JP2001237070A - Organic el element, manufacturing method and manufacturing device of organic el element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an organic EL element, and a manufacturing method of organic EL element enabled to paint surely and uniformly by which an organic EL element with low cost, high efficiency and long life can be obtained. SOLUTION: The manufacturing method of the organic EL element comprising a pair of electrodes 2, 4 and at least an organic layers 3 related to the function of light emission held between the electrodes 2, 4, and includes a process of painting organic material dissolved in solvent from above through the painting mask when at least one layer of the organic layers 3 is formed. The manufacturing device applying above manufacturing method and the organic EL element manufactured by the manufacturing device are also provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic EL (electroluminescence) device, and more particularly to a device that emits light by applying an electric field to a thin film of an organic compound.

[0002]

2. Description of the Related Art In general, an organic EL device comprises a transparent electrode made of ITO or the like formed on a glass substrate, an organic amine-based hole transporting layer thereon, and, for example, an Alq3 material exhibiting electron conductivity and exhibiting strong light emission. This is a basic element having a structure in which an organic light emitting layer is laminated and an electrode having a small work function such as MgAg is formed.

[0003] The element structure reported so far has a structure in which one or more organic compound layers are interposed between a hole injection electrode and an electron injection electrode. There is a two-layer structure or a three-layer structure. All of these organic layers or inorganic layers are formed by a vapor deposition method such as vacuum evaporation or sputtering.

When a display device having a plurality of organic EL elements is to be formed by using such a vapor deposition method, a mask for forming each pixel or segment is required. In particular, in order to form a full-color display, a mask corresponding to each of R, G, and B colors is required.

[0005] However, as the size of the display increases, the size of the mask used also increases, and accordingly, very large manufacturing equipment is required. In addition, the use of a large mask causes the mask to be bent and distorted, which causes problems such as misalignment of the light emitting portion and color mixing.

On the other hand, Japanese Patent Application Laid-Open No. 10-92576 discloses an attempt to use a polymer material as a material for a light emitting layer, dissolve the polymer material in a solvent, and form the material by a coating method. However, since the method disclosed in this document is applied and formed by a spin coating method, the light emitting layer can be formed only by a single material, and is not suitable for color display.

As a method for compensating for such a defect, for example, Japanese Patent Application Laid-Open No. Hei 10-12377 discloses a method in which an organic material dissolved in a solvent is applied by an ink jet method to form a light emitting layer. According to this method, the size of the constituent elements can be made relatively small even by the coating method, and the manufacturing cost can be significantly reduced as compared with the vapor deposition method.

However, when such an ink jet method is used, it is difficult to apply an organic material accurately and uniformly to a target place. Also, Japanese Unexamined Patent Application Publication No.
Japanese Patent Application Laid-Open No. H07-74082 discloses that a bank is formed around a coating location as a means for solving such a problem. Points for improvement are shown. However, if these methods are used, the number of steps for forming a bank or a silicon resin mold increases, and the advantage of being able to manufacture at low cost with simple equipment, which is a major feature of the coating mold, cannot be fully utilized.

[0009]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a manufacturing method and an organic EL device capable of obtaining a low-cost, high-efficiency, and long-life organic EL device capable of performing uniform coating with high accuracy. It is.

[0010]

That is, the above object is achieved by the following constitutions. (1) A method for producing an organic EL device having a pair of electrodes and an organic layer involved in at least a light-emitting function between the pair of electrodes, wherein at least one of the organic layers is dissolved in a solvent. A method for manufacturing an organic EL element, which is formed by applying the prepared organic material from a coating mask. (2) The method for producing an organic EL device according to the above (1), wherein the method is applied by a screen printing method or a spray method. (3) An organic EL device manufactured by the manufacturing method of (1) or (2). (4) An apparatus for manufacturing an organic EL element having a pair of electrodes and an organic layer involved in at least a light emitting function between the pair of electrodes, wherein at least one electrode is formed on a substrate in a solvent. An organic EL device manufacturing apparatus comprising: an organic layer forming means for applying an organic material dissolved in an organic layer from a coating mask to form at least one of the organic layers. (5) The method for producing an organic EL device according to the above (4), wherein the organic layer forming means is applied by a screen printing method or a spray method. (6) An organic EL device manufactured by the manufacturing method of (4) or (5).

