JP2001092523A - Method of teaching robot for carrier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrier robot teaching method capable of being applied to a general manufacturing plant provided with many kinds of manufacturing equipments and highly precisely teaching a robot in a short time even by an unskilled worker. SOLUTION: The coordinate values of a teaching pseudo cassette 2 and a handle part 6 positioned on the grasped position of the cassette 2 are set as teaching data. The positional posture of the handle part 6 positioned on the grasped position is found out as guide reference data. After finding out the positional posture of the handle part 6 stopped around the grasped position as intermediate positional data, correction data for allowing the intermediate positional data to coincide with the guide reference data are found out and coordinate values obtained when the handle part 6 is moved on the basis of the correction data are set up as teaching data.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a teaching method of a transfer robot for setting, as teaching data, a coordinate value of a hand unit at a position where a transfer target such as a cassette is gripped.

[0002]

2. Description of the Related Art In a semiconductor factory equipped with various types of manufacturing equipment, a transfer robot is usually instructed in advance on an operation procedure, and a hand, a manipulator, and a traveling cart are operated to manufacture a cassette unit. The transfer of the wafer between the apparatuses is performed. Therefore, in such a semiconductor factory, since the operation is performed only as taught by the transfer robot, before starting the transfer by the transfer robot,
A teaching operation for storing an operation procedure and the like for the transfer robot is performed.

Conventionally, in the teaching operation, an operator operates a teaching pendant or the like to visually check and move the hand, and when the hand reaches a position on the stage where the cassette can be gripped, this operation is performed. This is performed by manual teaching in which the coordinates of the hand at the position are stored as teaching points in the controller of the transfer robot.

Japanese Patent Application No. 6-230588 discloses a technique in which a mark is formed on a stage, a detector capable of detecting the mark is attached to a hand, and a mark is detected by the detector to automatically set a teaching point. There has been proposed an automatic teaching method for automatically generating data. Further, JP-A-2-27
In Japanese Patent No. 6725, as shown in FIG. 13, a teaching attachment 53 comprising a television camera 51 and a height detector 52 is attached in place of a hand, and information such as the position of a mark 55 formed on a work 54 is detected. Thus, an automatic teaching method for automatically generating teaching points has been proposed.

[0005]

However, in the above-mentioned conventional manual teaching method, it is necessary for an operator to operate the teaching pendant to move the teaching pendant to the cassette gripping position accurately, which requires a long time for the teaching operation. Easy and
There is a problem that the operation time varies greatly depending on the skill level of the operation. In particular, in a manufacturing apparatus having a structure in which a stage is disposed at a deep position inside the apparatus, it is difficult to visually check the cassette on the stage, and thus the above-described problems of prolonged teaching work and variations in working time become significant. .

In the automatic teaching method for teaching by detecting a mark on a stage, the positional relationship between the stage and the mark needs to be set with high precision. However, the structure of the stage depends on the type of manufacturing apparatus and the manufacturer. Because they often differ, it is difficult to apply them to a transfer robot in a general manufacturing factory equipped with various types of manufacturing apparatuses.

In the automatic teaching method in which teaching is performed by detecting the teaching mark 55 with the teaching attachment 53, the teaching object 5 is determined based on the position detection result of the teaching mark 55.
Since the position of the hand unit that can handle the robot 4 needs to be obtained by calculation, errors in the position detection result and the robot 5
There is a problem that it is easily affected by a manufacturing error of 0. Furthermore, when confirming handling after calculating the teaching point,
Since the operation of replacing the teaching attachment 53 with the hand unit is required, the entire teaching operation cannot be sufficiently shortened, and an error in attaching the hand unit may occur.

Therefore, the present invention can be applied to a general manufacturing factory equipped with various types of manufacturing apparatuses,
It is an object of the present invention to provide a method of teaching a transfer robot capable of teaching with high accuracy in a short time even if a skilled worker is not used.

[0009]

According to a first aspect of the present invention, there is provided a transfer robot for setting coordinate values of a hand unit as teaching data when positioning a hand at a gripping position of an object to be transferred. In the teaching method, a first step of obtaining, as guidance reference data, a position and orientation of the hand unit when positioning the hand unit at the grip position, and a step of calculating the position of the hand unit when the hand unit stops around the grip position. A second step of obtaining the position and orientation as intermediate position data;
A third step of obtaining correction data for matching the intermediate position data with the guidance reference data, and a fourth step of setting coordinate values when the hand unit is moved based on the correction data as the teaching data And characterized in that:

According to the above configuration, after the hand unit is positioned at the gripping position and the guidance reference data is obtained once, if the operator performs an operation of positioning the hand unit around the gripping position, the stop position is determined. , Correction data is obtained based on the intermediate position data and the guidance reference data, and the hand is moved based on the correction data, and the coordinate values are set as teaching data. Therefore, as compared with the conventional case where all the teaching data is set while positioning at the grip position, the operation of the hand unit is simplified since the hand unit may be positioned over a wide range around the grip position. . With this, for example, even if the gripping position is a model in which the device is located in the back of the apparatus, the teaching operation can be easily performed, so that it is suitable for a general manufacturing factory having various types of manufacturing apparatuses. The teaching operation can be performed in a short time with high accuracy even if the operator is not a skilled worker.

