JP2001228306A5 - - Google Patents

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Publication number
JP2001228306A5
JP2001228306A5 JP2000038450A JP2000038450A JP2001228306A5 JP 2001228306 A5 JP2001228306 A5 JP 2001228306A5 JP 2000038450 A JP2000038450 A JP 2000038450A JP 2000038450 A JP2000038450 A JP 2000038450A JP 2001228306 A5 JP2001228306 A5 JP 2001228306A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000038450A
Other languages
Japanese (ja)
Other versions
JP4408516B2 (en
JP2001228306A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000038450A priority Critical patent/JP4408516B2/en
Priority claimed from JP2000038450A external-priority patent/JP4408516B2/en
Publication of JP2001228306A publication Critical patent/JP2001228306A/en
Publication of JP2001228306A5 publication Critical patent/JP2001228306A5/ja
Application granted granted Critical
Publication of JP4408516B2 publication Critical patent/JP4408516B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000038450A 2000-02-16 2000-02-16 Lens cleaning method and lens cleaning device Expired - Fee Related JP4408516B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000038450A JP4408516B2 (en) 2000-02-16 2000-02-16 Lens cleaning method and lens cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000038450A JP4408516B2 (en) 2000-02-16 2000-02-16 Lens cleaning method and lens cleaning device

Publications (3)

Publication Number Publication Date
JP2001228306A JP2001228306A (en) 2001-08-24
JP2001228306A5 true JP2001228306A5 (en) 2007-03-15
JP4408516B2 JP4408516B2 (en) 2010-02-03

Family

ID=18562183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000038450A Expired - Fee Related JP4408516B2 (en) 2000-02-16 2000-02-16 Lens cleaning method and lens cleaning device

Country Status (1)

Country Link
JP (1) JP4408516B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120114875A1 (en) * 2010-11-10 2012-05-10 Dewa Paul G Surface contamination metrology
CN110320626A (en) * 2018-03-30 2019-10-11 日本电产三协(东莞)工机有限公司 Cemented lens
CN108672413A (en) * 2018-08-01 2018-10-19 中山普宏光电科技有限公司 A kind of excimer laser intelligence cleaning equipment
CN110266925B (en) * 2019-06-28 2021-05-25 李峥炜 Easy dust removal camera
CN114040820A (en) * 2019-07-02 2022-02-11 恩特格里斯公司 Method for removing particles from a surface using laser energy

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