JP2001170834A - Drain device - Google Patents

Drain device

Info

Publication number
JP2001170834A
JP2001170834A JP35893499A JP35893499A JP2001170834A JP 2001170834 A JP2001170834 A JP 2001170834A JP 35893499 A JP35893499 A JP 35893499A JP 35893499 A JP35893499 A JP 35893499A JP 2001170834 A JP2001170834 A JP 2001170834A
Authority
JP
Japan
Prior art keywords
air
conduit pipe
tank
bellows
bellows chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP35893499A
Other languages
Japanese (ja)
Other versions
JP3477131B2 (en
Inventor
Hiroki Kamiyama
宏樹 上山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP35893499A priority Critical patent/JP3477131B2/en
Priority to TW089123076A priority patent/TWI240055B/en
Priority to KR1020000065897A priority patent/KR100687483B1/en
Publication of JP2001170834A publication Critical patent/JP2001170834A/en
Application granted granted Critical
Publication of JP3477131B2 publication Critical patent/JP3477131B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/04Control of fluid pressure without auxiliary power
    • G05D16/06Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane
    • G05D16/0638Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane characterised by the form of the obturator
    • G05D16/0641Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane characterised by the form of the obturator the obturator is a membrane
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Fluid-Driven Valves (AREA)
  • Paper (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent refuse clogging with a conventional drain device using a check valve with a ball and to prevent frequent abnormal stoppage of a machine. SOLUTION: A bellows chamber 31 is furnished below a tank T to be inserted into a vacuum circuit, a bellowfrum 32 to be vertically divide into two is provided in the bellows chamber, a discharge conduit pipe 34 to lead working water staying in the tank to an upper side space of the bellows chamber from above is furnished, a delivery conduit pipe 36 to deliver working water led to the upper side space outside is furnished, and an air conduit pipe 35 to selectively supply air to a lower side space of the bellows chamber is furnished. The bellowfrum 32 is loosened upward and closes an end part of the discharge conduit pipe when pressure air is supplied to the air conduit pipe, and the discharge conduit pipe and the livery conduit pipe are communicated to each other through the upper side space when the air conduit pipe is opened.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、研磨装置や搬送機
でワークを真空固定するための真空装置に設けられる水
抜き装置に関する。ガラス端面の面取り装置及びガラス
コーナー面取り装置においては上記の水抜き装置が使用
される。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water removal device provided in a vacuum device for vacuum-fixing a work with a polishing device or a transfer device. The above-described water draining device is used in a glass edge chamfering device and a glass corner chamfering device.

【0002】[0002]

【従来の技術】図1はガラス端面面取り装置を示してい
る。ガラス板1はテーブル2上に形成された真空溝3に
よる真空吸引により固定されており、そのテーブル2自
身は棒ネジ4により、紙面と垂直方向に平行移動する。
5および6は、ガラス板1が移動する間にその両側端面
を研磨加工するために45°方向に傾けて設置された研
磨ユニットであり、径の違う二つの砥石G1,G2を備え
ることにより、研磨ユニット5では、ガラス板端面にお
けるエッジを加工(面取り)し、研磨ユニット6では円錐
形状の砥石G3の傾斜面をガラス板端面に当接させるこ
とにより端面研磨を行う。
2. Description of the Related Art FIG. 1 shows a glass edge chamfering apparatus. The glass plate 1 is fixed by vacuum suction by a vacuum groove 3 formed on a table 2, and the table 2 itself is translated by a bar screw 4 in a direction perpendicular to the paper surface.
Reference numerals 5 and 6 denote polishing units installed at a 45 ° angle in order to polish both side surfaces of the glass plate 1 while the glass plate 1 is moving. The polishing units 5 and 6 are provided with two grindstones G1 and G2 having different diameters. In the polishing unit 5, the edge of the glass plate end face is machined (chamfered), and in the polishing unit 6, the conical-shaped grinding stone G3 is brought into contact with the glass plate end face to perform the end face polishing.

