JP2001194519A - Device and method of manufacturing for color filter, method of manufacturing for display device, method of manufacturing for device equipped with the display device and method for identifying defective nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a system of manufacturing for a color filter bringing about no lowering of the working rate and the yield of the manufacturing line to the utmost and shortening the manufacturing time of the color filter. SOLUTION: In the case of manufacturing the color filter using a device for manufacturing the color filter equipped with a device for coloring the color filter to color the color filter by discharging ink from an inkjet head and an adjusting device to adjust the inkjet head unit installed separately from the device for coloring the color filter, a defective nozzle is identified on the adjusting device side so as not to use the defective nozzle. Thereby generation of defective products is suppressed. Furthermore, the adjustment with the adjusting device enables adjusting the head unit without using a BM(black matrix) substrate. As a result, cost reduction is also attainable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a system for manufacturing a color filter by an ink jet method. More specifically, a color filter manufacturing apparatus includes: a color filter coloring apparatus that discharges ink from an inkjet head to color a color filter; and an adjustment apparatus that is provided separately from the color filter coloring apparatus and that adjusts an inkjet head unit. The present invention relates to an apparatus and a color filter manufacturing method for manufacturing a color filter by the color filter manufacturing apparatus.

[0002]

2. Description of the Related Art In recent years, the development of personal computers,
In particular, with the development of portable personal computers, the demand for liquid crystal displays, especially color liquid crystal displays, tends to increase. However, for further widespread use, it is necessary to reduce the cost of the liquid crystal display. In particular, there is an increasing demand for reducing the cost of a color filter having a high cost. Conventionally, various methods have been tried to satisfy the above requirements while satisfying the required characteristics of the color filter, but no method has yet been established that satisfies all the required characteristics. The respective methods will be described below.

The first method is a pigment dispersion method. In this method, a photosensitive resin layer in which a pigment is dispersed is formed on a substrate, and a monochromatic pattern is obtained by patterning the photosensitive resin layer. This process is further repeated three times to form R, G, B color filter layers.

[0004] The second method is a dyeing method. In the dyeing method, a water-soluble polymer material, which is a material for dyeing, is applied on a glass substrate, and is patterned into a desired shape by a photolithography process. Get a pattern. This is repeated three times to form R, G, B color filter layers.

As a third method, there is an electrodeposition method. In this method, a transparent electrode is patterned on a substrate, and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, and the like to electrodeposit a first color. This process is repeated three times to form R, G, and B color filter layers, and finally fired.

As a fourth method, there is a printing method. In this method, a pigment is dispersed in a thermosetting resin, R, G, and B are separately applied by repeating printing three times, and then the resin is thermoset to form a colored layer. In any method, a protective layer is generally formed on the colored layer.

[0007] These methods have in common that R,
In order to color the three colors G and B, the same process needs to be repeated three times, which increases the cost. In addition, there is a problem that the yield decreases as the number of steps increases.
Further, in the electrodeposition method, since a pattern shape that can be formed is limited, it is difficult to apply the current technology to a TFT. In the printing method, it is difficult to form a fine pitch pattern due to poor resolution and smoothness.

In order to make up for these drawbacks, Japanese Patent Laid-Open Publication No.
JP-A-5205, JP-A-63-235901 and JP-A-1-217320 disclose a method of manufacturing a color filter using an ink jet system. These methods are R (red), G (green), B
An ink containing three (blue) dyes is jetted onto a light-transmissive substrate by an inkjet method, and each ink is dried to form a colored image portion. In such an ink jet system, the R, G, and B filter elements can be formed at one time, so that a significant simplification of the manufacturing process and a significant cost reduction effect can be obtained.

When a color filter is manufactured by such an ink-jet method, each of the R, G, and B colors is used to color each filter element into each of R (red), G (green), and B (blue) colors. It is necessary to prepare three types of heads for ejecting the three inks, and to adjust the relative positions and inclination angles of these three heads as a pre-process for coloring the color filters. When performing this adjustment, it is best to perform the adjustment with each inkjet head attached to the color filter manufacturing apparatus. However, when the adjustment is performed with the inkjet head attached to the manufacturing apparatus, the color filter substrate is There is a problem in that dust falls on the top, and the dust causes inks of different colors in adjacent filter elements to mix with each other, causing color mixing. Also, if adjustments are made while attached to the manufacturing equipment,
The time required to stop the production line of the color filter for the adjustment is lengthened, and the increase in the stop time reduces the operation rate and causes the cost to increase.

In order to make up for these disadvantages, Japanese Patent Application Laid-Open No. 10-10
No. 0396 discloses a method for adjusting an ink jet head unit having a plurality of ink jet heads on an adjusting device provided separately from the color filter coloring device. In these methods, by performing the relative position of the plurality of inkjet heads and the inclination angle with respect to the main scanning direction on the adjustment device, the adjustment time performed on the color filter coloring device can be reduced, and thereby the production line can be reduced. The downtime can be reduced, and the operation rate can be improved. Further, according to this method, the occurrence of color mixture due to dust can be reduced.

The production of a color filter using the ink jet system as described above is performed by a color filter manufacturing apparatus including a color filter coloring apparatus for coloring the color filter and an adjusting apparatus for adjusting the ink jet head unit. .

[0012]

When an ink jet head is used for coloring a color filter, it is necessary to discharge ink to an opening (filter element) having a predetermined regularity, unlike a general printer. Therefore, the landing accuracy of ink is required to be approximately one digit higher than that of a general printer. If the ink landing position is shifted, color mixing may occur between the filter elements, and a color filter in which color mixing occurs even at one location becomes a defective product. Therefore, in coloring the color filter, it is an important requirement that the landing accuracy of the ink is not reduced.

The level of color unevenness (difference in coloring density between filter elements and between filter elements, white spots in filter elements) required for a color filter is determined when an ordinary printer applies ink to paper. An extremely high degree is required as compared with. What affects the color unevenness is the ink ejection amount from each nozzle. For example, due to the difference in the amount of ink ejected from each nozzle, there is a case where the coloring density differs between the filter elements, or whiteness occurs in the filter elements. A color filter having a large difference in coloring density or a color filter having white spots is a defective product. Therefore, in coloring the color filter, it is an important requirement to suppress the occurrence of color unevenness.

The above-described ink landing accuracy and color unevenness are greatly affected by the ink ejection state of the nozzles. Therefore, it is considered necessary to check the ejection state of the nozzle, identify the ejection failure nozzle, and perform some kind of treatment on the identified failure nozzle. In the conventional color filter manufacturing apparatus, the defective nozzle is specified on the color filter coloring apparatus side, not on the adjustment apparatus side. The defective nozzle is specified by discharging ink to a black matrix (BM) substrate, which is an actual color filter substrate, to color a plurality of filter elements, and inspecting the coloring result. That is, a portion where color mixture occurs on the BM substrate is found, and the defective nozzle is specified thereby. This defective nozzle identification method
It is disclosed in JP-A-11-70612.

However, the present inventors have found that such a conventional method of specifying a defective nozzle requires further improvement in several points. This is shown below.

First, when the defective nozzle is specified on the color filter coloring apparatus side, the production line must be temporarily stopped for the time for specifying the defective nozzle, and the production time becomes longer. In addition, stopping the line causes a decrease in throughput and operating rate.

Second, in the method of specifying a defective nozzle by color mixing as described above, because one filter element is formed by a plurality of inks discharged from a plurality of nozzles, only one color mixing portion is formed. It is not possible to immediately identify which nozzle is the defective nozzle only by paying attention. Therefore, it is necessary to focus on a plurality of color mixing portions and estimate the defective nozzle from the result. Therefore, in this method, although the defective nozzle can be reliably specified, it takes time to specify the defective nozzle, and the specifying method is troublesome.

Third, if a defective nozzle is specified using a BM substrate, the cost of manufacturing a color filter increases. This is because the BM substrate is expensive. Therefore, it is desirable that the defective nozzle be specified on the base glass.

Fourth, if the defective nozzle is specified after the color filter is actually colored in the color filter coloring apparatus, at least the first color filter can be colored by a nozzle group including the defective nozzle. If a defective nozzle is included, there is a possibility that a color filter in which color mixture or white spots have occurred may be manufactured. This leads to a decrease in yield and an increase in cost.

As described above, the conventional method of identifying a defective nozzle has the above-described further improvements, which are problems to be solved when manufacturing a color filter.

Accordingly, the present invention has been made in view of the above-described problems, and provides a color filter manufacturing system capable of shortening the manufacturing time of the color filter without causing a decrease in the operation rate and the yield of the manufacturing line as much as possible. The purpose is to do.

It is another object of the present invention to provide a color filter manufacturing system which can specify a defective nozzle without using a BM substrate and can thereby reduce the cost.

Another object of the present invention is to provide a color filter and a display device manufactured by the above-described manufacturing system, and an apparatus provided with the display device.

[0024]

In order to achieve the above object, the present invention provides an ink jet head having a plurality of nozzles which scans a plurality of nozzles relative to a color filter substrate having a plurality of filter elements. A color filter coloring apparatus that discharges ink from the inkjet head toward the filter element to color the color filter substrate, and the inkjet head is provided separately from the color filter coloring apparatus, and the inkjet head is removed from the manufacturing apparatus. A color filter manufacturing apparatus comprising: an adjustment device that adjusts in a state where the nozzles are adjusted, wherein the adjustment device includes a defective nozzle specifying unit that specifies a defective nozzle based on a result of ink discharge from the plurality of nozzles. It is characterized by the following.

