JP2001143638A - Manufacturing method of electron gun and compensation electrode - Google Patents
Manufacturing method of electron gun and compensation electrodeInfo
- Publication number
- JP2001143638A JP2001143638A JP32083699A JP32083699A JP2001143638A JP 2001143638 A JP2001143638 A JP 2001143638A JP 32083699 A JP32083699 A JP 32083699A JP 32083699 A JP32083699 A JP 32083699A JP 2001143638 A JP2001143638 A JP 2001143638A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- opposing
- pair
- electron beam
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、電子銃に関し、特
にディスプレイモニタ等に使用されるインライン型電子
銃とそれに用いる補正電極に関する。[0001] 1. Field of the Invention [0002] The present invention relates to an electron gun, and more particularly to an in-line electron gun used for a display monitor and the like, and a correction electrode used therefor.
【0002】[0002]
【従来の技術】図8は従来のインライン型電子銃の一例
を示す縦断面図であり、図において51は電子を放出す
るカソード、52はこの電子の発生量を制御してさらに
加速する3極部、53は電界4極レンズ54を内包しか
つ弱い収束作用を有するプリレンズ、55は強い収束作
用を有するメインレンズ、56はシールドカップであ
る。図8の紙面の表側と裏側には図示したものとは別の
カソード及び加速・収束電極系がそれぞれ一組ずつ並行
に隣接配置されている。カソードが並んでいる方向を以
下ではインライン方向と呼ぶ。これらの各部材は所定の
間隔を置いて配置され、図示されていないビードガラス
で一体に固定支持されている。各々のカソードから放出
された3本の電子ビームはそれぞれR(赤)、G
(緑)、B(青)に対応し、CRT等の画面(蛍光面)
上に照射されると、カラー画像を形成する。2. Description of the Related Art FIG. 8 is a longitudinal sectional view showing an example of a conventional in-line type electron gun. In FIG. 8, reference numeral 51 denotes a cathode which emits electrons, and 52 denotes a three-electrode which controls the amount of generated electrons to accelerate further. Reference numeral 53 denotes a pre-lens which includes an electric field quadrupole lens 54 and has a weak convergence effect, 55 denotes a main lens having a strong convergence effect, and 56 denotes a shield cup. On the front side and the back side of the paper of FIG. 8, another set of cathodes and an accelerating / focusing electrode system, which are different from those shown in the drawing, are arranged adjacent to each other in parallel. The direction in which the cathodes are arranged is hereinafter referred to as an in-line direction. These members are arranged at predetermined intervals, and are integrally fixed and supported by a bead glass (not shown). The three electron beams emitted from each cathode are R (red) and G, respectively.
(Green), B (blue), CRT screen (fluorescent screen)
When illuminated above, it forms a color image.
【0003】図9は電界4極レンズ54の主要な部材を
示す縦断面図で、電子ビームは矢印10で示されたビー
ムライン方向に走る。図9において1は第1フォーカス
電極、2は第2フォーカス電極で、第2フォーカス電極
2は電子ビームの偏向収差を補正する補正電極21と絞
り加工によって形成された絞り部材22からなる。第1
フォーカス電極1と絞り部材22には電子ビームが通過
する円形の透孔1hと透孔22hが並行して3個所ず
つ、それぞれに設けられており、各透孔(開口)は互い
に同軸となるように配置されている。補正電極21は第
1フォーカス電極の円形の透孔1hに向かって突き出る
ように配置された対向電極部21aを有し、電子ビーム
は2枚の対向電極部21aで挟まれた空間を通過する。
31は第2フォーカス電極に第1フォーカス電極よりも
相対的に高い電位が印加されたときの等電位線を、32
の矢印はそのときのビームに働く力の向きを示す。図1
0は上記4極レンズの主要な部材を示す横断面図で、電
子ビームが通過する3組の円形の透孔と対向電極部21
aが描かれている。さらに、図11は補正電極21の全
体形状を示す概観図で、3組の対向電極部21aと電子
ビームの通過方向に略垂直方向に配置されている平板電
極部21cが示されている。FIG. 9 is a longitudinal sectional view showing main members of an electric quadrupole lens 54. An electron beam runs in a beam line direction indicated by an arrow 10. In FIG. 9, reference numeral 1 denotes a first focus electrode, 2 denotes a second focus electrode, and the second focus electrode 2 includes a correction electrode 21 for correcting the deflection aberration of the electron beam and a stop member 22 formed by drawing. First
The focus electrode 1 and the aperture member 22 are provided with three circular through holes 1h and two through holes 22h, respectively, through which an electron beam passes. The through holes (openings) are coaxial with each other. Are located in The correction electrode 21 has a counter electrode portion 21a disposed so as to protrude toward the circular through hole 1h of the first focus electrode, and the electron beam passes through a space between the two counter electrode portions 21a.
Reference numeral 31 denotes an equipotential line when a relatively higher potential is applied to the second focus electrode than the first focus electrode.
Arrows indicate the direction of the force acting on the beam at that time. FIG.
Numeral 0 is a cross-sectional view showing main members of the quadrupole lens. Three pairs of circular through holes through which an electron beam passes and a counter electrode 21
a is drawn. Further, FIG. 11 is a schematic view showing the overall shape of the correction electrode 21, which shows three sets of opposing electrode portions 21a and a plate electrode portion 21c which is arranged in a direction substantially perpendicular to the electron beam passing direction.
