JP2001190057A - Magnet unit, electromagnetic actuator and linear motor using it, stage device and aligner using them, and method for fixing magnet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic unit which is constituted to present the cracking of an adhesive on the joint surface between a yoke and a magnet with a simple structure when an electromagnetic actuator vibrates and an electromagnetic actuator using the unit. SOLUTION: A magnet unit 100A is composed of a yoke 120 and a magnet 140 one surface 141 of which is bonded to the main surface 121 of the yoke 120 with an adhesive 130. At the end section 131 of the adhesive 130 on the joint surface between the magnet 140 and yoke 120, a thin aluminum film (reinforcing section) 150 which connects the upper end face 122 of the yoke 120 to the upper end face 142 of the magnet 140 is formed so as to cover the end section 131. Even wheel Such a state occurs that shear stresses concentrate to the end section 131 of the adhesive 130 and cracks apt to occur in the section 131 due to the vibration of the unit 100A, the thin aluminum film 150 prevents the relative distance between the magnet 140 and yoke 120 from becoming longer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnet unit, an electromagnetic actuator and a linear motor using the same, and a stage apparatus and an exposure apparatus using the same.

[0002]

2. Description of the Related Art An electromagnetic actuator such as a linear motor and a voice coil motor includes a magnet unit in which a plurality of magnets are arranged and a coil unit in which one or more coils are arranged. Then, when a current is supplied to the coil unit, a force generated between the coil and the magnet according to Fleming's law is output as the driving force.

For example, in a linear motor 10, as shown in FIG. 20, yokes 12, 12 are fixed to a base 11 so as to face each other. Are arranged, and two magnet units 10A, 10A,
10A is configured. A coil unit (only the coil 19 is shown in the figure) is movably arranged between the yokes 12. Here, the yokes 12, 12 are made of a ferromagnetic material (for example, a silicon steel plate).

[0004] Each of the coil units 10A, 10A
Are fixed to the yokes 12, 12 by an attractive force acting between them and an adhesive 13.

[0005]

However, the magnet 1
In the linear motor 10 in which the magnets 14,.
Are known to drop off from the main surfaces of the yokes 12, 12.

Thus, the magnets 14,...
If it falls off from 2, the relative movement of the coil unit and the magnet unit becomes impossible, the linear motor 10 becomes inoperable, and the normal operation of the electromagnetic actuator for a long period is not ensured. The present invention has been made in view of such circumstances, and a first object of the present invention is to provide a simple and lightweight structure so that a magnet does not fall out of a yoke due to deterioration over time even after long-term use. To provide a magnet unit and an electromagnetic actuator using the same.

A second object of the present invention is to provide a stage apparatus and an exposure apparatus having a magnet unit as a driving means in a simple and lightweight structure having a structure in which the yoke does not fall off the magnet due to deterioration over time. It is an object of the present invention to extend the service life of the battery without causing weight increase as a whole.

[0008]

Means for Solving the Problems The inventor has analyzed the cause of a magnet falling off a yoke due to deterioration over time in an electromagnetic actuator such as a linear motor after being used for a long time.

Here, a description will be given of the cause of the magnets 14,... Falling off in the linear motor (electromagnetic actuator) 10 having the shape shown in FIG. In the linear motor 10, when driven (when a current is applied to the coil 19), vibration occurs, and when the ends of the magnet units 10A, 10A approach each other, the magnets 14, 14 facing each other attract the magnet units 10A, 10A. 21, the yokes 12, 12 may be inclined with respect to the base 11, as shown in FIG.

The yokes 12, 12 are connected to opposing magnets 14,
It is known that if the magnet 14 is tilted by the attraction force, the adhesive 13 fixing the magnets 14 to the main surfaces of the yokes 12 (especially, a portion surrounded by a wavy line A in FIG. 21) is likely to crack. ing. This is, as shown in FIG.
When the yoke 12, 12 is tilted, the outer yokes 12, 12,
, And the magnets 14, 14,..
22. This is because a shear stress F is generated in the adhesive 13 on the bonding surface with... As shown in FIG.

When the shear stress F occurs, the yoke 12,
The stress concentrates on the end 13A of the adhesive 13 on the joint surface between the magnet 12 and the magnets 14, 14,... As shown in FIG.
Cracks form. Then, when a shear stress F is generated between the magnets 14 and 14 due to the vibration of the yokes 12 and 12, the cracks evolve downward in the drawing over time, and the magnets 14 and Peel from 12 and 12.

Also, in the linear motor (electromagnetic actuator) 20 having a rectangular cross section shown in FIG. 23, the yokes 22 and 22 and the magnets 24 and 24
Shear stress concentrates on the adhesive 23 on the joint surface of the above, and cracks occur in the adhesive 23, which may cause the same problem as described above. By the way, dropping of the magnets 14, 14,... Due to the deterioration of the linear motor 10 over time does not occur in the linear motors 30, 40 of the types shown in FIGS.

That is, the magnet unit 30A (FIGS. 24 and 25) in which the upper and lower ends of the magnet 34 are fixed to the yokes 32, 32 by key-shaped holders 35, 36, and the right and left ends of the magnet 44 are key-shaped holders. In the electromagnetic actuators such as the linear motors 30 and 40 using the magnet units 40A (FIGS. 26 and 27) fixed to the yokes 42 and 42 at 45, the yokes 32, 32, 42, and 4 are vibrated during operation.
2 is bent, the ends (upper and lower ends / left and right ends) of the magnets 34, 34, 44, 44 are held by the holders 35, 36, 45 with the yoke 3.
2, 32, 42, 42, the adhesive (not shown) on the joint surface does not crack.

However, as shown in FIGS. 24 to 27, when the magnets 34, 44 are fixed to the yokes 32, 42 by the holders 35, 36, 45, the holder 35 is attached to the magnets 34, 44. , 36, and 45 according to the thickness of the grooves 38, 48
Must be provided. This is because the coil units (only coils 39 and 49 are shown) are magnet units 30A and 3A.
This is to prevent the coil unit and the holders 35, 36, and 45 from coming into contact with each other when moving between 0A, 40A, and 40A.

As described above, the key-shaped holders 35, 36, 4
5, the yokes 32, 42 and the magnets 34, 4
There is no crack at the end of the adhesive at the joint surface with the 4, but grooves 38, 48 must be formed at the upper and lower ends of the magnets 34, 44, or at both left and right ends, making the processing difficult. Therefore, there is a problem that the manufacturing cost is increased. or,
The key-shaped holders 35, 36, 45 originally have the magnet 3
4, 34, 44, 44 are connected to yokes 32, 32, 42, 42
In order to be fixed, a certain degree of strength (thickness) is required, and a stainless steel material is usually used.