Further, according to the present invention, while causing an ink jet head having a plurality of nozzles to relatively scan with respect to a color filter substrate having a plurality of filter elements, ink is supplied from the ink jet head toward the plurality of filter elements. A color filter coloring device that discharges and colors the color filter substrate; and an adjusting device that is provided separately from the color filter coloring device and adjusts the inkjet head in a state where the inkjet head is removed from the manufacturing device. A method of manufacturing a color filter by a color filter manufacturing apparatus, wherein the adjusting apparatus includes a defective nozzle specifying step of specifying a defective nozzle based on a discharge result of ink discharge from the plurality of nozzles. Things.

According to the present invention, there is also provided a method of manufacturing a display device having a color filter manufactured by the above-described color filter manufacturing method, comprising the steps of: preparing a color filter manufactured by the color filter manufacturing method; ,
A step of integrating the prepared color filter with a light amount varying means for varying the light amount.

According to the present invention, there is also provided a method of manufacturing a device having a display device manufactured by the above-described method of manufacturing a display device, comprising the steps of: preparing a display device manufactured by the method of manufacturing a display device; Connecting an image signal supply unit for supplying an image signal to the display device.

Further, the present invention provides a method of forming a drawing pattern by discharging a plurality of inks onto a glass substrate from an ink jet head having a plurality of nozzles, and reading the formed drawing pattern. Measuring each ink ejection amount and each ink landing position ejected from the nozzle, and identifying a defective nozzle from the data indicating the measured ink ejection amount and ink landing position. This is a method of identifying a defective nozzle.

In the present specification, the filter element is a portion functioning as a color filter.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[Outline of Color Filter Coloring Apparatus] FIG. 1 is a schematic view showing the configuration of an embodiment of a color filter coloring apparatus.

In FIG. 1, reference numeral 51 denotes an apparatus stand, 52 denotes an XYZθ stage arranged on the stand 51, and 53 denotes an XYZ stage.
a color filter substrate set on the θ stage 52,
Reference numeral 54 denotes a color filter formed on the color filter substrate 53, and 55 denotes an R for coloring the color filter 54.
(Red), G (green), and B (blue) inkjet heads 55b
A head unit comprising a head mount 55a for supporting them; 58, a controller for controlling the overall operation of the color filter coloring apparatus 90; 59, a teaching pendant (personal computer) as a display unit of the controller; 60, a teaching pendant 59; It shows the keyboard that is the operation unit of the. The head unit 55 is detachably attached to the support portion 90a of the color filter coloring device 90, and is mounted such that the rotation angle can be adjusted in a horizontal plane.

FIG. 2 is a block diagram of a control controller of the color filter coloring apparatus 90. Reference numeral 59 denotes a teaching pendant (personal computer) serving as an input / output means of the controller 58; 62, a display unit for displaying information such as the progress of manufacturing and the presence / absence of a head abnormality; An operation unit (keyboard) for instructing.

Reference numeral 58 denotes a controller for controlling the overall operation of the color filter coloring apparatus 90; 65, an interface for transferring data to and from the teaching pendant 59; 66, a CPU for controlling the color filter coloring apparatus 90; ROM, which stores a control program for operating the printer, 68, a RAM for storing production information, etc., 70, a discharge control unit for controlling the discharge of ink into each filter element of the color filter, 71, color filter coloring A stage control unit for controlling the operation of the XYZθ stage 52 of the apparatus 90;
And a color filter coloring device that operates according to the instruction.

[Description of Inkjet Head] Next, FIG.
FIG. 3 is a view showing the structure of the ink jet head IJH55b used in the color filter coloring apparatus 90 described above. In FIG. 1, in the head unit 55, three inkjet heads IJH55b are provided corresponding to three colors of R, G, and B. However, since these three heads have the same structure, respectively, FIG. FIG. 3 shows a typical structure of one of these three heads.

In FIG. 3, the ink jet head IJ
H55b includes a plurality of heaters 10 for heating ink.
The heater board 104 includes a heater board 104 on which a substrate 2 is formed, and a top plate 106 which is placed over the heater board 104. A plurality of discharge ports 108 are formed in the top plate 106, and a tunnel-shaped liquid path 110 communicating with the discharge ports 108 is formed behind the discharge ports 108. Each liquid channel 110 is separated from an adjacent liquid channel by a partition 112. Each liquid path 110 is commonly connected to one ink liquid chamber 114 at the rear thereof,
Ink is supplied to the ink liquid chamber 114 through an ink supply port 116, and the ink is supplied from the ink liquid chamber 114 to each liquid path 110.

The heater board 104 and the top plate 106
The heaters 102 are aligned so that the heaters 102 come to the positions corresponding to the respective liquid passages 110, and assembled in a state as shown in FIG. Although only two heaters 102 are shown in FIG. 3, the heaters 102 are arranged one by one corresponding to the respective liquid paths 110. Then, when a predetermined drive pulse is supplied to the heater 102 in the assembled state as shown in FIG. 3, the ink on the heater 102 boils to form bubbles, and the ink expands in the ejection port 108 by the volume expansion of the bubbles.
And is ejected. Therefore, the size of the bubble can be adjusted by controlling the drive pulse applied to the heater 102, and the volume of the ink ejected from the ejection port can be freely controlled.

[Control Method of Ink Discharge Amount] FIG. 4 is a diagram for explaining a method of controlling the ink discharge amount by changing the electric power applied to the heater in this manner.

In this embodiment, two kinds of constant voltage pulses are applied to the heater 102 in order to adjust the ink ejection amount. The two pulses are a preheat pulse and a main heat pulse (hereinafter, simply referred to as a heat pulse) as shown in FIG. The pre-heat pulse is a pulse for warming the ink to a predetermined temperature prior to actually discharging the ink, and is set to a value shorter than the minimum pulse width t5 required for discharging the ink.
Therefore, no ink is ejected by this preheat pulse. The reason why the preheat pulse is applied to the heater 102 is to increase the initial temperature of the ink to a constant temperature so that the ink ejection amount when a constant heat pulse is applied later is always constant. Conversely, by adjusting the length of the pre-heat pulse, the temperature of the ink can be adjusted in advance, and even when the same heat pulse is applied, the ink ejection amount can be made different. In addition, by warming the ink prior to the application of the heat pulse, the ink also has the function of accelerating the time rise of ink ejection when the heat pulse is applied and improving the responsiveness.

On the other hand, the heat pulse is a pulse for actually discharging ink, and is set to be longer than the minimum pulse width t5 required for discharging the ink. Since the energy generated by the heater 102 is proportional to the width (application time) of the heat pulse, it is possible to adjust the variation in the characteristics of the heater 102 by adjusting the width of the heat pulse.

It is also possible to adjust the amount of ink discharged by adjusting the interval between the preheat pulse and the heat pulse and controlling the state of heat diffusion by the preheat pulse.

As can be seen from the above description, the amount of ink discharged can be adjusted by adjusting the application time of the preheat pulse and the heat pulse, or by adjusting the application interval of the preheat pulse and the heat pulse. It is possible. Therefore, by adjusting the application time of the pre-heat pulse and the heat pulse and the application interval of the pre-heat pulse and the heat pulse as necessary, it is possible to freely adjust the ink ejection amount and the responsiveness of the ink ejection to the application pulse. It becomes possible. In particular, when coloring a color filter, it is desirable that the color density (color density) between each filter element in a color filter or within one filter element is substantially uniform in order to suppress the occurrence of color unevenness. In some cases, control is performed so that the ink ejection amount from each nozzle is the same. As long as the ink ejection amount for each nozzle is the same, the color density between the filter elements can be made substantially the same simply by making the number of inks applied to each filter element the same. In addition, unevenness in one filter element can be reduced. Therefore, when it is desired to adjust the ink ejection amount of each nozzle to the same value, the above-described method of controlling the ink ejection amount may be performed.

(Manufacturing Process of Color Filter) Next, FIG.
FIG. 4 is a diagram showing an example of a color filter manufacturing process. In this embodiment, a glass substrate is generally used as the substrate 1. However, the substrate 1 is not limited to a glass substrate as long as it has necessary characteristics such as transparency and mechanical strength as a liquid crystal color filter. For example, a plastic substrate is also applicable.

FIG. 5A shows a glass substrate 1 provided with a light transmitting portion 7 and a black matrix 2 as a light shielding portion. First,
A resin composition curable by light irradiation or light irradiation and heating and having an ink receptivity is applied to the substrate 1 on which the black matrix 2 is formed, and prebaked as necessary to form the resin layer 3. (FIG. 5 (b)). For forming the resin layer 3, a coating method such as spin coating, roll coating, bar coating, spray coating, or dip coating can be used, and is not particularly limited.

Next, a portion of the resin layer which is shielded from light by the black matrix 2 is subjected to pattern exposure in advance using a photomask 4 to cure a portion of the resin layer and not absorb the ink. (Fig. 5)
(c)) Thereafter, the respective colors of R, G and B are colored at a time by using the ink jet head 55b (FIG. 5 (d)), and the ink is dried if necessary. Note that a portion colored in each color of R, G, and B is called a filter element, and this filter element is a portion that functions as a color filter.

As the photomask 4 used at the time of pattern exposure, a photomask 4 having an opening for curing a light-shielded portion by a black matrix is used. At this time, it is necessary to apply a relatively large amount of ink in order to prevent color loss (white loss) of the colorant in a portion in contact with the black matrix. Therefore, it is preferable to use a mask having an opening smaller than the (light-shielding) width of the black matrix.

As the ink used for coloring, a dye or a pigment can be used as a pigment, and both a liquid ink and a solid ink can be used.

