JP2001108597A - Scanning probe microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To exclude impurities and easily adjust the amounts of emitted electrons by sharply pointing the end of a probe. SOLUTION: A scanning probe microscope includes: a scanner supporting member 47 movable for adjustments relative to a sample; a scanner 52 formed of a piezoelectric body supported against the scanner supporting member 47; a probe holder mounting member 53 having an insulator 54 supported against the end of the scanner 52, a pair of feeding terminals 55, 56 and a holder mounting part 57; a probe holder PH having a mounted part 60a detachably mounted on the holder mounting part 57, and a pair of conducting wires 62, 67 electrically connected to the feeding terminals 55, 56 when the mounted part 60a is mounted in place, with probe connections 63, 68 provided at the ends of the wires 62, 67; and a probe P having a heating wire P1 held at both ends by the probe connections 63, 68 and a probe wire P2 supported on the center of the heating wire P1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an STM (Scanning
Tunneling Microscope), AF
M (Atomic Force Microscope), UH
V (Ultra High Vacuum) -STM (Ultra High Vacuum Scanning Tunneling Microscope), UHV (Ultra High Vacuum) -AF
M (Ultra High Vacuum Atomic Force Microscope)
robe Microscope).

[0002]

2. Description of the Related Art STM under UHV (Ultra High Vacuum)
An SPM (scanning probe microscope) such as a scanning tunneling microscope (scanning probe microscope) uses a tunnel current obtained by bringing a probe (probe) close to a sample surface to obtain information on surface irregularities, or to obtain atomic information on a sample surface. It is used to obtain information such as sequence.

[0003]

The performance of the SPM (scanning probe microscope) depends on the probe used. Therefore, in order to improve the performance of SPM,
A probe having the following characteristics is desired. (1) A probe with a sharp and sharp tip. (2) Probe without impurities. (3) A probe that can easily adjust the amount of emitted electrons.

[0004] In view of the above problems, the present invention has the following contents (O01) to (O03). (O01) To sharpen the tip of the probe very sharply. (02) To remove (clean) impurities on the probe. (O03) To be able to easily adjust the amount of electrons emitted from the probe.

[0005]

Means for Solving the Problems Next, the present invention which has solved the above-mentioned problems will be described. Elements of the present invention include elements of the embodiments to facilitate correspondence with the elements of the embodiments described later. The sign of parentheses is added in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(Solution of the Invention) In order to solve the above problems, the scanning probe microscope of the invention has the following requirements (A01) to
(A05) a scanner support member (47) that can be moved and adjusted in an approach / separation direction that is a direction of approaching or separating from a sample, and (A02) the scanner support member (47). ), A scanner (52) made of a piezoelectric material having a scanner base end supported thereon, (A03) an insulator (54) having an insulator base end supported at the tip of the scanner (52), and the insulator ( 54) A pair of power supply terminals (55, 5) supported at positions separated from each other at the distal end.
6) and a probe holder mounting member (5) having a holder mounting portion (57) provided at the tip of the insulator (54).
3), (A04) a mounted part (60a) detachably mounted on the holder mounting part (57), and the mounted part (60).
a) is electrically connected to the pair of power supply terminals (55, 56) when mounted on the holder mounting portion (57), and the probe connecting portions (63, 6) are provided at the distal ends thereof.
8) is provided with a pair of conductive wires (62,
(A05) a heating wire (P1) having both ends held by the probe connecting portions (63, 68), and a support at the center of the heating wire (P1). Probe (P) having a probe wire (P2) formed thereon.

(Operation of the Present Invention) In the scanning probe microscope of the present invention having the above configuration, the scanner support member (4
7) The movement is adjusted in the approach / separation direction, which is the direction approaching or separating from the sample. The scanner support member (47) supports the scanner base end of the piezoelectric scanner (52). The scanner (52) has, at its tip,
The probe holder mounting member (53) supports the base end of the insulator (54). A pair of power supply terminals (55, 56) are mounted on the distal end of the insulator (54) at positions separated from each other. A mounting portion (60a) of the probe holder (PH) is detachably mounted on a holder mounting portion (57) provided at a tip portion of the insulator (54). The probe connecting portions (63, 68) at the distal ends of the pair of conductive wires (62, 67) of the probe holder (PH) are connected to the mounting portion (6).
0a) is electrically connected to the pair of power supply terminals (55, 56) when the holder is mounted on the holder mounting portion (57). Both ends of the heating wire (P1) of the probe (P) are held by the probe connecting portions (63, 68). A probe wire (P2) is supported at the center of the heating wire (P1).

