JP2001185077A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source which has a higher emission strength of excimer light and emission efficiency to attain a high output, has a stable discharge condition to stably and sufficiently work, and can not act as a high frequency noise source. SOLUTION: This excimer lamp 1 ionizes raw gas for creating excimer molecule using grow-discharge to extract the excimer light emitted from the excimer molecule. The excimer lamp 1 includes a container 11 being filled with a raw material gas and having a light-transmissive window 15 of transmittance to natural radiation light, at least one cathode 13 being arranged in a straight-line shape within the container 11, and at least two electrode pairs having at least two anodes 14 being disposed within the container 11 to oppose with the cathode 13, wherein the light-transmissive window 15 is provided at an extending line of a parallel direction Y to the electrode pair.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a light source device,
More specifically, the present invention relates to a light source device that ionizes a raw material gas that generates excimer molecules by glow discharge and extracts spontaneous radiation emitted from the excimer molecules.

[0002]

2. Description of the Related Art In recent years, a light source device for generating ultraviolet light or vacuum ultraviolet light, such as an excimer laser, has been actively developed, and an excimer lamp such as an excimer lamp having a simpler structure than an excimer laser has been developed. Coherent light sources are also being developed. In this excimer lamp, a raw material gas for generating excimer molecules is sealed in a closed vessel such as a chamber or a valve, and natural radiation light (excimer light) from excited excimer molecules generated by discharging the raw material gas is used. ) To the outside.

[0003] Excimer lamps are broadly classified into non-electrode (external electrode) types in containers and electrodes with internal electrodes (internal electrodes) according to the form of discharge electrodes. As an electrode type, a type in which a pair of electrodes are disposed in the above-mentioned closed container (for example, see Japanese Patent Application Laid-Open No. 3-1463) is known. On the other hand, examples of the electrodeless type include a type using a dielectric barrier discharge that generates a high-frequency electric field in a discharge space. Furthermore, there is also a combination of the two. For example, an excimer lamp described in Japanese Patent Application Laid-Open No. 9-106783 is provided with a pair of internal electrodes for main discharge and external electrodes for dielectric barrier discharge.

[0004]

However, the conventional electrode type excimer lamp does not have sufficiently high excimer light output. In addition, in an excimer lamp using a dielectric barrier discharge, a stable discharge state does not always tend to be obtained, and thus the operation may be unstable. Furthermore, to generate a high-frequency electric field in the container,
High frequency noise, so-called EMI (Electromagnetic Inte
rference). Moreover, a high voltage was always required to generate such a strong electric field. Under such circumstances, there has been a long-felt need for a light source device that can operate sufficiently with high output and that does not become a noise source.

In view of the foregoing, the present invention has been made in view of the above-mentioned conventional problems. The emission intensity of excimer light and the efficiency of emission to the outside can be increased to achieve high output, and the discharge state can be stabilized. Operation is stable enough,
Moreover, an object of the present invention is to provide a light source device that cannot be a high-frequency noise source that causes EMI.

[0006]

Means for Solving the Problems The present inventors have intensively studied to solve the above-mentioned problems, and in the conventional electrode type excimer lamp, even if the input current is increased to increase the discharge current, the discharge current is not increased. It has been found that a corresponding excimer light output cannot be obtained. Based on this finding, the present inventors have conducted further studies, and as a result, arrived at a member configuration and structure of a light source device which is extremely effective in solving the conventional problems, and completed the present invention.

That is, the light source device according to the present invention ionizes a source gas for generating excimer molecules by glow discharge and extracts spontaneous radiation emitted from the excimer molecules, and the source gas is sealed. A sealing body provided with a light emitting portion having a property of transmitting natural spontaneous light, at least one cathode linearly arranged inside the sealing body, and an inside of the sealing body facing the cathode. , And at least two electrode pairs each including at least two anodes arranged in the same direction, and the light emitting portion is provided on an extension of the electrode pairs in the parallel direction.

[0008] In the light source device configured as described above, the raw material gas atoms sealed in the envelope are converted into dimer photons by discharge to generate excimer molecules, and spontaneous emission light is generated by the electron transition of the excimer molecules. Is released. At this time, since the discharge mode is a glow discharge, the voltage fluctuation with respect to the change of the discharge current is small, and a decrease in the electrode applied voltage (hereinafter, referred to as “sustain voltage”) maintained during the discharge is suppressed. When the sustaining voltage is maintained at a sufficiently high level, the abundance ratio of excimer molecules excited to a high energy level increases, so that the luminous efficiency of excimer light of a relatively short wavelength (ultraviolet light or vacuum ultraviolet light) is obtained. Is enhanced. In addition, since the excimer molecules at such high energy levels are widely and dilutely distributed, the concentration (discharge density) of the glow discharge is appropriately reduced, and the discharge path is widened. The light emitting area is enlarged. As a result, the emission intensity of the excimer light in the enclosure is increased.

Further, at least one cathode is linearly arranged inside the envelope, and at least two anodes are arranged inside the envelope so as to face the cathodes. An electrode pair is formed by the cathode and the anode. Since at least two are configured, the electrode facing axes of these electrode pairs (virtual axes connecting the tips of the cathode and the anode) are located on the same plane. Therefore, the emission region of the excimer light due to the glow discharge is aligned on this plane, that is, in the parallel direction of the electrode pairs. Since the light emitting portion is provided on the extension line in the parallel direction of the electrode pair, the excimer light emitted from the plurality of discharge paths is superimposed and emitted with increased intensity. Therefore, the output of the emitted excimer light is significantly increased as compared with the conventional case.

Further, the distance between the cathode and the anode (electrode distance), the distance between the electrode pairs, and the like are appropriately adjusted according to various conditions such as the shape of the sealed body, the type of the raw material gas, and the internal pressure of the raw material gas. By doing so, it is possible to avoid discharge concentration and to surely separate the discharge paths to stably perform glow discharge. Therefore, output fluctuation of excimer light as seen in a conventional excimer lamp using a dielectric barrier discharge is sufficiently prevented, and the operation of the photoelectric device can be stabilized. Furthermore, since it is not necessary to generate a high-intensity high-frequency electric field inside the envelope, there is no possibility that the light source device becomes a noise source for peripheral devices.

In addition, the light source device of the present invention employs electrode discharge, and does not require a high voltage which is always required to generate a high-intensity high-frequency electric field. Therefore, compared to the conventional excimer lamp using the dielectric barrier discharge, it is possible to reduce the operating voltage and to reduce the scale of the power supply. In addition, since the number of electrode pairs can be appropriately selected, there is an advantage that the sealing body and thus the light source device can be easily formed into a desired shape. Further, since the amount of heat generated in the glow discharge is smaller than that in the arc discharge, for example, the temperature rise of the light source device can be suppressed, and the light source device can be installed in a vacuum atmosphere. Therefore, it is extremely useful as a light source device for outputting vacuum ultraviolet light.

A power supply for applying a voltage to each electrode pair;
It is preferable that a resistance circuit be connected between the power supply and at least one of the anode and the cathode, and limit a current flowing through the electrode pair during glow discharge. Further, it is preferable that a diode that is connected between the power supply and the anode and limits a current flowing through the electrode pair when glow discharge is performed is provided.

With such a configuration, the discharge current can be limited to a range where the glow discharge is stably maintained. In addition, when the power supply voltage is constant, a desired discharge current can be easily obtained according to the shape of the envelope and the electrode conditions by changing the resistance value of the resistance circuit. On the other hand, when a diode is used, the backflow of current can be sufficiently suppressed. As described above, both the resistor circuit and the diode function as good discharge current limiting means, and it is possible to more stably maintain the glow discharge by each electrode pair.

