JP2001191527A - Ink jet printer head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a printer head in which ink drops can be ejected uniformly and stably from all ejection nozzles by preventing a top plate from sinking. SOLUTION: A print head 35" is constituted by forming a plurality of drivers 22 of a drive circuit, individual wiring electrodes 23, heating parts 24, a common electrode 25, sub-common channels 36 dividing a common ink channel and ink supply holes 37 in a chip substrate 21, laying a barrier wall 38" and a top plate 31 thereon and then making ejection nozzles 32. The barrier wall 38" comprises seal barrier walls 38-1, 38-2 and a channel barrier wall 38-4 defining ink supply passages 41 corresponding to the sub-common channels 36, and a first long pressurizing chamber barrier wall 38-6 and a second short pressurizing chamber barrier wall 38-7 defining an ink pressurizing chamber 39 wherein the top plate 31 above the common ink channel is supported by the forward end of the first pressurizing chamber barrier wall 38-6 and the channel barrier wall 38-4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet printer head capable of uniformly and stably ejecting ink droplets from all ejection nozzles by preventing a top plate covering an ink flow path from dropping.

[0002]

2. Description of the Related Art Conventionally, ink jet printers, which are relatively easy to handle, have become mainstream and have been widely used. Inkjet printers include:
There are a thermal jet method in which ink is heated to generate air bubbles and the ink droplets are ejected by the pressure, and a piezo jet method in which the ink droplets are ejected by deformation of a piezoresistive element (piezoelectric element). In these, ink (recording material) is formed into ink droplets, ejected from nozzles of a print head, and the ink droplets are absorbed by a recording material such as paper or cloth to record (print, print) characters and images. This is a printing method that generates less noise, does not require special fixing processing, and has no waste of ink.

Conventionally, only printers for monochrome printing have been used, but now, printers for full-color printing have become mainstream. Full color printing is usually
Using three inks of three subtractive primary colors, yellow (yellow), magenta (red dye name) and cyan (greenish blue), depending on the type, black ( This is performed by using four color inks to which (black) is added.

FIG. 5A schematically shows a monochrome inkjet printer head (hereinafter simply referred to as a print head) mounted on an inkjet printer for performing such printing and executing printing. Figure (b) shows 4
FIG. 3C is a view showing a print head for full-color printing, and FIG. 3C is a sectional view taken along the line AA ′ in FIG. 3A or BB ′ in FIG.
(D) is the same as FIG. (A) or (b).
FIG. 4 is a view showing a silicon wafer on which the print head shown in FIG. The print head 1-1 shown in FIG.
The print head 1-2 shown in (b) shows the ink ejection surface of the print head 1 (1-1, 1-2) viewed from the paper side on which printing is performed.

[0005] As shown in FIG.
A top plate (also referred to as an orifice plate) 3 is laminated on the surface (ink discharge surface) of a chip substrate 2, and a large number of discharge nozzles 4 are vertically arranged on the top plate 3 by drilling such as dry etching. (Four vertical columns in the print head 1-2 of FIG. 2B) to form a nozzle row 5, and the chip substrate 2
A common power supply terminal 6 and a drive circuit terminal 7 are formed at one end (the upper end in FIGS. 7A and 7B) in the nozzle row direction.

The print head 1-1 shown in FIG. 5 (a) is a print head for a monochrome printer as described above.
The print head 1-2 is formed by monolithically arranging four rows of the structure of the print head 1-1 shown in FIG. 1A on a chip substrate 8 larger than the chip substrate 2. The above print heads 1-1 and 1-2 are all shown in FIG.
As shown in (d), 4 × 25.4 mm or 6 × 25.4
It is manufactured on a chip substrate 2 or 8 divided into a large number (for example, 90 or more) on a silicon wafer 9 having a size of mm or the like.

FIG. 6 is an exploded perspective view showing the inside of the print head 1-1 more clearly in addition to the sectional view of FIG. 5C. The figure shows the chip substrate 2 from bottom to top.
And the shape of each part directly formed on the chip substrate, a partition wall 17 described later, and the top plate 3 are shown.

