JP2001284237A5 - - Google Patents

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Publication number
JP2001284237A5
JP2001284237A5 JP2000099074A JP2000099074A JP2001284237A5 JP 2001284237 A5 JP2001284237 A5 JP 2001284237A5 JP 2000099074 A JP2000099074 A JP 2000099074A JP 2000099074 A JP2000099074 A JP 2000099074A JP 2001284237 A5 JP2001284237 A5 JP 2001284237A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000099074A
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Japanese (ja)
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JP2001284237A (ja
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Publication date
Application filed filed Critical
Priority to JP2000099074A priority Critical patent/JP2001284237A/ja
Priority claimed from JP2000099074A external-priority patent/JP2001284237A/ja
Publication of JP2001284237A publication Critical patent/JP2001284237A/ja
Publication of JP2001284237A5 publication Critical patent/JP2001284237A5/ja
Withdrawn legal-status Critical Current

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JP2000099074A 2000-03-31 2000-03-31 照明装置及びそれを用いた露光装置 Withdrawn JP2001284237A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000099074A JP2001284237A (ja) 2000-03-31 2000-03-31 照明装置及びそれを用いた露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000099074A JP2001284237A (ja) 2000-03-31 2000-03-31 照明装置及びそれを用いた露光装置

Publications (2)

Publication Number Publication Date
JP2001284237A JP2001284237A (ja) 2001-10-12
JP2001284237A5 true JP2001284237A5 (cg-RX-API-DMAC10.html) 2007-05-17

Family

ID=18613472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000099074A Withdrawn JP2001284237A (ja) 2000-03-31 2000-03-31 照明装置及びそれを用いた露光装置

Country Status (1)

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JP (1) JP2001284237A (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3919419B2 (ja) 2000-03-30 2007-05-23 キヤノン株式会社 照明装置及びそれを有する露光装置
JP4508708B2 (ja) * 2004-04-12 2010-07-21 キヤノン株式会社 Ｅｕｖ光を用いた露光装置および露光方法
JP2006005319A (ja) 2004-06-21 2006-01-05 Canon Inc 照明光学系及び方法、露光装置及びデバイス製造方法
JP5187636B2 (ja) * 2009-01-16 2013-04-24 株式会社ニコン 補正ユニット、照明光学系、露光装置、およびデバイス製造方法
CN108333856B (zh) * 2017-01-19 2023-07-07 奥比中光科技集团股份有限公司 光学投影装置及应用其的深度相机
JP2025167089A (ja) * 2024-04-25 2025-11-07 レーザーテック株式会社 光学装置及び調整方法

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