Further, it is more preferable that the power supply is a DC power supply for applying a pulse voltage to the electrode pair. Excimer lamps using a conventional dielectric barrier discharge require the use of an AC power supply to apply a high-frequency electric field to the source gas of excimer molecules, whereas the light source device of the present invention uses a DC power supply and Any of the AC power supplies may be used.
When a DC power supply is used, when the voltage is pulsed, that is, when the voltage is applied in a pulse operation, the excimer light emission efficiency and the excimer light peak output (peak power) are increased as compared with continuous operation. Can be This is because the generation and disappearance of excimer molecules is proportional to the number of pulses.
The number of times leads to an increase in output.

Further, it is more preferable that a reflecting portion for reflecting spontaneously emitted light (excimer light) is provided at a position inside the envelope facing the light emitting portion. With such a configuration, a part of the excimer light generated in the enclosure is reflected by the reflection part and emitted from the light emission part to the outside of the enclosure, so that the excimer light output of the light source device can be increased. Becomes The shape of the reflecting portion may be a flat surface or a curved surface. For example, when the reflecting portion has a concave curved surface, there is an advantage that the light-collecting efficiency is enhanced.

Further, the source gas contains at least one kind of rare gas, rare gas halide and nitrogen gas, and at least one kind of gas among hydrogen isotope gas, halogen gas and mercury vapor. It is more preferable that the mixed gas is composed of: When the source gas is a mixed gas containing such gas components, it becomes possible to extract various excimer lights having different emission spectrum shapes depending on the types, mixing ratios, partial pressures, and the like of the gas components. Therefore, a light source device that outputs excimer light according to various uses can be obtained.

Further, it is desirable that the cathode has a projection formed at a portion facing the anode. In this case, since the location of the discharge is defined by the convex portion formed on the cathode, the independent glow discharge by the electrode pair can be easily separated without fail. This is particularly effective when the number of cathodes is smaller than the number of anodes, and one cathode is a common cathode (common electrode) shared by a plurality of anodes. In this case, the shape of the tip of the projection may be flat, may have a projection, or may be projection.

Further, it is more preferable that the cathode and / or the anode have a metal compound layer provided on the surface.
When the source gas contains corrosive gas such as halogen gas,
Corrosion of the electrode due to halogenation of the metal atom of the electrode conductor part progresses, and there is a possibility that the life of the electrode is shortened or discharge characteristics are deteriorated. Therefore, by providing a metal compound layer on the surface of such a metal, a corrosive gas such as a halogen gas is blocked by the metal compound layer, and the corrosion of the electrode is suppressed. It is preferable that the metal compound layer be made of a compound having excellent corrosion resistance to halogen gas. In addition, when such a metal compound layer is provided on the surface of the cathode, the work function of the cathode is reduced, and the electron emission characteristics of the cathode can be improved.

At least one of the electrode pairs has a smaller electrode interval and a larger resistance value of the connected resistance circuit than other electrode pairs different from the other electrode pairs. Is more preferable. In the light source device configured as described above, the electrode pair whose electrode interval is narrower than the others starts at a lower applied voltage than the other electrode pairs (starts glow discharge). In this case, the periphery of the electrode pair is ionized by glow discharge, and the startability of another electrode pair near the electrode pair is enhanced. As a result, the starting voltage of the other electrodes is also reduced, and the startability of the light source device can be improved.

[0020]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that the same components are denoted by the same reference numerals, and redundant description will be omitted. Also,
The vertical and horizontal relationship is based on the vertical and horizontal relationship in the drawings unless otherwise specified.

FIG. 1 is a perspective view schematically showing the structure of a first embodiment of the light source device according to the present invention. The excimer lamp 1 as a light source device has a substantially cylindrical shape, and three cathodes 13 are provided linearly through the upper wall 12a of a hollow gas-filled container 11 (sealing body). Thus, three anodes 14 are provided so as to penetrate the bottom wall 12b. Thus, the cathode 13 is disposed vertically above the anode 14. These cathode 13 and anode 14 are
The cathode 13 and the anode 14 which are arranged inside the gas sealing container 11 and face up and down form three pairs of electrodes.

In each electrode pair, the cathode 13 and the anode 14 are preferably formed by the following formula (1): Sc> Sa (1) [where Sc is a surface 13S of the cathode 13 facing the anode 14]
Sa represents the area of the surface 14S of the anode 14 facing the cathode 13. ] Are set so as to satisfy the relationship shown in [1].

Further, the surfaces of the conductor portions of the cathode 13 and the anode 14 are covered with a metal compound layer. In addition, a light transmitting window 15 (light emitting portion) having a property of transmitting excimer light, which will be described later, is provided on a side wall of the gas sealing container 11. The light transmission window 15 is provided on an extension of the electrode pair in the parallel direction X. A source gas for generating excimer molecules is sealed in the internal space of the gas sealing container 11 so as to have a predetermined internal pressure. In this state, a predetermined voltage is applied to each electrode pair. I have. Further, the top wall 12a and the bottom wall 12
b is formed of a member having an insulating property, and is generally called a base. Furthermore, the side wall of the gas sealing container 11 is formed of a member such as metal or quartz.
Further, the light transmission window 15 is formed of, for example, quartz, magnesium fluoride, calcium fluoride, or the like.

In the excimer lamp 1 configured as described above, when a predetermined voltage is applied to the electrode pairs, discharge starts in each electrode pair. Current flowing through the electrode pair (discharge current)
As the current increases, the form of discharge shifts to glow discharge (developing into normal, abnormal, abnormal glow discharge with the increase in current) through Townsend discharge, and to arc discharge when the current further increases. And migrate. In the excimer lamp 1 of the present invention, the voltage applied to each pair of electrodes is adjusted so that the discharge current is such that the glow discharge is maintained. At this time, the source gas atoms are dimerized into photons in the gas enclosure 11 to generate excimer molecules in an excited state, and spontaneous emission light (excimer light) having a continuous spectrum is generated by the electronic transition of the excimer molecules. Released. Then, a part of the excimer light L (naturally radiated light) is emitted to the outside of the gas sealing container 11 through the light transmission window 15.

As described above, since the excimer lamp 1 operates by glow discharge, a voltage fluctuation with respect to a change in discharge current is small, a decrease in a sustain voltage is suppressed, and a low voltage characteristic is well maintained. In this case, the voltage is maintained at a sufficiently high level, and the abundance ratio of excimer molecules excited to a high energy level increases, so that the excimer light mainly composed of relatively short wavelength ultraviolet light or vacuum ultraviolet light is used. Luminous efficiency is increased. Further, excimer molecules in such a high energy level are widely and dilutely distributed, so that the concentration (discharge density) of glow discharge is appropriately reduced and the discharge path is widened. Therefore, the emission region of the excimer light is expanded,
Moreover, as described above, the luminous efficiency of excimer light is also increased, so that the luminous intensity of ultraviolet light or vacuum ultraviolet light as excimer light is significantly increased. Therefore, a sufficient output of excimer light can be obtained from the excimer lamp 1.

