JP2001230209A - Substrate treating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To preserve the record of past important error alarms by going back to the past as much as possible. SOLUTION: When an alarm detecting section 51 detects an alarm in an alarm logging function section 50 built in a main controller 31, a logging data collecting section 52 collects the data required for performing logging, and an alarm level discriminating section 53 discriminates whether the detected alarm is a warning alarm or error alarm. A file writing section 54 separately records warning alarms in a warning alarm file 55 and error alarms in an error alarm file 56. When both a warning alarm and an error alarm are displayed thereafter, a file reading-out section 57 couples the files 55 and 56 with each other and causes a displaying section 58 to display an alarm displaying picture in which the warning and error alarms are coupled with each other by sorting by using date data as a key. Therefore, even when warning alarms are frequently issued, the alarms can be preserved independently.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus, and more particularly, to an alarm logging function (recording an error alarm or an alarm generated during the operation of the substrate processing apparatus as a history together with the date and time of occurrence and the state of occurrence in a controller. For example, a liquid crystal display (hereinafter, LC)
It is called D. The present invention relates to a technique effective in a multi-chamber single-wafer plasma CVD apparatus for forming a film of amorphous silicon (hereinafter referred to as a-Si), silicon nitride (SiNx), or the like on an array substrate in a manufacturing process.

[0002]

2. Description of the Related Art In a process of manufacturing an LCD, a multi-chamber single-wafer plasma CVD having a plurality of chambers is used to deposit a-Si, silicon nitride, or the like on an array substrate.
An apparatus (hereinafter, referred to as a CVD apparatus) is used.
The CVD apparatus includes a plurality of chambers for depositing a-Si or silicon nitride on an array substrate, a transport device for transporting the array substrate and carrying it into and out of each chamber, and a processing and transport device for each chamber. And a main controller that controls the group of sub-controllers.

[0003] In this CVD apparatus, for example, when the exhaust capacity of the chamber is reduced or the transfer device stops operating, the sub-controller detects them and issues an alarm, and the main controller generates the alarm. Alarm information is displayed on the screen to notify the operator, and the alarm history is recorded in a file. The function of recording an alarm history in a CVD apparatus is called an alarm logging function. And
The file that records the alarm history is called an alarm file.

[0004] The alarm history is used not only for grasping the operation status of the CVD apparatus, but also for predicting the trouble (failure) of the CVD apparatus and analyzing the cause of the defect of a product manufactured from the processed substrate. You. That is, a future trouble of the CVD apparatus can be predicted by investigating a past alarm occurrence tendency based on the alarm history. Further, by tracking past alarms based on the alarm history, it is possible to analyze the cause of the product failure.

An alarm generated in a CVD apparatus is as follows.
Alarm level alarm (hereinafter referred to as alarm alarm)
And error level alarms (hereinafter referred to as error alarms). The alarm is an alarm that notifies the operator that the CVD apparatus is in an unusual state, although no particular trouble occurs in the operation of the CVD apparatus. The error alarm is for notifying an abnormality that hinders the operation of the CVD apparatus. When this error alarm occurs, an abnormal measure is executed and the operation of the CVD apparatus is safely stopped.

Due to the limitation of the recording capacity of the main controller, the number of alarms that can be logged in the alarm file (the number of alarm loggings) is limited, for example, to a maximum of thousands of alarm loggings. When an alarm occurs exceeding the number of logs, the oldest alarm data recorded in the alarm file is deleted, and the newly generated alarm is newly recorded in the alarm file. I have.

The conventional alarm file is composed of one file for the following reason.
In other words, based on the concept of alarms that the occurrence of an alarm is a problem regardless of the level, the emphasis has been placed on organizing the alarm history in chronological order. It was organized into one file.

[0008]

However, in the conventional CVD apparatus described above, since the alarm file is composed of one file, both the alarm and the error alarm are recorded in the same file. For example, if one error alarm occurs and then more than a thousand alarm alarms occur, the first error alarm record is deleted from the alarm file before being examined by the operator, resulting in a trouble in the CVD apparatus. There is a problem that an important error alarm cannot be investigated in prediction or product failure analysis.

SUMMARY OF THE INVENTION An object of the present invention is to prevent a situation in which a past important error alarm is deleted from an alarm file when a large number of alarm alarms are generated, and to record a history of important error alarms as much as possible. An object of the present invention is to provide a substrate processing apparatus that can store data for a long time in the past.

