JP2001252900A - Nano-tweezers, and nano-manipulator device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pair of nano-tweezers capable of grasping and releasing nano-substance by nano-sizing constitution of parts, and a nano-manipulator device using that. SOLUTION: This pair of nano-tweezers 2 comprises plural nano-tubes 8, 9 protruded from a holder 6 with a base end part fixed, a coating film insulation-coating the surface of the nano-tubes 8, 9, and lead wires 10, 10 connected to the nanotubes 8, 9 in it, so a voltage is applied between the lead wires 10, 10 for freely opening or closing tips of the nano-tubes 8, 9 by static attraction for grasping nano-substance between them. Otherwise, a piezoelectric film 32 is formed on the surface of the nano-tube 9, so the piezoelectric film 32 is expanded or contracted by application of a voltage to the piezoelectric film 32 for freely opening or closing the tips of the nano-tubes 8, 9 for handling nano-substance of insulator, semiconductor or conductor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to nanotweezers capable of holding and removing a nano-order size substance (hereinafter referred to as a nano substance). The present invention relates to a nanomanipulator device that can be assembled.

[0002]

2. Description of the Related Art In recent years, technological development has been increasingly directed to a very small area. For example, there is a demand for the development of innovative manufacturing technologies in the nano domain, such as creation of new materials and nano-sized components related to optical and electronic information, and creation of new bio-related functional materials by accumulating cells and proteins.

In order to move and stack nanomaterials in this way, it is necessary to develop nanotweezers capable of gripping and releasing nanomaterials. The first prototype of this nanotweezer was developed by Philip Kim and Charles M. By Lieber, January 1999
It was published in the science magazine published on February 10.
FIGS. 12 to 14 are manufacturing process diagrams of the nanotweezers.

FIG. 12 is a side view of the tip of a glass tube 80 which has been tapered, and has a diameter of about 100 n.
m, the rear end diameter not shown is 1 mm. FIG. 13 is a completed view of the nanotweezers. The two gold electrode films 84a and 84 are formed on the peripheral surface of the glass tube 80 via an insulating portion 82.
b is formed. The carbon nanotubes 86a and 86b are fixed to the gold electrode film in a projecting manner, respectively, to complete the nanotweezers 88.

FIG. 14 is a schematic diagram of applying a voltage to nanotweezers. Contact points 90 are provided on the gold electrode films 84a and 84b.
Lead wires 92a and 92b are led out from the terminals 90a and 90b, and are connected to both ends of the DC power supply 94. When the voltage of the DC power supply 94 is applied, the carbon nanotube 86a is charged to the positive electrode, and the carbon nanotube 86b is charged to the negative electrode. Due to these positive and negative electrostatic attraction, the tips of the carbon nanotubes 86a and 86b are closed inward, and the nano material 96 can be sandwiched therebetween.

When the voltage is increased, the carbon nanotubes are further closed, so that smaller nanomaterials can be sandwiched.
When the voltage is reduced to zero, the electrostatic attraction disappears, and the state returns to the state shown in FIG. 13 due to the elastic restoring force of the carbon nanotubes 86a and 86b, and the nano substance 96 is released. As described above, there is an advantage that the opening and closing of the nanotweezers 88 can be controlled only by controlling the magnitude of the voltage, and this is a revolutionary nanotweezer.

[0007]

However, this nanotweezer 88 has the following disadvantages. First, the tip of the glass tube 80 is tapered to 100 nm.
Since it is finely processed, it is weak and brittle in terms of strength.
Second, the gold electrode films 84a and 84b are
Are formed over the entire length of the lead wire, and contacts 90a and 90b are provided at the rear end where the diameter of the glass tube is increased to form a lead wire 9a.
The power supply 94 is connected via 2a and 92b. That is,
Since the lead wire is quite thick, an electrical contact must be provided at the rear end of the glass tube whose diameter has been increased. Therefore, there is difficulty and inefficiency in forming the gold electrode film over the entire length of the glass tube.

A third disadvantage is that positive and negative electricity is accumulated in the carbon nanotubes, and the opening and closing of the carbon nanotubes is controlled by their electrostatic attraction. Nano substance 96
When the nanomaterial is a conductor, the ends of the carbon nanotubes are electrically short-circuited, so that the electrostatic attraction does not work. In addition, there is a risk that the nanomaterial may be electrically destroyed in the event of a short circuit. Therefore, the use of nanotweezers is limited, and there is a weak point that always requires careful use.

