JP2001176042A - Head slider, disk drive device and method of working head slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a head slider in which the infiltration of foreign matter, etc., between a recording medium surface and an opposing surfaces of a head slider facing the same is suppressed and the degradation in flying height and the unstability of floating can be suppressed, a disk drive device having the head slider, and a method for working the head slider. SOLUTION: The opposing surfaces of the head slider 10 comprise a pressure working surface sections consisting of first and second rail surfaces 11 and 12 and first and second step surfaces 13 and 14 being plural surfaces having level differences which receive a floating pressure and on which the negative pressure reverse from the floating pressure acts and a base surface 1 which has a level difference from the second step surface 14 constituting the peripheral edge of the pressure working surface section and is arranged around the pressure working surface sections. The contour shape of the peripheral edge of the pressure working surface section heading toward the air flow flowing between the base surface 15 and the recording medium surface is a curve projecting toward the inflow direction F.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for recording and reproducing information by rotating a disk-shaped recording medium, for example.
Applied to disk drive devices such as magnetic disk devices, optical disk devices, magneto-optical disk devices, etc.
The present invention relates to a head slider on which a reproducing head is mounted and which floats on the surface of a moving recording medium, a disk drive device provided with the head slider, and a head slider processing method.

[0002]

2. Description of the Related Art In a magnetic disk device called a so-called hard disk drive, an electromagnetic transducer for recording and reproducing information between the surface of a magnetic disk as a recording medium (information recording / reproducing surface) and the magnetic disk. In order to avoid abrasion damage due to contact with the magnetic head, the magnetic head is generally mounted on a head slider that floats from the surface of a rotating magnetic disk, and records and reproduces information in a non-contact manner. That is, on the surface of the head slider facing the magnetic disk, a rail for receiving a levitation force (pressure) from an air flow generated when the magnetic disk is rotated is formed, so that the magnetic head together with the slider is smaller than the surface of the magnetic disk. The system is designed to levitate with the flying height.
The flying height is, for example, 0.03 μm in a magnetic disk drive currently on the market.
On the research level, 0.02 μm has already been realized.

[0003]

By the way, in the conventional magnetic disk drive, dust invades between the surface of the magnetic disk and the flying surface of the head slider.
There has been a problem that the flying height of the head slider may be reduced or the flying may become unstable. In particular, in a so-called removable type magnetic disk device in which a magnetic disk is housed in a cartridge and the magnetic disk device is made detachable, since the magnetic disk device has an opening to the outside, dust easily enters the inside of the device, and magnetic Dust easily penetrates between the disk surface and the flying surface of the head slider, and the above-described problem tends to occur.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problem, and foreign matter such as dust is prevented from entering between a recording medium surface and a facing surface of a head slider facing the recording medium. It is an object of the present invention to provide a head slider capable of suppressing a decrease in flying height or unstable flying with respect to the surface of a recording medium, a disk drive device provided with the head slider, and a method of processing the head slider.

[0005]

A head slider according to the present invention is provided with a head for reproducing at least one of data recorded on a recording medium and recording data on the recording surface, and is opposed to the surface of the recording medium. A head slider that floats from the recording medium surface by an air flow generated by the movement of the recording medium flowing between the opposing surface and the recording medium surface, wherein the opposing surface has at least a part thereof. Receiving a pressure floating from the surface of the recording medium from the air flow, and a pressure acting surface portion comprising a plurality of surfaces having a step where a negative pressure acts in at least a part opposite to the pressure floating, The pressure acting surface portion has a step with respect to a surface constituting a peripheral portion thereof, and comprises a base surface disposed around the pressure acting surface portion, wherein the base surface and the recording medium surface Contour of the periphery of the pressure action surface towards the air flow entering is a convex curve with respect to the inflow direction between.

Preferably, the base surface is located at a height substantially free from pressure from the air flow with respect to a surface constituting a peripheral portion of the pressure acting surface portion facing the air flow.

[0007] More preferably, the height of the pressure acting surface portion of the base surface with respect to the surface constituting the peripheral portion facing the air flow is sufficiently larger than the step between the plurality of surfaces in the pressure acting surface portion.

[0008] A disk drive device of the present invention comprises: a rotary drive means for rotating a disk-shaped recording medium; and at least one of reproducing data recorded on a recording surface of the recording medium or recording data on the recording surface. And a recording medium surface by an air flow generated by the movement of the recording medium flowing between the facing surface, which is mounted to face the recording medium surface, and the recording medium surface. A head slider floating from the
The opposing surface of the head slider receives, at least in part, a pressure that floats from the airflow to the surface of the recording medium, and a step in which a negative pressure acts on at least partly in a direction opposite to the pressure that floats. A pressure acting surface portion composed of a plurality of surfaces having a step having a step between a surface constituting a peripheral portion of the pressure acting surface portion, and a base surface disposed around the pressure acting surface portion; The contour shape of the peripheral portion of the pressure acting surface toward the airflow flowing between the base surface and the surface of the recording medium is a convex curve with respect to the inflow direction.