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION The method for manufacturing an organic EL device according to the present invention is a method for manufacturing an organic EL device having a pair of electrodes and an organic layer at least involved in a light emitting function between the pair of electrodes. In forming at least one of the organic layers, the organic layer is formed by applying an organic material dissolved in a solvent from a coating mask.

As described above, by applying from an application mask, an organic material can be applied uniformly and accurately in a relatively simple process, and a low-cost, high-efficiency, and long-life organic EL device can be obtained. Can be

[0013] In addition, the organic E
As an apparatus for producing an L element, an organic layer forming means for applying an organic material dissolved in a solvent from a coating mask onto a substrate on which at least one electrode is formed, and forming at least one of the organic layers. Is used. In this case, the coating method is a screen printing method,
Alternatively, a spray method is preferred.

As a mask used for coating,
Usually, a mesh (made of mesh fabric) mask used for screen printing or the like is preferable. Further, when a mesh mask cannot be used due to a solvent or the like used for the coating solution, a metal mask used in an evaporation method or the like may be used. Such a metal mask can be easily processed by a general processing method, for example, a laser processing method, and a desired pattern can be obtained.

As a coating method for forming an organic layer, there is a method in which a predetermined amount of a coating liquid is extruded from a narrow slit to perform coating, or a required amount is first discharged to a place where coating is started as in screen printing. , A method of applying a mist-like coating liquid from a nozzle, an ink jet method, etc., of which a screen printing method and an ink jet method are preferable.

When a coating liquid is sprayed or an ink jet method is used, the film forming speed can be improved by spraying or discharging from a plurality of nozzles.
Further, fine nozzles may be arranged in a line to form a line type nozzle.

The substrate or the organic EL structure and the mask may be in contact with or not in contact with each other, but it is preferable that the substrate or the organic EL structure be in contact with the mask in consideration of positional deviation. The position where the mask is in contact with the substrate or the organic EL structure may be a non-display portion, that is, an electrode extraction portion or a substrate.
Direct organic E, such as a margin for gluing the sealing plate
A position not in contact with the L structure is preferable. Further, a spacer or a stopper structure for keeping a constant distance between the substrate or the organic EL structure and the mask may be provided in this portion.

The opening area of the mask is determined by the substrate or organic EL
It is preferable that the area is slightly smaller than the area required for application (area to be applied) when the structure is viewed from directly above. If the area is equal to or larger than the required area, a desired color may not be obtained due to mixing with the adjacent material.
In this case, it is preferable to reduce the required area by 1% or more, more preferably by about 5% to 10%. If the opening area of the mask is too small, the light emitting area may be reduced, and a desired light emission luminance may not be obtained.

In the present invention, as an organic material for forming an organic layer, a fluorescent material and a charge transporting material (generally referring to an electron transporting material and a hole transporting material) which are generally used for an organic EL device are used. ) Can be used.

For example, a light emitting layer using a polymer fluorescent substance having high solubility, a mixed light emitting layer of a polymer fluorescent substance and a charge transporting material, or such a light emitting layer and an electron injection electrode (cathode)
May have an electron injection / transport layer containing an electron injection / transport material, or may have a hole injection / transport layer containing a hole injection / transport material between a light emitting layer and a hole injection electrode. . Further, instead of the electron injection / transport layer and the hole injection / transport layer, a high resistance electron injection / transport layer or a hole injection / transport layer made of an inorganic material may be provided.

