JP2001201466A5 - - Google Patents

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Publication number
JP2001201466A5
JP2001201466A5 JP2000050310A JP2000050310A JP2001201466A5 JP 2001201466 A5 JP2001201466 A5 JP 2001201466A5 JP 2000050310 A JP2000050310 A JP 2000050310A JP 2000050310 A JP2000050310 A JP 2000050310A JP 2001201466 A5 JP2001201466 A5 JP 2001201466A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000050310A
Other languages
Japanese (ja)
Other versions
JP2001201466A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000050310A priority Critical patent/JP2001201466A/ja
Priority claimed from JP2000050310A external-priority patent/JP2001201466A/ja
Publication of JP2001201466A publication Critical patent/JP2001201466A/ja
Publication of JP2001201466A5 publication Critical patent/JP2001201466A5/ja
Pending legal-status Critical Current

Links

JP2000050310A 2000-01-21 2000-01-21 Rheed−aes装置 Pending JP2001201466A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000050310A JP2001201466A (ja) 2000-01-21 2000-01-21 Rheed−aes装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000050310A JP2001201466A (ja) 2000-01-21 2000-01-21 Rheed−aes装置

Publications (2)

Publication Number Publication Date
JP2001201466A JP2001201466A (ja) 2001-07-27
JP2001201466A5 true JP2001201466A5 (no) 2007-03-01

Family

ID=18572107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000050310A Pending JP2001201466A (ja) 2000-01-21 2000-01-21 Rheed−aes装置

Country Status (1)

Country Link
JP (1) JP2001201466A (no)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113957397B (zh) * 2021-10-22 2024-05-14 埃频(上海)仪器科技有限公司 一种脉冲激光分子束外延装置

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