JP2001143226A - Magneto resistance effect magnetic head and recording and reproducing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce wear of a magnetic head under special circumstances, e.g. a circumstance at high temperature, a circumstance at low temperature etc. in addition to a general circumstance. SOLUTION: A substrate is formed from any one material of signal crystalline sapphire, a material consisting essentially of MgO or Cr2O3, partially stabilized zirconia, a material consisting essentially of SiC or TiC, single crystalline ferrite having <268 K Curie point or a material consisting essentially of the three components of CaO, TiO and NiO.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-resistance effect type magnetic head provided on a rotary drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method. Further, the present invention relates to a recording / reproducing apparatus that includes at least one magnetoresistive magnetic head on a rotating drum and performs recording and / or reproduction on a tape-shaped recording medium by a helical scan method.

[0002]

2. Description of the Related Art A magnetic head is mounted on a magnetic recording / reproducing apparatus and records and / or reproduces information signals on a magnetic recording medium (hereinafter referred to as recording / reproducing).
For example, a video tape recorder (VTR: VideoTape Recorder) and a DAT
(Digital Audio Tape) Like a recorder, a high-speed rotating drum is equipped with a magnetic head, and a tape-shaped magnetic recording medium is slid on this drum to perform recording and reproduction by the so-called helical scan method. is there.

[0003] The magnetic head is generally constructed by winding a coil around a magnetic core formed of a magnetic material having high magnetic permeability. Such a magnetic head is called an electromagnetic induction type (inductive type) magnetic head because it performs recording and reproduction on a magnetic recording medium using electromagnetic induction between a magnetic core and a coil.

A conventional magnetic head includes a magnetic core half formed by shaping a magnetic material on a bulk-type substrate by machining.
A magnetic core is formed by joining and integrating through a magnetic gap.

However, in recent years, in the field of magnetic recording, higher recording densities of magnetic signals have been further promoted, and it is required to accurately record and reproduce fine magnetic signals. However, in the electromagnetic induction type magnetic head, since the magnetic core is shaped by performing machining on a bulk type magnetic material, it is not possible to sufficiently narrow the track and narrow the gap. Inability to cope with densification.

Therefore, as a magnetic head corresponding to a higher recording density, a magnetoresistive element for reading a signal recorded on a magnetic recording medium by utilizing a magnetoresistive effect of a magnetoresistive effect element (hereinafter referred to as an MR element). Effect type magnetic heads (hereinafter referred to as MR heads) have become widespread.

[0007] An MR element is a type of resistance element, and its electric resistance changes in response to a change in an external magnetic field such as a signal magnetic field recorded on a magnetic recording medium. The MR head reads a signal recorded on a magnetic recording medium by utilizing the fact that a current flows through the MR element and the value of the current flowing through the MR element changes according to a signal magnetic field from the magnetic recording medium.

In recent years, a magnetic recording medium having a small size and a large capacity has been desired, and accordingly, the recording density of the magnetic recording medium has been increasingly increased by, for example, narrowing a recording track width. I'm advancing.

[0009] The MR head is a magnetic head formed by forming an MR element exhibiting a magnetoresistive effect on a non-magnetic substrate and used exclusively for reproduction. MR heads can be downsized compared to magnetic induction type magnetic heads because they do not require a magnetic coil, and because of their high sensitivity, they have a high reproduction output and are suitable for high recording density. Attention has been paid.

The MR head has a structure in which a thin film layer for forming a magnetoresistive element (hereinafter, referred to as an MR element) is sandwiched between the shield forming surfaces of the respective substrates on which the shields are formed. The base of this MR head is
Generally, it is formed of Al ₂ O ₃ —TiC, polycrystalline ferrite, or the like.

[0011]

The above-mentioned M
Examples of the recording / reproducing device equipped with the R head include a hard disk device and a magnetic tape device.

In a hard disk drive, an MR head is generally mounted on a flying slider, and performs a reproducing operation while flying above a disk-shaped recording medium. In this case, since the MR head does not contact the disk-shaped recording medium, the MR head hardly wears.

