JP2001147246A - Discharge probe and electrostatic discharge testing machine equipped with it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a problem such that a test cannot be performed with good reproducibility. SOLUTION: The extension part 51d of a detachable discharge tip guide 51 is formed in such a way that its cross section perpendicular to the axial direction of a discharge tip 22 is an arc shape which is smaller than 1/2 π. The arc shape is constant up to the tip 51c of the detachable tip guide 51.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge probe for discharging an electric charge stored therein during an indirect discharge test of an electrostatic discharge test, and an electrostatic discharge tester equipped with the discharge probe.

[0002]

2. Description of the Related Art FIG. 10 is a test layout diagram showing a state of an electrostatic discharge test using a conventional electrostatic discharge tester, and FIG. 11 is a cross sectional view showing a conventional discharge probe.

In FIG. 1, reference numeral 1 denotes an insulating test table, 2 denotes a metal coupling plate (discharged object) placed on the test table 1, 3 denotes a test device set on the coupling plate 2, Is a ground plate on which the test table 1 is arranged, and 5 is a resistor connecting the coupling plate 2 and the ground plate 4. The value of the resistor 5 is specified in an electrostatic discharge test defined by the International Electrotechnical Commission (IEC) and is 470Ω.

[0004] Further, 6 is a main body of the electrostatic discharge tester, 7 is a discharge probe for discharging the electric charge stored therein, 8 is a high-voltage transmission line connecting the main body 6 of the electrostatic discharge tester and the discharge probe 7,
9 is the ground and ground plate 4 of the main body 6 of the electrostatic discharge tester.
Is a ground return line connecting the ground of the electrostatic discharge tester main body 6 and the discharge probe 7. The electrostatic discharge tester is an electrostatic discharge tester body 6
And a discharge probe 7.

[0005] In the discharge probe 7, 11 is a handle of the discharge probe 7, 12 is an insulative enclosure surrounding the main part of the discharge probe 7, 13 is a metal enclosure provided inside the enclosure 12, and 14 is a metal enclosure 13. A ground terminal to which the ground return line 10 is connected;
3, a discharge switch circuit portion provided inside the enclosure 12, 16 is provided inside the enclosure 12, one electrode is connected to the cap 15, and the other electrode is connected to the discharge switch. Circuit part 1
Reference numeral 6 denotes a CR unit, reference numeral 18 denotes an electrode connected to the output side of the discharge switch circuit section 16, reference numeral 19 denotes a metal discharge transmission rod having one end in contact with the electrode 18, and reference numeral 20 denotes an insulating material for protecting the discharge transmission rod 19. A shield cover, 21 is a metal shield provided inside the shield cover 20, and 22 is a base end 2.
2a is joined to the other end of the discharge transfer rod 19, and a discharge chip through which discharge current flows from the tip 22b to the coupling plate 2; 23 is formed integrally with the shield cover 20; Integrated discharge tip guide to cover 2
Reference numeral 4 denotes a hand switch connected to the discharge switch circuit unit 16.

FIG. 12 is a charge / discharge equivalent circuit diagram in an electrostatic discharge test state using a conventional electrostatic discharge tester. In the figure, 25 is a DC high-voltage power supply, 26 is a first switch, 2
7 is a first resistor, 28 is a capacitor, 29 is a second resistor, and 30 is a second switch interlocked with the hand switch 24. 12, the same or equivalent components as those in FIGS. 10 and 11 are denoted by the same reference numerals.
The DC high-voltage power supply 25, the first switch 26, and the first resistor 27 are provided on the main body 6 of the electrostatic discharge tester. The capacitor 28, the second resistor 29, and the second switch 30 are connected to the discharge switch of the discharge probe 7. It is provided in the circuit section 16.

Next, the operation will be described. When performing the electrostatic discharge test, first, the power supply of the electrostatic discharge tester main body 6 is turned on, and the first switch 26 is turned on. When the first switch 26 is turned on, a charging current flows from the DC high-voltage power supply 25 to the capacitor 28 via the first resistor 27 and the high-voltage transmission line 8, and the capacitor 28 is charged. Then, so that the discharge chip 22 is parallel to the coupling plate 2,
With the tip of the discharge tip 22 of the discharge probe 7 in contact with the thickness portion of the coupling plate 2, the hand switch 24 is operated to turn on the second switch 30 to perform an indirect discharge test. When the second switch 30 is turned on, the capacitor 28 is discharged, and the discharge current flows through the second resistor 29, the second switch 30 and the discharge chip 22 through the coupling plate 2.
And further flows to the ground plate 4 via the resistor 5.
Further, it flows to the ground of the electrostatic discharge tester main body 6 via the ground return line 10.