Further, since the teaching data of the hand unit is set based on the position and orientation of the hand unit, the transfer of the teaching data of the hand unit based on the result of detecting the position of the teaching mark is not performed as in the related art. To be less affected by manufacturing errors of the robot. Further, since the teaching operation can be performed while the hand unit is mounted, it is possible to immediately shift to the actual transport operation after completing the teaching operation.

According to a second aspect of the present invention, there is provided the method of teaching a transfer robot according to the first aspect, wherein the position and orientation of the hand portion are determined by an image signal when a mark pattern of the teaching mark member is captured by a camera. And the teaching mark member and the camera are provided on one or the other of the pseudo-transport object simulating the shape of the hand unit and the transport object, respectively. I have. According to the above configuration, the position and orientation of the hand unit can be obtained by a simple configuration and method of photographing the teaching mark member with a camera.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. As shown in FIG. 1, the teaching method according to the present embodiment employs a transfer robot 3 for transferring the cassette 22 shown in FIG.
Applied to The transport robot 3 includes a traveling vehicle 4 movable to an arbitrary position, a manipulator 5 provided on the traveling vehicle 4 and having a plurality of degrees of freedom, and a hand unit 6 provided on a free end side of the manipulator 5. have. As shown in FIG. 2, the hand portion 6 has a shaft member 7 that can be extended and contracted in the axial direction, and claw members 8.8 provided on both ends of the shaft member 7 symmetrically. An L-shaped groove 8a is formed on the inner surface of each claw member 8 so as to grip the dummy cassette 2 for teaching and the cassette 22 of FIG.

On the side surface of the shaft member 7, a teaching mark member 9 is provided. The teaching mark member 9 is formed of a flat plate having a surface coated with a white paint or the like, and faces the teaching pseudo cassette 2 when the claw member 8 of the hand unit 6 is oriented in the direction of the teaching pseudo cassette 2. It is arranged to be. As shown in FIG. 3, the teaching pseudo cassette 2 has a cassette main body 23 simulated to have the same configuration as the cassette 22 of FIG. 4 except that it has an opening 23a formed in the side wall surface. And a support panel 24 mounted on the cassette main body 23, and a camera 21 such as a CCD camera provided on the support panel 24 so as to photograph the outside through the opening 22a.

As shown in FIG. 2, a plurality of circular teaching marks 10 are formed on the surface of the teaching mark member 9 facing the cassette 2. Each teaching mark 10 is filled with a black paint so that it can be clearly identified from a captured image when captured by a camera 21 described later.
These teaching marks 10 are arranged in a matrix mark pattern consisting of three rows and three columns, and the mark pattern is used when obtaining the position and orientation of the hand unit 6.

The traveling vehicle 4 supporting the hand unit 6 via the manipulator 5 has a robot controller 20 as shown in FIG. The robot controller 20 includes a calculation unit 11, a posture detection unit 12, a driving unit 13,
The first communication unit 14, the second communication unit 15, the storage unit 16 and the like are connected via a signal bus 17. The attitude detecting unit 12 and the driving unit 13 are connected to the manipulator 5, and the attitude detecting unit 12 detects the attitude of the manipulator 5 from an encoder (not shown) built in the manipulator 5. The drive unit 13 operates a drive motor that drives each unit of the manipulator 5.

The first communication unit 14 and the second communication unit 1
5 is detachably connected to the image processing device 18 and the teaching pendant 19, respectively. The image processing device 18 converts the teaching mark 10
Is extracted, and mark pattern data indicating the position and orientation of the mark pattern (position 3 degrees of freedom, attitude angle 3 degrees of freedom) is obtained and output in the camera coordinate system of FIG. On the other hand, the teaching pendant 19 outputs operation data for operating the transport robot 3 when operated by an operator during a teaching operation.

