JP2001110362A - Dielectric barrier discharge lamp unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To let discharge chamber of a dielectric barrier discharge lamp not distorted even when it became axially longer, to make distribution of the illuminance on the article to be uniform, and further to make it possible to prevent the lamp from swinging even when it receives vibrations, causing no breakage of the discharge chamber. SOLUTION: In a dielectric barrier discharge lamp unit that disposes a plurality of dielectric barrier discharge lamps 2 within a casing 1, it is characterized that the dielectric barrier discharge lamp 2 is equipped with two electrodes through a discharge vessel 3 with a slender appearance that functions also as a dielectric substance for dielectric barrier discharge, that a base 5 with power feeding part electrically connected to both electrodes is provided only at a end of the discharge lamp, and that the tip portion 3a of the discharge vessel 3 which is the other end of dielectric the barrier discharge lamp 2 is held by a holding member 6 provided within the casing 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric barrier discharge lamp device having a dielectric barrier discharge lamp disposed in a casing.

[0002]

2. Description of the Related Art A dielectric barrier discharge lamp as shown in FIG. 1 is conventionally known. Dielectric barrier discharge lamp 2
Has an elongated discharge vessel 3 which also serves as a dielectric of a dielectric barrier discharge, and has an elongated outer shape. The discharge vessel 3 has a hollow cylindrical shape composed of an inner tube 3a and an outer tube 3b.
b, one reticulated electrode 40 is provided on the outer surface,
The other electrode 41 is provided on the outer surface of the inner tube 3a. Then, only at one end of the dielectric barrier discharge lamp 2, a power supply portion 50 electrically connected to one electrode 40 and connected to the ground, and electrically connected to the other electrode 41 and applied with a negative high volt. A base 5 having a power supply portion 51 is provided.

[0003] As shown in FIG. 2, such a dielectric barrier discharge lamp 2 is arranged in the casing 1 by fixing a base 5 at one end thereof to the casing 1. Is what you do. That is,
The other end of the dielectric barrier discharge lamp 2 is free in the casing 1. Reference numeral 7 denotes a window member for extracting light emitted from the dielectric barrier discharge lamp attached to the casing.

[0004]

However, such a dielectric barrier discharge lamp device has the following problems. Referring to FIG. 2, as the discharge vessel 3 of the dielectric barrier discharge lamp 2 becomes longer in the axial direction so as to correspond to an increase in the size of the workpiece W such as a liquid crystal substrate, the discharge of the discharge vessel 3 is caused by its own weight. The distance H1 between the discharge vessel 3 which is the light emitting portion at the other end of the dielectric barrier discharge lamp 2 in the free state due to the bending of the vessel 3 and the workpiece W facing the portion is determined by the base 5 side. The phenomenon that the distance becomes shorter than the separation distance H2 between the discharge vessel 3 which is the light emitting part and the object to be treated facing the part has occurred. As a result, unevenness in the illuminance distribution on the object to be processed occurred, and the object to be processed could not be uniformly processed into an appropriate state.

Further, when vibration is applied to the dielectric barrier discharge lamp device, the dielectric barrier discharge lamp 2 uses the base 5 fixed to the casing 1 as a fulcrum to support the base 5.
On the other hand, there is a problem that the other end in the free state on the opposite side swings greatly, and the discharge vessel 3 on the base 5 side is damaged.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to prevent the discharge vessel from bending even if the discharge vessel of the dielectric barrier discharge lamp is elongated in the axial direction. In addition, the illuminance distribution on the object to be processed can be made uniform, and even if vibration is applied to the dielectric barrier discharge lamp device, the dielectric barrier discharge lamp can be prevented from shaking, and the discharge vessel is damaged. It is an object of the present invention to provide a dielectric barrier discharge lamp device which does not have the above.

[0007]

According to a first aspect of the present invention, there is provided a dielectric barrier discharge lamp device having a dielectric barrier discharge lamp disposed in a casing. One electrode and the other electrode are provided via an elongated discharge vessel having an external shape also serving as a dielectric of a dielectric barrier discharge, and only one end of the dielectric barrier discharge lamp is provided with one electrode and the other. A base having a power supply portion electrically connected to the electrode is provided, and a distal end portion of the discharge vessel on the other end side of the dielectric barrier discharge lamp is held by a holding member provided in the casing. It is characterized by having.