As the curable resin composition used in the present invention, any resin can be used as long as it has ink receptivity and can be cured by at least one of light irradiation and heating. Examples include acrylic resins, epoxy resins, silicone resins, cellulose derivatives such as hydroxypropylcellulose, hydroxyethylcellulose, methylcellulose, and carboxymethylcellulose, and modified products thereof.

In order to cause a crosslinking reaction of these resins by light or light and heat, a photoinitiator (crosslinking agent) can be used. As a photoinitiator, dichromate,
Bisazide compounds, radical initiators, cationic initiators, anionic initiators and the like can be used. These photoinitiators can be used as a mixture or in combination with other sensitizers. Further, a photoacid generator such as an onium salt can be used in combination as a crosslinking agent. Note that heat treatment may be performed after light irradiation in order to further promote the crosslinking reaction.

The resin layer containing these compositions is extremely excellent in heat resistance, water resistance and the like, and can sufficiently withstand a high temperature in a subsequent step or a washing step.

As the ink jet system used in the present invention, a bubble jet type using an electrothermal converter or a piezo jet type using a piezoelectric element can be used as an energy generating element. It can be set arbitrarily.

Although this embodiment shows an example in which a black matrix is formed on a substrate, the black matrix is formed on the resin layer after forming a curable resin composition layer or after coloring. However, this is not a particular problem, and the form is not limited to this example. Also,
As a forming method, it is preferable to form a metal thin film on a substrate by sputtering or vapor deposition and pattern it by a photolithography process, but it is not limited thereto.

Next, only the light irradiation, only the heat treatment, or the light irradiation and the heat treatment are performed to cure the curable resin composition (FIG. 5E), and a protective layer 8 is formed as needed (FIG. 5F). ))
I do. In the drawing, hν indicates the intensity of light, and in the case of heat treatment, heat is applied instead of hν. As the protective layer 8, a light-curing type, a heat-curing type, or a light-heat type
It can be formed by using the resin composition of No. 2 or by vapor deposition or sputtering using an inorganic material, and has transparency as a color filter, followed by an ITO formation process and an alignment film formation process Any material can be used as long as it can withstand such factors.

In the examples shown in FIGS. 5A to 5F, the case where the resin composition layer 3 for receiving the ink is provided on the glass substrate is described. However, the filter elements may be formed by directly applying ink on a glass substrate. This will be described below with reference to FIG.

FIG. 6 shows another example of the color filter manufacturing process. 6, the same reference numerals as those in FIG. 5 indicate the same members as those in FIG.

FIG. 6A shows an ink jet head 5 in which a partition wall 12 having ink repellency is formed on a light transmitting substrate 1.
5b shows a step of applying the curable ink 14. In the present invention, the partition wall 12 is formed of the curable ink 1.
4 is a member provided for forming a concave portion for receiving and preventing color mixing of inks of different colors between adjacent color filters. The partition 12 can be easily formed by patterning a photosensitive resist, for example. However, the partition can also be used as a black matrix or a black stripe. In this case, the black resist may be patterned.

In the present invention, the partition wall 12 may be formed directly on the light-transmitting substrate 1, but may be formed on a substrate on which a layer having another function is formed as required, for example, on an active matrix substrate on which a TFT array is formed. May be formed. In either case, to increase the diffusivity of the curable ink,
Some surface treatment may be performed on the surface on which the color filter is formed.

The curable ink 14 used in the present invention comprises:
An ink that is cured by light irradiation, heat treatment, or a combination thereof. As the curable ink 14, both liquid inks and solid inks can be used, and both pigment-based and dye-based inks can be used. Ink 14
It contains a resin component, a coloring material, an organic solvent, and water that are cured by light irradiation or heat treatment, or a combination thereof.

As the curing component, commercially available resins and curing agents can be used, and specifically, acrylic resins, epoxy resins, melamine resins and the like are suitably used.

Curable ink 1 was applied to each filter element.
After the application of No. 4 (FIG. 6 (b)), a drying process is performed as necessary, and the ink is cured by light irradiation or heat treatment, or a combination thereof to form a color filter (FIG. 6).
(C)). Thereafter, a protective film 8 is formed as needed (FIG. 6D).

(Outline of Color Filter Manufacturing Apparatus) In the present invention, a color filter is manufactured as described above. In the manufacturing process, the color filter is colored using a color filter manufacturing apparatus. Here, the color filter manufacturing apparatus will be described. In this specification, a color filter manufacturing apparatus includes a color filter coloring apparatus for discharging ink from an inkjet head to color a color filter substrate, and a color filter coloring apparatus provided separately from the color filter coloring apparatus. And an adjusting device for adjusting the inkjet head unit mounted on the device.

In the present embodiment, as described above, the head unit 55 is detachably attached to the color filter coloring apparatus and is mounted so as to be able to adjust the rotation angle in the horizontal plane. Then, R, G, B in the head unit 55
Is adjusted by an adjusting device provided separately from the color filter coloring device 90, and the head unit 55 adjusted by this adjusting device is attached to the color filter coloring device 90, and the ink jet head is rotated in a horizontal plane. Adjust only the angle. Thus, the color of the color filter can be started immediately without mounting the head unit 55 to the color filter coloring device 90 and performing other simple adjustments. As described above, the head unit 55 is adjusted by the adjustment device provided separately, so that the head adjustment can be performed by the color filter coloring device 90.
It is possible to prevent the generation of dust and to eliminate the need to stop the color filter coloring apparatus 90 for adjusting the head, as compared with the case where the apparatus is mounted in the state in which the apparatus is mounted on the printer. Can be improved. In particular, in the production of a color filter, when dust adheres to the color filter substrate 1, the inks of the filter elements of adjacent different colors are mixed through the dust as shown in FIG. And found that it is important to suppress the generation of dust in manufacturing a high quality color filter. Therefore, it is desirable that the production of the color filter be performed in a clean environment of class 100 or less, for example, and that the adjustment of the head unit 55 by another device as described above can prevent the generation of dust and improve the quality of the color filter. It is extremely effective in producing. In addition, cleanliness level 1
00 is defined in US Federal Standard 209, and is roughly 0.5 μm in a volume of 1 liter.
This indicates the degree of cleanliness in which 3.5 particles exist.

(Adjustment device) The head unit 55
An adjusting device for adjusting the adjustment will be described. FIG. 8 shows an adjusting device 300 for adjusting the head unit 55.
FIG. 9 is a side view of FIG. 8 as viewed from the right.

8 and 9, an XYZ stage 304 is mounted on a base (not shown). The XYZ stage 304 is movable in the XY directions in the figure by an X slide guide and a Y slide guide. Also, X
On the YZ stage 304, a glass substrate 302 on which ink is ejected for head adjustment is placed. Therefore, by moving the XYZ stage 304 in the XY directions, the glass substrate 302 also moves in the XY directions as a result. Further, the XYZ stage 304 can be moved in the Z direction by means not shown.

In addition, above the XYZ stage 304,
As shown in FIG. 9, the head unit 55
Is mounted in a state of being mounted on the head support column 312. A line sensor camera 310 for reading ink dots drawn on the glass substrate 302 is arranged on the side of the head unit 55.

In addition, on the extension of the X slide guide 306, ink jet heads 55b (R), 55b of each color are provided.
(G), a recovery unit 314 for sucking ink from the ink discharge nozzles of 55b (B) to recover the discharge failure of the nozzles is arranged. The inkjet heads 55b (R), 55b (G), and 55b (B) are heads for discharging red (R), green (G), and blue (B) inks, respectively. Reference numeral 330 denotes a control device for controlling the entire adjustment device. The control device controls the angle of the head, the relative position of the head, the measurement of the amount of ink ejected from each nozzle, the measurement of the landing position of the ink dots, and the color filter as described below. It is used to create drawing data for mass production. In the adjustment of the adjustment device, a glass substrate provided with no BM (hereinafter, referred to as a plain glass substrate) is used. As a result, the cost does not increase. Further, as the raw glass substrate, a substrate provided with an ink receiving layer on the substrate may be used. In order to perform the above measurement with high accuracy, it is preferable to use an elementary glass substrate provided with an ink receiving layer.

(Explanation of Adjusting Procedure of Head Unit) Next, in the adjusting apparatus 300 configured as described above,
How the head unit 55 is adjusted, that is, the procedure for adjusting the head unit 55 will be described.

FIG. 10 is a flowchart showing the overall flow of the procedure for adjusting the head unit. This adjustment is
This is performed before the color filter is colored by the color filter coloring device, and the color filter is colored by performing a predetermined adjustment on the adjusting device, and then mounting the adjusted head unit on the color filter coloring device. Done. The overall flow of the procedure for adjusting the head unit will be described below with reference to the flowchart shown in FIG.

First, in step S 1, the assembled ink jet head unit 55 is mounted on the head support column 312 of the adjusting device 300.

Next, in step S2, each head 55b (R), 55b (G), 55 of the head unit 55
A pattern (landing position measurement pattern) for adjusting the angle of each head and adjusting the relative position is drawn on the glass substrate 302 by b (B) (FIG. 11). Thereafter, in step S3, a landing position measuring pattern as shown in FIG. 11 is read by the line sensor camera 310, and the inclination angle and relative angle of each head are determined based on the data on the landing position of each ink dot obtained from the read pattern. Adjust the position. Note that the above-described angle adjustment and relative position adjustment are performed by measuring the landing positions of the respective ink dots drawn on the elementary glass substrate, as described later. Therefore, the pattern drawn in step S2 will be referred to as a landing position measurement pattern.

