JP2001176003A - Magnetic defect inspecting method for magnetic disk - Google Patents
Magnetic defect inspecting method for magnetic diskInfo
- Publication number
- JP2001176003A JP2001176003A JP35852199A JP35852199A JP2001176003A JP 2001176003 A JP2001176003 A JP 2001176003A JP 35852199 A JP35852199 A JP 35852199A JP 35852199 A JP35852199 A JP 35852199A JP 2001176003 A JP2001176003 A JP 2001176003A
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- Japan
- Prior art keywords
- magnetic
- recording
- reproducing
- defect
- magnetic disk
- Prior art date
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- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、磁気ディスク表面
の磁気的欠陥の検査方法に関する。The present invention relates to a method for inspecting magnetic defects on the surface of a magnetic disk.
【0002】[0002]
【従来の技術】磁気ディスク装置は、磁気ディスク表面
を浮上する磁気ヘッドで磁気的な変化により、データの
記録・再生を行う装置である。磁気ヘッドは磁気ディス
クに対して相対的に移動し、記録媒体上の任意の位置に
磁気情報を記録し、記録された磁気情報を必要により再
生する機能を有する。近年、磁気ディスク装置での高記
録密度化により、磁気記録媒体上に記録された情報を高
感度で再生する磁気抵抗効果型ヘッド(以下MRヘッド)が
主流になりつつある。この再生原理は、磁気記録媒体か
らの磁界変化が磁気抵抗値を変化させ、この抵抗変化が
MR素子に一定の電流を流すことにより直流電圧信号へ変
換され、データを再生するものである。2. Description of the Related Art A magnetic disk device is a device for recording / reproducing data by a magnetic change with a magnetic head floating on the surface of a magnetic disk. The magnetic head has a function of moving relative to the magnetic disk, recording magnetic information at an arbitrary position on a recording medium, and reproducing the recorded magnetic information as necessary. In recent years, a magneto-resistive head (hereinafter, MR head) that reproduces information recorded on a magnetic recording medium with high sensitivity has become mainstream due to the increase in recording density of a magnetic disk device. The principle of this reproduction is that a change in the magnetic field from the magnetic recording medium changes the magnetoresistance, and this change in resistance
By passing a constant current through the MR element, it is converted into a DC voltage signal and the data is reproduced.
【0003】高記録密度化に伴い磁気ディスクにおいて
も、磁気ディスク装置で許容不可の磁気的欠陥検査を実
使用上に近ずけるため、MRヘッドを用い欠陥検査を行
っている。[0003] With the increase in recording density, even for magnetic disks, defect inspection using an MR head is performed in order to make magnetic defect inspection that cannot be tolerated by a magnetic disk device closer to practical use.
【0004】その検査方法は、磁気ディスク装置に搭載
されている同一ヘッド又はそれに類した構造及び電気的
特性をもつヘッドにより、磁気ディスク表面上を浮上さ
せに規定周波数で記録・再生することによって、規定値
以外の信号特性かを判定し、磁気的欠陥をの検査を行っ
ている。[0004] The inspection method is to perform recording / reproducing at a specified frequency while flying above the surface of the magnetic disk by using the same head mounted on the magnetic disk device or a head having a similar structure and electrical characteristics. It is determined whether the signal characteristic is other than the specified value, and an inspection for a magnetic defect is performed.
【0005】この磁気的欠陥の検査方法として一般的に
は、まず1トラックに規定周波数のバ−ストパタ−ンを
書込み、その位置を動かすこと無くトラック平均再生信
号電圧を測定し、その平均電圧値に対する規定のスライ
スレベルからはずれる信号をパルス信号化し欠陥として
検出し、次のトラックへ磁気ヘッドを移動させ同様に記
録・再生・欠陥検査の順で、磁気ディスク表面の検査を
行うものである。In general, as a method for inspecting this magnetic defect, first, a burst pattern having a prescribed frequency is written on one track, an average track reproduction signal voltage is measured without moving its position, and the average voltage value is measured. , A signal deviating from a specified slice level is converted into a pulse signal, detected as a defect, the magnetic head is moved to the next track, and the surface of the magnetic disk is similarly inspected in the order of recording, reproduction, and defect inspection.