【0003】研磨時、ガラス板1はテーブル2に吸引固
定されているが、その研磨時には過熱防止、摩擦力の低
減および研磨粉の洗い流しのために研磨部位に対して研
磨液の水が注がれるため、前記真空溝3につながれた真
空ポンプに研磨液が吸い込まれ、ポンプを傷めてしま
う。そこで、真空吸引の経路途中に水抜き装置7が挿入
されている。この水抜き装置7のタンク径は数cm程度
の小型なものである。
At the time of polishing, the glass plate 1 is suction-fixed to the table 2, but at the time of polishing, water of a polishing liquid is poured into a polishing portion to prevent overheating, reduce frictional force, and wash away polishing powder. Therefore, the polishing liquid is sucked into the vacuum pump connected to the vacuum groove 3, and the pump is damaged. Therefore, a water draining device 7 is inserted in the middle of the vacuum suction path. The tank diameter of the drainage device 7 is as small as several cm.

【0004】図2の(A)にその水抜き装置7の詳細を示
している。水抜き装置7の下部には、チェックバルブ8
が設けられており、真空吸引時は、タンク内が減圧され
ているため、チェックバルブ8内のボール9が上方に吸
いつけられ、排出口10を塞いでいる。
FIG. 2A shows the details of the draining device 7. A check valve 8 is provided below the draining device 7.
During vacuum suction, the pressure in the tank is reduced, so that the ball 9 in the check valve 8 is sucked upward and closes the discharge port 10.

【0005】ガラス板1のテーブル2への吸引固定を解
除するには、図2の(B)に示すように水抜き装置内へ圧
空が供給される。このとき、前記ボール9が下降するこ
とにより、水抜き装置7内に吸い込まれて溜まっていた
研磨液Qが自動的に外部へ排出される。
To release the suction fixing of the glass plate 1 to the table 2, pressurized air is supplied into the water draining device as shown in FIG. At this time, as the ball 9 descends, the polishing liquid Q that has been sucked and accumulated in the draining device 7 is automatically discharged to the outside.

【0006】[0006]

【発明が解決しようとする課題】ところで水抜き装置7
に吸い込まれる研磨液には研削屑などが含まれるため、
バルブ作用をなすボール9が数mmと極めて小さいこと
もあって、上記のチェックバルブ8でゴミ詰りが生じて
バルブが機能しなくなり、タンクのバルブ機能が不能と
なる。そうなると、真空溝3内の圧力が十分に下がら
ず、テーブル2上のガラス板1の吸引が十分に行われな
い。こうなると、真空溝3内の圧力が所定の範囲にある
かどうかを検出している圧力検出手段(不図示)が作動し
て装置の動作異常信号が制御系に入力され、安全上、装
置の運転を自動的に停止させる。こうなった場合には、
チェックバルブの内部を清掃するかまたは交換して、正
規の通りガラス板1が十分にテーブル2上に吸引される
様に復帰させる必要があった。
By the way, the draining device 7
Since the polishing liquid sucked into the polishing pad contains grinding waste,
Due to the extremely small size of the ball 9 acting as a valve, which is several millimeters, the check valve 8 is clogged with dust, so that the valve does not function and the valve function of the tank becomes impossible. In such a case, the pressure in the vacuum groove 3 is not sufficiently reduced, and the glass plate 1 on the table 2 is not sufficiently sucked. In this case, a pressure detecting means (not shown) for detecting whether the pressure in the vacuum groove 3 is within a predetermined range is activated, and an abnormal operation signal of the apparatus is input to the control system. Stop operation automatically. If this happens,
It was necessary to clean or replace the inside of the check valve and return it so that the glass plate 1 was sufficiently sucked on the table 2 as normal.