Next, in step S4, an ink ejection amount measurement pattern for measuring the ink ejection amount from each ink ejection nozzle is drawn (FIG. 12). In step S5, an ink ejection amount measurement pattern as shown in FIG. 12 is read, and the ink ejection amount from each nozzle is obtained based on the read result. Further, in step S6, the driving condition of the head when manufacturing the color filter is derived from the data of the ink ejection amount for each nozzle obtained in step S5. Thus, the driving conditions of the head are determined at the time of adjustment by the adjusting device.

Next, in Step S7, Step S
The landing position data of each ink dot obtained when the landing position measurement pattern is read in step 3;
Based on the data on the amount of ink ejected from each nozzle obtained when the pattern for measuring the amount of ink ejected was read in step 5, based on the data on the amount of ink ejected from each nozzle, the non-ejected nozzles where the ink cannot be ejected, the nozzles where the amount of ink ejected is extremely small, It is detected whether or not there is a defective nozzle such as a nozzle with a distorted nozzle / satellite. That is, in the present invention, in the adjustment stage of the adjustment device, both the dot landing position and the ink ejection amount are measured for each nozzle, and the defective nozzle is specified from both data.

Next, in step S8, step S
Based on the data of the ink ejection amount of each nozzle obtained in step 5 and the data of the defective nozzle specified in step S7, head shading correction data is created for each nozzle. Thereafter, based on the head shading correction data, data for coloring each filter element with a plurality of nozzles is created (multi-pass data). The data created here is drawing data for mass production of color filters that defines the drawing pattern in which ink is to be ejected when actually coloring the color filters.
A method of creating head shading correction data created based on the data of the ink ejection amount and the defective nozzle,
A method of creating multi-pass data created by using head shading correction data will be described later.

Next, in step S9, step S
The process from the drive condition determination process of No. 6 to the drawing image data creation process for mass production of Step S8 is performed in combination of all the nozzle groups actually used for manufacturing the color filter among the plurality of nozzles of the inkjet head.
It is determined whether the operation has been performed. If the processes in steps S6 to S8 have been performed for all the nozzle groups, the process proceeds to step S10, and the adjustment operation in the adjustment device ends. On the other hand, if not performed, the process returns to step S6, and the above steps S6 to
This is repeated until the step S8 is performed. Note that the control device 330 creates the head shading correction data, creates the multi-pass data, and controls the head adjustment operation.

With the above, the adjustment operation of the head unit on the adjustment device side is completed.

Here, each step of the flowchart shown in FIG. 10 will be described in more detail.

(Data Acquisition of Landing Position of Each Ink Dot / Adjustment of Tilt Angle and Relative Position of Each Head) First, steps S2 to S3 will be described in detail. In these steps S2 to S3, a landing position measurement pattern is drawn, and by reading the drawn landing position measurement pattern, the landing position data of each ink dot is obtained. The tilt angle and relative position are adjusted.

Specifically, in step S2 of FIG. 10, first, the heads 55b (R) and 55b (R) and 55b (R) of the R, G, and B heads are set so that the nozzle pitch substantially matches the interval between the filter elements of the color filter. G) Tilt 55b (B). In the present embodiment, for example, the pitch between the filter element rows is 264 μm. Next, the X slide guide 306 is driven to move the XYZ stage 304 in the X direction, and the head unit 55 is moved to the glass substrate 30.
While scanning relatively in the X direction with respect to 2, each nozzle of each of the heads 55b (R), 55b (G), and 55b (B) prints, for example, five ink dots at a pitch of 400 μm in the scanning direction. Drawing is performed on the glass substrate 302. FIG. 11 shows this drawing pattern.
Are the above-described landing position measurement patterns.

Next, in step S3, the Y slide guide 308 is driven to move the XYZ stage 304 in the Y direction, and the line sensor camera 310 is scanned relative to the glass substrate 302 in the Y direction. Is read. Then, data on the landing position of each ink dot is obtained. Also,
The read landing position measurement pattern is subjected to image processing to determine the center of gravity of each ink dot, and straight lines I1 to I5 passing through the approximate centers of gravity are obtained by least squares approximation. Then, angles θ1 to θ5 between the straight lines I1 to I5 and the Y axis are obtained,
By taking the average value of them, each head 55b (R) 55b
(G) · Angles θa, θb, θc between 55b (B) and the Y axis. Further, the relative distances db and dc of the nozzles of each head in the Y direction are obtained from a straight line passing through the center of gravity of each dot arranged in the X direction.

Thereafter, the eccentric shaft for fine adjustment of the angle of each head is finely adjusted so that θa, θb, θc obtained above become the desired angles. Further, the position of each head is finely adjusted by rotating the fine adjustment screw in the sub-scanning direction of each head so that the relative distance db, dc in the Y direction of each head becomes a desired distance. Thus, the angle adjustment and the position adjustment of each head are completed. The data on the landing position of each ink dot acquired in step S3 is used in the defective nozzle identification step in step S7.

(Measurement of Ink Discharge Amount) Next, step S
The steps 4 to S5 will be described in detail. This step S4 ~
In S5, an ink discharge amount measurement pattern is drawn, and the drawn pattern is read to determine the ink discharge amount from each nozzle.

Specifically, in step S4 of FIG. 10, first, the head unit 55 is caused to discharge ink from each nozzle of each head while scanning the base glass substrate 302 relatively in the X direction. A line pattern having a length of about 5 mm as shown in FIG. 12 is drawn. This line pattern is the pattern for measuring the ink ejection amount described above. At this time, the preheat pulse and the heat pulse of the same pattern are all applied to the heaters of each nozzle.

Next, in step S5, the density of each line pattern drawn in step S4 is measured while scanning the line sensor camera 310 relatively in the Y direction with respect to the glass substrate 302. Then, the ink ejection amount for each nozzle is obtained from the density of each line pattern. As described above, data of the ink ejection amount of each nozzle is obtained.

Here, a specific method for obtaining the ink ejection amount from the density of the line pattern (ink ejection amount measurement pattern) as described above will be described.

First, the density of the line pattern drawn as shown in FIG.
At this time, in the present embodiment, the line pattern is 70
Since the width is about μm, the integrated value of the density in the range of about ± 40 μm from the center of gravity of the line pattern in the Y direction is measured.

Next, a standard calibration curve is obtained by measuring the amount of ink ejected from an arbitrary nozzle of the ink jet head under an arbitrary condition at one time.
Here, the ink ejection amount per one time usually indicates an appropriate amount of ink ejection.However, in some cases, the ink does not form a droplet, so it is not necessary to express the ink amount as one. The expression is the amount of ink ejected per time.

First, as a first operation, among a plurality of nozzles of the ink jet head whose discharge amount is to be measured, the discharge amounts of at least two or more nozzles whose discharge amount under a certain condition is as different as possible are weighed. It is determined by the method or the absorbance method. In the present embodiment, the ejection amount per operation of the four nozzles having different ejection amounts under a predetermined condition is obtained in advance using the gravimetric method.

Next, ink is ejected from the four nozzles whose ejection amount has been determined in this manner under the same conditions as when the ejection amount was obtained, and these inks are formed on the glass substrate 302. The density of the ink dot to be measured is measured.
By performing such a measurement, the ejection amount of ink from the four nozzles and the density of the ink dots formed by the ink are obtained in a one-to-one correspondence. Note that the density data of the ink dots formed by the four nozzles was obtained by sampling 50 drawn dots and calculating the average value. The standard deviation of the concentration data at that time is
It was within 5%.

FIG. 13 shows the above four nozzles.
The amount of one discharge of the ink and the ink
2 is a plot of the relationship between the densities of the ink dots formed on the graph 2 on a graph. In FIG. 13, points indicated by black circles are points indicating the ink ejection amounts and the ink dot densities of the four nozzles. From this figure, it can be seen that the four points are substantially on a straight line. Therefore, if a straight line passing through these four points is drawn, the density of the ink dot with respect to an arbitrary ejection amount can be uniquely obtained as this linear point. This straight line is called a calibration curve.

Since this calibration curve is represented by a straight line, it is sufficient that at least two points can be plotted on the graph in order to obtain the calibration curve. Therefore, it is possible to obtain a calibration curve only by using at least two nozzles without using four different nozzles as described above. However, in the present embodiment, since the data of the ink ejection amount by the gravimetric method or the absorbance method is used for obtaining the calibration curve, the accuracy of each measurement method directly affects the accuracy of the ejection amount measurement in the present embodiment. Therefore, it is more desirable to obtain the calibration curve using three or more nozzles. Needless to say, the calibration curve must be obtained again every time the type of ink used changes.

Next, the ink ejection amount per nozzle from one nozzle corresponding to the line pattern density is obtained from the already obtained line pattern density and the above calibration curve. The ejection amount of the ink to be obtained in this step is the ejection amount per one time from one nozzle, and is not the ejection amount of a plurality of inks as in the case of the line pattern. It has been experimentally confirmed by the inventors of the present invention that the use of the density of the line pattern to determine the ejection amount has almost no effect on the measurement accuracy of the ejection amount.

As described above, each head 55b (R)
A discharge amount per one time from each of the nozzles 55b (G) and 55b (B) is obtained.

(Identification of Defective Nozzle) Next, step S7
Step will be described in detail. In step S7, defective nozzle identification is performed based on the data on the landing position of each ink dot obtained in step S3 and the data on the ink ejection amount from each nozzle obtained in step S5.