【0004】3本のカソードから放出された電子ビーム
はそれぞれ3極部52で成形、加速されたのち、プリレ
ンズ53ついで、メインレンズ54に入射する。通常、
第1フォーカス電極1には一定の第1フォーカス電圧
が、第2フォーカス電極2にはビームの偏向に伴ってダ
イナミックに変化する第2フォーカス電圧が印加され
る。プリレンズ53およびメインレンズ55による収束
作用を受けたのち、電子ビームは通常、セルフコンバー
ゼンス方式の偏向ヨーク(図示せず)で偏向作用を受
け、所定の位置で画面を照射する。セルフコンバーゼン
ス方式の偏向ヨークは、偏向作用の他に、3本のビーム
が全画面領域で一点に集中するように磁界4極レンズ作
用を有している。この磁界4極レンズ作用は水平方向に
発散、垂直方向に収束をもたらすように働き、その大き
さは画面中央でゼロ、画面周辺で最大となる。このため
偏向作用を受けた電子ビームは、垂直方向過収束の非点
収差を生じて、画面上のスポット像は縦長形状になる。
この偏向収差を補正し、正常なスポット像に修正するの
が電界4極レンズ54である。The electron beams emitted from the three cathodes are shaped and accelerated by the three-pole part 52, and then enter the pre-lens 53 and the main lens 54. Normal,
A fixed first focus voltage is applied to the first focus electrode 1, and a second focus voltage that dynamically changes with beam deflection is applied to the second focus electrode 2. After being converged by the pre-lens 53 and the main lens 55, the electron beam is normally deflected by a self-convergence type deflection yoke (not shown), and irradiates the screen at a predetermined position. The self-convergence type deflection yoke has a magnetic field quadrupole lens function so that three beams are concentrated at one point in the entire screen area in addition to the deflection function. The action of the magnetic quadrupole lens works to cause divergence in the horizontal direction and convergence in the vertical direction, and its magnitude becomes zero at the center of the screen and becomes maximum at the periphery of the screen. For this reason, the electron beam subjected to the deflection action causes astigmatism of vertical overconvergence, and the spot image on the screen has a vertically long shape.
The electric field quadrupole lens 54 corrects this deflection aberration and corrects it to a normal spot image.
【0005】この電界4極レンズ54は第1フォーカス
電極と第2フォーカス電極の電位が異なると、その機能
を発現する。たとえば第1フォーカス電極1に比べて第
2フォーカス電極2に印加される電圧が高い場合の等電
位線31は、図9に示されているように、インライン方
向に垂直な方向ではビームの進行方向に凸形に、逆にイ
ンライン方向では図10に示されているように凹形にな
る。その結果、ビームに働く力の向き32からもわかる
ように、インライン方向に垂直な方向では発散作用(図
9)、インライン方向では収束作用(図10)を生じ
る。すなわち、電界4極レンズが生成されている。この
4極レンズの強さは第1フォーカス電極1と第2フォー
カス電極2の電位差が大きいほど、また対向電極部21
aの長さが長いほど強い。When the electric potential of the first focus electrode is different from the electric potential of the second focus electrode, the electric quadrupole lens 54 exhibits its function. For example, when the voltage applied to the second focus electrode 2 is higher than that of the first focus electrode 1, the equipotential lines 31 are, as shown in FIG. In the in-line direction, on the contrary, it becomes concave as shown in FIG. As a result, as can be seen from the direction 32 of the force acting on the beam, a diverging effect occurs in the direction perpendicular to the in-line direction (FIG. 9), and a convergence effect occurs in the in-line direction (FIG. 10). That is, an electric field quadrupole lens is generated. The strength of the quadrupole lens increases as the potential difference between the first focus electrode 1 and the second focus electrode 2 increases, and
The longer the length of a, the stronger.
【0006】電界4極レンズは以上のような働きをする
もので、磁界4極レンズと適切に組み合わせると、画面
中央でのフォーカスを犠牲にすることなく、画面周辺で
生じる垂直方向過収束の非点収差を相殺することができ
る。そのためには4極レンズの強さを自在に設計出来る
ことが必要である。またレンズを構成する各電極は、安
価にしかも精度良く製造できることが重要である。The electric quadrupole lens functions as described above, and when properly combined with the magnetic quadrupole lens, the vertical overconvergence occurring around the screen can be reduced without sacrificing the focus at the center of the screen. Astigmatism can be offset. For that purpose, it is necessary that the strength of the quadrupole lens can be freely designed. It is important that each electrode constituting the lens can be manufactured at low cost and with high accuracy.
【0007】[0007]
【発明が解決しようとする課題】上記電界4極レンズを
構成する補正電極21は、通常折り曲げ工程を経て製造
される。その製造工程を示したのが図12である。まず
プレスによる打ち抜き加工で対向電極部の原形になる部
分43を形成した後(図12(a))、折り曲げにより
対向電極部21aを形成する(図12(b))。折り曲
げ加工では折り曲げ部分の長さに制約が生じる。その長
さhは、「プレス加工便覧(P234):日本塑性加工
学界編」に示されているように、板厚をt、曲げ半径を
rとすると、h>2t+rを満足する必要がある(図1
3参照)。折り曲げ部分の長さhがこれより短い場合、
折り曲げ端部にゆがみが生じるので、折り曲げ角度を精
度良く出せないなどの不具合が生じる。そのため、従来
の電極構造はレンズ作用の弱い4極レンズ用の補正電極
を製造するには適しておらず、レンズ設計の自由度を狭
めていた。The correction electrode 21 constituting the electric quadrupole lens is usually manufactured through a bending process. FIG. 12 shows the manufacturing process. First, after forming a portion 43 serving as the original shape of the counter electrode portion by punching with a press (FIG. 12A), the counter electrode portion 21a is formed by bending (FIG. 12B). In bending, the length of the bent portion is restricted. As shown in “Press Processing Handbook (P234): Japan Society for Plastic Working”, the length h needs to satisfy h> 2t + r, where t is the plate thickness and r is the bending radius. Figure 1
3). If the length h of the bent part is shorter than this,
Since the bent end portion is distorted, problems such as a failure to accurately determine the bending angle occur. Therefore, the conventional electrode structure is not suitable for manufacturing a correction electrode for a quadrupole lens having a weak lens action, and the degree of freedom in lens design has been narrowed.