Accordingly, the weight of the magnet units 30A, 30A, 40A, and 40A is increased by the provision of the holders 35, 36, and 45, and the weight of the electromagnetic actuator using the magnet units is increased. Motor constant decreases. Further, even in a stage apparatus or an exposure apparatus using this electromagnetic actuator as a driving unit, the weight of the driving unit is increased, and power consumption is increased.

The inventions of claims 1 to 12 are made by paying attention to the analysis results of the cause of the magnet falling off from the yoke with time, and have a simple structure to prevent the magnet from falling off. To extend its useful life.
Specifically, the invention according to claim 1 is a magnet unit including a yoke and a magnet having one surface adhered to the main surface of the yoke by an adhesive, wherein a joining surface of the magnet and the yoke by the adhesive is provided. Is formed with a reinforcing portion for connecting the magnet and the yoke so as to cover the end of the adhesive. Thereby, when vibrations are transmitted to the magnet unit, even if the shear stress is concentrated on the end of the joint surface and a crack may be generated, the gap between the magnet and the yoke is opened more than a predetermined distance by the reinforcing portion. Absent. Further, since the magnet and the end of the yoke do not separate from each other by more than a certain amount, the attraction force of the magnet also acts so that the magnet and the yoke attract each other.

According to a second aspect of the present invention, in the magnet unit according to the first aspect, the reinforcing portion is made of a non-magnetic thin plate. That is, the reinforcing portion does not fix the magnet, but reinforces the joint surface so that the magnet and the yoke do not separate from each other when vibration is applied to the magnet unit, and connects the two. The function of the reinforcing portion can be sufficiently exhibited by a thin plate. At this time, the weight of the reinforcing portion can be reduced. Further, since the reinforcing portion is made of a non-magnetic material, the reinforcing portion does not affect the magnetic flux of the magnet.

According to a third aspect of the present invention, in the magnet unit according to the first or second aspect, the reinforcing portion is formed of one of
A sheet of non-magnetic material, which is attached to an end face of the magnet perpendicular to the joining face and an end face of a yoke perpendicular to the joining face and parallel to the magnet end face. . Thereby, with a simple and lightweight structure, both can be connected so that the gap between the magnet and the yoke of the magnet unit at the end of the joint surface does not open beyond a certain distance. At this time, since the magnet and the end of the yoke do not separate from each other by a certain amount or more, the attractive force of the magnet also acts so that the magnet and the yoke attract each other.

According to a fourth aspect of the present invention, in the magnet unit according to the first or second aspect, the reinforcing portion is formed such that a cross section L of one non-magnetic material having two surfaces orthogonal to each other is provided.
A plate having a L-shaped cross section, one surface of the plate having an L-shaped cross section is attached to an end surface of the magnet perpendicular to the joining surface, and the other surface is
It is attached to the main surface of the yoke. This allows
With a simple and lightweight structure, make sure that the gap between the magnet and yoke of the magnet unit at the end of the joint surface does not open beyond a certain
Both can be connected.

According to a fifth aspect of the present invention, in the electromagnetic actuator, two magnet units according to the third or fourth aspect are attached to the base so as to face each other, and the yokes of the magnet units facing each other. A plurality of magnets are arranged in a row in a row on the main surface, and a coil is movably arranged between the main surfaces of the two opposing yokes. As a result, even if vibrations occur in the magnet unit, the distance between the magnet and the yoke at the end of the adhesive at the joint surface between the magnet and the yoke does not exceed a certain distance, so that a crack is generated between them. In addition, since the magnet and the end of the yoke do not separate from each other by more than a certain amount, the attraction force of the magnet also acts to attract the magnet and the yoke.

According to a sixth aspect of the present invention, in the electromagnetic actuator according to the fifth aspect, the reinforcing portion includes a side surface perpendicular to the joint surface of the magnet and parallel to a direction in which the magnets are arranged. Of the magnet or an end face parallel to the side face of the magnet. Accordingly, even when the magnet unit is bent in a direction perpendicular to the magnet arrangement direction when the electromagnetic actuator is operated, the distance between the magnet and the yoke is equal to or more than a predetermined value at the end of the adhesive at the joint surface between the magnet and the yoke. There is no separation and no cracks occur during this time. In addition, since the magnet is not separated by more than a certain amount, the attractive force of the magnet also acts so that the magnet and the yoke attract each other.

According to a seventh aspect of the present invention, in the electromagnetic actuator according to the fifth aspect, the reinforcing portion connects a side surface perpendicular to the arrangement direction of the magnets and the main surface of the yoke. is there. Accordingly, even when the magnet unit is bent in a direction perpendicular to the magnet arrangement direction when the electromagnetic actuator is operated, the distance between the magnet and the yoke is equal to or more than a predetermined value at the end of the adhesive at the joint surface between the magnet and the yoke. There is no separation and no cracks occur during this time. In addition, since the magnet is not separated by more than a certain amount, the attractive force of the magnet also acts so that the magnet and the yoke attract each other.

According to an eighth aspect of the present invention, in the linear motor, the stator and the mover are constituted by the electromagnetic actuator according to the sixth or seventh aspect. Even in the case of this linear motor, even if the magnet unit vibrates frequently during operation, the adhesive at the joint surface between the magnet and the yoke does not crack, and its service life is extended. In addition, the reinforcing portion formed to extend the service life can be light in weight.

According to a ninth aspect of the present invention, in the stage device, the linear motor according to the eighth aspect is used as driving means. As a result, even if the magnet unit frequently vibrates during operation, the adhesive at the joint surface between the magnet and the yoke does not crack, and its service life is extended.

According to a tenth aspect of the present invention, there is provided an exposure apparatus for forming a predetermined pattern on a substrate by using illumination light for exposure, an illumination system for emitting the illumination light, and an illumination system for emitting the illumination light on a path of the illumination light. A stage device according to claim 9 on which an object to be arranged is mounted. As a result, even if the magnet unit frequently vibrates during operation, the adhesive at the joint surface between the magnet and the yoke does not crack, and its service life is extended.

According to an eleventh aspect of the present invention, there is provided a semiconductor device having a predetermined pattern formed by the exposure apparatus according to the tenth aspect. The driving means of the reticle stage of these exposure apparatuses uses a reticle stage that can have a long service life while maintaining high drive control accuracy because the reinforcing portion for extending the service life is lightweight. A semiconductor device having a highly accurate fine pattern is provided.