Each of the chip substrates 2 will be described with reference to FIGS.
Alternatively, the internal structure of the print head 1 (1-1, 1-2) formed in the printer 9 will be briefly described. First, as shown in FIG. 5C, a drive circuit 11 composed of a MOS transistor or the like is formed at a predetermined position on the surface layer of the chip substrate 2 (or 9, hereinafter the same) by an LSI formation processing technique. .

FIG. 5C shows the surface of the chip substrate 2.
As shown in FIG. 6, a plurality of striped heating resistors 12 are formed by a thin film forming technique.
And the driver 11-1 of the drive circuit 11 (see FIG. 6), a common electrode 14 for supplying a drive voltage to the heating resistor 12, and a common power supply terminal 6 shown in FIG. And a drive circuit terminal 7 (not shown in FIG. 6). Here, each heating element for forming a print dot is formed by a heating section 12 on each heating resistor 12.
The individual wiring electrode 13 and the common electrode 1
4 are laminated.

On the opposite side of the drive circuit 11 with the individual wiring electrode 13, the heating resistor 12 and the common electrode 14 interposed therebetween, a groove for supplying ink to the heating resistor 12 by dry etching such as sandblasting. Are formed on the front surface side of the substrate.
Ink supply hole 1 for supplying ink from outside to 5
6 is formed through the rear surface of the substrate. The common ink flow path 15 is extended in an elongated groove shape in the direction in which the heating resistors 12 are arranged side by side (in FIG. 5C, the direction perpendicular to the paper surface). The supply holes 16 are formed so as to communicate with each other.

Then, a partition 17 (seal partition 17-1, 17-) is formed on these by photolithography technology.
2. The pressure chamber partition walls 17-3) are stacked. The pressurizing chamber partition 17-3 is formed so as to individually partition adjacent heat generating elements, whereby the heat generating portion 12-1 of the heat generating element is formed by the seal partition 17-2 and the pressurizing chamber partition 17-3.
An ink pressurizing chamber 18 that surrounds (see FIG. 6) from three sides is formed.

Further, the top plate 3 is laminated on the partition wall 17. An ink supply path 19 having a height of about 10 μm corresponding to the height of the partition wall 17 and covered by the top plate 3 is formed between the ink pressurizing chamber 18 and the common ink flow path 15.
A discharge nozzle 4 having a diameter of about 20 to 30 μm formed by dry etching based on a metal film mask (not shown) is arranged on the top plate 3 so as to oppose the heat generating portion.

Thereafter, the silicon wafer 10 is cut for each chip substrate 2 using a dicing saw or the like and individually collected, and the back surface of the chip substrate 2 is die-bonded to a parent substrate such as an aluminum material which also serves as a heat radiating plate. Then, terminals are connected by wire bonding to form a resin protective layer, and the print head 1-1 shown in FIG.
A print head of a practical unit such as the print head 1-2 shown in FIG.

[0014]

In the above-described print head 1-1 (or 1-2), the common ink flow path 15 for supplying ink to the individual ink pressurizing chambers 18 via the ink supply paths 19 is provided. As described above, each of the ink pressure chambers 18 is formed so as to extend in the direction in which the ink pressure chambers 18 are juxtaposed so that ink can be uniformly supplied to all the ink pressure chambers 18. Since it is difficult to provide a support or the like in the common ink flow path 15, the top plate 3 covering the upper part of the common ink flow path 15 cannot be supported by the support or the like, and a state in which the ceiling plate 3 floats in the air. Has become. Therefore, the top plate 3 in this portion easily falls inside.

FIG. 7 is a diagram showing the above-mentioned problem which occurs in the configuration shown in the sectional view of FIG. 5 (c). FIG. 7 shows the driving circuit 11 and the driver 1 for simplicity of description.
1-1, the heating resistor 12, the individual wiring electrode 13, and the common electrode 14 are not shown. As shown in FIG. 7, when the top plate 3 on the common ink flow path 15 falls, the common ink flow path 15 in the lowered portion and the ink supply path 19 in the vicinity thereof become narrow, that is, the flow path in that part The cross-sectional area decreases and the flow path resistance increases. For this reason, the refilling speed of the ink into the ink pressurizing chamber 18 after the ink has been ejected once is lower than that of the other portions, which hinders the uniform supply of the ink as a whole and causes unevenness in printing of the formed image. The problem of getting out occurred.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional circumstances,
It is an object of the present invention to provide an ink jet printer head capable of preventing a top plate covering a common ink flow path from dropping and uniformly and stably discharging ink droplets from all discharge nozzles.