The storage unit 16 has a camera coordinate data area 16a, a hand coordinate data area 16b, a guidance reference data area 16c, a correction data area 16d, a teaching data area 16e, a program area 16f, and the like. The camera coordinate data area 16a stores the mark pattern data of the camera coordinate system from the image processing device 18 described above, and the hand coordinate data area 16b is converted to the hand coordinate system of FIG. The stored mark pattern data is stored. The guidance reference data area 16c stores the mark pattern data of the hand coordinate system when the hand unit 6 is positioned at the holding position of the cassette 2.

The correction data area 16d stores correction data from the stop position of the hand unit 6 during the teaching operation to the grip position, and the teaching data area 16e stores the correction data at the grip position based on the correction data. The position and orientation at the time of positioning are stored as teaching data. Further, the program area 16f stores various control programs such as a reference data creation routine in FIG. 6 and a teaching data creation routine in FIG. 7, and these data creation routines
Executed during teaching work.

In the above configuration, a method of teaching the transfer robot 3 will be described. First, as shown in FIG. 3, the camera 21 is fixed to the support panel 24, and the support panel 24 is mounted on the cassette body 23, so that the teaching pseudo cassette 2 is assembled. Then, after the camera 21 is connected to the image processing device 18, the teaching pseudo cassette 2 is placed at an arbitrary position on the temporary placement stage 25 as shown in FIG. Incidentally, the temporary placing stage 25 may be the stage 1a of the manufacturing apparatus 1. Thereafter, as shown in FIG. 1, the teaching pseudo cassette 2 is located within the range of movement of the hand unit 6 by the manipulator 5, as shown in FIG.
The traveling trolley 4 is moved to the vicinity of the temporary placing stage 25 while operating the teaching pendant 19. And
The image processing device 18 is connected to the robot controller 20.

Next, as shown in FIG. 5, by operating the teaching pendant 19, the arithmetic unit 11 of the robot controller 20 is caused to execute the reference data creation routine of FIG. When the robot controller 20 executes the reference data creation routine, the robot controller 20 is ready to accept input of operation data for operating the manipulator 5, and when operation data is input from the teaching pendant 19, the movement amount corresponding to the operation data Then, the manipulator 5 is operated at the angle (S1).

Thereafter, while operating the manipulator 5 based on the operation data, an input of the set completion signal is received (S2), and if the set completion signal is not input (S2).
2, NO), manipulator 5 based on operation data of S1
Continue the operation of. On the other hand, when it is recognized from the signal from the teaching pendant 19 that the hand unit 6 has reached the gripping position where the teaching pseudo cassette 2 can be gripped (S
2, YES), a set completion signal is transmitted to the image processing device 18 and the mark pattern data from the image processing device 18 is received.

The image processing device 18 to which the set completion signal has been input captures the image signal from the camera 21. At this time, as shown in FIG. 3, the camera 21 captures an image of the hand unit 6 set at the gripping position through the opening 23a. Therefore, as shown in FIG. 10, the image signal is transmitted to the teaching mark member 9 of the hand unit 6 positioned at the grip position indicated by the solid line in the camera coordinate system with the camera 21 as the origin.
Contains.

The image processing apparatus 18 which has taken in such an image signal firstly outputs all the teaching marks 10 formed on the teaching mark member 9 based on the grayscale data in the image signal.
Is extracted. Next, after obtaining the center point of each teaching mark 10, the position and orientation (position 3 degrees of freedom, attitude angle 3 degrees of freedom) of the mark pattern composed of line segments connecting these center points are calculated and output as mark pattern data. I do. And
As shown in FIG. 5, the mark pattern data is taken into the robot controller 20 via the first communication unit 14 and stored in the camera coordinate data area 16a of the storage unit 16 (S3).

When the mark pattern data is stored in the camera coordinate data area 16a, the robot controller 20 converts the mark pattern data from the camera coordinate system of FIG. 10 to a hand coordinate system having the teaching mark member 9 of FIG. 11 as an origin. (S4). Then, the mark pattern data when the hand unit 6 is positioned at the grip position in the hand coordinate system is stored as guidance reference data in the guidance reference data area 16c (S5), and this routine ends.

When the guidance reference data (the mark pattern data of the gripping position) is obtained as described above, as shown in FIG.
Is mounted on the traveling carriage 4 and moves together with the transfer robot 3 to the manufacturing apparatus 1 to be transferred. Then, when the traveling vehicle 4 reaches the vicinity of the stage 1a of the manufacturing apparatus 1, the teaching dummy cassette 2 is set at the transfer position of the stage 1a. Since the positioning piece 26 is provided on the stage 1a as shown in FIG. 9, the setting operation to the transfer position is performed while the leg of the teaching pseudo cassette 2 is aligned with the piece 26. .