【0008】また逆に、hが長い、すなわちレンズ作用
の強い4極レンズを設計する場合にも問題点があった。
図13からわかるように、相対する対向電極部の間隔を
gとすると、hの値は最大でg/2である。そこで長さ
hを長くするために、対向電極部21aの間隔gを広げ
ると、かえって4極レンズは弱まる。また例えば図14
のように補正電極21を2つに分割して強い4極レンズ
を構成することは可能であるが、部品点数が増大し、コ
ストアップの要因となった。Conversely, there is a problem in designing a quadrupole lens having a long h, that is, a strong lens action.
As can be seen from FIG. 13, assuming that the distance between the opposing electrode portions is g, the value of h is at most g / 2. Therefore, if the distance g between the opposing electrode portions 21a is increased to increase the length h, the quadrupole lens is weakened. For example, FIG.
Although it is possible to divide the correction electrode 21 into two to form a strong quadrupole lens as described above, the number of parts increases, which causes a cost increase.
【0009】本発明は、上記のような課題を解消するた
めになされたもので、電界4極レンズの設計自由度を向
上させて、高性能で安価なインライン型電子銃を提供す
ることを目的としている。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a high-performance and inexpensive in-line type electron gun by improving the degree of freedom in designing an electric field quadrupole lens. And
【0010】[0010]
【課題を解決するための手段】この発明の第1の発明に
かかる電子銃は、カソードから放出された電子ビームを
加速・収束する電極系を備えると共に、この電子ビーム
を補正する補正電極を備えてなり、当該補正電極は、電
子ビームの通過方向に対して略垂直な方向に配置されか
つ電子ビームを通過させる所定広さの開口を有する平板
電極部と、この平板電極部と一体に構成され前記開口の
縁部から電子ビームを挟むように突出対向する一対の対
向電極部を備え、この一対の対向電極部は、各々その突
出対向面の先端辺が対向方向へ湾曲し、互いに向い合う
切断面を有することを特徴としている。An electron gun according to a first aspect of the present invention includes an electrode system for accelerating and converging an electron beam emitted from a cathode, and a correction electrode for correcting the electron beam. The correction electrode is arranged in a direction substantially perpendicular to the direction in which the electron beam passes, and has a plate electrode portion having an opening having a predetermined width for passing the electron beam, and is integrally formed with the plate electrode portion. A pair of opposing electrode portions that protrude and oppose each other so as to sandwich the electron beam from the edge of the opening; the pair of opposing electrode portions each have a front end side of the protruding opposing surface curved in an opposing direction, and cuts facing each other; It has a surface.
【0011】また、この発明の第2の発明にかかる電子
銃は、前記対向電極部の突出対向面が曲面で構成された
ものである。In the electron gun according to a second aspect of the present invention, the protruding opposing surface of the opposing electrode portion is formed as a curved surface.
【0012】また、この発明の第3の発明にかかる電子
銃はカソード及び電子ビームを加速・収束する電極系が
複数、隣接配置されており、補正電極は各々複数の電子
ビームを補正するように、複数の開口を有する平板電極
部及び複数の一対の対向電極部を備えている。In the electron gun according to a third aspect of the present invention, a plurality of cathodes and an electrode system for accelerating and converging the electron beam are arranged adjacent to each other, and the correction electrode corrects each of the plurality of electron beams. , A plate electrode portion having a plurality of openings and a plurality of pairs of counter electrode portions.
【0013】また、この発明の第4の発明にかかる電子
銃用補正電極の製造方法は、電極用材料からなる平板に
少なくとも一対の切欠き部を設ける工程と、この一対の
切欠き部の間の平板部位を絞り加工または張り出し加工
によって突出させることで、上記平板に対して略平行な
面と略垂直な面を有する突出部を形成する工程と、この
突出部における上記略平行な面の部位を打ち抜き加工に
よって除去することにより、平板開口の縁部から突出す
る一対の対向電極部を得る工程を備えている。According to a fourth aspect of the present invention, there is provided a method of manufacturing a correction electrode for an electron gun, comprising the steps of providing at least a pair of notches in a flat plate made of an electrode material; Forming a protruding portion having a surface substantially parallel to the flat plate and a surface substantially perpendicular to the flat plate by projecting the flat plate portion by drawing or overhanging; and forming a portion of the substantially parallel surface on the protruding portion. Is removed by punching to obtain a pair of opposing electrode portions projecting from the edge of the flat plate opening.
【0014】[0014]
【発明の実施の形態】図1は本発明にかかる電界4極レ
ンズ54aを備えた電子銃の一例を示す縦断面図であ
る。従来例と同じ作用または機能を有する部分は同一符
号で示した。3本のカソード51から放出された電子ビ
ームはそれぞれ3極部52で成形、加速されたのち、プ
リレンズ53に入射する。プリレンズ53を構成する第
1フォーカス電極1には一定の第1フォーカス電圧が、
第2フォーカス電極2にはビームの偏向に伴ってダイナ
ミックに変化する第2フォーカス電圧が印加され、これ
により焦点距離はダイナミックに調節される。プリレン
ズ53およびメインレンズ55による収束作用を受けた
電子ビームは、水平方向に発散、垂直方向に収束をもた
らす磁界4極レンズ作用を有するセルフコンバーゼンス
方式の偏向ヨーク(図示せず)で偏向作用を受け、所定
の位置で画面を照射する。照射する際、電界4極レンズ
54aは、画面周辺で生じる垂直方向過収束の非点収差
を相殺するので画面全域で良好なジャストフォーカス状
態を達成することができ、鮮明なカラー画像が実現す
る。FIG. 1 is a longitudinal sectional view showing an example of an electron gun provided with an electric field quadrupole lens 54a according to the present invention. Portions having the same operation or function as those of the conventional example are denoted by the same reference numerals. The electron beams emitted from the three cathodes 51 are shaped and accelerated by the triode 52, respectively, and then enter the pre-lens 53. A fixed first focus voltage is applied to the first focus electrode 1 constituting the pre-lens 53,
A second focus voltage, which dynamically changes with the deflection of the beam, is applied to the second focus electrode 2, whereby the focal length is dynamically adjusted. The electron beam that has been converged by the pre-lens 53 and the main lens 55 is deflected by a self-convergence type deflection yoke (not shown) having a magnetic quadrupole lens function that diverges horizontally and converges vertically. Irradiate the screen at a predetermined position. At the time of irradiation, the electric quadrupole lens 54a cancels out vertical astigmatism astigmatism occurring in the periphery of the screen, so that a good just-focus state can be achieved over the entire screen, and a clear color image is realized.
