JP2001198866A - Robot for conveyance - Google Patents

Abstract

PROBLEM TO BE SOLVED: To favorably provide mutual balancing of conveying platforms of a plurality of robot linkages, and to prevent dust from falling from linkages or the like on each conveying platform. SOLUTION: This robot comprises a plurality of rotating members concentrically provided in positions displaced in a vertical direction, and the plurality of robot linkages connecting the conveying platforms, connecting a linkage provided on one rotating member with a linkage provided on another rotating member, and provided so as to alternately protrude in axial perpendicular directions of the rotating members of each conveying platform by rotations of each rotating member. When a conveying platform of at least one of the robot linkages is projected, a conveying platform of an other robot linkage is projected again after withdrawing further from a stand-by state where both conveying platforms are withdrawn. During protruding movements of each of these conveying platforms, other conveying platforms and linkages are prevented from passing over the conveying platform.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer robot, and more particularly, to a transfer robot for processing a wafer in a process chamber such as a multi-chamber type semiconductor manufacturing apparatus or an LCD manufacturing apparatus. The present invention relates to a transfer robot in a manufacturing apparatus configured to transfer a thin work to a process chamber.

[0002]

2. Description of the Related Art A multi-chamber type semiconductor manufacturing apparatus is shown in FIG. 1 and a process chamber station 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers is provided around a transfer chamber 1.
And work transfer stations 3 and 4 for transferring the work to the outside, and the inside of the transfer chamber 1 is always kept in a vacuum state by a vacuum device.

The transfer chamber 1 is configured as shown in FIG. 2, and a partition wall 5 which is a peripheral wall and faces the process chamber stations 2a to 2e and the work transfer stations 3 and 4 has an entrance to each station. Is provided. This gate 6
Is opened and closed by an open / close door (not shown) provided inside the transfer chamber 2. A transfer robot A is rotatably provided in the transfer chamber 1.

The above-mentioned transfer robot A is disclosed in Japanese Patent Application Laid-Open No. Hei 10-21.
The transfer robot A is shown in FIG. 2 and includes two transfer tables 8a,
8b, which is located at the center of the transfer chamber 1. The first and second ring-shaped bosses (rotating members) 9a and 9b are concentrically arranged in a state of being overlapped in order from the lower side. Each of the ring-shaped bosses 9a and 9b is connected to an output section of a motor (not shown), and is independently rotated in forward and reverse directions.

The first and second arms 10a and 10b are provided on the side surface of the first ring-shaped boss 9a located below the conventional transfer robot A, and the second ring boss 9a is located on the upper side. A third arm 10c is provided on the side of the boss 9b.
Further, a fourth arm 10d is protruded radially from a top surface of the second ring-shaped boss 9b via a pillar 10e, and a lower surface of a tip end of the fourth arm 10d is a rotation fulcrum. In the other arms, the upper surface of the distal end of each arm is a rotation fulcrum.

The radius of each of the rotation fulcrums of the arms 10a to 10d from the center of the ring-shaped boss is the same. One ends of first, second, third and fourth links 11a, 11b, 11c and 11d of substantially the same length are rotatably connected to the rotation fulcrum of each of the arms 10a to 10d. The first link 11 connected to a rotation fulcrum provided on the upper surface of the tip of the first arm 10a
a is formed by bending the rotation fulcrum part inward and downward to have a U-shape.

[0007] The first link 11a and the fourth link 1
A first transfer table 8a is connected to the leading end of 1d via a frog-leg-type transfer table attitude holding mechanism 7 shown in FIG. 3, thereby forming a _first robot link mechanism B1. . Also, the second and third links 11b, 11c
The second transfer table 8b is connected to the leading end of the second transfer table via a frog-leg-type transfer table attitude holding mechanism 7, thereby forming a _second robot link mechanism B2. By attaching these robot link mechanisms B ₁ and B ₂ to the ring-shaped boss with their phases shifted,
a and 8b are shifted by the arrangement angle α (for example, 60 °) in the rotation direction so that they do not overlap in the rotation direction. At this time, the U-shaped bending height of the first link 11a, the first carrier table 8a of the robotic link mechanism B ₁ is positioned above the ring-shaped boss, and the second robot link mechanism B ₂ Of the first arm 10a and the link 11a.
It is designed to be able to pass through between and move.

The transport table attitude holding mechanism 7 is configured as shown in FIG. 3, and the tips of two links 11a, 11d (11d, 11c) connected to the transport table 8a (8b) are meshed with each other. 7a and 7b, and are connected by a gear 11 composed of
The attitude angles θR and θL of a, 11d (11c, 11b) are always the same. Thereby, the transfer table 8a
(8b) is always directed in the radial direction of the transfer chamber 1 and is operated in the radial direction.

[0009]

THE INVENTION Problems to be Solved] conveying table 8 of the robot conveyor of conventional above A is one of the robotic link mechanism B ₂
The first link 11 b is of the other robot link mechanism _{B 1}
The link 11a passes through the upper side of one of the transfer tables 8b at any time when the transfer robot A operates because the transfer robot A moves under the position a.

[0010] Figure 4 shows a standby state where both carrier table 8a, 8b are retracted and projecting moving the first robot link mechanism B ₁ from this state, as shown in FIG. 5, in the meantime the process, the first link 11a of the robot linkage _{B 1} is passing through the upper second carrier table 8b robotic link mechanism _{B 2.}

For this reason, each of the robot link mechanisms B ₁ , B
₂ of carrier table 8a, when the respective 8b workpiece _W 1, _{W 2} and infested operation by placing the over the workpiece _{W 2} is other link 11a robotic link mechanism _{B 1} through, this workpiece _{W 2} In some cases, dust attached to the link 11a may fall on and contaminate the dust.