In the head slider processing method according to the present invention, the opposing surface opposed to the surface of the recording medium receives a pressure floating from the surface of the recording medium from an airflow generated by movement of the recording medium. A first step surface which is adjacent to the rail surface and has a step with respect to the rail surface, and at least partially receives the floating pressure; and has a step with respect to the first step surface. A second step surface having a region in which a negative pressure in the opposite direction to the floating pressure acts on at least a part thereof, and a step sufficiently larger than each of the steps with respect to the second step surface; A head slider having a base surface substantially free from pressure from the inflowing air flow, wherein one surface of a member constituting the head slider is selectively removed using first removing means. Serial rail surfaces, and sequentially forming a first step surface and the second step surface, the second
Selectively removing the stepped surface using a second removing means to form the base surface, wherein the first removing means includes a boundary between a removed area and a non-removed area. And a removing unit having a relatively higher removal rate than the first removing unit is used as the second removing unit.

According to the present invention, a pressure acting surface portion is formed in an opposing surface of the head slider facing the recording medium surface, and a peripheral portion of the pressure acting surface portion facing the airflow flowing from the inflow end of the opposing surface is formed. The contour shape is constituted by a convex curve with respect to this air flow. That is, in the present invention, the opposing surface of the head slider, which is arranged to face the recording medium surface,
It receives pressure from the airflow flowing between the opposing surface and the surface of the recording medium, and the pressure acting surface portion that controls the flying characteristics of the head slider. It is divided into a base surface having little influence, and a contour shape of a peripheral portion on the front side in the inflow direction of the pressure acting surface portion is formed by a curve which is convex with respect to the air flow. For this reason, foreign matter such as dust mixed in the airflow flowing from the inflow end of the opposing surface is pushed to the side of the pressure acting surface by the action of the peripheral edge of the pressure acting surface to affect the flying characteristics of the head slider. It is easy to flow between the base surface and the recording medium surface, and it is difficult to enter the pressure acting surface portion. By this action, the amount of foreign matter such as dust adhered to each surface receiving the floating pressure or negative pressure formed in the pressure acting surface portion is suppressed.

Further, the base surface is formed so as not to receive substantially pressure from the inflowing air flow, so that foreign matter such as dust mixed in the inflowing air flow from the inflow end of the base surface is reduced. Further, it becomes easier to move to the side of the pressure acting surface portion, and the amount of foreign matter such as dust adhered to each surface receiving the floating pressure or negative pressure formed in the pressure acting surface portion is further suppressed.

Further, according to the head slider processing method of the present invention, the rail surface which governs the flying characteristics of the head slider,
The processing of the first and second step surfaces has high accuracy,
For example, using a removing means such as an ion etching method to process a base surface which is a region having little effect on the flying characteristics of the head slider, a high removal rate, for example,
By using a removing means such as a sandblast method, a head slider having desired flying characteristics can be formed, and the processing efficiency of the head slider can be improved.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. First Embodiment FIG. 1 is a perspective view showing an example of a disk drive device to which the present invention is applied. The disk drive device shown in FIG. 1 is, for example, a card-type magnetic disk device built in a computer or the like. A magnetic disk drive 1 shown in FIG. 1 includes a chassis 3, a top cover 2 covering the chassis 3, a spindle motor 4 disposed on the chassis 3, and a magnetic disk as a recording medium rotationally driven by the spindle motor 4. 5, an actuator 6 arranged on the chassis 3, a suspension 8 connected to the actuator 6, and a head slider 10 mounted with a magnetic head held at the tip of the suspension 8.

The magnetic disk 5 is fixed to a spindle motor 4, and the magnetic disk 5 is
Drives at a predetermined rotational speed, for example, 2700 rpm
Rotate about m. The diameter of the magnetic disk 5 is, for example, 1.8 inches. Rotating magnetic disk 5
As shown in FIG. 2, the head slider 10 facing the surface of the magnetic disk 5 flies above the surface of the magnetic disk 5 by an air flow generated by the movement of the magnetic disk 5. The flying height of the head slider 10 is adjusted to a predetermined value by a balance between the pressure received from the air flow and the pressing force from the suspension 8, and is, for example, about 20 nm. The pressing load of the suspension 8 is, for example, about 3 gf. On the other hand, the actuator 6
Is rotated in the direction of arrow R3, and the head slider 10 held at the tip of the actuator 6 is
Move almost radially. By positioning the magnetic head mounted on the head slider 10 with respect to a desired track on the magnetic disk 5, the magnetic head records information on the magnetic disk 5 and reproduces information recorded on the magnetic disk 5. .

[0015] diagram 3 of the head slider is a perspective view showing the configuration of the opposite side which faces the magnetic disk 5 of the head slider according to an embodiment of the present invention, the opposite of the head slider 4 is shown in FIG. 3 It is a top view on the surface side. In FIG. 3, the arrow F indicates the inflow direction of the air flow. The opposing surface of the head slider 10 that faces the magnetic disk 5 includes a first rail surface 11, a second rail surface 12, a first step surface 13, a second step surface 14, and a base surface 15. The first and second rail surfaces 11 and 12, the first and second step surfaces 13 and 14, and the base surface 15 are integrally formed. Here, the first and second rail surfaces 11, 1
2 and the first and second step surfaces 13 and 14 constitute the pressure acting surface portion of the present invention, and the base surface 15 constitutes the base surface of the present invention.

First rail surface 11 and second rail surface 1
2 has the same height and protrudes from the first step surface 13. The first rail surface 11 and the second rail surface 12 receive a pressure that floats on the surface of the magnetic disk 5 from the airflow flowing in the inflow direction F between the base surface 15 and the magnetic disk 5.