First, what kind of nozzle is specified as a defective nozzle in step S7 will be described. In this specification, there are four types of defective nozzles: a non-discharge nozzle, a nozzle with an insufficient amount of ink discharge, a wobble nozzle, and a satellite generation nozzle, and these four nozzles are defined as follows.

(I) A non-discharge nozzle is a nozzle that cannot discharge ink even when the nozzle is driven (even when a heat pulse is applied to a heater). Possible causes of the ejection failure nozzle include nozzle clogging due to an increase in ink viscosity, disconnection of the heater, and the like.

(Ii) Insufficient ink ejection amount A nozzle is an ink ejected when a nozzle is driven (when a heat pulse is applied to a heater), but the ejection amount is extremely small compared to other nozzles. In addition, it is a nozzle whose discharge amount is not constant.

(Iii) The deflection nozzle is a nozzle in which the landing position of the ink dot when the ink is ejected greatly deviates from the target landing position.

(Iv) A satellite generating nozzle is a nozzle in which generated satellites adhere to adjacent filter elements of different colors, causing color mixing between the filter elements.

If the above-mentioned defective nozzles are present in the nozzle group used for coloring the color filter, uneven color density between the filter elements or within one filter element, or mixed color between adjacent filter elements. May be caused. For example, the above (i) and (i)
The nozzle i) has a very unstable ink ejection, and even a non-ejection nozzle may eject a small amount of ink when a heat pulse is continuously applied. May deviate from that. If the ejection amount is unstable, color density unevenness may occur, and if the landing position is unstable, color mixing may occur. The (iii) nozzle is
The distorted ink may enter the adjacent filter element and cause color mixing. Therefore, it is preferable not to use these defective nozzles when coloring the color filter. For this purpose, these defective nozzles are specified in advance, and these defective nozzles are not used when coloring the color filter.

Now, regarding the identification of the defective nozzle, the nozzles in parentheses () and () are identified from the data of the ink ejection amount obtained in the ink ejection amount measuring step of step S5 in FIG. The discharge amount of ink from the non-discharge nozzle or the ink discharge amount is insufficiently different from the discharge amount of the ink from the normal nozzle. The nozzle can be specified. Specifically, an allowable range of the ink discharge amount is determined in advance, and if the measured ink discharge amount is outside the allowable range value, the nozzle is identified as a defective nozzle. As another specific method, the amount of ink ejected from a non-ejection nozzle or a nozzle having an insufficient amount of ink ejection is compared with the amount of ink ejected from a normal nozzle, and the difference between the amounts of ink is determined by a predetermined value. If the value is larger than the (specified value), the nozzle may be specified as a defective nozzle.

The nozzles (iii) and (iv) are specified from the landing position data obtained in the ink dot landing position measuring step of step S3 in FIG. The landing positions of the ink dots ejected from the twist nozzles and the SAT site generating nozzles are significantly different from the landing positions of the ink dots ejected from the normal nozzles. It can be identified. Specifically, it is checked how much the ink landing position is shifted from the position where the ink should be landed. If the shift amount is larger than a predetermined value, it is determined that the nozzle is defective. That is, it is determined whether or not the nozzle is a defective nozzle by determining whether or not the amount of deviation from the target landing position is within an allowable range.

As described above, in this embodiment, a defective nozzle is specified in advance in the adjustment stage by the adjustment device, and ink is ejected onto the BM substrate on the color filter coloring device to actually manufacture the color filter. When doing so, try not to use defective nozzles. As a result, it is possible to reduce the probability of occurrence of color mixing, white spots, uneven color density, and the like, thereby suppressing the production of defective color filters. As a result, the yield is improved, and the color filter can be manufactured without increasing the cost.

(Creation of Drawing Data for Mass Production of Color Filter) Next, the step S8 will be described in detail. In step S8, color filter coloring data (hereinafter, referred to as color filter mass production drawing data) used when coloring the color filter is created. Then, the drawing data for color filter mass production created in step S8 is created after a two-stage data creation process of a head shading correction data creation process and a multi-pass data creation process. In the following, the term "pixel" may be used instead of "filter element", but in this specification, "filter element" and "pixel" are synonymous.

First, a method of generating the head shading correction data in the first stage will be described. Before showing a specific data creation method in this embodiment, first, a basic concept of head shading correction will be described. The head shading correction is to correct the density unevenness in the scanning direction of the inkjet head by adjusting the ink ejection density from each ink ejection nozzle as shown in FIGS.

For example, as shown in FIG. 14, based on the ink ejection amount of the nozzle 3 of the ink jet head, the ink ejection amount of the nozzle 1 is −10%, and the ink ejection amount of the nozzle 2 is + 20%. Suppose. At this time, while scanning the ink jet head IJH, as shown in FIG. 15, a heat pulse is applied to the heater of the nozzle 1 once every 9 times of the reference clock, and the heater of the nozzle 2 is applied to 12 times of the reference clock as shown in FIG. Heat pulse is applied once each, and nozzle 3
The heater pulse is applied to the heater 1 every 10 times of the reference clock. By doing so, the number of ink ejections in the scanning direction can be changed for each nozzle, and the ink density in the scanning direction in the filter element of the color filter can be made constant as shown in FIG. Density unevenness can be reduced. That is, in order to reduce the density unevenness of each filter element,
It is necessary that the color density between each filter element be substantially the same. Therefore, the ejection density of ink to be ejected to each filter element is set for each nozzle so that the coloring density between each filter element is substantially the same. Correcting the ink ejection density in the scanning direction in this manner is called head shading correction.
In this embodiment, the correction achieves a correction width of about 40%.

Next, a specific method for creating drawing data by performing head shading correction will be described. First, FIG.
It is determined that the defective nozzle specified in step S7 of 0 is not used. Next, head shading correction data is created for all nozzles other than the defective nozzle in the following procedure. (1) Data of the ink ejection amount for each nozzle measured in step S5 of FIG. 10 is prepared. (2) When it is assumed that one filter element is colored by one nozzle, the number of dots to be printed on the filter element is set to the value of the ink ejection amount of (1) so that the coloring density between the filter elements becomes substantially the same. Determine based on data. In other words, it can be said that the ejection interval of the ink dots to be ejected to the filter element is determined. Specifically, as described above, when the ink ejection amount from the nozzle is large, the number of dots in one filter element is reduced or the dot interval is widened. On the other hand, when the ink ejection amount from the nozzle is small, the number of dots in one filter element is increased or the dot interval is reduced. In this way,
The ejection density of the ink to the filter element is determined (set). The setting of the ink ejection density is performed for all the nozzles. As a result, ink ejection density data for each nozzle is created. This is the head shading correction data.

Here, more specifically, the nozzles N1 and N2
The case where head shading correction data is created for each nozzle of N3 will be described.

First, the ink ejection amount of each of the three nozzles N1, N2, and N3 is obtained from the data of the ink ejection amount for each nozzle in the above (1). For example, the discharge amount of one discharge of the nozzle N1 is 1
0 ng (nanogram), the discharge amount per nozzle N2 is 20 n
g, it is assumed that the amount of one discharge from the nozzle N3 is 40 ng. Here, in order to make the explanation easy to understand, the variation of the ejection amount of each nozzle is set to be considerably large, but the variation of the ink ejection amount in the actual inkjet head is about ± 5%.

Next, when coloring the pixel column G1 in one pass,
For example, it is assumed that the length of the pixel row is about 200 mm, and that the nozzle N1 requires 2000 inks to color the pixel row G1. At this time, the total amount of ink for coloring the pixel row G1 is 10 (ng) × 2000 = 20.
000 ng. In the head shading correction in the present embodiment, the ink ejection density is set so that the coloring densities between the filter element rows (pixel rows) are substantially the same as shown in (2) above. However, the present invention is not limited to this, and the ink ejection density may be set so that the total amount of ink necessary to color one pixel row is substantially the same. Here, the latter setting method is adopted. Therefore, when the same pixel row G1 is colored using the nozzle N2, 20,000 (ng) / 20 (ng) = 1000 inks are required. In this case, the interval between inks per shot when the pixel row G1 is colored by the nozzle N1 is 200
(mm) ÷ 2000 shots = 100 μm. In the case of coloring with the nozzle N2, the number of bullets for coloring one pixel row is の of that of the nozzle N1, so the ink interval between shots is 200 μm.
Becomes Similarly, when the nozzle N3 is used, the number of bullets of the ink is 20,000 ng ÷ 40 ng = 50.
There are no shots, and the interval between inks for each shot is 400 μm.

In other words, when one pixel row is colored in one pass using the three nozzles (N1, N2, N3) having different ejection amounts, the nozzle N1 ejects 10 ng ink bullets at 200 intervals of 100 μm. And 20n with nozzle N2
g of ink bullets are ejected at 200 μm intervals in 1000 shots.
00 ejections will be made. In this way, the nozzle N
The setting of the ink ejection density for each nozzle of 1 · N2 · N3 is performed.

After the head shading correction data is created as described above, the multi-pass data is created using this data. Hereinafter, the creation of the multi-pass data in the second stage will be described. In the following, for simplicity, each filter element is colored by three passes, and the coloring is performed by changing the nozzle used for each pass.

First, the three nozzles (N1 · N
Consider a case where one pixel row G1 is colored in three passes while changing the nozzle for each pass using (2 · N3). In this case, it is a generally conceivable method to discharge one-third of the required total amount of ink from each of the three nozzles. Therefore, 2000 (shots) / 3 = 6 in the first pass from nozzle N1.
67 inks are ejected. In order to distribute the 667 inks evenly in the scanning direction of the pixel row G1, it is necessary to eject 10 ng of ink bullets at an interval of 300 μm, which is three times 100 μm. Similarly, 1000 nozzles / 3 = 333 inks are ejected from the nozzle N2 in the second pass, and 20 ng of ink bullets are ejected at an interval of 600 μm. Further, from the nozzle N3, 500
That is, 167 inks are ejected.
ng ink bullets are ejected at an interval of 1200 μm.