[0012] In the above conventional transfer robot, as shown in FIG. 6 from the standby state shown in FIG. 4, is protruded dynamic this the carrier table 8a extends one robot link mechanisms B ₁ Occasionally, other robotic link mechanism B ₂ is further reduced actuated by carrier table 8b of the other from the standby state shown in FIG. 4 was further immersed inward from the standby state.

The present invention has been made in view of the above, and at least one of the carriages, which has been immersed by the projecting operation of one of the carriages, is moved again for a short stroke near the projecting end of the one carriage. By being protruded, the balance between the two carriages can be improved,
In addition, during the movement of both robot link mechanisms, the link of the other robot link mechanism does not pass on the transfer table of either robot link mechanism, and the work on the transfer table adheres to the link of the other transfer table. It is an object of the present invention to provide a transfer robot that eliminates contamination by dust, furthermore, can simplify the shape of a robot link mechanism, and can furthermore make loads acting on a plurality of used motors substantially equal. Is what you do.

[0014]

In order to achieve the above object, a first aspect of the present invention is to provide a plurality of rotating members which are concentrically provided so as to be vertically displaced and provided on one rotating member. Linking the link mechanism and the link mechanism provided on the other rotating member, and connecting the carriages so that the rotation of each rotating member causes each carriage to alternately move in and out in the direction perpendicular to the axis of the rotating member. When the carrier of at least one of the robot link mechanisms protrudes and moves, the carrier of the other robot link mechanism further retreats from the standby state in which both carriers retreat. After that, when the respective carriages move in and out, the other carriages and the link mechanism do not pass above the respective carriages.

According to the first aspect, when the carrier of at least one of the robot link mechanisms protrudes, the carrier of the other robot link mechanism further submerges from the standby state and then protrudes again. This makes it possible to improve the balance relationship between the two carriers.

In addition, during the movement of each robot link mechanism, the other carrier and the link mechanism of the robot link mechanism do not pass over the carrier of any one of the robot link mechanisms, and the work on the carrier becomes another. It is not contaminated by dust adhering to the carriage or link.

According to a second aspect of the present invention, there are provided two rotating members which are concentrically shifted from each other in a vertical direction, a main arm fixed to one of the rotating members, and a tip end of the main arm is rotatable. Main arm connected to the main link, a carrier table connected to the main link, an auxiliary arm fixed to the other rotating member, and one end rotatably connected to the distal end of the auxiliary arm and the other end to the main link. A first robot link mechanism including a connected auxiliary link, and a first robot link mechanism having the same configuration as the first robot link mechanism in which a main arm and an auxiliary arm are fixed to rotating members opposite to each other. The two robot link mechanisms are configured so that the transport tables do not overlap each other in the vertical direction.

According to the second aspect of the present invention, since the first and second robot link mechanisms performing the same operation have the same configuration, the shape of the robot link mechanism can be simplified. In addition, by driving each of the robot link mechanisms with a separate drive source, the loads on the two drive sources can be made substantially equal.

In a third aspect based on the second aspect, in each of the robot link mechanisms, the length of the main arm from the center of the rotating member and the length of the main link are the same,
In addition, since the transfer table attitude holding mechanism is constituted by a rotation transmission mechanism that rotates the transfer table in a direction opposite to the rotation angle of the main link with respect to the main arm by １ ／, each of the robot link mechanisms has a simple configuration. The carriage can move in and out while maintaining the same posture.

Further, in a fourth aspect of the present invention, the first and second arms, each having a base end rotatably supported on the frame side, the second arm, and the third and fourth sets having a carrier table fixed on the distal end side. An arm, and a rotatable member is rotatably provided at the distal end of the first arm. The rotatable member of the first arm is fixed to a substantially intermediate position of the second arm, and the second member is connected to the second arm via the rotatable member. A substantially intermediate point of the arm is rotatably supported on the distal end side of the first arm, two pulleys are concentrically provided at a substantially intermediate position of the second arm and are rotatably provided, and pulleys are provided at both ends. The pulley is rotatably provided, and a belt is wound around the pulleys facing each other. The base end of the third arm is fixed to one pulley provided at both ends of the second arm, and the fourth pulley is fixed to the other pulley. The base end of the arm is fixed, and each carrier overlaps vertically. The odd, the rotational member for rotating the second arm connecting the single driving source to the shaft portion, and provided at the tip portion of the first arm for rotating the first arm,
The configuration is such that one drive source is connected, and according to the fourth aspect, it is possible to obtain substantially the same operation and effect as those of the first to third aspects.

[0021]

FIG. 7 to FIG. 9 show a transfer robot A1 according to a _first embodiment of the present invention.
7 is a plan view, FIG. 8 is a front view showing a cross section of a main part, and FIG. 9 is an exploded perspective view schematically showing a configuration of the main part.

Reference numerals 20a and 20b denote first and second rotating members. Both rotating members 20a and 20b are coaxially arranged in the transformer chamber and arranged vertically, and each is individually driven by a driving device (not shown). Independently, the rotation is controlled in both forward and reverse directions and the rotation speed is made variable. Note that, in the embodiment of the present invention, a configuration in which the first rotating member 20a is arranged on the upper side will be described for convenience of description.