FIG. 13 shows an example of a conventional discharge probe.
FIG. 3 is a discharge current waveform diagram obtained by measurement by a method specified in an electrostatic discharge test defined by EC. The vertical axis is discharge current i, and the horizontal axis is time t. In the figure, 31 is an initial peak, 32 is ringing that appears in a high frequency region after the initial peak 31, and 33 is random noise. In the electrostatic discharge test defined by IEC,
As the discharge current waveform, the peak current value, rise time,
The current value at 30 nsec and the current value at 60 nsec are defined.

[0009]

Since the conventional discharge probe is configured as described above, in the indirect discharge test of the electrostatic discharge test, the tip of the discharge chip 22 is limited to a very limited portion such as the thickness portion of the coupling plate 2. 22b, the discharge probe 7 is supported by the operator's hand and the discharge point where the tip 22b of the discharge tip 22 contacts.
The tip 2 of the discharge tip 22 depends on the weight of the discharge probe 7.
Contact between 2b and the coupling plate 2 becomes unstable, and random noise 33 is generated in the discharge current waveform, and a stable discharge current waveform cannot be obtained. Therefore, there is a problem that the test cannot be performed with high reproducibility.

Further, in the conventional discharge probe, the ringing 32 occurs in the discharge current waveform and changes depending on the state of the discharge path such as stray capacitance, parasitic inductance, and ground impedance, so that a stable discharge current waveform cannot be obtained. Therefore, there is a problem that the test cannot be performed with high reproducibility.

The present invention has been made in order to solve the above-mentioned problems, and provides a stable discharge current waveform with stable contact between the tip 22b of the discharge chip 22 and the coupling plate 2 and reduced random noise. Accordingly, an object of the present invention is to provide a discharge probe capable of performing a test with good reproducibility and an electrostatic discharge tester provided with the same.

It is another object of the present invention to provide a discharge probe capable of performing a test with high reproducibility by obtaining a stable discharge current waveform with reduced ringing, and an electrostatic discharge tester having the same.

In order to maintain a constant discharge gap in the event of air discharge, a conventional discharge probe 7 shown in FIG.
In some cases, a detachable discharge tip guide shown in FIG. FIG. 14 (A)
FIG. 14B is a perspective view, and FIG. 14B is a front view as viewed from a direction A in FIG. In the drawing, reference numeral 34 denotes a cylindrical detachable discharge tip guide which is mounted on the integral discharge tip guide 23 and covers the outer surface of the discharge chip 22, and reference numeral 35 denotes a detachable discharge tip guide 34 from the tip of the detachable discharge tip guide 34.
Is a notch formed in the longitudinal direction. Notch 35,
Four portions are formed at intervals of 90 °.

Such a detachable discharge tip guide 34
Is attached to the integrated tip guide 23 of the conventional discharge probe 7 shown in FIG.
By inserting the coupling plate 2 into the notch 35, the discharge probe 7 is supported, and the contact between the tip 22b of the discharge chip 22 and the coupling plate 2 can be stabilized. However, when the coupling plate 2 is inserted into the notch 35 of the detachable chip guide 34, the portion between the notches 35 protrudes from the edge of the coupling plate 2 to the far side of the coupling plate 2. When the edge does not protrude sufficiently from the edge of the test table 1, the detachable discharge tip guide 34 enters between the coupling plate 2 and the test table 1, and the coupling plate 2 rises significantly from the test table 1, thereby affecting the test. Will be given.

Further, as a discharge probe having a discharge tip guide, one disclosed in Japanese Patent Application Laid-Open No. 64-13469 is known. FIG.
FIG. 1 is a side view showing a discharge probe disclosed in Japanese Unexamined Patent Publication (Kokai) No. H10-15095. In the drawing, 36 is a handle of the discharge probe, 37 is a discharge chip, 38 is a discharge chip guide covering the outer surface of the discharge chip 37, 39 is an opening formed at the tip of the discharge chip guide 38, and 40 is provided on the discharge chip 37. A cam 41 is attached to the tip of a rotating shaft of a motor (not shown) and reciprocates the discharge tip guide 38. A compression spring 41 is provided between the handle 36 and the discharge tip guide 38.