【0015】本発明による電子銃は、基本的に以上のよ
うに動作するものであるが、電界4極レンズ54aを構
成する補正電極、特にその対向電極部に特徴があるので
以下ではこの部分について詳細に説明する。The electron gun according to the present invention basically operates as described above. However, since the correction electrode constituting the electric field quadrupole lens 54a, particularly its counter electrode, is characterized, This will be described in detail.
【0016】図2は本発明による補正電極21の一例を
示す概観図である。図に示すように、補正電極21は、
電極材料からなり電子ビームの通過方向に対して略垂直
な方向に配置される平板電極部21cを備え、この平板
電極部21には、それぞれ電子ビームを通過させるため
の開口が所定間隔で3箇所並列配置されている。各開口
の対向縁部からは、各々一対の対向電極部21b、21
bが突出形成されており、この突出方向は、電子ビーム
の通過方向に対して略平行であり、それにより各電子ビ
ームは、一対の対向電極部間を通過する。ここで、一対
の対向電極部21b、21bの主面は電子ビーム経路に
対して平行な面を有するが、その先端の辺は、図2に示
すごとく、各々、対向方向へ湾曲しており、湾曲した先
端の側面は電子ビームの経路に平行な面を構成し、それ
により一対の対向電極間で互いに向い合っている。そし
て、この互いに向き合う先端の側面は、打ち抜き加工に
よる切断面Aで構成されている。FIG. 2 is a schematic view showing an example of the correction electrode 21 according to the present invention. As shown in the figure, the correction electrode 21
A plate electrode portion 21c made of an electrode material and arranged in a direction substantially perpendicular to the direction in which the electron beam passes is provided. The plate electrode portion 21 has three openings at predetermined intervals for passing the electron beam. They are arranged in parallel. A pair of opposing electrode portions 21b and 21
b is formed so as to project, and the projecting direction is substantially parallel to the passing direction of the electron beam, so that each electron beam passes between the pair of counter electrode portions. Here, the main surfaces of the pair of opposing electrode portions 21b, 21b have surfaces parallel to the electron beam path, but the sides of the tips are curved in the opposing direction as shown in FIG. The sides of the curved tip constitute a plane parallel to the path of the electron beam, whereby the pair of opposed electrodes face each other. The side surfaces of the front ends facing each other are formed by cut surfaces A formed by punching.
【0017】かかる補正電極の作用について説明する。
図4は4極レンズ54aの主要な部材を示す縦断面図、
また図5は同じ部分の横断面図である。第1フォーカス
電極1に比べて第2フォーカス電極2に印加される電圧
が高い場合の等電位線31は、インライン方向に垂直な
方向では3枚の対向電極部21bが存在するためビーム
の進行方向に凸形(図4)に、逆にインライン方向では
対向電極部21bの作用が小さくなるため、ビームの進
行方向に凹形(図5)になる。そのため、ビームに働く
力の向き32からもわかるように、インライン方向に垂
直な方向では発散作用、インライン方向では収束作用を
生じる。The operation of the correction electrode will be described.
FIG. 4 is a longitudinal sectional view showing main members of the quadrupole lens 54a,
FIG. 5 is a cross-sectional view of the same part. When the voltage applied to the second focus electrode 2 is higher than that of the first focus electrode 1, the equipotential line 31 is in the beam traveling direction because there are three opposing electrode portions 21b in the direction perpendicular to the in-line direction. On the contrary, in the in-line direction, the action of the counter electrode portion 21b is reduced, so that the shape becomes concave in the beam traveling direction (FIG. 5). Therefore, as can be seen from the direction 32 of the force acting on the beam, a diverging action occurs in a direction perpendicular to the in-line direction, and a converging action occurs in the in-line direction.
【0018】ここで、各補正電極21における一対の対
向電極部は、前述のごとく、その先端で互いに向い合う
切断面によって切離し成形されたものであるため、この
ような対向切断面を有しない従来の補正電極の対向電極
部(図11)に比して、寸法精度の優れた対向電極部と
することができる。すなわち、寸法精度を決定する最終
成形段階の加工が、打ち抜き加工などの切断によりなさ
れているため、曲げ加工のような寸法精度の調整が難し
い成形手法に比して、切断幅の設定精度を向上させるこ
とにより、簡便に寸法精度の優れた対向電極部とするこ
とができる。Here, as described above, the pair of opposing electrode portions in each correction electrode 21 is formed by cutting off the cutting surfaces facing each other at the tips thereof, and therefore, there is no such conventional opposing cutting surface. In comparison with the counter electrode portion (FIG. 11) of the correction electrode, a counter electrode portion having excellent dimensional accuracy can be obtained. In other words, since the processing at the final forming stage that determines the dimensional accuracy is performed by cutting such as punching, the setting accuracy of the cutting width is improved compared to the forming method where it is difficult to adjust the dimensional accuracy such as bending. By doing so, a counter electrode portion having excellent dimensional accuracy can be easily obtained.
