JP2001305977A - Device and method for manufacturing electrooptical apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing electrooptical apparatus which can control the space between two pieces of substrates of an electrooptical apparatus with precision. SOLUTION: A controller 300 for controlling the space between two pieces of substrates is constituted of a mounting bed 310 for mounting a liquid crystal device 200, pressure adjusting parts 351a, 351b, 352a, 352b for adjusting pressure to a mother substrate 210, a light source 360 for irradiating the liquid crystal device 200 with light, a CCD camera 320 for detecting display color displayed in the liquid crystal device 200 and a control part 330 for transmitting pressure controlling signals to the pressure adjusting parts based on correction information calculated by comparing detection result with comparison information.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of an electro-optical device in which an electro-optical material is sandwiched between a pair of substrates, and to the technical field of controlling a gap between a pair of substrates.

[0002]

2. Description of the Related Art An electro-optical device, for example, an active matrix type liquid crystal device using liquid crystal as an electro-optical material has a structure in which a liquid crystal layer is sandwiched between a counter substrate and a TFT array substrate. A counter electrode is arranged on the counter substrate, and the TFT is
On the array substrate, a thin film transistor (hereinafter, referred to as a TFT) as a switching element and a pixel electrode electrically connected to the TFT are arranged.

In a liquid crystal device, display is performed using an optical change of a liquid crystal layer due to a potential difference between a counter electrode and a pixel electrode, and display characteristics are affected by a gap between two substrates, that is, a thickness of the liquid crystal layer. You. For this reason, it is important to make the thickness of the liquid crystal layer uniform in the plane of the substrate and to make the thickness of the liquid crystal layer a desired thickness.

Conventionally, the control of the thickness of the liquid crystal layer has been performed as follows. First, a counter substrate and a TFT array substrate which are bonded together with a sealing material formed along the outer periphery of the substrate except for the liquid crystal injection port are prepared. Next, liquid crystal is injected from a liquid crystal injection port into a region surrounded by the sealing material while irradiating the liquid crystal device with light and visually observing a display color displayed on the liquid crystal device. Then, when it is determined by visual observation that the desired display color has been obtained, the injection of the liquid crystal is stopped, and the liquid crystal injection port is sealed with a sealing material.

[0005]

However, in the above-described gap control between the substrates, it is difficult to determine a desired display color, it requires skill of an operator, and the liquid crystal device always has stable product characteristics. Was difficult to get.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described problems, and has as its object to provide an electro-optical device manufacturing apparatus and a manufacturing method capable of accurately controlling a gap between two substrates. .

[0007]

An electro-optical device manufacturing apparatus according to the present invention includes an electro-optical device in which an electro-optical material is sandwiched between a first substrate and a second substrate, in contact with the first substrate. A mounting table comprising a light-transmitting member having a concave portion forming a gap with the electro-optical device, and a pressure for adjusting a pressure applied to the first substrate by adjusting a pressure in the gap. Adjustment unit, via the mounting table, an illumination unit that irradiates light to the electro-optical device, and a detection unit that detects a display color displayed on the electro-optical device that is irradiated with the light, A control unit that transmits a pressure control signal to the pressure adjustment unit based on a detection result of the detection unit.

According to such a configuration of the present invention, a positive pressure or a negative pressure is applied only to the first substrate on one side of the two substrates arranged to face each other, whereby the gap between the two substrates is reduced. Control. This makes it possible to detect the display color of the entire substrate as compared with the case where the inter-substrate control is performed by applying a positive pressure or a negative pressure to both of the two substrates, and restricts the detection point of the inter-substrate interval. I will not receive it. Further, since there is no control head above the second substrate, the substrate can be easily set and reset, and automation can be facilitated. Furthermore,
Since the control head is not provided above the second substrate, the sealing material application head can be arranged at an arbitrary position, and the application head can move on the shortest path. As a result, it is possible to apply the sealing material at the optimal display color timing of the inter-substrate spacing, thereby achieving an improvement in quality and an improvement in production efficiency.

[0009] The mounting table may further include a suction port for suctioning an outer peripheral portion of the electro-optical device. According to such a configuration, the electro-optical device can be suction-held through the suction port, and the electro-optical device is separated from the mounting table when a positive pressure is applied to the first substrate of the electro-optical device. Nothing.