In the case of the discharge probe provided with such a discharge tip guide 38, since the structure is not such that the discharge probe is held on the coupling plate 2, instability of contact between the tip of the discharge chip 37 and the coupling plate 2 is obtained. Cannot be eliminated, random noise occurs in the discharge current waveform, and the test cannot be performed with good reproducibility.

[0017]

A discharge probe according to the present invention has a cross section perpendicular to the axial direction of the discharge tip in an extended portion of the discharge tip guide having an arc shape smaller than 1 / 2π. It is constant up to the tip of the guide.

In the discharge probe according to the present invention, the discharge tip guide covers the entire outer periphery of the base end side outer surface of the discharge tip, and extends from the cylindrical portion to cover a part of the distal end side outer surface of the discharge tip. An arc-shaped portion forming an extended portion of the tip guide, wherein a cross section of the arc-shaped portion perpendicular to the axial direction of the discharge chip has an arc shape smaller than 1 / 2π, and the arc shape extends to the tip of the discharge chip guide. What is constant.

In the discharge probe according to the present invention, the cross section perpendicular to the axial direction of the discharge tip at the extension of the discharge tip guide has an arc shape smaller than 1 / 2π, and the arc shape is directed toward the tip of the discharge tip guide. It gradually becomes smaller.

In the discharge probe according to the present invention, the discharge tip guide covers the entire outer periphery of the base end side outer surface of the discharge tip, and extends from the cylindrical portion to cover a part of the distal end outer surface of the discharge tip. An arc-shaped portion forming an extended portion of the tip guide, wherein a cross section of the arc-shaped portion perpendicular to the axial direction of the discharge tip is an arc shape, and the arc shape gradually decreases toward the tip of the discharge tip guide. It becomes.

In the discharge probe according to the present invention, the discharge tip guide is detachable.

In the discharge probe according to the present invention, the extended portion of the discharge tip guide has a notch formed parallel to the axial direction of the discharge tip from the distal end toward the base end of the discharge tip.

In the discharge probe according to the present invention, the discharge tip guide is formed of a resin mixed with a magnetic material.

In the electrostatic discharge tester according to the present invention, the cross section perpendicular to the axial direction of the discharge chip at the extension of the discharge chip guide has an arc shape smaller than 1 / 2π, and the arc shape extends to the tip of the discharge chip guide. What is constant.

In the electrostatic discharge tester according to the present invention, the cross section perpendicular to the axial direction of the discharge chip at the extension of the discharge chip guide has an arc shape smaller than 1 / 2π, and the arc shape is at the tip of the discharge chip guide. It gradually becomes smaller.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below. Embodiment 1 FIG. The discharge probe in each of the embodiments described below is obtained by attaching the detachable discharge tip guide described in each of the following embodiments to the integrated discharge tip guide 23 of the conventional discharge probe 7 shown in FIG. It is composed.

FIG. 1 is a view showing a detachable discharge tip guide of a discharge probe according to Embodiment 1 of the present invention. 1A is a perspective view, and FIG. 1B is a front view as viewed from a direction B in FIG. 1A. In the drawing, reference numeral 51 denotes a detachable discharge tip guide, 51a denotes a cylindrical portion of the detachable discharge tip guide 51, and 51b denotes an arc-shaped portion extending from the cylindrical portion 51a of the detachable discharge tip guide 51. The detachable discharge tip guide 51 has a shape cut out parallel to the longitudinal direction of the cylinder, leaving an arc of less than 1 / 2π from the middle toward the tip from the base end of the cylinder.

When the detachable discharge tip guide 51 is mounted on the integrated discharge tip guide 23, the cylindrical portion 51 a of the detachable discharge tip guide 51 is
The arc-shaped portion 51b covers the entire outer periphery of the outer surface on the 2a side, and covers a part of the outer surface on the tip 22b side of the discharge chip 22. The arc-shaped portion 51b extends further in the axial direction than the tip 22b of the discharge tip 22. Hereinafter, a portion extending further in the axial direction than the tip 22b of the discharge tip 22 is referred to as an extension of the detachable discharge tip guide 51. The arc-shaped portion 51b has a cross section perpendicular to the axial direction of the discharge tip 22 that is 1 /
It has an arc shape smaller than 2π, and the arc shape is constant up to the tip 51 c of the discharge tip guide 51.