On the other hand, in a magnetic tape device, the MR head and the tape-shaped recording medium slide directly. In this magnetic tape device, in a device having an MR head fixed as a reproducing head or a read head, the sliding speed is slow, and when sliding, the tape-shaped recording medium is applied to the sliding surface of the MR head. Surface pressure is also small. For this reason,
Although the MR head wears, the MR head can be used for a sufficiently long time.

However, in a helical scan type magnetic tape device such as a digital video cassette recorder, the reproducing operation is performed by mounting the MR head on a rotating drum and rotating the rotating drum at a high speed. Therefore, the MR head and the tape-shaped recording medium slide at high speed. Further, in order to ensure that the MR head and the tape-shaped recording medium are in contact with each other, the surface pressure applied to the sliding surface of the MR head from the tape-shaped recording medium during sliding is increased.

For this reason, when the MR head mounted on the hard disk device or the magnetic tape device to which the MR head is fixed is mounted on the helical scan type magnetic tape device, the wear resistance of the MR head is increased. There is a need.

Further, the life of the MR head in the recording / reproducing apparatus is not only compensated under a constant environment such as 25 ° C., but also under an environment such as −5 ° C. to 35 ° C. . However, abrasion becomes severe at a low temperature such as -5C. For this reason, it is necessary to increase the wear resistance under a special environment such as a low temperature and a high temperature.

The present invention has been proposed in view of such a conventional situation, and can be used for a long period of time in a special environment such as a low temperature and a high temperature in addition to a normal environment. An object of the present invention is to provide a magnetoresistive head and a recording / reproducing apparatus which are possible and have high reliability.

[0018]

A magnetoresistive head according to the present invention is provided on a rotating drum and records and / or reproduces data on and from a tape-shaped recording medium by a helical scan method. In the head,
A thin film layer sandwiched between a pair of substrates constituting a magnetoresistive head is provided. The substrate is formed of single crystal sapphire.

The magnetoresistance effect type magnetic head according to the present invention having the above-described structure has an excellent substrate even under a special environment such as a low temperature and a high temperature in addition to a normal environment. It shows wear resistance characteristics.

In place of single crystal sapphire, Mg
The substrate can be formed of a material containing O, Cr ₂ O ₃ , SiC, or TiC as a main component. Further, instead of single crystal sapphire, the substrate can be formed of partially stabilized zirconia and single crystal ferrite having a Curie point of less than 268K. Further, instead of single-crystal sapphire, the substrate can be formed of a material mainly containing three kinds of substances, CaO, TiO ₂ , and NiO.

The recording / reproducing apparatus according to the present invention comprises at least one magnetoresistive head on a rotating drum, and performs recording and / or reproduction on a tape-shaped recording medium by a helical scan method. Device. The substrate of the magnetoresistive head is formed of single crystal sapphire.

The recording / reproducing apparatus configured as described above
In addition to a normal environment, the reproducing operation is improved under a special environment such as a low temperature and a high temperature.

In place of single crystal sapphire, Mg
The substrate can be formed of a material containing O, Cr ₂ O ₃ , SiC, or TiC as a main component. Further, instead of single crystal sapphire, the substrate can be formed of partially stabilized zirconia and single crystal ferrite having a Curie point of less than 268K. Further, instead of single-crystal sapphire, the substrate can be formed of a material mainly containing three components of CaO, TiO ₂ and NiO.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings. Hereinafter, the magnetoresistive head 1 (hereinafter referred to as MR head 1) as shown in FIG. 1 will be described first. In addition,
In the drawings used in the following description, in order to clearly illustrate the characteristics of each part, the characteristic parts may be enlarged and shown, and the dimensional ratio of each member is not necessarily the same as the actual one. .

In the following, the configuration, material, and the like of each thin film constituting the MR head 1 will be described.
The configuration is not limited to the MR head 1 illustrated, and the configuration, material, and the like of each thin film may be selected according to a desired purpose or performance.

As shown in FIGS. 1 and 2, the MR head 1 has a first substrate 2 on which a lower magnetic shield layer 3 and a lower gap layer 4 are formed.

On the lower gap layer 4, a magnetoresistive thin film 5 (hereinafter referred to as MR thin film 5) is formed.
Bias layers 6a and 6a are provided at the longitudinal ends of the MR thin film 5.
b and the electrode layers 7a and 7b are sequentially laminated. MR
Thin film 5, bias layers 6a and 6b, and electrode layers 7a and 7b
Is formed to be exposed on the sliding surface. Both ends of the MR thin film 5 are connected to an electrode layer 7a and an electrode layer 7b, respectively.