【0007】そうした清掃を装置稼動途中で頻繁に実行
せざるを得ない状況が起きて使用勝手が悪かった。ま
た、稼動途中の装置に対してそうした清掃を実施するの
は稼動率低下の原因となり、不都合であった。そうした
清掃を必要とせず、長時間安定して動作が継続するバル
ブ手段を提供することが課題であった。
A situation has arisen in which such cleaning must be performed frequently during the operation of the apparatus, resulting in poor usability. In addition, performing such cleaning on a device that is being operated causes a reduction in the operation rate, which is inconvenient. It was an object to provide a valve means that does not require such cleaning and can continue to operate stably for a long time.

【0008】本発明は、上述した課題を解決するために
なされたものであり、新規なバルブ機構を採用すること
で上述したゴミ詰まりをなくした水抜き装置を提供する
ことを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and has as its object to provide a water draining device which eliminates the above-mentioned dust clogging by adopting a novel valve mechanism.

【0009】[0009]

【課題を解決するための手段】図2に示したように、ボ
ールで排出口を閉じる手法に替えて、本発明では、平面
状のベローフラムの撓ませることで、排出口を直接に閉
じたり、開放するといった単純な機構を採用することで
目詰まりの発生をなくした。
As shown in FIG. 2, in place of the method of closing the discharge port with a ball as shown in FIG. 2, in the present invention, the discharge port is directly closed by bending a flat bellows flam. By adopting a simple mechanism such as opening, clogging has been eliminated.

【0010】[0010]

【発明の実施の形態】図3は本発明の1実施形態を示し
た水抜き装置20である。円筒形状の筒本体21の上部
にはボルト22を用いて上板23が取り付けられ、下部
には、側方から見て凸形状のフランジ状栓24があてが
われる。これにより、上述した研磨液を受け止めるため
のタンクTが形成される。25は、筒本体21の内周部
と当フランジ状栓24とで気密を保つためのOリングで
ある。
FIG. 3 shows a drainage device 20 according to an embodiment of the present invention. An upper plate 23 is attached to the upper part of the cylindrical main body 21 using bolts 22, and a flanged plug 24 having a convex shape when viewed from the side is applied to the lower part. Thereby, a tank T for receiving the above-mentioned polishing liquid is formed. Reference numeral 25 denotes an O-ring for keeping the inner peripheral portion of the cylinder main body 21 and the flanged plug 24 airtight.

【0011】26は上板23に設けられた吸入孔であ
り、ここに挿入された継手27および不図示のチューブ
を介して図1に示したテーブルにつながれる。28は、
筒本体21の所定部に設けられた吸引孔であり、ここに
挿入された継手29および不図示のチューブなどを介し
て真空発生器につながれる。筒本体21の材質は、中の
様子が見えるという利点からアクリルおよび塩ビである
が、タンクの耐久性を優先してアルミもしくはステンレ
スを用いた。
Reference numeral 26 denotes a suction hole provided in the upper plate 23, which is connected to the table shown in FIG. 1 through a joint 27 inserted therein and a tube (not shown). 28 is
It is a suction hole provided in a predetermined portion of the cylinder main body 21 and is connected to a vacuum generator via a joint 29 inserted therein and a tube (not shown). The material of the cylinder main body 21 is acrylic or PVC because of the advantage that the inside can be seen, but aluminum or stainless steel is used with priority given to the durability of the tank.

【0012】30は、フランジ状栓24の下面にあてが
われる下板である。これらの下板30およびフランジ状
栓24の接合面にそれぞれ凹部が形成されることによ
り、両部材24、30を相互に当接させたときにベロー
室31が形成される。
Reference numeral 30 denotes a lower plate applied to the lower surface of the flanged plug 24. By forming a concave portion on each of the joint surfaces of the lower plate 30 and the flanged plug 24, a bellows chamber 31 is formed when the two members 24, 30 are brought into contact with each other.