[0010]

Means for solving the problem is characterized by having an alarm logging function for recording an alarm generated during substrate processing as a separate file for each alarm level.

According to the above-described means, for example, since the alarm alarm and the error alarm are recorded as separate files, the history of important error alarms is recorded separately from the alarm alarm. The history of various error alarms can be saved long ago.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

In this embodiment, the substrate processing apparatus according to the present invention is configured as a CVD apparatus for forming a-Si, silicon nitride, or the like on an array substrate (hereinafter, referred to as a substrate) in an LCD manufacturing process. . As shown in FIG. 1, the CVD apparatus 10 includes a main frame vacuum transfer chamber (hereinafter, referred to as a vacuum transfer chamber) 11 formed in an octagonal cylindrical shape. One vacuum load lock chamber (hereinafter referred to as a load lock chamber) 12 and 13, a substrate pre-heating chamber (hereinafter referred to as a heating chamber) 14, and five plasma CVD chambers (hereinafter referred to as a CVD chamber) 15, 16, 17. , 18 and 19 are arranged. Inside the vacuum transfer chamber 11, a vacuum transfer robot 20 as a transfer device for transferring a substrate into and out of each of the chambers 12 to 19 is provided. A vacuum gate valve (not shown) is provided between the vacuum transfer chamber 11 and each of the chambers 12 to 19.

An atmosphere transfer chamber 21 is installed on the opposite side of the load transfer chambers 12 and 13 from the vacuum transfer chamber 11, and a substrate is placed inside the atmosphere transfer chamber 21 with respect to the load lock chambers 12 and 13. An atmospheric transfer robot 22 is provided as a transfer device for loading and unloading. A cassette stand 23 is provided on the opposite side of the atmospheric transfer chamber 21 from the load lock chambers 12 and 13, and a plurality of cassettes 24 each accommodating a plurality of substrates are arranged side by side on the cassette stand 23. I have.

The CVD apparatus 10 has a control system 30 shown in FIG. 2 for controlling each chamber, a transfer robot and the like.
It has. As shown in FIG. 2, the control system 30 includes a main controller 31 constructed from a personal computer, an FA computer, and the like.
The main controller 31 is connected to an input / output device 32 including a flow panel, a keyboard, a touch panel, a display, a printer, an audio alarm device, and the like.
The main controller 31 includes various sub-controllers 3
3 to 41 are connected.
Reference numerals 3 to 41 control the respective chambers and the respective robots, and are configured to monitor the states of the respective chambers and the respective robots through various sensors.

For example, the pressure control sub-controller 33 controls the vacuum transfer chamber 11, the load lock chamber 12,
The pressure of 3 or the like is controlled via a vacuum exhaust device (not shown). The pressure is monitored by a pressure gauge, and if a decrease in exhaust capability is detected, an alarm or error alarm is provided. The data is transmitted to the controller 31. The heating chamber sub-controller 34 controls the temperature of the heating chamber 14 via a heater. The temperature is monitored by a thermometer. When a decrease in the heating capacity of the heater is detected, an alarm or error alarm is issued. Is transmitted to the main controller 31. The first CVD sub-controller 35 controls the first CVD chamber 15 via a high-frequency power supply, a source gas supply device, and the like. Is detected, an alarm or an error alarm is transmitted to the main controller 31.
The vacuum transfer robot sub-controller 40 and the atmospheric transfer robot sub-controller 41
Also, the electric motor and the like are monitored by a vibration sensor, a voltmeter and an ammeter so as to control the atmosphere transfer robot 22 via the electric motor and the like, respectively. An alarm is transmitted to the main controller 31.

The main controller 31 has a storage device 42
Is connected, and an alarm file and the like used by the alarm logging function unit 50 described later are constructed in the storage device 42. The main controller 31 is connected to a host computer 43 for comprehensively managing and controlling the production process of the LCD device. The host computer 43 issues a new lot recipe necessary for controlling a film forming process described later. Get numbers and more.

An alarm logging function unit 50 is constructed (programmed) in a part (software) of the main controller 31.
Are configured as shown in FIG. That is, the alarm logging function unit 50
1. a logging data collecting unit 52, an alarm level judging unit 53, a file writing unit 5 for writing alarm logging to an alarm file 55 and an error file 56 of an alarm file constructed in the storage device 42.
4. It also has a file reading section 57 with a data linking function and a display section 58 that are also read out, and these are configured to execute an alarm logging flow described later.