The first rail surface 11 is formed over substantially the entire width of the base surface 15 in a direction transverse to the inflow direction F, and both sides of the rear end of the inflow direction F extend rearward. . In addition, a peripheral portion 11a of the first rail surface 11 in the inflow direction F is formed of a continuous curve that is convex with respect to the inflow direction F.

The second rail surface 12 is a first rail surface 1
Both rear end portions of the rear end portion 1 are arranged between portions extending rearward, and extend in the inflow direction F. Further, the second rail surface 12 has an asymmetrical contour shape with respect to the center line of the inflow direction F of the facing surface of the head slider 10, and the outflow end of the air flow of the second rail surface 12 is For example, it is located forward by about 15 μm in the outflow direction F from the outflow end 15c of the ten opposing surfaces (base surface 15). A magnetic head 17 for reproducing information recorded on the magnetic disk 5 and / or recording information on the magnetic disk 5 is provided at an outflow end of the airflow on the second rail surface 12.

The first step surface 13 is formed around the first rail surface 11 and the second rail surface 12, and air flowing from the inflow direction F between the base surface 15 and the magnetic disk 5. From the flow, a pressure is generated that flies against the surface of the magnetic disk 5. The front area of the first rail surface 11 toward the inflow direction F of the first step surface 13 is maximized with respect to the width of the head slider 10 in the direction crossing the inflow direction F. Further, the contour shape of the peripheral portion 13 a in the front area of the first rail surface 11 in the inflow direction F of the first step surface 13 is formed by a continuous curve convex in the inflow direction F. In addition, the area of the first step surface 13 arranged around the second rail surface has an increased width along the inflow direction F. Also, the first step surface 13 and the first
And the step between second rail surfaces 11 and 12 is, for example, on the order of 0.1 μm to 1.0 μm.

Further, the position of the peripheral portion 13a of the first step surface 13 facing the inflow direction F is determined by the position of the head slider 1
It is preferable to dispose it at a position as close as possible to the inflow end of the opposing surface of zero. By arranging the position of the peripheral portion 13a of the first step surface 13 facing the inflow direction F as close as possible to the inflow end of the facing surface of the head slider 10, the floating pressure of the first step surface 13 can be reduced. This is for maximizing the working area and effectively using the entire opposing surface of the head slider 10.

The second step surface 14 has a step with respect to the first step surface 13, and the overall contour of the outer peripheral edge 14 a of the second step surface 14 is substantially elliptical. It has become. The level difference between the second step surface 14 and the first step surface 13 is, for example, about 3 μm. The negative pressure generated in the air flow due to the shape of the first rail surface 11 and the first step surface 13 acts on the negative pressure action region 16 of the second step surface 14. This negative pressure is a pressure that causes the head slider 10 to face the magnetic disk 5. The negative pressure action area 16 is provided on the first rail surface 11.
In addition, the first step surface 13 is formed symmetrically to the rear of the region arranged around the first rail surface 11 in the inflow direction F. The negative pressure generated in the negative pressure action region 16 acts so that the opposing surface of the head slider 10 does not float more than necessary from the surface of the magnetic disk 5, so that the floating amount of the head slider 10 can be optimized. Can be

The second step surface 14 is formed on the rear end side along the inflow direction F from the viewpoint of reducing the resistance of the airflow.
The width is narrowed. Inflow direction F of second step surface 14
Is located at a position as close as possible to the peripheral edges 15b on both sides along the inflow direction F of the base surface 15, and the minimum distance between the peripheral edge 14a and the peripheral edge 15b of the base surface 15 is small. The distance d is, for example, about 50 μm. As will be described later, since a plurality of head sliders 10 are processed at the same time, the peripheral portion 14a of the second step surface 14 and the peripheral portion 15b of the base surface 15 are taken into consideration in consideration of workability.
It is necessary to keep a certain distance between them. Therefore, the maximum width of the peripheral portion 14a of the second step surface 14 in the direction crossing the air flow is maximized with respect to the width of the base surface 15 while securing the above-mentioned processing margin.

Further, the contour of the peripheral edge portion 14a of the second step surface 14 in the inflow direction F is a continuous curve that is convex in the inflow direction F. The distance between the peripheral edge portion 14a in the inflow direction F and the peripheral edge portion 13a of the first step surface 13 adjacent thereto is, for example, 5 μm.
m, which is a value in consideration of a processing margin such as a mask shift when performing a process of digging the base surface 15 with respect to the second step surface 14.

The above-described first and second rail surfaces 11,
12 and the first and second step surfaces 13 and 14
It receives a pressure and a negative pressure that float from the airflow flowing between the opposing surface of the head slider 10 and the surface of the magnetic disk 5 and constitutes a pressure acting surface that substantially governs the flying characteristics of the head slider 10. . On the other hand, the base surface 15 does not substantially affect the flying of the head slider 10. The outer shape of the base surface 15 is rectangular, and has a step with respect to the second step surface 14. The step between the base surface 15 and the second step surface 14 is not particularly limited, but as described later, the first and second rail surfaces 11 and 12 and the first and second step surfaces 13 and From the viewpoint of suppressing the intrusion of dust into the first and second rail surfaces 11, 12 and the first step surface 13, or between the first and second step surfaces 13, 12. Preferably, it is sufficiently larger than the step between the surface 14. On the other hand, if the step between the base surface 15 and the second step surface 14 is too large,
Since it takes a lot of time to dig down the base surface 15, it is preferably, for example, about 30 μm.