【0006】[0006]
【発明が解決しようとする課題】磁気ディスクの磁気的
欠陥を検査する磁気ヘッドは、その目的上磁気ディスク
装置の1bitサイズに対応する磁気的欠陥を検出する能力
が問われる。そのため、実機使用磁気ヘッド又はそれに
類した特性を持つ物を使うことが望ましいが、その記録
・再生素子の幅は近年の高記録密度化により狭まりつつ
ある。この素子幅の狭小化により、記録・再生素子間の
磁気ディスク半径方向位置ずれ比率が大きくなり、再生
信号の電圧レベルが下がりその結果再生信号のS/Nが
劣化し、微細な磁気的欠陥を安定に検出する能力が低下
する。これを図1、2で説明する。図1には磁気ヘッド
の記録・再生素子間で、再生時に磁気ディスク半径方向
へ磁気ヘッドを移動(オフセット)させてヘッド出力信号
を測定した結果のオフセットプロファイルと、記録位置
中心で1トラック分の再生を行ったヘッド出力信号と記
録位置とずれた位置で再生を行った出力信号波形を示
す。これより、記録位置とずれた状態で再生を行った信
号波形は、信号品質が劣化していることが分かる。A magnetic head for inspecting a magnetic defect of a magnetic disk is required to have a capability of detecting a magnetic defect corresponding to a 1-bit size of a magnetic disk device for the purpose. For this reason, it is desirable to use a magnetic head used in an actual machine or a magnetic head having similar characteristics, but the width of the recording / reproducing element has been narrowing due to the recent increase in recording density. Due to the narrowing of the element width, the ratio of the positional deviation of the recording / reproducing element in the radial direction of the magnetic disk is increased, and the voltage level of the reproduced signal is lowered. The ability to detect stably decreases. This will be described with reference to FIGS. FIG. 1 shows an offset profile obtained by moving (offset) the magnetic head in the radial direction of the magnetic disk at the time of reproduction between the recording / reproducing elements of the magnetic head and measuring the head output signal. FIG. 7 shows a reproduced head output signal and an output signal waveform reproduced at a position shifted from a recording position. FIG. From this, it can be seen that the signal quality of the signal waveform reproduced in a state shifted from the recording position is degraded.
【0007】また図2に磁気ヘッドの記録・再生位置の
オフセット量差による、再生出力に対するビット欠け欠
陥(ミッシングエラー)を同一磁気ディスクで測定した
スライスレベル依存性を示す。これより、記録・再生の
オフセット量が小さいほどスライスレベルの立ち上がり
が高いことが分かる。一般的に使用するスライスレベル
は65〜70%のため、磁気的欠陥検査が困難になってきて
いること示している。FIG. 2 shows the slice level dependence of a bit missing defect (missing error) with respect to a reproduction output due to a difference in offset between recording / reproducing positions of a magnetic head measured on the same magnetic disk. From this, it can be seen that the slice level rises higher as the recording / reproduction offset amount is smaller. The commonly used slice level is 65-70%, which indicates that magnetic defect inspection is becoming more difficult.
【0008】以上のことから、磁気ディスクの磁気的欠
陥を検出する検査条件としてはMR磁気ヘッドの記録・
再生の磁気的位置ずれ量(オフセット量)は小さくした方
がより検出精度を上げられることが言える。さらに磁気
ディスク装置においては、磁気ディスクと磁気ヘッドと
の相対位置関係から、予め記録・再生素子位置を半径方
向にずらして設計されている磁気ヘッドもあるため、磁
気ヘッドの影響を受けず又選別等の作業を排除し、磁気
ディスクの磁気的欠陥を高精度に検出できる検査方法が
望まれている。From the above, as the inspection conditions for detecting a magnetic defect of a magnetic disk, recording / recording of an MR magnetic head is performed.
It can be said that the smaller the magnetic displacement (offset) of the reproduction, the higher the detection accuracy. Furthermore, some magnetic disk devices are designed so that the recording / reproducing element position is shifted in the radial direction in advance due to the relative positional relationship between the magnetic disk and the magnetic head. There is a demand for an inspection method that eliminates such operations and can detect magnetic defects of a magnetic disk with high accuracy.
【0009】一方検査装置においては、記録・再生の磁
気的位置ずれ量に対して磁気ヘッド送り機構に微調整機
能を付加している。これは予め微調整機能により位置ず
れ量を学習し、各トラック毎に学習したオフセット量で
記録・再生を行っている。この方式では各トラック毎に
オフセット動作を行うため、測定時間が延び量産性にお
いて問題となっている。On the other hand, in the inspection apparatus, a fine adjustment function is added to the magnetic head feed mechanism with respect to the magnetic displacement amount of recording / reproducing. In this method, a positional deviation amount is learned in advance by a fine adjustment function, and recording / reproduction is performed with an offset amount learned for each track. In this method, since the offset operation is performed for each track, the measurement time is prolonged, which is a problem in mass productivity.