Further, since the cathodes 13 are arranged linearly and the anodes 14 are arranged at positions facing these cathodes, the electrode pairs are arranged along the parallel direction X, and their electrode opposing axes are aligned. They are located on the same plane. Therefore, the discharge path of the glow discharge formed along the electrode facing axis appears on this plane, and the light emitting region of the excimer light is aligned in the parallel direction X of the electrode pair. A light transmission window 15 is provided on an extension of the parallel direction X.
From No. 5, excimer lights emitted from a plurality of discharge paths as glow discharge regions are superposed and emitted with an increased intensity. Therefore, the intensity of the excimer light L emitted from the light transmission window 15 is significantly increased as compared with the related art. Moreover, as described above, since the ratio of the ultraviolet light and the vacuum ultraviolet light in the excimer light is high and the luminous efficiency is increased, the output of the ultraviolet light and the vacuum ultraviolet light from the excimer lamp 1 is particularly improved. It becomes possible.

Further, an electrode gap G1 between the cathode 13 and the anode 14, an arrangement gap G2 between the electrode pairs, and the like are determined according to various conditions such as the shape of the gas enclosure 11, the type of the source gas, and the internal pressure of the source gas. Is appropriately adjusted, the discharge is prevented from being concentrated, the discharge is reliably separated, and an independent glow discharge is stably performed by each electrode pair. When the glow discharge is stably maintained in this manner, the output fluctuation of the excimer light, which has been conventionally seen, can be sufficiently prevented, and the operation of the excimer lamp 1 can be stabilized. Further, since it is not necessary to generate a high-intensity high-frequency electric field inside the gas enclosure 11, there is no possibility that the excimer lamp 1 becomes an electromagnetic noise source that exerts electromagnetic adverse effects (EMI) on peripheral devices. In addition, the excimer lamp 1 uses an electroded discharge, and does not require a high pressure that is always needed to generate a high-intensity high-frequency electric field.
Therefore, the operating voltage is suppressed lower than that of an excimer lamp using a conventional dielectric barrier discharge, and the scale of the power supply device used for the excimer lamp 1 can be reduced.

Further, since the cathode 13 is disposed vertically above the anode 14, the following operations and effects can be obtained satisfactorily. When the cathode 13 is provided below the anode 14, electrons generated by ionization due to discharge move upward from below, and the moving speed of the electrons is:
It is slower than when the cathode 13 is above. At this time, if the gap length between the electrodes is not sufficiently short, the deflection of the electron path due to the electric field of positive ions (radicals) generated by ionization increases. The mass difference between an electron and a positive ion is very large, and in the same electric field, the moving speed of the electron is much higher than that of the positive ion. Therefore, the discharge path is excessively expanded due to the deflection of the electron path, and it tends to be difficult to stably maintain the glow discharge.

On the other hand, if the cathode 13 and the anode 14 are arranged opposite to each other at the same height in the horizontal direction, the electrons are affected by thermal diffusion because the electron mass is considerably smaller than the mass of the positive ions. While positive ions are more likely to convection upward, positive ions are more likely to convection downward. Therefore, the glow discharge tends to be unevenly distributed so as to wrap around the electrode. In the excimer lamp 1, the cathode 13 is disposed vertically above the anode 14, so that the glow discharge can be stabilized and the glow discharge can be prevented from being unevenly distributed. As a result, it is possible to stably extract high-output excimer light.

By the way, even if the cathode 13 is disposed vertically above the anode 14, there is no danger that the discharge path will be excessively widened. However, if the relationship shown in the above equation (1) is satisfied, , The area Sc of the cathode 13 is
Is larger than the area Sa of the anode 14
The positive ions tend to be easily converged on the surface 13S of the cathode 13 on the surface 14S. Therefore, the fluctuation of the discharge current is suppressed, the glow discharge becomes more stable, and the output of excimer light can be further stabilized. In addition, since the glow discharge has a smaller discharge current than the arc discharge, and the temperature rise of the anode 14 due to the anode loss is extremely small, the discharge is stable even if the area Sa of the anode 14 is smaller than the area Sc of the cathode 13. There is an advantage of doing so.

On the other hand, in the glow discharge, the work function of the cathode 13 and the anode 14 is larger than that of the arc discharge, and it is difficult for electrons to be emitted from the surface of the cathode 13, so that the amount of emitted electrons per unit area of the cathode 13 is small. Therefore, a discharge may be generated from the back surface of the electrode or the support of the electrode, and the discharge may be unstable. On the other hand, in the excimer lamp 1, since the area Sc of the cathode 13 is larger than the area Sa of the anode 14, a discharge easily occurs between the surface 13S of the cathode 13 and the surface 14S of the anode 14. Therefore, the glow discharge becomes sufficiently stable, and the output fluctuation of the excimer light can be sufficiently suppressed.

Here, the source gas for producing excimer molecules is helium, neon, argon, krypton,
Noble gases such as xenon, rare gas halides such as argon fluoride, krypton fluoride, xenon chloride and xenon fluoride, nitrogen gas which is an inert gas, hydrogen isotope gas (H ₂ , D ₂ , T ₂ , HD, HT, DT; wherein H represents hydrogen, D represents deuterium, and T represents tritium.), Halogen gas such as fluorine, chlorine, bromine, or mercury vapor; Or a mixture of two or more.

In particular, a mixed gas containing at least one of rare gas, rare gas halide and nitrogen gas and at least one of hydrogen isotope gas, halogen gas and mercury vapor is used as a raw material gas. It is suitable to use as. When the source gas is a mixed gas composed of such gas components, it becomes possible to extract various excimer lights having different emission spectrum shapes depending on the types, mixing ratios, partial pressures and the like of the gas components. Therefore, the excimer lamp 1 that outputs excimer light according to various uses can be obtained.

When xenon gas is used as a source gas, the internal pressure is preferably 20 to 100 kPa,
More preferably, the pressure is 25 to 70 kPa.
When the internal pressure of the source gas in the gas enclosure 11 is extremely low, the concentration of the source gas atoms becomes extremely low, and the interatomic force acting between the atoms is too weak to cause sufficient dimerization, Excimer molecules are difficult to form. Since the excitation level of such an atom is quantized and discontinuous, the emission spectrum becomes a bright line spectrum.

On the other hand, when the internal pressure of the source gas is increased, dimerization occurs due to the action of the atomic force, and excimer molecules are generated. Since the excitation level of the excimer molecule changes continuously between the atomic excitation potential at the point at infinity and the bonding potential of two atoms, the emission spectrum of the excimer molecule is a continuous spectrum. The peak wavelength in the continuous spectrum fluctuates due to the internal pressure of the source gas and the like, for example,
As the internal pressure decreases, the peak wavelength shifts to shorter wavelengths.

In the excimer lamp 1, when the internal pressure of the xenon gas (source gas) is less than 20 kPa, the peak wavelength tends to shift to a shorter wavelength side than the ultraviolet region, but the atomic concentration is reduced. As a result, the decrease in the amount of excimer molecules produced becomes remarkable, and excimer light having a sufficient emission intensity cannot be obtained. Also, the atomic concentration decreases,
The effect of restricting the discharge path by atoms is not effectively exerted, and it tends to be difficult to obtain a stable glow discharge. On the other hand, if the internal pressure is less than 20 kPa, the excimer light output with respect to the input power, that is, the conversion efficiency tends to be not sufficiently increased.

On the other hand, it is preferable to increase the internal pressure of the source gas because the upper limit of the discharge current at which stable glow discharge can be performed gradually increases. This is presumed to be because the increase in the concentration of the raw material gas makes it difficult for the temperature of the cathode 13 to rise even when the discharge current increases, and the threshold value of the discharge current at which thermionic emission occurs shifts to the high current side. Is done. In addition, as the internal pressure increases, the sustain voltage due to the increase in the discharge current is less likely to decrease, and the normal glow discharge tends to be favorably maintained. From these viewpoints, it is determined that the higher the internal pressure of the source gas, the more preferable.

