JP2001220113A - Ozone generating electrode plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably generate ozone without fluctuating the concentration of ozone with a gas component added to zone generating material. SOLUTION: An ozone generating electrode plate used for an zone generating device for generating ozone 12 from the gaseous starting material 10 for zone is provided with a substrate 1, a pair of electrodes 2 and 3 which is provided on the substrate 1 and to which AC voltage is applied, and a dielectric layer 4 covering a pair of the electrodes 2 and 3, and a material having a composition containing 10-90 wt.% bismuth oxide, 10-90 wt.% zinc oxide and 0-40 wt.% lead oxide is used for the dielectric layer 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generating electrode plate used in an ozone generating apparatus for generating ozone from an ozone raw material gas, and more particularly to a method for preventing an ozone concentration from fluctuating due to a gas component added to the ozone raw material gas. The present invention relates to an ozone generating electrode plate that enables stable ozone generation.

[0002]

2. Description of the Related Art Conventionally, ozone has been widely used for the purpose of sterilization, deodorization, and decolorization of water and sewage, deodorization and decolorization of industrial wastewater treatment, pulp decolorization, and sterilization of medical equipment.

[0003] As an ozone generating apparatus for generating ozone, there is known an ozone generating apparatus which includes a plurality of electrodes facing each other and generates silent discharge, that is, volume discharge, between the plurality of electrodes to generate ozone from an ozone raw material gas. Have been.

[0004] Of this type of ozone generator,
Ozone is generated from oxygen gas, which is an ozone raw material gas, by adding a small amount of nitrogen gas or carbon dioxide gas.
It becomes easy to generate a high concentration of ozone.

[0005] In particular, this is remarkable in short gap discharge, and it is generally practiced to add about 2 to 4% (%) of nitrogen gas to oxygen gas as an ozone raw material gas and supply it to an ozone generator. ing.

[0006] Regarding this reason, a clear cause has not been clarified conventionally, and it is difficult to eliminate the added gas.

[0007]

By the way, recently,
By using the coplanar surface discharge, 300 (g /
It has become possible to generate ozone at an extremely high concentration of Nm ³ ) or more.

However, as in the case of the above-described conventional example, a very small amount of nitrogen gas or carbon dioxide contained in the oxygen gas, which is the ozone raw material gas, causes a large fluctuation in the concentration of the generated ozone.

An object of the present invention is to provide an ozone generating electrode plate which enables stable ozone generation so that the ozone concentration does not fluctuate due to a gas component added to the ozone source gas.

[0010]

According to an aspect of the present invention, there is provided an ozone generating electrode plate for use in an ozone generating apparatus for generating ozone from an ozone raw material gas. A pair of electrodes provided on a substrate and to which an AC voltage is externally applied, and a dielectric layer covering the pair of electrodes, comprising 10 to 90% by weight of bismuth oxide as a material of the dielectric layer. (Wt%), 10 to 90 weight percent zinc oxide (w
t%) and a composition having a lead oxide content of 0 to 40% by weight (wt%).

Therefore, in the ozone generating electrode plate according to the present invention, the material of the dielectric layer is
10 to 90 weight percent (wt%) bismuth oxide;
It contains 10 to 90 weight percent (wt%) of zinc oxide and has a lead oxide content of 0 to 40 weight percent (wt%).
%), The ozonolysis reaction on the surface of the dielectric layer can be suppressed, and extremely stable high-concentration ozone can be generated.

According to a second aspect of the present invention, in the ozone generating electrode plate according to the first aspect, the substrate is made of soda glass or a material having a linear expansion coefficient substantially equal to that of the soda glass. 20 to 30 weight percent (wt%) of bismuth oxide, 30 to 40 weight% (wt%) of zinc oxide, 15 to 25 weight% (wt%) of boron oxide, Silicon is added in an amount of 0 to 10 weight percent (w
t%).