【0019】かかる補正電極は、図3を引用した以下の
ような方法で製造される。まず、図3(a)に示すごと
く、通常の電極用材料からなる平板に、打ち抜き加工で
6つの縦長孔40(3対の切欠き部)を穿設する。これ
により、後に対向電極部に成型される部分41(平板部
位)が3箇所に設定されると共に、平板電極部21cが
設定される。次に平板部位41に対して絞り加工もしく
は張り出し加工を施して突出させることにより、図3
(b)に示されるごとく、平板に対して略平行な面(絞
り底42)と略垂直な面を有する突出部を形成する。次
いで、絞り底42を打ち抜き加工により落とすことによ
り、図3(c)に示されるように、平板に対して略垂直
な面が残って対向電極部21bが形成され、これによ
り、本発明に係る平板電極部21cと対向電極部21b
を備えた補正電極21が得られる。すなわち、対向電極
部21bは、曲げ加工ではなく、絞り加工もしくは張り
出し加工と打ち抜き加工により成形されている。このた
め、前述のごとく、対向電極部の先端辺は内側に湾曲す
ると共に、その先端が打ち抜き加工による切断面Aで構
成されかつこの切断面Aが互いに向い合っている。な
お、絞り底42を打ち抜く際、図3(c)に示すよう
に、湾曲先端部が対向電極の対向面(裏面)から若干突
出するようにマージンを残して除去してもよい。こと
に、電子ビームの通路の障害とならずかつ本来の機能に
支障のない範囲で、かかる先端の突出の程度を大きくし
ておけば、対向電極部21bの寸法精度がさらに確保し
易い点で好ましい。Such a correction electrode is manufactured by the following method with reference to FIG. First, as shown in FIG. 3A, six vertically long holes 40 (three pairs of notches) are formed in a flat plate made of a normal electrode material by punching. As a result, the portions 41 (plate portions) to be formed later on the counter electrode portion are set at three places, and the plate electrode portions 21c are set. Next, by drawing or projecting the flat plate portion 41 to project it, FIG.
As shown in (b), a protrusion having a surface substantially parallel to the flat plate (a diaphragm bottom 42) and a surface substantially perpendicular to the flat plate is formed. Next, by dropping the aperture bottom 42 by punching, as shown in FIG. 3 (c), a surface substantially perpendicular to the flat plate remains to form the counter electrode portion 21b. Plate electrode part 21c and counter electrode part 21b
Is obtained. That is, the counter electrode portion 21b is formed not by bending but by drawing or overhanging and punching. For this reason, as described above, the front end side of the counter electrode portion is curved inward, and the front end is constituted by a cut surface A formed by punching, and the cut surfaces A face each other. When the diaphragm bottom 42 is punched, as shown in FIG. 3 (c), the curved tip may be removed with a margin so as to slightly protrude from the opposing surface (back surface) of the opposing electrode. In particular, if the degree of protrusion of the tip is increased within a range that does not hinder the passage of the electron beam and does not hinder the original function, the dimensional accuracy of the counter electrode portion 21b can be more easily secured. preferable.
【0020】かかる補正電極の製造方法によれば、上記
絞り底42を形成した時点でビーム進行方向の長さhが
決まるが、絞り加工もしくは張り出し加工を用いている
ため、折り曲げる場合よりも長さhの選択範囲は広い。
しかも大量に精度よく形成できる。例えば板厚tが0.
3mmの電極材を用いて、曲げ半径0.2mmで曲げ加
工を行うと、対向電極部22aの長さhの最小値は0.
8mm程度が限界だが、浅い絞り加工なら、板厚にかか
わらず0.0mmからhの値を設定可能であった。According to the method of manufacturing the correction electrode, the length h in the beam traveling direction is determined at the time when the aperture bottom 42 is formed. However, since the aperture processing or the overhanging processing is used, the length h is longer than that in the case of bending. The selection range of h is wide.
Moreover, it can be formed in large quantities with high precision. For example, when the thickness t is 0.
When a bending process is performed with a bending radius of 0.2 mm using a 3 mm electrode material, the minimum value of the length h of the counter electrode portion 22 a is set to 0.3.
The limit is about 8 mm, but in the case of shallow drawing, a value of 0.0 mm to h can be set regardless of the sheet thickness.
【0021】また絞り部材22の透孔22hがφ4.0
で、対向電極部の間隔gを4.5mmとした場合、折り
曲げ加工では、前記製造方法の説明からも容易にわかる
ようにhの長さはせいぜい2mm程度が上限である。こ
れに対し通常の電子銃における電極部品の絞り加工で
は、3〜4mm程度の絞り深さをもつ部品は一般的に使
用されており、10mmを越えるものも珍しくない。絞
り加工後の打ち抜き加工によって対向電極部21bを形
成すると、対向電極部の間隔gを4.5mmに保ちなが
ら、対向電極部の長さhが3mmを越えるものを容易に
形成できた。The aperture 22h of the aperture member 22 has a diameter of φ4.0.
When the gap g between the opposing electrode portions is 4.5 mm, the length of h is at most about 2 mm in the bending process, as can be easily understood from the description of the manufacturing method. On the other hand, in the drawing process of an electrode part in a usual electron gun, a part having a drawing depth of about 3 to 4 mm is generally used, and a part exceeding 10 mm is not uncommon. When the counter electrode portion 21b was formed by punching after drawing, it was possible to easily form a counter electrode portion having a length h exceeding 3 mm while maintaining the interval g between the counter electrode portions at 4.5 mm.
【0022】したがって、電子銃を設計する際の補正電
極、ひいては電界4極レンズについての設計の自由度が
大きくなり、収束・補正レンズ系の最適設計が可能にな
る。Therefore, the degree of freedom in designing the correction electrode, and hence the electric field quadrupole lens when designing the electron gun is increased, and the optimum design of the converging / correcting lens system becomes possible.
【0023】なお、対向電極部21bの主面、すなわち
突出対向面は、平面状である必要はなく、その形状は絞
り加工もしくは張り出し加工の可能な範囲で、曲面、例
えば断面で円弧状や楕円弧状または波板状にしても同様
の効果を得られる。また平面部分を複数組み合わせた
り、また平面と曲面を任意に組み合わせても構わない。
図6は対向電極部21bが円弧状の曲面形状を有する場
合の構造を示している。このような曲面状の構造によれ
ば、対向電極部、ひいては補正電極の機械構造的な強さ
が増す利点がある。The main surface of the opposing electrode portion 21b, that is, the projecting opposing surface does not need to be flat, and its shape may be a curved surface, for example, an arc shape or an elliptical arc in cross section, as long as drawing or overhanging is possible. A similar effect can be obtained even if the shape is corrugated or corrugated. Further, a plurality of plane portions may be combined, or a plane and a curved surface may be arbitrarily combined.