FIG. 5 is a diagram simulating the distribution of the pressure generated on the facing surface of the head slider 10 having the above configuration. The head slider 10 is arranged at a radial position of 16.1 mm on the magnetic disk 5 and the skew angle of the head slider 10 is 4.9 degrees.

Here, the skew angle will be described. As shown in FIG. 6, the head slider 10 is moved and positioned substantially in the radial direction of the magnetic disk 5 around the rotation center O ₁ of the actuator of the magnetic disk 5. For example,
When the head slider 10 moves from the position of the radius r ₁ from the rotation center O of the magnetic disk 5 to a position of the radius r ₂ on the outer peripheral side of the magnetic disk 5 from this position, the position of the head slider 10 at the radius r ₁ radius r the angle between the center line CT tangent Tg1 and the head slider 10 of the _second circumferential C1 is theta _1, and the tangent Tg2 and head circumference C2 at the position of the head slider 10 which has moved to the radius r ₂ in Unlike each angle between the center line CT of the slider 10 and theta _2, the angles θ _1, θ ₂ is called skew angle. This skew angle changes according to the movement of the head slider 10 on the inner and outer circumferences of the magnetic disk 5. That is, the inflow direction F of the airflow into the head slider 10 changes according to the change in the skew angle.

As shown in FIG. 5, the first and second rail surfaces 11, 12 and the first and second step surfaces 1
It can be seen that a positive pressure is acting on 3, 14 and a negative pressure is acting on the negative pressure acting region 16. Also, the second rail surface 1
It can be seen that a very large positive pressure acts on the outflow end of No. 2, ie, near the mounting position of the magnetic head 17.
Further, it can be seen that almost no pressure acts on the base surface 16. Therefore, the first and second rail surfaces 11 and 12 and the first and second step surfaces 13 and 14 are formed by the airflow flowing between the facing surface of the head slider 10 and the surface of the magnetic disk 5. Receives a pressure (positive pressure) and a negative pressure floating from the head slider 10, and constitutes a pressure acting surface that substantially controls the flying characteristics of the head slider 10. The base surface 15 substantially affects the floating of the head slider 10. It can be seen that a surface that does not give a value is formed.

Also, the first rail surface 11, the first step surface 13 adjacent to the first rail surface 11, and the second
By maximizing the step surface 14 of the head slider 10 with respect to the width of the facing surface of the head slider 10, the positive pressure acting region can be formed substantially in the entire width direction of the facing surface of the head slider 10. 10, the rigidity in the direction of inclination around the center line along the inflow direction of the head slider 10 can be improved.

Next, a method of processing the facing surface of the head slider 10 having the above-described structure will be described. The material for forming the head slider 10 is, for example, alumina titanium carbide (AlTi).
A ceramic material such as C) is used. The head sliders 10 can be processed individually, but for example, by forming a plurality of head sliders 10 on one plate and cutting out each head slider 10, productivity can be increased. .

First, one surface of the member constituting the head slider 10 (the surface facing the magnetic disk surface) is polished to a smooth surface. This smooth surface becomes the first rail surface 11 and the second rail surface 12.

Next, the first rail surface 11 and the second rail surface 11 are placed on a smooth surface processed into a member constituting the head slider 10.
For example, a resist film having the contour shape of the rail surface 12 is formed. Using this resist film as a mask, the smooth surface of the member constituting the head slider 10 is selectively etched to dig down a predetermined depth. This etching is
For example, this is performed using a reactive ion etching (RIE) apparatus.

The reactive ion etching apparatus is a dry etching apparatus using reactive gas plasma, and performs etching by placing a member constituting the head slider 10 on an electrode provided in an etching chamber. The members constituting the head slider 10 are etched by a synergistic effect of the neutral active species and the reactive gas ions. As described above, by etching using the reactive ion etching apparatus, the etched surface of the member constituting the head slider 10 is smooth and the first rail surface 11
And the contour shape of the second rail surface 12 is also very accurate. A part of the etched surface of the member constituting the head slider 10 is the first step surface 1
It becomes 3.

Next, on the dug-down surface, the first
A resist film having substantially the same contour as the step surface 13 is formed. The resist film is formed in consideration of a mask shift. Using a reactive ion etching apparatus, the machined surface that has been machined down during the machining of the first rail surface 11 and the second rail surface 12 is similarly machined down to a predetermined depth. Thus, a first step surface 13 having a predetermined contour is formed. A part of the machined surface formed at the time of digging down the first step surface 13 becomes the second step surface 14.

A resist film having substantially the same contour as that of the second step surface 14 is formed on the processed surface formed during the digging process of the first step surface 13, and this is used as a mask to form the first step surface 13. The processing surface formed at the time of digging is selectively removed to form a second step surface 14 and a base surface 15 having a predetermined contour shape. In this processing, the processing surface at the time of forming the first step surface 13 is dug down by a high removal rate, for example, by sandblasting. As described above, the second step surface 14
Step between the first step surface 13 and the second step surface 14 is sufficiently larger than the step between the first step surface 13 and the second step surface 14.
For example, if processing is performed by ion etching, the time required for processing becomes long, which is not practical. Sandblasting, for example, emits fine particles formed of a material such as silicon oxide to a surface to be processed and removes the surface to be processed.
When processed by sandblasting, the removal rate is much higher than in ion etching, but the processed surface is rougher than in ion etching. For this reason, the resist film is formed on the peripheral portion 13 facing the inflow direction F of the first step surface 13 in consideration of a margin in processing such as mask shift.
a is also formed in the front region. As a result, the peripheral portion of the first step surface 13 facing the inflow direction F is shaved, so that the contour of the peripheral portion is not deformed or roughened. Further, when the base surface 15 is dug down by sandblasting, the peripheral portion of the second step surface 14 becomes a rougher edge than in the case of ion etching, but faces the inflow direction F of the first step surface 13. The peripheral portion 13a does not become a rough edge.