Accordingly, in the ozone generating electrode plate according to the present invention, the substrate is made of soda glass or a material having a linear expansion coefficient substantially equal to that of the soda glass, and is used as a material of the dielectric layer. 20-30 weight percent (wt%) of bismuth oxide, 30-40 weight% (wt%) of zinc oxide, 15-25 weight% (wt%) of boron oxide, and 0-0 of silicon oxide.
By adopting a composition containing 10% by weight (wt%), the same effect as that of the invention corresponding to claim 1 described above can be exhibited more effectively and remarkably.

According to a third aspect of the present invention, an ozone generating electrode plate used in an ozone generating apparatus for generating ozone from an ozone raw material gas is provided on a substrate and on the substrate. A pair of electrodes, a dielectric layer covering the pair of electrodes, and a powder layer provided on the dielectric layer.

Therefore, in the ozone generating electrode plate according to the third aspect of the present invention, by providing a powder layer on the dielectric layer, the ozone decomposition reaction on the surface of the dielectric layer is suppressed, and the ozone generation reaction is extremely stable. High concentration ozone can be generated.

According to a fourth aspect of the present invention, in the ozone generating electrode plate according to the first aspect, a powder layer is provided on the dielectric layer.

Therefore, in the ozone generating electrode plate of the invention corresponding to claim 4, by providing a powder layer on the dielectric layer, the same as the invention corresponding to claim 1 and claim 3 described above. Can be simultaneously performed.

According to a fifth aspect of the present invention, in the ozone generating electrode plate according to the third or fourth aspect, the particle size of the powder in the powder layer is set to 10 micrometers (μm) or less. I do.

Therefore, in the ozone generating electrode plate according to the present invention, a uniform layer is formed by setting the particle diameter of the powder of the powder layer to 10 micrometers (μm) or less. The same operation as the invention corresponding to claim 3 or claim 4 can be more effectively and significantly exhibited.

According to a sixth aspect of the present invention, in the ozone generating electrode plate according to the third aspect of the present invention, as the powder of the powder layer, silicon oxide or oxidized oxide is used. Use zinc.

Therefore, in the ozone generating electrode plate according to the present invention, silicon oxide or zinc oxide is used as the powder of the powder layer.
The same effect as the invention corresponding to any one of the third to fifth aspects described above can be more effectively and significantly exhibited.

On the other hand, in the invention according to claim 7, an ozone generating electrode plate used for an ozone generating apparatus for generating ozone from an ozone raw material gas is provided on a substrate and on the substrate, and an AC voltage is applied from the outside. A pair of electrodes, a dielectric layer covering the pair of electrodes, and a thin film layer formed on the dielectric layer by a resinate method.

Accordingly, in the ozone generating electrode plate according to the present invention, the thin film layer formed by the resinate method is provided on the dielectric layer, so that the ozone decomposition reaction on the surface of the dielectric layer is prevented. It is possible to generate highly stable high-concentration ozone by suppressing the concentration.

According to an eighth aspect of the present invention, in the ozone generating electrode plate according to the first aspect of the present invention, a thin film layer is formed on the dielectric layer by a resinate method.

Therefore, in the ozone generating electrode plate according to the present invention, a thin film layer is formed on the dielectric layer by the resinate method, so that the ozone generating electrode plate corresponds to the above-described first and seventh aspects, respectively. The same operation as that of the invention can be achieved at the same time.

Further, in the invention corresponding to claim 9, in the ozone generating electrode plate according to the invention according to claim 7 or 8, silicon oxide or zinc oxide is used as the thin film layer.

Therefore, in the ozone generating electrode plate according to the ninth aspect of the invention, by using silicon oxide or zinc oxide as the thin film layer, the ozone generating electrode plate has the same structure as the above-described seventh or eighth aspect. Can be more effectively and significantly exerted.

[0028]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(First Embodiment) FIG. 1 is a schematic diagram showing a configuration example of an ozone generating electrode plate according to the present embodiment,
FIG. 2 is a schematic diagram showing a configuration example of a surface discharge type ozone generator using the same ozone generation electrode plate.