[0017]

First, an ink jet printer head according to the first aspect of the present invention is provided with an energy generating element for generating pressure energy for discharging ink and a corresponding energy generating element. A plurality of discharge nozzles for guiding the ink having received the pressure energy in a predetermined direction to discharge the ink, and a plurality of ink nozzles formed by partition walls and having the energy generating elements arranged therein and arranged in parallel in a predetermined direction. A pressure chamber, which is formed to extend along the direction in which the pressure chambers are juxtaposed, and temporarily stores ink before distributing and supplying the ink supplied from the ink storage means to each of the ink pressure chambers. An inkjet printer head having a common ink flow path,
The pressurizing chamber partition that separates the individual ink pressurizing chambers includes a long first pressurizing chamber partition and a shorter second pressurizing chamber partition, and the first pressurizing chamber partition and the second pressurizing chamber. Partition walls are arranged alternately.

Next, an ink jet printer head according to a second aspect of the present invention is provided with an energy generating element for generating pressure energy for discharging ink, and a pressure energy provided for the energy generating element. A plurality of ejection nozzles for guiding and ejecting the received ink in a predetermined direction, and a plurality of ink pressurizations which are formed by partitioning the pressure chamber partition walls and in which the energy generating elements are respectively arranged and arranged in parallel along the predetermined direction. And a chamber that extends along the direction in which the pressurizing chambers are arranged, and temporarily stores ink before distributing and supplying the ink supplied from the ink storing means to each of the ink pressurizing chambers. An inkjet printer head having a common ink flow path, wherein the common ink flow path is divided into a plurality of sub-common flow paths, and between the adjacent sub-common flow paths. A flow path partition wall joined to the top plate of the ink flow path is formed is provided.

The above-mentioned flow path partition wall is provided with a plurality of ink pressurizing chambers corresponding to the sub common flow paths in the above-mentioned pressure chamber partition wall facing the flow path partition wall. It is preferable that the ink supply path is connected via a supply path partition that divides the supply path and the ink supply paths to the plurality of ink pressurizing chambers corresponding to the adjacent sub-common flow paths.

The pressurizing chamber partition separating the ink pressurizing chambers may be, for example, a long first pressurizing chamber.
It is preferable that the partition is composed of a pressure chamber partition and a second pressure chamber partition shorter than the partition, and the first pressure chamber partition and the second pressure chamber partition are desirably arranged alternately.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1A is an exploded perspective view of an ink jet printer head (hereinafter, simply referred to as a print head) according to the first embodiment, and FIG.
It is a top view of the principal part. FIGS. 5A and 5B show a monochrome print head having only one row of ejection nozzles for convenience of description, but the configuration described below is the same for a full-color print head. is there.

As shown in FIGS. 2A and 2B, the print head 2
0 denotes a plurality of drivers 22 of a drive circuit (not shown) on the surface (ink ejection surface) of the chip substrate 21;
2 and the heat generating portions 24 each having one end connected to each of the individual wiring electrodes 23.
-1, a common electrode 25 connected to the other ends of these heat generating portions 24-1, and the plurality of heat generating portions 24 outside the common electrode 25 opposite to the driver 22 with the common electrode 25 interposed therebetween.
-1, and an ink supply hole 2 penetrating through the common ink flow path 26 and penetrating to the back surface of the chip substrate 21.
7 are formed respectively.

The seal partition walls 28-1 and 28-2 formed so as to surround the edge of the chip substrate 21 and one of the seal partition walls 28-2 so as to extend therefrom. Long first pressure chamber partition 28-3,
A partition wall 28 composed of a second pressurizing chamber partition wall 28-4 shorter than this is stacked.

The first pressurizing chamber partition 28-3 and the second pressurizing chamber partition 28-4 are formed so as to individually partition the plurality of heat generating parts 24-1 and are arranged alternately. The length L1 of the first pressure chamber partition 28-3 is equal to the second pressure chamber partition 2
It is formed longer by the length L2 than the length of 8-4.
The leading end of the first pressure chamber partition 28-3 is connected to the common ink passage 2
6 and extends to the adjacent first pressurizing chamber partition 28.
-3 (in the case of the first pressurizing chamber partition 28-3 at the end portion, a seal partition 28-2) and a first supply port 33 of a wide width are formed so that ink is directly received from the common ink flow path 26. Are located.