[0009]

According to the first aspect of the present invention, there are provided a plurality of nanotubes having a base end fixed to a holder and projecting therefrom; a coating film for insulatingly covering the nanotube surface; A nanotweezer, comprising a lead wire connected to two nanotubes, wherein a voltage is applied between the lead wires to open and close the tip of the two nanotubes by electrostatic attraction.

According to a second aspect of the present invention, a pyramid protruding from a cantilever, a plurality of nanotubes protruding from the pyramid with a base end fixed thereto, and two nanotubes connected thereto are connected. A nanotweezer, comprising a lead wire, a voltage applied between the lead wires, and a tip between the two nanotubes is provided to be openable and closable by electrostatic attraction.

The invention according to claim 3 comprises a plurality of nanotubes protruding from the holder with the base end fixed, and a piezoelectric film formed on the surface of at least one of the nanotubes. A nano-tweezer, wherein a voltage is applied to the piezoelectric film to expand and contract the piezoelectric film to provide a free opening and closing between the tips of the nanotubes.

The invention according to claim 4 is the nanotweezer according to claim 3, wherein the holder is a pyramid of a cantilever.

According to a fifth aspect of the present invention, there are provided a plurality of deformable pyramid pieces constituting a pyramid portion of a cantilever, and a piezoelectric film formed on a side surface of at least one pyramid piece, and a voltage is applied to the piezoelectric film. The nano tweezers are characterized in that the piezoelectric film is expanded and contracted to make the pyramid pieces flexible so as to open and close between the tips of the nanotubes.

According to a sixth aspect of the present invention, there is provided the nanotweezer according to the third, fourth or fifth aspect, wherein the piezoelectric film is insulated.

According to a seventh aspect of the present invention, there is provided a nanotweezer according to any one of the first to sixth aspects, and the nanotweezer is applied to the sample with X
A nanomanipulator device comprising a three-dimensional drive mechanism that controls movement in the YZ directions, and controls transfer of a nanomaterial to a sample using nanotweezers.

The invention according to claim 8 is the nanomanipulator device according to claim 7, wherein at least one nanotube constituting nanotweezers is used as a probe for a scanning probe microscope.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION The present inventors have conducted intensive studies to develop durable nanotweezers, and as a result, have succeeded in improving the above-mentioned electrostatic attraction type nanotweezers using nanotubes. We have also succeeded in developing a high-performance piezoelectric film type nanotweezer.

First, the weak point of the conventional electrostatic attraction type nanotweezers is that when the nanomaterial to be gripped is conductive, the nanotubes are electrically short-circuited, the tweezer function is lost, and there is a risk of breakage. It is. In order to remedy this drawback, we propose a nano-tweezer which can prevent a short circuit at the time of contact by forming a coating film made of an insulating material on the nanotube surface. If this coating film is formed not only on nanotubes but also on other wiring parts,
The insulation of the entire nanotweezers can be improved. This insulating treatment can be applied to electrostatic nanotweezers of any structure.

The second conventional weak point is that the strength is weak and brittle because the nanotube is fixed to the tapered glass tube. In order to improve this drawback, a proposal is made to utilize a pyramid portion of a cantilever for an AFM (atomic force microscope) as a nanotube holder. Since the pyramid portion is made of silicon or silicon nitride, it has an electrical insulating property, and its strength is much higher than that of a conventional glass tube.

The above two inventions will be described comprehensively using a cantilever. The bases of the two nanotubes are fixed near the apex of the pyramid, and the tips protrude. There are two types of this fixing method. First, the vicinity of the base end is irradiated with an electron beam in an electron microscope. By this irradiation, a carbon film or a CVD film is formed as a coating film so as to cover the base end. The coating film holds down the base end and firmly fixes the nanotube. Second, when the base end is directly irradiated with the electron beam, the base end is fused to the surface of the pyramid. This fusion part fixes the nanotube.

Next, a lead wire is connected to the base end of the nanotube. In the present invention, nanotubes and C
Metal wiring by VD (chemical vapor deposition) can be used. For example, a nanotube is a material having high strength and extremely high flexibility, and since it has various thicknesses and lengths, it is most suitable as a nano-sized lead wire. Further, metal atoms can be minutely formed in a wiring shape by a CVD method.