FIG. 6 shows a structure in the case where the counter electrode portion 21b has an arcuate curved surface shape. According to such a curved structure, there is an advantage that the mechanical strength of the counter electrode portion, and thus the correction electrode, is increased.
【0024】また3組の対向電極部21bの形状は全く
同じでもよいが、長さと幅をビームライン毎に変えるこ
ともできる。こうすることにより4極レンズの強さを個
々のビームに対して異なるように設定出来るので、より
精密な補正が可能な4極レンズを設計できる。The shapes of the three sets of opposing electrode portions 21b may be exactly the same, but the length and width can be changed for each beam line. By doing so, the intensity of the quadrupole lens can be set differently for each beam, so that a quadrupole lens capable of more precise correction can be designed.
【0025】また対向電極部21bは各ビームに独立し
て設ける必要はなく、3対の対抗電極部の一方側3枚を
一つに一体化してもよい。すなわち3本のビームを一度
にカバーする幅広の対向電極部21bを1対だけ設けて
も良い。こうすれば加工工程が簡略化される。The counter electrode portion 21b does not need to be provided independently for each beam, and one of the three pairs of counter electrode portions may be integrated into one. That is, only one pair of wide counter electrode portions 21b that cover three beams at a time may be provided. This simplifies the processing steps.
【0026】また対向電極部21bの配置位置はインラ
イン方向に水平な方向に限られるものではない。インラ
イン方向に垂直な方向、あるいは斜めの方向に用意する
ことも可能である。どの方向に設置するかは複合レンズ
としての全体の作用を考えて決めることができる。The position of the counter electrode portion 21b is not limited to the horizontal direction in the in-line direction. It is also possible to prepare in a direction perpendicular to the in-line direction or in an oblique direction. The direction in which the lens is installed can be determined in consideration of the overall operation of the compound lens.
【0027】また対向電極部21bは補正電極21のよ
うな板状電極に形成することはもちろん、絞り部材22
のような絞り構造を持つ電極の底面部にも形成できる。
絞り構造電極の底面部に形成する場合、対向電極部21
bは底面を抜く方向、または起こす方向のどちらの方向
にも設置可能である。どちらの方向に設置するかは複合
レンズとしての全体の作用を考えて決めることができ
る。In addition to forming the counter electrode portion 21b on a plate-like electrode such as the correction electrode 21, the aperture member 22 can be formed.
It can also be formed on the bottom surface of an electrode having a diaphragm structure as described above.
When formed on the bottom surface of the aperture structure electrode, the counter electrode 21
b can be installed in either the direction in which the bottom surface is pulled out or the direction in which it is raised. The direction in which the lens is installed can be determined in consideration of the overall operation of the compound lens.
【0028】また対向電極部21bはビームのインライ
ン方向に水平な方向と垂直な方向に同時に設けてもよ
い。こうすれば8極レンズになり、より精密な補正が可
能である。同じ考え方で、対向電極部21bを互いに1
20度ずらして配置する6極レンズにも適用可能であ
る。The counter electrode portion 21b may be provided simultaneously in the horizontal direction and the vertical direction in the in-line direction of the beam. In this way, an eight-pole lens is obtained, and more precise correction is possible. With the same concept, the opposing electrode portions 21b are
The present invention is also applicable to a six-pole lens which is arranged to be shifted by 20 degrees.
【0029】また本発明は偏向収差を補正する4極レン
ズの補正電極以外にも、他の補正電極、例えば倍率補正
を行う4極レンズの補正電極にも適用できる。また補正
レンズ作用はダイナミックに変化しなくてもよく、スタ
ティックな作用が必要とされる場合にも適用可能であ
る。The present invention can be applied not only to the correction electrode of the quadrupole lens for correcting the deflection aberration but also to other correction electrodes, for example, the correction electrode of the quadrupole lens for correcting the magnification. Further, the action of the correction lens does not need to be changed dynamically, and is applicable to a case where a static action is required.
【0030】また例えば図7に示されたようにシールド
カップ56に備えられ、偏向磁界による渦電流を利用し
てサイドビームの偏向量を調整する補正電極57などに
も適用できる。図7(a)はカソードの反対方向から見
た場合の偏向量調整補正電極57、図7(b)は同じ部
分の縦断面図をそれぞれ示している。For example, as shown in FIG. 7, the present invention can be applied to a correction electrode 57 which is provided in the shield cup 56 and adjusts the amount of side beam deflection by using eddy current caused by a deflection magnetic field. FIG. 7A shows a deflection amount adjustment correction electrode 57 when viewed from the opposite direction of the cathode, and FIG. 7B shows a vertical sectional view of the same part.
【0031】また今までは説明を簡単にするために画面
周辺で水平収束/垂直発散を強くもたらす例を示した
が、レンズは通常組み合わせて用いられるため、様々な
変形が可能である。4極レンズ作用は相対的に画面中央
より画面周辺で水平収束/垂直発散の4極レンズ作用が
強まればよい。すなわち、画面中央では強い水平発散/
垂直収束の4極レンズが形成されており、画面周辺で水
平発散/垂直収束の4極レンズが弱まるような構成でも
良い。また、複数のダイナミックに変化する4極レンズ
を組み合わせて使う場合には、複合レンズとしての4極
レンズ強度が相対的に画面中央より画面周辺で水平収束
/垂直発散の4極レンズ作用が強まる構成であればよ
い。さらに4極レンズの設置場所はプリレンズに内包さ
れる場合に限定されるものではなく、例えばメインレン
ズの入射側、あるいは出射側に設置することも出来る。Although an example in which horizontal convergence / vertical divergence is strongly provided around the screen has been shown for the sake of simplicity, various modifications are possible because lenses are usually used in combination. The quadrupole lens function may be such that the horizontal convergence / vertical divergence quadrupole lens function is relatively stronger at the periphery of the screen than at the center of the screen. That is, strong horizontal divergence /
A configuration may be adopted in which a quadrupole lens of vertical convergence is formed, and the quadrupole lens of horizontal divergence / vertical convergence is weakened around the screen. Further, when a plurality of dynamically changing quadrupole lenses are used in combination, the quadrupole lens strength as a compound lens is relatively enhanced in the horizontal converging / vertical diverging quadrupole lens action at the periphery of the screen from the center of the screen. Should be fine. Further, the location of the quadrupole lens is not limited to the case where the quadrupole lens is included in the pre-lens. For example, the quadrupole lens can be installed on the entrance side or the exit side of the main lens.