A plurality of the electro-optical devices are disposed on the mounting table, and the mounting table has a plurality of the suction ports corresponding to each of the electro-optical devices, and is provided through the suction port. The start and release of suction of all the electro-optical devices are as follows:
It is performed individually for each electro-optical device.
According to such a configuration, release of the suction of the electro-optical device can be determined according to the positive or negative pressure applied to the first substrate of each electro-optical device. When a positive pressure is applied to the first substrate, by performing the inter-substrate control while maintaining the suction holding, there is an advantage that the electro-optical device does not separate from the mounting table. When a negative pressure is applied to the substrate, if the inter-substrate control is performed while maintaining the suction holding, the first substrate is distorted, and it is difficult to obtain an electro-optical device having a uniform inter-substrate distance in the plane. . Therefore, when applying a negative pressure to the first substrate, it is desirable to release the suction holding. Therefore, when performing the gap control of a plurality of electro-optical devices, the gap control necessary for each electro-optical device is different, so that the start and release of suction can be individually adjusted corresponding to each electro-optical device. It is desirable to provide a suction port.

[0011] Further, a plurality of the electro-optical devices are arranged on the mounting table, the mounting table has a plurality of the concave portions corresponding to each of the electro-optical devices, and the pressure adjusting section includes: The pressure in the gap is individually adjusted for each of the electro-optical devices. According to such a configuration, when performing the gap control of a plurality of electro-optical devices, the gap control necessary for each electro-optical device is different, so that it is possible to individually adjust the gap control for each electro-optical device. It is desirable to provide pressure adjusting means.

The electro-optical device may further include a first substrate and a second substrate formed along an outer peripheral portion of the substrate except an electro-optical material injection port for injecting the electro-optical material.
The device further includes a sealing material supply unit having a sealing material for bonding to the substrate, and supplying a sealing material for sealing the electro-optical material injection port. According to such a configuration, the gap control step between the two substrates and the sealing step can be performed consecutively, thereby improving the working efficiency and eliminating the need for providing a device for the sealing step, thereby improving the overall performance. Work space can be reduced.

A method for manufacturing an electro-optical device according to the present invention comprises:
(A) On a mounting table made of a light transmitting member having a concave portion,
(B) placing an electro-optical device having an electro-optical material sandwiched between a first substrate and a second substrate so as to cover the concave portion, with the first substrate in contact with the mounting table; A step of irradiating the electro-optical device with light through the mounting table; (c) a step of detecting the display color irradiated with the light and displayed on the electro-optical device; Calculating the correction information by comparing the display color detection information and the comparison information; and (e) adjusting the pressure in the gap formed by the concave portion and the electro-optical device based on the correction information. Adjusting the pressure applied to the first substrate to adjust the gap between the first substrate and the second substrate.

According to such a configuration of the present invention, by applying a positive pressure or a negative pressure to only one of the first substrates of the two substrates arranged opposite to each other, the gap between the two substrates is reduced. Control. This makes it possible to detect the display color of the entire substrate as compared with the case where the inter-substrate control is performed by applying a positive pressure or a negative pressure to both of the two substrates, and restricts the detection point of the inter-substrate interval. I do not receive. Also, the second
Since there is no control head above the substrate, it is easy to set and reset the substrate, which facilitates automation. Further, since no control head is provided above the second substrate, the sealing material application head can be arranged at an arbitrary position, and the application head can be moved in the shortest path. As a result, it is possible to apply the sealing material at the optimum display color timing of the inter-substrate interval, and to achieve improvement in quality and production efficiency. In addition, since the control of the gap between the two substrates is performed by mechanically comparing the detection information of the display color and the comparison information by the control unit, the control by the operator is different from the conventional visual control. An electro-optical device of stable quality without unevenness can be obtained.

Further, the electro-optical device is characterized in that the outer peripheral portion of the electro-optical device is sucked and held by a suction port provided in the mounting table, and is mounted on the mounting table. According to such a configuration, the electro-optical device can be suction-held through the suction port, and the first electro-optical device can be held.
When a positive pressure is applied to the substrate, the electro-optical device does not separate from the mounting table.

Further, in the step (e), when the pressure in the gap is reduced based on the correction information,
The suction holding is released. According to such a configuration, the pressure in the gap is reduced, that is, the first pressure is reduced.
When a negative pressure is applied to the substrate, by performing inter-substrate control in a state in which the suction holding is released, the control can be performed in a state in which no extra strain is generated in the substrate, so that uniform control over the surface is achieved. An electro-optical device having a distance between the substrates can be obtained.

Also, a plurality of the electro-optical devices are arranged on the mounting table, and a gap between the first substrate and the second substrate is controlled individually for each of the electro-optical devices. Features. According to such a configuration, when the gap control of a plurality of electro-optical devices is performed, the gap control necessary for each electro-optical device is different, so that the gap control is individually performed for each electro-optical device. It is desirable that this be done.