【0010】本発明の目的は、MRヘッドを用いた高密
度対応の磁気ディスク表面の磁気的欠陥を、高精度且つ
量産性を損なうことなく検出するための検査方法を提供
するものである。An object of the present invention is to provide an inspection method for detecting a magnetic defect on the surface of a high-density magnetic disk using an MR head with high accuracy and without impairing mass productivity.
【0011】[0011]
【課題を解決するための手段】上記目的を達成するた
め、本発明によるディスク磁気的欠陥検査方法は、下記
手法により高密度対応時の微細な磁気的欠陥を検査を可
能とする。In order to achieve the above object, a disk magnetic defect inspection method according to the present invention makes it possible to inspect a minute magnetic defect at the time of high density by the following method.
【0012】本発明は、磁気ヘッドの実効的な記録、再
生素子を位置の半径方向位置ずれによる磁気的欠陥を検
出する精度を低下させないために、検査する磁気ディス
クのデータ面を記録素子幅以上のトラックピッチで全ト
ラックにバースト信号を記録後、記録中心位置に再生素
子を中心が合う様に位置ずれ補正をし再生を行ない同一
のトラックピッチで全トラック再生を行なう。According to the present invention, the data surface of a magnetic disk to be inspected must be larger than the width of the recording element so as not to lower the accuracy of detecting the magnetic defect caused by the radial displacement of the effective recording and reproducing elements of the magnetic head. After the burst signal is recorded on all tracks at the track pitch of, the reproduction is performed by correcting the positional deviation so that the center of the reproducing element is aligned with the recording center position, and reproduction is performed at the same track pitch.
【0013】また、磁気ディスクの半径方向を分割し磁
気ヘッドの移動距離を短くし、且つ分割エリア毎に位置
補正を行い誤差を抑制することにより、位置補正の機械
精度をさらに向上できる。Further, by dividing the magnetic disk in the radial direction to shorten the moving distance of the magnetic head, and by correcting the position by performing position correction for each divided area, the mechanical accuracy of the position correction can be further improved.
【0014】磁気ディスクのデータ面全てのトラックを
記録後、再生位置の中心位置を一致させることにより再
生信号が高S/N化を図り微細な磁気的欠陥を検出するこ
とを可能とさせ、また半径方向を分割することにより位
置補正回数を減らし量産性を損なうことなく検査を可能
とさせる。After recording all tracks on the data surface of the magnetic disk, the center position of the reproduction position is made coincident, thereby increasing the S / N of the reproduction signal and detecting a minute magnetic defect. By dividing in the radial direction, the number of position corrections can be reduced, and inspection can be performed without impairing mass productivity.
【0015】[0015]
【発明の実施の形態】以下に、本発明の実施例について
図を用いて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【0016】図3に、本発明で用いた磁気ディスクの磁
気的欠陥検査装置の構成を示す。欠陥検査装置は、欠陥
検査対象の3.5インチ磁気ディスク1とスピンドル
2、駆動装置3からなる回転駆動系と、回転する磁気デ
ィスク1の表面上を走査することによって磁気的欠陥を
検出する磁気ヘッド4と、磁気ヘッド4で検出した信号
を増幅、判定処理する磁気的欠陥検出信号処理部5で構
成されている。磁気的欠陥検出信号処理部5は、磁気ヘ
ッド4で検出した信号を増幅するプリアンプ6、バッフ
ァアンプ7と磁気的欠陥であるかを判定するエラー検出
回路9で構成されている。尚本発明で、3.5インチ磁
気ディスク1特性は、保持力197.5KA/m(2.5KOe)保持力
角形比0.85。磁気ヘッド4の特性は、浮上量25nm、記
録コア幅2.8μm、再生コア幅1.5μm、記録・再生の磁
気的位置ずれ量0.4μmのものを用いた。また本検査装
置構成における記録再生条件は、磁気ヘッドの書き込み
電流値40mA、再生時のMRセンス電流値10mA、記録
信号40MHzのバーストパターンに設定しまた磁気ディス
クの回転数は6000rpmとした。FIG. 3 shows the configuration of the magnetic defect inspection apparatus for a magnetic disk used in the present invention. The defect inspection apparatus includes a rotary drive system including a 3.5-inch magnetic disk 1 to be inspected, a spindle 2, and a driving device 3, and a magnetic device that detects a magnetic defect by scanning the surface of the rotating magnetic disk 1. It comprises a head 4 and a magnetic defect detection signal processing unit 5 for amplifying and judging a signal detected by the magnetic head 4. The magnetic defect detection signal processing unit 5 includes a preamplifier 6 for amplifying a signal detected by the magnetic head 4, a buffer amplifier 7, and an error detection circuit 9 for determining whether the signal is a magnetic defect. In the present invention, the 3.5-inch magnetic disk 1 has a holding force of 197.5 KA / m (2.5 KOe) and a holding force squareness ratio of 0.85. The magnetic head 4 used had a flying height of 25 nm, a recording core width of 2.8 μm, a reproducing core width of 1.5 μm, and a magnetic displacement of 0.4 μm for recording and reproduction. The recording / reproducing conditions in the configuration of this inspection apparatus were set to a write current value of the magnetic head of 40 mA, a MR sense current value of 10 mA for reproduction, a burst pattern of a recording signal of 40 MHz, and the rotation speed of the magnetic disk was 6000 rpm.