Through the above steps, the opposing surfaces of the plurality of head sliders 10 are formed, and each head slider 10 is separated by, for example, a dicing device, whereby a single head slider 10 is obtained. When the head slider 10 is separated by a dicing device, as shown in FIG.
The minimum distance d between the peripheral portion 14a of the second step surface 14 and the peripheral portion 15b of the base surface 15 is set within a range necessary for dicing.

Simulation Results Here, FIGS. 7 and 8 simulate the trajectory of a mass point (dust) flowing from the inflow direction F of the air flow between the facing surface of the head slider 10 having the above structure and the surface of the magnetic disk. FIG. The streamline FL of the mass points shown in FIGS. 7 and 8 has a large amount of mass points (dust) flowing in an area where the density of the streamlines FL is high, and has a small amount of mass points (dust) flowing in an area having a low density. It is shown that. Further, FIG.
(A) shows a radius of 9.56 mm from the center of the magnetic disk 5.
Skew angle is 7.67 degrees, and FIG.
At a position of 1.22 mm, the skew angle is 3.71 degrees, and FIG.
(A) is a position having a radius of 15.64 mm and a skew angle of 4.64.
FIG. 8B shows a case where the skew angle is 10.58 degrees at a position of a radius of 20.07 mm at 26 degrees. The depth of the first step surface 13 with respect to the rail surfaces 11 and 12 is 0.4 μm, the depth of the second step surface 14 with respect to the first step surface 13 is 3 μm, and the base surface with respect to the second step surface 14. 15 has a depth of 30 μm.

As shown in FIGS. 7 and 8, when the skew angle of the head slider 10 with respect to the magnetic disk 5 is different, the state of the streamline FL is different. Further, when the airflow mixed with dust flows in from the inflow direction F, first, almost all of the dust is generated by the action of the convex curved shape of the peripheral portion 14a of the second step surface 14 located at the forefront in the inflow direction F. Is pushed to the side of the peripheral portion 14a of the second step surface 14. Further, the amount of dust running on the second step surface 14 is very small, but the second step surface 1
The dust that has got on the top 4 is pushed to the side of the peripheral edge 13a of the first step surface 13 by the action of the convex curved shape of the peripheral edge 13a of the first step surface 13. For this reason, the amount of dust entering the first step surface 13 is further reduced. Further, dust that has entered the first step surface 13 is pushed to the side of the peripheral portion 11a by the action of the peripheral portion 11a facing the inflow direction F of the first rail surface 11, so that the first rail surface Dust entering on the surface 11 is very small.

By the above operation, the first step surface 1
3. Dust that adheres to the first step surface and the second step surface 14 and accumulates on the peripheral edge can be extremely reduced. The effect of suppressing the dust is that the contour shape of the peripheral portion of the first step surface 13, the first step surface, and the second step surface 14 is a curve that is convex with respect to the inflow direction F of the air flow. ,
Also, the height of the base surface 15 is made sufficiently high. Further, as described above, if the skew angle of the head slider 10 with respect to the magnetic disk 5 is different, the streamline FL
Are different from each other, the first step surface 13, the first
The optimum contour shape of the peripheral portion of the step surface and the second step surface 14 facing the inflow direction F of the air flow cannot be uniquely determined.
It is preferable to examine streamlines at each skew angle at a plurality of positions with respect to the simulation tool or the like, and to determine a contour shape which is most likely to suppress the intrusion of dust into the pressure acting surface portion by the greatest common denominator.

FIG. 9 is a graph showing the relationship between the height of the base surface 15 of the head slider 10 having the above-described structure and the intrusion of dust into the pressure acting surface. 9, the horizontal axis indicates the height of the base surface 15 from the rail surfaces 11 and 12, and P1 in FIG. 9 indicates that the base surface 15 and the second step surface 14 are the same from the rail surfaces 11 and 12. Height (3μm)
Is shown. The vertical axis represents the base surface 15.
And the relative amount assuming that the amount of dust entering the pressure acting surface when the second step surface 14 is at the same height from the rail surfaces 11 and 12 is 1. As can be seen from FIG. 9, as the depth of the base surface 15 is increased from the rail surfaces 11 and 12, the amount of dust entering the pressure acting surface portion decreases, and the dust is reduced by making the base surface 15 deeper. It can be seen that the effect of suppressing intrusion into the pressure acting surface is obtained. further,
It can be seen that when the depth of the base surface 15 is about 30 μm or more, the amount of dust that has penetrated into the pressure acting surface portion has almost leveled off. From this, the depth of the base surface 15 is set to 30 μm
It can be seen that a sufficient effect of suppressing the entry of dust into the pressure acting surface can be obtained by digging down to the extent. If the depth of the base surface 15 is set to 30 μm or more, the effect of suppressing the intrusion of dust into the pressure acting surface can be further obtained. preferable. In addition, even if the depth of the base surface 15 is smaller than 30 μm, the depth of the base surface 15 is particularly limited to the above-mentioned 30 μm because the effect of suppressing the entry of dust into the pressure acting surface can be obtained depending on the specifications of the device. However, at least the depth of the base surface 15 is set to the first and second step surfaces 1.
In any case, if the depth is made sufficiently deeper than 3, 14, the effect of suppressing intrusion of dust into the pressure acting surface can be obtained.