The light emitting layer may be a single layer or two or more layers, and a plurality of light emitting layers and a charge transport layer may be formed. Further, the light emitting layer may contain the following fluorescent material and charge transporting material in addition to the polymer fluorescent material. Further, the polymeric fluorescent substance and / or the charge transport material may be dispersed in a polymeric compound.

Known light-emitting materials that can be used together with the polymeric fluorescent substance of the present invention are not particularly limited, and include, for example, naphthalene derivatives, anthracene and its derivatives, perylene and its derivatives, polymethine, xanthene,
Coumarin-based, cyanine-based dyes, metal complexes of 8-hydroxyquinoline and its derivatives, aromatic amines,
Tetraphenylcyclopentadiene and derivatives thereof,
Tetraphenylbutadiene and derivatives thereof can be used. Specifically, for example, Japanese Patent Application Laid-Open No. 57-5
Known ones such as those described in JP-A Nos. 1781 and 59-194393 can be used.

As the charge transporting material that can be used in the present invention, various electron transporting materials and hole transporting materials can be used, and there is no particular limitation.

Examples of the hole transporting material include pyrazoline derivatives, arylamine derivatives, stilpene derivatives, triphenyldiamine derivatives and the like.

Examples of the electron transporting material include oxadiazole derivatives, anthraquinodimethane and its derivatives, benzoquinone and its derivatives, naphthoquinone and its derivatives, anthraquinone and its derivatives, tetracyanoanthraquinodimethane and its derivatives, fluorene and its derivatives. Metal complexes such as derivatives thereof, diphenyldicyanoethylene and derivatives thereof, diphenoquinone derivatives, and 8-hydroxyquinoline and derivatives thereof can be given.

Specifically, JP-A-63-70257, JP-A-63-175860, and JP-A-2-1353
Nos. 59, 2-135361, 2-209
988, 3-37992, 3-152
No. 184, for example.

Particularly, as a hole transporting material, 4,4-bis (N (3-methylphenyl) -N-phenylamino)
Biphenyl and 2- (4-biphenylyl) -5- (4-t-butylphenyl) -1,3,3 as an electron transporting material
4-oxadiazole, benzoquinone, anthraquinone, tris (8-quinolinol) aluminum are preferred.

Of these, one or both of the electron transporting compound and the hole transporting compound may be used simultaneously. These may be used alone or as a mixture.

The amount of the charge transporting material varies depending on the kind of the compound used and the like. Therefore, the optimum amount of the charge transporting material may be determined within a range that does not impair the sufficient film-forming property and the light emitting characteristics. Usually, it is 1 to 40% by mass, more preferably 2 to 30% by mass, based on the fluorescent material (light emitting material).

The organic layer may have an electron injection / transport layer, a hole injection / transport layer, etc. in addition to the light emitting layer. The electron transporting material and the hole transporting material used for the electron injecting and transporting layer and the hole injecting and transporting layer made of an organic material may be any of the above-mentioned materials that are suitable in relation to the light emitting layer, the electrode, and the like.

When the above polymer fluorescent substance is used, the thickness of the light emitting layer is 0.5 nm to 10 μm, preferably 1 nm to 1 μm.
μm. In order to increase the current density and the luminous efficiency, the range of 10 to 500 nm is preferable. When the film is formed into a thin film by a coating method, it is desirable to heat and dry at a temperature of 30 to 200 ° C., preferably 60 to 100 ° C. under reduced pressure or an inert atmosphere in order to remove the solvent.
When such a heating and drying step is required, it is preferable to form an inorganic charge injection layer shown below between the electrodes.

When the charge injection / transport layer is formed below the light emitting layer, a certain degree of heat resistance is required when a heat polymerization step is required for forming the light emitting layer. In this case, the glass transition temperature is preferably 200 ° C. or higher, more preferably 3 ° C.
Compounds having a temperature of at least 00 ° C, especially at least 350 ° C, are preferred.