【0017】(実施例1)3.5インチ磁気ディスクの磁
気的欠陥測定範囲を半径位置R20〜45mmと設定、半径
方向分割数を1、2、5、10、20、50の6条件と
し測定ストローク25mmを各々の分割数で均等に分割し
た。各分割エリア毎に次の測定を行った。(Embodiment 1) The measurement range of the magnetic defect of a 3.5-inch magnetic disk was set to the radial position R20 to 45 mm, the number of divisions in the radial direction was 1, 2, 5, 10, 20, 50, and the measurement stroke was 25 mm. Was divided equally by each division number. The following measurement was performed for each divided area.
【0018】そのエリアの内周位置において、図1に示
す再生出力のオフトラックプロファイルを測定し磁気ヘ
ッドの記録・再生素子位置の実効的なオフセット量を測
定、本実施例では0.4μm。次にその分割エリア内で最
内周部から5μmピッチで外周部に向かって信号を記録
する。その後内周位置に磁気ヘッドを走査し既測定の磁
気ヘッド位置を0.4μm補正し、5μmピッチで全トラ
ックの再生を行いながら、各トラックの平均読みだし電
圧値に対するスライスレベル70%を下回る信号をパル
ス化し、さらに微細欠陥の検出性を確認するために5ビ
ット以下のパルス化信号の個数を磁気的欠陥個数として
検出した。この測定を各分割エリア毎に繰り返し磁気デ
ィスク半径位置 R20〜45mmを測定した。また本発明の
効果を確認するために、各々の分割数条件において本測
定を5回繰り返し磁気的欠陥個数の再現性を確認した。
尚再現性は、5回の測定の平均値を100%とし各測定
値の比率で表した。その結果を図4に示す。分割数5以
下ではエラー個数再現性は、オフトラック補正しない条
件と比較し有意差は認められなかったが、分割数10以
上では再現性が向上する結果が得られた。これは分割エ
リアのストロークを小さくすることにより、検査装置の
磁気ヘッド走査の機構系精度の影響が少なくなっている
ためである。At the inner peripheral position of the area, the off-track profile of the reproduction output shown in FIG. 1 is measured to measure the effective offset of the recording / reproducing element position of the magnetic head, which is 0.4 μm in this embodiment. Next, a signal is recorded in the divided area from the innermost portion to the outer portion at a pitch of 5 μm. Thereafter, the magnetic head is scanned to the inner circumferential position to correct the measured magnetic head position by 0.4 μm, and while reproducing all tracks at a pitch of 5 μm, a signal which is lower than the slice level 70% with respect to the average read voltage value of each track is generated. The number of pulsed signals of 5 bits or less was detected as the number of magnetic defects in order to confirm the detectability of fine defects. This measurement was repeated for each divided area to measure the magnetic disk radial position R20 to 45 mm. Further, in order to confirm the effect of the present invention, the main measurement was repeated five times under each of the division number conditions, and the reproducibility of the number of magnetic defects was confirmed.
The reproducibility was represented by the ratio of each measured value, with the average value of five measurements taken as 100%. FIG. 4 shows the results. When the number of divisions was 5 or less, no significant difference was observed in the reproducibility of the number of errors compared with the condition without off-track correction, but when the number of divisions was 10 or more, the result that the reproducibility was improved was obtained. This is because the influence of the accuracy of the mechanical system for scanning the magnetic head of the inspection apparatus is reduced by reducing the stroke of the divided area.
【0019】(実施例2)実施例1の条件で磁気ヘッド
の記録コア幅1.5μm、再生コア幅0.8μmとし同様の測
定を行った結果、エラー個数再現性は分割数20以上で
再現性が向上した。本実施例及び実施例1から図5に示
すように、記録コア幅に対する分割エリアのストローク
の比を1:1000程度以下にできる分割数を設定する
方が、磁気的欠陥検出をより安定に検出できる。Example 2 The same measurement was performed under the same conditions as in Example 1 except that the recording core width of the magnetic head was 1.5 μm and the reproducing core width was 0.8 μm. Improved. As shown in FIG. 5 from the present embodiment and the first embodiment, it is more stable to detect magnetic defects by setting the number of divisions so that the ratio of the stroke of the division area to the recording core width is about 1: 1000 or less. it can.