The MR thin film 5, the bias layers 9a and 9b,
The upper gap layer 11 is provided on the electrode layers 10a and 10b.
And the upper magnetic shield layer 12 are sequentially formed.
A second substrate 14 is adhered on the upper magnetic shield layer 12 via an adhesive layer 13. A tape sliding surface 15 is formed on one end surface of the MR head 1.

The first substrate 2 and the second substrate 14 are made of single crystal sapphire, a material mainly composed of MgO or Cr ₂ O ₃ , a partially stabilized zirconia, a material mainly composed of SiC or TiC, It is formed of either single crystal ferrite having a Curie point of less than 268 K or a material mainly containing three components of CaO, TiO, and NiO.

As a result, the wear resistance of the substrate of the magneto-resistance effect type magnetic head is improved not only in a normal environment but also in a special environment such as a low temperature and a high temperature. For this reason, uneven wear of the lower magnetic shield layer 3 and the upper magnetic shield layer 12 can be prevented.

The lower magnetic shield layer 3 and the upper magnetic shield layer 12 function to prevent the signal magnetic field from the magnetic recording medium, which is not to be reproduced, from being drawn into the MR thin film 5. That is, the signal magnetic field not to be reproduced is guided by the lower magnetic shield layer 3 and the upper magnetic shield layer 12, and only the signal magnetic field to be reproduced is changed to the MR thin film 5.
It is led to. Thereby, the high frequency characteristics and the reading resolution of the MR thin film 5 are improved.

The lower magnetic shield layer 3 and the upper magnetic shield layer 12 are formed of a soft magnetic material. Examples of this soft magnetic material include Sendust (Fe-Al-
Materials used as magnetic shield members in ordinary magnetic heads, such as Si alloys) and FeTa, may be used.

The lower gap layer 4 and the upper gap layer 11
Is formed in a thin film shape from a non-magnetic, non-conductive material. The presence of these non-magnetic and non-conductive materials maintains insulation. As a material for forming the lower gap layer 4, considering insulation and wear resistance, Al
It is desirable to use ₂ O ₃ . The material for forming the upper gap layer 11 is, for example, Al ₂ O ₃ , Si
O ₂ , TiN and the like can be mentioned.

The MR thin film 5 is a magnetic sensing portion, and is a portion for reading information recorded on a magnetic recording medium.

Here, the MR thin film 5 has a structure in which a first soft magnetic layer 6, a nonmagnetic layer 7, and a second soft magnetic layer 8 are sequentially laminated from the first substrate 2 side. It is configured as a so-called SAL bias type film. As the non-magnetic layer, for example, Ta or the like is used. As the first soft magnetic layer, for example, Ni—Fe or the like is used. As the second soft magnetic layer, for example, Ni—Fe—Nb or the like is used.

It should be noted that the MR thin film 5 is not limited to the SAL bias type film described above, but may be formed by various film configurations such as so-called AMR and GMR as conventionally known. . In the MR head 1, the MR thin film 5 is disposed so that the longitudinal direction thereof is parallel to the tape sliding surface 15, and a sense current is supplied in a direction parallel to the tape sliding surface 15.

The pair of bias layers 9a and 9b have a function of applying a bias magnetic field to the MR thin film 5 to make the magnetic domain of the MR thin film 5 a single magnetic domain. The pair of bias layers 9a and 9b are located at both ends in the longitudinal direction of the MR thin film 5, and are formed of a soft magnetic material. The pair of bias layers 9a and 9b are magnetically and electrically connected to both ends of the MR thin film 5, respectively. In the following description, the pair of bias layers 9a and 9b will be collectively referred to simply as the bias layer 9.

The electrode layers 10a and 10b supply a sense current to the MR thin film 5. The electrode layers 10a, 10b
It is formed in a thin film shape from a metal material that is conductive and has low resistance. Here, by using a material having a low resistance, the resistance value of the entire MR head 1 can be reduced.