According to a twelfth aspect of the present invention, in the fixing method for fixing a magnet to an object to be fixed, a step of bonding the magnet and the object to be fixed with an adhesive, and at least one of end portions of the adhesive. And a step of forming a protection portion in a region including the magnet and the fixed object adjacent to the portion. By the protection part, the magnet and the object to be fixed are locally and firmly adhered to at least a part of the end of the adhesive. Accordingly, by merely locally reinforcing the joint between the magnet and the fixing object, which is likely to deteriorate with time, by the protective portion, the overall adhesive strength between the magnet and the fixing object is dramatically increased.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS. The magnet unit 10 according to the first embodiment
0A is a yoke (fixed object) 120 vertically attached to the base 110, as shown in FIG.
Adhesive 130 is applied to one side 14 of main surface 121 of
140, a thin aluminum plate (reinforcement portion, protection portion) 150 connecting the upper end surface 122 of the yoke 120 and the upper end surface 142 of the magnet 140, and the yoke 1
An aluminum thin plate (reinforcing portion) 160 having an L-shaped cross section connecting the main surface 121 of the magnet 20 and the lower end surface 143 of the magnet 140 is formed.

Here, the main surface 121 of the yoke 120 and the one surface 141 of the magnet 140 are attracted to each other by the attractive force of the magnet 140, and both are fixed by the adhesive 130. As shown in FIGS. 1 and 2, an aluminum thin plate (a flat plate) 150 connects the yoke 120 and the magnet 140, and the upper end 1 of the adhesive 130.
It is attached so as to cover 31. Accordingly, even when the yoke 120 is bent around the connection portion 123 with the base 110 due to vibration generated when an electromagnetic actuator (for example, a linear motor or a voice coil motor) using the magnet unit 100A is driven, the yoke 12
0 and the magnet 140 (particularly the upper end 13)
No cracks are created in 1).

An aluminum sheet 160 having an L-shaped cross section is attached so as to connect the main surface 121 of the yoke 120 and the lower end surface 143 of the magnet 140 and to cover the lower end 132 of the adhesive 130 from below. I have. The aluminum sheet 160 having an L-shaped cross section is bonded to the lower end surface 143 of the magnet 140 with an adhesive 182. Also, an L-shaped cross section aluminum thin plate 1
60 has a plurality of mounting screws 165 for the yoke 120 because the main surface 121 and the lower end surface 143 are substantially orthogonal to each other.
It is to be fixed securely. That is, the cross section L
The L-shaped aluminum thin plate 160 is fixed to the main surface 121 of the yoke 120 by a plurality of mounting screws 165, and the fixed cross-section L-shaped aluminum thin plate 160 and the lower end surface 143 of the magnet 140 are adhered by an adhesive 182. You. In this case, since the magnet 140 is brittle against local processing, the fixing by the mounting screw 165 is not performed between the aluminum thin plate 160 having an L-shaped cross section and the magnet 140.

Even when the yoke 120 is bent around the connection portion 123 with the base 110 due to the vibration generated when the electromagnetic actuator is driven, the thin aluminum plate 160 having an L-shaped cross section allows the yoke 120 and the magnet 140 to be bent. Of the adhesive 130 (particularly, the upper end 132) is not cracked. Here, an aluminum thin plate (flat plate) 150 and an L-shaped cross section L-shaped aluminum thin plate 160 are used as the reinforcing portion.
This is because it is sufficient that the yoke 120 and the magnet 140 in the vicinity are not separated by more than a certain amount so that cracks do not occur in the end portions 131 and 132 of the adhesive 130 at the joint surface between the magnet 20 and the magnet 140. .

That is, if the magnet 140 is to be fixed to the yoke 120, the holder must be made of stainless steel or the like. However, the reinforcing portion of this embodiment is lightweight and has a certain strength (yoke strength). The upper end surface 142 and the lower end surface 143 of the magnet 140 do not separate from the main surface 121 of the yoke 120 by a certain amount or more during the vibration of the magnet 120 so that the end portions 131 and 132 of the adhesive 130 do not crack. Is the minimum strength required for this purpose, and here, an aluminum thin plate is used. Aluminum is
Since the magnet unit 100A is a non-magnetic material and has a small weight, it is possible to reduce the weight of the entire magnet unit 100A, and further reduce the weight of an electromagnetic actuator using the same. Instead of aluminum, a thin plate of resin such as plastic may be used. If the required strength is satisfied, a metal film or a resin film obtained by depositing a metal such as aluminum on a resin film may be used as the reinforcing portion instead of the plate-like member.

FIG. 3 shows the magnet units 100A and 10A.
FIG. 2 is a perspective view showing an arrangement of a yoke 120 and a plurality of magnets 140 when a 0A (only one is shown) is applied to a linear motor (electromagnetic actuator) 100. In the figure, 19
0 indicates a coil in the coil unit. Also, FIG.
4A is a plan view of the linear motor 100, and FIG. 4B is a side view.

As shown in these figures, the upper end face 122 of the yoke 120 and the upper end face 142 of the magnet 140 are made of a thin aluminum plate (flat plate) 150, and the main face 121 of the yoke 120 and the lower end face 143 of the magnet 140 are formed in a section L. -Shaped aluminum sheet 1
Even in the case where the connection is made at 60, the coil unit (only the coil 190 is shown in the figure) is an aluminum thin plate (flat plate) 15.
0, it does not come into contact with the aluminum sheet 160 having an L-shaped cross section, and does not hinder the smooth movement of the coil unit.
That is, since the aluminum thin plate (flat plate) 150 and the L-shaped aluminum thin plate 160 are bonded to each other on the magnet 140 by the adhesives 181 and 182, a key-type holder is used (FIGS. 24 to 24). (See the prior art shown in FIG. 27)
It is not necessary to provide a groove on the magnet 140 side as in the above.

Further, since the aluminum thin plate (flat plate) 150 and the aluminum thin plate 160 having an L-shaped cross section are light in weight, the mover or the stator of the linear motor 100 is lighter than when a stainless steel material is used. Also, the motor constant is improved. As described above, in the magnet unit 100A of the first embodiment, the magnet 140 is fixed to the main surface 121 of the yoke 120 by the attraction force and the adhesive 130. Then, the upper end surface 142 of the magnet 140 and the upper end surface 122 of the yoke 120 are formed by an aluminum thin plate (flat plate) 150 and a lower end surface so that cracks do not occur in the ends 131 and 132 of the adhesive 130 when the magnet unit 100A vibrates. 143 and the main surface 121 of the yoke 120 are connected by an aluminum thin plate 160 having an L-shaped cross section. Therefore, the end 13 of the adhesive 130
1,132 does not have an initial crack which causes peeling.

At this time, since the magnet 140 and the end of the yoke 120 do not separate from each other by more than a certain distance, the attracting force of the magnet 140 always acts so that the magnet 140 and the yoke 120 attract each other. Here, first and second modified examples of the first embodiment will be described with reference to FIGS.

Magnet unit 100 of first and second modified examples
B and 100C use the lower end surface 143 of the magnet 140 and the yoke 120 without using the aluminum thin plate 160 having an L-shaped cross section.
Is connected to the main surface 121 by an existing member.