FIG. 2 is a diagram showing a state in which the tip of the discharge tip of the discharge probe according to the first embodiment of the present invention is brought into contact with the coupling plate. 2, the same or equivalent components as those in FIGS. 1, 10, and 11 are denoted by the same reference numerals.

As shown in FIG. 2, in order to conduct an indirect discharge test, when the tip 22b of the discharge chip 22 is brought into contact with the thick portion of the coupling plate 2 so that the discharge chip 22 is parallel to the coupling plate 2, In the discharge probe of this embodiment, two sides of the extension 51 d of the detachable discharge tip guide 51 are in contact with the upper surface of the coupling plate 2. Thus, the first embodiment
In addition to the operator's hand, the discharge probe of (1) has a total of three places: two sides of the extension 51d of the detachable discharge tip guide 51, and discharge points where the tip 22b of the discharge tip 22 and the coupling plate 2 come into contact. Since the discharge probe is supported, the contact between the tip 22b of the discharge chip 22 and the coupling plate 2 is stabilized.
Such contact stability is obtained irrespective of whether the edge of the coupling plate 2 and the edge of the test table 1 are flush.

FIG. 3 is a discharge current waveform diagram obtained by using the discharge probe according to the first embodiment of the present invention and measuring by a method specified in an electrostatic discharge test defined by IEC. The vertical axis is discharge current i, and the horizontal axis is time t.

As shown in FIG. 3, in the discharge probe according to the first embodiment of the present invention,
Since the contact between b and the coupling plate 2 is stable, the random noise 33 occurring in the discharge current waveform shown in FIG. 13 is reduced.

As described above, according to the first embodiment, at the time of the indirect discharge test of the electrostatic discharge test, the extension portion 51d of the detachable discharge tip guide 51 besides the operator's hand is used.
And the discharge probe where the tip 22b of the discharge chip 22 and the coupling plate 2 are in contact with each other, the discharge probe is supported at a total of three places. The tip 2 of the discharge tip 22 is
2b and the coupling plate 2 are stably contacted, and an effect of obtaining a stable discharge current waveform with reduced random noise is obtained.

Embodiment 2 In the second embodiment, a case where a notch is formed in the detachable discharge tip guide 51 of the discharge probe of the first embodiment will be described.

FIG. 4 is a view showing a detachable discharge tip guide of a discharge probe according to Embodiment 2 of the present invention. 4A is a perspective view, and FIG. 4B is a front view as viewed from a direction C in FIG. 4A. In the figure, reference numeral 52 denotes a notch formed in an extension of the detachable discharge tip guide 51. 4, the same reference numerals are given to the same or equivalent components as those in FIG.

When the detachable discharge tip guide 51 is mounted on the integrated discharge tip guide 23, the notch 52 is formed by the distal end 51 c of the detachable discharge tip guide 51.
2 and is parallel to the axial direction of the discharge tip 22.

When the notch 52 is formed in the extended portion of the detachable discharge chip guide 51 as described above, when the edge of the coupling plate 2 protrudes from the edge of the test table 1, the notch of the detachable discharge chip guide 51 is formed. By supporting the discharge probe by inserting the coupling plate 2 into the tip 52,
The contact between b and the coupling plate 2 is stabilized.

As described above, according to the second embodiment, when the edge of the coupling plate 2 protrudes from the edge of the test table 1, the coupling plate 2 is inserted into the notch 52 of the detachable discharge chip guide 51. Thus, by supporting the discharge probe, an effect of stabilizing the contact between the tip 22b of the discharge chip 22 and the coupling plate 2 can be obtained. According to the second embodiment, the same effect as that of the first embodiment can be obtained.