According to a second aspect of the present invention, there is provided a dielectric barrier discharge lamp device according to the first aspect, wherein the holding member is configured to contact and hold the distal end of the discharge vessel. And an elastic portion having one end fixed to the contact holding portion and the other end fixed to the casing.

According to a third aspect of the present invention, there is provided a dielectric barrier discharge lamp device according to the first aspect, wherein the holding member comprises a helical spring member. The spring inner diameter at one end is larger than the outer diameter of the discharge vessel, one end of the spring member abuts the outer circumference of the tip of the discharge vessel, and the other end is fixed to the casing. The helical diameter is continuously reduced from the side toward the other end.

[0010]

FIG. 3 is an explanatory view of a dielectric barrier discharge lamp device according to the present invention. The dielectric barrier discharge lamp 2 incorporated in the dielectric barrier discharge lamp device of the present invention is the same as the dielectric barrier discharge lamp shown in FIG. 1, and is electrically connected to one electrode and connected to the ground. A base 5 having a supplied power supply portion 50 and a power supply portion 51 electrically connected to the other electrode and to which a minus high volt is applied is provided.

The dielectric barrier discharge lamp 2 incorporated in the casing 1 has a base 5 provided on one end side fixed to a side surface of the casing 1 by an appropriate means such as a screw or fitting. The discharge vessel 3 extends toward the inside of the casing 1, and the tip 3 a of the discharge vessel 3 at the other end is held by a holding member 6 provided in the casing 1. The same reference numerals as those in FIG. 2 indicate the same parts.

As a result, since the distal end portion 3a of the discharge vessel 3 is held by the holding member 6, the deflection of the discharge vessel 3 due to its own weight can be prevented, and the discharge which is the light emitting portion of the dielectric barrier discharge lamp 2 can be performed. Since the container 3 can maintain a constant separation distance from the object at any position, the illuminance distribution on the object can be uniform, and the object can be processed in an appropriate state. Can be.

Further, even if vibration is applied to the dielectric barrier discharge lamp device, the dielectric barrier discharge lamp 2 has the base 5 at one end fixed to the casing 1 and the tip 3a of the discharge vessel 3 at the other end. Since it is held by the holding member 6, the dielectric barrier discharge lamp 2 can be prevented from shaking,
The discharge vessel 3 is not damaged.

FIG. 4 is a detailed explanatory view of the holding member.
The holding member 6 has one end side fixed to the inner surface of the casing 1 and a contact holding section 61 on the other end side that comes into contact with the distal end portion 3 a of the discharge vessel 3. The contact holding portion 61 is tapered so that the inner diameter increases toward the distal end portion 3a of the discharge vessel 3, and when the dielectric barrier discharge lamp 2 is inserted into the casing 1, The taper serves to reliably guide the distal end portion 3a of the discharge vessel 3 to the contact holding portion 61.

FIG. 5 is an explanatory view showing another example of the holding member. The holding member 6 is made up of a contact holding portion 61a that comes into contact with the distal end portion 3a of the discharge vessel 3, and an elastic member 61b having one end fixed to the contact holding portion 61a and the other end fixed to the inner surface of the casing 1. . In this embodiment, the elastic member 61b uses a coil-shaped spring, but may be a leaf spring. In other words, the elastic member 61b serves to press the contact holding portion 61a in the direction of the distal end portion 3a of the discharge vessel 3. Any elastic member may be used as long as it performs the following.

As described above, the contact holding portion 61a is pressed in the direction of the tip 3a of the discharge vessel 3 to hold the discharge vessel 3, so that the tip 3a of the discharge vessel 3 and the contact holding portion 6a are held.
When the dielectric barrier discharge lamp 2 is inserted into the casing 1 and the base 5 is fixed to the casing 1, there is no need to accurately determine the positional relationship (separation positional relationship) of the dielectric material 1. The strict positioning of the barrier discharge lamp 2 in the longitudinal direction is not required, and the distal end portion 3a of the discharge vessel 3 can be easily and reliably connected to the holding member 6 with a simple structure.
Can be held.

Further, the vibration applied to the dielectric barrier discharge lamp device can be effectively absorbed by the elastic member 61b of the holding member 6, so that the vibration of the dielectric barrier discharge lamp 2 can be reliably prevented. The discharge vessel 3 is not damaged.