【0020】[0020]
【発明の効果】この手法を用いることで、MRヘッドの
記録・再生素子のオフセット量に関係なく且つ量産性を
損なうことなく、微細な磁気的欠陥を再現性良く検出す
ることが可能となる。By using this method, it is possible to detect fine magnetic defects with good reproducibility regardless of the offset amount of the recording / reproducing element of the MR head and without impairing mass productivity.
【図1】磁気ヘッドのオフセットプロファイルと記録中
心位置で1トラック分の再生を行ったヘッド出力信号と
記録位置とずれた位置で再生を行った出力信号波形図。FIG. 1 is an offset profile of a magnetic head, a head output signal obtained by reproducing data for one track at a recording center position, and an output signal waveform obtained by reproducing data at a position shifted from a recording position.
【図2】磁気ヘッドの記録、再生位置のオフセット量差
によるエラーのスライスレベル依存性を示す図。FIG. 2 is a diagram showing slice level dependence of an error caused by a difference in offset between recording and reproducing positions of a magnetic head.
【図3】本発明の一実施例による磁気ディスク磁気的欠
陥検査用装置の構成図。FIG. 3 is a configuration diagram of a magnetic disk magnetic defect inspection apparatus according to an embodiment of the present invention.
【図4】評価結果1を示す図。FIG. 4 is a diagram showing an evaluation result 1.
【図5】評価結果2を示す図。FIG. 5 is a diagram showing an evaluation result 2.
1…ディスク、2…スピンドル、3…駆動装置、4…欠
陥検出用磁気ヘッド、5…磁気的欠陥検出信号処理部、
6…プリアンプ、7…バッファアンプ、8…Low Pass F
ilter、9…エラ−検出回路部、10…コンパレ−タ、
11…エラ−フラグ。DESCRIPTION OF SYMBOLS 1 ... Disk, 2 ... Spindle, 3 ... Drive device, 4 ... Magnetic head for defect detection, 5 ... Magnetic defect detection signal processing part,
6: Preamplifier, 7: Buffer amplifier, 8: Low Pass F
ilter, 9: error detection circuit section, 10: comparator,
11 ... Error flag.
Claims (2)
子が一体化された複合型薄膜構造を有しその再生素子が
磁気抵抗効果型素子の磁気ヘッドを用い、該磁気ディス
ク上に該磁気ヘッドを浮上させ記録・再生動作を行うこ
とにより磁気的欠陥を検知する検査方法において、該磁
気ディスクの半径方向全面にわたり少なくとも記録素子
幅以上のピッチで規定周波数のバ−ストパタ−ンを記録
後、記録中心位置に再生素子中心が合う様に位置ずれ分
を補正し、記録時と同一ピッチで磁気的欠陥を測定する
ことを特徴とする検査方法。A magnetic disk is rotated, and a recording / reproducing element is integrated into a composite thin film structure. The reproducing element uses a magnetic head of a magnetoresistive element, and the magnetic head is mounted on the magnetic disk. In the inspection method for detecting a magnetic defect by performing a recording / reproducing operation by floating the disk, a burst pattern having a specified frequency is recorded at a pitch of at least the recording element width over the entire surface of the magnetic disk in the radial direction, and then recording is performed. An inspection method characterized in that a positional deviation is corrected so that the center of the reproducing element is aligned with the center position, and magnetic defects are measured at the same pitch as during recording.
向を分割し測定することを特徴とする、請求項1に記載
の検査方法。2. The inspection method according to claim 1, wherein the radial direction is divided and measured at the time of recording on the magnetic disk in the radial direction.
Priority Applications (1)
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100455391B1 (en) * | 2002-07-18 | 2004-11-06 | 삼성전자주식회사 | Method for measuring magnetic write width using burst pattern and apparatus thereof |
KR100459718B1 (en) * | 2002-08-28 | 2004-12-03 | 삼성전자주식회사 | Recording medium in which a program that measures magnetic write width of a head in a hard disk drive is recorded |
-
1999
- 1999-12-17 JP JP35852199A patent/JP2001176003A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100455391B1 (en) * | 2002-07-18 | 2004-11-06 | 삼성전자주식회사 | Method for measuring magnetic write width using burst pattern and apparatus thereof |
KR100459718B1 (en) * | 2002-08-28 | 2004-12-03 | 삼성전자주식회사 | Recording medium in which a program that measures magnetic write width of a head in a hard disk drive is recorded |
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