As described above, according to this embodiment, the opposing surface of the head slider 10 is constituted by the first and second rail surfaces 11 and 12, and the first and second step surfaces 13 and 14, A pressure acting surface portion that substantially governs the flying characteristics of the head slider 10 from the surface of the magnetic disk 5;
The head slider 10 is divided into a base surface 15 which does not substantially affect the flying characteristics of the head slider 10 from the surface of the magnetic disk 5, and a contour shape of a peripheral portion of the pressure acting surface portion in the airflow inflow direction F flows. By being formed as a continuous curve convex in the direction F, foreign matter such as dust mixed in the inflowing air flow is pushed to the side by the action of the contour shape of the peripheral portion, and enters the pressure action surface portion. Can be suppressed. Accordingly, it is possible to prevent foreign substances such as dust from adhering or accumulating in the pressure acting surface portion, and it is possible to suppress a decrease in the flying height of the head slider 10 and an instability of the flying height.
In addition, by forming the depth of the base surface at a position sufficiently deep with respect to each surface constituting the pressure acting surface portion, foreign substances such as dust mixed in the air flow can easily move to the side of the pressure acting surface portion, It is possible to further suppress foreign matter such as dust from entering the pressure acting surface portion. As a result, the magnetic disk device 1 including the head slider 10 has improved resistance to dust and the like.

Modification FIGS. 10 and 11 are views showing a modification of the head slider 10 according to the above-described embodiment. The head slider 51 shown in FIG. 10A has basically the same configuration as the head slider 10 according to the above-described embodiment,
The portion where the contour of the peripheral portion 14a of the step surface 14 with respect to the base surface 15 goes in the inflow direction F is formed of a circular arc that is convex with respect to the inflow direction F, and both side portions along the inflow direction F that are continuous with this. Is not narrowed along the inflow direction F, and extends substantially parallel to the peripheral edge 15 b of the base surface 15.

The head slider 61 shown in FIG.
Has basically the same configuration as the head slider 10 according to the above-described embodiment, except that the contour of the peripheral portion 14a of the second step surface 14 with respect to the base surface 15 is in the inflow direction F
Is formed of a circular arc that is convex with respect to the inflow direction F, and both side portions that follow the inflow direction F are widened along the inflow direction F.
5 overlaps with the peripheral portion 15b in the middle of the peripheral portion 15b. That is, the rear area of the head slider 61 along the inflow direction F is the second step surface 14.

The head slider 100 shown in FIG.
Differs from the head slider 10 according to the above-described embodiment in the configuration of the rail surface. The head slider 100 has a rail surface 111 formed at a position symmetrical with respect to the center line of the head slider 100 along the inflow direction F of the air flow, and is located between the rail surfaces 111 having the same height as the rail surface 111. Rail surface 112, a first step surface 113 formed around the rail surfaces 111 and 112, and a second step surface 11 formed around the first step surface 113
4 and a base surface 115 formed around the second step surface 114. Note that the rail surfaces 111, 11
2, the first and second steps 113 and 114, and the base surface 115 correspond to the head slider 1 according to the above-described embodiment.
0, rail surfaces 11 and 12, first and second steps 1
3, 14 and the same height as the base surface 15, respectively.

The rail surface 111 has a contour at a peripheral portion facing the inflow direction F, which is formed by a curve that is convex with respect to the inflow direction F, and extends rearward along the inflow direction F. The rail surface 112 is configured such that the contour of the peripheral portion facing the inflow direction F is formed as a convex curve with respect to the inflow direction F, extends rearward along the inflow direction F, and extends from the middle position to the inflow direction F. The width in the direction crossing is enlarged as going backward.

On the rear end side of the first step surface of the second step surface 112 in the inflow direction F, a region between the rail surface 111 and the rail surface 112 is a negative pressure action region 116 where a negative pressure is generated. It has become. The contour shape of the peripheral portion of the first and second step surfaces 113 and 114 toward the inflow direction F is configured by a continuous curve that is convex with respect to the inflow direction F.

The head slider 100 having the above-described structure includes the rail surfaces 111 and 112, the first and second steps 11
3, 114 constitute a pressure acting surface portion that substantially controls the flying characteristics, and the base surface 115 is a surface that does not affect the flying characteristics. As in the head slider 10 according to the above-described embodiment, dust is generated. The structure is such that it does not easily enter the pressure acting surface.

The head slider 200 shown in FIG.
Are a rail surface 211, a first step surface 213 formed on the outer peripheral side and inner peripheral side of the rail surface 211, and a second step formed on the outer peripheral side and inner peripheral side of the first step surface 213. It has a surface 214 and a base surface 215 formed on the outer periphery of the second step surface 214. Rail surface 2
A parallel portion 21 is formed such that a front region 211a in the inflow direction F is formed so as to cross the inflow direction F, and extends along both sides of the rear end of the front region 211a in the inflow direction F.
1b is formed. Front area 21 of rail surface 211
The peripheral edge portion 211c of the first portion 1a facing the inflow direction F is formed of a straight line crossing the inflow direction F.