Specifically, in the magnet unit 100B of the first modified example, the lower end surface 143 of the magnet 140 is bonded to the shelf 125 formed on the yoke 120 with an adhesive (not shown). Also, the magnet unit 1 of the second modified example
At 00C, the lower end surface 143 of the magnet 140 is
0 is adhered to the holding portion 115 formed with an adhesive (not shown).

In any case, the yoke 120 and the magnet 14
0 is connected to the yoke 120 and the magnet 140 so as to substantially cover the end 131 or 131 of the adhesive 130 between the yoke 120 and the magnet 140 by the shelf 125 and the holding portion 145. When an electromagnetic actuator (such as the linear motor 100) using the magnet units 100B and 100C operates, the yoke 120 bends with respect to the base 110, and the yoke 120
Even if a shear stress is generated at the joint surface between the magnet 140 and the upper end surface 122 of the yoke 120 and the upper end surface 14 of the magnet 140.
2 is no longer separated from the main surface 12 of the yoke 120.
1 on the joining surface between the first surface 141 and one surface 141 of the magnet 140
There is no crack at the end of 30.

(Second Embodiment) Next, a second embodiment of the present invention will be described.
The embodiment will be described with reference to FIGS. In the second embodiment, the magnet 240 of the voice coil motor (electromagnetic actuator) 200 and the yoke 2
A reinforcing portion (a thin aluminum plate 250, 260) is provided so as to cover the end portions 231, 232 of the adhesive 230 that adheres to the adhesive 20.

As shown in FIGS. 7 and 8, the voice coil motor 200 has yokes 220, 220 whose magnet units 200A are opposed to each other, and a base 210, which fixes the yokes 220, 220. 210
And the main surfaces 221 and 22 of the yokes 220 and 220
1 are bonded to one surface 241 of the magnets 240 by an adhesive 230, the upper end surfaces 222, 222 of the yokes 220, 220 and the upper end surfaces 242 of the magnets 240,.
… And aluminum thin plates (reinforcing parts) 250, ..., 26
0,... The coil 290 is movably disposed at the center of the magnet unit 200A.

Again, the main surfaces 2 of the yokes 220, 220
Are fixed to each other by the attraction of the magnets 140 and the adhesive 230. In the magnet unit 200A of the voice coil motor 200, vibration occurs at the time of its operation, and even when the yokes 220, 220 are bent around the connection with the bases 210, 210, the aluminum thin plate (reinforcing portion) 250,
, 260,...
231 of the adhesive 230 between the magnets 240,.
232 does not crack.

Also, aluminum thin plates (reinforcing portions) 250,.
60, ..., as shown in FIGS.
No contact with 60. As described above, the voice coil motor 200 according to the second embodiment has the magnets 240, 220 attached to the main surfaces 221, 221 of the yokes 220, 220.
Are fixed by the suction force and the adhesive 230.
When the magnet unit 200A vibrates, the adhesive 230
End surface 2 of the magnet 240 near the end portions 231 and 232
42, lower end 243 and upper end 22 of yoke 120
2. The lower end face 223 is made of an aluminum thin plate (flat plate) 250,.
260,..., Respectively, the initial cracks that cause peeling do not occur at the ends 231 and 232 of the adhesive 230.

(Third Embodiment) Next, a third embodiment of the present invention will be described.
The embodiment will be described with reference to FIG. 10 and FIG. The magnet unit 300A according to the third embodiment
Is the upper end surface 342 of the magnet 340, as shown in FIG.
The yoke 3 is formed by an aluminum sheet 350 having an L-shaped cross section.
20 is connected to the main surface 321 of the first embodiment.
It is different from the magnet unit 100A of the embodiment.

Again, the main surface 321 of the yoke 320
The one surface 341 of the magnet 340 is attracted to each other by the attraction force of the magnet 340, and both are fixed by the adhesive 330. When the yoke 320 is bent around the connection portion 323 with the base 310 when vibration occurs when the electromagnetic actuator using the magnet unit 300A is operated, the yoke 320 and the magnet 340 are connected. Sectional L-shaped aluminum sheet 35
0, 360, these yokes 320 and magnets 340
The end portions 331 and 332 of the adhesive 330 are not cracked.

As described above, by using the light-weight, nonmagnetic L-shaped aluminum thin plates 350 and 360 of the cross section, the entire magnet unit 300A is reduced in weight, and the electromagnetic actuator (linear motor 300) using the same is reduced in weight. Can be achieved. FIG. 11A shows the magnet unit 3.
Linear motor (electromagnetic actuator) using 00A 3
11 is a plan view showing an arrangement of the yoke 320 of FIG. 00 and a plurality of magnets 340, and FIG. 11B is a side view thereof. Incidentally, reference numeral 390 in the drawing denotes a coil in the coil unit. In the linear motor 300, the coil unit (the coil 39 in the figure)
0 is shown) is an aluminum thin plate 350, 360 having an L-shaped cross section.
And does not hinder its smooth movement.

Also, aluminum thin plates 350 and 360 having an L-shaped cross section are used.
Is light, the weight of the entire linear motor 300 does not increase extremely. The other configuration, operation, effects, and the like of the third embodiment are the same as those of the first embodiment, and a detailed description thereof will be omitted. (Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIGS.

The magnet unit 400A of the linear motor (electromagnetic actuator) 400 of the fourth embodiment is
As shown in FIG. 12, yokes 420, 420 (only one is shown) vertically attached to base 410, and adhesives 430 are attached to main surfaces 421, 421 of yokes 420, 420.
A plurality of magnets 4 whose one surface 441,.
, And U-shaped cross-section aluminum thin plates (reinforcing portions) 450 fitted in gaps 401 formed between the side end surfaces 443 of the magnet 440. A coil unit (only the coil 490 is shown) is movably arranged between the yokes 420, 420 of the magnet unit 400A.

Here, the main surfaces 42 of the yokes 420, 420
, 421 and one surface 441 of the magnets 440,.
Are attracted to each other by the attractive force of the magnets 440..., And both are fixed by an adhesive 430. A linear motor (electromagnetic actuator) 4 in which the magnet unit 400A is disposed on the stator side
00 causes vibration, and the yokes 420, 420
Are bent so as not to crack the adhesive 430 between the yokes 420, 420 and the magnets 440,.
420 and the magnets 440 are connected by a thin aluminum plate (reinforcing portion) 450, U-shaped cross section.

In this case, the U-shaped cross-section aluminum thin plates (reinforcing parts) 450,... Surround the upper end and the lower end (surrounded by wavy lines A, B in the figure) of the magnets 440,.
If it is fixed to the side of 20, 420, its function is sufficiently exhibited. In addition, the cross section U-shaped aluminum thin plate (reinforcement part) 450, ...
Are fixed to the gaps 401,..., And the side end surfaces 443 of the magnets 440 are adhered to each other with an adhesive (not shown). 451 of die-shaped aluminum thin plate (reinforcement part) 450, ...
And the main surfaces 421, 421 of the yokes 420, 420 are adhered with an adhesive (not shown).