As described above, the ejection interval of the ink bullets ejected from each nozzle is determined. If the ejection interval is simply set to the same for each nozzle and the pixel row is colored in three passes. Suppose that Then, as shown in FIG. 17, at the ink discharge start position and every 1200 μm from this discharge start position, 10 ng of ink and 2
0ng ink and 40ng ink are concentrated in one place,
At positions every 600 μm from the ejection start position, 10 ng of ink and 20 ng of ink are concentrated in one place, and at other positions, only 10 ng of ink is present. Therefore, as shown in FIG. 18, the landed ink is large at the position where the ink is concentrated, and is small at the position where the ink is not concentrated, and spreads out on the glass substrate, and coloring unevenness of the pixel occurs. Even if the ejection start position of each pass is shifted in order to improve this, the integral multiple of the ink ejection interval of one pass = (the integral multiple of the ink ejection interval of the nth pass + the shift amount of the start position). Since dots appear, the inks may still overlap, and this is not a complete solution to the above problem.

In the present embodiment, the above problem is solved by the following method.

That is, the total number of ink bullets required to color one pixel row in three passes is 667 + 333 + 167 = 1167, which is the sum of 667 nozzles N1, 333 nozzles N2, and 167 nozzles N3. It is. In the present embodiment, the total number of ink bullets of 1167 is simply divided into three equal parts, and the number of ejected ink droplets of the nozzles N1, N2, and N3 is made equal to 1167 ÷ 3 = 389. Then, the ink ejection interval of each nozzle is calculated by dividing 200 mm of the length of the pixel row by 1167, ie, 200 (mm) ÷ 1167 = 171 μm.
At equal intervals.

More specifically, as shown in FIG. 19, first, 10 ng of an ink bullet is ejected from the nozzle N1 to the ejection start position, and then 171 μm is ejected from the nozzle N1.
10 ng of ink bullets are sequentially ejected at an interval of 513 μm which is three times as large as Also, from the nozzle N2, 1
Starting from a position shifted by 71 μm, 20 ng of ink is ejected at 513 μm intervals. Further, the nozzle N3
Thereafter, 40 ng of ink is ejected at an interval of 513 μm starting from a position shifted by 342 μm from the ejection start position. In this way, 10 ng from the nozzle N1
, 20 ng of ink from the nozzle N2, and 40 ng of ink from the nozzle N3
The inks are arranged at equal intervals of 71 μm, and the inks do not overlap and land. Thereby, coloring unevenness as shown in FIGS. 17 and 18 is reduced, and a higher-quality color filter can be manufactured.

In the above description, the number of ink bullets that originally color one pixel row is 667 for the nozzle N1, 333 for the nozzle N2, and 167 for the nozzle N3. Since N3 is aligned with 389 shots, the total amount of ink that colors one pixel row is
It will be different from the amount originally required. More specifically, the total amount of ink originally required is 10 (ng) × 667 + 2
0 (ng) x 333 + 40 (ng) x 167 = 19890 n
where g is 10 (ng) x 389 + 20 (ng) x
389 + 40 (ng) × 389 = 27230 ng. However, in the above-described embodiment, in order to make the description easy to understand, the variation in the ejection amount of each nozzle is set to a value that is significantly different from 10 ng, 20 ng, and 40 ng. For example, if the discharge amount of the first nozzle is 10 ng, the second nozzle is 9.5 ng, and the third nozzle is 1 ng.
Since the amount is at most about ± 5%, such as 0.5 ng, even if the above-described processing for equalizing the number of ink droplets ejected from the nozzles is performed, the total amount of ink for coloring one pixel row is hardly affected. Does not come out. Therefore, even if the method as in the present embodiment is used, there is no inconvenience that the total amount of ink is different and the ink overflows, and only the effect of reducing the coloring unevenness is obtained.

The multi-pass data obtained as described above becomes drawing data for mass production of color filters used when a color filter is actually manufactured on a color filter coloring apparatus.

FIG. 20 is a conceptual diagram showing a coloring method in the case where ink is ejected onto the BM substrate to actually color the color filters based on the drawing data for mass production of the color filters created in the present embodiment. is there. For details, 1st pass, 2
This shows a state in which the nozzles used in the third pass and the third pass are shifted, and the ink ejection intervals are all set at equal intervals to perform coloring. Actually, adjacent pixel columns are R, G, B
However, for the sake of convenience, this drawing shows a case where the colors of the pixel columns are the same. In addition, the difference in the amount of ejected ink is shown by changing the size of the diameter of the nozzle.

As described above, in this embodiment, the specified defective nozzle is not used.
Therefore, for example, as shown in FIG. Even if the pixel row of No. 3 was originally supposed to be formed by the No. 1, No. 3 and No. 5 nozzles, if it is determined that the No. 5 nozzle is a defective nozzle, No. The third pixel row is formed by the first and third nozzles. Similarly, no. The pixel row of No. 5 is No. 3 nozzle and No. 7 nozzle. The 7th pixel column is formed by the 7th and 9th nozzles. However, no.
No. 3. 5. No. The pixel row of 7 is 5
Since there is no ink ejection from the nozzle No., the amount of ink to be ejected becomes smaller than the target value. Then, these pixel rows become lighter than the coloring density required for the color filter. Therefore, the lack of the ink ejection amount from the fifth nozzle is supplemented by the third, fifth, and ninth nozzles. That is, the amount of ink ejected from the third, fifth, and ninth nozzles is increased. By doing so, the color density of these pixel rows can be made the same as the target color density. It should be noted that, by specifying the defective nozzle, it is possible to determine which pixel row reduces the amount of ink to be applied. Therefore, in consideration of such a decrease in the amount of applied ink, which nozzle should be used to increase the amount of the ink to be applied. Therefore, it is necessary to calculate the drawing data for mass production of the color filter.

Next, step S9 in FIG. 10 will be described in detail. As described above, in step S9, it is determined whether or not the drawing data for mass production of color filters has been created for all combinations of nozzle groups actually used for manufacturing color filters.

In this embodiment, due to the relationship between the nozzle pitch of the inkjet head and the pixel pitch of the color filter, the nozzles of the inkjet head are used every four nozzles as shown in FIG. Therefore, as shown in FIG. 22, the ink jet head used in this embodiment has four nozzle groups. FIG.
, The numbers assigned to the nozzles are the numbers of the nozzle groups, and correspond to the first nozzle group, the second nozzle group, the third nozzle group, and the fourth nozzle group, respectively. As is apparent from FIG. 22, the first nozzle group is used in FIG.

When the color filter is colored using an ink jet head having a plurality of nozzle groups as described above, one nozzle group is selected instead of using all the nozzles at once, and the selected nozzle group is selected. Coloration. If it becomes difficult to manufacture a high-definition color filter using the nozzle group currently used due to the life of the nozzle, the occurrence of a defective nozzle, or the like, the nozzle group to be used is changed. For example, the currently used nozzle group is the first nozzle group, and if the first nozzle group becomes unusable, the nozzle group is changed to the second nozzle group. In this way, the nozzle groups to be used sequentially are sequentially changed to the first nozzle group, the second nozzle group, the third nozzle group, and the fourth nozzle group. By doing so, unused nozzles can also be used, and even if a failure occurs in the nozzle during use, it is possible to continue manufacturing the color filter using another nozzle. As a result, a high-definition color filter can be manufactured without lowering the yield.

In the case of manufacturing a color filter as described above, the nozzle groups to be used are switched so that all of the nozzle groups can be used. Drawing data must be created. For this purpose, in step S9 in FIG. 10, it is determined whether or not the drawing data for color filter mass production has been created in all the nozzle groups.

In the adjusting apparatus, first, the processes of steps S6 to S8 in FIG. 10 are performed for the first nozzle group to create drawing data for color filter mass production. Next, in the same manner as the first nozzle group, the drawing data for color filter mass production is created for the second nozzle group.
The same applies to the third nozzle group and the fourth nozzle group. When the drawing data for color filter mass production has been created for all the nozzle groups in this manner, the process proceeds to step S10 in FIG. 10, and the inkjet head unit adjustment is completed.

Next, the ink jet head unit adjusted as described above is mounted on a color filter coloring apparatus to color the color filter. However, it is necessary to determine which nozzle group is to be used for the coloring. Must. It does not matter which nozzle group is selected as long as all the nozzle groups are usable. However, some nozzle groups may not be usable due to too many defective nozzles. Thus, in the present embodiment, the adjustment device determines whether or not the nozzle group can be used. For example, as described above, when one pixel row is colored by three nozzles, if two or more nozzles among the three nozzles are determined to be defective nozzles, the nozzles including the three nozzles Do not use groups. When one pixel row is colored by five nozzles, of the five nozzles,
If three or more nozzles are determined to be defective,
The use of a nozzle group including two nozzles is prohibited. As described above, in order to determine how many defective nozzles are generated, the nozzle group including the defective nozzles is made unusable, the allowable number of defective nozzles is set in advance, and the number of defective nozzles is set in advance. If the number of defective nozzles is large, the nozzle group including the defective nozzle is not used. By using the above-described method, a good color filter having no defect in the filter element can be produced with a high yield.