The peripheral portion 213a of the first step surface 213 formed adjacent to the outer peripheral side of the rail surface 211 and facing the inflow direction F is also formed of a straight line crossing the inflow direction F. A peripheral edge portion 214a of the second step surface 214 formed adjacent to the outer peripheral side of the first step surface 213 and facing the inflow direction F is formed by a curve that is convex with respect to the inflow direction F. Further, a second step surface 214 formed adjacent to the inner peripheral side of the first step surface 213
Has a negative pressure action area 216 on which a negative pressure acts.

As described above, the head slider 200
Of the rail surface 211 and the first and second step surfaces 213 and 214 constituting the pressure acting surface portion, only the peripheral portion 214a of the second step surface 214 facing the inflow direction F is convex with respect to the inflow direction F. The curve is composed of As described above, only the shape of the peripheral portion 214a of the second step surface 214 which forms the contour shape of the pressure acting surface portion is changed to the inflow direction F.
Even if it is configured as a convex curve, the effect of suppressing intrusion of dust into the pressure acting surface portion can be obtained.

The present invention is not limited to the above embodiment. In the above-described embodiment, the first and second rail surfaces 11, 1 constituting the pressure acting surface portion of the head slider 10 are used.
2. The contour of the peripheral portion of the first and second step surfaces 13 and 14 toward the inflow direction is formed by a convex curve with respect to the inflow direction F. For example, the convex curve is formed by a polygonal shape. Even if approximated, substantially the same operation and effect can be obtained.

In the above-described embodiment, the fixed type magnetic disk device 1 in which the magnetic disk 5 is fixed to the spindle motor 4 as a rotation driving means has been described as the disk drive device provided with the head slider 10. For example, as shown in FIG. 12, the present invention can be applied to a so-called removable magnetic disk device 401 in which a disk cartridge 402 containing a magnetic disk is detachable from the device. The configuration of the magnetic disk device 401 has the same internal configuration as the magnetic disk device shown in FIG. In addition, when the disk cartridge 402 is inserted in the direction of arrow B1 in FIG. 12, the cartridge holder 403 holding the disk cartridge 402 chucks the magnetic disk housed in the disk cartridge 402 by a spindle motor built in the apparatus. Thus, a mechanism for lowering the cartridge holder 403 in the direction toward the chassis 404 is also provided. In such a removable magnetic disk device 401, dust easily enters the inside of the device from the outside, and by applying the head slider of the present invention, the resistance to dust can be greatly improved.

Further, in the above-described embodiment, the case where the magnetic disk device is used as the disk drive device has been described. However, the present invention can be applied to, for example, a magneto-optical disk device, an optical disk device, and the like.

[0053]

According to the head slider of the present invention, the air flow flowing between the base surface and the recording medium surface by the action of the contour of the pressure acting surface formed by the convex curve toward the air flow. Foreign matter, such as dust, mixed into the pressure-acting surface is pushed to the side of the pressure-acting surface, making it difficult for the foreign matter to enter the pressure-acting surface. As a result, foreign substances such as dust hardly adhere to the surfaces constituting the pressure acting surface portion which substantially governs the flying characteristics of the head slider, and the air film formed between the pressure acting surface portion and the recording medium surface is reduced. Destruction is suppressed, the flying height of the head slider does not decrease, and the flying height of the head slider can be stabilized. Therefore, a disk drive device to which the head slider of the present invention is applied,
The reliability against foreign substances such as dust is improved. Further, according to the head slider processing method of the present invention, an accurate removing means is used for processing the pressure acting surface portion which substantially governs the flying characteristics of the head slider, and does not substantially affect the flying characteristics. By using a removing means having a high removal rate for processing the base surface, a pressure acting surface portion having high shape accuracy can be obtained, and the processing efficiency of the head slider can be improved, which is a practical processing method.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a magnetic disk drive to which the present invention is applied.

FIG. 2 is a diagram showing a state in which a head slider flies above the surface of a magnetic disk.

FIG. 3 is a perspective view showing a configuration of a facing surface of the head slider according to the first embodiment of the present invention.

FIG. 4 is a plan view of a facing surface of the head slider shown in FIG. 3;

FIG. 5 is a diagram illustrating an example of a pressure distribution generated in a head slider.

FIG. 6 is a diagram for explaining a skew angle of a head slider with respect to a magnetic disk.

FIG. 7 is a diagram simulating a trajectory of a mass flow at each skew angle in the head slider of the present invention.

FIG. 8 is a diagram simulating a trajectory of a mass flow at each skew angle in the head slider of the present invention.

FIG. 9 is a graph showing the relationship between the height of the base surface and the amount of dust penetration in the head slider of the present invention.

FIG. 10 is a plan view showing a configuration of a modified example of the head slider of the present invention.

FIG. 11 is a plan view showing the configuration of another modification of the head slider of the present invention.

FIG. 12 is a perspective view showing an example of the configuration of a removable magnetic disk.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Magnetic disk device, 5 ... Magnetic disk, 10 ... Head slider, 11 ... 1st rail surface, 12 ... 2nd rail surface, 13 ... 1st step surface, 14 ... 2nd step surface, 15 ... Base surface, 16 ... Negative pressure action area, 17 ... Magnetic head, F ... Inflow direction of air flow.