In this way, the gaps 401,... Formed between the magnets 440,.
Even if 0,... Are fitted, as shown in FIG. 13, the coil unit (only the coil 490 is shown in the figure)
It does not come into contact with the letter-shaped aluminum thin plates (reinforcing parts) 450,... And does not prevent its smooth movement. Further, since the aluminum thin plate (flat plate) 450 and the aluminum thin plate 460 having an L-shaped cross section are lightweight, the weight of the entire linear motor 400 does not significantly increase.

A thin U-shaped aluminum plate (reinforcement) 45
In fixing the “0” to the gap 401, as shown in FIG. 14, a screw hole 451 a is provided in the base 451 of the U-shaped cross-section aluminum thin plate (reinforcing portion) 450, and the mounting screw 45 is provided.
It may be screwed securely at 5,. In addition, as shown in FIG. 15, instead of the aluminum thin plates (reinforcement portions) 450,... Having a U-shaped cross section, square columnar members 470 may be fitted into the gaps 401,.

The other structure, operation, effects, and the like of the fourth embodiment are the same as those of the first embodiment, and a detailed description thereof will be omitted. (Fifth Embodiment) Next, a fifth embodiment of the present invention will be described with reference to FIG. The sixth embodiment is directed to a stage device 600 used for manufacturing a semiconductor.
As the driving means, the linear motors 100, 300, and 400 of the above-described first, third, and fourth embodiments are used.

Hereinafter, a case where the linear motor 100 (FIGS. 3 and 4) shown in the first embodiment is incorporated in the stage device 600 will be described as an example. Here, the linear motor 100 is, as described above, an aluminum thin plate (flat plate) 1.
50, by using the L-shaped cross-section aluminum thin plate 160, while preventing the separation of the magnet 140 and improving the service life,
The accuracy of the drive control can be maintained. In other words, as compared with the conventional linear motor having the same service life (for example, FIGS. 25 and 27), the motor constant is relatively improved by the weight reduction.

In the fifth embodiment, the linear motor 100 having a high motor constant is used for driving the X stage (movable stage) 600X of the stage device 600. The configuration of two linear motors 620 (only one is shown in FIG. 16) used for driving the Y stage 600Y is the same as that of the linear motor 100, and a detailed description thereof will be omitted.

The use of the stage device 600 in which the linear motors 100 and 620 are used as driving means is not limited, but in this embodiment, a pattern formed on a wafer (substrate) W by a mask (not shown) is used. Is used as a moving means of the wafer W in the exposure apparatus for transferring the wafer. That is, the stage device 600 is a two-axis XY stage device of the X axis and the Y axis,
02, an X stage 600X driven in the X direction (direction indicated by arrow X in the figure), a Y stage 600Y driven in the Y direction (direction indicated by arrow Y), and a sample stage (movable body) 6
04 is a main component.

Here, the sample stage 604 is mounted on the Y stage 6
The wafer (substrate) W is mounted on the sample table 604 via a wafer holder (not shown).
An irradiation unit (not shown) is arranged above the wafer W, and a resist (not shown) applied to the wafer W in advance by exposure light irradiated from the irradiation unit via a mask (both not shown). (Omitted), the circuit pattern on the mask is transferred.

X stage 6 in stage device 600
The movement amounts of the 00X and Y stages 600Y are respectively set on moving mirrors 605X and 605Y fixed to the X-direction end and the Y-direction end of the sample table 604, and the base unit 602 so as to face the moving mirrors. Fixed laser interferometer 606X,
606Y. Then, a main controller (not shown) controls the movement of the sample table 604 to a desired position on the base 602 based on the measurement result.

The X stage 60 of the stage device 600
The 0X, Y stage 600Y has its stator 191
A large number of coils (190 in the first embodiment) are driven on the base 602 in the X and Y directions by linear motors 100 and 620 arranged in the axial direction, respectively.
Here, the stator 1 of the two linear motors 100, 100
10 and 110 are both provided on the base 602 with the mounting portions 192 and
The movable elements 193 and 193 are fixed at 192, respectively.
It is fixed to X stage 600X via fixing plates 607, 607. Here, the mover 193 has two magnet units 100A, 100A facing each other.

The stators 621 and 621 of the linear motors 620 and 620 are both fixed to the X stage 600X, and the movers 622 and 622 (only one is shown) are fixed to the Y stage 600Y. Each stator 191,1
The components 91, 621, and 621 are cooled by a temperature adjusting fluid flowing through the internal flow passage, and the temperature of the fluid is adjusted by a temperature adjuster 631. The stator 11
0,110,621,621 and the temperature controller 631
They are connected by a discharge pipe 632, a pipe 633, and the like.

The stage device 600 is provided with an air guide 640 and a static pressure gas bearing (not shown).
The air blowing port 641 and the air suction port 642 constitute a static pressure air bearing type stage. (Sixth Embodiment) Next, a sixth embodiment of the present invention will be described with reference to FIG.

The sixth embodiment is similar to the first,
The linear motors 100, 300, and 400 obtained by the third and fourth embodiments are used as driving means for a reticle (mask) stage 750 of an exposure apparatus 700. In the sixth embodiment, the linear motor 100 (FIG. 3) of the first embodiment is
0.

The exposure apparatus 700 is a so-called step-and-scan exposure type scanning exposure apparatus. As shown in FIG. 17, the exposure apparatus 700 includes an illumination system 710, a stage movable unit 751 for holding a reticle (photomask) R, a projection optical system PL, and a wafer (substrate) W in an XY plane. , A stage device 800 for driving in a two-dimensional direction of the X direction and the Y direction, and a main control device 720 for controlling these.

The illumination system 710 irradiates the exposure light emitted from the light source unit to a rectangular (or arc-shaped) illumination area IAR on the reticle R with uniform illuminance. In the reticle stage 750, the stage movable section 751 is moved on a reticle base (not shown) at a predetermined scanning speed along a guide rail (not shown).
A reticle R is fixed on the upper surface of the stage movable section 751, for example, by vacuum suction. Also, the stage movable part 7
An exposure light passage hole (not shown) is formed below the reticle R of 51.

The moving position of the stage movable portion 751 is as follows.
The stage control system 719 is detected by the reflecting mirror 715 and the reticle laser interferometer 716, and the main controller 720 based on the detected moving position of the stage movable section 751 is used.
The stage movable section 751 is driven in accordance with the instruction from. The projection optical system PL is a reduction optical system, and is disposed below the reticle stage 750, and the direction of its optical axis AX (coincident with the optical axis IX of the illumination optical system) is defined as the Z-axis direction.
Here, a refraction optical system including a plurality of lens elements arranged at predetermined intervals along the optical axis AX direction so as to have a telecentric optical arrangement is used. Therefore, the illumination area IA of the reticle R by the illumination system 710
When R is illuminated, a reduced image (partially inverted image) of the circuit pattern in the illumination area IAR of the reticle R is formed in the exposure area IA conjugate to the illumination area IAR on the wafer W.