As a material of the electrode layers 10a and 10b, for example, Cr, Ta or the like is preferable. In the following description, the electrode layers 10a and 10b are collectively referred to simply as the electrode layers 10a and 10b.
Shall be referred to as

In the MR head 1, actually,
The first substrate 2 and the second substrate 14 are larger than other parts. Therefore, the tape sliding surface 15 of the MR head 1 is mostly formed by the first substrate 2.
And the second substrate 14 and the end surface.

In the MR head 1 configured as described above, the first substrate 1 and the second substrate 14 can be combined with each other not only in a normal environment but also in a special environment such as a low temperature and a high temperature. Has improved wear resistance. For this reason, the lower magnetic shield layer 3 and the upper magnetic shield layer 12 can be used not only in a normal environment but also in a special environment such as a low temperature and a high temperature.
The spacing loss due to uneven wear can be reduced, and a high reproduction output can be maintained.

Next, a method of manufacturing the above-described MR head 1 will be described. The drawings used in the following description are:
In order to illustrate the features in an easy-to-understand manner, like in FIGS. 1 and 2, a characteristic portion may be shown in an enlarged manner, and the dimensional ratio of each member is not necessarily the same as the actual one.

Further, in the following description, specific examples of the members constituting the MR head 1 and their materials, sizes, film thicknesses, etc. will be described, but the present invention is not limited to the following examples. . For example, in the following description, an example in which a so-called SAL (Soft Adjacent Layer) bias type MR thin film having a structure similar to that put to practical use in a hard disk device or the like is used. However, the present invention is not limited to this.

In manufacturing the MR head 1 according to the present invention, first, as shown in FIG. 3, a first substrate material 20 having a diameter of, for example, 3 inches and finally becoming the first substrate 2 is formed. Prepare The first substrate member 20 serves as a leading-side guard member into which the tape-shaped recording medium is inserted. A plurality of MR heads 1 are formed on the first substrate material 20, and one of them is enlarged in FIGS. 3 to 9 below.

Next, as shown in FIG.
A first soft magnetic metal layer 21 that finally becomes the lower magnetic shield layer 3 and a first non-magnetic non-conductive layer 22 that finally becomes the lower gap layer 4 are formed on the substrate 0 by sputtering or the like. I do.

Next, as shown in FIG. 5, an SAL bias type MR is finally formed on the first non-magnetic non-conductive layer 22.
The MR thin film layer 23 constituting the thin film 5 is formed by sputtering or the like. Specifically, the MR thin film layer 23 is formed by, for example, sequentially forming the first soft magnetic layer 24, the nonmagnetic layer 25, and the second soft magnetic layer 26 by sputtering or the like in the above order. Is done.

Next, as shown in FIGS. 6 and 7, the MR thin film layer 23 is etched by photolithography. First, as shown in FIG.
A reverse tapered photoresist 27 is formed at a position where the thin film 5 is to be formed. Next, as shown in FIG.
7 is etched.

Next, as shown in FIG. 8, a permanent magnet layer 28 which finally becomes the bias layer 9 and a conductive metal layer 29 which finally becomes the electrode layer 10 are formed in the longitudinal direction of the MR thin film layer 5. Is formed by sputtering or the like. At this time, the MR thin film layer 23 and the permanent magnet layer 28 form substantially the same plane. Note that the permanent magnet layer 28 and the conductive metal layer 29 are also formed on the photoresist 27. Thereafter, the photoresist 27 is lifted off.

Next, as shown in FIG.
A second non-magnetic non-conductive layer 30 that eventually becomes the upper gap layer 11 and a second soft magnetic metal layer 31 that finally becomes the upper magnetic shield layer 12 Are sequentially formed by sputtering or the like.

In this state, as shown in FIG.
A plurality of MR elements 32 are formed on the substrate material 20 of FIG. As shown in FIG. 11, the first substrate member 20 is cut into strips so that the MR elements 32 are arranged in the horizontal direction.
An R head block 33 is formed. Here, for simplicity, the number of MR elements 32 arranged in the MR head block 33 is five, but it is preferable that the number is as large as possible in consideration of productivity.

Next, as shown in FIG. 12, the MR head block 33 and the stripped second substrate material 34 are pressed in the directions of arrows B and C via an adhesive 35 as shown in FIG. It is integrated by joining. This second substrate material 34 eventually becomes the second substrate 14. FIG.
Here, one MR element 32 is shown in an enlarged manner.