The thickness of the organic hole injecting and transporting layer and the thickness of the electron injecting and transporting layer are not particularly limited, and vary depending on the forming method, but are usually about 5 to 500 nm, especially 10 to 300 nm. Is preferred. When a hole injection layer and a transport layer are provided, it is preferable that the thickness of the injection layer is 1 nm or more and the thickness of the transport layer is 1 nm or more. The injection layer at this time,
The upper limit of the thickness of the transport layer is usually about 500 nm in the injection layer,
The thickness is about 500 nm in the transport layer.

The solvent used for forming the organic layer of the present invention is not particularly limited as long as the organic material dissolves and does not cause any trouble during coating. Specifically, those generally used such as alcohols, hydrocarbons, ketones, and ethers can be used.
Among them, chloroform, methylene chloride, dichloroethane, tetrahydrofuran, toluene, xylene and the like are preferable. Although it depends on the structure and molecular weight of the phosphor, it can be usually dissolved in these solvents in an amount of 0.1% by mass or more.

The negative electrode (electron injection electrode) does not need to be particularly limited because it does not need to have a low work function and an electron injection property when combined with an electron injection layer such as an inorganic electron injection layer. Normal metals can be used. Among them, Al, Ag, In, T in terms of conductivity and ease of handling.
One, two or more metal elements selected from i, Cu, Au, Mo, W, Pt, Pd and Ni, particularly Al and Ag are preferable.

The thickness of the negative electrode thin film may be a certain thickness or more that can provide electrons to the high-resistance inorganic electron injecting and transporting layer, and may be 50 nm or more, preferably 100 nm or more. Although the upper limit is not particularly limited, the film thickness may be generally about 50 to 500 nm.

The following may be used as the electron injection electrode, if necessary. For example, K, Li, Na, M
g, La, Ce, Ca, Sr, Ba, Sn, Zn, Zr
Or a two-component or three-component alloy system containing them for improving stability, for example, Ag.Mg.
(Ag: 0.1 to 50 at%), Al.Li (Li: 0.
01 to 14 at%), In.Mg (Mg: 50 to 80 at%)
%), Al.Ca (Ca: 0.01 to 20 at%), Li
F (F: 0.01~40at%), Li 2 O , and the like.

The thickness of the electron injecting electrode thin film may be a certain thickness or more for sufficiently injecting electrons.
The thickness is preferably 0.5 nm or more, particularly 1 nm or more.
The upper limit is not particularly limited.
It may be about 500 nm. On the electron injection electrode,
Further, an auxiliary electrode (protection electrode) may be provided.

The thickness of the auxiliary electrode may be a certain thickness or more, preferably 50 nm or more, more preferably 100 nm or more, in order to secure electron injection efficiency and to prevent entry of moisture, oxygen or an organic solvent. A range from 100 to 500 nm is preferred. If the auxiliary electrode layer is too thin, the effect cannot be obtained, and the step coverage of the auxiliary electrode layer is reduced, and the connection with the terminal electrode is not sufficient. On the other hand, if the auxiliary electrode layer is too thick, the stress of the auxiliary electrode layer increases, which causes adverse effects such as an increase in the growth rate of dark spots.

As the auxiliary electrode, an optimum material may be selected and used depending on the material of the electron injection electrode to be combined. For example, if importance is placed on ensuring electron injection efficiency, a low-resistance metal such as Al may be used, and if importance is placed on sealing properties, a metal compound such as TiN may be used.

The total thickness of the electron injection electrode and the auxiliary electrode is not particularly limited, but is usually 50 to 500 nm.
It should be about the degree.