One end of the nanotube lead wire is brought into contact with the base end, and this contact is irradiated with an electron beam and fixed integrally to the pyramid by spot welding. The other end of the nanotube lead may be connected to another nanotube lead, or may be connected to an electrode film formed on the cantilever. Further, the CVD lead wire can be formed while being fixed to the base end or the surface of the pyramid.

After forming these lead wires, a coating film made of an insulating material is formed on the nanotube surface, the base end region of the nanotube, and the entire lead wire. By forming a film on the nanotube surface, a short circuit in the electrostatic method can be prevented. At the same time, by forming a coating on the entire wiring,
The entire nanotweezer can be protected from a short circuit or the like. In addition, even if the tweezers are operated in an electrolyte solution such as a biological fluid, there is no leakage. For forming the coating film, an electron beam irradiation method or a CVD method can be used.

The connection between the electrode film of the cantilever and the external power supply circuit can be made under an optical microscope or an optical magnifier because the cantilever is relatively large. The external power supply circuit includes a power supply, a voltage control circuit, and an electric switch. If the applied voltage is freely adjusted by the voltage control circuit,
The degree of opening between the tips of nanotubes can be arbitrarily adjusted, and the opening and closing of nanotweezers can be controlled according to the size of the nanomaterial.

Further, a nano tweezer of a piezoelectric film type completely different from the electrostatic attraction type has been developed. In the piezoelectric film method, the nanotubes are made flexible by expansion and contraction of the piezoelectric film, thereby opening and closing the tip of the nanotube. Therefore, no current flows between the nanotubes, so that the nanotweezers can function regardless of the electrical properties of the nanomaterial.

In this piezoelectric film system, a probe used for a wide range of SPM (scanning probe microscope) is used as a nanotube holder, not limited to AFM or STM (tunnel microscope). The probe of the SPM is considerably large in size as compared with the nanotube, and is large enough to fix two nanotubes. The most effective holder is the pyramid of the cantilever for AFM described above. In the following, description will be made using this cantilever.

First, the base ends of the two nanotubes are fixed to the pyramid of the cantilever. At this time, the tips of the two nanotubes are brought into contact with each other. That is, it is fixed in a state where the tip is in contact. The fixing method includes the above-mentioned coating film method and fusion method. Either fixing method may be used.

Next, a piezoelectric film is formed on one of the surfaces of the two nanotubes. The piezoelectric film is also called a piezo element, and has a property of contracting when a voltage is applied. When the voltage is made variable, the amount of contraction also changes. When the piezoelectric film shrinks, it flexes so that the nanotube to which it is fixed opens. Therefore, although the tip of the nanotube is initially closed, a voltage is applied to open the tip, and the nano material is gripped in this open state. When the opening is increased by further increasing the voltage,
The nanomaterial is released. If the nanomaterial does not detach from the nanotube due to the intermolecular force, a voltage may be applied between the sample and the nanotweezers to electrically discharge the nanomaterial.

One end of a nanotube lead wire is connected to both ends of the piezoelectric film, and the other end may be connected to another nanotube lead wire, or may be connected to the electrode film of the cantilever as described above. Of course, CVD leads can also be used.
Then, the electrode film is connected to an external power supply circuit. The external power supply circuit includes a power supply, a voltage control circuit, and an electric switch, and the operation is as described above.

A piezoelectric film may be formed on two nanotubes. In this case, since the two nanotubes can be bent by applying a voltage, the opening of the tip of the nanotube can be set larger, and the performance of the nanotweezers can be improved.

Consider a case in which the piezoelectric film is formed on the surface of the pyramid instead of being formed on the surface of the nanotube. The pyramid portion is cut, for example, by a focused ion beam device, and divided into two pyramid pieces through the cut portion. The thickness of each pyramid piece is adjusted so as to have flexibility. One nanotube protrudes from one pyramid piece, for a total of 2
The nanotubes are protruded so that the tips contact each other. A piezoelectric film is formed on the side surface of one or both pyramid pieces, and a voltage is applied to both ends of the piezoelectric film to contract the piezoelectric film as described above. This contraction causes the pyramid pieces to bend, opening the nanotube tip. After that, it functions as nanotweezers by grasping and releasing nanomaterials.

In both the electrostatic attraction type and the piezoelectric film type, two or more nanotubes can be used for nanotweezers. For example, if three nanotubes are used, these three will grip the nanomaterial. Three
Two of the books may be controlled to open and close by an electrostatic attraction method,
Two piezoelectric films may be formed, and two may be opened and closed. In these cases, the remaining one functions as an auxiliary nanotube. In other words, since three nanomaterials are gripped, gripping can be reliably performed.