Therefore, the probe holder (P) is attached to the holder mounting portion (57) provided at the tip of the insulator (54).
When the mounted part (60a) of H) is mounted, the power supply terminal (55) becomes the conductive wire (62), the heating wire (P1) of the probe (P), the conductive wire (67), and the power supply terminal. (56) are sequentially connected. In this state, by supplying power between the power supply terminals (55) and (56),
Power can be supplied to the probe (P). For this reason, it is possible to heat the probe wire (P1) by applying a current to the heating wire (P1) of the probe (P) to generate heat. A high voltage of about 10 Kv or a pulse voltage of about 3 Kv can be applied to the probe (P) while the probe wire (P1) is heated to 1000 ° C. or higher. Said 1
The probe (P) can be cleaned by heating to 000 ° C. or higher.

[0009] Further, in a state of heating to 1000 ℃ or more,
By applying a high voltage of about 10 Kv to the probe (P), the tip of the probe (P) can be sharpened.
In addition, by applying a pulse voltage of about 3 Kv to the probe (P) in a state where the probe (P) is heated to 1000 ° C. or higher, a state in which electrons can be easily emitted can be obtained.
The energy distribution of the electrons can be analyzed by changing the temperature at the tip. The scanner (52) is protected from high voltage by the insulator (54), and is thermally insulated. The scanner (52) supporting the probe holder (PH) scans the surface of the sample by bringing the tip of the probe (P) held by the probe holder (PH) close to the surface of the sample held by the sample stage. I do.

(Examples) Next, specific examples (embodiments) of embodiments of the scanning probe microscope of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples. Absent. In order to facilitate the following explanation, orthogonal coordinate axes X-axis, Y-axis, and Z-axis are defined in the directions of arrows X, Y, and Z which are orthogonal to each other in the drawings. The direction opposite to the X direction and the Y direction is the −Y direction, and the direction opposite to the Z direction is the −Z direction. In addition, the X-axis direction includes the X direction and the −X direction, and the Y axis direction includes the Y direction and the −Y direction.
It is referred to as an axial direction, and is referred to as a Z-axis direction including the Z direction and the −Z direction. Furthermore, in the figure, those with "•" in "○" mean an arrow pointing from the back of the paper to the front,
A mark with "x" in "o" means an arrow pointing from the front to the back of the paper.

(Embodiment 1) FIG. 1 is an overall explanatory view of Embodiment 1 of a scanning probe microscope of the present invention. FIG. 2 is an enlarged view of a main part of the stage unit according to the first embodiment. FIG. 3 is an enlarged plan view of the stage unit according to the first embodiment.
It is the figure seen from II. FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. FIG. 5 is an explanatory view of a position adjusting member of the sample stage according to the first embodiment, and is a cross-sectional view taken along line VV of FIG. FIG. 6 is an explanatory diagram of the positioning member of the slide base according to the first embodiment.

In FIG. 1, a scanning probe microscope SP
The outer wall 1 forming the vacuum sample chamber A1 containing M
A sample exchange chamber A2 is connected to the side portion via a gate valve 2,
The stage support flange 3 is provided on the −Z side portion, and the elevating rod support flange 4 and the observation window 6 are provided on the upper side.

A sample holder transfer member 7 is supported on the outer wall (not shown) of the sample exchange chamber A2 so as to be able to move forward and backward in the Z-axis direction. The holder transport member 7 is a sample holder S
H is conveyed through the gate valve 2 between the vacuum sample chamber A1 and the sample exchange chamber A2. The large base 8 disposed in the vacuum sample chamber A1 is supported inside the stage support flange 3. A small base 10 is supported on the large base 8 via four vibration isolation units 9. Positioning member through holes 8a and 10a are formed in the large base 8 and the small base 10, respectively.

(Sample Stage) As shown in FIGS. 2 to 4, a sample stage support member 1 integrally formed with the small base 10 is provided at the tip (Z-side end) of the small base 10.
6 are provided. The sample stage support member 16 has one sample holder through hole 16a formed at the center and three support insertion holes 16b formed outside the sample holder through hole 16a. In each of the three support insertion holes 16b, a support 17 is inserted from a side surface on the -Z side.
Further, three spring support members 18 are fixed to the outer surface of the sample stage support member 16. A sample stage T is arranged on the −Z side of the sample stage support member 16. The sample stage T has a sample stage main body 21, and a sample holder mounting hole 21 a is formed in the center of the stage main body 21.