In FIGS. 1 and 2, an ozone generating electrode plate according to the present embodiment has a substrate 1 made of glass (for example, soda glass), and a conductive material such as a silver paste on the surface of the substrate 1, for example, a screen. It comprises a plurality of pairs of electrodes 2 and 3 provided by printing or the like, and a dielectric layer 4 which covers the plurality of pairs of electrodes 2 and 3.

Here, the dielectric layer 4 of the ozone generating electrode plate contains 10 to 90% by weight (wt%) of bismuth oxide, 10 to 90% by weight (wt%) of zinc oxide, and Lead oxide content is 0-4
One having a composition of 0 weight percent (wt%) is used.

In particular, it is preferable that the substrate 1 is made of soda glass or a material having a linear expansion coefficient substantially equal to that of the soda glass, and that the dielectric layer 4 is made of bismuth oxide of 20 to 30% by weight ( wt%), 30 to 40% by weight (wt%) of zinc oxide, 15 to 25% by weight (wt%) of boron oxide, and 0 to 10% by weight (wt%) of silicon oxide. preferable.

On the other hand, on the back side of the substrate 1, a cooling plate 6 made of metal cooled by cooling water 5 is provided in close contact with the substrate 1.

A plurality of pairs of electrodes 2 and 3 are connected to an external AC power source 8 for applying a high AC voltage by wiring 7.
Are connected.

Further, a gas guide 9 is provided on the surface of the substrate 1 on the side of the electrodes 2 and 3, and an ozone source gas (for example, oxygen gas) 10 is externally supplied with a plurality of pairs of electrodes 2 and 3. To fill the space.

Then, between a plurality of pairs of electrodes 2 and 3,
By applying a high AC voltage from the AC power supply 8, a surface discharge 11 is generated on the surface of the dielectric layer 4, and the surface discharge 11 generates ozone 12 from the ozone raw material gas 10.

Next, the operation of the ozone generating apparatus to which the ozone generating electrode plate of the present embodiment configured as described above is applied will be described.

In the ozone generating apparatus to which the ozone generating electrode plate of this embodiment is applied, a plurality of pairs of electrodes 2 and
3 is covered with the dielectric layer 4, the electrodes 2
The three surfaces are not directly exposed to the creeping discharge 11 and have a long life without spatter deterioration.

In the creeping discharge 11, the electrons e generated by the discharge dissociate the oxygen molecules O ₂ to generate oxygen atoms O.
Furthermore, this oxygen atom O combines with another oxygen molecule O ₂ to generate ozone O ₃ .

[0040] _{e + O 2 → e + O} + O ...... (1) O + O 2 + O 2 → O 3 + O 2 ...... (2) Furthermore, in the creeping discharge 11, oxygen molecules O from ozone O ₃
A reverse reaction to ₂ also occurs.

E 10 O ₃ → e + O 10 O ₂ (3) O + O ₃ → O ₂ + O ₂ (4) The reaction equation in the surface discharge 11 is represented by the equation (4). This is the same as the volume discharge which is the barrier discharge employed in the conventional ozone generator.

However, the ozone generator of the present embodiment generates a discharge in a creeping discharge 11, which is an extremely small space near the surface of the dielectric layer 4, and generates electrons during discharge to the surface of the dielectric layer 4. , And radical collisions by oxygen atoms occur violently. Therefore, the reaction of O + O ₃ + wall → O ₂ + O ₂ + wall (5) e + O ₃ + wall → e + O + O ₂ + wall (6) occurs more remarkably than the conventional ozone generator.

This reaction takes place on the surface (wall) of the dielectric layer 4.
Is a kind of catalytic reaction, and as a result, ozone O ₃ decomposition is severely generated. Such a reaction rate largely depends on the surface material of the dielectric layer 4 because of the catalytic reaction.

