JP2001133346A - 真空計 - Google Patents
真空計Info
- Publication number
- JP2001133346A JP2001133346A JP36141299A JP36141299A JP2001133346A JP 2001133346 A JP2001133346 A JP 2001133346A JP 36141299 A JP36141299 A JP 36141299A JP 36141299 A JP36141299 A JP 36141299A JP 2001133346 A JP2001133346 A JP 2001133346A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum gauge
- discharge
- vacuum
- pressure
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 5
- 230000005672 electromagnetic field Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 230000007423 decrease Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36141299A JP2001133346A (ja) | 1999-11-05 | 1999-11-05 | 真空計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36141299A JP2001133346A (ja) | 1999-11-05 | 1999-11-05 | 真空計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001133346A true JP2001133346A (ja) | 2001-05-18 |
| JP2001133346A5 JP2001133346A5 (enExample) | 2005-05-26 |
Family
ID=18473476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP36141299A Pending JP2001133346A (ja) | 1999-11-05 | 1999-11-05 | 真空計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001133346A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180062555A (ko) * | 2016-11-30 | 2018-06-11 | 한국표준과학연구원 | 진공방전관을 이용한 압력센서 |
-
1999
- 1999-11-05 JP JP36141299A patent/JP2001133346A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180062555A (ko) * | 2016-11-30 | 2018-06-11 | 한국표준과학연구원 | 진공방전관을 이용한 압력센서 |
| KR101869613B1 (ko) | 2016-11-30 | 2018-06-21 | 한국표준과학연구원 | 진공방전관을 이용한 압력센서 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040514 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040514 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040720 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060725 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060920 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060920 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070109 |