A first main arm 21a and a first auxiliary arm 22a are radially provided on a first rotating member 20a located on the upper side, with the phases shifted in one direction of rotation of the rotating member 20a. The second rotating member 20 located on the lower side
b, the second main arm 21b and the second auxiliary arm 22b are shifted in phase in one direction of rotation in the same manner as the first arm and radially, and the first main arm 21a and the first auxiliary arm It is provided on the side facing the rotation center 0 with respect to the arm 22a. As shown in FIG.
a and 21b have the same length L from the center of rotation.
_1, also the subsidiary arm 22a, the length from the respective rotation centers of 22b have a L ₂ of the same length, wherein L ₁
> And has a _{L 2.}

The first and second respective main arms 21a, from the rotation center of the tip of 21b to the position of _{L 1,} the main arm 2
First and second main links 2 having the same length (L ₁ ) as 1a and 21b
One end of each of 3a and 23b is rotatably connected. Also have first and second respective carrier table 24a, the base end portion of 24b is connected rotatably to the upper position of the length L ₁ of each main link 23a, 23b.

Each of the main links 23a and 23b connecting the transport tables 24a and 24b has a transport table for keeping the transport tables 24a and 24b always at right angles to the axis of the rotating members 20a and 20b. A posture holding mechanism is provided.

This transfer table attitude holding mechanism uses a pulley and a belt similar to the SCARA type robot.
That is, as shown in FIGS.
A support shaft 25a rotatably connecting the main links 23a and 23b to the main links 23a and 23b is fixed to the main arms 21a and 21b, and is rotatable with respect to the main links 23a and 23b. The main links 23a and 23b of the support shaft 25a
Diameter side is fixed the first pulley 26a of the D _1. In addition, each main link 23a, 23b and each carrier 24
A support shaft 25b rotatably connecting the first and second a and 24b is fixed to the carriages 24a and 24b, and is rotatable with respect to the main links 23a and 23b. Then, the main link 23a of the support shaft 25b, a second pulley having a diameter _{D 2} on the 23b side 2
6b is fixed. First and second pulleys 26a, 2
The relationship between the diameters D ₁ and D ₂ of 6b is [D ₁ : D ₂ = 1: 2]
A belt (timing belt) 27 is wound around the pulleys 26a and 26b.

In the main arms 21a and 21b, the main links 23a and 23b, and the transfer tables 24a and 24b, the first pulley 26a rotates when the main links 23a and 23b rotate with respect to the main arms 21a and 21b. Arm 21a,
By being fixed to 21b, the phase of the belt 27 is shifted. The phase shift of the belt 27 is transmitted to the second pulley 26b at a reduced speed of 1/2, and is transmitted only by the rotation angle of the pulley 26b, that is, the main arms 21a, 21a.
The carriages 24a and 24b rotate the main links 23a and 24b at a rotation angle that is half the rotation angle of the main links 23a and 23b with respect to the main links 23a and 23b.
3b is rotated in the opposite direction. At this time, the main arms 21a and 21b and the main links 23a and 23b have the same length (L
_{In 1} ), the transfer tables 24a, 24b are connected to the main arms 21a, 2a.
By moving along the base of an isosceles triangle constituted by 1b and main links 23a and 23b, each carrier 24
a and 24b are moved while maintaining a fixed posture. At this time, the postures of the transfer tables 24a and 24b are set in advance by the winding angle of the pulley and the belt.

On the other hand, the first and second auxiliary arms 22
a, first-identical length _{L 3} to the tip portion of the length _{L 2} of the 22b
One ends of the second auxiliary links 28a and 28b are rotatably connected. The first and second auxiliary links 28
a and 28b, the other end of the first auxiliary link 28a is below the intermediate portion (closer to the tip) of the second main link 23b, and the other end of the second auxiliary link 28b is the first main link. 23
The lower part (a) is rotatably connected to the lower side of the middle part (near the front end). This connection point does not interfere with the inside of the belt 27. The connection points are located at the same position in the length direction of each of the main links 23a and 23b. The second auxiliary link 28b is connected to the second carrier 2
4b.

With the above configuration, the first main arm 21a,
The first main link 23a, the second auxiliary arm 22b, the second
The first auxiliary link 28b and the first transfer table 24a constitute a _first robot link mechanism C1, and the second main arm 21b, the second main link 23b, the first auxiliary arm 22a, the first Auxiliary link 28a, second carrier 24b
Second robot link mechanism C ₂ is constituted by.

In each of the robot link mechanisms C ₁ and C ₂ , each carrier 24 a, 24 b and each main link 23 a, 23
Assuming that the connection points of b are 0 ₁ and 0 ₂ , the carriages 24 a and 24 b at these connection points are connected to the main links 23 a and 23 b respectively.
And the first main link 23a
The second auxiliary link 28b connected to the second carriage 2
4b, each transport table 24
a and 24b are located on the upper side so as not to interfere with all the link mechanisms.

Next, the operation of the first embodiment will be described with reference to FIG.
Description will be made with reference to FIG. Figures 10 and 13 also a standby state both transport boards 24a, 24b is moved backwardly to the rotational center O side of the transfer robot _{A 1,} 12, 15 each carrying table 24a, one projection of the 24b Indicates a moving state. 10 and 13 are the same as those shown in FIG. In the figure, 1 is a transfer chamber, and 6 is a gate.