Next, the operation of the CVD apparatus having the above configuration will be described. First, the overall operation of the CVD apparatus 10 is shown in FIG.
Will be described.

The substrates to be processed are supplied to a cassette stand 23 in a state where a plurality of substrates are stored in a cassette 24. The substrate in the cassette stand 23 is carried into the first load lock chamber 12 by the atmospheric transfer robot 22. At this time, a plurality of substrates are carried into the load lock chamber 12 for each lot.

The substrate carried into the first load lock chamber 12 is carried by the vacuum carrying robot 20 and carried into the heating chamber 14 where it is preheated. The preheated substrate is heated by the vacuum transfer robot 20 in the heating chamber 1.
4 to be carried out.

Thereafter, the substrate is repeatedly loaded and unloaded to the first to fifth CVD chambers 15 to 19 to execute a predetermined film forming process. At this time, the vacuum transfer robot 20 is operated by the vacuum transfer robot sub-controller 4.
0 according to the transport route by the recipe number provided
The substrates are sequentially transferred to the first to fifth CVD chambers 15 to 19.

The substrate which has completed the predetermined transfer route is loaded into the second load lock chamber 13 by the vacuum transfer robot 20. After the substrate is cooled in the second load lock chamber 13, the substrate is returned to a predetermined cassette 24 of the cassette stand 23 by the atmospheric transfer robot 22.

If any trouble occurs in the above film forming process, the trouble is detected by each of the predetermined sub-controllers 33 to 41, and is transmitted to the main controller 31 as an alarm or an error alarm. The main controller 31 logs an alarm alarm and an error alarm in an alarm file according to an alarm file creation flow described later. When an error alarm is transmitted, the main controller 31
A command to safely stop the CVD apparatus is transmitted to a predetermined sub-controller among 3 to 41.

Next, the operation of the alarm logging function unit 50 according to the present embodiment will be described with reference to the flowcharts shown in FIGS.

Here, the concept of the alarm alarm and the error alarm, which are the premise of the operation of the alarm logging function unit 50 according to the present embodiment, will be described.

The alarm generated by the CVD apparatus includes an alarm for preventing a serious trouble from occurring and a C alarm.
There are two types of error alarms: the CVD apparatus must be safely stopped when a serious trouble occurs in the VD apparatus.

On the other hand, from the viewpoint of LCD productivity, CVD
There is a demand that the operation of the device should not be stopped as much as possible. Therefore, when an alarm occurs, the CV
The D apparatus continues the operation as it is. Then, when an alarm is generated, a measure (for example, replacement of the heater) for a trouble (for example, deterioration of the heater) that caused the alarm for the next maintenance can be immediately taken. Take precautionary measures such as purchasing a new heater in advance. That is, the alarm is used as a trigger (trigger or motivation) for preparing for the execution of the part replacement work at the time of maintenance. That is, in the present embodiment, the allowable detection value of the alarm alarm is set strictly to prevent the occurrence of the trouble of the CVD apparatus which leads to the generation of the error alarm.

By the way, in the conventional alarm logging function, since both the alarm and the error alarm are recorded in the same alarm file, for example, when the allowable detection value of the alarm is set strictly, the alarm alarm frequently occurs. Occurs, and as a result, the error alarm is deleted from the alarm file before the operator investigates it. Therefore, in the conventional alarm logging function, it is not possible to strictly set an alarm alarm detection allowable value. For this reason,
In the conventional alarm logging function, the alarm cannot be used as a trigger for preparing for a part replacement operation at the time of maintenance.

Next, the flow of creating an alarm file of the alarm logging function unit 50 shown in FIG. 3 will be described with reference to FIGS.
It will be explained by.

In the first step A1 of the flow for creating an alarm file shown in FIG. 4, the alarm detecting section 51 of the alarm logging function section 50 detects the presence or absence of an alarm. That is, it detects whether an alarm has been transmitted from the sub-controllers 33 to 41 to the main controller 31. If no alarm is detected (NO), the first step A1 is repeated. When an alarm is detected (YES), the process proceeds to the second step A2.