【0013】32は、フランジ状栓24と下板30とを
互いに接合させる際に挿入されたシート状のベローフラ
ムである。このベローフラム32によって前記ベロー室
31は上下の空間31a、31bに2分される。33は、
下板30、ベローフラム32およびフランジ状栓24を
筒本体21に取り付けるためのボルトである。ボルト2
2および33は筒本体21の円周に沿って複数個取りつ
けられる。ベローフラム32としては耐久性の面から布
入り耐油性ゴムを用いた。
Reference numeral 32 denotes a sheet-shaped bellows ram inserted when the flanged plug 24 and the lower plate 30 are joined to each other. The bellows chamber 32 divides the bellows chamber 31 into upper and lower spaces 31a and 31b. 33 is
It is a bolt for attaching the lower plate 30, the bellow flam 32 and the flanged plug 24 to the cylinder main body 21. Bolt 2
A plurality of 2 and 33 are attached along the circumference of the cylinder main body 21. As the bellow flam 32, a cloth-containing oil-resistant rubber was used from the viewpoint of durability.

【0014】フランジ状栓24の中央には、上下方向に
貫通する、じょうご(ろうと)状の排水導管34が形成さ
れており、下板30の中央にも上下方向に貫通する空気
導管35が形成されている。この排水導管34の下端は
前記空間31aに開口し、空気導管35の上端は前記空
間31bに開口する。又、フランジ状栓24には、L字
形状の吐出導管36が形成されており、その一端は前記
空間31aに開口し、その他端は外部に開口している。
37、38は、前記空気導管35および吐出導管36の
他端にそれぞれ取りつけられた継手である。
A funnel-shaped drainage conduit 34 is formed in the center of the flanged plug 24 in a vertical direction, and an air conduit 35 is also formed in the center of the lower plate 30 in the vertical direction. Have been. The lower end of the drain conduit 34 opens into the space 31a, and the upper end of the air conduit 35 opens into the space 31b. Further, an L-shaped discharge conduit 36 is formed in the flanged plug 24, one end of which is open to the space 31a, and the other end is open to the outside.
Reference numerals 37 and 38 denote joints attached to the other ends of the air conduit 35 and the discharge conduit 36, respectively.

【0015】次に本水抜き装置20の動作を述べる。待
機状態においては図3のごとく、ベローフラム32は平
面状態に保たれている。
Next, the operation of the drainage device 20 will be described. In the standby state, as shown in FIG. 3, the bellows flam 32 is kept in a flat state.

【0016】図4(A)は、研磨時(テーブルにガラス板
を吸引固定)における本水抜き装置の動作状態を示して
いる。継手37を通じて空気導管35に圧空が供給さ
れ、ベローフラム32が上方に撓むことにより、排水導
管34および吐出導管36の一端がこのベローフラム3
2で塞がれるようになる。一方、継手29を通じて真空
引きが行われることにより、テーブルから吸い込んだ研
磨液Qがタンク内に溜まる。
FIG. 4A shows an operation state of the present water draining device during polishing (a glass plate is fixed on a table by suction). Compressed air is supplied to the air conduit 35 through the joint 37, and the bellows ram 32 flexes upward.
2 will be closed. On the other hand, when the vacuum is drawn through the joint 29, the polishing liquid Q sucked from the table accumulates in the tank.

【0017】研磨が終わり、前記吸引固定を解除するた
めに、継手29を通じてタンクT内へ圧空が供給され、
これと同時に空気導管35が大気圧に開放される。これ
により、図4(B)のごとく、ベローフラム32が下方に
撓むことにより、排水導管34および吐出導管36の一
端が開放され、排水導管34と吐出導管36とがベロー
室31の上側空間31aを通じて連通するため、タンク
内に溜まっていた研磨液Qが吐出導管36から外部へ吐
出される。
After the polishing, the compressed air is supplied into the tank T through the joint 29 in order to release the suction fixing.
At the same time, the air conduit 35 is opened to the atmospheric pressure. As a result, as shown in FIG. 4B, the bellow flam 32 is bent downward, so that one end of the drain conduit 34 and one end of the discharge conduit 36 are opened, and the drain conduit 34 and the discharge conduit 36 are connected to the upper space 31 a The polishing liquid Q stored in the tank is discharged from the discharge conduit 36 to the outside.