The hole injecting electrode material is preferably a material capable of efficiently injecting holes into a high-resistance inorganic hole injecting and transporting layer or an organic hole injecting and transporting layer, and has a work function of 4.5 eV to 5.5 eV. Is preferred. Specifically, tin-doped indium oxide (ITO), zinc-doped indium oxide (IZO), indium oxide (In
₂ O ₃ ), tin oxide (SnO ₂ ) and zinc oxide (Zn
O) having a main composition of either of them is preferable. These oxides may deviate somewhat from their stoichiometric composition. The mixing ratio of SnO ₂ to In ₂ O ₃ is 1 to 20.
wt%, more preferably 5 to 12 wt%. Also, IZO
The mixing ratio of ZnO to In ₂ O ₃ is usually 12
About 32% by weight.

The hole injection electrode may contain silicon oxide (SiO ₂ ) to adjust the work function.
The content of silicon oxide (SiO ₂ ) is preferably about 0.5 to 10% by mol ratio of SiO _{2 to} ITO. S
The inclusion of iO ₂ increases the work function of ITO.

The electrode on the light extraction side has an emission wavelength band,
The light transmittance is usually 400 to 700 nm, particularly preferably 50% or more, more preferably 80% or more, and particularly preferably 90% or more for each emitted light. If the transmittance is too low, the light emission itself from the light emitting layer is attenuated, and it becomes difficult to obtain the luminance required for the light emitting element.

The thickness of the electrode is 50 to 500 nm, especially 50
The range of -300 nm is preferred. The upper limit is not particularly limited. However, if the thickness is too large, there is a fear that the transmittance is reduced or the layer is peeled off. If the thickness is too small, a sufficient effect cannot be obtained, and there is a problem in film strength at the time of production and the like.

Further, in order to prevent deterioration of the organic layers and electrodes of the device, it is preferable to seal the device with a sealing plate or the like. The sealing plate adheres and seals the sealing plate using an adhesive resin layer in order to prevent moisture from entering. The sealing gas is A
An inert gas such as r, He, and N ₂ is preferable. Further, the moisture content of the sealing gas is preferably 100 ppm or less, more preferably 10 ppm or less, and particularly preferably 1 ppm or less. Although there is no particular lower limit for the water content, it is usually about 0.1 ppm.

The material of the sealing plate is preferably a flat plate, and may be a transparent or translucent material such as glass, quartz, and resin. Glass is particularly preferred. As such a glass material, an alkali glass is preferable from the viewpoint of cost, and in addition, a glass composition such as soda lime glass, lead alkali glass, borosilicate glass, aluminosilicate glass, and silica glass is also preferable. In particular, soda glass, a glass material without surface treatment can be used at low cost,
preferable. As the sealing plate, other than a glass plate, a metal plate, a plastic plate, or the like can be used.

The height of the sealing plate may be adjusted by using a spacer and maintained at a desired height. Examples of the material of the spacer include resin beads, silica beads, glass beads, and glass fibers, and glass beads are particularly preferable. The spacer is usually a granular material having a uniform particle size, but the shape is not particularly limited, and may be various shapes as long as it does not hinder the function as the spacer. As the size, the diameter in terms of a circle is 1 to 20 μm, more preferably 1 to 10 μm, and especially 2 to 20 μm.
8 μm is preferred. Those having such a diameter have a grain length of 10
It is preferably about 0 μm or less, and the lower limit is not particularly limited, but is usually about the same as or larger than the diameter.

When a recess is formed in the sealing plate,
Spacers may or may not be used. The preferred size when used is within the above range,
Particularly, the range of 2 to 8 μm is preferable.

The spacer may be mixed in the sealing adhesive in advance, or may be mixed at the time of bonding. The content of the spacer in the sealing adhesive is preferably 0.01
-30% by mass, more preferably 0.1-5% by mass.

The adhesive is not particularly limited as long as it can maintain stable adhesive strength and has good airtightness, but it is preferable to use a cationic curing type ultraviolet curing epoxy resin adhesive. .