On the other hand, when the internal pressure of the xenon gas (source gas) exceeds 100 kPa, the working distance of the interatomic force is extremely narrowed, and the dimerization of atoms at a low excitation potential becomes remarkable, resulting in an emission spectrum. Tend to shift toward the visible or infrared region. As a result, the emission intensity of ultraviolet light or vacuum ultraviolet light may be reduced. In addition, since the atomic density of the source gas increases, the discharge path is narrowed, and the emission region of excimer light tends to be reduced.
Further, when the internal pressure exceeds 100 kPa, the conversion efficiency to excimer light is significantly reduced. In addition, from the viewpoint of maintaining high conversion efficiency, the internal pressure of the raw material gas is 25 to
More preferably, it is 70 kPa.

Further, since the metal compound layer is provided on the conductor surfaces of the cathode 13 and the anode 14, even if the raw material gas contains a corrosive gas such as a halogen gas, the halogen gas is blocked by the metal compound layer. In addition, the contact between the metal atoms of the conductor and the halogen atoms is sufficiently suppressed. Therefore, it is possible to sufficiently prevent the life from being shortened due to the corrosion of the electrode and to sufficiently prevent the deterioration of the discharge characteristics. Further, when such a metal compound layer is provided on the surface of the cathode 13, the work function of the cathode 13 is reduced, and the electron emission characteristics of the cathode 13 can be improved.

Here, the material for forming the cathode 13 is not particularly limited, and for example, a metal such as molybdenum, iron, nickel, cobalt, copper, tungsten, aluminum, manganese, chromium, platinum, gold, etc. , Or carbon, and alloys thereof may be used.
The material for forming the anode 14 can also include the above metals, their alloys, and carbon. As a material of the metal compound layer covering the surface of the cathode 13 and / or the anode 14 formed of these materials, a material having excellent corrosion resistance to corrosive gas is preferable.
Metal oxide, for example, yttrium oxide (Y ₂ O ₃ ) and the like can be given.

FIG. 2 is a perspective view schematically showing the structure of a light source device according to a second embodiment of the present invention. The excimer lamp 2 shown in FIG. 2 is provided with a reflecting portion 21 capable of reflecting excimer light on the inner surface of the gas sealing container 11 facing the light transmitting window 15. Is the same as the excimer lamp 1 shown in FIG. According to the excimer lamp 2 configured as described above, a part of the excimer light generated inside the gas sealing container 11 is reflected by the reflection part 21 and emitted from the light transmission window 15 to the outside of the gas sealing container 11. You. Therefore, the output of excimer light can be further increased as compared with the excimer lamp 1 shown in FIG.

The reflecting portion 21 is provided along the inner peripheral wall of the gas-filled container 11 having a hollow columnar shape, and has a concave curved inner surface, so that the reflected excimer light is transmitted to the light transmitting window 15. The efficiency of light collection (light collection efficiency) is improved as compared with, for example, a case where the reflection portion is a flat surface. Therefore, the excimer light L emitted from the light transmission window 15 is further multiplied, and the output of the excimer lamp 2 can be further improved.

FIG. 3 is a perspective view schematically showing the structure of a third embodiment of the light source device according to the present invention. The excimer lamp 3 shown in FIG. 3 has an optical lens 31 (for example, a convex lens) having a light transmitting property for the excimer light and a function of condensing the excimer light, instead of the light transmitting window 15. is there. In such an excimer lamp 3, the optical lens 31 is generated inside the gas filled container 11.
Is reached by the optical lens 31 and is emitted to the outside. Therefore, since the excimer light L output from the excimer lamp 3 is condensed with a predetermined focal length, the energy density of the excimer light L at the condensing portion is extremely increased. Therefore, it is possible to obtain the excimer lamp 3 which is extremely suitable for the field of light cleaning or the like that requires a stronger excimer light flux.

FIG. 4 is a perspective view schematically showing the structure of a light source device according to a fourth embodiment of the present invention. FIG. 4 (a) is an overall view of the light source device, and FIG. 4 (b) is a light source. FIG. 3 is a perspective view showing a cathode used in the device. In addition, FIG.
It is a figure which shows the state which looked at the cathode shown in FIG. 4 (a) upside down. As shown in FIG. 4A, the excimer lamp 4 is
One flat cathode 43 is disposed inside the gas enclosure 11 and vertically above three anodes 14 so as to face each other. Thus, in the excimer lamp 4, one cathode 43 and three anodes 14 constitute three electrode pairs.

As shown in FIG. 4B, on the surface 43S of the flat plate portion of the cathode 43 facing the anode 14, a protruding projection 43a is provided at a position substantially facing the respective anodes 14 in the vertical direction. There are a total of three locations. Furthermore, the surface 43 of the cathode 43
Assuming that the area of S is Sc 'and the total area of the surface 14S of the anode 14 is Sa', the following formula (2) is preferably provided between Sc 'and Sa': Sc '>Sa' ... ( The relationship shown in 2) holds.

In the excimer lamp 4 having such a configuration,
The cathode 43 is a common electrode that also serves as a counter electrode for the plurality of anodes 14. Further, the cathode 43 has a flat plate shape,
In comparison with the case where the same number of cathodes are provided as the number of anodes, the electrode interval between the cathode 43 and the anode 14 can be easily set to a constant distance. Therefore, deviation from the set value of the electrode interval hardly occurs, and it is possible to sufficiently prevent the discharge from being concentrated on a certain electrode pair. Therefore, the discharge path of the glow discharge by each electrode pair is ensured in a separated state. As a result, a decrease in the luminous efficiency of the excimer light can be effectively suppressed.

Further, since the number of cathodes to be installed is reduced, the work for installing the cathodes is simplified, and the configuration of the excimer lamp 4 is also simplified, so that the productivity of the excimer lamps 4 is increased. In particular, in the excimer lamp 4, the trouble of arranging a plurality of cathodes on a straight line can be omitted. Moreover, since there is no displacement of the cathode 43 in the parallel direction X, it is possible to further enhance the stability of the glow discharge.

Further, the surface 43S of the flat plate portion of the cathode 43 serves as a substantial cathode, and its area Sc 'is determined by the individual area (Sa) of the surface 14S of the anode 14 facing the cathode 43, and the total value thereof. It becomes easier to make it larger than Sa '. Therefore, the relationship shown in the above equation (2) is easily achieved, so that
The stability of glow discharge is further enhanced. Furthermore, since the same number of protrusions 43a as the number of the anodes 14 are formed on the surface 43S of the cathode 43, three electrode pairs are clearly defined, and discharge locations (three discharge paths) are defined. Therefore, the discharge paths can be more reliably separated. Moreover, the convex portion 4
3a is almost vertically opposed to each anode 14,
The discharge path is more reliably separated. Therefore, a decrease in the luminous efficiency of the excimer light can be sufficiently prevented.

FIG. 5 is a perspective view schematically showing the structure of a fifth embodiment of the light source device according to the present invention. The excimer lamp 5 shown in FIG. 5 is provided with the above-described reflecting portion 21 constituting the excimer lamp 2 shown in FIG. 2 at the same position on the inner surface of the gas sealing container 11 of the excimer lamp 4 shown in FIG. The excimer lamp 2 has high output characteristics and high excimer lamp 4 characteristics such as high stability and high productivity.

FIG. 6 is a perspective view schematically showing the structure of a light source device according to a sixth embodiment of the present invention. The excimer lamp 6 (light source device) shown in FIG. 6 is an optical lens 31 constituting the above-described excimer lamp 3 shown in FIG. 3 instead of the light transmission window 15 of the excimer lamp 4 shown in FIG.
The excimer lamp 4 is provided with the same condensing characteristic of the excimer light L,
It has both high stability and high productivity, which are characteristics of the above.