As described above, in the adjusting device, the head unit is adjusted using the glass substrate (plain glass substrate) on which the BM and the ink receiving layer are not provided, so that the adjustment is performed using the BM substrate. Adjustments can be made at low cost. Further, since the defective nozzle is specified in advance by the adjusting device, the yield can be improved.

(Coloring Step in Color Filter Coloring Apparatus) The ink jet head unit adjusted as described above is mounted on a color filter coloring apparatus, and an actual color filter is manufactured in this color filter coloring apparatus. Hereinafter, a coloring procedure when coloring a color filter in a color filter coloring apparatus will be described.

FIG. 23 is a flowchart showing the overall flow in the color filter coloring step. More specifically, it shows a procedure for coloring a color filter performed on the color filter coloring device by mounting the head unit, which has been subjected to predetermined adjustment on the adjusting device, to the color filter coloring device. Hereinafter, the coloring procedure of the color filter will be described with reference to the flowchart shown in FIG.

First, in step S1, the ink jet head unit adjusted by the unit adjusting device is mounted on the color filter coloring device. Next, in step S2, the rotation angle of the horizontal plane of the inkjet head unit is adjusted.

Thereafter, in step S3, based on the drawing data for color filter mass production created by the adjusting device and the driving conditions determined by the adjusting device, ink is ejected onto the BM substrate to mass produce the color filters. Note that, as the ink is ejected, the ink ejection amount of each nozzle fluctuates with time. For this reason, it is necessary to change the drawing data for mass production of the color filters when a certain number of color filters have been manufactured. Therefore, the adjusting device created the drawing data for mass production of the color filter by measuring the ink ejection amount from each nozzle, but the color filter coloring device extracts the colored color filter and removes the variation of the coloring density of each filter element. The drawing data for mass production of the color filter is created by measuring (step S
4). As described above, when the specified number of color filters are manufactured by the color filter coloring apparatus, the drawing image data for mass production of color filters is replaced.

Next, in step S5, it is determined whether or not a specified number of color filters have been manufactured with the nozzle group used for manufacturing the color filters. If the production of the specified number has been completed, the process proceeds to step S6, and if not completed, the process returns to step S4, and coloring is continued using the currently used nozzle group as it is. As can be seen from the above, in step S5, the nozzle group is changed at the end of the production of the specified number. At this time, the relative positions of the respective heads are also adjusted.

Next, in step S6, it is determined whether or not all the nozzle groups of the ink jet head have been used for manufacturing a color filter. If it is determined that all the nozzle groups have not been used, the process proceeds to step S7, and the nozzle group to be used is changed. On the other hand, if it is determined that all the nozzle groups have been used, the ink jet head unit is replaced when the use has been completed (step S).
8) The ink-jet head unit used for the replacement has already been adjusted by the adjusting device.

With the above, the color filter coloring step by the color filter coloring device is completed.

The present invention can be applied to a modification or a modification of the above embodiment without departing from the gist of the invention. For example, in the above-described embodiment, a heat control method using a heating resistor element (heater) is described as an example of an ink jet method. In addition, droplets are ejected from an orifice by mechanical vibration of a piezo-vibration element. The present invention is also applicable to a pressure control method that performs the above. Furthermore, if it is an inkjet system, it is not limited to these methods and apparatuses. Further, in the above description, the defective nozzle is specified by the adjusting device by measuring the ink discharge amount or the ink landing position, but the present invention is not limited to this, and the laser is applied to the flying ink discharged from the nozzle. The ejection failure nozzle may be detected. That is, the defective nozzle can be specified by the adjustment device based on the result of the ink discharge from the nozzle. However, when a non-discharge nozzle is detected by irradiating a laser, it is possible to detect the non-discharge nozzle, but the ink discharge amount cannot be measured. It is necessary to measure the quantity.

In recent years, there is a panel in which a color filter is provided on the TFT array side. However, the color filter defined in this specification is an adherend that is colored with a coloring material, and is provided on the TFT array side. Both are included, whether or not they are present.

The present invention includes a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for performing ink ejection, particularly in an ink jet recording system. The printing apparatus of the type that causes a change in the state of the ink has been described.
High definition can be achieved.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding the film boiling to the electrothermal transducer arranged corresponding to the sheet or the liquid path holding the Since thermal energy is generated in the electrothermal transducer and film boiling occurs on the heat-acting surface of the recording head, bubbles in the liquid (ink) corresponding to this drive signal on a one-to-one basis can be formed. It is valid. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubbles are performed immediately and appropriately, so that the ejection of liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable.

As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the configuration of the recording head, in addition to the combination of a discharge port, a liquid path, and an electrothermal converter (a linear liquid flow path or a right-angled liquid flow path) as disclosed in the above-mentioned respective specifications, A configuration using U.S. Pat. No. 4,558,333 or U.S. Pat. No. 4,459,600, which discloses a configuration in which a heat acting surface is arranged in a bent region, is also included in the present invention.

Further, as a full-line type recording head having a length corresponding to the width of the maximum recording medium that can be recorded by the recording apparatus, the length is determined by a combination of a plurality of recording heads as disclosed in the above specification. This may be either a configuration satisfying the above requirements or a configuration as a single recording head formed integrally.

In addition, the print head is replaceable with a print head of an interchangeable chip type, which can be electrically connected to the main body of the apparatus or supplied with ink from the main body of the apparatus, or is integrated with the print head itself. Alternatively, a cartridge type recording head provided with an ink tank may be used.

It is preferable to add recovery means for the printhead, preliminary auxiliary means, and the like provided as components of the printing apparatus of the present invention since the effects of the present invention can be further stabilized. . If these are specifically mentioned, capping means for the recording head, cleaning means, pressurizing or suction means, preheating means using an electrothermal transducer or another heating element or a combination thereof, and recording Performing a preliminary ejection mode for performing another ejection is also effective for performing stable printing.

In the embodiments of the present invention described above, the ink is described as a liquid. However, any ink that solidifies at room temperature or lower, or one that softens or liquefies at room temperature may be used. It is only necessary that the ink be in a liquid state when the recording signal is applied.

In addition, in order to positively prevent temperature rise due to thermal energy as energy for changing the state of the ink from a solid state to a liquid state, the temperature is positively prevented.
Alternatively, in order to prevent evaporation of the ink, an ink which solidifies in a standing state and liquefies by heating may be used. In any case, the application of heat energy causes the ink to be liquefied by application of the heat energy according to the recording signal and the liquid ink to be ejected, or to start to solidify when reaching the recording medium. The present invention is also applicable to a case where an ink having a property of liquefying for the first time is used.

[0146]

As described above, according to the present invention,
When adjusting the inkjet head unit using an adjusting device provided separately from the color filter coloring device, the adjustment can be performed without using a BM substrate, so that the cost of manufacturing the color filter can be reduced.

Further, by specifying a defective nozzle at the time of head unit adjustment, the probability of occurrence of defective products can be reduced, and the yield can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an embodiment of a color filter manufacturing apparatus.

FIG. 2 is a diagram illustrating a configuration of a control unit that controls the operation of the color filter manufacturing apparatus.

FIG. 3 is a diagram illustrating a structure of an ink jet head used in a color filter manufacturing apparatus.

FIG. 4 is a diagram illustrating a waveform of a voltage applied to a heater of the inkjet head.

FIG. 5 is a diagram illustrating an example of a manufacturing process of a color filter.

FIG. 6 is a view showing another example of the manufacturing process of the color filter.

FIG. 7 is a diagram showing how color mixing between filter elements occurs through dust.

FIG. 8 is a plan view showing a configuration of an adjusting device for adjusting a head unit.

FIG. 9 is a side view of FIG. 8 as viewed from the right.

FIG. 10 is a flowchart showing an overall flow of a procedure for adjusting a head unit.

FIG. 11 is a diagram showing an ink ejection amount measurement pattern for detecting the ejection amount of each nozzle of the head.

FIG. 12 is a diagram showing a landing position measurement pattern for measuring the landing position of an ink dot.

FIG. 13 is a diagram illustrating the relationship between the density of ink dots and the amount of ink ejected.

FIG. 14 is a diagram for explaining a method of changing the ink ejection density.

FIG. 15 is a diagram for explaining a method of changing the ejection density of ink.

FIG. 16 is a diagram for explaining a method of changing the ink ejection density.

FIG. 17 is a diagram illustrating a state in which inks overlap.

FIG. 18 is a diagram showing how ink spreads when ink overlaps.

FIG. 19 is a diagram illustrating a state where ink is ejected at equal intervals.

FIG. 20 is a diagram conceptually illustrating a coloring method when an actual color filter is colored based on drawing data for mass production of a color filter created in the present embodiment.

FIG. 21 is a diagram showing a state in which coloring is performed without using a defective nozzle.

FIG. 22 is a diagram illustrating a positional relationship between a pixel (filter element) and a nozzle in the color filter coloring apparatus according to the embodiment.

FIG. 23 is a flowchart showing a color filter coloring procedure in the color filter coloring apparatus.