In the second step A2, the logging data collecting section 52 collects data necessary for logging, and proceeds to a third step A3.

In the third step A3, the alarm level judgment section 53 judges whether the alarm is an alarm or an error alarm. In the case of an alarm, the process proceeds to a fourth step A4, and in the case of an error alarm, the process proceeds to a seventh step A7.

In the fourth step A4, the file writing section 54 determines whether or not the number of records already stored in the alarm file 55 shown in FIG. If the number is 500 or more (YES), the process proceeds to a fifth step A5. If the number is less than 500 (NO), the process proceeds to a sixth step A6.

In the fifth step A5, as shown in FIG. 5B, the file writer 54 deletes the oldest data record in the alarm file 55 and updates the record number, and the sixth step A6. Proceed to.

In the sixth step A6, as shown in FIG. 5B, the file writer 54 writes a new alarm (for example, insufficient heating in the heating chamber) in the updated record of the alarm alarm file 55. Write).

On the other hand, in the seventh step A7, the file writing section 54 determines whether or not the number of already saved records in the error alarm file 56 shown in FIG. . More than 500 cases (YE
In S), the process proceeds to an eighth step A8. When the number is less than 500 (NO), the process proceeds to a ninth step A9.

In the eighth step A8, as shown in FIG. 6B, the file writer 54 deletes the oldest data record of the error alarm file 56 and updates the record number, and the ninth step A9 Proceed to.

In a ninth step A9, as shown in FIG. 6B, the file writing unit 54 writes a new error alarm (for example, second CVD gas leak) in the updated record of the error alarm file 56. Write).

Thereafter, each time the alarm detection unit 51 detects an alarm, the above-described loop is repeated, so that the alarm alarm and the error alarm are sequentially logged in separate alarm alarm files 55 and 56. .

Next, the display flow of the alarm file of the alarm logging function unit 50 shown in FIG. 3 will be described with reference to FIGS.

The input / output device 32 of the main controller 31
When the display of the alarm file is instructed by the operator's operation, a selection screen 59 as shown in FIG. 8A is displayed on the display unit 58 constituted by the display of the input / output device 32.

In the first step B1 of the alarm file display flow shown in FIG. 7, the operator selects an alarm desired to be displayed from the selection screen 59. In this example, it is assumed that “display both alarm alarm and error alarm” is selected.

In the second step B2, the file reading section 57 determines whether or not to display an alarm. If an alarm is to be displayed (YES), the process proceeds to the third step B3, and if no alarm is to be displayed (NO).
Proceeds to the fourth step B4. Note that displaying the alarm alarm (YES) includes displaying both the alarm alarm and the error alarm.

In the third step B3, the file reading section 57 reads the alarm file 55 into the first memory M1 of the display section 58, and proceeds to a fifth step B5.

In the fourth step B4, the file reading section 57 clears the first memory M1 of the display section 58, and proceeds to the fifth step B5.

In the fifth step B5, the file reading section 57 determines whether or not to display an error alarm.
When an error alarm is displayed (YES), the process proceeds to a sixth step B6, and when no error alarm is displayed (NO), the process proceeds to a seventh step B7. Note that displaying an error alarm (YES) includes displaying both an alarm alarm and an error alarm.

In the sixth step B6, the file reading section 57 reads the error alarm file 56 into the second memory M2 of the display section 58, and proceeds to the eighth step B8.

In the seventh step B7, the file reading section 57 clears the second memory M2 of the display section 58, and proceeds to the eighth step B8.

In an eighth step B8, the file reading section 57 connects the first memory M1 and the second memory M2,
Proceed to ninth step B9.

In the ninth step B9, the file reading section 57 sorts the combined alarm and error alarms using the date data as a key, and proceeds to a tenth step B10.

In the tenth step B10, the display unit 58
8B shows an alarm display screen 60 of a combined file of the alarm alarm and the error alarm shown in FIG.

For example, the operator displays the alarm display screen 6
Looking at the alarm alarm and the error alarm displayed at 0, the user purchases a part (for example, a heater) to be replaced at the time of maintenance.

According to the above embodiment, the following effects can be obtained.

1) By recording the alarm alarm and the error alarm as separate files, even if the alarm alarm occurs frequently, it is possible to prevent the error alarm from being deleted due to the influence of the alarm. Therefore, the history of important error alarms can be stored long back in the past.