FIG. 7 is a schematic configuration diagram showing the configuration of a seventh embodiment of the light source device according to the present invention. An excimer light source device 10 (light source device) shown in FIG. 7 includes the above-described excimer lamp 1 as a component, and a DC power supply HV1 is applied to each electrode pair including a cathode 13 and an anode 14 of the excimer lamp 1. (Power supplies) are connected to each other. A limiting resistor R1, a correction resistor R2, and a diode D1 are connected between the DC power supply HV1 and the anode 14 in this order from the anode 14 side. Thus, the limiting resistor R1
And the correction resistor R2 constitute a resistor circuit. The circuits including the respective electrode pairs include start switches SW1, S
The starting circuit 7 is connected to W2 via wiring.

Excimer light source device 1 configured as described above
0, the start switches SW1 and SW2 are closed for a predetermined pair of electrodes while a DC voltage is applied from the DC power supply HV1 to the pair of electrodes, and a start signal from the start circuit 7 (for example, an open voltage or more). The discharge is started by trigger voltage, application of high frequency electric field or magnetic field). Once the discharge is started, the voltage applied by the DC power supply HV1, the resistance of the diode D1, the resistance of the limiting resistor R1, the resistance of the correction resistor R2, the structure or shape of the excimer lamp 1, the cathode 13 and the anode 14 Between the electrodes, the area of the cathode 13, the anode 1
A discharge current determined by the area 4, the type of the source gas, the internal pressure of the source gas, and the like flows, and the glow discharge is maintained.

In the excimer light source device 10, the above conditions are set so that the discharge current is such that the glow discharge can be stably maintained. At this time, the discharge current flowing between the electrodes is on the order of mA, and the discharge current can be stably obtained by the DC power supply HV1 having a maximum voltage of about several hundred volts and the resistor circuit. In other words, by using the resistor circuit, the discharge current can be limited to a good range in which the glow discharge is stably maintained. on the other hand,
The diode D1 prevents a backflow of current, and thereby functions as a discharge current limiting unit. Therefore, by providing these current limiting means, it becomes possible to maintain the glow discharge more stably,
Independent glow discharge paths can be reliably separated for each electrode pair.

Here, the DC power supply HV1 may be a constant voltage power supply or a constant current power supply. When a constant voltage power supply is used, a voltage change due to a voltage drop during discharging is compensated, and a current change at that time can be corrected by the correction resistor R2. On the other hand, when using a constant current power supply,
The voltage fluctuation is compensated by the correction resistor R2.

As described above, the discharge current is determined by affecting a plurality of conditions mutually and in a complicated manner. When xenon gas is used as a raw material gas, the following discharge current is obtained. This is preferable. That is, the internal pressure of the xenon gas is preferably 20 to 100.
kPa, more preferably 25 to 70 kPa, the discharge current is preferably 1 to 15 mA, more preferably 1 to 1 mA.
At 0 mA, excimer light tends to be obtained with high output and high conversion efficiency. When the discharge current is in such a range, the output of the excimer light increases almost linearly with an increase in the discharge current, and the sustain voltage during this time is maintained at a substantially constant value. Therefore, it is considered that the constant voltage characteristics are realized and the normal glow discharge is favorably maintained.

If the discharge current is less than 1 mA, the output of excimer light tends not to be sufficiently increased. on the other hand,
When the discharge current exceeds 15 mA, the drop in the sustain voltage becomes remarkable, and the discharge tends to shift to arc discharge through abnormal glow discharge. As a result, the output of the excimer light becomes saturated, and there is a possibility that the conversion efficiency of the excimer light into excimer light is significantly reduced. In addition, the DC power supply HV1
Is preferably 150 V or more. At this time, it is preferable that the resistance value of the resistance circuit including the limiting resistor R1 and the correction resistor R2 is 1 kΩ or more. If the maximum value of the DC voltage is less than 150 V and the resistance value of the resistor circuit is less than 1 kΩ, it tends to be difficult to stably obtain the suitable discharge current.

FIG. 8 is a schematic configuration diagram showing the configuration of an eighth embodiment of the light source device according to the present invention. In the excimer light source device 20 (light source device) shown in FIG. 8, the limiting resistor R1 and the correction resistor R2 are connected between the cathode 13 and the DC power supply HV1, and the diode D1 is connected between the anode 14 and the DC power supply HV1.
Excimer light source device 1 shown in FIG.
0 has the same configuration. In the excimer light source device 20 thus configured, the excimer light source device 10
Similarly to the above, it is possible to limit the discharge current to a suitable range and stabilize the glow discharge by each electrode pair.

FIG. 9 is a schematic configuration diagram showing the configuration of a ninth embodiment of the light source device according to the present invention. The excimer light source device 30 (light source device) shown in FIG. 9 includes a device having a pulse generation circuit P as the DC power supply HV1, and a pulse voltage is applied to each electrode pair of the excimer lamp 1 by the DC power supply HV1. . Such excimer light source device 3
According to 0, since the voltage applied to the electrode pair is pulse-shaped, the application of the voltage to the electrode pair is a pulse operation, and the luminous efficiency of excimer light is higher than the continuous operation of continuously applying the voltage. And the peak power is increased. Therefore, the output of excimer light from the excimer lamp 1 can be particularly improved.

FIG. 10 shows a tenth embodiment of the light source device according to the present invention.
It is a schematic structure figure showing the composition of an embodiment. The excimer light source device 40 (light source device) shown in FIG. 10 is different from the excimer light source devices 10, 20, and 30 described above in power supply, and an AC power supply HV2 (power supply) is provided for each electrode pair as a power supply. Connected. The electrodes alternate between the cathode 13 and the anode 14 in accordance with the frequency of the AC power supply HV2 (indicated by reference numerals 13 and 14 in the figure), and the electric field applied between the electrodes also changes in accordance with the frequency. Therefore,
Except that the direction of the electric field periodically changes, the same operation as the above-described pulse operation of the excimer light source device 30 is performed, and the output of the excimer light from the excimer lamp 1 is significantly increased. At this time, although a high-frequency electric field is applied to the electrode pair, since there is an electrode discharge by the internal electrodes, there is almost no possibility that strong high-frequency noise is generated unlike an excimer lamp using a conventional dielectric barrier discharge. .

FIG. 11 shows an eleventh embodiment of the light source device according to the present invention.
It is a schematic structure figure showing the composition of an embodiment. The excimer light source device 50 (light source device) shown in FIG.
The excimer lamp 4 shown in FIG. The basic circuit configuration is the same as that of the excimer light source device 10 shown in FIG. 7, except that the starting circuit 7 is connected between the cathode 43, which is a common electrode, and the DC power supply HV1 without using the starting switch SW2. Is different from the excimer light source device 10.

With the excimer light source device 50 having such a configuration, it is possible to maintain a stable glow discharge by good control of the discharge current, similarly to the excimer light source device 10. In addition, since the excimer lamp 4 is used, there is no displacement between the electrodes and no displacement in the parallel direction X of the cathode.
It is possible to further enhance the stability of glow discharge. Further, since a start switch is not required on the cathode 43 side, the configuration can be simplified. Therefore, since the number of parts is reduced and the excimer lamp 4 having excellent productivity is used, the productivity of the excimer light source device 50 can be improved.

