JP2001108362A - Drying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent piece of a substance to be dried being broken during rotation of a rotor from piercing directly through the inner surface of a chamber. SOLUTION: A back net 9 formed of a wire-netting made of stainless steel is situated in a manner to surround a carrier 31 is situated at the outer peripheral part of a rotor 21 and a sheet-form protection sheet 5 made of a resin is situated on the inner peripheral surface of a chamber 2 in a manner to surround the rotor 21. When the rotor 21 is rotated, the carrier 31 is rotated integrally with the rotor 21 and a moisture content adhered on the surface of a substance 40 to be dried contained in the carrier 31 is removed through the action of a centrifugal force. When a load generated by a centrifugal force is applied on the surface part of the substance 40 to be dried during rotation of the rotor 21 and the substance 40 to be dried is broken, a large broken piece is captured by a back net 9 and small broken pieces not captured by the back net 9 are captured by a protection sheet 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a drying device,
In particular, the present invention relates to a so-called spin-drying type drying apparatus that removes moisture adhering to the surface of a disk-shaped object to be dried such as a magnetic disk substrate by the action of centrifugal force.

[0002]

2. Description of the Related Art There are various types of so-called spin-drying type drying apparatuses for removing moisture adhering to the surface of a disk-shaped object to be dried such as a magnetic disk substrate by the action of centrifugal force. For example, a drying apparatus as shown in FIGS. 11 and 12 is known.

[0003] That is, the drying apparatus includes a chamber 42 provided in a casing (not shown) having an open top, a lid 50 for opening and closing the opening of the chamber 42,
Rotor 61 rotatably provided in chamber 42
A drive source 57 for the rotor 61, a cradle 66 rotatably provided on the rotor 61, and a carrier 71 mounted on the cradle 66 and capable of storing the disc-shaped material 40 therein. I have.

The carrier 71 has a box shape with an opening at the top. Two support shafts are installed in parallel on the opening side, and one support shaft is installed on the bottom side. The object to be dried 40 is accommodated in portions inside the three support shafts. In this case, each support shaft has a peak,
The valleys are provided alternately and formed in the shape of an abacus ball.
The outer peripheral surface of the object to be dried 40 is supported between the valleys of the book support shaft in a state close to point contact (see FIG. 10). When the cradle 66 is rotated and positioned in the rotor 61, the carrier 71 has a predetermined angle (10 ° to 15 °) with respect to a line parallel to the rotation axis of the rotor 61.
Ii) It is inclined to prevent the object to be dried 40 from falling off from the inside.

[0005] Then, the opening of the chamber 42 is
When the drive source 57 is operated and the rotor 61 is rotated, the carrier 71 and the object to be dried 40 rotate integrally with the rotor 61, and the moisture adhering to the surface of the object to be dried 40 is centrifugal. It will be removed by action.

However, in the drying apparatus having the above configuration, the axis of the carrier 71 in the rotor 61 is at a predetermined angle (10 ° to 15 °) with respect to a line parallel to the rotation axis of the rotor 61. Because of the inclination, the carrier 7
The surface of the object to be dried 40 in 1 is inclined at a predetermined angle (10 ° to 15 °) with respect to the rotation axis of the rotor 61, and the object to be dried 40 rotates integrally with the carrier 71 in this state. . For this reason, the load due to the centrifugal force does not concentrate on the outer peripheral portion of the dried object 40 but concentrates on the surface portion of the dried object 40, and the dried object 40 is cracked. 42, and a part of the
2 may be stuck on the inner surface. For this reason,
Remove the chamber 42 and replace it with a new one,
It is necessary to remove debris of the object to be dried 40 from the removed chamber 42, perform processing such as electrolytic polishing on the inner surface of the chamber 42, and flush the inside of the chamber 42. Labor and time are required, and the production efficiency is greatly reduced.

The present invention solves the above-mentioned problems of the prior art. During rotation of the rotor, the load due to centrifugal force is concentrated on the surface of the object to be dried, and the object to be dried is removed. Even if it breaks and the broken pieces scatter in the chamber, the pieces do not stick to the inner surface of the chamber and only the work of removing the pieces of the material to be dried from the chamber and flushing it, It is an object of the present invention to provide a drying apparatus which can easily return to the original usable state and can greatly increase the production efficiency.