Next, cylindrical polishing is performed on the surface that will eventually become the tape sliding surface 15 of the MR head 1, and this surface is formed into an arc shape. Specifically, cylindrical polishing is performed until the front end of the MR thin film 5 is exposed on the tape sliding surface 15 and the depth of the MR thin film 5 reaches a predetermined length. Note that the curved surface shape of the surface serving as the tape sliding surface 15 formed by this cylindrical polishing process may be an optimal shape according to the tape tension and the like, and is not particularly limited.

Next, the magnetic head block 33 is divided. Thus, the MR head 1 is completed. At this time,
Instead of dividing the magnetic head block 33 vertically, the magnetic head block 33 is divided at the same angle θ as the azimuth angle.

The MR head 1 manufactured as described above
Used by attaching to a rotating drum. First, the MR head 1 is attached to a chip base. Next, the terminals provided on the chip base and the connection terminals provided on the MR head 1 are electrically connected. The MR head 1 mounted on the chip base in this way is mounted on a rotating drum.

Next, a recording / reproducing apparatus to which the present invention is applied will be described. Note that, in the drawings used in the following description, in order to clearly illustrate the features, similar to FIGS. 1 to 12, the characteristic portions may be enlarged and shown, and the ratio of the dimensions of each member may be reduced. It is not always the same.

As shown in FIG. 13, the recording / reproducing apparatus 40 includes a rotating drum 41, a supply reel 42, a take-up reel 43, and rollers 44a to 44g (hereinafter, rollers 44a to 44g).
Called. ) And a capstan 45.

The rotating drum 41 is provided with the MR head 1 described above.
As a reproducing head and an electromagnetic induction type magnetic head as a recording head. The rotating drum 41 rotates in the direction of arrow D. The supply reel 42 supplies the tape-shaped recording medium 46 drawn from a tape cartridge (not shown) to the rotating drum 41. The take-up reel 43 takes up the tape-shaped recording medium 46 supplied to the rotating drum 41.

The rollers 44a to 44g support the tape-shaped recording medium 46. The capstan 45 is rotated by a motor (not shown) to feed the tape-shaped recording medium 46. At this time, the tape-shaped recording medium 46 is fed in the direction of arrow E.

The rotating drum 41 is, as shown in FIG.
An upper drum 50, a lower drum 51, and a motor 52 are provided. The upper drum 50 rotates in the direction of arrow F. The lower drum 51 is fixed. The lower drum 51 includes a first reproducing head 53, a second reproducing head 54, a first recording head 55, a second recording head 56, and a read guide unit 57. The motor 52 rotates the upper drum 50.

The first reproducing head 53 and the second reproducing head 54 reproduce the information recorded on the tape-shaped recording medium 46. The MR head 1 described above is used as the first reproducing head 53 and the second reproducing head 54.

As described above, in the MR head 1, the first substrate 2 and the second substrate 14 are made of single-crystal sapphire, Mg
O or CrO ₂ as a main component, partially stabilized zirconia, material with a main component of SiC or TiC, single crystal ferrite having a Curie point of less than 268 K, or C
It is formed from any one of the materials mainly containing three components of aO, TiO and NiO.

For this reason, in the MR head 1, the abrasion resistance of the first substrate 2 and the second substrate 14 is not only a normal environment but also a special environment such as a low temperature and a high temperature. improves.

As a result, the recording / reproducing apparatus 40 has an improved reproducing operation under a special environment such as a low temperature and a high temperature in addition to a normal environment, and has high reliability. In addition, this recording / reproducing apparatus has a long life.

The first recording head 55 and the second recording head 56 record information on the tape-shaped recording medium 46. As the first recording head 55 and the second recording head 56, an electromagnetic induction type magnetic head is used.

The first reproducing head 53 and the second reproducing head 54 have a phase difference of 180 °. Also,
The first recording head 55 and the second recording head 56
It has a phase difference of 180 °.

The lead guide portion 57 is formed in a stepped shape along the outer peripheral surface of the lower drum 51 of the rotary drum 41, for example, at a depth slightly larger than the thickness of the tape-shaped recording medium 46. The tape-shaped recording medium 46 is supported and guided. Thus, the first reproducing head 53, the second reproducing head 54, the first recording head 55, and the second recording head 56 contact the tape-shaped recording medium 46 by a helical scan method. .