The inside of the first supply port 33 is divided into two by a second pressure chamber partition 28-4, that is, the first pressure chamber partition 28-3 and the second pressure chamber partition 28-4. And a seal partition 28-2 are arranged so as to surround the heat generating portion 24-1 from three sides, and an ink pressurizing chamber 29 is formed here. The ink pressurizing chamber 29 has a second supply port 34.

Further, a top plate 31 is laminated on the partition walls 28, and a discharge nozzle 32 is formed on the top plate 31 at a position facing the heat generating portion 24-1. The first of the above
According to the print head 20 of the embodiment, first,
The top plate 31 is prevented from sagging (falling). This effect is brought about by the arrangement of the distal end of the long first pressure chamber partition wall 28-3 having the length L1.

In the present embodiment, not only the above effects but also the following effects are obtained. That is, uniformity of the ink refill property can be mentioned. This effect is achieved by the fact that the combination of the lengths of the partition walls separating the ink pressurizing chambers in any of the ink pressurizing chambers is the same combination of the first pressurizing chamber partition which is long and the second pressurizing chamber partition which is shorter than that. Brought. This makes it possible to form an image without printing unevenness.

Further, the effect of preventing crosstalk is high. This effect is brought about by the long first pressurizing chamber partition 28-3 when the driving of the heat generating portion is controlled so as not to perform the simultaneous or continuous driving of the adjacent discharge nozzles. That is, when a voltage is applied to the heat generating portion 24-1 to generate bubbles, the propagation of the pressure wave is caused by the first pressure chamber partition wall 28-.
3 is prevented from affecting the behavior of bubbles in the heat generating unit 24-1 that is driven thereafter. This allows
More even dot printing without unevenness becomes possible.

Next, an effect of preventing foreign substances such as dust from entering the ink pressurizing chamber 29 is exerted. This effect is brought about by the filtering action of the tip of the long first pressure chamber partition wall 28-3. This suppresses the occurrence of clogging of the discharge nozzle, which often occurs.

The present embodiment has a configuration in which an effect of alleviating a decrease in ink refilling due to the provision of the long first partition is also exhibited. This effect is brought about by the short second pressure chamber partition 28-4 that partitions the two ink pressure chambers 29 within the wide first supply port 33. As a result, necessary ink refilling properties are secured, and the occurrence of printing defects such as printing unevenness is prevented.

FIG. 2A is an exploded perspective view of a print head according to the second embodiment, and FIG. 2B is a plan view of a main part thereof. Note that, also in this example, FIGS. 7A and 7B show a monochrome print head having only one row of ejection nozzles for convenience of description, but a full-color print head will also be described below. Is similar.

The print head 35 shown in FIGS. 3A and 3B includes a driver 22, an individual wiring electrode 23, a heating resistor 24, a common electrode 25 formed on the surface of the chip substrate 21, and The arrangement of the top plate 31 and the discharge nozzles 32 formed thereon is the same as that of the print head 20 shown in FIGS. 1 (a) and 1 (b).

In this embodiment, the configuration of the common ink flow path, the ink supply hole, and the configuration of the partition formed outside the common electrode 25 opposite to the driver 22 with the common electrode 25 interposed therebetween are shown in FIG. This is different from the print head 20 of (a) and (b).

That is, the common ink flow path is divided into a predetermined number of a plurality of sub-common flow paths 36, and the ink supply holes 37 communicate with the respective sub-common flow paths 36 and penetrate to the back surface of the chip substrate 21. It is provided.

Then, on these, seal partition walls 38-1 and 3 surrounding the inside along the edge portion of the chip substrate 21.
8-2, a pressure chamber partition 38-3 of the same length extending inward from the seal partition 38-2, and a partition including a flow path partition 38-4 formed to extend inward from the seal partition 38-1. 38 are stacked.

The pressurizing chamber partition 38-3 is provided with the heat generating portion 24.
And the heat generating section 24 together with the seal partition 38-2.
From three sides, and the ink pressurizing chamber 3 of the same shape
9 are formed. The channel partition 38-4 is located between the adjacent sub-common channel 36 and separates the sub-common channel 36 individually. The upper surface of the channel partition 38-4 is located on the top plate 31 above the ink channel. Is joined to.