【0018】図5および図6は、本水抜き装置20の配
管系統図を示し、それぞれ吸引固定時の状態にある図4
(A)および吸引解除の状態にある図4(B)の状態を示
す。ここで用いた真空発生器は、圧空の流れ込みによ
り、真空を発生させるエジェクターである。バルブを切
り替えるためのソレノイド(SOL)のオン/オフ状態を
次に示す。
FIGS. 5 and 6 show piping diagrams of the present water draining device 20, and FIG.
(A) and the state of FIG. 4 (B) in the state of suction release. The vacuum generator used here is an ejector that generates vacuum by flowing compressed air. The ON / OFF state of the solenoid (SOL) for switching the valve is shown below.

【0019】 [0019]

【0020】上述の実施形態では、本水抜き装置を研磨
機に使用したが、真空吸引によりワークを固定する機構
を備えた搬送機などにも使用できる。
In the above-described embodiment, the present drainage device is used for a polishing machine. However, the present drainage device can also be used for a transfer device having a mechanism for fixing a work by vacuum suction.

【0021】[0021]

【発明の効果】以上説明したように、本発明の水抜き装
置は、ボールで排出口を閉じる従来の手法に替え、平面
状のベローフラムを撓ませることで、排出口を直接に閉
じたり、開放するといった単純な機構を採用したので目
詰まりの発生をなくすことが出来、装置が異常停止する
ことが完全になくなった。そして本発明の水抜き装置は
分解可能であるため容易に部品の交換やタンク内の清掃
をすることができる。
As described above, the draining device of the present invention replaces the conventional method of closing the discharge port with a ball, and directly closes or opens the discharge port by bending the flat bellows flam. As a result, the occurrence of clogging can be eliminated, and the abnormal stop of the device has been completely eliminated. Since the drainage device of the present invention can be disassembled, parts can be easily replaced or the tank can be easily cleaned.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 従来の水抜き装置の使用例を示した図FIG. 1 is a diagram showing an example of use of a conventional water removal device.

【図2】 図1の水抜き装置の動作を示した図FIG. 2 is a view showing the operation of the drainage device of FIG. 1;

【図3】 本発明の水抜き装置の1実施形態を示した断
面図
FIG. 3 is a cross-sectional view showing one embodiment of a drainage device of the present invention.

【図4】 図3の水抜き装置の動作を示した図FIG. 4 is a view showing the operation of the drainage device of FIG. 3;

【図5】 図4(A)の状態における配管系を示した図FIG. 5 is a diagram showing a piping system in the state of FIG.

【図6】 図4(B)の状態における配管系を示した図FIG. 6 is a diagram showing a piping system in the state of FIG. 4 (B).

【符号の説明】[Explanation of symbols]

20 水抜き装置 21 筒本体 23 上板 24 フランジ状栓 25 Oリング 30 下板 31 ベロー室 31a 上側空間 31b 下側空間 32 ベローフラム 34 排水導管 35 空気導管 36 吐出導管 DESCRIPTION OF SYMBOLS 20 Drainage device 21 Cylinder main body 23 Upper plate 24 Flange plug 25 O-ring 30 Lower plate 31 Bellows chamber 31a Upper space 31b Lower space 32 Bellow flam 34 Drainage conduit 35 Air conduit 36 Discharge conduit