Embodiment 3 FIG. 5 is a diagram showing a detachable discharge tip guide of a discharge probe according to Embodiment 3 of the present invention. FIG. 5A is a perspective view, and FIG.
It is the front view seen from D direction in (A). In the figure,
Reference numeral 53 denotes a detachable discharge tip guide, 53a denotes a cylindrical portion of the detachable discharge tip guide 53, and 53b denotes an arc-shaped portion extending from the cylindrical portion 53a of the detachable discharge tip guide 53. The detachable discharge tip guide 53 has a shape cut off so as to leave a 1 / 2π arc on the way from one end of the cylinder to the other end, and to gradually leave a smaller arc toward the other end. ing.

When the detachable discharge tip guide 53 is mounted on the integrated discharge tip guide 23, the cylindrical portion 53 a of the detachable discharge tip guide 53 is
The arc-shaped portion 53b covers the entire outer periphery of the outer surface on the 2a side, and covers a part of the outer surface on the tip 22b side of the discharge chip 22. The arc-shaped portion 53b extends further in the axial direction than the tip 22b of the discharge chip 22. Hereinafter, a portion extending further in the axial direction than the tip end 22b of the discharge tip 22 is referred to as an extension of the detachable discharge tip guide 53. The arc-shaped portion 53b has an arc-shaped cross section perpendicular to the axial direction of the discharge chip 22, and the arc shape is 1 / 2π at a portion where the cylindrical portion 53a and the arc-shaped portion 53b are connected. It gradually decreases toward the tip 53c of the detachable discharge tip guide 53, and converges to one point at the tip 53c of the detachable discharge tip guide 53. Removable discharge tip guide 5
In the extension of 3, the cross section perpendicular to the axial direction of the discharge tip 22 has an arc shape smaller than 1 / 2π.

FIG. 6 is a diagram showing a state in which the tip of the discharge tip of the discharge probe according to the third embodiment of the present invention is brought into contact with the coupling plate. 6, the same or equivalent components as those in FIGS. 5, 10, and 11 are denoted by the same reference numerals.

As shown in FIG. 6, in the discharge probe according to the third embodiment, when the edge of the coupling plate 2 and the edge of the test table 1 are on the same plane, the distance between the coupling plate 2 and the test table 1 is increased. By supporting the discharge probe by inserting the extension 53d of the detachable discharge tip guide 53, the distal end 22 of the discharge tip 22 is supported.
The contact between b and the coupling plate 2 is stabilized. In this case, since the extended portion 53d of the detachable discharge tip guide 53 is thin, the coupling plate 2 does not float so much from the test table 1 and does not affect the test.

As described above, according to the third embodiment, when the edge of the coupling plate 2 and the edge of the test table 1 are on the same plane, the coupling plate 2 does not float so much from the test table 1, By inserting the extended portion 53d of the detachable discharge tip guide 53 between the test table 1 and the test table 1 to support the discharge probe, the tip 22b of the discharge tip 22 and the coupling plate 2 can be connected without affecting the test. The effect of stabilizing the contact with is obtained. Further, similarly to the first embodiment, in addition to the operator's hand, two sides of the extended portion 53d of the detachable discharge tip guide 53 and the tip 22b of the discharge tip 22
By supporting the discharge probe at a total of three places, that is, the discharge point where the coupling plate 2 comes into contact with the coupling plate 2, the effect of stabilizing the contact between the tip 22b of the discharge chip 22 and the coupling plate 2 can be obtained.

Embodiment 4 FIG. In the fourth embodiment, a case where a notch is formed in the detachable discharge tip guide 53 of the discharge probe according to the third embodiment will be described.

FIG. 7 is a view showing a detachable discharge tip guide of a discharge probe according to Embodiment 4 of the present invention. FIG. 7A is a perspective view, and FIG. 7B is a front view as seen from the direction E in FIG. 7A. In the figure, reference numeral 54 denotes a notch formed in an extension of the detachable discharge tip guide 53. 7, the same or equivalent components as those in FIG. 5 are denoted by the same reference numerals.

When the detachable discharge tip guide 53 is mounted on the integrated discharge tip guide 23, the notch 54 is formed by the distal end 53 c of the detachable discharge tip guide 53.
2 and is parallel to the axial direction of the discharge tip 22.

When the notch 54 is formed in the extension of the detachable discharge tip guide 53 as described above, when the edge of the coupling plate 2 protrudes from the edge of the test table 1, the notch of the detachable discharge tip guide 53 is formed. By supporting the discharge probe by inserting the coupling plate 2 into 54, the tip 22 of the discharge chip 22 is
The contact between b and the coupling plate 2 is stabilized.