The electro-optical device may further comprise a first substrate and a second substrate formed along an outer peripheral portion of the substrate except for an electro-optical material injection port for injecting the electro-optical material.
A sealing material for bonding to the substrate, and after the step (e),
(F) The method further comprises the step of supplying a sealing material for sealing the electro-optical material injection port. According to such a configuration, the gap control step and the sealing step between the two substrates can be performed continuously while the electro-optical device is maintained on the same mounting table, and the working efficiency is improved. .

In the step of supplying a sealing material for sealing the electro-optical material injection port, the pressure applied to the first substrate is adjusted, and the sealing material is supplied to the first substrate and the second substrate. And a step of drawing into the gap. According to such a configuration, the electro-optical material injection port can be reliably sealed.

The step of drawing the sealing material into the gap between the first substrate and the second substrate optically detects the amount drawn into the electro-optical device, and based on the detection result, The method includes a step of releasing the pressure applied to one substrate and stopping the drawing in of the sealing material. According to such a configuration, the amount of the sealing material drawn between the two substrates can be controlled, so that it is possible to prevent the sealing material from spreading to a region that is involved as a display region.

Another method of manufacturing an electro-optical device according to the present invention is as follows.
(A) On a mounting table made of a light transmitting member having a concave portion,
An electro-optical device, which covers the recess and has an electro-optical material sandwiched between a first substrate and a second substrate via an electro-optical material injection port, is mounted with the first substrate in contact with the mounting table. Placing; and (b) dropping a sealing material onto the electro-optical material inlet; and (c) irradiating the electro-optical material inlet with light via the mounting table. (D) a step of irradiating the light and detecting an amount of the sealing material drawn into the electro-optical material injection port; and (e) comparing the detection information with comparison information, and based on a detection result, Adjusting the pressure in the gap formed by the concave portion and the electro-optical device to adjust the amount of the sealing material drawn into the electro-optical material injection port.

According to such a configuration of the present invention, the amount of the sealing material drawn between the two substrates can be controlled, so that the sealing material is prevented from spreading to a region involved as a display region. can do.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to a TN liquid crystal device as an electro-optical device using a TN (twisted nematic) liquid crystal having a twist of 90 degrees as an electro-optical material. The manufacturing apparatus and the manufacturing method will be described with reference to the drawings. In each of the drawings, the scale of each layer and each member is different in order to make each layer and each member have a size recognizable in the drawings.

(Structure of Liquid Crystal Device) First, the structure of the liquid crystal device will be described. FIG. 3 is a plan view showing a state in which a counter substrate is arranged corresponding to each TFT array substrate on a mother substrate on which a plurality of TFT array substrates are arranged. FIG. 6 is a plan view of the liquid crystal device, and FIG. 7 is a line of FIG.
It is sectional drawing of HH '. FIG. 6 is a plan view of the TFT array substrate together with the components formed thereon as viewed from the counter substrate side.

As shown in FIG. 7, the liquid crystal device 200
The liquid crystal layer 50 is sandwiched between the TFT array substrate 210a on which the FT 30 is disposed and the counter substrate 220.
The gap between the TFT array substrate 210a and the counter substrate 220 is held by a spacer mixed in a sealing material described later, and no spacer is arranged in the display area. As the liquid crystal layer 50, TN (twisted nematic) liquid crystal is used, and the liquid crystal molecules are arranged in a state of being twisted by 90 degrees in a state where no voltage is applied.

As shown in FIGS. 6 and 7, the liquid crystal device 200
Is provided with a sealing material 52 formed in a rectangular shape excluding the liquid crystal injection port 52a along the outer peripheral portion of the substrate.
The T-array substrate 210a and the opposing substrate 220 are bonded and fixed by a sealing material 52. On the counter substrate 220, a frame-shaped frame light-shielding layer 53 is provided along the seal material 52 in a region surrounded by the seal 52 material. Further, in a region surrounded by the frame light-shielding layer 53, the light-shielding layers 23 formed in the same process as the frame light-shielding layer in a lattice shape are arranged. The liquid crystal 50 is injected through a liquid crystal injection port 52a,
The liquid crystal injection port 52a is sealed with a sealing material 54. Accordingly, the liquid crystal 50 is held in a region surrounded by the TFT array substrate 210, the counter substrate 220, the sealant 52, and the sealant 54. In a region outside the sealing material 52,
Data line drive circuit 101 and a plurality of external circuit connection terminals 1
No. 02 is provided along one side of the TFT array substrate 210a, and the scanning line driving circuit 104 is provided along a side adjacent to this one side. The scanning line driving circuit 104 and the data line driving circuit 101 are electrically connected to the external connection terminal 102 via a lead wiring. In at least one of the corners of the counter substrate 220,
A conductive material 106 for providing electrical continuity between the TFT array substrate 210a and the counter substrate 220 is provided. The area surrounded by the frame light-shielding layer 53 functions as the display area 201.