FIGS. 10 to 12 show the operation of the robot link mechanisms C ₁ and C ₂ for projecting the first transfer table 24a toward one gate. The first rotating member 20a from the standby state, rotates the first main link 23a coupled to the first main arm 21a only beta ₁ so as to move in the protruding direction of the first transport platform 24a, at the same time , The second rotating member 20b is moved in the opposite direction to the first rotating member 20a by β.
Rotate by _two .

The first main link 23 connected to the first carrier 24a is driven by the rotation of the rotary members 20a and 20b.
a is a first main arm 21a and a second auxiliary arm 22
b, the first carrier 24a, which is pushed by the second auxiliary link 28b and is rotated in the protruding direction, and is connected to the distal end thereof.
Is moved out of the standby state shown in FIG. At this time, the rotation angles β ₁ and β ₂ of the two rotation members 20a and 20b are
The movement locus of the connecting point 0 ₁ of the first transport platform 24a controls the rotation angle and rotation speed of the two rotary members 20a, 20b so as to be linearly radially from the rotational center 0 of the transfer robot A ₁ Is obtained by As a result, the first transfer table 24a protrudes linearly and moves through the gate 6 into the process chamber station. Transfer table 24a,
The selection of the projecting direction of the 24b is performed by selecting the two rotating members 20a and 20b.
Are integrally rotated in the same direction.

At this time, the second robot link mechanism C ₂
The second main link 23b is pulled inward by the first auxiliary link 28a, so that the second transport table 24b
Moves slightly from the standby state in the direction of immersion as shown in FIG. 11, and then, when the first transfer table 24a is in the protruding end state, it is protruded again to the vicinity of the original standby state as shown in FIG. As described above, at the time of the projecting operation of the _first robot link mechanism C1, the transfer table 24b of the _second robot link mechanism C2 once performs the immersion operation from the standby position and then moves again to the vicinity of the original standby state. Is done.

FIGS. 13 to 15 show the operation of the robot link mechanisms C ₁ and C ₂ for projecting the second transfer table 24b toward one gate. From the standby state, the second rotating member 20b is moved from the second main arm 21b to the second rotating member 20b.
Is rotated by β ₂ ′ so that the main link 23b moves in the projecting direction of the second transfer table 24b, and at the same time, the first rotating member 20a is moved in the same direction as the second rotating member 20b. Rotate by β ₁ ′.

The rotation of β ₁ ′ and β ₂ ′ in the same direction of the rotating members 20a and 20b causes the second main link 2 connecting the second transfer table 24b as shown in FIGS.
3b includes a second main arm 21b and a first auxiliary arm 2b.
2a, the second carrier 24b is pushed by the first auxiliary link 28a and rotated in the protruding direction, and is connected to the distal end thereof.
Is protruded from the standby state shown in FIG. At this time, the rotation angles β ₁ ′, β ₂ ′ of the two rotation members 20 a, 20 b
The movement locus of the connecting point 0 ₂ of the second transfer stage 24b controls the rotation angle and rotation speed of the rotating member 20a, 20b so as to be linearly radially from the rotational center 0 of the transfer robot A ₁ It can be obtained by: As a result, the second transfer table 24b protrudes linearly and moves through the gate 6 into the process chamber station.

In one protruding movement of the two carriages 24a and 24b and the other immersion movement accompanying the same, the two carriages
The links 4a, 24b and the link mechanism do not interfere with each other, and the link constituting the robot link mechanism does not pass above each of the transfer tables 24a, 24b. Therefore, the work W placed on each of the transfer tables 24a and 24b
_1, the dust on the upper surface of the W ₂ there is no risk of falling adhesion. In this embodiment, the first and second robot link mechanisms C
₁ and C ₂ are the first and second rotating members 20 a and 20, respectively.
Since the two driving sources for driving b are operated in cooperation with each other, the loads of the two driving sources are substantially equal.

In the first embodiment, the transfer table 2
Although a scalar type using a pulley and a belt is used as a carriage holding mechanism for holding the postures of 4a and 24b, FIG.
As shown in FIG. 15, the first robot link mechanism C
Noted that operating angle relative to the first main link 23a and conveying platform 24a of the second auxiliary link 28b for operating a ₁ are substantially the same, to the first carrier table posture maintaining mechanism of the robot link mechanism C ₁ A frog-leg type using the gears shown in FIG. 3 may be used.

FIG. 16 shows a second embodiment of the present invention. In this embodiment, the first auxiliary arm 22a of the link mechanism of the _second robot link mechanism C2 in the first embodiment shown in FIG. 7 is omitted, and other than the auxiliary link 28a connected to the main link 23b. The end is connected to the main arm 21a of the _first robot link mechanism C1,
The connection point of the auxiliary links 28a and 28b is
a and the main links 23a and 23b are provided on the protruding portions protruding to the side, and the connection points are offset.

That is, in FIG. 16, the transfer table 24a of the _first robot link mechanism D1 has a main link 33a having one end connected to a main arm 31a fixed to the first rotating member 20a positioned on the upper side in the axial direction. It is connected to the leading end via a carriage stand holding mechanism. A distal end of an auxiliary link 38b having one end connected to an auxiliary arm 32b fixed to an axially lower second rotating member 20b is connected to an intermediate portion of the main link 33a. The connection point between the main link 33a and the auxiliary link 38b is provided on a bracket 39a protruding laterally of the main link 33a. This configuration is basically the same as the first robotic link mechanism C ₁ shown in FIG.