FIG. 12 shows a twelfth embodiment of the light source device according to the present invention.
It is a schematic structure figure showing the composition of an embodiment. The excimer light source device 60 (light source device) shown in FIG. 12 has a limiting resistor R1 and a correction resistor R2 connected between the cathode 43 and the DC power supply HV1, and a diode D1 between the anode 14 and the DC power supply HV1.
Has the same configuration as the excimer light source device 50 shown in FIG. In the excimer light source device 20 thus configured, the excimer light source device 5
Similarly to the case of 0, the discharge current is limited to a suitable range, the glow discharge is stabilized by each electrode pair, and the productivity can be improved.

FIG. 13 shows a thirteenth embodiment of the light source device according to the present invention.
It is a schematic structure figure showing the composition of an embodiment. An excimer light source device 70 (light source device) shown in FIG. 13 has a plurality of electrode pairs connected in parallel to one DC power supply HV1, and the excimer lamp 1 shown in FIG. 1 is used as the excimer lamp. Excimer light source device 7 thus configured
0, it is not necessary to provide a start switch between the cathode 13 and the DC power supply HV1, as in the above-described excimer light source devices 50 and 60 having the cathode 43 as a common electrode, and the number of parts is reduced. Is simplified. Further, in the excimer light source device 70, the DC power supply HV1 is single as compared with the case where the DC power supply HV1 is individually connected to each electrode pair as in, for example, the excimer light source device 10 shown in FIG. Therefore, the device configuration can be further simplified.

FIG. 14 shows a fourteenth embodiment of the light source device according to the present invention.
It is a perspective view which shows a part of structure of embodiment. FIG. 15 is a schematic configuration diagram showing a configuration of a fourteenth embodiment of the light source device according to the present invention. As shown in FIG.
The excimer light source device 80 (light source device) uses an excimer lamp 8 (light source device) shown in FIG. 14 as an excimer lamp. The excimer lamp 8 has two types of cathodes and anodes (cathodes 131, 132 and anodes 141, 142). The anodes 141, 142 have limiting resistances R1, R3 indicating different resistance values, and correction indicating different resistance values. The resistors R2 and R4 are connected. The connection positions of the DC power supply HV1, the diode D1, and the starting circuit 7 are the same as those of the excimer light source device 10 shown in FIG.

As shown in FIG. 14, in the excimer lamp 8, the electrode interval between the cathode 132 and the anode 142 constituting the central electrode pair is arranged on both sides of the three electrode pairs arranged in parallel. It is narrower than the electrode interval between the cathode 131 and the anode 141 constituting the electrode pair. Other configurations are the same as those of the excimer lamp 1 shown in FIG. Further, the resistance circuit composed of the limiting resistor R3 and the correction resistor R4 has a larger resistance value than the resistance circuit composed of the limiting resistor R1 and the correction resistor R2.

The excimer light source device 8 configured as described above
According to 0, since the electrode interval of the electrode pair formed by the cathode 132 and the anode 142 in the excimer lamp 8 is narrower than the other electrode pairs, the glow discharge by this electrode pair is lower than that of the other electrode pairs. Can start with voltage. In this case, the periphery of the electrode pair is ionized by the glow discharge, and the startability of another electrode pair in the vicinity of the electrode pair is enhanced, and as a result, the starting voltage of the other electrode can be reduced. Therefore, the startability of the excimer lamp 8 and the excimer light source device 80 can be improved.

FIG. 16 shows a fifteenth embodiment of the light source device according to the present invention.
It is a schematic structure figure showing the composition of an embodiment. An excimer light source device 90 (light source device) shown in FIG. 16 includes pipes 91 a and 91 in the gas filled container 11 of the excimer lamp 1 shown in FIG.
b, 91c, and 95 are connected, and the raw material gas cylinders 92a, 92b, and 92c and the off-gas recovery container 96 are connected to those pipes, respectively. Raw material gas cylinder 9
2a, 92b and 92c are filled with different types of source gases under pressure. Also, the pipes 91a, 91
On and off valves 93a, 93b and 93c are provided on b and 91c, respectively. A pump 98 and on / off valves 97a and 97b are provided on the pipe 95 upstream and downstream of the pump 98, respectively. Also, the on-off valves 93a, 93
b, 93c, 97a, and 97b are electrically connected to a control device 94 for controlling the opening and closing of these.

The excimer light source device 9 configured as described above
In step 0, as a procedure for sealing the raw material gas in the gas sealing container 11, for example, the following method can be mentioned. First, the pump 98 is operated with the on-off valves 97a and 97b open, and the inside of the gas enclosure 11 of the excimer lamp 1 is evacuated. The gas discharged from the gas filling container 11 is stored in an off-gas recovery container. Next, the on-off valves 97a, 9
After closing 7b, the open / close valves 93a, 93b, 93c are opened, and the respective source gases are supplied to the source gas cylinders 92a, 92b, 92b.
From c, the gas is charged into the gas filled container 11 through the pipes 91a, 91b, 91c, and the on-off valves 93a, 93b, 93c are closed. These on-off valves 93a, 93b, 93c, 97a,
The opening and closing of 97 b is performed by an opening and closing signal from the control device 94. Thus, the pipes 91a, 91b, 91c, the raw material gas cylinders 92a, 92b, 92c, and the on-off valve 93
A, 93b, and 93c constitute a source gas supply means, and a pipe 95, open / close valves 97a and 97b, and a pump 98 constitute a discharge means.

Then, the above operation is repeated, and the on-off valve 9 is opened.
By adjusting the opening / closing amount and opening / closing time of the 3a, 93b, 93c, and changing the type of the raw material gas cylinders 92a, 92b, 92c, the components and concentrations of the mixed gas sealed in the gas sealing container 11 are appropriately adjusted. Becomes possible. As described above, according to the excimer light source device 90, the source gas in the gas sealing container 11 can be replaced, and the source gas composed of a desired mixed gas can be sealed in the excimer lamp 1. Therefore, one excimer light source device 90 can extract excimer light having an emission spectrum corresponding to various uses.

In each of the above embodiments, the number of electrode pairs is not limited to three, but may be two or four or more. Further, the shapes of the cathode 13 and the anode 14 need not be rod-shaped (column-shaped), but may be prism-shaped. Further, a cathode 13 and an anode 14
Is installed so that their tips face each other,
It may have a bent part. Furthermore, the cathode 4
As long as 3 has a surface 43S facing the anode 14, the overall shape is not limited to a simple flat plate, but may have a folded structure (or a bent portion). In this case, since the surface area of the cathode 43 is increased and the temperature rise is suppressed, arcing of the discharge is sufficiently suppressed. Furthermore, the gas sealing container 11 does not have to be cylindrical, may be prismatic, and may have a branch pipe or the like. Further, the entire gas sealed container 11 is also suitable as a quartz tube (quartz bulb).

Further, the light transmission window 15 and the optical lens 31 may be provided so as to form a part of the side wall without being provided so as to protrude from the outer wall (side wall) of the gas sealing container 11 to the outside. Is the above-mentioned quartz tube, a part of the side wall of the quartz tube can be used as a light emitting portion. Further, the reflecting portion 21 may be such that a reflective coating having high excimer light reflectance is applied to the inner surface of the gas sealing container 11. Further, the reflecting portion 21 may not be in contact with the inner surface of the gas filled container 11. Furthermore, the excimer light source device 90
Is not always necessary, and the operation of the on-off valve may be performed manually. In addition, in addition to the convex lens, the optical lens 31 may be a concave lens, a cylindrical lens, a fly-eye lens, or the like, and a lens having optical conditions such as a shape and a focal length according to the use can be appropriately selected. Yes, they can be used alone or in combination.

