 or the decrease in accuracy of the pressure sensor 18 occurs, the update determination value sequentially changes. For example, the determination lines L1, L2,
In some cases, it is indicated by L3 or the like. In such a case,
If the cause is an abnormality on the side of the air leak detection device 10, the reliability of the determination result decreases. Therefore, in order to detect such a suspicion of a device abnormality, the air leak detection device 10 of the present embodiment sets an abnormal update value to the update determination value. In the case of FIG. 4, the upper limit abnormal update value is indicated by a line S1, and the lower limit abnormal update value is indicated by a line S2.
When the update determination value is calculated beyond the lines S1 and S2, the determination body unit 20 determines that the determination is abnormal, and issues an alarm (a voice alarm such as a buzzer or a message, a screen display or a lamp) to prompt the user to stop the determination operation. (E.g., signal warning by lighting) or the like, and notifies the administrator of the air leak detection device 10. When the administrator confirms the alarm, the administrator, for example, checks the device. As a result, if an abnormality such as deterioration is present in the apparatus, the abnormal part is repaired, and then the setting from the initial determination value J0 is performed again according to the procedure shown in FIG. On the other hand, if no abnormality is observed on the device side, after confirming the measurement environment, if it can be determined that the change is caused by a change in the measurement environment, the lines S1 and S2 are corrected, and the determination is continued by the determination line L1 and the like I do. As described above, even when the determination value is automatically updated, it is possible to perform the maintenance and management of the apparatus performance and perform the leak determination with high reliability.

【0035】なお、本実施形態では、比較的長い時間に
僅かずつ圧力変化を起こす小リークの判定に関して述べ
たが、中リークや大リークの判定に関しても同様に、測
定環境に追従させながら判定値を更新するようにして
も、小リークの場合と同様に判定信頼度を向上すること
ができる。
Although the present embodiment has been described with respect to the determination of a small leak that causes a slight pressure change in a relatively long time, the determination of a medium leak or a large leak is similarly performed while following the measurement environment. Is updated, the determination reliability can be improved as in the case of a small leak.

【0036】また、本実施形態では、直圧式のエアリー
ク検出装置の一例として、測定槽と異なる圧力状態を形
成可能な基準圧力室との連通を切り換えることにより、
測定槽の容積を維持したまま測定槽の圧力を所定量変化
させるタイプのものを例に取って説明したが、測定槽の
容積を所定容積から変化させることにより減圧または加
圧して測定槽の圧力を所定量変化させるタイプエアリー
ク検出装置においても、エアリーク判定時に上述のよう
に測定環境に追従させながら判定値を更新することによ
り同様の効果を得ることができる。
In this embodiment, as an example of a direct pressure type air leak detection device, the communication between the measurement tank and a reference pressure chamber capable of forming a different pressure state is switched,
The type in which the pressure of the measuring tank is changed by a predetermined amount while maintaining the volume of the measuring tank has been described as an example, but the pressure of the measuring tank is reduced or increased by changing the volume of the measuring tank from the predetermined volume. The same effect can be obtained by updating the determination value while following the measurement environment as described above at the time of air leak determination in the type of air leak detection device that changes a predetermined amount.

【0037】[0037]

【発明の効果】本発明によれば、測定環境の変化や測定
機の経時変化が生じた場合でも、誤判定を低減可能であ
り、被測定密閉容器に対するリーク判定の精度を維持す
ることができる。また、誤判定の低減により作業者の管
理負担も低減することができる。
According to the present invention, erroneous determination can be reduced even if the measurement environment changes or the measuring instrument changes over time, and the accuracy of leak determination for the sealed container to be measured can be maintained. . Further, the management burden on the worker can be reduced by reducing the erroneous determination.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の実施形態に係るエアリーク有無判定
方法を実現するエアリーク検出装置の構成概念を説明す
る説明図である。
FIG. 1 is an explanatory diagram illustrating a configuration concept of an air leak detection device that realizes an air leak presence / absence determination method according to an embodiment of the present invention.

【図2】 本発明の実施形態に係るエアリーク有無判定
方法を実現するエアリーク検出装置により測定を行った
場合の圧力変化例を示す説明図である。
FIG. 2 is an explanatory diagram illustrating an example of a pressure change when measurement is performed by an air leak detection device that realizes an air leak presence / absence determination method according to an embodiment of the present invention.

【図3】 本発明の実施形態に係るエアリーク有無判定
方法に基づく判定値の更新手順を説明する説明図であ
る。
FIG. 3 is an explanatory diagram illustrating a procedure for updating a determination value based on an air leak presence / absence determination method according to an embodiment of the present invention.