In the rotating drum 41, the tape-shaped recording medium 46 is fed obliquely along the lead guide portion 57 of the lower drum 51 in the running direction indicated by the arrow G.
Thereby, the first reproducing head 53, the second reproducing head 54, the first recording head 55, and the second recording head 56 come into contact with the tape-shaped recording medium 45 by the helical scan method. I will be guided.

The recording / reproducing apparatus 40 configured as described above
Is the first substrate 2 of the MR head 1 provided.
And the second substrate 14 are made of a single crystal sapphire, a material containing MgO or CrO ₂ as a main component, partially stabilized zirconia,
A material containing SiC or TiC as a main component and having a Curie point of 2
Single crystal ferrite less than 68K, or CaO,
It is formed of any of the materials having three components of TiO and NiO as main components.

For this reason, the recording / reproducing apparatus 40 has an improved reproducing operation even in a special environment such as a low temperature and a high temperature in addition to a normal environment, and has high reliability.
Further, the life of the recording / reproducing device 40 is extended.

As is clear from the above description, the MR head 1 to which the present invention is applied can be used with the first substrate 2 under a special environment such as a low temperature and a high temperature in addition to a normal environment. The abrasion resistance with the second substrate 14 is improved. For this reason, uneven wear of the upper magnetic shield layer 3 and the lower magnetic shield layer 12 can be prevented. In addition, a high reproduction output can be maintained even in a special environment such as a low temperature and a high temperature as compared with a normal environment, so that the reproduction operation is improved and the reliability is high.

The recording / reproducing apparatus 40 to which the present invention is applied
Allows the MR head 1 to be mounted on the rotating drum 41. For this reason, the recording / reproducing apparatus 40 has a high reproducing output under special environments such as low temperature and high temperature in addition to the normal environment, and is suitable for high recording density, and has high reliability. Becomes Further, the recording / reproducing device 40
Increases the lifespan.

[0072]

Next, the relationship between the material used as the substrate in the above-described MR head and the wear amount of the MR head when the tape-shaped recording medium is slid at each temperature will be described based on Examples and Comparative Examples. Will be explained.

Example 1 A first substrate and a second substrate were formed of sapphire single crystal, and an MR head was manufactured by the method described above. At this time, the MR head has a height of 2 mm, a width of 1.5 mm, a thickness of 0.2 mm, a contact width of the sliding surface of 80 μm, and a curvature in the contact width direction of the sliding surface. R
6 mm.

The MR head manufactured as described above was mounted on a data storage drive deck SDX-300C (manufactured by Sony Corporation). Then, a Co alloy-based thin film deposition tape SDX-T3N was used for 268K, 278K, 298K,
In each environment of 08K, slide for 100 hours, MR
The wear amount of the head was measured. 278K, 298
The humidity at K and 308K was 50%.

The amount of wear was calculated from the change in electrical resistance before and after the running test. The initial setting of the amount of protrusion of the MR head from the surface of the rotating drum was 30 μm.

Example 2 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of a material containing MgO as a main component, and the wear amount was measured.

Example 3 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of a material mainly composed of Cr ₂ O ₃ , and the amount of wear was measured. did.

Example 4 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of partially stabilized zirconia, and the wear amount was measured.

Example 5 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of a material containing SiC as a main component, and the wear amount was measured.

Example 6 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of a material containing TiC as a main component, and the wear amount was measured.

Example 7 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of a material mainly containing single crystal ferrite having a Curie point of less than 268K. Then, the amount of wear was measured.

Example 8 A first substrate and a second substrate were made of CaO, TiO ₂ and N
An MR head was manufactured in the same manner as in Example 1 except that the head was formed of a material mainly containing iO, and the wear amount was measured.

Comparative Example 1 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of Al ₂ O ₃ —TiC, and the amount of wear was measured.

Comparative Example 2 An MR head was manufactured in the same manner as in Example 1 except that the first substrate and the second substrate were formed of NiZn ferrite polycrystal, and the wear amount was measured.