In the present invention, the substrate on which the organic EL structure is formed is an amorphous substrate such as glass or quartz, or a crystalline substrate such as Si, GaAs, ZnSe, or Z.
Examples thereof include nS, GaP, and InP, and a substrate in which a crystalline, amorphous, or metal buffer layer is formed on these crystalline substrates can also be used. As the metal substrate, Mo, Al, Pt, Ir, Au, Pd, or the like can be used, and a glass substrate is preferably used. When the substrate is on the light extraction side, it is preferable that the substrate has the same light transmittance as the above-mentioned electrodes.

Further, a large number of the elements of the present invention may be arranged on a plane. By changing the emission color of each element arranged on a plane, a color display can be obtained.

The emission color may be controlled by using a color filter film, a color conversion film containing a fluorescent substance, or a dielectric reflection film on the substrate.

As the color filter film, a color filter used in a liquid crystal display or the like may be used.
The characteristics of the color filter may be adjusted in accordance with the light emitted from the organic EL element to optimize the extraction efficiency and the color purity.

If a color filter capable of cutting off short-wavelength external light that is absorbed by the EL element material or the fluorescence conversion layer is used, the light resistance of the element and the display contrast are improved.

Further, an optical thin film such as a dielectric multilayer film may be used instead of the color filter.

The fluorescent conversion filter film absorbs the EL light and emits light from the phosphor in the fluorescent conversion film to convert the color of the emitted light. It is formed from a fluorescent material and a light absorbing material.

As the fluorescent material, basically, a material having a high fluorescence quantum yield may be used, and it is desirable that the material has a strong absorption in an EL emission wavelength region. In practice, laser dyes and the like are suitable, and rhodamine compounds, perylene compounds, cyanine compounds, phthalocyanine compounds (including subphthalocyanines, etc.) naphthalimide compounds, condensed ring hydrocarbon compounds, condensed heterocyclic compounds A styryl compound, a coumarin compound or the like may be used.

As the binder, basically, a material that does not quench the fluorescence may be selected, and a binder that can be finely patterned by photolithography, printing, or the like is preferable. In the case where the hole injection electrode is formed on the substrate in contact with the hole injection electrode, a material which is not damaged when the hole injection electrode (ITO, IZO) is formed is preferable.

The light absorbing material is used when the light absorption of the fluorescent material is insufficient, but may be omitted when unnecessary. As the light absorbing material, a material that does not quench the fluorescence of the fluorescent material may be selected.

The organic EL device of the present invention is usually used as a DC drive type or pulse drive type EL device, but it can also be driven by AC. The applied voltage is usually 2 to 30
V.

The organic EL device of the present invention may have a structure in which a substrate 1, a hole injection electrode 2, a light emitting layer 4, and a negative electrode 5 are sequentially stacked as shown in FIG. It may be configured. The lamination structure may be appropriately adjusted to an optimum one according to, for example, the specifications of the display and the manufacturing process. In FIG. 1, a drive power source E is connected between the hole injection electrode 2 and the electron injection electrode 5.

The organic EL element of the present invention can be applied to various optical applications such as an optical pickup used for memory read / write, a relay device in a transmission line of optical communication, a photocoupler, etc. in addition to application as a display. Can be used for devices.

[0065]

EXAMPLE A glass substrate manufactured by Corning Co., Ltd. having a trade name of 70 was used.
The 59 substrates were scrub-cleaned using a neutral detergent.

An ITO hole injection electrode layer having a thickness of 200 nm was formed on this substrate at a substrate temperature of 250 ° C. by an RF magnetron sputtering method using an ITO oxide target.

After the surface of the substrate on which the ITO electrode layer and the like were formed was washed with UV / O _3, it was fixed to a substrate holder of a vacuum device, and the pressure in the tank was reduced to 1 × 10 ⁻⁴ Pa or less. A metal mask provided with a 50 μm stopper was mounted on the substrate. This mask has 1 mm square, 0.5 mm square, 0.
A 2 mm square hole is formed.

Next, as a light emitting layer, a precursor methanol solution of polyphenylene vinylene (PPV) having a polymer concentration of 1 g per 10 to 25 g of methanol was spray-coated on the ITO transparent electrode substrate with the mask.