In the present embodiment, as a result of trying various substances for such a reaction which was not known conventionally, the material of the dielectric layer 4 suitable for generating ultra-high concentration ozone was
It is applied to an ozone generating electrode plate.

Incidentally, the dielectric layer 4 generally needs to be in close contact with the substrate 1 made of glass. If the electrodes 2 and 3 are not in close contact with the substrate 1, a gap exists between the dielectric layer 4 and the substrate 1.
During this time, dielectric breakdown occurs through this gap, and ozone cannot be generated.

In order to adhere these together, the coefficient of linear expansion of the dielectric layer 4 needs to substantially match the coefficient of linear expansion of the substrate 1 made of glass. For the substrate 1, soda glass is the most easily available industrially in terms of material cost. Soda glass has a linear expansion coefficient of 70 to 100 × 10 ⁻⁷ , which is a large value among the glasses. Therefore, a so-called lead glass containing 40 wt% (weight percent) or more of lead oxide is used as the dielectric layer 4.

Using this lead glass as the dielectric layer 4, the ozone raw material gas 10 is introduced as pure oxygen gas containing 99.9% or more oxygen into the surface discharge ozone generator of the ozone embodiment.

Under these conditions, the electrodes 2, 3
A high AC voltage is applied from an AC power supply 9 to the dielectric layer 4.
Even if creeping discharge 11 is generated on the surface and ozone 12 is generated from ozone source gas 10 by this creeping discharge 11,
Ozone concentration does not rise.

The ozone generation characteristics at this time are shown as lead oxide in FIG.

FIG. 5 is a graph showing the ozone generation characteristics. The horizontal axis is the ozone concentration, that is, the standard state (0 degree Celsius,
The vertical axis represents the ozone yield, that is, the number of grams of ozone that can be generated per kilowatt-hour, which is a unit of power, at 1 atmosphere).

The ozone concentration is at most 10 g / Nm3 or less, and the ozone yield is at most 10 g / kWh or less. This is because a maximum ozone concentration of 200 g / N generated by a volume discharge type ozone generator which has been conventionally used for industrial purposes.
m3, the maximum ozone yield is 140 g / kWh, which is extremely small and not practical.

Therefore, a so-called bismuth glass is used as the material of the dielectric layer 4, which suppresses the lead oxide content to 40 wt% or less and has a linear expansion coefficient matching that of soda glass as the material of the substrate 1. Very high ozone generation characteristics can be obtained.

FIG. 5 is a graph showing the ozone generation characteristics of bismuth glass.

As shown in FIG. 5, extremely high values can be obtained for both the ozone concentration and the ozone yield. The reason for this is that the reactions shown in the above equations (5) and (6) do not occur on the bismuth glass surface.

As the composition of the bismuth glass, the content of lead oxide is suppressed to 0 to 40% by weight (wt%),
By containing 10 to 90% by weight (wt%) of bismuth oxide and 10 to 90% by weight (wt%) of zinc oxide as the remaining substances, a linear expansion coefficient substantially matching that of the soda glass as the substrate 1 is obtained. be able to.

In particular, zinc oxide is 30 to 40% by weight (wt%), bismuth oxide is 20 to 30% by weight (wt%), boron oxide is 15 to 25% by weight (wt%), and silicon oxide is 0 to 10%. Weight percent (wt
%), The coefficient of linear expansion with the soda glass as the substrate 1 completely matches.

As a result, the dielectric layer 4 is in close contact with the substrate 1 so that no gap is formed between the electrodes 2 and 3, high insulating properties can be obtained, and stable high-concentration ozone can be generated. it can.

As described above, in the ozone generator using the ozone generation electrode plate of the present embodiment, the substrate 1
Bismuth oxide 10-90 weight percent (wt%) and zinc oxide 10-90 weight% (wt%) And a composition having a lead oxide content of 0 to 40% by weight (wt%) is used, so that the ozonolysis reaction on the surface of the dielectric layer 4 is suppressed, and an extremely stable high concentration Ozone can be generated.