It is also preferable that the structure of the cathode and / or the anode is a heat pipe structure and the cathode and / or the anode are cooled actively. By doing so, the temperature rise of the electrode is further suppressed, and arcing of the discharge can be further suppressed. Further, only a part of the plurality of electrode pairs may be started to cause glow discharge. In this way, a dimming effect can be obtained, and a desired excimer light irradiation density can be obtained by appropriately selecting the number of electrode pairs to be driven and the position of the driven electrode pairs. In addition,
A self-diagnosis function for detecting a circuit including an electrode pair for which glow discharge is not performed during operation (that is, a non-lighting circuit);
It is preferable to provide a unit capable of restarting.
With the provision of such means, the reliability of the light source device can be improved. In this case, the starting circuit 7 may have such a self-diagnosis function. Further, a gas component such as a quenching gas (quenching gas) or a luminescence promoting gas may be added to the source gas.

The light source device according to the present invention is preferably used for compound synthesis or decomposition by various chemical reactions using excimer light, a light source for semiconductor exposure, a light knife for biochemistry, a light source for solar simulation in the field of space chemistry. And the like.

[0074]

The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.

Example 1 One molybdenum plate 3 mm wide × 3.2 mm long × 0.15 mm thick was used as a cathode, three nickel pins 1.0 mm in diameter were used as an anode, and a light emitting portion was used. A synthetic quartz plate having a thickness of 1 mm is used as a light transmitting window to be formed. Xenon gas as a raw material gas is supplied inside the sealed body at an internal pressure of 700 torr (93.
3 kPa) to produce an excimer lamp 4 shown in FIG. The distance between the cathode and the anode (electrode distance) was 3 mm. When a DC voltage was applied to the electrodes of the excimer lamp 4 from a constant voltage power supply, glow discharge was started by each electrode pair, and it was visually confirmed that three discharge paths were maintained in a separated state.

<Spectral Spectrum Measurement> The discharge current flowing between the electrodes of the excimer lamp 4 obtained in Example 1 was 3 mA.
In a state where the glow discharge was performed, the spectral spectrum of the excimer light emitted from the light transmission window was measured using a phototube (manufactured by Hamamatsu Photonics KK, product name: R1220) and a spectrometer installed in a vacuum chamber. . The result is shown in FIG. From FIG. 17, the excimer lamp 4 has a peak near the wavelength of 175 nm, and has a half width (FW).
It was confirmed that an excimer light having a continuous spectrum in a vacuum ultraviolet region having an HM) of about 20 nm was output. In the figures, "au" represents an arbitrary unit (arbitrary unit), and indicates that the data value plotted on the graph is a relative value (the same applies hereinafter).

<Measurement of Discharge Current-Excimer Light Output Characteristics>
The excimer light output at a wavelength of 172 nm was measured when the discharge current flowing between the electrodes of the excimer lamp 4 obtained in Example 1 was changed in the range of 2 to 50 mA. FIG. 18 shows a change in the relative output of the excimer light with respect to the discharge current. From FIG. 18, the output of excimer light increases almost linearly with an increase in discharge current up to a discharge current of about 15 mA. In the range of 2 to 10 mA, this tendency is particularly high and excellent linearity is obtained. Understand. That is, in this region, it was confirmed that stable glow discharge was maintained and the output of excimer light could be controlled well. In contrast, when the discharge current exceeded approximately 15 mA, it was confirmed that the output of excimer light was saturated. That is, in this area,
It is understood that even if the current is increased to increase the input power, it is difficult to increase the output of the excimer light, and the conversion efficiency of the input power to the excimer light decreases.

When the sustaining voltage during discharge was measured at the same time, the sustaining voltage was kept almost constant in the region where the discharge current was up to 15 mA. Negative characteristic).
From this, it is determined that when the discharge current exceeds approximately 15 mA, the glow discharge shifts from a normal glow discharge to an arc discharge through an abnormal glow discharge. From the above results, the excimer lamp 4 has a discharge current region where the glow discharge is stably maintained, and the range of the discharge current is about 1
It was found that the width was a little over 0 mA, and the width was large enough to sufficiently control the output of excimer light. From this, it was confirmed that according to the light source device of the present invention, the glow discharge can be favorably maintained, and a sufficiently stable operation can be performed.

Example 2 0.7 mm in diameter as a cathode
1.0mm diameter as anode using three Kovar pins
A 1 mm thick synthetic quartz plate is used as a light transmitting window for forming a light emitting portion using three nickel pins having a diameter of φ, and xenon gas as a raw material gas is supplied inside the sealed body at an internal pressure of 93.3 kPa. (700 torr) to produce the excimer lamp 1 shown in FIG. The distance between the electrodes was 3.5 mm, and the distance between the electrode pairs was 3 mm.
When a constant-voltage DC power supply was connected to the electrode pair of the excimer lamp 1 via a limiting resistor having a resistance value of 151 kΩ and a DC voltage was applied, glow discharge by each electrode pair was started,
It was visually confirmed that the three discharge paths were maintained in a separated state.

Example 3 An excimer lamp 1 shown in FIG. 1 was produced in the same manner as in Example 2 except that the electrode interval was 5 mm. When a constant-voltage DC power supply was connected to the electrode pair of the excimer lamp 1 via a limiting resistor having a resistance value of 151 kΩ and a DC voltage was applied, glow discharge was started by each electrode pair, and the excimer lamp obtained in Example 2 was obtained. 1
Similarly to the above, it was visually confirmed that the three discharge paths were maintained in a separated state.

<Measurement of Excimer Light Output> The discharge current flowing through the electrode pair of the excimer lamp 1 obtained in the above Examples 2 and 3 was changed to 0.5 to 2 mA (0.5 mA interval) to perform glow discharge. In this state, the output of the excimer light emitted from the light transmission window was measured using a photoelectric tube (manufactured by Hamamatsu Photonics KK, product name: R4044) installed in a vacuum chamber. The measurement was performed for a case where glow discharge was performed for each electrode pair and a case where glow discharge was performed for three electrode pairs simultaneously. The output change of the excimer light with respect to the discharge current is shown in FIGS.
(Excimer lamp of Example 3).

In FIG. 19, the data connected by the polygonal lines L1, L2, and L3 indicate the electrode pair closest to the light transmission window and the center at the center in the parallel direction in the excimer lamp 1 obtained in Example 2. FIG. 5 shows measured values of excimer light output from the pair of electrodes and the electrode pair furthest from the light transmission window. The data connected by the straight line L4 indicates the output of excimer light when glow discharge is simultaneously generated by three pairs of electrodes. Similarly, in FIG. 20, broken lines L5, L6,
The data linked by L7 are respectively the electrode pair closest to the light transmission window, the electrode pair located at the center in the parallel direction, and the position farthest from the light transmission window in the excimer lamp 1 obtained in Example 3. 3 shows the measured values of the excimer light output from the pair of electrodes. The data connected by the broken line L8 is
The output of excimer light when glow discharge is simultaneously generated by three pairs of electrodes is shown.

As shown in FIGS. 19 and 20, in the excimer lamp 1 which is the light source device of the present invention, the output of the excimer light emitted from the light transmitting window on the extension of the electrode pair arranged in parallel in the parallel direction is shown in FIG. Is approximately equal to the sum of the excimer light output by the glow discharge of each electrode pair. From this, it was confirmed that according to the light source device of the present invention, the excimer light emitted by the glow discharge by each electrode pair was emitted from the light emitting portion in a state of being superimposed and multiplied.