The stage device 800 drives the table 818 in a two-dimensional direction in the XY plane by using a plane motor 870 using a coil as an armature as a driving means. That is, the stage device 800 includes the base unit 8
21, a table 818 that floats above the upper surface of the base portion 821 through a clearance of about several μm,
A flat motor 870 for moving the table 818 is provided. Here, the table 818 stores the values of
A wafer (substrate) W is fixed on the upper surface by, for example, vacuum suction.

A moving mirror 827 is fixed to the table 818, and a laser beam is emitted from the wafer interferometer 831 to detect the moving position of the table 818 in the XY plane. . Information on the movement position obtained at this time is sent to main controller 720 via stage control system 719. Then, the stage control system 719
In accordance with an instruction from main controller 720 based on this information, planar motor 870 is operated and table 818 is set to X
-Move to a desired position in the Y plane.

The table 818 is supported at three different points by a support mechanism (not shown) on the upper surface of a mover (not shown) constituting the flat motor 870. The table 818 is moved in the X and Y directions by the flat motor 870. Not only can it be driven, but also it can be tilted with respect to the XY plane or driven in the Z-axis direction (upward). Note that the planar motor 870 has a known configuration, and other descriptions of the planar motor 870 are omitted.

In the figure, reference numeral 821 denotes a base portion,
A fluid for preventing a temperature rise due to heat generated from the inside thereof is supplied to a supply pipe 792, a discharge pipe 793, and a temperature control device 779.
It is circulated by the action of. The stage device 80 in the exposure apparatus 700 of the present embodiment
As 0, the stage device 600 described in the fifth embodiment can be used.

In exposure apparatus 700 including reticle stage 750 having such a configuration, exposure processing is generally performed in the following procedure. First, the reticle R and the wafer W are loaded, and then reticle alignment, baseline measurement, alignment measurement, and the like are performed. After the completion of the alignment measurement, an exposure operation of a step-and-scan method is performed.

In the exposure operation, the reticle interferometer 7
16, reticle R position information, wafer interferometer 831
Main controller 720 based on position information of wafer W
Issues a command to the stage control system 719, and the reticle R and the wafer 9 are moved synchronously by the linear motors 100 and 100 and the plane motor 870 of the reticle stage 750, so that desired scanning exposure is performed.

When the transfer of the reticle pattern to one shot area is completed, the table 8
18 is stepped by one shot area, and scanning exposure is performed on the next shot area. This stepping and scanning exposure are sequentially repeated, and the required number of shot patterns are transferred onto the wafer 9. Here, in the reticle stage 750, the linear motor 1
The three-phase currents are appropriately supplied to the coils 190, 190,... Constituting the 00, 100 stators 191, 191 to control the amount of movement.

The manufacture of a semiconductor device using the stage apparatus 600 or the exposure apparatus 700 according to the fifth and sixth embodiments of the present invention is generally described with reference to FIGS.
The procedure is as follows. That is, a semiconductor device
A step of performing device function / performance design, a step of manufacturing a reticle based on this design step, a step of manufacturing a wafer from a silicon material, a step of transferring a reticle pattern to the wafer by the exposure apparatus of the above-described embodiment, Device assembly steps (including dicing, bonding, and packaging processes),
It is manufactured through an inspection step and the like.

Hereinafter, the device manufacturing method will be described in more detail. FIG. 18 shows a flowchart of an example of manufacturing a device (a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin plate magnetic head, a micromachine, or the like). As shown in this figure, first, in step 1001 (design step), a function / performance design of a device (for example, a circuit design of a semiconductor device) is performed, and a pattern design for realizing the function is performed.
Subsequently, in step 1002 (mask manufacturing step), a mask (reticle) on which the designed circuit pattern is formed is manufactured. On the other hand, in step 1003 (wafer manufacturing step), a wafer is manufactured using a material such as silicon.

Next, in step 1004 (wafer processing step), steps 1001 to 1003
Using the mask (reticle) and the wafer prepared in the above, an actual circuit or the like is formed on the wafer by lithography technology or the like as described later. Next, step 1005
In (Tevaise assembly step), step 1004
Is assembled by using the wafer processed in the above step. Step 1005 includes processes such as a dicing process, a bonding process, and a packaging process (chip encapsulation) as necessary.

Finally, in step 1006 (inspection step), inspections such as an operation confirmation test and a durability test of the device manufactured in step 1005 are performed. After these steps, the device is completed and shipped. FIG. 19 shows a detailed flow example of step 1004 in the case of a semiconductor device. In FIG. 19, in step 1011 (oxidation step), the surface of the wafer is oxidized. Step 1012
In the (CVD step), an oxide insulating film is formed on the wafer surface. In step 1013 (electrode forming step), electrodes are formed on the wafer by vapor deposition. In step 1014 (ion implantation step), ions are implanted into the wafer.

The above steps 1011 to 101
Each of the components 4 constitutes a pre-processing step in each stage of the wafer processing, and is selected and executed according to a necessary process in each stage. In each stage of the wafer process, when the above-described pre-processing step is completed, the post-processing step is executed as follows. In this post-processing step, first, in step 1015 (resist forming step), a photosensitive agent is applied to the wafer. Subsequently, in step 1016 (exposure step), the circuit pattern of the mask is transferred onto the wafer by using the above-described exposure apparatus. Next, in step 1017 (development step), the exposed wafer is developed, and in step 1018 (etching step)
In, the exposed member other than the portion where the resist remains is removed by etching. Then, in step 1019 (resist removing step), unnecessary resist after etching is removed.

By repeating these pre-processing and post-processing steps, multiple circuit patterns are formed on the wafer. Note that the linear motors 100, 30 of the present invention
Reference numerals 0 and 400 denote a scanning type exposure apparatus (for example, US Pat. No. 5,473,703) other than the exposure apparatus described in the embodiment, which exposes a mask pattern by synchronously moving a mask and a substrate.
No. 410).

In the apparatus to which the linear motor of the present invention is applied, the mask pattern is exposed while the mask and the substrate are stationary, and the substrate is sequentially moved step by step.
The present invention can also be applied to an AND repeat type exposure apparatus. The apparatus to which the linear motor of the present invention is applied can also be applied to a proxy midi exposure apparatus that exposes a mask pattern by bringing a mask and a substrate into close contact without using a projection optical system.

The exposure apparatus to which the linear motor of the present invention is applied is not limited to an exposure apparatus for manufacturing semiconductors. For example, an exposure apparatus for a liquid crystal for exposing a liquid crystal display element pattern to a square glass plate. The present invention can be widely applied to an apparatus and an exposure apparatus for manufacturing a thin plate magnetic head.