FIG. 6 is an explanatory view showing another example of the holding member. The holding member 6 includes a spiral spring member 61c, and one end of the spring member 61c abuts on the discharge vessel 3,
The other end is fixed to the inner surface of the casing 1. More specifically, the spiral spring member 61c that is the holding member 6
The inner diameter of the spring at one end of the discharge vessel 3 in the direction of the tip 3a is slightly larger than the outer diameter of the discharge vessel 3, and one end of the spring member 61c is in contact with the outer periphery of the tip 3a of the discharge vessel 3. . The other end of the spring member 61c is fixed to the inner surface of the casing 1. The spring member 61c spirals from one end contacting the outer periphery of the distal end portion 3a of the discharge vessel 3 to the other end fixed to the casing 1. The diameter is continuously decreasing.

As described above, since the spiral diameter continuously decreases, the entire spring member 61c has a tapered structure.
Is inserted and arranged, the tip 3a of the discharge vessel 3 can be reliably guided along the taper, and the spring member 61 is provided.
With c, the tip 3a of the discharge vessel 3 can be reliably held. Further, the vibration applied to the dielectric barrier discharge lamp device can be effectively absorbed by the elastic action of the spring member 61c, so that the swinging of the dielectric barrier discharge lamp 2 can be reliably prevented, and the discharge vessel 3 is not damaged.

[0020]

As described above, according to the dielectric barrier discharge lamp device of the present invention, the dielectric barrier discharge lamp disposed in the casing has the base provided on one end side fixed to the casing, Since the discharge vessel of the dielectric barrier discharge lamp extends toward the inside of the casing, and the distal end of the discharge vessel at the other end is held by the holding member provided in the casing, the discharge vessel is bent by its own weight. Can be prevented, the dielectric barrier discharge lamp 2
The discharge vessel, which is the light emitting part, can maintain a constant separation distance from the object at any position, so that the illuminance distribution on the object can be uniform and the object can be processed in an appropriate state. Things can be processed.

Furthermore, even when vibration is applied to the dielectric barrier discharge lamp device, the dielectric barrier discharge lamp has the base on one end fixed to the casing and the tip of the discharge vessel on the other end held by a holding member. Therefore, the dielectric barrier discharge lamp can be prevented from shaking, and the discharge vessel is not damaged.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a conventional dielectric barrier discharge lamp device.

FIG. 2 is an explanatory view of a dielectric barrier discharge lamp used in the conventional and barrier dielectric discharge lamp devices of the present invention.

FIG. 3 is an explanatory view of a dielectric barrier discharge lamp device of the present invention.

FIG. 4 is an explanatory view of a holding member for holding the dielectric barrier discharge lamp of the present invention.

FIG. 5 is an explanatory view showing another example of a holding member for holding the dielectric barrier discharge lamp of the present invention.

FIG. 6 is an explanatory view showing another example of a holding member for holding the dielectric barrier discharge lamp of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Casing 2 Dielectric barrier discharge lamp 3 Discharge vessel 40 electrode 41 electrode 5 Base 6 Holding member

Claims (3)

[Claims] 1. A dielectric barrier discharge lamp device in which a dielectric barrier discharge lamp is disposed in a casing, wherein the dielectric barrier discharge lamp is provided via a discharge vessel having an elongated external shape which also serves as a dielectric of the dielectric barrier discharge. One electrode and the other electrode are provided, and only one end of the dielectric barrier discharge lamp is provided with a base having a power supply portion electrically connected to the one electrode and the other electrode. A dielectric barrier discharge lamp device, wherein a distal end portion of a discharge vessel at the other end of the dielectric barrier discharge lamp is held by a holding member provided in the casing. 2. The discharge device according to claim 1, wherein the holding member includes a contact holding portion that is in contact with a distal end portion of the discharge vessel, and an elastic portion having one end fixed to the contact holding portion and the other end fixed to a casing. The dielectric barrier discharge lamp device according to claim 1. 3. The holding member is formed of a spiral spring member. The spring member has a spring inner diameter at one end side larger than an outer diameter of the discharge vessel, and one end side of the spring member at a tip end of the discharge vessel. The outer diameter of the spring member is fixed to the casing while the other end is fixed to the casing, and the spiral diameter continuously decreases from one end to the other end of the spring member. Dielectric barrier discharge lamp device.