In FIG. 4, three contact recesses 21b with which the tips of the three supports 17 abut are provided on the side surface of the sample stage main body 21 on the Z side. Further, two lever housing recesses 21c, 21c are formed on the −Z side surface of the stage main body 21. Cylindrical supported members 22, 22 are fixed to upper ends of the lever accommodating recesses 21c, 21c, respectively.

Three spring supporting members 23 are fixed to the outer peripheral portion of the stage main body 21. Stage body 21
The three spring support members 23 of the sample stage support member 16 and the three spring support members 18 of the sample stage support member 16 are connected by tension springs 24 (see FIGS. 2 and 3). Therefore, the stage main body 21 of the sample stage T is pulled by the three tension springs 24 in the direction of the sample stage supporting member 16 (Z direction), and
The support 17 is supported by the sample stage support member 16 by the tip of the support 17 which comes into contact with the support b. Therefore, the sample stage main body 21 can move within a plane (XY plane) perpendicular to the Z axis.

3 and 4, stage adjustment lever support members 25, 25 are arranged on the small base 10 adjacent to both sides of the sample stage T, respectively.
Each of the pair of stage adjustment lever support members 25 has a lever support member main body 26 and a cover 27 fixed thereto with screws. The pair of lever support member main bodies 26, 26 are fixed to the small base 10 (see FIG. 3), and have lever receiving recesses 26a, 26a that open on the surface facing each other and the side surface on the −Z side. I have. In FIG. 3, the opening on the −Z side of the lever housing recess 26 a is closed by the cover 27. The stage adjustment lever supporting members 25, 25 for supporting the sample stage main body 21 are arranged symmetrically with respect to a vertical plane extending in the Z-axis direction, and one of them has an X-axis stage adjustment lever LX which rotates around a horizontal axis. The Y-axis stage adjustment lever LY is supported rotatably around the horizontal axis. The X-axis and Y-axis stage adjustment levers L
X and LY are L-shaped levers.
c, the stage support portions LXa, LYa supporting the lower surface of the columnar supported member 22 and the operated portion LX extending downward.
b, LYb.

The lower ends of the operated portions LXb, LYb of the stage adjusting levers LX, LY project below the small base 10. Horizontal rotation levers 28 and 29 (see FIGS. 4 and 5) are supported on the lower surface of the small base 10. The operation ends 28a, 29a of the horizontal rotation levers 28, 29 are in contact with the lower ends of the operated portions LXb, LYb of the stage adjustment levers LX, LY. In FIG. 5, the tip of an X-axis position control rod 31 that moves in the Z direction abuts on the operated portion 28b of the horizontal rotation lever 28, and the Y that moves in the Z direction moves on the operated portion 29b of the horizontal rotation lever 29. Shaft position control rod 3
The two end portions (ends on the Z side) are in contact with each other. The X-axis position control rod 31 and the Y-axis position control rod 32
Are configured to be movable in the Z-axis direction when the stage position control motor units MX and MY (see FIGS. 3 and 5) supported on the outer surface of the stage support flange 3 rotate. Incidentally, as the configuration capable of moving in the Z-axis direction when the stage position control motor units MX and MY rotate, various conventionally known configurations can be adopted.

In FIG. 4, the sample stage T includes stage supporting portions LXa, LX supporting the lower surface of the columnar supported member 22.
It is supported by Ya and is pulled toward the large base 8 by a stage positioning tension spring 41.
Therefore, in FIG. 4, when the X and Y axis position control rods 31 and 32 move in the Z axis direction by the rotational drive of the stage position control motor units MX and MY, the horizontal rotation levers 28 and 29 and the stage adjustment levers LX, L
Y rotates. At this time, as can be seen from FIG. 4, the stage support portion LX supporting the lower surface of the columnar supported member 22 is provided.
a, LYa rotate in the vertical direction, and the XY of the sample stage T
A position in a plane (a plane perpendicular to the Z axis) is adjusted.

(Probe Stage) A slide base 35 (see FIG. 3) is movably supported on the small base 10 by a rail (not shown) extending in the Z-axis direction.
The -Z side end of the slide base 35 is connected to a connecting lever 37, and the connecting lever 37 is connected to a base coarse movement rod 38. The base coarse movement rod 38 is moved in the Z-axis direction by a manual operation member 39 (coarse movement).
It is possible.