[Explanation of symbols]

 Reference Signs List 1 light-transmitting substrate 2 black matrix 3 resin composition layer 4 photomask 5 uncolored portion 8 protective layer 12 partition wall 14 cured ink 52 XYZθ stage 53 glass substrate 54 color filter 55 head unit 55b inkjet head 58 controller 59 teaching pendant (PC) ) 60 Keyboard 90 Color filter coloring device 300 Adjusting device 302 Glass substrate 304 XYZ stage 306 X slide guide 308 Y slide guide 310 Line sensor camera 312 Head support column 314 Recovery unit

Claims (41)

[Claims] 1. An ink jet head having a plurality of nozzles ejects ink from the ink jet head toward the plurality of filter elements while scanning the ink jet head relative to a color filter substrate having a plurality of filter elements. A color filter manufacturing apparatus, comprising: a color filter coloring apparatus for coloring the color filter substrate; and an adjusting apparatus provided separately from the color filter coloring apparatus and configured to adjust the inkjet head in a state where the inkjet head is removed from the manufacturing apparatus. A color filter manufacturing apparatus, wherein the adjustment device includes a defective nozzle specifying unit that specifies a defective nozzle based on a result of ink discharge from the plurality of nozzles. 2. The apparatus according to claim 1, wherein the adjusting device further includes a measuring unit configured to measure an amount of ink ejected from the plurality of nozzles or an ink landing position of each of the plurality of nozzles. The color filter manufacturing apparatus according to claim 1, wherein the nozzle is specified. 3. The color filter according to claim 2, wherein the measurement by the measurement unit is performed by reading a drawing pattern drawn on a light-transmitting substrate by discharging ink from an inkjet head. apparatus. 4. The color filter manufacturing apparatus according to claim 3, wherein the light-transmitting substrate is a substrate on which a black matrix is not provided. 5. The color filter manufacturing apparatus according to claim 4, wherein the substrate on which the black matrix is not provided is a glass substrate or a plastic substrate. 6. The color filter manufacturing apparatus according to claim 4, wherein the light transmitting substrate has an ink receiving layer provided on the substrate. 7. The defective nozzle specifying means, when it is determined that the ink discharge amount from the nozzle is out of a preset range, sets the nozzle determined to be out of the range as a defective nozzle. The color filter manufacturing apparatus according to any one of claims 1 to 6, wherein the apparatus is specified. 8. The defective nozzle identification means, when it is determined that the ink landing position is larger than a predetermined allowable range, is larger than the allowable range. The color filter manufacturing apparatus according to any one of claims 1 to 7, wherein the nozzle determined as (1) is identified as a defective nozzle. 9. The color filter manufacturing apparatus according to claim 1, further comprising control means for controlling not to use the defective nozzle specified by said defective nozzle specifying means. 10. A color used for coloring a color filter based on both data relating to a defective nozzle acquired by the defective nozzle specifying unit and data relating to an ink ejection amount from each nozzle acquired by the measuring unit. The color filter manufacturing apparatus according to any one of claims 2 to 9, further comprising an arithmetic unit that creates filter coloring data. 11. The color filter coloring data created by the arithmetic means is created by not using the defective nozzle specified by the defective nozzle specifying means. Item 11. A color filter manufacturing apparatus according to item 10. 12. The inkjet head has a plurality of nozzle groups including at least a first nozzle group and a second nozzle group capable of coloring a color filter in place of the first nozzle group. In all nozzle groups of the head,
11. The color filter manufacturing apparatus according to claim 10, wherein the calculation means creates color filter coloring data. 13. The number of defective nozzles specified by the defective nozzle specifying means among a plurality of nozzles used when forming one filter element or a row of filter elements in which a plurality of filter elements are arranged is set in advance. 13. The color filter manufacturing apparatus according to claim 12, wherein a nozzle group including the defective nozzle is not used when the number is equal to or more than a prescribed number. 14. The color filter manufacturing apparatus according to claim 10, wherein said calculation means creates data relating to the ink ejection density of nozzles used for each filter element. 15. The color filter manufacturing apparatus according to claim 10, wherein the calculation means creates data on the ink ejection density of the nozzles used for each row of the filter elements in which a plurality of filter elements are arranged. . 16. The color filter coloring device according to claim 10, wherein the color filter coloring device performs coloring of the color filter based on the color filter coloring data created by the calculation means. Color filter manufacturing equipment. 17. A control means for controlling the color filter to be colored based on the color filter coloring data created by the adjusting device, wherein the color filter coloring device comprises: Measuring means for measuring the coloring density of the element row, wherein the second color filter coloring data is created based on the coloring density of each filter element row measured by the measuring means. 17. The color filter manufacturing apparatus according to any one of claims 16 to 16. 18. The color filter manufacturing apparatus according to claim 17, wherein the second color filter coloring data is changed every time the manufacture of a specified number of color filters is completed. 19. The inkjet head according to claim 1, wherein the inkjet head uses thermal energy to eject ink, and includes a thermal energy generator for generating thermal energy to be applied to the ink. 19. The color filter manufacturing apparatus according to any one of 18. 20. ejecting ink from the inkjet head toward the plurality of filter elements while causing an inkjet head having a plurality of nozzles to relatively scan with respect to a color filter substrate having a plurality of filter elements; A color filter manufacturing apparatus, comprising: a color filter coloring apparatus for coloring the color filter substrate; and an adjusting apparatus provided separately from the color filter coloring apparatus and configured to adjust the inkjet head in a state where the inkjet head is removed from the manufacturing apparatus. A method for manufacturing a color filter, comprising: the adjusting device including a defective nozzle specifying step of specifying a defective nozzle based on a discharge result of ink discharge from the plurality of nozzles. . 21. The adjusting device according to claim 21, further comprising: a measuring step of measuring an amount of each ink ejected from the plurality of nozzles or an ink landing position of each of the plurality of nozzles, based on a measurement result of the measuring step. The method for manufacturing a color filter according to claim 20, wherein the nozzle is specified. 22. The color filter according to claim 21, wherein the measurement in the measurement step is performed by reading a drawing pattern drawn on a light-transmitting substrate by discharging ink from an inkjet head. Method. 23. The method according to claim 22, wherein the light-transmitting substrate is a substrate on which a black matrix is not provided. 24. The method according to claim 23, wherein the substrate on which the black matrix is not provided is a glass substrate or a plastic substrate. 25. The color filter manufacturing apparatus according to claim 23, wherein the light transmitting substrate has an ink receiving layer provided on the substrate. 26. In the defective nozzle specifying step, when it is determined that the ink ejection amount from the nozzle is out of a preset range, the defective nozzle is determined as a defective nozzle. 21. The method according to claim 20, wherein
26. The method for producing a color filter according to any one of the above items. 27. In the defective nozzle specifying step, when it is determined that the ink landing position is larger than a preset allowable range, the ink landing position is larger than the allowable range. The method according to any one of claims 20 to 26, wherein the nozzle determined as (1) is specified as a defective nozzle. 28. The color filter manufacturing method according to claim 20, wherein control is performed such that the defective nozzle specified in the defective nozzle specifying step is not used. 29. A color used for coloring a color filter based on both data relating to a defective nozzle acquired in the defective nozzle specifying step and data relating to an ink ejection amount from each nozzle acquired in the measuring step. 29. The image processing apparatus according to claim 21, further comprising an operation step of creating filter coloring data.
The method for producing a color filter according to any one of the above. 30. The method of producing color filter coloring data in the calculation step, wherein the color filter coloring data is created without using the defective nozzle specified in the defective nozzle specifying step. Item 30. The method for producing a color filter according to Item 29. 31. The inkjet head has a plurality of nozzle groups including at least a first nozzle group and a second nozzle group capable of coloring a color filter in place of the first nozzle group. In all nozzle groups of the head,
30. The color filter manufacturing method according to claim 29, wherein the color filter coloring data is created in the calculation step. 32. The number of defective nozzles specified by the defective nozzle specifying step is set in advance among a plurality of nozzles used when forming one filter element or a row of filter elements in which a plurality of filter elements are arranged. 32. The method according to claim 31, wherein a nozzle group including the defective nozzle is not used when the number is equal to or more than a prescribed number. 33. The color filter manufacturing method according to claim 27, wherein in the calculation step, data relating to ink ejection density of nozzles used for each filter element is created. 34. The color filter manufacturing method according to claim 29, wherein in the calculation step, data relating to the ink ejection density of the nozzles used for each row of the filter elements in which a plurality of filter elements are arranged is created. . 35. The color filter according to claim 29, wherein the color filter coloring device performs coloring of the color filter based on the color filter coloring data created in the calculation step. Filter manufacturing method. 36. The color filter coloring device, wherein the color filter is colored based on the color filter coloring data created by the adjustment device; and a color density of each filter element row of the colored color filter. And a second color filter coloring data is created based on the coloring density of each filter element row measured in the measuring step. 3. The method for producing a color filter according to item 1. 37. The color filter manufacturing method according to claim 36, wherein the second color filter coloring data is changed every time the manufacture of a specified number of color filters is completed. 38. The inkjet head according to claim 20, wherein the inkjet head uses thermal energy to eject ink, and includes a thermal energy generator for generating thermal energy applied to the ink. 37
The method for producing a color filter according to any one of the above. 39. A method for manufacturing a display device provided with a color filter manufactured by the method for manufacturing a color filter according to claim 20, wherein the color filter is manufactured by the method for manufacturing a color filter according to claim 20. And a step of integrating the prepared color filter with a light amount varying means for varying a light amount. 40. A method for manufacturing a device comprising a display device manufactured by the method for manufacturing a display device according to claim 39, wherein the display device is manufactured by the method for manufacturing a display device according to claim 39. And a step of connecting an image signal supply unit for supplying an image signal to the display device. A method for manufacturing a device having a display device, the method comprising: 41. A step of ejecting a plurality of inks from an ink jet head having a plurality of nozzles onto a glass substrate to form a drawing pattern; and reading the formed drawing pattern to eject the drawing pattern from the plurality of nozzles. Measuring the respective ink ejection amounts and the respective ink landing positions, and identifying the defective nozzles from the data indicating the measured ink ejection amounts and the ink landing positions. Method.