Also in the piezoelectric film system, since a voltage is applied by a lead wire, if the surface of the piezoelectric film and the lead wire are coated with an insulating material, there is no danger of a short circuit. Therefore, the operation of nanotweezers in the electrolyte solution is also possible.

The nanotubes of the present invention include not only carbon nanotubes, but also BCN-based nanotubes and BN.
A general nanotube such as a system nanotube can be used.
Carbon nanotubes are also abbreviated as CNTs, and are manufactured using arc discharge of a carbon rod. BCN-based nanotubes are obtained by substituting a part of C atoms of CNT with B atoms and N atoms, and BN-based nanotubes are obtained by substituting almost all of C atoms by B atoms and N atoms. Various methods have been developed as replacement methods.

Hereinafter, embodiments of a nanotweezer and a nanomanipulator device using the same according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram illustrating the operation of a nanomanipulator device using nanotweezers according to the present invention. The nanotweezers 2 are formed by projecting two nanotubes 8 and 9 on a pyramid 6 projecting from the tip of an AFM cantilever 4. Lead wires 10 and 10 are provided at the base ends of these nanotubes 8 and 9,
Electrode films 12, 1 formed on the left and right side surfaces of the cantilever 4.
2 is connected. The electrode films 12, 12 are connected to the electric switch SW, the power supply P, and the voltage control circuit VC, and apply an appropriate voltage to the nanotubes 8, 9.

The two nanotubes 8 and 9 are arranged close to the sample 14, and various nano materials 16 are arranged on the surface of the sample 14. The nanotube 8 protrudes downward longer than the nanotube 9. Therefore, the nanotube 8 can also be used as a probe for AFM. First, the nanotube 8 is scanned by the three-dimensional drive mechanism 17 as an AFM probe to confirm the position and shape of the nanomaterial 16 to be gripped.

Opening and closing of the nanotubes 8 and 9 are controlled by applying a voltage, and the opening degree is changed according to the magnitude of the voltage. Therefore, the nanotubes 8 and 9 are opened, the nanomaterial 16 which is registered by the AFM is gripped, and in this state, the nanomaterial 16 is moved by the three-dimensional driving device D along the direction of the arrow to the nanocircuit portion 18,
The nanotubes 8 and 9 are further opened to release the nanomaterial 16. If the nano material does not detach from the nanotube due to Van der Waals force, a voltage may be applied between the nano tweezers and the nano circuit unit to discharge the nano material by electrostatic attraction. By releasing the nanomaterial 16 into place in the nanocircuit portion 18, the nanocircuit 18 is assembled into the desired structure.

FIGS. 2 to 4 show a first embodiment of a nanotweezer according to the present invention. FIG. 2 is a schematic front view of the nanotweezers 2. At the tip of the pyramid part 6, a thin and long nanotube 8 and a thick and short nanotube 9 are provided at a base end part 8.
b and 9b are fixedly arranged. The tip 8a of the nanotube is protruded downward from the tip 9a.
The tip 8a is set so that it can be used as an AFM probe.

The base portions 8b, 9b are fixed by coating films 11, 11 by irradiating the periphery with electron beams. At the upper ends of the base ends 8b and 9b, nanotubes are connected as lead wires 10 and 10, and the lead wires 1 and 10 are connected.
The other ends of 0 and 10 are connected to the electrodes 12 and 12 of FIG. Finally, coating films 11, 11 are also formed on the surfaces of the nanotube leads 10, 10, and these leads are fixed to the pyramid 6. The coating film 11 is indicated by hatching.

FIG. 3 is a schematic perspective view in which the nanotweezers 2 are arranged to face the sample 14. The irregularities on the surface of the sample 14 represent surface atoms. Tip 8a of nanotube 8
Protrudes below the tip 9a of the nanotube 9, the tip 8a is used as an AFM probe to detect the uneven structure of the surface atoms. For example, the position and shape of the nanomaterial placed on the sample 14 are detected.

FIG. 4 is a schematic front view of the nanotweezers 2 holding the nanomaterial 16. A DC voltage is applied to the nanotubes 8 and 9 from the lead wires 10 and 10. The tip 8a,
Positive and negative charges are stored in 9a, and the tips 8a and 9a are closed at an opening corresponding to the applied voltage by the electrostatic attraction of the positive and negative charges, and the nano material 16 is gripped during this time. The nano material 16 to be gripped is the nano material detected by AFM in FIG.