In the TFT array substrate 210a, for example, a scanning line and a data line (not shown) which intersect each other are arranged on a quartz substrate 10, and a switching element 30 is formed at each intersection of the scanning line and the data line. A pixel electrode (not shown) is arranged in a region defined by the lines and the data lines, and an alignment film (not shown) covering these components is arranged.

The manufacturing apparatus according to the present embodiment is for simultaneously controlling gaps between substrates of a plurality of liquid crystal devices. Correspondingly, as shown in FIG. 3, the liquid crystal device has a plurality of TFT array substrates 210 formed on a mother substrate 210.
A mother substrate 210 in which the counter substrate 220 is bonded to “a” is prepared.

More specifically, on a mother substrate 210 on which a plurality of TFT array substrates 210a are arranged, opposing substrates 220 are adhered to the respective TFT array substrates 210a via sealing materials 52. Each TF
The T array substrate 210a and the opposing substrate 220 are arranged with a gap therebetween, and a liquid crystal 50 is held in a region surrounded by the substrate and the sealing material 52. On the control device 300, a mother substrate 210 in which the liquid crystal 50 is injected into the liquid crystal device and the liquid crystal injection port 52a is not yet sealed is placed.

Then, the TFT array substrate 21 of the liquid crystal device
When the control of the gap between Oa and the counter substrate 220 ends, the liquid crystal injection port 52a is sealed by the sealing material 54. Thereafter, the mother substrate 210 is replaced with the individual TFT array substrates 210.
By cutting into a, the liquid crystal device 200 can be separated.

(Liquid Crystal Device Manufacturing Apparatus) Next, a liquid crystal device manufacturing apparatus will be described with reference to FIGS.

The manufacturing apparatus according to the present embodiment is a control apparatus for controlling the distance between the TFT array substrate and the opposing substrate, and is a control apparatus capable of simultaneously controlling the inter-substrate gaps of a plurality of liquid crystal devices. 1 is a sectional view of the control device, and FIG. 2 is a schematic plan view of a mounting table of the control device. FIG. 3 is a plan view showing a state in which a counter substrate is arranged corresponding to each TFT array substrate on a mother substrate on which a plurality of TFT array substrates are arranged. FIG. 4 is a diagram illustrating a method for controlling the gap between two substrates. FIG. 1 corresponds to a cross-sectional view of the control device taken along line AA ′ in FIG.

As shown in FIG. 1, the basic configuration of the control device 300 is such that the liquid crystal device 200 is mounted and the concave portions 312a, 312
, A mounting table 310 having suction ports 311a, 311b, a light source 360 as an illumination unit for irradiating the liquid crystal device with light through the mounting table 310, and a light source 360 illuminating the liquid crystal device. , A concave portion 312a, 312b..., And a suction port 3 as a detecting portion for detecting a display color displayed on the liquid crystal device by the light of
.. And the liquid crystal device 200, the pressure adjusting units 351a, 351 for adjusting the pressure in the voids formed by the liquid crystal device 200.
1b, 352a, 352b... And the color CCD camera 3
20, based on the result output to the pressure adjusting unit 351a,
351b, 352a, 352b,..., And a sealant nozzle 340 as a sealant supply unit for supplying a sealant for sealing the liquid crystal injection port.

Hereinafter, each component will be described in detail.

The mounting table 310 is made of a transparent member, for example, quartz glass. The mounting table 310 has a contact surface for horizontally mounting the mother substrate 210 on which the liquid crystal device 200 is arranged. As shown in FIG. 2, the mounting table 310 has, for example, eight rectangular frame-shaped suction ports 311 (311a to 311h).
have. Further, the mounting table 310 has a rectangular recess 312 (312a to 312h) located inside each suction port.
have. Each suction port 311 and concave portion 312 is located corresponding to each liquid crystal device 200. Suction port 31
1a to 1h have a shape surrounding the sealing material 52 along the sealing material 52 when the liquid crystal device 200 is arranged on the mounting table 310. The recesses 312a to 312h are
When the “0” is placed on the mounting table 310, it has a shape located in a region surrounded by the sealing material 52. Each recess 3
12 and suction ports 311 are pressure adjusters 351a, 351b, 352a, 3
52b... Are individually connected. Each pressure adjusting unit 351
a, 351b, 352a, 352b,... are controlled based on a pressure control signal from the control unit 330.