Table 1 summarizes the results of Examples 1 to 8 and Comparative Examples 1 and 2.

[0086]

[Table 1]

As can be seen from the results shown in Table 1, the first substrate and the second substrate in the MR head were made of single crystal sapphire, a material mainly composed of MgO or Cr ₂ O ₃ , partially stabilized zirconia, SiC Or a material mainly composed of TiC,
When formed from any of single-crystal ferrite having a Curie point of less than 268 K or a material mainly containing three components of CaO, TiO, and NiO, Al
_It can be seen that the amount of wear is smaller than when formed from ₂ O ₃ —TiC or NiZn ferrite polycrystal.

In particular, the amount of wear at 268K was NiZ
Compared to n ferrite polycrystal has a less than one third, Al ₂ O ₃ -TiC has to the less than one sixth of compared.

Therefore, the first substrate 2 and the second substrate 14 are made of a material mainly composed of single crystal sapphire, MgO or Cr ₂ O ₃ , partially stabilized zirconia, SiC or T
An MR head made of any of a material containing iC as a main component, a single crystal ferrite having a Curie point of less than 268 K, or a material containing three components of CaO, TiO, and NiO as main components is used in a normal environment. It has been found that the amount of wear at lower temperature decreases and the amount of wear at low temperature decreases.

[0090]

As is apparent from the above description, the magnetoresistive head according to the present invention can be used not only in a normal environment but also in a special environment such as a low temperature and a high temperature. The wear resistance of the pair of substrates and the pair of magnetic shield members is improved. For this reason, even when the magnetoresistive effect type magnetic head is mounted on the sliding rotary drum, it is possible to reduce spacing loss due to uneven wear of the pair of magnetic shield members.

The magneto-resistance effect type magnetic head has:
Since a high reproduction output can be maintained, the reproduction operation is improved and the reliability is high. Also, it is suitable for high-density recording.

The recording / reproducing apparatus according to the present invention mounts the above-described magnetoresistive head on a rotating drum, so that the recording / reproducing apparatus can be used in a special environment such as a low temperature and a high temperature in addition to a normal environment. Also has a high reproduction output and is suitable for high recording density. In addition, the recording / reproducing apparatus has high reliability and a long life.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of an MR head to which the present invention is applied.

FIG. 2 is an enlarged plan view of a portion A in FIG.

FIG. 3 is a diagram illustrating a manufacturing process of the MR head.
It is sectional drawing which shows a board | substrate material.

FIG. 4 is a diagram illustrating a manufacturing process of the MR head.
FIG. 3 is a cross-sectional view showing a state where a first soft magnetic thin film layer and a first non-magnetic non-conductive thin film layer are formed on a substrate material.

FIG. 5 is a diagram for explaining a manufacturing process of the MR head.
It is sectional drawing which shows the state in which the MR thin film layer was formed.

FIG. 6 is a diagram illustrating a manufacturing process of the MR head.
FIG. 4 is a cross-sectional view showing a state where a photoresist is formed on the MR thin film layer.

FIG. 7 is a diagram illustrating a manufacturing process of the MR head.
FIG. 4 is a cross-sectional view showing a state where an MR thin film layer is etched.

FIG. 8 is a diagram illustrating a manufacturing process of the MR head.
It is sectional drawing which shows the state in which the permanent magnet layer and the conductive metal layer were formed.

FIG. 9 is a diagram illustrating a manufacturing process of the MR head.
FIG. 4 is a cross-sectional view showing a state where a first non-magnetic non-conductive thin film layer and a first soft magnetic thin film layer are formed.

FIG. 10 is a diagram for explaining a manufacturing process of the MR head, and is a plan view showing a first substrate material on which a large number of MR heads are formed.

FIG. 11 is a diagram for explaining a manufacturing process of the MR head, and is a plan view showing a magnetic head block in which a large number of MR heads are cut so as to be arranged in a horizontal direction.

FIG. 12 is a diagram for explaining a manufacturing process of the MR head, and is a cross-sectional view showing a state where a second substrate is bonded.

FIG. 13 is a schematic diagram showing a recording / reproducing mechanism in a recording / reproducing apparatus to which the present invention is applied.

FIG. 14 is a perspective view of a rotating drum on which an MR head to which the present invention is applied is mounted.