[0008]

SUMMARY OF THE INVENTION To solve the above problems, the present invention provides a chamber having an opening, a lid for opening and closing the opening of the chamber, and a rotor rotatably provided in the chamber. And a drive source for the rotor, which is rotatably provided on the rotor, and which is inclined at a predetermined angle with respect to the rotation axis of the rotor when the rotor rotates, and stores a disc-shaped material to be dried therein. A drying apparatus, comprising: a carrier capable of removing water adhering to the surface of the object to be dried in the carrier by a centrifugal force when the rotor rotates. A back net is provided so as to surround the carrier, and a protection sheet is provided on the inner surface of the chamber so as to surround the rotor. Further, a means is provided in which a shower nozzle is provided on the lid, and cleaning water is supplied into the chamber through the shower nozzle.

[0009]

According to the present invention, by adopting the means as described above, a disc-shaped material to be dried is stored in the carrier, the carrier is positioned at a predetermined position in the rotor, and the opening of the chamber is covered with a cover. When the rotor is rotated with the blockage, the carrier and the object to be dried rotate integrally with the rotor, and the moisture adhering to the surface of the object to be dried is removed by the action of centrifugal force. When a load due to centrifugal force is applied to a portion of the surface of the object to be dried stored in the carrier and the object to be dried is broken, fragments of the object to be dried are captured by the back net of the rotor and The debris that could not be captured by the back net will be captured by the protective sheet on the inner surface of the chamber. Further, by supplying cleaning water into the chamber through the shower nozzle, the inside of the chamber is cleaned.

[0010]

Embodiments of the present invention shown in the drawings will be described below. 1 to 10 show an embodiment of a drying apparatus according to the present invention. The drying apparatus includes a chamber 2 provided in a casing 1.
And a protection sheet 5 provided on the inner surface of the chamber 2;
A rotor 21 rotatably provided in the chamber 2,
It has a drive source 17 for the rotor 21 and a carrier 31 mounted on the rotor 21.

The chamber 2 has a cylindrical shape in which a lower end composed of an upper half and a lower half is closed, and the upper end of the upper half and the upper end of the lower half project in a tangential direction. Exhaust passages 3 are provided, and an exhaust port 4 is provided at a tip end of each exhaust passage 3. The exhaust passage 3 is not limited to two places, but may be provided at more places.

A lid 10 is rotatably attached to the upper end opening of the chamber 2, and the upper end opening of the chamber 2 is opened and closed by the lid 10. Lid 10
Is rotated by a lid raising cylinder 11 provided outside the chamber 2, and a filter 12 is attached to the center of the lid 10.
The outside air is taken into the chamber 2 through the inside 2. Shower nozzles 8 are attached to the peripheral portion of lid 10 at a plurality of locations (four locations in this embodiment), and the shower nozzles 8 are connected to a supply source of cleaning water (not shown) through piping (not shown). Is connected to
Cleaning water such as pure water is supplied into the chamber 2 from a supply source of the cleaning water via the pipe and the nozzle 8.

A protective sheet 5 made of a resin such as polypropylene is provided on the inner surface of the chamber 2 so as to surround the rotor 21. The protection sheet 5 is provided on the entire inner peripheral surface of the chamber 2 and a part of the inner surface of the exhaust passage 3. The protection sheet 5 is provided with a holding plate 6 and a screw 7, and the inner peripheral surface of the chamber 2 and the inner surface of the exhaust passage 3. It can be attached to a part of. The protection sheet 5 is divided into two or more to facilitate attachment and detachment to and from the chamber 2.

At the center of the lower end of the lower half of the chamber 2 which is closed, there is provided a hole penetrating therethrough in the vertical direction.
A cylindrical bearing case 13 is mounted in the hole. A driven shaft 15 is rotatably inserted into the inner peripheral side of the bearing case 13 via a bearing 14.

The upper end of the driven shaft 15 is located in the chamber 2, and the rotor 21 is mounted on that portion. The lower end of the driven shaft 15 is located outside the chamber 2, and a V-pulley 16 is attached to that portion.

A motor 17 as a driving source is installed below the chamber 2, and a driving shaft 18 of the motor 17 has a V
A pulley 19 is attached, and a V belt 20 is hung between the V pulley 19 and the V pulley 16 of the driven shaft 15. Therefore, by operating the motor 17, the driving force of the motor 17 is transmitted to the rotor 21 via the drive shaft 18, the V pulley 19, the V belt 20, the V pulley 16 and the driven shaft 15, and the rotor 21 is driven to rotate. Things.

The rotor 21 includes a disc-shaped lower plate 22, an annular upper plate 23 provided above and facing the lower plate 22, and a plurality of portions between the lower plate 22 and the upper plate 23. The upper end of the driven shaft 15 is integrally connected to the center of the lower plate 22 via a boss 25 or the like.