Further, since at least silicon oxide and zinc oxide, which are chemically stable, are used for the dielectric layer 4, the above effects can be more effectively and significantly exhibited.

(Second Embodiment) FIG. 3 is a schematic diagram showing a configuration example of an ozone generating electrode plate according to the present embodiment. The same parts as those in FIG. The description is omitted, and only different portions are described here.

That is, the ozone generating electrode plate of the present embodiment has a configuration in which a powder layer 13 is provided on the dielectric layer 4 as shown in FIG.

Here, the powder layer 13 has a powder particle size of 10 micrometers (μm) or less.

The powder layer 13 uses silicon oxide or zinc oxide as the powder.

Next, in the ozone generating apparatus to which the ozone generating electrode plate of the present embodiment configured as described above is applied, the powder layer 13 is provided on the dielectric layer 4 and the powder of the powder layer 13 is removed. By setting the particle diameter to 10 micrometers (μm) or less, a uniform powder layer 13 can be obtained, and the dielectric layer 4
1 does not directly affect the ozone generation characteristics even if lead glass is used.
3 is greatly affected by the composition.

FIG. 6 shows that the ozone raw material gas 10 is a pure oxygen gas containing 99.9% or more oxygen and the electrode 2 is made of silicon oxide, bismuth glass, zinc oxide, alumina, titania, and lead oxide. , 3 by applying a high AC voltage from an AC power source 9 to generate a surface discharge 11 on the surface of the dielectric layer 4.
It is a graph which shows the ozone generation characteristic at the time of generating ozone 12 from 0.

As shown in FIG. 6, when the powder layer 13 is made of silicon oxide, bismuth glass, and zinc oxide, both the ozone concentration and the ozone yield show very high values.

On the other hand, when lead oxide is used as the powder layer 13, the ozone concentration is zero, and the performance as an ozone generator cannot be obtained.

Also, alumina and titania were added to the powder layer 1.
If it is set to 3, the ozone concentration fluctuates drastically at 20 to 100 g / Nn13, and a stable operation cannot be obtained.

This suggests that the decomposition reaction on the surface of ozone is related to catalysis.

It is a well-known fact that titania itself is used as a catalyst because it has a characteristic of easily changing crystallinity. Although there is no example of using alumina itself as a catalyst, it is a well-known fact that platinum or the like has a catalytic action when it is carried on the surface of alumina.

Although not shown here, the same applies to zirconia and the like.

As described above, in order to suppress the surface reaction, a substance which is not used as such a catalyst is added to the powder layer 13.
When used as, high ozone generation characteristics can be obtained.

As the ozone source gas 10, oxygen gas 99
FIG. 7 shows the ozone generation characteristics in the same manner as described above with the addition of 1% nitrogen gas to%.

As shown in FIG. 7, all substances other than lead oxide have good ozone generation characteristics. When the ozone raw material gas 10 containing a small amount of nitrogen gas is exposed to the creeping discharge 11, the collision between the electron e during discharge and the nitrogen molecule N ₂ causes
A nitrogen atom N is generated.

E + N ₂ → e + N + N (7) Furthermore, N + O ₂ → NO + O (8) NO + O ₃ → NO ₂ + O ₂ (9) NO ₂ + O ₃ → NO ₃ + O ₂ (10) NO ₂ + NO ₃ → N ₂ O ₅ (11), the nitrogen oxides (NO, NO ₂ , NO ₃ , N ₂ O)
₅ ) Generated.

Such a nitrogen oxide has a strong adsorptivity to a substance and easily adheres to the surface of the powder layer 13.

As a result, nitrogen oxides are attached to the surface of catalytic reaction such as titania and alumina which have caused a reaction of decomposing ozone, and the catalytic effect is inhibited, so that high ozone generation characteristics can be obtained.

Titania and alumina require such a small amount of an additional gas such as nitrogen gas, and exhibit characteristics that are extremely sensitive to the amount of the added gas.