As described above, according to the fourth embodiment, when the edge of the coupling plate 2 protrudes from the edge of the test table 1, the coupling plate 2 is inserted into the notch 54 of the detachable discharge tip guide 53. Thus, by supporting the discharge probe, an effect of stabilizing the contact between the tip 22b of the discharge chip 22 and the coupling plate 2 can be obtained. According to the fourth embodiment, the same effect as that of the third embodiment can be obtained.

Embodiment 5 In the fifth embodiment, a case will be described in which the detachable discharge tip guide of the discharge probe according to the first to fourth embodiments is formed of a resin mixed with a magnetic material. As a resin mixed with a magnetic material, there is, for example, Bustalade (trade name, manufactured by Tokin Co., Ltd.).

FIG. 8 shows an electrostatic discharge test provided with a discharge probe according to the fifth embodiment of the present invention, in which the detachable discharge tip guide of the discharge probe according to the first to fourth embodiments is formed of a resin mixed with a magnetic material. FIG. 4 is a charge / discharge equivalent circuit diagram in an electrostatic discharge test state using a machine. 55 is a discharge chip 22
Is the inductance provided on the path from the resistor 5 to the resistor 5. 8, the same or equivalent components as those in FIG. 12 are denoted by the same reference numerals.

As shown in FIG. 8, when the detachable discharge tip guide is formed of a resin mixed with a magnetic material, the discharge tip 2
In this state, the inductance 55 is provided in the path from 2 to the resistor 5.

FIG. 9 is a discharge current waveform diagram obtained by using the discharge probe according to the fifth embodiment of the present invention and measuring by a method specified in an electrostatic discharge test defined by IEC. The vertical axis is discharge current i, and the horizontal axis is time t.
In the figure, reference numeral 56 denotes ringing appearing in a high-frequency region after the initial peak 31.

As shown in FIG. 9, when the detachable discharge tip guide is formed of a resin mixed with a magnetic material, FIG.
A smaller ringing 56 occurs in the discharge current waveform than that shown in FIG. This is because, when the detachable discharge chip guide is formed of a resin mixed with a magnetic material, when a discharge current flows from the discharge chip 22 to the coupling plate 2, a magnetic field is generated in the detachable discharge chip guide, and high frequency characteristics are reduced. This is because a resistor having a resistance is formed, thereby suppressing high-frequency conducted electromagnetic waves. When the detachable discharge tip guide is formed of a resin mixed with a magnetic material, electromagnetic waves radiated from the discharge tip 22 are reduced.

As described above, according to the fifth embodiment, since the detachable discharge tip guide is formed of a resin mixed with a magnetic material, a stable discharge current waveform with reduced ringing can be obtained. The effect of reducing electromagnetic waves radiated from the discharge tip is obtained.

In each of the above embodiments, FIG.
The case where the detachable discharge tip guide is attached to the integral discharge tip guide 23 of the conventional discharge probe 7 shown in FIG. 1 to form the discharge probe in each embodiment has been described, but the conventional discharge probe 7 shown in FIG. By extending the integrated discharge tip guide 23, the same effect can be obtained even when a discharge probe equivalent to the discharge probe in each of the above-described embodiments is configured.

[0056]

As described above, according to the present invention, the cross section perpendicular to the axial direction of the discharge tip in the extension of the discharge tip guide has an arc shape smaller than 1 / 2π, and the arc shape is the discharge tip guide. In addition to the hand of the operator, the two sides of the extended portion of the discharge tip guide, the tip of the discharge tip, and the object to be discharged during the indirect discharge test of the electrostatic discharge test. The discharge probe can be supported at a total of three points, that is, the discharge point where the discharge probe contacts. For this reason, regardless of whether the edge of the discharge object protrudes sufficiently from the edge of the test table, the contact between the tip of the discharge chip and the discharge object is stable, and a stable discharge current waveform with reduced random noise is obtained. Obtainable. As a result, there is an effect that a discharge probe capable of performing a test with good reproducibility and an electrostatic discharge tester provided with the same can be obtained.