【0032】さらに本発明はインライン型電子銃を例に
とって説明したが、カソードの数や配置方法によってそ
の機能が限定されるわけではない。例えばデルタ型電子
銃あるいは単独電子銃の場合にも、同様に適用可能であ
る。Further, although the present invention has been described by taking an in-line type electron gun as an example, its function is not limited by the number and arrangement method of cathodes. For example, the present invention can be similarly applied to a delta type electron gun or a single electron gun.
【0033】[0033]
【発明の効果】以上説明したとおり第1の発明にかかる
電子銃は、電子ビームの通過方向に対して略垂直な方向
に配置されかつ電子ビームを通過させる所定広さの開口
を有する平板電極部と、この平板電極部の開口の縁部か
ら電子ビームを挟むように各々突出対向する一対の対向
電極部からなり、この対向電極部が、各々その突出対向
面の先端辺が対向方向へ湾曲し、互いに向い合う切断面
を有する補正電極を備えているので、寸法精度が優れて
おり、電子ビームの補正電極としての最適設計が可能に
なる。As described above, the electron gun according to the first aspect of the present invention has a flat plate electrode portion arranged in a direction substantially perpendicular to the electron beam passage direction and having an opening having a predetermined width for passing the electron beam. And a pair of opposing electrode portions that protrude and oppose each other so as to sandwich the electron beam from the edge of the opening of the flat plate electrode portion, and the opposing electrode portions each have a tip side of the protruding opposing surface curved in the opposing direction. Since the correction electrodes having the cut surfaces facing each other are provided, the dimensional accuracy is excellent, and the optimum design as the correction electrode for the electron beam becomes possible.
【0034】また第2の発明にかかる電子銃は、対向電
極部の突出対向面が、曲面で構成されてなるので、機械
的強度の優れた補正電極とすることができる。Further, in the electron gun according to the second aspect of the present invention, since the protruding opposing surface of the opposing electrode portion is formed of a curved surface, it is possible to provide a correction electrode having excellent mechanical strength.
【0035】また、この発明の第3の発明にかかる電子
銃はカソード及び電子ビームを加速・収束する電極系が
複数、隣接配置されており、補正電極は各々複数の電子
ビームを補正するように、複数の開口を有する平板電極
部及び複数の対向電極部を備えているので鮮明なカラー
画像を実現できる。Further, in the electron gun according to the third aspect of the present invention, a plurality of cathodes and an electrode system for accelerating and converging the electron beam are arranged adjacent to each other, and the correction electrode corrects each of the plurality of electron beams. In addition, since a flat electrode portion having a plurality of openings and a plurality of counter electrode portions are provided, a clear color image can be realized.
【0036】また、この発明の第4の発明にかかる製造
方法は、電極用材料からなる平板に少なくとも一対の切
欠き部を設ける工程と、この一対の切欠き部の間の平板
部位を絞り加工または張り出し加工によって突出させる
ことで、上記平板に対して略平行な面と略垂直な面を有
する突出部を形成する工程と、この突出部における上記
略平行な面の部位を打ち抜き加工によって除去すること
により、平板開口の縁部から突出する一対の対向電極部
を得る工程を備えているので、寸法精度が優れかつ設計
自由度の高い電子銃を得ることができ、さらに部品点数
の増加を回避でき、低コストで高性能な電子銃が得られ
る。In the manufacturing method according to a fourth aspect of the present invention, at least a pair of notches are provided in a flat plate made of an electrode material, and a flat plate portion between the pair of notches is drawn. Alternatively, a step of forming a projecting portion having a surface substantially parallel to the flat plate and a surface substantially perpendicular to the flat plate by projecting by overhanging, and removing the portion of the substantially parallel surface in the projecting portion by punching. This provides a step of obtaining a pair of opposing electrodes protruding from the edge of the flat plate opening, so that an electron gun with excellent dimensional accuracy and high design flexibility can be obtained, and an increase in the number of parts can be avoided. A low-cost, high-performance electron gun can be obtained.
【図1】本発明による一実施例のインライン型電子銃の
縦断面図である。FIG. 1 is a longitudinal sectional view of an in-line type electron gun according to an embodiment of the present invention.
【図2】本発明による補正電極の一例を示す概観図であ
る。FIG. 2 is a schematic view showing an example of a correction electrode according to the present invention.
【図3】本発明による補正電極の製造工程の一例を示す
説明図である。FIG. 3 is an explanatory view showing an example of a manufacturing process of a correction electrode according to the present invention.
【図4】本発明による補正電極の作用を説明する縦断面
図である。FIG. 4 is a longitudinal sectional view for explaining the operation of the correction electrode according to the present invention.
【図5】本発明による補正電極の作用を説明する横断面
図である。FIG. 5 is a cross-sectional view illustrating the operation of the correction electrode according to the present invention.
【図6】本発明による補正電極の他の一例を示す概観図
である。FIG. 6 is a schematic view showing another example of the correction electrode according to the present invention.
【図7】本発明による補正電極の他の一例を示す説明図
である。FIG. 7 is an explanatory view showing another example of the correction electrode according to the present invention.
【図8】従来のインライン型電子銃の縦断面図である。FIG. 8 is a longitudinal sectional view of a conventional in-line type electron gun.