FIG. 5 is a schematic configuration diagram of a nanomanipulator device according to the present invention. As described above, the nanotweezers 2 includes the cantilever 4, the substrate 5, the pyramid 6, and the nanotubes 8 and 9. The sample 14 is driven in a three-dimensional direction by a three-dimensional driving mechanism 17 composed of a piezoelectric element. That is, the sample side is driven to drive the nanotubes 8 and 9 on the surface of the sample 14 in the XYZ directions. Of course, the nanotweezers 2 may be directly driven three-dimensionally. It is important that the nanotweezers 2 and the sample 14 can be relatively three-dimensionally driven. 20 is a semiconductor laser device,
22 is a reflection mirror, 24 is a two-segment photodetector, 26 is a Z-axis detection circuit, 28 is a display device, and 30 is an XYZ scanning circuit.

The nanotubes 8 and 9 are made to approach the sample 14 in the Z-axis direction until a predetermined repulsion position is reached, and the necessary nanomaterial 16 is gripped. After that, the XYZ scanning circuit 30
The nanotubes 8 and 9 are moved to a predetermined position by scanning the dimensional drive mechanism 17. In this movement process, it is necessary to keep the separation distance between the nanotubes 8 and 9 and the sample surface constant, and therefore it is necessary to control the position of the nanotubes in the Z-axis direction so that the repulsive force applied to the nanotubes is always constant.
For this purpose, the laser beam LB is reflected by the cantilever 4 and is split via the reflecting mirror 22 into the two-part photodetector 2.
4, and performs Z-axis control while detecting deflection to the upper and lower detectors 24a and 24b.

The Z position is detected by the Z-axis detection circuit 26,
The XY position is detected by the Z scanning circuit 30 and the position information is displayed on the display device 28. That is, the display device 2
In FIG. 8, an uneven image of the sample surface is displayed. Then, after the nanotubes 8 and 9 have moved to predetermined positions, the nanomaterials 16 that have opened and grasped the nanotubes 8 and 9 are released onto the sample surface. This operation is repeated to assemble a large number of nanomaterials at predetermined locations to form, for example, a nanocircuit 18. By performing AFM operation on the nanotube 8, the nano circuit 18
Can be imaged on the display device 28. Therefore, the nanomanipulator device of the present invention is a nanorobot that can freely configure a nanoworld. This nanomanipulator device can be used in various atmospheres including vacuum and atmosphere, and can be operated like a robot hand in a device such as an electron microscope.

FIGS. 6 to 8 show a second embodiment of a nanotweezer according to the present invention. FIG. 6 is a schematic front view of the nanotweezers 2. Tips 8a of nanotubes 8, 9;
The base ends 8b, 9b are fixed to the pyramid 6 by the coating films 11, 11 such that the tip 9a contacts at the tip. A piezoelectric film 32 is formed on the surface of the tip 9a of the nanotube 9, and nanotube leads 10a and 10b are connected to its upper end 32a and lower end 32b. The midpoints of the nanotube leads 10a, 10b are fixed to the pyramid 6 by spot-like coating films 13, 13.

FIG. 7 is a schematic perspective view in which the nanotweezers 2 are arranged to face the sample 14. Nanotube lead wire 10
The other ends 10c and 10d of a and 10b are fixed to the electrodes 12 and 12 of the cantilever 4. The electrodes 12, 12 are connected to an electric switch SW, a power supply P, and a voltage control circuit VC. The piezoelectric film 32 contracts by applying a voltage to both ends, and the amount of contraction increases with the applied voltage. First, the surface of the sample 14 is subjected to AFM operation with the tip of the nanotube closed, and the position and shape of the nanomaterial to be grasped are detected.

FIG. 8 is a schematic front view of the nanotweezers 2 holding the nanomaterial 16. When a voltage is applied to the piezoelectric film 32 by turning on the electric switch SW, the nanotube 9 bends in accordance with the contraction of the piezoelectric film 32, the space between the nanotubes 8 and 9 is opened, and the target nanomaterial 16 is gripped. The assembly of the nanocircuit 18 is the same as that in FIG.

FIGS. 9 to 11 show a third embodiment of a nanotweezer according to the present invention. FIG. 9 is a perspective view of a main part of the cantilever 4 having the pyramid 6. The cantilever 4 is generally used for AFM measurement, and the pyramid 6 is formed as one lump. This pyramid portion 6 is carved by, for example, a focused ion beam device and divided into two equal parts into two pyramid pieces 6a and 6b, and these pyramid pieces 6a and 6b are formed to be flexible.