Therefore, by using silicon oxide and zinc oxide, which exhibit stable operations, as the powder layer 13, good ozone generation characteristics can be obtained.

As described above, in the ozone generating apparatus to which the ozone generating electrode plate of this embodiment is applied, the substrate 1
Since the powder layer 13 having a particle size of 10 micrometers (μm) or less is provided on the dielectric layer 4 covering the pair of electrodes 2 and 3 provided on the It is possible to suppress the ozonolysis reaction on the surface of the layer 4 and generate extremely stable high-concentration ozone.

Further, since the chemically stable silicon oxide and zinc oxide are used as the powder of the powder layer 13, the above-mentioned effects can be more effectively achieved.

(Third Embodiment) FIG. 4 is a schematic diagram showing an example of the configuration of an ozone generating electrode plate according to the present embodiment. The same parts as those in FIG. The description is omitted, and only different portions are described here.

That is, the ozone generating electrode plate of the present embodiment has a structure in which a thin film layer 14 of about 1 μm (μm) is provided on the dielectric layer 4 as shown in FIG.

Here, the thin film layer 14 is formed by, for example, a resinate method.

The thin film layer 14 uses silicon oxide or zinc oxide.

Next, in the ozone generating apparatus using the ozone generating electrode plate of the present embodiment configured as described above, the thin film layer 14 formed by the resinate method is provided on the dielectric layer 4. As a result, the dielectric layer 4 is not directly exposed to the surface discharge 11, and is greatly affected by the composition of the thin film layer 14.

In this case, good ozone generation characteristics can be obtained by using, as the thin film layer 14, silicon oxide and zinc oxide having good characteristics obtained in the powder layer 13.

Further, since the thin film layer 14 is extremely thin, even if the coefficient of linear expansion is different from those of the substrate 1 and the dielectric layer 4, the thin film layer 14 does not peel off and stable characteristics can be obtained.

As described above, in the ozone generating apparatus using the ozone generating electrode plate of the present embodiment, the substrate 1
A thin film layer 14 formed by a resinate method on the dielectric layer 4 covering the pair of electrodes 2 and 3 provided thereon.
Is provided, it is possible to suppress the ozone decomposition reaction on the surface of the dielectric layer 4 and generate extremely stable high-concentration ozone.

Further, since the chemically stable silicon oxide and zinc oxide are used for the thin film layer 14, the above-mentioned effects can be more effectively achieved.

(Other Embodiments) (a) The configuration may be such that the powder layer 13 of the above-described second embodiment is provided on the dielectric layer 4 of the above-described first embodiment.

In this case, the same operation and effect as those of the first and second embodiments can be simultaneously obtained.

(B) The thin film layer 14 of the third embodiment may be formed on the dielectric layer 4 of the first embodiment.

In this case, the same operation and effect as those of the first embodiment and the third embodiment can be obtained at the same time.

(C) In each of the embodiments described above, the case where the present invention is applied to the creeping discharge type ozone generator that generates ozone using creeping discharge has been described. However, the present invention is not limited to this. The present invention can also be applied to a volume discharge type ozone generator that generates ozone using silent discharge, that is, volume discharge, between the electrodes 2 and 3 to be formed, as in the case described above.

[0096]

As described above, according to the present invention, it is possible to provide an ozone generating electrode plate capable of stably generating ozone so that the ozone concentration does not fluctuate due to a gas component added to the ozone raw material gas.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment of an ozone generating electrode plate according to the present invention.

FIG. 2 is a schematic diagram showing a configuration example of a creeping discharge type ozone generator to which the ozone generation electrode plate of the first embodiment is applied.

FIG. 3 is a schematic view showing a second embodiment of the ozone generating electrode plate according to the present invention.

FIG. 4 is a schematic view showing a third embodiment of the ozone generating electrode plate according to the present invention.

FIG. 5 is a characteristic diagram for explaining the operation and effect of the ozone generation electrode plate according to the first embodiment.