The slide base 35 is pulled in the Z direction by two tension springs 41, 41, and the positioning member 4 is in contact with the slide base 35.
3 position. 2 and 6, a pair of hinge connection members 42, 42 are fixed at positions corresponding to the positioning member through holes 10a on the lower surface of the small base 10. The positioning member 43 includes a U-shaped portion 43a at the upper end.
And a linear rod portion 43b extending downward from the center thereof.
The hinge connecting portion 43c at the upper end of the linear rod portion 43b is provided with the pair of hinge connecting members 42,
It is hinged by 42 and can swing in the Z-axis direction. Both ends of the U-shaped portion 43a of the positioning member 43 are in contact with the end face of the slide base 35 in the Z direction, and the lower end thereof penetrates the positioning member through hole 8a of the large base 8 to slide the slide base 35. It is in contact with the tip (end on the Z side) of the position control rod 44. The slide base position control rod 44 is moved (finely adjusted) in the Z-axis direction by a base position control motor unit MZ supported on the outer surface of the stage support flange 3.

FIG. 7 is an explanatory view of a main part of the probe stage according to the first embodiment, and is a sectional view taken along line VII-VII of FIG. 8A. FIG. 8 is an explanatory view of a main part of the probe stage according to the first embodiment. FIG. 8A is a view seen from an arrow VIIIA in FIG. 7, and FIG. 8B is an enlarged view of a probe holding part in FIG. 8A. FIG. 9 is an explanatory diagram of a conductive wire and a plate of the probe stage according to the first embodiment.
FIG. 10 is an explanatory view of a main part of the probe stage according to the first embodiment.
10A is a sectional view taken along line XA-XA of FIG. 7, and FIG.
FIG. 3 is a sectional view taken along line XB-XB of FIG.

7 and FIGS. 1 to 3, a scanner support member main body 48 of a scanner support member 47 is fixed to the slide base 35 by a plurality of fixing screws. The scanner support member 47 is provided with the scanner support member body 4.
8 and a scanner connecting member 49 connected to the tip (end on the Z side). The scanner connecting member 49 has a flange 49a and a shield mounting cylindrical surface 49b. A cylindrical shield 50 for disturbance prevention is supported on the shield mounting cylindrical surface 49b.

A scanner connecting plate 51 is fixed to an end surface on the Z side of the scanner connecting member 49 by screws, and a scanner 52 is fixed to a side surface on the Z side of the scanner connecting plate 51. The scanner 52 is a conventionally known laminated piezoelectric scanner in which the piezoelectric bodies PZT and the electrodes DK are alternately stacked, and the Z-axis movement for moving the tip end (Z-side end) of the scanner in the Z-axis direction. Part 52Z, X perpendicular to the Z axis
It has an X-axis moving unit 52X and a Y-axis moving unit 52Y that move within a Y plane (see FIG. 4). The scanner 52 is
As can be seen from FIG. 8, it has a square shape when viewed from the Z-axis direction.

A probe holder mounting member 53 is supported at the tip (end on the Z side) of the scanner 52. The probe holder mounting member 53 includes an insulator 54 fixed to the tip of the scanner 52 and a power supply terminal 5 supported by the insulator 54.
5, 56 and a male screw 57. The power supply terminals 55 and 56 are electrically insulated, and the power supply terminal 56 and the male screw 57 are electrically connected. In addition, the power supply terminal 5
5 is larger than the Z-side end face of the power supply terminal 56 by Z
Projecting in the direction. The probe holder mounting member 53 is constituted by the elements indicated by the reference numerals 54 to 57. A conductive cable 58 is connected to the power supply terminal 55, and a conductive cable 59 is connected to the power supply terminal 56.

(Probe Holder PH) The probe holder PH detachably mounted on the probe holder mounting member 53 has a cylindrical probe holder main body 60 made of a conductive material made of stainless steel. Reference numeral 60 denotes a male screw 57 of the probe holder mounting member 53.
A threaded hole (attached portion) 60a screwed into the groove, a pair of concave grooves 60b and 60c extending in the Z-axis direction on the outer surface, and -Z
Ring-shaped wire accommodating portion 6 formed on the outer peripheral portion of the side end surface
0d is formed.