According to the present invention, the cross section perpendicular to the axial direction of the discharge chip at the extension of the discharge chip guide is 1 /
The arc shape is smaller than 2π, and the arc shape is configured to gradually decrease toward the tip of the discharge tip guide. The discharge probe can be supported at a total of three places, that is, two sides of the extended portion of the tip guide and a discharge point where the tip of the discharge chip and the discharge target are in contact with each other. For this reason, regardless of whether the edge of the discharge object protrudes sufficiently from the edge of the test table, the contact between the tip of the discharge chip and the discharge object is stable, and a stable discharge current waveform with reduced random noise is obtained. Obtainable. When the edge of the discharge target does not protrude sufficiently from the edge of the test table, insert the extension of the discharge chip guide between the discharge target and the test table without lifting the discharge target from the test table. To support the discharge probe. Therefore, the contact between the tip of the discharge chip and the discharge target is stabilized without affecting the test, and a stable discharge current waveform with reduced random noise can be obtained. As a result, there is an effect that a discharge probe capable of performing a test with good reproducibility and an electrostatic discharge tester provided with the same can be obtained.

According to the present invention, since the discharge tip guide is configured to be detachable, it is possible to obtain an optimal discharge probe for the object to be discharged, with the optimal discharge tip guide mounted on the object to be discharged. There is.

According to the present invention, since the extended portion of the discharge tip guide has a notch formed in parallel with the axial direction of the discharge tip from the distal end toward the base end of the discharge tip, When the edge of the object to be discharged protrudes from the edge of the test table, the discharge probe can be supported by inserting the object to be discharged into the notch of the discharge tip guide. For this reason, the contact between the tip of the discharge chip and the discharge target is stabilized, and a stable discharge current waveform with reduced random noise can be obtained. As a result, there is an effect that a discharge probe capable of performing a test with good reproducibility can be obtained.

According to the present invention, since the discharge tip guide is formed of a resin mixed with a magnetic material, a stable discharge current waveform with reduced ringing can be obtained. as a result,
There is an effect that a discharge probe capable of performing a test with high reproducibility can be obtained. Further, there is an effect that a discharge probe in which electromagnetic waves radiated from the discharge chip are reduced can be obtained.

[Brief description of the drawings]

FIGS. 1A and 1B are views showing a detachable discharge tip guide of a discharge probe according to Embodiment 1 of the present invention, wherein FIG. 1A is a perspective view and FIG. 1B is a front view as viewed from a direction B in FIG. .

FIG. 2 is a diagram showing a state in which the tip of the discharge tip of the discharge probe according to Embodiment 1 of the present invention is brought into contact with a coupling plate.

FIG. 3 is a discharge current waveform diagram obtained by using the discharge probe according to the first embodiment of the present invention and measuring by a method specified in an electrostatic discharge test defined by IEC.

4A and 4B are views showing a detachable discharge tip guide of a discharge probe according to a second embodiment of the present invention, wherein FIG. 4A is a perspective view, and FIG. 4B is a front view as viewed from a direction C in FIG. .

5A and 5B are views showing a detachable discharge tip guide of a discharge probe according to Embodiment 3 of the present invention, wherein FIG. 5A is a perspective view, and FIG. 5B is a front view as seen from the direction D in FIG. .

FIG. 6 is a diagram showing a state in which the tip of a discharge tip of a discharge probe according to Embodiment 3 of the present invention is in contact with a coupling plate.

7A and 7B are views showing a detachable discharge tip guide of a discharge probe according to Embodiment 4 of the present invention, wherein FIG. 7A is a perspective view, and FIG. 7B is a front view as seen from a direction E in FIG. .

FIG. 8 is a charge / discharge equivalent circuit diagram in an electrostatic discharge test state using an electrostatic discharge tester provided with a discharge probe according to Embodiment 5 of the present invention.

FIG. 9 is a discharge current waveform diagram obtained by using a discharge probe according to the fifth embodiment of the present invention and measuring by a method specified in an electrostatic discharge test defined by IEC.

FIG. 10 is a test layout showing an electrostatic discharge test state using a conventional electrostatic discharge tester.

FIG. 11 is a cross-sectional view showing a conventional discharge probe.

FIG. 12 is a charge / discharge equivalent circuit diagram in an electrostatic discharge test state using a conventional electrostatic discharge tester.