FIG. 10 is a schematic front view of the nanotweezers 2. The pyramid pieces 6a, 6b are flexibly opposed from the root 6d via a gap 6c. The base ends 8b, 9b are fixed to the pyramid pieces 6a, 6b by the coating films 11, 11 such that the front ends 8a, 9a of the nanotubes 8, 9 are in contact at the ends. A piezoelectric film 32 is formed on a side surface of the pyramid piece 6a, and a nanotube lead wire 1 is provided on an upper end 32a and a lower end 32b.
0a and 10b are connected. These nanotube leads 10a, 10b are connected to the electrodes 12, 12 of the cantilever 4.
Is connected to the same power supply circuit as in the second embodiment.
First, the surface of the sample 14 is subjected to AFM operation with the tip of the nanotube closed, and the position and shape of the nanomaterial to be grasped are detected.

FIG. 11 is a schematic front view of the nanotweezers 2 holding the nanomaterial 16. When a voltage is applied to the piezoelectric film 32 by turning on the electric switch SW, the pyramid piece 6a is bent in accordance with the contraction of the piezoelectric film 32, the gap between the tips 8a and 9a of the nanotube is opened, and the detected nanomaterial 16 is gripped. Nano circuit 18 using nano manipulator device
Is the same as that shown in FIG.

In the above embodiment, the number of nanotubes and pyramid pieces is two, but a plurality of pieces may be used. Also, the piezoelectric film is made of nanotubes or pyramid pieces.
Instead of being formed only on a book, it may be formed on two opposing books.

The present invention is not limited to the above embodiment, but includes various modifications and design changes within the technical scope of the present invention without departing from the technical concept of the present invention.

[0053]

According to the first aspect of the present invention, since the surface of the nanotube is coated with an insulating material, no short circuit occurs even when closed by electrostatic attraction. Therefore, a tweezer operation can be performed on a nanomaterial having any electrical properties. The present invention is applicable to all structures of the nano-tweezers of the electrostatic attraction type.

According to the second aspect of the present invention, since the pyramid portion of the cantilever for AFM is used as a nanotube holder, the strength of the entire nanotweezers is high. Nanoscale wiring is possible, and the circuit configuration can be made compact.

According to the third aspect of the present invention, since the end between the nanotubes is freely opened and closed by the piezoelectric film, the nano material can be gripped regardless of the electrical properties of the nano material, that is, the difference between the insulator, the semiconductor, and the conductor. Thus, the performance can be improved as compared with the electrostatic attraction method in that the insulating coating of the nanotube is not required.

According to the invention of claim 4, since the pyramid of the cantilever is used as the holder of claim 3,
The strength of the entire nanotweezer is high, and all the materials can be gripped regardless of the electrical properties of the target nanomaterial, so that nanotweezers having a wide range of applications can be provided.

According to the fifth aspect of the present invention, the piezoelectric film is formed on a pyramid piece having a large size instead of forming the piezoelectric film on the nanotube, so that the piezoelectric film can be easily formed. As a result, the size of the piezoelectric film is increased, so that workability such as connection of a nanotube lead wire to the piezoelectric film can be improved.

According to the invention of claim 6, since the piezoelectric film of the nanotweezers is insulated and covered, no short circuit occurs even when a voltage is applied, and if the lead wire is also insulated and covered, the nanotweezer operation can be performed even in an electrolyte solution. Becomes possible.

According to the seventh aspect of the present invention, the movement of the nanotweezers relative to the sample can be controlled three-dimensionally in any direction, so that the nanomaterial can be gripped, moved, and released continuously. As a result, a nano robot capable of freely assembling biological substances such as cells and proteins, various molecules, and nano substances such as ultrafine particles can be provided, and can contribute to the creation of creative science and technology.

According to the invention of claim 8, since at least one nanotube constituting the nanotweezers is used as a probe for a scanning probe microscope, the position and shape of the nanomaterial are confirmed with this probe. It is possible to provide a nanomanipulator device that can grasp and release a nanomaterial after detecting a position and a place to be released.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating the operation of a nanomanipulator device using nanotweezers according to the present invention.

FIG. 2 is a schematic front view of a first embodiment of a nanotweezer according to the present invention.