The print head 35 according to the second embodiment also allows the top plate 31 to hang (fall) first.
Is prevented. This effect is brought about by the flow path partition wall 38-4 which is located between the plurality of sub-common flow paths 36 and which is vertically joined to the top plate 31 and the chip substrate 21. In other words, the top plate on the common ink flow path, which is most likely to fall, is prevented from falling by being supported by the flow path partition wall, and thereby does not hinder the ink refilling property. Stable ejection of ink droplets can be performed.

In the present embodiment, not only the above-described effects but also the following various effects can be obtained. As one of them, there is an effect that the ink refillability is made uniform. This effect is provided by the flow path partition 38-4. That is, the conductance of each ink flow through each of the sub-common flow paths 36 becomes uniform, and there is no large difference such as the difference between the end and the center of the common ink flow path when not divided.

Further, the above-mentioned effect, that is, the effect of achieving high-speed ejection by smoothing ink refill is also achieved. This effect is achieved by the plurality of sub-common flow paths 36 each having the ink supply hole 37. As a result, an efficient ink jet printer that performs high-speed printing can be configured in this case as well.

Further, as a new effect, the effect of preventing cracking of the chip substrate is exhibited. This effect is achieved by dividing the common ink channel into a plurality of sub-common channels 36. Thereby, the yield at the time of collecting the head chips from the silicon wafer is improved.

FIGS. 3A and 3B are views showing a modification of the print head 35 in the second embodiment.
(a) is an exploded perspective view, and (b) is a plan view of a main part. As shown in FIGS.
5 'is partially different from the print head 35 of FIG. 2 only in the configuration of the partition. That is, the partition wall 38 'of the print head 35' includes the supply partition wall 38 in addition to the seal partition walls 38-1 and 38-2, the pressurizing chamber partition 38-3, and the flow path partition 38-4. -5.

The supply path partition 38-5 is provided with a flow path partition 38-4.
And a pressurizing chamber partition 38-3 whose front end is opposed to the flow path partition 38-4, and the upper surface is joined to the top plate. Thereby, the ink supply path 41 to the plurality of ink pressurization chambers 39 corresponding to the sub common flow path 36 and the ink supply path 41 to the plurality of ink pressurization chambers 39 corresponding to the adjacent sub common flow path 36 are formed. It is partitioned and blocked.

As described above, since the ink supply path 41 is blocked and the number of partitions supporting the top plate 31 increases,
Among the various effects described above, other than the effect of preventing cracking of the chip substrate, the effect of preventing dripping (falling) of the top plate 31, the effect of uniform ink refilling, and the effect of ink refilling The effect of high-speed ejection can be further enhanced by smoothing.

FIG. 4A is an exploded perspective view showing another modified example of the print head 35 in the second embodiment, and FIG. 4B is a plan view of a main part thereof. FIG.
As shown in FIG. 2B, the print head 35 ″ differs from the print head 35 of FIG.

As shown in FIGS. 4 (a) and 4 (b), this print head 35 ″ is composed of a chip substrate 21, a plurality of drivers 22 of a drive circuit on this surface, individual wiring electrodes 23, and a heating resistor 2.
4, the configuration of the common electrode 25, the sub-common flow path 36, and the ink supply hole 37 is the same as that of the print head 35.
Is the same as Further, in the configuration of the partition 38 ″ formed between the chip substrate 21 and the top plate 31, the seal partition 38
The configuration of the print head 35 is the same as that of the print head 35.

The structure of the pressurizing chamber partition of the ink pressurizing chamber 39 opening to the ink supply path 41 is different. That is,
In the adjacent ink pressurizing chamber 39, as in the case of the print head 20 of FIGS. 1A and 1B, one side of the ink pressurizing chamber 39 as shown in FIGS. Is the long first pressure chamber partition 3
8-6 are formed, and on the other side, a shorter second pressure chamber partition 38-7 is formed. The first pressure chamber partition wall 38-6 corresponding to the boundary of the sub-common flow channel 36 is connected to the channel partition wall 38-4.