On the other hand, the transfer table 24b of the _second robot link mechanism D2 is connected to the second rotating member 20 located on the lower side in the axial direction.
The main link 31b is connected to a leading end of a main link 33b, one end of which is connected to a main arm 31b fixed to the main arm 31b, via a carrier stand attitude holding mechanism. The other end of the auxiliary link 38a connected to the intermediate portion of the main link 33b is connected to the intermediate portion of the main arm 31a of the _first robot link mechanism D1.
The connection points at both ends of the auxiliary link 38a are
b, provided on brackets 39b, 39c protruding to the respective sides of the main arm 31a.

The operation of the second embodiment is similar to that of the first embodiment.
Main arm 31a moves rightward and the second auxiliary arm 3
By rotating the first and second rotating members 20a and 20b such that the second rotating member 2b rotates leftward, the transfer table 24a of the _first robot link mechanism D1 is protruded.

The first and second main arms 31a, 31b
By rotating the first and second rotating members 20a and 20b in the same direction so that each of them rotates leftward,
Second transport table 24b robotic link mechanism D ₂ is projected movement.

[0044] The In the second embodiment, the second auxiliary link 38a of the robot link mechanism D ₂ is being connected to the first main arm 31a of the robot link mechanism D _1, the first embodiment Auxiliary arm 22a in the form of
Is omitted, the number of parts can be reduced accordingly.

The first and second main links 33a, 33
b, the connecting point of the auxiliary links 38a, 38b is offset to the side of each of the main links 33a, 33b, so that this connecting mechanism obstructs the belt of the carriage position holding mechanism passing through each of the main links 33a, 33b. do not become.

FIG. 17 shows a third embodiment of the present invention. The first and second robot link mechanisms E ₁ and E ₂ of this embodiment are substantially the same as the _second robot link mechanism C _{2 of} the first embodiment shown in FIG.

That is, the second robot link mechanism E ₂
Has become the same structure as the second robotic link mechanism C ₂ in the first embodiment, the second main arms 41b fixed to the rotary member 20b of the second (lower) end to the main arm 41b Main link 43b, the first (upper) rotating member 20a having the other end connected to the transfer table 24b.
The first auxiliary arm 42a fixed to the
The first auxiliary link 48a has one end connected to 2a and the other end connected to an intermediate portion of the main link 43b.

[0048] In the first robotic link mechanism E ₁ is but is the phase-shifted in the rotational direction relative to the second robotic link mechanism E ₂ planar shape is arranged closer to the substantially the same direction, and it has the same construction as the second robotic link mechanism E _2. This first robot link mechanism E
₁ is a first main arm 4 fixed to a first rotating member 20a.
1a, one end is connected to the main arm 41a, and
The first main link 43a connecting the transfer tables 24a of the
The second auxiliary arm 42b is fixed to the rotating member 20b, and has one end connected to the auxiliary arm 42b and a second auxiliary link 48b at the other end in the middle of the main link 43a.

Of the two robot link mechanisms E ₁ and E ₂ , the second robot link mechanism E ₂ performs the same operation as the _second robot link mechanism C ₂ in the first embodiment. While the first robot link mechanism _{E 1} be the second rotary member 20a for both robotic link mechanism _{E 2,} 20
only the action of b is changed placed, a second same function as robotic link mechanism C ₂ in the first embodiment.

In the third embodiment, both the first and second robot link mechanisms E ₁ and E ₂ can be constituted by the same components, and the configuration can be simplified.

FIGS. 18 to 25 show a fourth embodiment of the present invention. In this embodiment, the two carriages 24a, 24b
The projecting movement and the immersing movement are performed by one motor, and the entire rotation is performed in coordination with another motor.

In the figure, reference numeral 61 denotes a length L _{4 of} which one end is rotatably supported on the frame 1 a side of the transfer chamber 1.
And the other end of the first arm 61 is a second arm 62 having a length twice as long as the first arm 61.
Is rotatably connected to a half of the length direction.
One end of each of the third and fourth arms 63 and 64 is rotatably connected to positions L ₅ and L ₆ having the same length as L ₄ from the connection point of the second arm 62 with the first arm 61. Have been. The first and second transfer tables 24a and 24b are integrally fixed to the ends of the third and fourth arms 63 and 64, respectively.

In this embodiment, since the second arm 62 is linear and L ₄ = L ₅ = L ₆ , the third and fourth arms 63 and 64 are connected to the first arm. By arranging the arm so as to pass through the center of rotation of the arm 61, the arrangement angle α of both the carriages 24a and 24b becomes 90 °. When the first arm 61 is at right angles to the second arm 62, the first arm 61 is at 45 ° with respect to the third and fourth arms 63 and 64, and The arm 62 is the base of an isosceles triangle with the vertex at the center of rotation of the first arm 61.

A first pulley 65 is supported at the base end of rotation of the first arm 61, and a second pulley 66 is supported at the tip of the first arm 61 so as to be rotatable with respect to the first arm 61. In the meantime, the belt 65a is wound around. When the diameter of the first pulley 65 is D ₁ and the diameter of the second pulley 66 is D ₂ , D ₁ : D ₂ = 1: 0.
It is 5.

The first pulley 65 is connected to the first arm 61
And is fixed to the tip of a first support shaft 67 supported on the frame 1a side through the boss portion 61a. A turning pulley 69 around which a belt 68a is wound is fixed to the other end of the first support shaft 67.

A pulley 70 for projection is fixed to the boss portion 61a of the first arm 61, and a belt 68b is wound around the pulley 70. By driving the belt 68b by a driving source, the pulley 70 , The first arm 61 is rotated.