Mother substrate 21 on which liquid crystal device 200 is arranged
0 in the gap formed by the liquid crystal device 200 and the concave portion 312 when the liquid crystal device 200
00 and the pressure in the gap formed by the suction port 311 are different from each other in the pressure adjusting portions 351a, 351b, 3
52a, 352b... For example, FIG.
As shown in the figure, the pressure in the gap formed by the liquid crystal device 200 located on the left side and the suction port 311a is adjusted by the pressure adjusting unit 352a, and the liquid crystal device 200 located on the left side is adjusted.
The pressure in the gap formed by the groove and the recess 312a is adjusted by the pressure adjusting unit 351a. Further, in the drawing, the pressure in the gap formed by the liquid crystal device 200 located on the right side and the suction port 311b is adjusted by the pressure adjusting unit 351b, and the gap formed by the liquid crystal device 200 located on the right side and the recess 312b. The internal pressure is adjusted by the pressure adjusting unit 352b. The pressure in the gap formed by the suction port 311 and the liquid crystal device 200 is reduced by sucking the air in the gap by the pressure adjusting unit 351. Thus, the outer peripheral portion of the liquid crystal device 200 corresponding to each suction port 311 is suction-held. On the other hand, the pressure in the gap formed by the recess 312 and the liquid crystal device 200 is based on the pressure control signal transmitted from the control unit 330, and the pressure adjusting unit 352 sucks the air in the gap or sends the air into the gap. Thereby, the pressure is reduced or increased.
Thus, the pressure applied to the mother substrate 210 of the liquid crystal device 200 corresponding to each of the recesses 312 is adjusted. For example, by reducing the pressure in the gap, a negative pressure is applied to the mother substrate 210, more precisely, the TFT array substrate corresponding to the concave portion 312, and the TFT is sucked.
The inter-substrate gap between the array substrate and the opposing substrate will widen. Also, by pressing the inside of the gap, the TFT
Positive pressure is applied to the array substrate, and the inter-substrate gap between the TFT array substrate and the opposing substrate is reduced. Thus, the control of the gap between the TFT array substrate and the counter substrate is performed.

As the light source 360, for example, a metal halide lamp can be used.

The color CCD camera 320 detects the display color displayed on the liquid crystal device by the light from the light source 360 radiated to the liquid crystal device. Is transmitted to

Display information as basic comparison information is input to the control unit 330 in advance. The control unit 330 compares the display information detected by the color CCD camera 320 with the comparison information, and calculates correction information so that the detected display information becomes the same as the comparison information. This correction information is transmitted to the pressure adjusting unit.

A method for controlling the gap between two substrates will be described with reference to FIG. FIG. 4 shows a color CCD camera 3
The hue of the display color displayed at 20 and the thickness d of the liquid crystal layer
(Μm) and the refractive index difference between the major and minor axes of the liquid crystal (refractive index anisotropy)
It is a figure which shows the relationship with the retardation (DELTA) nd which is a product with (DELTA) n, and a horizontal axis represents the hue of a display color, and a vertical axis | shaft represents (DELTA) nd.
The control unit 330 determines which of the 256 hues of 0 to 255 the display color detected by the color CCD camera 320 has. In the present embodiment, the basic comparison information is 110 to 110 when the retardation Δnd is changed to, for example, 480 ± 30 nm and the hue.
150 was set. The control unit 330 compares the detected hue of the display color with the hue of the comparison information, and calculates correction information. For example, if the hue value is smaller than 110, the pressure in the gap formed by the recess and the liquid crystal device is increased based on the correction information, and if the hue value is larger than 150, the pressure in the gap formed by the recess and the liquid crystal device is increased. Is reduced based on the correction information. Thus, the display information is controlled so as to fall within the range of the comparison information. As described above, the hue of the display color can be converted to a Δnd value. Furthermore,
Since the Δnd value varies depending on the gap between the substrates, that is, the thickness d of the liquid crystal layer, since Δn is a fixed value, Δn
By observing the change in the d value, the thickness d of the liquid crystal layer can be indirectly observed. That is, in the present embodiment, T
The control of the substrate gap between the FT array substrate and the opposing substrate is performed using the change in display color due to the change in the substrate gap.