FIG. 3 is a schematic perspective view in which the nanotweezers of the first embodiment is arranged to face a sample.

FIG. 4 is a schematic front view of a nanotweezer of the first embodiment holding a nanomaterial.

FIG. 5 is a schematic configuration diagram of a nanomanipulator device according to the present invention.

FIG. 6 is a schematic front view of a second embodiment of a nanotweezer according to the present invention.

FIG. 7 is a schematic perspective view in which a nanotweezer of the second embodiment is arranged to face a sample.

FIG. 8 is a schematic front view of a nanotweezer of a second embodiment holding a nanomaterial.

FIG. 9 is a perspective view of a main part of a cantilever having a pyramid portion.

FIG. 10 is a schematic front view of a third embodiment of a nanotweezer according to the present invention.

FIG. 11 is a schematic front view of a nanotweezer of a third embodiment holding a nanomaterial.

FIG. 12 is a side view of a conventional tapered glass tube tip.

FIG. 13 is a schematic explanatory view of a conventional nanotweezer.

FIG. 14 is a schematic explanatory view for applying a voltage to a conventional nanotweezer.

[Explanation of Signs] 2 nano tweezers 4 cantilever 6 pyramid 6a, 6b pyramid piece 6c gap 6d root 8,9 nanotube 8a, 9a Tip 8b, 9b ... Base 10, 10, 10a, 10b ... Lead wire 11 ... Coating film 12 ... Electrode 13 ... Spot-shaped coating film 14 ... Sample 16 ... Nano Material 17: Three-dimensional drive mechanism 18: Nano circuit 20: Semiconductor laser device 22: Reflection mirror 24: Two-part photodetector 26: Z-axis detection circuit 28: Display Apparatus 30 XYZ scanning circuit 32 Piezoelectric film 32a Upper end of piezoelectric film 32b Lower end of piezoelectric film 80 Glass tube 82 Insulating portions 84a, 84b Gold electrode film 86 , 86b: Carbon nanotube 88: Nano tweezers 90a, 90b: Contact point 92a, 92b: Lead wire 94: Power supply 96: Nano material LB: Laser beam P: Power supply SW: Electric switch VC: Voltage control circuit

Continuation of the front page (72) Inventor Akio Harada 2-7-19-1 Nishi Nishi, Joto-ku, Osaka-shi, Osaka Inside Daiken Chemical Industry Co., Ltd. No.19 Daiken Chemical Industry Co., Ltd. F-term (reference) 3C020 UU08

Claims (8)

[Claims] The present invention comprises a plurality of nanotubes protruding from a holder with their base ends fixed, a coating film for insulatingly covering the surfaces of these nanotubes, and a lead wire connected to two of the nanotubes. Nano tweezers, wherein a voltage is applied between the lead wires so as to open and close between the tips of the two nanotubes by electrostatic attraction. 2. A pyramid protruding from a cantilever, a plurality of nanotubes protruding from the pyramid with a base end fixed thereto, and a lead wire connected to two of the nanotubes. Nano tweezers, wherein a voltage is applied between the lead wires so as to open and close between the tips of the two nanotubes by electrostatic attraction. 3. A plurality of nanotubes having a base end fixed to a holder and protruding therefrom, and a piezoelectric film formed on a surface of at least one of the nanotubes. A voltage is applied to the piezoelectric film. Nano tweezers characterized in that the piezoelectric film is expanded and contracted to open and close between the tips of the nanotubes. 4. The nanotweezer according to claim 3, wherein the holder is a pyramid of a cantilever. 5. A piezoelectric device comprising: a plurality of deformable pyramid pieces constituting a pyramid portion of a cantilever; and a piezoelectric film formed on a side surface of at least one pyramid piece. A voltage is applied to the piezoelectric film to form the piezoelectric film. Nano tweezers characterized by being expanded and contracted to make a pyramid piece flexible so as to open and close between tips of nanotubes. 6. The piezoelectric film according to claim 3, wherein the piezoelectric film is insulated.
Or the nanotweezers according to 5. 7. A nano tweezer according to claim 1, further comprising a three-dimensional drive mechanism for controlling the movement of the nano tweezer relative to the sample in the XYZ directions, wherein the nano tweezer is used to control the transfer of the nano substance to the sample. A nanomanipulator device characterized by the following. 8. At least one of nano tweezers
The nanomanipulator device according to claim 7, wherein the nanotubes are used as a probe for a scanning probe microscope.