【図9】従来の補正電極の作用を説明する縦断面図であ
る。FIG. 9 is a longitudinal sectional view for explaining the operation of a conventional correction electrode.
【図10】従来の補正電極の作用を説明する横断面図で
ある。FIG. 10 is a cross-sectional view illustrating the operation of a conventional correction electrode.
【図11】従来の補正電極を示す概観図である。FIG. 11 is a schematic view showing a conventional correction electrode.
【図12】従来の補正電極の製造工程を示す説明図であ
る。FIG. 12 is an explanatory view showing a manufacturing process of a conventional correction electrode.
【図13】従来の補正電極の寸法関係を示す説明図であ
る。FIG. 13 is an explanatory diagram showing a dimensional relationship of a conventional correction electrode.
【図14】従来の補正電極の他の例を示す概観図であ
る。FIG. 14 is a schematic view showing another example of a conventional correction electrode.
1 第1フォーカス電極 1h 第1フォーカス電極に設けられた透孔 2 第2フォーカス電極 10 ビームの通過する方向を示す矢印 21 第2フォーカス電極の一部である補正電極 21a 従来の補正電極21に設けられた対向電極部 21b 本発明の補正電極21に設けられた対向電極部 21c 補正電極21の一部を構成する平板電極部 A 対向電極部21bの先端に生じた切断面 22 第2フォーカス電極の一部である絞り部材 22h 補正電極に設けられた透孔 31 等電位線 32 ビームに働く力の向き 51 カソード 52 3極部 53 プリレンズ 54 従来の電界4極レンズ 54a 本発明による電界4極レンズ 55 メインレンズ 56 シールドカップ 57 偏向量調整補正電極 DESCRIPTION OF SYMBOLS 1 1st focus electrode 1h Through-hole provided in 1st focus electrode 2 2nd focus electrode 10 Arrow showing direction in which beam passes 21 Correction electrode 21a which is a part of 2nd focus electrode 21a Provided in conventional correction electrode 21 The opposing electrode portion 21b The opposing electrode portion 21c provided on the correction electrode 21 of the present invention 21c A plate electrode portion constituting a part of the correction electrode 21 A A cut surface formed at the tip of the opposing electrode portion 21b 22 The second focus electrode Partial aperture member 22h Through hole provided in correction electrode 31 Equipotential line 32 Direction of force acting on beam 51 Cathode 52 Tripole 53 Prelens 54 Conventional electric quadrupole lens 54a Electric quadrupole lens 55a according to the present invention Main lens 56 Shield cup 57 Deflection adjustment electrode
Claims (4)
速・収束する電極系を備えると共に、この電子ビームを
補正する補正電極を備えてなり、当該補正電極は、電子
ビームの通過方向に対して略垂直な方向に配置されかつ
電子ビームを通過させる所定広さの開口を有する平板電
極部と、この平板電極部と一体に構成され前記開口の縁
部から電子ビームを挟むように突出対向する一対の対向
電極部を備え、この一対の対向電極部は、各々その突出
対向面の先端辺が対向方向へ湾曲し、互いに向い合う切
断面を有することを特徴とする電子銃。An electrode system for accelerating and converging an electron beam emitted from a cathode is provided, and a correction electrode for correcting the electron beam is provided, and the correction electrode is substantially arranged in a direction in which the electron beam passes. A plate electrode portion which is arranged in a vertical direction and has an opening of a predetermined width for passing an electron beam, and a pair of opposing members which are integrally formed with the plate electrode portion and project from the edge of the opening so as to sandwich the electron beam; An electron gun comprising an opposing electrode portion, wherein each of the pair of opposing electrode portions has a cut surface facing each other, with a tip side of a protruding opposing surface curved in an opposing direction.
されてなる請求項1記載の電子銃。2. The electron gun according to claim 1, wherein the projecting opposing surface of the opposing electrode portion is constituted by a curved surface.
る電極系が複数、隣接配置されてなり、補正電極が各々
複数の電子ビームを補正するように、複数の開口を有す
る平板電極部及び複数の一対の対向電極部を備えてなる
請求項1または2記載の電子銃。3. A flat plate electrode section having a plurality of openings and a plurality of electrode systems, wherein a plurality of cathodes and an electrode system for accelerating and converging the electron beam are arranged adjacent to each other so that the correction electrode corrects the plurality of electron beams. 3. The electron gun according to claim 1, further comprising a pair of opposed electrode portions.
対の切欠き部を設ける工程と、この一対の切欠き部の間
の平板部位を絞り加工または張り出し加工によって突出
させることで、上記平板に対して略平行な面と略垂直な
面を有する突出部を形成する工程と、この突出部におけ
る上記略平行な面の部位を打ち抜き加工によって除去す
ることにより、平板開口の縁部から突出する一対の対向
電極部を得る工程を備えてなる電子銃用補正電極の製造
方法。4. A step of providing at least a pair of notches in a flat plate made of a material for an electrode, and projecting a flat plate portion between the pair of notches by drawing or overhanging, so that the flat plate is formed on the flat plate. Forming a protruding portion having a substantially parallel surface and a substantially vertical surface, and removing a portion of the substantially parallel surface in the protruding portion by punching to form a pair of protruding portions from the edge of the flat plate opening. A method for manufacturing a correction electrode for an electron gun, comprising a step of obtaining a counter electrode portion.
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JP32083699A JP3534026B2 (en) | 1999-11-11 | 1999-11-11 | Manufacturing method of electron gun and correction electrode |
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JP2001143638A true JP2001143638A (en) | 2001-05-25 |
JP3534026B2 JP3534026B2 (en) | 2004-06-07 |
Family
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6741021B2 (en) * | 1999-12-27 | 2004-05-25 | Sony Corporation | Electron gun and production method thereof |
-
1999
- 1999-11-11 JP JP32083699A patent/JP3534026B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6741021B2 (en) * | 1999-12-27 | 2004-05-25 | Sony Corporation | Electron gun and production method thereof |
Also Published As
Publication number | Publication date |
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JP3534026B2 (en) | 2004-06-07 |
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