A cradle 26 is rotatably attached to the upper end of the support column 24 of the rotor 21 via a rotation pin 29. The cradle 26 rotates about a rotation pin 29 between a line inclined at a predetermined angle with respect to a line parallel to the rotation axis of the rotor 21 and a horizontal line orthogonal to the rotation axis of the rotor 21. I have.

The cradle 26 comprises a plate-like substrate 27 and hook members 28 provided at a plurality of positions on the board 27. The carrier 31 is provided on the inside of the hook member 28 on the board 27. Is to be mounted. Therefore, the cradle 26 and the carrier 31 are rotatable integrally.

A cradle 26 is provided on the outer periphery of the rotor 21.
The back net 9 is provided so as to surround the carrier 31. The back net 9 is made of a metal mesh made of stainless steel, and is attached to the outer peripheral portion of the rotor 21 via the holding plate 6 and the screw 7. In this case, the back net 9 is provided only in a portion of the outer peripheral portion of the rotor 21 that is located outside the cradle 26 and the carrier 31, but may be provided in the entire outer peripheral portion of the rotor 21. It is.

A pair of cradle-raising cylinders 30 is provided on the outer portion of the chamber 2. The rod of the cradle-raising cylinder 30 is connected to the cradle 26 when the rotor 21 is stopped, so that the carrier 31 is integrated with the cradle 26. It is rotatable between a line inclined at a predetermined angle with respect to a line parallel to the rotation axis of the rotor 21 and a horizontal line orthogonal to the rotation axis of the rotor 21.

The carrier 31 is in the form of a box having an open top, and has a plurality of disc-shaped objects 40 to be dried therein.
Are arranged in a line at predetermined intervals. Between the inner surfaces of the carrier 31, two support shafts 32, 32 are provided on the opening side and one support shaft 32 is provided on the bottom side, respectively.
The object to be dried 40 is stored in a portion inside 32. In this case, each support shaft 32 is formed in the shape of an abacus by alternately providing ridges and valleys, and each dried material is located between the valleys of the three support shafts 32, 32, 32. Is supported in a state close to point contact.

Next, the operation of the above-described device will be described. First, the cradle 26 is rotated by the cradle raising cylinder 30 to be positioned at the opening of the chamber 2 (on a horizontal line perpendicular to the rotation axis of the rotor 21), and the carrier 31 is mounted on the substrate 27 of the cradle 26 at this position. . In this case, a predetermined number of objects to be dried 40 are mounted inside the carrier 31 in advance.

Then, the cradle 26 is rotated by the cradle-raising cylinder 30 so that the cradle 26 and the carrier 31 are placed in the rotor 21 and the axis thereof is
It is located at a position inclined at a predetermined angle (10 ° to 15 °) with respect to one rotation axis.

Then, the cradle raising cylinder 30 is removed from the cradle 26, the lid 10 is rotated by the lid raising cylinder 11, and the opening of the chamber 2 is closed.
When the motor 17 is operated to rotate the rotor 21, the carrier 31 and the object to be dried 40 rotate integrally with the rotor 21, and the moisture adhering to the surface of each object to be dried 40 in the carrier 31 is subjected to centrifugal force. Removed by action.

In this case, the cradle 26 and the carrier 3
Since the axis of 1 is inclined at a predetermined angle (10 ° to 15 °) with respect to a line parallel to the rotation axis of the rotor 21, the surface of the object to be dried 40 in the carrier 31 also corresponds to the rotation axis of the rotor 21. It will be inclined at a predetermined angle (10 ° to 15 °) with respect to the parallel line.

For this reason, when the rotation of the rotor 21 is increased to increase the centrifugal force, the load due to the centrifugal force does not concentrate on the outer peripheral portion of the object to be dried 40 but acts on the surface of the object to be dried 40. In some cases, the dried object 40 is broken.

If the object 40 breaks during rotation,
The fragments scatter in the direction of the chamber 2. However, the cradle 26 and the carrier 31
Is provided so as to surround the back net 9, and fragments larger than the mesh of the back net 9
Will be captured. On the other hand, fragments smaller than the mesh of the back net 9 pass through the mesh and scatter in the direction of the chamber 2. Thus, small fragments that have passed through the mesh of the back net 9 are captured.

Therefore, the pieces of the material to be dried 40 do not stick into the inner peripheral surface of the chamber 2 at all.
After removing broken pieces of the object to be dried 40 from the inside of the rotor 21 and the inside of the chamber 2, the inside of the chamber 2 is easily flushed by supplying cleaning water such as pure water from the shower nozzle 8 into the chamber 2. Thus, the chamber 2 can be returned to the original usable state in a short time.