<Example 4> One light-emitting portion was formed by using one molybdenum plate having a width of 7.8 mm × length 9.8 mm × thickness 0.3 mm as a cathode, three Kovar pins having a diameter of 0.7 mm φ as an anode. A 1 mm thick synthetic quartz plate is used as a light transmission window for forming a xenon gas as a raw material gas, and an internal pressure of 50 to 1000 torr is applied inside the sealed body.
(6.7 to 133 kPa) (every 50 torr), and a plurality of excimer lamps 4 having the shape shown in FIG. The electrode interval was 2 mm.

<Measurement of Internal Pressure-Excimer Light Output Characteristics of Source Gas> A constant-voltage DC power supply was connected to the electrode pair of each excimer lamp 4 obtained in the above Example 4 via a limiting resistor having a resistance value of 50 kΩ. The glow discharge was generated by changing the discharge current between 1 and 10 mA. The output of the excimer light output in this state is output to a photoelectric tube (manufactured by Hamamatsu Photonics KK, product name: R4044) installed in a vacuum chamber.
It measured using. The results are shown in FIG. FIG. 21 is a graph showing the excimer light output characteristics of the excimer lamp 4 obtained in Example 4 with respect to the internal pressure of the source gas. The change in the value shows that the curve L10
5 shows a change in conversion efficiency with respect to the internal pressure of the source gas.

Here, the “conversion efficiency” was obtained by dividing the measured value of the output voltage value (mV) of the phototube at the time when the excimer light output became maximum by the input power (W) at that time. The value is shown as a relative value in FIG. According to FIG. 21, the internal pressure of xenon gas (source gas) is about 8
When the pressure exceeds 0 kPa (about 600 torr), the maximum value of the excimer light output tends to gradually increase. However, when the internal pressure is about 13.3 kPa (about 100 torr) or more, the output of the excimer light is at a substantially constant level ( 45-55
au).

The internal pressure of xenon gas is about 20 to
When the pressure is in the range of 100 kPa (about 150 to 750 torr), the conversion efficiency becomes relatively high. When the internal pressure is about 25 to 70 kPa (about 190 to 530 torr), the conversion efficiency is further increased. . From this, from the viewpoint of maintaining high conversion efficiency, it was confirmed that the internal pressure of the raw material gas was preferably 20 to 100 kPa, more preferably 25 to 70 kPa.

[0088]

As described above, according to the present invention,
The emission intensity of the excimer light and the emission efficiency to the outside can be increased to achieve high output, and the discharge (glow discharge) state can be stabilized to achieve a sufficiently stable operation. It is possible to obtain a light source device that cannot be a high-frequency noise source that causes the light source device.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a structure of a first embodiment of a light source device according to the present invention.

FIG. 2 is a perspective view schematically showing a structure of a light source device according to a second embodiment of the present invention.

FIG. 3 is a perspective view schematically showing a structure of a third embodiment of the light source device according to the present invention.

FIG. 4 is a perspective view schematically showing a structure of a light source device according to a fourth embodiment of the present invention. FIG. 4 (a) is an overall view of the light source device, and FIG. FIG.

FIG. 5 is a perspective view schematically showing a structure of a light source device according to a fifth embodiment of the present invention.

FIG. 6 is a perspective view schematically showing a structure of a light source device according to a sixth embodiment of the present invention.

FIG. 7 is a schematic configuration diagram illustrating a configuration of a seventh embodiment of a light source device according to the present invention.

FIG. 8 is a schematic configuration diagram showing a configuration of an eighth embodiment of the light source device according to the present invention.

FIG. 9 is a schematic configuration diagram showing a configuration of a ninth embodiment of a light source device according to the present invention.

FIG. 10 is a schematic configuration diagram showing a configuration of a tenth embodiment of a light source device according to the present invention.

FIG. 11 is a schematic configuration diagram showing a configuration of an eleventh embodiment of a light source device according to the present invention.

FIG. 12 is a schematic configuration diagram showing a configuration of a twelfth embodiment of a light source device according to the present invention.

FIG. 13 is a schematic configuration diagram showing a configuration of a light source device according to a thirteenth embodiment of the present invention.

FIG. 14 is a perspective view schematically showing a part of the structure of a light source device according to a fourteenth embodiment of the present invention.

FIG. 15 is a schematic configuration diagram showing a configuration of a fourteenth embodiment of a light source device according to the present invention.

FIG. 16 is a schematic configuration diagram showing a configuration of a fifteenth embodiment of the light source device according to the present invention.

FIG. 17 is a graph showing a spectrum of excimer light output from the excimer lamp of Example 1.

FIG. 18 is a graph showing a change in relative output of excimer light with respect to a discharge current in the excimer lamp of Example 1.

FIG. 19 is a graph showing a change in output of excimer light with respect to a discharge current in the excimer lamp of Example 2.

FIG. 20 is a graph showing a change in output of excimer light with respect to a discharge current in the excimer lamp of Example 3.

FIG. 21 is a graph showing excimer light output characteristics with respect to a source gas internal pressure of the excimer lamp of Example 4.

[Explanation of symbols]

1,2,3,4,5,6,8 ... Excimer lamp (light source device), 10,20,30,40,50,60,70,8
0, 90: Excimer light source device (light source device), 11: Gas filled container (sealing body), 13, 43, 131, 132: Cathode, 14, 141, 142: Anode, 15: Light transmission window (light emitting portion) , 21 ... Reflection part, 31 ... Optical lens (light emitting part), 43a ... Convex part, D1 ... Diode, G1 ... Electrode spacing, HV1 ... DC power supply (power supply), HV2 ... AC power supply (power supply), L ... Excimer light (Spontaneous radiation), P: pulse generation circuit, R1, R3: limiting resistor (resistance circuit), R2, R4
... Correction resistance (resistance circuit), Sa: anode area, Sc: cathode area, X: parallel direction of electrode pairs.

Claims (9)

[Claims] 1. A light source device for ionizing a source gas for generating excimer molecules by glow discharge and extracting spontaneous radiation emitted from the excimer molecules, wherein the source gas is sealed and the spontaneous radiation A sealing body provided with a light emitting portion having a light-transmitting property, at least one cathode linearly arranged inside the sealing body, and inside the sealing body so as to face the cathode. A light source device comprising: at least two electrode pairs each including at least two disposed anodes; and the light emitting unit is provided on an extension of the electrode pairs in a parallel direction. 2. A power supply for applying a voltage to each of the electrode pairs; and a power supply connected between the power supply and at least one of the anode and the cathode, wherein the electrode pairs are connected when the glow discharge is performed. A resistor circuit for limiting the current flowing through
The light source device according to claim 1, further comprising: 3. connected between the power supply and the anode,
The light source device according to claim 2, further comprising a diode that limits a current flowing through the electrode pair when the glow discharge is performed. 4. The light source device according to claim 2, wherein the power supply is a DC power supply that applies a pulse voltage to the electrode pair. 5. The light-emitting device according to claim 1, wherein a reflection portion for reflecting the spontaneously emitted light is provided at a position inside the envelope facing the light emission portion. Light source device. 6. The raw material gas contains at least one of a rare gas, a rare gas halide, and a nitrogen gas, and at least one of a hydrogen isotope gas, a halogen gas, and a mercury vapor. The light source device according to claim 1, wherein the light source device is a mixed gas. 7. The cathode according to claim 1, wherein a projection is formed at a portion facing the anode.
The light source device according to any one of claims 1 to 6. 8. The light source device according to claim 1, wherein the cathode and / or the anode are provided with a metal compound layer on a surface. 9. An electrode pair in which at least one electrode pair has a smaller electrode interval and a larger resistance value of the connected resistance circuit than other electrode pairs different from the electrode pair. The light source device according to any one of claims 2 to 8, wherein