Continued on the front page (72) Inventor Kazue Kazue 6-7-35 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Corporation F-term (reference) 5D042 NA02 PA01 PA05 QA02 QA03 RA02

Claims (15)

[Claims] 1. A recording medium comprising a head for performing at least one of reproducing data recorded on a recording medium and recording data on the recording surface, wherein the recording medium has a facing surface disposed opposite to a surface of the recording medium. A head slider that floats from the surface of the recording medium by an air flow generated by movement of the recording medium flowing between the recording medium and the surface, wherein the facing surface is at least partially formed from the air flow to the surface of the recording medium; A pressure acting surface portion comprising a plurality of surfaces having a step where a negative pressure in a direction opposite to the floating pressure acts on at least a part of the pressure acting surface portion; and a peripheral edge portion of the pressure acting surface portion. And a base surface disposed around the pressure acting surface portion, wherein the base portion has a step between the base surface and the recording medium surface. Head slider contour of the peripheral portion of the force acting surface portion has a convex curve with respect to the inflow direction. 2. The apparatus according to claim 1, wherein the base surface is located at a height substantially free from pressure from the air flow with respect to a surface constituting a peripheral portion of the pressure acting surface portion facing the air flow. Head slider. 3. A step of the pressure acting surface portion of the base surface with respect to a surface constituting a peripheral portion of the pressure acting surface portion facing the air flow is sufficiently larger than a step difference between a plurality of surfaces in the pressure acting surface portion.
A head slider according to item 1. 4. The head slider according to claim 1, wherein the outer peripheral edge of the base surface has a rectangular shape. 5. The head slider according to claim 1, wherein a maximum width of a peripheral portion of the pressure acting surface portion toward the air flow in a direction crossing the air flow is maximized with respect to a width of the base surface. . 6. The pressure acting surface portion has a step between a rail surface receiving a pressure floating from the surface of the recording medium and a peripheral portion of the rail surface, and is arranged adjacent to the rail surface. A first step surface at least partially receiving a floating pressure, a step having a step between the first step surface, and a region having a negative pressure region at least partially opposite to the floating pressure. A second step surface, the second step surface having a region disposed in front of the rail surface in the airflow inflow direction, and a peripheral edge of the region facing the airflow. 2. A portion defining a peripheral portion of the pressure acting surface portion facing the air flow.
A head slider according to item 1. 7. The head slider according to claim 6, wherein a contour of a peripheral portion of the rail surface in the inflow direction of the air flow is a curve that is convex with respect to the inflow direction. 8. The first step surface has a region arranged forward of the rail surface on the air flow inflow side, and a contour of a peripheral portion of the region facing the air flow has a contour shape. 7. The head slider according to claim 6, wherein the head slider has a convex curve with respect to the inflow direction. 9. The rail surface has independent first and second rail surfaces along an inflow direction of the airflow, and the second rail surface behind the first rail surface in the inflow direction. 7. The head slider according to claim 6, wherein a negative pressure acting area in which the negative pressure acts is formed on the step surface. 10. The step according to claim 6, wherein a step between the rail surface and the first step surface is sufficiently smaller than a step between the first step surface and the second step surface. Head slider. 11. An air flow device according to claim 1, wherein said first rail surface and said first step surface have an air flow in a region located forward of said first rail surface toward an inflow side of said air flow. 7. The head slider according to claim 6, wherein the size is maximized with respect to the width of the base surface. 12. A rotation driving means for rotating a disk-shaped recording medium, a head for reproducing data recorded on a recording surface of the recording medium or recording data on the recording surface, and A head slider mounted with a head and floating from the recording medium surface by an air flow generated by movement of the recording medium flowing between an opposing surface arranged opposite to the recording medium surface and the recording medium surface; The facing surface of the head slider receives, at least in part, a pressure that floats from the airflow to the surface of the recording medium, and at least partially, a negative pressure that is opposite to the pressure that floats. A pressure acting surface portion comprising a plurality of surfaces having a step acting thereon, and a step between a surface constituting a peripheral portion of the pressure acting surface portion, and disposed around the pressure acting surface portion. The contour shape of the peripheral portion of the pressure acting surface portion toward the air flow flowing between the base surface and the recording medium surface is a convex curve with respect to the inflow direction. Disk drive device. 13. The disk drive according to claim 12, wherein said recording medium is detachable from said rotary drive means. 14. A recording medium according to claim 1, wherein said opposing surface is provided with a rail surface receiving a pressure floating from said recording medium surface due to an air flow generated by movement of said recording medium, and a rail surface adjacent to said rail surface. A first step surface having a step with respect to the rail surface and receiving the floating pressure on at least a part thereof; a first step surface having a step with respect to the first step surface and floating on at least a part thereof A second step surface having a region where a negative pressure acts in a direction opposite to the pressure;
A head surface having a step that is sufficiently larger than each of the steps with respect to the second step surface and substantially not receiving pressure from the inflowing air flow. A step of selectively removing one surface of the member constituting the first surface using a first removing means to sequentially form the rail surface, the first step surface, and the second step surface; Forming the base surface by selectively removing the base surface using a second removing unit. The first removing unit includes a contour shape accuracy of a boundary between a removed region and a non-removed region. Using relatively high removal means,
A method of processing a head slider, wherein the second removing unit uses a removing unit having a relatively higher removal rate than the first removing unit. 15. The processing method according to claim 14, wherein the first removing means uses an ion etching method, and the second removing means uses a sand blast method.