The second pulley 66 of the first arm 61 is rotatably supported by a second support shaft 71 fixed to the first arm 61. Then, the boss 6 of the second pulley 66
6a protrudes above the first arm 61, to which the second arm 62 is fixed.
Is configured to rotate integrally with the second pulley 66 with respect to the first arm 61.

A second support shaft 71 for rotatably supporting the second pulley 66 is fixed to the first arm 61. The support shaft 71 extends into the second arm 62, and third and fourth pulleys 72 and 73 are fixed to this portion. Fifth and sixth pulleys 76 and 77 are fixed to third and fourth support shafts 74 and 75 rotatably supported at both ends of the second arm 62, respectively. Belts 78a and 78b are wound between the pulleys 72 and 76 and between the fourth and sixth pulleys 73 and 77, respectively.
The third and fourth pulleys 72 and 73 have the same diameter D ₃ ,
Diameter of the 5-sixth pulley 76, 77 has a _{D 4} of the same _{diameter, D 3: D 4 = 1} : has a 2.

The length L of the third and fourth arms 63 and 64
₇ and L ₈ have the same length, and their lengths L ₇ and L 8
_As shown in FIG. 18, reference numeral ₈ denotes a length which does not interfere with the transfer tables 24a and 24b fixed to the respective ends in the most submerged state. In this embodiment, both transfer tables 24
a and 24b are arranged in a state of being opened by 90 ° (the arrangement angle is 90 °).

The second arm 62 is provided above the first arm 61 with a gap S therebetween, and the third arm 63 is disposed below and below the second arm 62 in the gap S. I have. Further, the fourth arm 64 is arranged above the second arm 62. Since the third arm 63 interferes with the shaft of the second pulley 66 due to its rotation, the third arm 63 is bent laterally to prevent this.

In the configuration shown in FIG.
4a and 24b are shown as being displaced up and down, but as shown by the dashed line in the figure, the third and fourth arms 63 and 64 are bent up and down so that the two carriers 24a and 24b are at the same level. Good. In this case, the end of the second arm 62 is cut out as shown by a chain line so that the end of the second arm 62 does not interfere with the transfer tables 24a and 24b.

The operation of the fourth embodiment will be described with reference to FIGS.
This will be described with reference to FIG. FIG. 20 shows a standby state in which both of the carriages 24a and 24b are immersed in the state shown in FIG.
In this state, when the pulley 70 for emergence is rotated while the pulley 69 for rotation is fixed so as not to rotate, and the first arm 61 is rotated, for example, rightward, the second pulley 66 of the first arm 61 is rotated. Rotates to the left by twice the rotation angle of the first arm 61, and the second arm 62 integrated with the second pulley 66 is connected to the first arm 61 as shown in FIG. Rotate in overlapping directions.

At this time, the third and fourth pulleys 72 and 73 located at the intermediate portion of the second arm 62
, The rotation angle of which is 1/2 times the rotation angle of the fifth and sixth pulleys 7 via the belts 78a and 78b.
6, 77, whereby the fourth arm 64 is protruded and moved while maintaining the same posture, and the third arm 63 is immersed and moved while maintaining the same posture. At this time, the third arm 63 is most immersed in a state where the action lines of the first arm 61, the second arm 62, and the third arm 63 are linearly overlapped, and thus are fixed to the third arm 63. The first transfer table 24a is in the most immersive state.

From this state, the first arm 61 is rotated clockwise to further protrude the second transfer table 24b. FIG. 22 shows the terminal state, and the first and second states are shown.
Arms 61 and 62 are in a symmetric state with the posture in the standby state shown in FIG. At this time, the connecting portion between the first arm 61 and the second arm 62 moves in the protruding direction side of the carrier 24b, but the third arm 63 does not interfere because it is curved.

In the projecting end state of the second transfer table 24b, the first arm 61 is further moved in the direction in which the transfer table 24b protrudes from the position where the first arm 61 overlaps the second arm 62. 62 is the third arm 6 again
As a result, the first transfer table 24a is protruded again by an amount corresponding to the inclination.

In order to move the first transfer table 24a from the standby state shown in FIG.
The protruding movement is performed after the 4a is directed in a predetermined direction. The change of the direction of the transfer table 24a is performed by integrally rotating the transfer robot.

That is, the transport robot is rotated by rotating the turning pulley 69 and the retracting pulley 70 in the same direction by the same angle. This rotation is performed until the first transfer table 24a is oriented in a predetermined direction, for example, the same direction as the direction in which the second transfer table 24b projects, and then the turning pulley 69 is fixed.

In this state, the retractable pulley 70 is rotated leftward in a direction opposite to the above case, and the first arm 61 is rotated leftward. As a result, the second arm 62 and the third arm 63 perform the same operation as in the above case.
4. As shown in FIG. 25, the first transfer table 24a protrudes and the second transfer table 24b retreats. At this time, similarly to the above case, the second transfer table 24b which is immersed and moved is the first transfer table 24b.
When the first arm 61 is further immersed in the state in which the second arm 24b is overlapped with the fourth arm 64 and the first arm 61 is further rotated in the protruding direction of the first carrier 24a, the second carrier 24b is slightly moved again. It is protruded.

In the fourth embodiment shown in FIGS. 18 to 25, the third arm 63 is curved so that this arm 63 does not interfere with the boss 66a supporting the second arm 62. Although an example is shown, when the robot link mechanism operates within a range in which the third arm 63 does not interfere with the boss portion 66a, the configuration is made linear as shown by a chain line in FIG. Further, by positioning the third arm 63 above the second arm 62 and the fourth arm 64, the third arm 63 can be made linear.