The light source of the exposure apparatus according to the sixth embodiment includes g-line (436 nm), i-line (365 nm), KrF
Not only excimer laser (248 nm), ArF excimer laser (193 nm) and F2 laser (157 nm) but also charged particle beams such as X-rays and electron beams can be used. For example, when an electron beam is used, thermionic emission type lanthanum hexafluoride (LaB6) or tantalum (Ta) can be used as an electron gun. Furthermore, when using an electron beam, a configuration using a mask may be used,
A structure in which a pattern is directly formed on a substrate without using a mask may be adopted.

In this case, when far-ultraviolet light such as excimer laser is used as the projection optical system, a material that transmits far-ultraviolet light such as quartz or fluorite is used as the glass material, and when F2 laser or X-ray is used, reflection is used. An optical system of a refraction system or a refraction system (a reticle of a reflection type is used). When an electron beam is used, an electron optical system including an electron lens and a deflector may be used as the optical system. In addition,
It goes without saying that the optical path through which the electron beam passes is in a vacuum state.

The magnification of the projection optical system of the exposure apparatus to which the linear motor of the present invention is applied as a driving means may be not only a reduction system but also an equal magnification and an enlargement system. When the linear motor of the present invention is used for a wafer stage or a reticle stage, either an air levitation type using an air bearing or a magnetic levitation type using Lorentz force or reactance force may be used.

The stage to which the linear motor of the present invention is applied is not limited to a type that moves along a guide, but may be a guideless type that does not require a guide. The reaction force generated by the movement of the wafer stage may be mechanically released to the floor (ground) by using a frame member by using the invention proposed in Japanese Patent Application Laid-Open No. 8-166475. It may be.

Regarding the reaction force generated by the movement of the reticle stage, utilizing the invention proposed in Japanese Patent Application Laid-Open No. 8-330224, a frame member is used to mechanically move the floor side (ground). You may make it escape to.
The exposure apparatus to which the linear motor according to the present invention described above is applied is designed to maintain various mechanical subsystems including the respective constituent elements recited in the claims with predetermined mechanical accuracy, electrical accuracy, and optical accuracy. And manufactured by assembling.

Before and after this assembly, adjustments to achieve optical accuracy for various optical systems, adjustments to achieve mechanical accuracy for various mechanical systems, and Adjustments are made to the electrical system to achieve electrical accuracy. In addition, the process of assembling the exposure apparatus from the various subsystems includes mechanical connection, wiring connection of an electric circuit, and piping connection of a pneumatic circuit between the various subsystems.

It goes without saying that there is an assembling step for each subsystem before the assembling step from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure apparatus is completed, comprehensive adjustment is performed, and various precisions of the entire exposure apparatus are secured. It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

[0089]

According to the first aspect of the present invention described above,
In the magnet unit, a reinforcing portion for connecting the magnet and the yoke is formed at an end of the adhesive on a bonding surface of the magnet and the yoke with the adhesive so as to cover the end of the adhesive. Therefore, when vibrations are transmitted to the magnet unit, even if the shear stress is concentrated on the end of the adhesive on the joint surface and a crack may be generated, the relative strength between the magnet and the yoke is increased by the reinforcing portion. The distance does not become large, and the generation of cracks can be avoided.

According to the second aspect of the present invention, even when the reinforcing portion is a thin plate made of a non-magnetic material, the reinforcing portion is formed by an end of the adhesive on the joining surface when vibration is applied to the magnet unit. A function that does not cause cracks in the portion can be sufficiently exhibited. Therefore, the weight does not increase. Further, since the reinforcing portion is made of a non-magnetic material, the reinforcing portion does not affect the magnetic flux generated by the magnet.

According to the third aspect of the present invention, since the reinforcing portion is a single non-magnetic plate, the magnet unit has a simple and lightweight structure, and is provided at the end of the adhesive on the joint surface. By preventing the gap between the magnet and the yoke from opening beyond a certain value, the occurrence of cracks can be avoided. According to the fourth aspect of the present invention, since the reinforcing portion is a single non-magnetic plate having an L-shaped cross section having two surfaces orthogonal to each other, the joining surface has a simple and lightweight structure. The gap between the magnet of the magnet unit and the yoke at the end of the adhesive in the above is not kept at a certain distance or more, so that the occurrence of cracks can be avoided.

According to the fifth aspect of the present invention, even if vibration occurs in the magnet unit, the distance between the magnet and the yoke is more than a predetermined distance at the end of the adhesive on the joint surface between the magnet and the yoke. Since there is no crack, no crack is generated during this time, and since the magnets do not separate more than a certain distance, the attracting force of the magnet also acts to attract the magnet and the yoke.
As a result, the useful life of the electromagnetic actuator becomes longer.

According to the invention of claim 6, even when the magnet unit vibrates in a direction perpendicular to the magnet arrangement direction when the electromagnetic actuator is operated, the end of the adhesive on the joint surface between the magnet and the yoke is provided. In the portion, the distance between the magnet and the yoke does not exceed a predetermined value, and no crack occurs between them. In addition, since the magnet is not separated by more than a certain amount, the attractive force of the magnet also acts so that the magnet and the yoke attract each other. Even in this case, the service life is long.

According to the seventh aspect of the present invention, even when the magnet unit vibrates in the direction perpendicular to the magnet arrangement direction during the operation of the electromagnetic actuator, the end of the adhesive on the joint surface between the magnet and the yoke is maintained. In the portion, the distance between the magnet and the yoke does not exceed a predetermined value, and no crack occurs between them. In addition, since the magnet is not separated by more than a certain amount, the attractive force of the magnet also acts so that the magnet and the yoke attract each other. Even in this case, the service life is long.

According to the invention of claim 8, even if the magnet unit vibrates frequently during operation, the adhesive on the joint surface between the magnet and the yoke does not crack.
Its service life is lengthened. In addition, the reinforcing portion formed to extend the service life can be light in weight. At this time, the motor constant also improves. According to the ninth aspect of the present invention, even if vibrations frequently occur in the magnet unit during operation, the adhesive on the joint surface between the magnet and the yoke does not crack.
Its service life is lengthened. In addition, the reinforcing portion formed for extending the service life can be light in weight, and high accuracy of drive control can be maintained.

Further, according to the tenth aspect of the present invention, even if the magnet unit frequently vibrates during operation, the adhesive at the joint surface between the magnet and the yoke does not crack, and its service life can be improved. The years are longer. In addition, the reinforcing portion formed to extend the service life can be light in weight. At this time, in the reticle stage, high precision of drive control is maintained.
According to the eleventh aspect of the present invention, in an exposure apparatus having a long service life, the precision of drive control can be relatively increased. The accuracy of the pattern is increased.