【図4】 本発明の実施形態に係るエアリーク有無判定
方法に基づく更新判定値の推移を説明する説明図であ
る。
FIG. 4 is an explanatory diagram illustrating a transition of an update determination value based on an air leak presence / absence determination method according to the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

10 エアリーク検出装置、12 ワーク、12a 内
部空間、14 測定槽、14a 上部筐体、14b 下
部筐体、16 減圧装置、18 圧力センサ、20 判
定本体部、22 測定室、22a 残余空間、24 O
リング、26流路、28 基準圧力室、Va,Vb,V
c,Vd 切換バルブ、30 制御演算部(CPU)、3
2 ディスプレイ、34 メモリ、36 設定器、38
制御入力部、40 A/Dコンバータ、42 平均値
算出部、44 判定値算出部。
Reference Signs List 10 air leak detection device, 12 work, 12a internal space, 14 measurement tank, 14a upper housing, 14b lower housing, 16 decompression device, 18 pressure sensor, 20 judgment main body, 22 measurement room, 22a residual space, 24 O
Ring, 26 flow paths, 28 reference pressure chambers, Va, Vb, V
c, Vd switching valve, 30 control operation unit (CPU), 3
2 display, 34 memory, 36 setting device, 38
Control input unit, 40 A / D converter, 42 average value calculation unit, 44 judgment value calculation unit.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉岡 秀和 京都府京都市右京区花園土堂町10番地 オ ムロン株式会社内 Fターム(参考) 2G067 AA44 BB31 DD02 EE01  ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hidekazu Yoshioka 10th Hanazono Todocho, Ukyo-ku, Kyoto, Kyoto Prefecture F-term in Omron Corporation (reference) 2G067 AA44 BB31 DD02 EE01

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 所定の初期槽内圧力を有し、かつ所定容
積の密閉空間を有する測定槽に被測定密閉容器を投入
し、前記初期槽内圧力を所定量変化させた時の測定槽内
圧力の圧力変化値に基づいて被測定密閉容器のエアリー
クの有無を判定する密閉容器のエアリーク有無判定方法
であって、 エアリーク無しと判定された所定数の被測定密閉容器の
圧力変化値の平均値を算出し、当該平均値に判定余裕値
を加算して更新判定値を算出するステップと、 前記更新判定値に基づき後続の被測定密閉容器の判定を
行い、エアリーク無しと判定された被測定密閉容器の圧
力変化値を前記平均値算出の最新データとして含むステ
ップと、 を含むことを特徴とする密閉容器のエアリーク有無判定
方法。
1. A closed vessel to be measured is charged into a measuring tank having a predetermined initial tank pressure and having a closed space of a predetermined volume, and the inside of the measuring tank when the initial tank pressure is changed by a predetermined amount. A method for determining the presence or absence of air leak in a sealed container to be measured based on a pressure change value of a pressure, wherein the method is a method for determining the presence or absence of air leak in a sealed container. Calculating an update judgment value by adding a judgment allowance value to the average value, and judging a subsequent sealed container to be measured based on the update judgment value, and the measured sealed container determined to have no air leak. Including a step of including a pressure change value of the container as the latest data for calculating the average value.
【請求項2】 請求項1記載の方法において、 測定状況に応じて、少なくとも平均値の算出データ数ま
たは判定余裕値の設定変更を行うステップを含むことを
特徴とする密閉容器のエアリーク有無判定方法。
2. The method according to claim 1, further comprising the step of changing at least the number of data calculated as an average value or the setting of a judgment allowance value according to a measurement situation. .
【請求項3】 請求項1または請求項2記載の方法にお
いて、 前記更新判定値が異常更新値を越えて更新された場合、
警報出力を行うステップを含むことを特徴とする密閉容
器のエアリーク有無判定方法。
3. The method according to claim 1, wherein the update determination value is updated beyond an abnormal update value.
A method for determining the presence or absence of air leak in a closed container, comprising a step of outputting an alarm.
JP2000129659A 2000-04-28 2000-04-28 Method for judging presence/absence of air leak of sealed container Pending JP2001311678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000129659A JP2001311678A (en) 2000-04-28 2000-04-28 Method for judging presence/absence of air leak of sealed container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000129659A JP2001311678A (en) 2000-04-28 2000-04-28 Method for judging presence/absence of air leak of sealed container

Publications (1)

Publication Number Publication Date
JP2001311678A true JP2001311678A (en) 2001-11-09

Family

ID=18638897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000129659A Pending JP2001311678A (en) 2000-04-28 2000-04-28 Method for judging presence/absence of air leak of sealed container

Country Status (1)

Country Link
JP (1) JP2001311678A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107454A (en) * 2008-10-31 2010-05-13 Yamatake Corp Leak detection system and method for sealed container
KR101283618B1 (en) * 2011-12-12 2013-07-08 주식회사 유라코퍼레이션 Apparatus and method for testing air leak

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107454A (en) * 2008-10-31 2010-05-13 Yamatake Corp Leak detection system and method for sealed container
KR101283618B1 (en) * 2011-12-12 2013-07-08 주식회사 유라코퍼레이션 Apparatus and method for testing air leak

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