In other words, the print head 3 of the present embodiment
5 "is a print head 3 of the modified example shown in FIGS. 3 (a) and 3 (b).
At 5 ', the configuration of the pressurizing chamber partitions in the individually partitioned ink supply passages 41 is changed such that the first pressurizing chamber partitions 38-6, which are longer, and the second pressurizing chamber partitions 38-7, which are shorter than this, alternate. This has the same configuration as the formed print head 20 of the first embodiment.

With this configuration, according to the print head 35 ″, the above-described effect of preventing the top plate 31 from sagging (falling) and the effect of uniformizing the ink refilling property can be obtained. The effect of high-speed ejection by smoothing the ink refill is further enhanced, and in addition to the effect of preventing the chip substrate from being cracked, the print head 20 shown in FIGS. Ink pressurizing chamber 2 with a unique effect of preventing crosstalk
Also, an effect of preventing foreign substances such as dust from entering the inside 9 is exerted.

In the first embodiment, the long pressurizing chamber partition extends to the common ink flow path, but may not extend to the common ink flow path, but may be longer than the short partition. . This can also suppress the influence (crosstalk) of the pressure wave at the time of ink ejection.

Further, all the pressure chamber partition walls may be formed to be long without any length and arranged so as to reach the common ink flow path. By doing so, it is possible to more reliably prevent crosstalk and to prevent the occurrence of a singular point that may occur in the flow of ink to the ink pressurizing chamber.

Further, in the second embodiment, three or more sub-common flow paths are formed. However, only two sub-common flow paths may be formed to divide the common ink flow path into two from the center.
This also makes it possible to eliminate variations in ink refillability between both ends and the center of the common ink flow path.

[0052]

As described above in detail, according to the present invention, the partition walls between the individual ink pressure chambers are divided into a long first partition wall and a shorter second partition wall. And the first pressurizing chamber partition and the second pressurizing chamber partition are alternately arranged, so that the long first pressurizing chamber partition suppresses the drop of the top plate and the long first pressurizing chamber partition. Clogging of dust in the ink pressurizing chamber can be prevented by the filter effect of the pressurizing chamber partition.

Further, since each ink pressurizing chamber is divided on both sides by the same combination of the first pressurizing chamber partition which is longer and the second pressurizing chamber partition which is shorter than the first pressurizing chamber partition, the ink pressurizing chamber is uniform for all ink pressurizing chambers. In addition, the ink can be refilled to obtain a print without unevenness, and the short second pressure chamber partition wall can maintain smooth refilling property to perform high-speed printing by high-speed ink ejection, and can also perform adjacent ejection. The crosstalk can be effectively prevented by the long first pressure chamber partition wall only by not simultaneously or continuously driving the nozzles.

Further, according to the present invention, the common ink flow path is divided into a plurality of sub-common flow paths, and a partition is provided between adjacent sub-common flow paths, and the partition is joined to the top plate. The top plate on the common ink flow path can be supported by the partition wall between the sub-common flow paths, thereby preventing the top plate from falling on the common ink flow path and ensuring uniform and stable ink droplets for all ejection nozzles. Can be discharged.

Further, since the common ink flow path is divided into a plurality of sub-common flow paths, the flow of ink to be refilled into the ink pressurizing chamber is stabilized, so that more uniform and stable ink droplet ejection can be performed. At the same time, cracking of the substrate due to the common ink flow path can be prevented, and the manufacturing yield can be significantly improved.

[Brief description of the drawings]

FIG. 1A is an exploded perspective view of an ink jet printer head (print head) according to a first embodiment, and FIG. 1B is a plan view of a main part thereof.

FIG. 2A is an exploded perspective view of a print head according to a second embodiment, and FIG. 2B is a plan view of a main part thereof.

FIG. 3A is an exploded perspective view showing a modification of the print head according to the second embodiment, and FIG. 3B is a plan view of a main part thereof.

FIG. 4A is an exploded perspective view showing another modification of the print head according to the second embodiment, and FIG. 4B is a plan view of a main part thereof.

5A is a diagram schematically showing a monochrome print head mounted on a conventional inkjet printer, and FIG.
FIG. 3C shows a print head for full-color printing, and FIG.
A 'sectional view or (b) BB' sectional view, (d)
FIG. 3 is a view showing a silicon wafer on which the print head of (a) or (b) is manufactured.