[0030]

According to the present invention, as described above, when the rotor is rotated and the carrier and the object to be dried are rotated integrally with the rotor, moisture adhering to the surface of the object to be dried is centrifuged. It will be removed by the action of force. In this case, since the carrier is inclined at a predetermined angle with respect to a line parallel to the rotation axis of the rotor, the surface of the object to be dried in the carrier is also inclined at a predetermined angle with respect to a line parallel to the rotation axis of the rotor. Then, a load due to centrifugal force is applied to the surface of the object to be dried, the object to be dried is broken, and broken pieces of the object to be dried may be scattered in the chamber. However, since the rotor is provided with the back net so as to surround the carrier, broken pieces of the object to be dried can be captured by the back net. On the other hand, debris that could not be caught by the back net pass through the back net and scatter in the direction of the chamber, but a protective sheet is provided on the inner surface of the chamber so as to surround the rotor. Debris that has passed through can be captured. Therefore, since the broken pieces of the object to be dried never stick to the inner surface of the chamber, even if the object to be dried cracks during rotation of the rotor, the pieces of the object to be dried are removed from the chamber in a short time, The inside of the chamber can be returned to the original usable state in a short time, and the production efficiency can be greatly increased. Further, since the shower nozzle is provided on the lid, the inside of the chamber can be efficiently flushed by supplying the washing water from the shower nozzle into the chamber.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a drying device according to the present invention.

FIG. 2 is a rear view of the one shown in FIG.

FIG. 3 is a plan view of what is shown in FIG.

FIG. 4 is a longitudinal sectional view showing the inside of the casing shown in FIG. 1, and is an explanatory view showing a state where the carrier is located at an opening of a chamber.

FIG. 5 is a longitudinal sectional view showing the inside of the casing shown in FIG. 1, and is an explanatory view showing a state where a carrier is located in a rotor.

FIG. 6 is a schematic plan view of a chamber and a rotor.

FIG. 7 is an explanatory diagram of what is shown in FIG. 6 as viewed from a direction A.

FIG. 8 is an explanatory diagram showing a relationship between a chamber and a protection sheet.

FIG. 9 is a sectional view taken along line BB of FIG.

FIG. 10 is an explanatory view showing a state in which an object to be dried is stored in a carrier.

FIG. 11 is a longitudinal sectional view showing the inside of a casing of a conventional drying apparatus, and is an explanatory view showing a state where a carrier is located at an opening of a chamber.

FIG. 12 is a longitudinal sectional view showing the inside of a casing of a conventional drying apparatus, and is an explanatory view showing a state where a carrier is located in a rotor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Casing 2, 42 ... Chamber 3 ... Exhaust passage 4 ... Exhaust port 5 ... Protective sheet 6 ... Holding plate 7 ... Screw 8 ... Shower nozzle 9 ... Back net 10, 50 ... Lid 11 ... Cylinder for raising lid 12 ... Filter 13 ... Bearing case 14 ... Bearing 15 ... Driving shaft 16,19 ... V Pulley 17,57 ... Driving source (motor) 18 ... Driving shaft 20 ... V Belt 21, 61 Rotor 22 Lower plate 23 Upper plate 25 Support column 26 Boss 26, 66 Cradle 27 Board 28 Locking member 29 Rotating pin 30 Cradle raising cylinder 31, 71 Carrier 32 Support shaft 40

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3L113 AA03 AB08 AC45 AC46 AC48 AC63 AC67 AC73 AC74 AC75 AC76 AC79 AC83 AC90 BA34 DA04 DA21 DA22 5D112 AA02 AA24 GA08 GA30 KK06

Claims (2)

[Claims] 1. A chamber having an opening, a lid for opening and closing the opening of the chamber, a rotor rotatably provided in the chamber, a driving source for the rotor, and a rotatable means provided on the rotor. A carrier which is inclined at a predetermined angle with respect to the axis of rotation of the rotor when the rotor rotates, and which can store a disc-shaped material to be dried therein; In a drying device adapted to remove moisture adhering to the surface of the dried product by the action of centrifugal force, the rotor is provided with a back net so as to surround the carrier,
A drying device, wherein a protective sheet is provided on an inner surface of the chamber so as to surround the rotor. 2. The drying apparatus according to claim 1, wherein a shower nozzle is provided on the lid, and cleaning water is supplied into the chamber through the shower nozzle.