7 to 10, a straight portion 62a of a conductive wire 62 is fixed to the groove 60b using an insulating adhesive 61 (see FIG. 10). Accordingly, the conductive wire 62 is insulated from the conductive probe holder main body 60. In FIG. 9, the conductive wire 62 is connected to the straight portion 62a and the ring portion 6a.
2b, and the ring portion 62b is housed in a ring-shaped wire housing portion 60d of the probe holder main body 60. A conductive plate (probe connecting portion) 63 is welded to the tip of the linear portion 62a of the conductive wire 62, and a screw hole 63a is formed in the conductive plate 63. As shown in FIG. 8, the washer 6 is provided in the screw hole 63a.
The screw 65 penetrating through 4 is screwed.

A linear conductive wire 67 is fixed in the concave groove 60c using a conductive adhesive 66 (see FIG. 10), and the conductive wire 67 is electrically conductive by the conductive adhesive 66. Is electrically connected to the probe holder main body 60. In FIG. 9, a conductive plate (probe connecting portion) 68 is welded to the tip of a linear conductive wire 67, and a screw hole 68a is formed in the conductive plate 68. As shown in FIG. 8, a screw 70 that passes through a washer 69 is screwed into the screw hole 68a. The probe holder PH has the reference numerals 60 to 70.
It consists of the elements indicated by. The probe holder PH is detachable from the probe holder mounting member 53 by screwing or removing a screw hole 60a of the probe holder main body 60 and a male screw 57 of the probe holder mounting member 53. When the probe holder PH is mounted on the probe holder mounting member 53, the ring portion 62b of the conductive wire 62 contacts the power supply terminal 55, and the conductive wire 67 is the conductive adhesive 66 and the probe holder main body 60. , A power supply terminal 56 via a male screw 57
It is constituted so that it may conduct.

(Probe) In FIG. 7, the probe P supported by the probe holder PH has a U-shaped heating wire P1 and a probe wire P2 spot-welded to a central curved portion thereof. Wire P2
Is sharpened by electrolytic polishing. 8 and 7
, One end of the heating wire P1 of the probe P is fixed to the conductive plate 63 by a washer 64 and a screw 65 (see FIG. 8B), and the other end is electrically conductive by a washer 69 and a screw 70 (see FIG. 8B). It is fixed to the plate 68. Therefore, as can be seen from FIG. 7, the conductive cable 58 is sequentially connected to the power supply terminal 55 and the conductive wire 6.
2. Conductive plate 63, heat-generating wire P1, conductive plate 68, conductive wire 67, conductive adhesive 66 (see FIG. 10), probe holder main body 60, male screw 57 and conductive terminal 56 It is electrically connected to the cable 59.

(Operation of Embodiment 1) In the SPM (scanning probe microscope) of the embodiment of the present invention having the above-described configuration, the sample holder SH holding the sample is transferred by the holder transfer member and is transferred to the vacuum sample chamber A1. It is mounted on the placed sample stage T. With the probe P mounted on the probe holder PH, the screw hole 60
a and the male screw 57 of the probe holder mounting member 53 are screwed together, and the probe holder PH is mounted on the probe holder mounting member 53, the ring portion 62b of the conductive wire 62
Are connected to the power supply terminal 55. In this state, the conductive cable 58 sequentially includes the power supply terminal 55, the conductive wire 62,
Conductive plate 63, heating wire P1 of probe P,
The conductive plate 59, the conductive wire 67, the probe holder main body 60, the male screw 57, and the conductive cable 59 are electrically connected via the power supply terminal 56.

Therefore, by supplying power between the conductive cables 58 and 59, a high voltage can be applied to the heating wire P1 of the probe P, and the probe P can be heated to a high temperature. . When a high voltage is applied to the probe P, the insulator 54 provided between the probe P and the scanner 52 electrically insulates the scanner 52 from the high voltage to be applied, and the probe P
During heating at a high temperature, the probe P functions as a heat insulating material for preventing the heat of the probe P from being transmitted to the scanner 52.

By heating the probe P, the tip of the probe P can be heated to 1000 ° C. or higher. Thus, impurities attached to the tip of the probe P can be eliminated. When a high voltage of about 10 Kv is applied to the probe P from the conductive cables 58 and 59 while the probe is heated, the tip of the probe P becomes very sharp and sharp. This state is very advantageous for STM observation, and also facilitates the emission of electrons. Therefore, a high-resolution STM image can be obtained.