The sealing material nozzle 340 is set so as to be movable in the horizontal and vertical directions on the mother substrate 210 on which the counter substrate 220 is disposed. When the control between the mother substrate 210 and the counter substrate 220 is completed, the sealing material nozzle 340 moves to apply a sealing material to the liquid crystal filling port of each liquid crystal device to seal the liquid crystal filling port.

(Method of Manufacturing a Liquid Crystal Device) Next, a method of manufacturing a liquid crystal device using the above-described control device and the operation of the control device will be described with reference to FIGS. 1, 3 and 4 based on FIG. . FIG. 5 is a flowchart showing a manufacturing process of the liquid crystal device.

First, as shown in FIG. 3, on a mother substrate 210 on which a plurality of TFT array substrates are arranged,
A liquid crystal device in which a plurality of liquid crystal devices are connected, in which a counter substrate 220 is arranged corresponding to each TFT array substrate, is prepared. Each TFT array substrate is bonded to the corresponding counter substrate 220 via the sealing material 52,
The liquid crystal 50 is held in a region surrounded by the FT array substrate, the counter substrate 220, and the sealant 52, and the liquid crystal injection port is in an unsealed state.

First, as shown in Step 1 of FIG. 5, the mother board 210 on which the prepared liquid crystal device is arranged is placed on the mounting table 3.
10 is placed at a predetermined position. At this time, the individual liquid crystal devices 200 are arranged so as to correspond to the suction port 311 and the recess 312, respectively. The mounted liquid crystal device 200
All the liquid crystal devices 200 are suction-held on the mounting table 310 by operating the pressure control unit 351 via the corresponding suction ports 311. In the present embodiment, the start and release of the suction are performed individually for each liquid crystal device 200.

Next, as shown in step 2, the light source 360
The liquid crystal device 200 is irradiated with light through the light-transmitting mounting table 310 from above. Thereby, a color is displayed on the liquid crystal device 200.

Next, as shown in step 3, the color CC
The display color is detected by the D camera 320. Color CC
The D camera 320 detects the display color of each liquid crystal device 200.

Thereafter, as shown in step 4, the individual liquid crystal devices 20 detected by the color CCD camera 320
The display information of 0 is transmitted to the control unit 330.

Next, as shown in step 5, the control unit 33
At 0, the display information detected by the color CCD camera 320 is compared with the previously input contrast information, and the correction information is calculated. This comparison is performed for each liquid crystal device 200. The control unit 330 calculates the stage of the hue of the detected display information and compares the calculated hue with the hue of the comparison information 110 to 150. When the display information is within the range of the comparison information, the liquid crystal device is regarded as a non-defective product. On the other hand, when it is out of the range of the comparison information, the correction information is calculated.

Then, as shown in step 6, the pressure controller 352 is adjusted based on the correction information. Specifically, if the value of the hue is smaller than 110, the pressure in the gap formed by the concave portion 312 and the liquid crystal device 200 is increased by using the pressure controller 352 based on the correction information. At this time, the state where the liquid crystal device 200 is held by suction through the suction port 311 is maintained. Accordingly, the liquid crystal device 200 does not separate from the mounting table 310 due to the pressurization by the pressure control unit 352. On the other hand, if the value of the hue is larger than 150, the pressure in the gap formed by the concave portion 312 and the liquid crystal device 200 is reduced by using the pressure controller 352 based on the correction information. At this time, it is desirable to release the holding of the liquid crystal device 200 via the suction port 311. By releasing the suction, the distortion of the substrate can be suppressed as much as possible, and the uniformity of the thickness of the liquid crystal layer in the substrate surface of the liquid crystal device can be further improved. As described above, by adjusting the pressure control unit based on the correction information, the display information is controlled so as to fall within the range of the comparison information.

After the control, the color displayed on the liquid crystal device 200 by the light emitted from the light source 360 is again changed to the color C.
It is detected by the CD camera 320. When it is confirmed that the detected display information is within the range of the comparison information, the liquid crystal device is determined to be non-defective. If the control unit 330 determines that the liquid crystal device is non-defective, the sealing material nozzle 340 moves to the liquid crystal injection port of the liquid crystal device determined to be non-defective based on a signal from the control unit 330.

Thereafter, as shown in step 7, the liquid crystal injection port 52a is sealed by applying the sealing material 54 from the sealing material nozzle 340.

Thereafter, the mother substrate 210 is cut and separated into individual TFT array substrates 210a by a cutting device (not shown), whereby a plurality of liquid crystal devices can be obtained.