Further, according to the twelfth aspect of the present invention, the magnet and the fixing object are formed only by forming the protection portion at a locally fragile portion between the magnet and the fixing object, particularly at a portion which is easily deteriorated with time. And the overall bonding strength with the dramatic increase.

[Brief description of the drawings]

FIG. 1 shows a magnet unit 10 according to a first embodiment of the present invention.
It is a perspective view which shows OA.

FIG. 2 is a magnet unit 10 according to the first embodiment of the present invention.
It is the side view and front view which show OA.

FIG. 3 is a perspective view showing a linear motor 100 using a magnet unit 100A.

4 is a plan view and a side view of the linear motor 100. FIG.

FIG. 5 is a perspective view showing a magnet unit 100B according to a first modification of the first embodiment.

FIG. 6 is a perspective view showing a magnet unit 100C according to a second modification of the first embodiment.

FIG. 7 is a voice coil motor 200 according to a second embodiment;
FIG.

FIG. 8 shows a voice coil motor 200 according to a second embodiment.
FIG.

FIG. 9 shows a voice coil motor 200 according to a second embodiment.
3A and 3B are a side view and a front view showing a relationship between the magnet unit 200A and the coil 290.

FIG. 10 shows a magnet unit 3 according to a third embodiment of the present invention.
It is a perspective view which shows 00A.

FIG. 11 is a plan view and a side view of a linear motor 300 using a magnet unit 300A.

FIG. 12 shows a magnet unit 4 according to a fourth embodiment of the present invention.
It is a perspective view showing the linear motor 400 using 00A.

FIG. 13 is a plan view and a side view showing a relationship between a magnet unit 400A and a coil 490 of a linear motor 400 according to a fourth embodiment.

FIG. 14 is a cross-sectional view illustrating a mounting structure of a thin U-shaped aluminum plate 460 in a magnet unit 400A according to a fourth embodiment.

FIG. 15 is a cross-sectional view illustrating a mounting structure of a quadrangular prism-shaped member 470 according to a modification of the fourth embodiment.

FIG. 16 is a perspective view showing a stage device 600 to which the linear motor 100 is applied.

FIG. 17 shows a linear motor 10 mounted on a reticle stage 750.
FIG. 6 is a diagram illustrating an overall configuration of an exposure apparatus 700 in which 0 is used.

FIG. 18 is a diagram illustrating a semiconductor device manufacturing process using the exposure apparatus according to the present invention.

FIG. 19 is a diagram showing a more specific manufacturing process of a semiconductor device using the exposure apparatus according to the present invention.

FIG. 20 is a perspective view showing the structure of a conventional linear motor 10 having a U-shaped cross section.

FIG. 21 is a side view showing how the magnet unit 10A bends when the conventional linear motor 10 operates.

FIG. 22 shows a magnet unit 10 of a conventional linear motor 10.
FIG. 3 is a partially enlarged sectional view showing a crack generated in A.

FIG. 23 is a side view showing a state of bending of a magnet unit 20A when a conventional linear motor 20 having a rectangular cross section is operated.

FIG. 24 is a perspective view showing a conventional magnet unit 30A to which a magnet is fixed using a holder.

FIG. 25 is a side view showing a linear motor 30 using a conventional magnet unit 30A to which a magnet is fixed using a holder.

FIG. 26 is a perspective view showing a conventional magnet unit 40A to which a magnet is fixed using a holder.

FIG. 27 is a plan view showing a linear motor 40 using a conventional magnet unit 40A to which a magnet is fixed using a holder.

[Explanation of symbols]

100A, 100B, 100C 200A, 300A,
400A Magnet unit 100, 300 Linear motor 110, 210, 310, 410 Base 120, 220, 320, 420 Yoke (fixed object) 130, 230, 330, 430 Adhesive 140, 240, 340, 440 Magnet 150, 250, 350, 450 Aluminum thin plate (reinforcement, protection) 160, 260, 360, 460 L-shaped cross-section aluminum thin (reinforcement) 200 Voice coil motor

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5F031 CA02 HA13 LA08 MA27 PA30 5F046 CC01 CC02 CC03 CC17 5H641 BB18 BB19 GG02 GG03 GG05 GG07 HH02 HH03 HH05

Claims (12)

[Claims] 1. A yoke and a magnet one surface of which is bonded to a main surface of the yoke with an adhesive, and an end of the adhesive at a joint surface between the magnet and the yoke is provided with an adhesive. A reinforcing portion for connecting the magnet and the yoke so as to cover an end of the magnet unit. 2. The magnet unit according to claim 1, wherein the reinforcing portion is made of a non-magnetic thin plate. 3. The magnet unit according to claim 1, wherein the reinforcing portion is formed of a single non-magnetic flat plate, and the flat plate includes an end face of the magnet perpendicular to the joining surface, A magnet unit, which is attached to an end surface of the yoke perpendicular to the joining surface and parallel to an end surface of the magnet. 4. The magnet unit according to claim 1, wherein the reinforcing portion is a single non-magnetic plate having an L-shaped cross section having two surfaces orthogonal to each other. The magnet unit, wherein one side of the letter-shaped plate is attached to an end surface of the magnet perpendicular to the joining surface, and the other surface is attached to a main surface of the yoke. 5. The magnet unit according to claim 3, wherein the two magnet units are attached to a base so as to face each other, and a main surface of a yoke of the magnet units facing each other. An electromagnetic actuator, wherein a plurality of magnets are arranged in a row in opposition to each other, and a coil is movably arranged between the main surfaces of the opposing two yokes. 6. The electromagnetic actuator according to claim 5, wherein the reinforcing portion includes a side surface of the magnet perpendicular to the joining surface and parallel to a direction in which the magnets are arranged, and the main surface of the yoke or the magnet. An electromagnetic actuator, wherein a side surface is connected to an end surface of the yoke parallel to the yoke. 7. The electromagnetic actuator according to claim 5, wherein the reinforcing portion connects a side surface of the magnet perpendicular to an arrangement direction and a main surface of the yoke. 8. A mover and a stator, comprising at least two magnet units according to claim 5, wherein said at least two magnet units and a coil arranged therebetween. And a linear motor. 9. A stage device, wherein the linear motor according to claim 8 is used as driving means. 10. An exposure apparatus for forming a predetermined pattern on a substrate by using illumination light for exposure, comprising: an illumination system for emitting the illumination light; and an object arranged on a path of the illumination light. An exposure apparatus comprising: the stage device according to claim 9 mounted thereon. 11. A semiconductor device, wherein a predetermined pattern is formed by the exposure apparatus according to claim 10. 12. A fixing method for fixing a magnet to an object to be fixed, a step of adhering the magnet and the object to be fixed with an adhesive, at least a part of an end of the adhesive, and Forming a protective portion in a region including the adjacent magnet and the object to be fixed.