JP2001237238A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001237238A5 JP2001237238A5 JP2000047353A JP2000047353A JP2001237238A5 JP 2001237238 A5 JP2001237238 A5 JP 2001237238A5 JP 2000047353 A JP2000047353 A JP 2000047353A JP 2000047353 A JP2000047353 A JP 2000047353A JP 2001237238 A5 JP2001237238 A5 JP 2001237238A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000047353A JP4212753B2 (en) | 2000-02-24 | 2000-02-24 | Vertical heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000047353A JP4212753B2 (en) | 2000-02-24 | 2000-02-24 | Vertical heat treatment equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001237238A JP2001237238A (en) | 2001-08-31 |
| JP2001237238A5 true JP2001237238A5 (en) | 2006-10-12 |
| JP4212753B2 JP4212753B2 (en) | 2009-01-21 |
Family
ID=18569612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000047353A Expired - Fee Related JP4212753B2 (en) | 2000-02-24 | 2000-02-24 | Vertical heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4212753B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7351057B2 (en) * | 2005-04-27 | 2008-04-01 | Asm International N.V. | Door plate for furnace |
| KR101333363B1 (en) | 2006-10-13 | 2013-11-28 | 도쿄엘렉트론가부시키가이샤 | Heat treatment apparatus |
| JP5560556B2 (en) * | 2008-11-17 | 2014-07-30 | 東京エレクトロン株式会社 | Processing equipment |
-
2000
- 2000-02-24 JP JP2000047353A patent/JP4212753B2/en not_active Expired - Fee Related