In the sealing step, the sealing material 54 is TF
This can be achieved by using the configuration of the present control device so that it can be appropriately drawn into the gap between the T-array substrate 210a and the counter substrate 220. That is, the liquid crystal injection port 5
The light from the light source 360 is transmitted to 2a. Pressure adjusting unit 35
In step 2, pressure is applied to the TFT array substrate 210a, and the sealing material 54 is drawn into the liquid crystal injection port 52a. The amount of the sealing material 54 drawn into the liquid crystal injection port 52a is detected by the CCD camera 320, and the detection information is input to the control unit 330. The control unit 330 compares the detection information with the comparison information. On the other hand, when it is determined that the amount of the sealing material 54 is appropriate in the liquid crystal injection port 52a, the control unit 330 controls the pressure adjusting unit 352.
Then, the pressure applied to the TFT array substrate 210a is released, and the drawing in of the sealing material 54 is stopped. When this sealing step is used, the shape of the concave portion is formed so as to face the liquid crystal injection port 52a.

As described above, in the present embodiment, the gap between the two substrates is controlled by applying a positive pressure or a negative pressure to only one of the two substrates disposed to face each other. This makes it possible to detect the display color of the entire substrate as compared with the case where the inter-substrate control is performed by applying a positive pressure or a negative pressure to both of the two substrates, thereby limiting the detection point of the inter-substrate interval. I do not receive. Further, since there is no control head above the second substrate, the substrate can be easily set and reset, and automation can be facilitated. Further, since no control head is provided above the second substrate, the sealing material application head can be arranged at an arbitrary position, and the application head can be moved in the shortest path. As a result, it becomes possible to apply the sealing material at the optimal display color timing of the inter-substrate interval, thereby realizing an improvement in quality and an improvement in production efficiency.

In this embodiment, the measurement of the gap between the substrates of the liquid crystal device is performed indirectly by detecting the display color as the hue, and controlling the hue of the displayed color to a desired hue. Thus, a desired gap can be controlled. This makes it possible to easily obtain a stable quality liquid crystal device without requiring the skill of the operator.

In the above-described embodiment, a pressure control unit connected to the suction port or the recess is provided for each liquid crystal device, and the pressure control through the suction port and the pressure control through the recess is performed. It is performed individually for each liquid crystal device. However, the pressure control unit of the suction port of all the liquid crystal devices may be shared, and the work may be performed while maintaining the suction holding through the suction port from the start to the end of the control process of the gap between the substrates. good.

Further, in order to share some of the pressure adjusting sections, the pressure may be controlled to be adjusted sequentially by selectively switching the conduit communicating with the concave portion or the suction port with a switching valve.

In the above embodiment, the control between the substrates of a plurality of liquid crystal devices has been described as an example. However, it is needless to say that the present invention can be applied to the control between the substrates of one liquid crystal device.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a control device as a liquid crystal device manufacturing device according to an embodiment.

FIG. 2 is a schematic plan view of a mounting table of the control device according to the embodiment.

FIG. 3 is a plan view showing a state where counter substrates are arranged corresponding to individual TFT array substrates on a mother substrate on which a plurality of TFT array substrates are arranged.

FIG. 4 is a diagram illustrating a method of controlling a gap between two substrates.

FIG. 5 is a flowchart showing a manufacturing process of the liquid crystal device according to the embodiment.

FIG. 6 is a schematic plan view of the liquid crystal device according to the embodiment.

FIG. 7 is a sectional view taken along line H-H 'of FIG.

[Explanation of symbols]

 50 liquid crystal layer 52a liquid crystal injection port 53 sealing material 54 sealing material 200 liquid crystal device 210 mother substrate 210a TFT array substrate 220 counter substrate 300 control device 310 mounting table 311 (311a to 311h) Suction port 312 (312a to 312h) ... recess 320 ... color CCD camera 330 ... control unit 340 ... sealing material nozzle 351a, 351b, 352a, 352b ... pressure control unit 360 ... light source

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 FA04 FA11 FA28 FA30 GA02 HA08 HA10 HA28 JA05 MA04 MA17 2H089 LA15 LA24 NA32 NA33 NA55 NA56 QA14 RA05 TA09 TA11 TA18 5G435 AA17 BB12 CC09 FF05 FF12 GG22 GG42 KK05 KK10

Claims (13)