FIG. 6 is an exploded perspective view for better understanding the inside of a conventional print head.

FIG. 7 is a diagram showing a problem that occurs in the configuration of a conventional print head.

[Explanation of symbols]

 Reference Signs List 1 (1-1, 1-2) Print head 2 Chip substrate 3 Top plate 4 Discharge nozzle 5 Nozzle array 6 Common power supply terminal 7 Drive circuit terminal 8 Chip substrate 9 Silicon wafer 11 Drive circuit 12 Heating resistor 12-1 Heating section DESCRIPTION OF SYMBOLS 13 Individual wiring electrode 14 Common electrode 15 Common ink channel 16 Ink supply hole 17 Partition 17-1 and 17-2 Seal partition 17-3 Pressure chamber partition 18 Ink pressure chamber 19 Ink supply path 20 Print head 21 Chip substrate 22 Driver 23 Individual wiring electrode 24 Heat generating part 25 Common electrode 26 Common ink flow path 27 Ink supply hole 28 Partition 28-1 and 28-2 Seal partition 28-3 First pressurizing chamber partition 28-4 Second pressurizing chamber partition 29 Ink pressurizing chamber 31 Top plate 32 Discharge nozzle 35, 35 ', 35 "Print head 36 Sub-common channel 37 Ink supply hole 38, 3 ', 38 "partition 38-1, 38-2 seal partition 38-3 pressurized chamber partition 38-4 flow path partition 38-5 supply path partition 38-6 first pressurized chamber partition 38-7 second pressurized chamber Partition wall 39 Ink pressurizing chamber 41 Ink supply path

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Ichino Ai 3-10-6 Imai, Ome-shi, Tokyo Casio Computer Co., Ltd. Ome Office (72) Inventor Hideki Kamata 3-6-1-6 Imai, Ome-shi, Tokyo No. Casio Computer Co., Ltd. Ome Office F-term (reference) 2C057 AF06 AF40 AF72 AF93 AG12 AG31 AG75 AG77 AG92 AG93 AG99 BA04 BA13

Claims (4)

[Claims] An energy generating element for generating pressure energy for discharging ink; and a plurality of energy generating elements provided corresponding to the energy generating element for guiding the ink having received the pressure energy in a predetermined direction to discharge the ink. A plurality of ink pressurizing chambers, each of which is defined by a partition wall, in which the energy generating elements are individually arranged, and which are arranged in parallel along a predetermined direction, and extended along the direction in which the pressurizing chambers are arranged. And a common ink flow path for temporarily storing ink before distributing and supplying the ink supplied from the ink storage means to each of the ink pressurizing chambers. The pressurizing chamber partition separating the ink pressurizing chambers includes a long first pressurizing chamber partition and a shorter second pressurizing chamber partition, and the first pressurizing chamber partition and the second pressurizing chamber partition. Ink jet printer head, wherein the partition wall are alternately arranged. 2. An energy generating element for generating pressure energy for discharging ink, and a plurality of energy generating elements provided corresponding to the energy generating element for guiding the ink having received the pressure energy in a predetermined direction to discharge the ink. A plurality of ink pressurizing chambers, each of which is defined by a pressurizing chamber partition wall and in which the energy generating elements are respectively arranged and arranged in parallel along a predetermined direction; A common ink flow path formed so as to extend and extend, and temporarily store the ink before distributing and supplying the ink supplied from the ink storing means to each of the ink pressurizing chambers. The common ink flow path is divided into a plurality of sub-common flow paths, and a flow path partition wall joined to a top plate of the ink flow path is provided between adjacent sub-common flow paths. Inkjet printer head, characterized in that. 3. The sub-common path adjacent to an ink supply path to a plurality of the ink pressurizing chambers corresponding to the sub-common flow path, wherein the flow path partition wall is provided at the pressure chamber partition wall facing the flow path partition wall. 3. The ink jet printer head according to claim 2, wherein the ink jet printer head is connected via a supply path partition that partitions an ink supply path to the plurality of ink pressurizing chambers corresponding to the flow path. 4. A pressure chamber partition partitioning the ink pressure chamber from a long first pressure chamber partition and a second pressure chamber partition shorter than the first pressure chamber partition. 3. The ink jet printer head according to claim 2, wherein the two pressure chamber partition walls are alternately arranged.