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 真空中に吸い込まれた加工水を溜める水
抜き装置(20)であって、 前記真空回路に挿入されるタンク(T)と、 前記タンクの下方に位置するベロー室(31)と、 前記ベロー室を上下に二分するように設けられたベロー
フラム(32)と、 前記タンクに溜まった加工水を前記ベロー室の上側空間
に対し、上方から導く排出導管(34)と、 前記上側空間に導かれた加工水を外部に吐出させるため
の吐出導管(36)と、 前記ベロー室の下側空間に対し、選択的に圧空を供給す
るための空気導管(35)と、を備え、 前記空気導管に圧空を供給したとき、ベローフラムが上
方へ撓んで前記排出導管の端部を閉じることを特徴とす
る水抜き装置。
1. A drainage device (20) for storing processing water sucked in a vacuum, comprising: a tank (T) inserted into the vacuum circuit; and a bellows chamber (31) located below the tank. A bellows fram (32) provided so as to divide the bellows chamber into upper and lower parts; a discharge conduit (34) for guiding processing water accumulated in the tank to an upper space of the bellows chamber from above; A discharge conduit (36) for discharging the processing water guided to the space to the outside, and an air conduit (35) for selectively supplying compressed air to the lower space of the bellows chamber, The drainage device according to claim 1, wherein, when pressurized air is supplied to the air conduit, the bellows ram is bent upward to close an end of the discharge conduit.
【請求項2】 上記真空回路の真空時には上記空気導管
に圧空が供給され、前記真空回路に圧空を供給する時、
前記空気導管を大気圧に開放することで、タンクに溜ま
った加工水を上記吐出導管を通じて外部に吐出させる請
求項1記載の水抜き装置。
2. When the vacuum circuit is in a vacuum state, compressed air is supplied to the air conduit, and when compressed air is supplied to the vacuum circuit,
The water draining device according to claim 1, wherein the processing water accumulated in the tank is discharged to the outside through the discharge conduit by opening the air conduit to atmospheric pressure.
【請求項3】 上記ベローフラムは布入り耐油性ゴム材
からなる請求項1または2に記載の水抜き装置。
3. The drainage device according to claim 1, wherein the bellows flam is made of a cloth-containing oil-resistant rubber material.
【請求項4】 本装置を構成する主要部品がアルミ製ま
たはステンレス製である請求項1ないし3のいずれかに
記載の水抜き装置。
4. The drainage device according to claim 1, wherein the main components constituting the device are made of aluminum or stainless steel.
JP35893499A 1999-12-17 1999-12-17 Drainage device Expired - Fee Related JP3477131B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP35893499A JP3477131B2 (en) 1999-12-17 1999-12-17 Drainage device
TW089123076A TWI240055B (en) 1999-12-17 2000-11-02 Drain device
KR1020000065897A KR100687483B1 (en) 1999-12-17 2000-11-07 Water drainer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35893499A JP3477131B2 (en) 1999-12-17 1999-12-17 Drainage device

Publications (2)

Publication Number Publication Date
JP2001170834A true JP2001170834A (en) 2001-06-26
JP3477131B2 JP3477131B2 (en) 2003-12-10

Family

ID=18461880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35893499A Expired - Fee Related JP3477131B2 (en) 1999-12-17 1999-12-17 Drainage device

Country Status (3)

Country Link
JP (1) JP3477131B2 (en)
KR (1) KR100687483B1 (en)
TW (1) TWI240055B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104015200A (en) * 2014-05-16 2014-09-03 铜陵和武机械制造有限责任公司 Mechanical arm suction cup base
CN105381690A (en) * 2015-12-10 2016-03-09 苏州瑞格思创光电科技有限公司 Vacuum liquid filtering device and control method thereof
CN106169592A (en) * 2016-08-30 2016-11-30 绍兴俊吉能源科技有限公司 Gravity ball moisture trap

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104015200A (en) * 2014-05-16 2014-09-03 铜陵和武机械制造有限责任公司 Mechanical arm suction cup base
CN105381690A (en) * 2015-12-10 2016-03-09 苏州瑞格思创光电科技有限公司 Vacuum liquid filtering device and control method thereof
CN106169592A (en) * 2016-08-30 2016-11-30 绍兴俊吉能源科技有限公司 Gravity ball moisture trap

Also Published As

Publication number Publication date
TWI240055B (en) 2005-09-21
KR20010060265A (en) 2001-07-06
JP3477131B2 (en) 2003-12-10
KR100687483B1 (en) 2007-02-27

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