[Description of Signs] 1 MR head, 2 first substrate, 3 lower magnetic shield layer, 4 lower gap layer, 5 MR thin film, 6 first soft magnetic layer, 7 non-magnetic layer, 8 second soft magnetic layer , 9 bias layer, 10 electrode layer, 11 upper gap layer, 12
Upper magnetic shield layer, 13 adhesive layer, 14 second substrate

Claims (12)

[Claims] 1. A magneto-resistance effect type magnetic head provided on a rotating drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method, wherein a magneto-resistance effect element sandwiched between a pair of substrates is provided. A magnetoresistive magnetic head, comprising: a constituent thin film layer; and wherein the substrate is formed of single crystal sapphire. 2. A magneto-resistance effect type magnetic head provided on a rotating drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method, wherein a magneto-resistance effect element sandwiched between a pair of substrates is provided. A magnetoresistive head according to claim 1, further comprising a thin film layer, wherein said substrate is made of a material containing MgO ₂ or Cr ₂ O ₃ as a main component. 3. A magnetoresistive head provided on a rotating drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method, wherein a magnetoresistive element sandwiched between a pair of substrates is provided. A magnetoresistive magnetic head, comprising: a constituent thin film layer; and wherein the substrate is formed of partially stabilized zirconia. 4. A magneto-resistance effect type magnetic head provided on a rotating drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method, wherein a magneto-resistance effect element sandwiched between a pair of substrates is provided. A magnetoresistive magnetic head, comprising: a constituent thin film layer; and wherein the substrate is formed of a material containing SiC or TiC as a main component. 5. A magneto-resistance effect type magnetic head provided on a rotating drum and recording and / or reproducing on and from a tape-shaped recording medium by a helical scan method, wherein a magneto-resistance effect element sandwiched between a pair of substrates is provided. A magnetoresistive magnetic head, comprising: a constituent thin film layer; and wherein the substrate is formed of single crystal ferrite having a Curie point of less than 268K. 6. A magnetoresistance effect type magnetic head provided on a rotating drum and performing recording and / or reproduction on a tape-shaped recording medium by a helical scan method, wherein a magnetoresistance effect element sandwiched between a pair of substrates is provided. comprising a thin film layer forming said substrate, CaO, a magnetoresistive head, characterized in that it is formed of a material mainly containing three components of TiO _2, and NiO. 7. A recording / reproducing apparatus comprising: at least one magnetoresistive magnetic head on a rotating drum, for recording and / or reproducing on and from a tape-shaped recording medium by a helical scan method. A recording / reproducing apparatus, wherein the substrate in the type magnetic head is formed of single crystal sapphire. 8. A recording / reproducing apparatus, comprising: at least one magnetoresistive head on a rotating drum, for recording and / or reproducing data on and from a tape-shaped recording medium by a helical scan method. The substrate in the type magnetic head is made of MgO
Or reproducing apparatus characterized by being formed by Cr ₂ O _3. 9. A recording / reproducing apparatus comprising: at least one magnetoresistive magnetic head on a rotating drum, for recording and / or reproducing data on and from a tape-shaped recording medium by a helical scan method. A recording / reproducing apparatus, wherein a substrate in a mold head is formed of partially stabilized zirconia. 10. A recording / reproducing apparatus comprising at least one magnetoresistive effect type magnetic head on a rotating drum and performing recording and / or reproducing on a tape-shaped recording medium by a helical scan method, wherein the magnetoresistive effect is provided. The substrate in the type magnetic head is made of SiC
A recording / reproducing apparatus characterized by being formed of TiC. 11. A recording / reproducing apparatus comprising: at least one magnetoresistive head on a rotating drum, for recording and / or reproducing data on and from a tape-shaped recording medium by a helical scan method. A recording / reproducing apparatus, wherein a substrate in a type magnetic head is formed of single crystal ferrite having a Curie point of less than 268K. 12. A recording / reproducing apparatus comprising: at least one magnetoresistive effect type magnetic head on a rotating drum, for recording and / or reproducing on and from a tape-shaped recording medium by a helical scan method. The substrate in the type magnetic head has Ca
A recording / reproducing apparatus characterized by being formed of a material containing three components of O, TiO ₂ and NiO as main components.