FIGS. 26 and 27 show a fifth embodiment of the present invention. The fifth embodiment is different from the fourth embodiment in that the second arm 62 is connected to the first arm 61 at the connection point. The structure is the same as that of the fourth embodiment except that the connection point is bent so as to form a valley and formed in a V-shape. Therefore, the operation is described with the same reference numerals as those of the fourth embodiment except for the second arm.

[0071] Also in this embodiment, if the length of the first arm 61 is _{L 4} are, the second arm 62a
A is a connection point with the first arm 61, and the second arm 62
a and the connecting points of the third and fourth arms 63 and 64 are b and c
And the lengths L ₅ and L ₆ of ab and ac are L ₄
= It has become _L 5 = _{L 6.} By arranging the third and fourth arms 63 and 64 so as to pass through the center of rotation of the first arm 61, the arrangement angle α of both transfer tables 24a and 24b becomes α <90 °.

The state shown in FIG. 26 corresponds to the two carriages 24a, 24
When the first arm 61 is rotated rightward in the drawing from this state, the point c moves along the arrangement line of the fourth arm 64, as shown in FIG. The second transfer table 24b is protruded. On the other hand, at this time, the point b moves away from the center of rotation of the first arm 61 until the point a crosses the arrangement line of the third arm 63 (immersion movement), but the point a crosses the arrangement line of the third arm 63. Further rotation causes the arm to approach the center of rotation of the first arm 61 (protruding movement). Therefore, at this time, the first transfer table 24a slightly retreats from the state shown in FIG. 26 and then slightly protrudes, and as shown in FIG. 27, slightly protrudes from the standby state.

When the first arm 61 is rotated leftward from the state shown in FIG. 26, the first transfer table 24
a is protruded and the second transfer table 24b is slightly retracted from the standby state shown in FIG. 26 and then slightly protruded again.

In this embodiment, the lengths of the third and fourth arms 63 and 64 are set so that the transfer tables 24a and 24b connected to their distal ends do not interfere with each other. In each operation of projecting and immersing the tables 24a and 24b, no other members cross over the transfer tables 24a and 24b.

In this embodiment, the arm 6
The connecting portions of 1, 62, 63, and 64 are configured so as not to interfere with other members.

FIGS. 28 and 29 show a sixth embodiment of the present invention, in which the second arm 62 of the fourth embodiment is reversed from that of the fifth embodiment. The fourth point is that the connection point with the first arm 61 is formed in an inverted V-shape which is bent so that the connection point has a mountain shape.
It has the same configuration as that of the embodiment. Therefore, the same reference numerals as in the fourth embodiment denote the same parts as those in the fourth embodiment, except for the second arm 62b, as in the fourth embodiment.

[0077] Also in this embodiment, if the length of the first arm 61 is _{L 4,} the connection point between the first arm 61 of the second arm 62b a, a second arm 62b
When the point of attachment to the third and fourth arms 63, 64 b, when a c, a-b, the length of the a-c _L 5, _{L 6} is _L 4 =
It has become _{L 5} = L _6. And the third and fourth arms 6
By arranging 3, 64 so as to pass through the rotation center of the first arm 61, the angle α at which the two transfer tables 24a and 24b are arranged becomes α> 90 °.

The state shown in FIG. 28 corresponds to the two carriages 24a, 24
When the first arm 61 is rotated rightward in the drawing from this state, the point c moves along the arrangement line of the fourth arm 64, as shown in FIG. The second transfer table 24b is protruded. On the other hand, at this time, the point b moves away from the center of rotation of the first arm 61 until the point a crosses the arrangement line of the third arm 63 (immersion movement), but the point a crosses the arrangement line of the third arm 63. Further rotation causes the arm to approach the center of rotation of the first arm 61 (protruding movement). Therefore, at this time, the first transfer table 24a slightly retreats from the state shown in FIG. 28 and then slightly protrudes, and as shown in FIG. 31, the first transfer table 24a is slightly retracted from the standby state.

When the first arm 61 is rotated leftward from the state shown in FIG. 28, the first transfer table 24
a protrudes, the second carrier 24b is slightly immersed and then slightly protruded again.

Also in this embodiment, the lengths of the third and fourth arms 63 and 64 are set so that the transfer tables 24a and 24b connected to their ends do not interfere with each other. In each of the operations of projecting and immersing the carriages 24a, 24b, no other members cross over the carriages 24a, 24b.

In this embodiment, the arm 6
The connecting portions 1, 62b, 63, 64 are configured so as not to interfere with other members.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a conventional transfer robot.

FIG. 3 is an explanatory view showing a carriage attitude holding mechanism in a conventional apparatus.

FIG. 4 is an explanatory diagram of an operation of a conventional transfer robot.

FIG. 5 is an explanatory diagram of an operation of a conventional transfer robot.

FIG. 6 is an operation explanatory view of a conventional transfer robot.

FIG. 7 is a plan view showing the first embodiment of the present invention.

FIG. 8 is a partially cutaway front view showing the first embodiment of the present invention.

FIG. 9 is an exploded perspective view schematically showing the first embodiment of the present invention.

FIG. 10 is an operation explanatory diagram according to the first embodiment of the present invention.

FIG. 11 is an operation explanatory diagram according to the first embodiment of the present invention.

FIG. 12 is an operation explanatory diagram according to the first embodiment of the present invention.

FIG. 13 is an operation explanatory diagram according to the first embodiment of the present invention.