2) Even if the alarm alarm occurs frequently, the error alarm can be prevented from being deleted, so that the allowable detection value of the alarm can be set strictly. This can be used as a reference for determination of the time point or the like.

3) By using the alarm as a guide for determining the time of replacement of parts, etc., parts to be replaced at the time of maintenance can be prepared in advance, so that the maintenance work time can be shortened. , Can be implemented accurately and efficiently.

4) When displaying the alarm file, the alarm alarm file and the error alarm file are combined and sorted and displayed in chronological order, so that the temporal relationship between the alarm alarm and the error alarm can be properly recognized. Operating conditions and CV
The prediction of the trouble of the D device and the analysis of the cause of the product failure can be performed in the same manner as in the related art, even though the alarm alarm and the error alarm are filed separately.

5) By recording the alarm alarm and the error alarm as separate files, the alarm alarm and the error alarm can be displayed separately. Can be easily recognized.

6) By recording the alarm alarm and the error alarm as separate files, it is possible to display the alarm alarm and the error alarm separately at a higher speed than before and without burdening the processor. That is, if you want to display the alarm alarm and the error alarm separately in the conventional alarm logging function,
You need a program to extract alarm or error alarms from one alarm file.
The load on the processor is high, and a high-speed processor is required for high-speed processing.

It should be noted that the present invention is not limited to the above-described embodiment, and it is needless to say that various changes can be made without departing from the gist of the present invention.

For example, the alarm levels to be separately logged are not limited to two alarm alarms and error alarms, but may be set to three or more alarm levels.

The alarm logging function unit is not limited to being provided in the main controller, but may be provided with dedicated software or hardware.

In the above embodiment, the case where the present invention is applied to a CVD apparatus has been described. However, the present invention is not limited to this, and can be applied to general substrate processing apparatuses such as a sputtering apparatus and a dry etching apparatus.

In the above embodiment, the substrate processing apparatus used in the LCD manufacturing method has been described. However, the present invention can be applied to a substrate processing apparatus used in a preceding process of the semiconductor device manufacturing method.

[0066]

As described above, according to the present invention,
By recording as a separate file for each alarm level, the history of important alarms can be saved long in the past.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing a CVD apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram showing the control system.

FIG. 3 is a block diagram showing the alarm logging function unit.

FIG. 4 is a flowchart illustrating creation of an alarm file.

FIG. 5 is a schematic diagram showing an alarm file;
(A) shows the state before deletion and addition, and (b) shows the process of deletion and addition.

FIGS. 6A and 6B are schematic diagrams showing an error alarm file. FIG. 6A shows a state before deletion and addition, and FIG. 6B shows a process of deletion and addition.

FIG. 7 is a flowchart showing display of an alarm file.

FIG. 8A is a screen diagram showing a selection screen, and FIG.
Is a screen diagram showing an alarm display screen.

[Explanation of symbols]

10: CVD apparatus (substrate processing apparatus), 11: vacuum transfer chamber (main frame vacuum transfer chamber), 12, 1
3 ... load lock chamber (vacuum load lock chamber), 14 ... heating chamber (substrate preheating chamber),
15, 16, 17, 18, 19: CVD chamber (plasma CVD chamber), 20: vacuum transfer robot (transfer device), 21: atmospheric transfer chamber, 22: atmospheric transfer robot (transfer device), 23: cassette stand, 24 .. Cassette, 30 control system, 31 main controller, 32 input / output device, 33 to 41 sub controller, 42 storage device, 43 host computer, 50
... Alarm logging function unit, 51 ... Alarm detection unit, 5
2 logging data collection unit 53 alarm level judgment unit 54 file writing unit 55 alarm alarm file 56 error alarm file 57 file reading unit with data combining function 58 display unit 59 Selection screen, 60 ... Alarm display screen.

Continued on the front page (72) Inventor Tsukasa Yashima 3-14-20 Higashinakano, Nakano-ku, Tokyo International Electric Co., Ltd. F term (reference) 4K030 BA30 BA40 GA12 KA39 KA41 LA18 5F045 AA08 AB04 AB33 BB20 CA15 DQ17 EB08 GB15 HA25

Claims (1)

[Claims] 1. A substrate processing apparatus having an alarm logging function of recording an alarm generated during substrate processing as a separate file for each alarm level.