The tip of the probe P is heated to a high temperature (1000
(° C. or more) and sharpen the tip of the probe P by applying a high voltage of about 10 Kv to the probe P. Then, an aperture of a ground potential is arranged in opposition to the probe, and a pulse voltage of about 3 Kv is applied to the probe P. Then, the electrons can be pulled out from the probe. If a screen is placed after the aperture, an image of electrons passing through the aperture, that is, an image of a field electron microscope (FEM image) can be obtained. In this case, by changing the temperature of the tip portion of the probe P, the atomic bond energy at the tip portion of the probe changes, and the number of electrons to be pulled out changes, so that the electron energy distribution can be analyzed. When a positive high voltage is applied to the probe, ions can be pulled out from the probe, and a field ion microscope image (FIM
Image) can be obtained.

A positive pulse voltage is applied to the probe to pull out ions from the probe in a pulsed manner, and a time-of-flight mass spectrometer (TOF-M) is provided after the aperture.
By arranging S), mass analysis of the probe can be performed. Therefore, by using the scanning probe microscope of the present invention, a surface electric field can be applied to the sample surface with the probe P having a very sharp tip, and the physical properties of the sample surface can be measured.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made.

[0036]

The holder holding device of the present invention described above has the following effects (E01) to (E03). (E01) By applying a high voltage of about 10 Kv while the probe is heated to a high temperature, the tip of the probe can be sharpened very sharply. (E02) By heating the probe P at a high temperature, impurities attached to the probe P can be eliminated (cleaned). (E03) An FEM image or FIM image can be obtained by superimposing a voltage on the probe heated at a high temperature. In this case, the amount of electrons and ions emitted from the probe can be easily changed by changing the temperature of the probe P. Since it can be adjusted, the energy distribution of electrons and ions can be analyzed. Also, if a positive pulse voltage is applied to the probe to extract ions from the probe and use TOF-MS,
Mass analysis of the probe can be performed.

[Brief description of the drawings]

FIG. 1 is an overall explanatory diagram of Embodiment 1 of a scanning probe microscope of the present invention.

FIG. 2 is an enlarged view of a main part of the stage unit according to the first embodiment.

FIG. 3 is an enlarged plan view of the stage unit according to the first embodiment, as viewed from an arrow III in FIG. 1;

FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. 3;

FIG. 5 is an explanatory view of a position adjusting member of the sample stage according to the first embodiment, and is a cross-sectional view taken along line VV of FIG. 2;

FIG. 6 is an explanatory diagram of a positioning member of the slide base according to the first embodiment.

FIG. 7 is an explanatory view of a main part of the probe stage according to the first embodiment, and is a cross-sectional view taken along line VII-VII of FIG. 8A.

8 is an explanatory view of a main part of the probe stage according to the first embodiment, FIG. 8A is a view seen from an arrow VIIIA in FIG. 7, and FIG.
FIG. 8B is an enlarged view of the probe holding portion of FIG. 8A.

FIG. 9 is an explanatory diagram of a conductive wire and a plate of the probe stage according to the first embodiment.

10 is an explanatory view of a main part of the probe stage according to the first embodiment. FIG. 10A is a sectional view taken along line XA-XA in FIG. 7, and FIG. 10B is a sectional view taken along line XB-XB in FIG.

[Explanation of symbols]

47: scanner support member, 52: scanner, 53: probe holder mounting member, 54: insulator, 55, 56: power supply terminal, 60a: mounted portion (screw hole), 62, 67: conductive wire, 63, 68 ... Probe connection part (conductive plate), P ... Probe, P1 ... Heating wire, P2 ... Probe wire, PH ... Probe holder.

Claims (1)

[Claims] 1. A scanning probe microscope characterized by having the following requirements (A01) to (A05): (A01) Moveable and adjustable in an approaching / separating direction which is a direction approaching or separating from a sample. A scanner supporting member, (A02) a piezoelectric scanner having a scanner base end supported by the scanner supporting member, (A03) an insulator having a insulator base end supported at a tip end of the scanner, and the insulator A probe holder mounting member having a pair of power supply terminals supported at positions separated from each other at a distal end and a holder mounting portion provided at the distal end of the insulator; (A04) detachably mounted to the holder mounting portion; A pair of a mounting portion and a pair of probe connection portions each of which is electrically connected to the pair of power supply terminals when the mounting portion is mounted on the holder mounting portion and a probe connecting portion is provided at a distal end portion, respectively. (A05) A probe holder having a conductive wire, a probe having a heating wire, both ends of which are held by the probe connecting portion, and a probe wire supported at the center of the heating wire.