FIG. 14 is an operation explanatory diagram according to the first embodiment of the present invention.

FIG. 15 is an operation explanatory view in the first embodiment of the present invention.

FIG. 16 is a plan view schematically showing a second embodiment of the present invention.

FIG. 17 is a plan view schematically showing a third embodiment of the present invention.

FIG. 18 is a perspective view schematically showing a fourth embodiment of the present invention.

FIG. 19 is a sectional view schematically showing a configuration of a fourth embodiment of the present invention.

FIG. 20 is an operation explanatory view according to the fourth embodiment of the present invention.

FIG. 21 is an operation explanatory view of the fourth embodiment of the present invention.

FIG. 22 is an explanatory diagram of an operation in the fourth embodiment of the present invention.

FIG. 23 is an operation explanatory view according to the fourth embodiment of the present invention.

FIG. 24 is an operation explanatory view in the fourth embodiment of the present invention.

FIG. 25 is an operation explanatory view in the fourth embodiment of the present invention.

FIG. 26 is a plan view schematically showing a fifth embodiment of the present invention.

FIG. 27 is an operation explanatory view of the fifth embodiment of the present invention.

FIG. 28 is a plan view schematically showing a sixth embodiment of the present invention.

FIG. 29 is an explanatory diagram of an operation in the sixth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Transfer chamber 2a, 2b, 2c, 2d, 2e ... Process chamber station 3,4 ... Work transfer station 5 ... Partition wall 6 ... Gate 7 ... Transfer stand attitude holding mechanism 7a, 7b ... Gears 8a, 8b, 24a, 24b ... Transfer tables 9a, 9b ... Ring-shaped bosses 10a-10d ... Arms 11a-11d ... Links 20a, 20b ... Rotating members 21a, 21b, 31a, 31b, 41a, 41b, 5
1b: Main arm 22a, 22b, 32b, 42a, 42b, 52b: Auxiliary arm 23a, 23b, 33a, 33b, 43a, 43b, 5
3b: Main link 25a, 25b, 55a, 67, 71, 74, 75: Support shaft 26a, 26b, 65, 66, 69, 70, 72, 7
3, 76, 77 ... pulleys 27, 65a, 68a, 68b, 78a, 78b ... belts 28a, 28b, 38a, 38b, 48a, 48b, 5
8a ... Auxiliary link 39a, 39b, 39c ... Bracket 56a, 56b ... Gear 57a, 57b ... Lever 57c ... Link 61 ... First arm 61a, 66a ... Boss part 62, 62a, 62b ... Second arm 63 ... Third arm 64 ... fourth arm a _1, a 2 _... transfer robot _{B 1, B 2, C 1} , C 2, D 1, D 2, E 1, E 2 ... robot linkage W _1, W 2 _... work

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masanobu Seki 1200 Manda, Manda, Hiratsuka-shi, Kanagawa Prefecture Inside the Komatsu Seisakusho Laboratories (72) Inventor Mineo Tokuda 1200, Manda, Hiratsuka-shi, Kanagawa Pref.

Claims (4)

[Claims] 1. A plurality of concentrically provided rotating members which are displaced in the vertical direction, a link mechanism provided on one rotating member and a link mechanism provided on another rotating member are connected, and a transfer table is provided. Concatenate,
A plurality of robot linkages are arranged so that each carriage moves alternately in the direction perpendicular to the axis of the rotation member by rotation of each rotating member, and when at least one of the robot linkages protrudes and moves, The carriage of the other robot link mechanism is further immersed from the standby state in which both carriages are immersed and moved again and protrudes again. A transfer robot, wherein another transfer table and a link mechanism are not passed through the transfer robot. 2. A main body fixed to one of the rotating members, a main arm fixed to one of the rotating members, and a main link rotatably connected to a distal end portion of the main arm. A transfer table connected to the main link, an auxiliary arm fixed to the other rotating member, and an auxiliary link having one end rotatably connected to the distal end of the auxiliary arm and the other end to the main link. A first robot link mechanism, and a second robot link mechanism having the same configuration as the first robot link mechanism in which a main arm and an auxiliary arm are fixed to rotating members opposite to each other. A transfer robot, wherein each transfer table does not overlap in the vertical direction. 3. In each robot link mechanism, the length of the main arm from the center of the rotating member and the length of the main link are the same, and the transfer table attitude holding mechanism is provided with respect to the rotation angle of the main link with respect to the main arm. 3. The transfer robot according to claim 2, wherein the transfer table comprises a rotation transmission mechanism that rotates the transfer table in a reverse direction by half. 4. A first arm having a base end rotatably supported on a frame side, a second arm, and third and fourth arms having a transfer table fixed to a distal end side. A rotatable member is rotatably provided at the distal end of one arm, and the rotatable member of the first arm is fixed to a substantially intermediate position of the second arm, and a substantially intermediate point of the second arm is provided via the rotatable member. Is rotatably supported on the distal end side of the first arm, two pulleys are concentrically provided at a substantially intermediate position of the second arm and are rotatably provided, and pulleys are provided rotatably at both ends, respectively. A belt is wound around the pulleys facing each other, the base end of the third arm is fixed to one of the pulleys provided at both ends of the second arm, and the base end of the fourth arm is fixed to the other pulley. Adhere to each other so that they do not overlap each other in the vertical direction. One drive source is connected to a shaft part that rotates one arm, and one drive source is connected to a rotating member that rotates a second arm provided at the tip of the first arm. Transfer robot.