FIG. 13 is a discharge current waveform diagram obtained by using a conventional discharge probe and measuring by a method specified in an electrostatic discharge test defined by IEC.

14A and 14B are views showing a detachable discharge tip guide of a conventional discharge probe, wherein FIG. 14A is a perspective view, and FIG.
It is the front view seen from A direction inside.

FIG. 15 is a side view showing a discharge probe disclosed in JP-A-64-13469.

[Explanation of symbols]

2 Coupling plate (discharged object), 22 discharge chip, 22a
Proximal end, 22b distal end, 23 integrated discharge tip guide,
51, 53 Removable discharge tip guide, 51a, 53a
Cylindrical part, 51b, 53b arc-shaped part, 51c, 5
3c Tip, 51d, 53d Extension, 52, 54
Notch.

Claims (9)

[Claims] 1. A discharge tip having a base end supported thereon and having a discharge current flowing from a tip to a discharge target, and an extended portion which covers an outer surface of the discharge tip and further extends in an axial direction from a tip of the discharge tip. In a discharge probe having a discharge tip guide, an extension of the discharge tip guide has an arc shape whose cross section perpendicular to the axial direction of the discharge tip is smaller than 1 / 2π, and the arc shape of the discharge tip guide is A discharge probe characterized by being constant up to the tip. 2. A discharge tip guide, comprising: a cylindrical portion that covers the entire outer periphery of a base end side of the discharge tip; a part extending from the cylindrical portion to cover a part of a distal end side of the discharge tip; An arc-shaped portion forming an extended portion, wherein a cross-section of the arc-shaped portion perpendicular to the axial direction of the discharge chip has an arc shape smaller than 1 / 2π, and the arc shape extends to the tip of the discharge chip guide. The discharge probe according to claim 1, wherein the discharge probe is constant. 3. A discharge tip having a base end supported thereon and having a discharge current flowing from a tip end to an object to be discharged, and an extended portion that covers an outer surface of the discharge tip and extends further in the axial direction from the tip end of the discharge tip. In a discharge probe having a discharge tip guide, an extension of the discharge tip guide has an arc shape whose cross section perpendicular to the axial direction of the discharge tip is smaller than 1 / 2π, and the arc shape of the discharge tip guide is Discharge probe characterized in that it gradually decreases toward the tip. 4. A discharge chip guide, comprising: a cylindrical portion covering the entire outer periphery of a base end side of the discharge chip; and a part extending from the cylindrical portion and covering a part of a distal end side of the discharge chip. An arc-shaped portion forming an extended portion, wherein a cross section of the arc-shaped portion perpendicular to the axial direction of the discharge tip is an arc shape, and the arc shape gradually decreases toward the tip of the discharge tip guide. The discharge probe according to claim 3, wherein: 5. The discharge probe according to claim 1, wherein the discharge tip guide is detachable. 6. An extended portion of the discharge tip guide has a notch formed parallel to an axial direction of the discharge tip from a distal end thereof toward a base end side of the discharge tip. The discharge probe according to claim 3. 7. The discharge probe according to claim 1, wherein the discharge tip guide is formed of a resin mixed with a magnetic material. 8. An electrostatic discharge tester having an electrostatic discharge tester main body and a discharge probe connected to the electrostatic discharge tester main body, wherein the discharge probe has a base end supported and discharge current is applied from a front end. A discharge tip that flows through the discharge body, and a discharge tip guide that covers an outer surface of the discharge tip and has an extension that extends further in the axial direction from the tip of the discharge tip. An electrostatic discharge tester characterized in that a cross section perpendicular to the axial direction of the discharge tip has an arc shape smaller than 1 / 2π, and the arc shape is constant up to the tip of the discharge tip guide. 9. An electrostatic discharge tester comprising: an electrostatic discharge tester main body; and a discharge probe connected to the electrostatic discharge tester main body, wherein the discharge probe has a base end supported and discharge current is applied from a front end. A discharge tip that flows through the discharge body, and a discharge tip guide that covers an outer surface of the discharge tip and has an extension that extends further in the axial direction from the tip of the discharge tip. An electrostatic discharge testing machine, characterized in that a cross section perpendicular to the axial direction of the discharge tip has an arc shape smaller than 1 / 2π, and the arc shape gradually decreases toward the tip of the discharge tip guide.