Next, the obtained substrate and the polymer precursor layer were heated in a vacuum oven at a temperature of 300 ° C. for 12 hours.
This heat treatment converted the precursor polymer to PPV. The obtained PPV film had a thickness of 100 to 150 nm.

Next, while maintaining the reduced pressure, the substrate was transferred to a vacuum deposition apparatus, and lithium fluoride (LiF) was deposited to a thickness of 5 nm, and Al was subsequently deposited to a thickness of 200 nm to form a negative electrode. Finally, glass sealing was performed to obtain an organic EL device.

When an electric field was applied to the obtained organic EL device in air, the device showed diode characteristics. When the ITO side was biased positively and the LiF / Al electrode side was biased negatively, the current increased with increasing voltage. However, clear light emission was observed in a normal room. At this time, the accuracy of the application position of the light emitting section was measured by the light emitting area occupying the target area. At that time, the parts that exceeded the target were also evaluated negatively. Each size was represented by an average value at three places. Table 1 shows the results. Note that, even when the light emitting operation was repeatedly performed, no decrease in luminance was observed.

Example 2 In Example 1, the material used for the light emitting layer was changed from PPV to polyvinyl carbazole (PV).
A material obtained by adding 0.5 mol% of coumarin to K) was used.
At this time, Example 1 was repeated except that toluene was used as a solvent and an extrusion coating method was used instead of the spray coating method.
In the same manner as in the above, an organic EL device was obtained.

The obtained device was driven and evaluated in the same manner as in Example 1. Table 1 shows the results.

<Comparative Example 1> In Example 1, a light-emitting layer was formed by applying an ink-jet device to a target position without using a mask when forming the light-emitting layer. Other than that produced the element similarly to Example 1.

The obtained device was driven and evaluated in the same manner as in Example 1. Table 1 shows the results.

[0076]

[Table 1]

As is clear from Table 1, it can be seen that the sample of the present invention can be applied to a more accurate position than the comparative example in any size of the coating amount range. The effect is particularly remarkable in a small area of 0.5 mm square or less.

[0078]

As described above, according to the present invention, it is possible to provide a manufacturing method and an organic EL device capable of obtaining a low-cost, high-efficiency, and long-life organic EL device capable of performing uniform coating with high accuracy. Can be.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a basic configuration of an organic EL element.

[Explanation of symbols]

 Reference Signs List 1 substrate 2 hole injection electrode 3 light emitting layer 4 electron injection electrode

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Emiko Kobe 1-13-1 Nihonbashi, Chuo-ku, Tokyo F-term in TDK Corporation (reference) 3K007 AB02 AB03 AB11 AB18 CA01 CB01 DA01 DB03 EB00 FA01 5F041 AA43 AA44 CA08 CA45 CA67

Claims (6)

[Claims] 1. A method for manufacturing an organic EL device having a pair of electrodes and an organic layer at least involved in a light emitting function between the pair of electrodes, wherein at least one of the organic layers is formed in a solvent. A method for manufacturing an organic EL device, wherein the organic material is formed by applying an organic material dissolved in a coating mask on a coating mask. 2. The method for producing an organic EL device according to claim 1, wherein the method is applied by a screen printing method or a spray method. 3. An organic EL device manufactured by the method according to claim 1. 4. An apparatus for manufacturing an organic EL element having a pair of electrodes and an organic layer involved in at least a light emitting function between the pair of electrodes, wherein at least one electrode is formed on a substrate. An apparatus for manufacturing an organic EL device, comprising: an organic layer forming means for applying an organic material dissolved in a solvent from above a coating mask to form at least one of the organic layers. 5. The organic layer according to claim 4, wherein said organic layer forming means is applied by a screen printing method or a spray method.
Manufacturing method of L element. 6. An organic EL device manufactured by the method according to claim 4.