[Claims] An electro-optical device in which an electro-optical material is sandwiched between a first substrate and a second substrate is placed in contact with the first substrate, and a concave portion that forms a gap with the electro-optical device is provided. A mounting table made of a light-transmissive member having the same, a pressure adjustment unit configured to adjust a pressure applied to the first substrate by adjusting a pressure in the gap, and the electro-optical device via the mounting table. An illumination unit that irradiates light, a detection unit that detects a display color displayed on the electro-optical device formed by irradiating the light, and a pressure applied to the pressure adjustment unit based on a detection result of the detection unit. An electro-optical device manufacturing apparatus, comprising: a control unit that transmits a control signal. 2. The apparatus for manufacturing an electro-optical device according to claim 1, wherein the mounting table further has a suction port for sucking an outer peripheral portion of the electro-optical device. 3. The mounting table according to claim 1, wherein the plurality of electro-optical devices are arranged on the mounting table, wherein the mounting table includes a plurality of the suction ports corresponding to the respective electro-optical devices. The apparatus for manufacturing an electro-optical device according to claim 2, wherein starting and releasing of the suction of all the electro-optical devices are individually performed for each electro-optical device. 4. The mounting table according to claim 1, wherein the plurality of electro-optical devices are arranged on the mounting table, wherein the mounting table includes a plurality of the concave portions corresponding to each of the electro-optical devices. 4. The apparatus according to claim 1, wherein a pressure in the gap is individually adjusted for each of the electro-optical devices. 5. 5. The electro-optical device according to claim 1, wherein the first substrate and the second substrate are formed along an outer peripheral portion of the substrate except for an electro-optical material injection port for injecting the electro-optical material. 5. The device according to claim 1, further comprising a sealing material supply unit that has a seal that seals the electro-optical material injection port and that supplies a sealing material that seals the electro-optical material injection port. 6. For manufacturing electro-optical devices. 6. An electro-optical device comprising: (a) a mounting table made of a light-transmitting member having a concave portion, wherein the concave portion is covered and an electro-optical material is sandwiched between a first substrate and a second substrate. To
(B) irradiating the electro-optical device with light via the mounting table, and (c) irradiating the light with the first substrate. Detecting the display color displayed on the electro-optical device; (d) comparing the display color detection information with the comparison information to calculate correction information; and (e) based on the correction information. Adjusting the pressure applied to the first substrate by adjusting the pressure in the gap formed by the concave portion and the electro-optical device, and adjusting the gap between the first substrate and the second substrate. A method for manufacturing an electro-optical device, comprising: 7. The electro-optical device according to claim 6, wherein an outer peripheral portion of the electro-optical device is sucked and held by a suction port provided in the mounting table, and is mounted on the mounting table. The manufacturing method of the electro-optical device according to the above. 8. The method of manufacturing an electro-optical device according to claim 7, wherein in the step (e), when the pressure in the gap is reduced based on the correction information, the suction holding is released. Method. 9. The method according to claim 1, wherein a plurality of the electro-optical devices are arranged on the mounting table, and a gap between the first substrate and the second substrate is controlled individually for each electro-optical device. The method for manufacturing an electro-optical device according to any one of claims 6 to 8, wherein: 10. The electro-optical device according to claim 1, wherein the first substrate and the second substrate are formed along an outer peripheral portion of the substrate except for an electro-optical material injection port for injecting the electro-optical material. 10. The method according to claim 6, further comprising: (f) after the step (e), supplying a sealing material for sealing the electro-optical material injection port. 11. 13. The method for manufacturing an electro-optical device according to claim 1. 11. The step of supplying a sealing material for sealing the electro-optical material injection port includes adjusting a pressure applied to the first substrate and changing the sealing material between the first substrate and the second substrate. 11. The method according to claim 10, further comprising the step of:
The manufacturing method of the electro-optical device according to the above. 12. The method according to claim 12, wherein the sealing material is provided between the first substrate and the second substrate.
The step of drawing into the gap with the substrate optically detects the amount drawn into the electro-optical device,
12. The method of manufacturing an electro-optical device according to claim 11, further comprising a step of releasing the pressure applied to the first substrate based on a detection result and stopping the drawing in of the sealing material. 13. An electro-optic material on a mounting table made of a light-transmitting member having a recess, covering the recess and via an electro-optic material inlet between a first substrate and a second substrate. (C) placing an electro-optical device holding the first substrate in contact with the mounting table; and (b) dropping a sealing material on the electro-optical material injection port. A step of irradiating the electro-optical material injection port with light through a mounting table; and (d) a step of irradiating the light and detecting an amount of the sealing material drawn into the electro-optical substance injection port. (E) comparing the detection information with the comparison information, adjusting the pressure in the gap formed between the concave portion and the electro-optical device based on the detection result, and sealing the electro-optical material injection port. A step of adjusting the amount of pull-in of the stopper material, comprising: Method of manufacturing location.