FIG. 6 is a characteristic diagram for explaining the operation and effect of the ozone generation electrode plate according to the second embodiment.

FIG. 7 is a characteristic diagram for explaining the operation and effect of the ozone generation electrode plate according to the second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Substrate 2, 3 ... Electrode 4 ... Dielectric layer 5 ... Cooling water 6 ... Cooling plate 7 ... Wiring 8 ... AC power supply 9 ... Gas guide 10 ... Ozone raw material gas (oxygen gas) 11 ... Surface discharge 12 ... Ozone 13 ... Powder layer 14: Thin film layer.

Continued on the front page (71) Applicant 391017540 Toshiba IT Control System Co., Ltd. 2- 24-1, Harumi-cho, Fuchu-shi, Tokyo (74) One of the above agents 100083161 Patent Attorney Hideaki Tokawa (7 other) (72) Inventor Hiroshi Takeichi 3-1-136 Noritakeshinmachi, Nishi-ku, Nagoya City, Aichi Prefecture Inside Noritake Electronics Industry Co., Ltd. Co., Ltd. (72) Inventor Yuji Okita 2-24-24 Harumi-cho, Fuchu-shi, Tokyo Toshiba FA System Engineering Co., Ltd. (72) Inventor Takaaki Murata 2-1 Ukishima-cho, Kawasaki-ku, Kawasaki-shi, Kawasaki, Kanagawa Prefecture (72) Inventor Motoki Noguchi 1-1-1 Shibaura, Minato-ku, Tokyo F-term (reference) 4G042 CA01 CC02 CC16 CC21

Claims (9)

[Claims] 1. An ozone generating electrode plate used in an ozone generating apparatus for generating ozone from an ozone raw material gas, comprising: a substrate; and a pair of electrodes provided on the substrate and applied with an external AC voltage from the outside. A dielectric layer covering the pair of electrodes, wherein bismuth oxide is 10 to 90 as a material of the dielectric layer.
Weight percent (wt%), zinc oxide 10-90 weight% (wt%), and lead oxide content 0-
An ozone generating electrode plate comprising a composition having a composition of 40% by weight (wt%). 2. The ozone generating electrode plate according to claim 1, wherein the substrate is made of soda glass or a material having a linear expansion coefficient substantially equal to that of the soda glass, and the material of the dielectric layer is , Bismuth oxide 20-30
A composition containing 30% to 40% by weight (wt%) of zinc oxide, 15 to 25% by weight (wt%) of boron oxide, and 0 to 10% by weight (wt%) of silicon oxide; An ozone generating electrode plate, characterized in that: 3. An ozone generating electrode plate used for an ozone generating apparatus for generating ozone from an ozone raw material gas, comprising: a substrate; a pair of electrodes provided on the substrate and applied with an external AC voltage from outside; An ozone generating electrode plate, comprising: a dielectric layer covering the pair of electrodes; and a powder layer provided on the dielectric layer. 4. The ozone generating electrode plate according to claim 1, wherein a powder layer is provided on the dielectric layer. 5. The ozone generating electrode plate according to claim 3, wherein the particle diameter of the powder in the powder layer is 10 micrometers (μm) or less. . 6. The method according to claim 3, wherein
The ozone generation electrode plate according to any one of claims 1 to 3, wherein silicon oxide or zinc oxide is used as the powder of the powder layer. 7. An ozone generating electrode plate used for an ozone generating apparatus for generating ozone from an ozone raw material gas, comprising: a substrate; a pair of electrodes provided on the substrate, to which an external AC voltage is applied; An ozone generating electrode plate, comprising: a dielectric layer covering the pair of electrodes; and a thin film layer formed on the dielectric layer by a resinate method. 8. The ozone generating electrode plate according to claim 1, wherein a thin film layer is formed on the dielectric layer by a resinate method. 9. The ozone generating electrode plate according to claim 7, wherein silicon oxide or zinc oxide is used as the thin film layer.