Next, as shown in FIG. 5, by operating the teaching pendant 19, the arithmetic unit 11 of the robot controller 20 is caused to execute the teaching data creation routine of FIG. When the robot controller 20 executes the teaching data creation routine, when operation data is input from the teaching pendant 19, the robot controller 20 operates the manipulator 5 with a movement amount and an angle corresponding to the operation data (S11).

Thereafter, while operating the manipulator 5 based on the operation data, an input of a set completion signal is received (S12), and if the set completion signal is not input (S12, NO), the manipulator 5 based on the operation data of S11 is received. Continue the operation of. On the other hand, as shown by the two-dot chain line in FIG. 9, the hand unit 6 has moved around the holding position of the teaching pseudo cassette 2 and the teaching mark member 9 of the hand unit 6 has entered the visual field of the camera 21. Recognition based on the signal from the teaching pendant 19 (S12, YE
S), a set completion signal is transmitted to the image processing device 18 and the mark pattern data from the image processing device 18 is received. The manipulator 5 can be operated by moving the hand unit 6 with a positioning accuracy that is extended to the vicinity of the gripping position where the teaching mark member 9 is within the field of view of the camera 21. It's a simple task.

The image processing device 18 to which the set completion signal has been input captures the image signal from the camera 21. At this time, the camera 21 photographs the hand unit 6 set at an arbitrary stop position through the opening 23a. Therefore,
As shown in FIG. 10, the image signal includes the teaching mark member 9 of the hand unit 6 positioned at the stop position indicated by the two-dot chain line in the camera coordinate system with the camera 21 as the origin. Then, the image processing device 18 performs the same processing operation as in the above-described reference data creation routine, based on the grayscale data in the image signal, based on the position and orientation of the teaching mark 10 (position 3 degrees of freedom, attitude angle). (3 degrees of freedom) is calculated as mark pattern data. Thereafter, as shown in FIG. 5, the robot controller 20 fetches the mark pattern data and stores it in the camera coordinate data area 16a of the storage unit 16 (S13). The mark pattern data of the camera coordinate system of FIG. Of the hand coordinate data area 16 as the intermediate position data.
b (S14).

Next, the guidance reference data is read from the guidance reference data area 16c. At this time, as shown in FIG.
The guidance reference data is the mark pattern data of the gripping position in the hand coordinate system (solid line in the figure), and the intermediate position data of the hand coordinate data area 16b obtained this time is the mark pattern data of the stop position in the hand coordinate system (two points in the figure). Chain line). Therefore, by calculating the difference between the guidance reference data and the intermediate position data, it is possible to determine how much the position and orientation of the hand unit 6 at the stop position has changed from the hand unit 6 at the holding position. . Then, correction data for matching the intermediate position data with the guidance reference data is calculated based on the displacement amount of the position and orientation, and stored in the correction data area 16d (S15).

Next, it is determined whether or not the "shift amount" corresponding to the correction data is equal to or larger than a set value (S16). If the shift amount is equal to or more than the set value (S16, YES), the hand unit 6
Is recognized to be outside the range of the allowable error from the gripping position, and the manipulator 5 is determined based on the correction data.
Is activated (S17). When the hand unit 6 moves the correction data by the operation of the manipulator 5, the process is re-executed from S13 to obtain the mark pattern data after the movement. A shift amount and correction data are newly obtained.

Thereafter, it is determined whether the "deviation amount" corresponding to the new correction data is equal to or larger than a set value (S16).
If the shift amount is less than the set value (S16, NO), it is recognized that the stop position of the hand unit 6 is within the range of the allowable error from the grip position. Then, the coordinate value of the hand unit 6 is stored as teaching data in the teaching data area 16e (S1).
8), this routine ends. Thus, the teaching operation on the stage 1a of the specific manufacturing apparatus 1 is completed, and the same processing as described above is performed on the stage 1a of the other manufacturing apparatus 1, thereby performing the teaching operation on all the stages 1a. Do.

As described above, the teaching method of the transfer robot according to the present embodiment, as shown in FIG. 1, uses the hand unit when the teaching robot 2 is positioned at the gripping position of the teaching pseudo cassette 2 or the cassette 22 (object to be transferred). 6 is set as teaching data, and a first step of obtaining the position and orientation of the hand unit 6 when the hand unit 6 is positioned at the gripping position as guidance reference data (reference data creation routine: S1 to S
5) and a second step of obtaining the position and orientation of the hand unit 6 when the hand unit 6 stops around the grip position as intermediate position data.
Steps (S11 to S14), a third step of obtaining correction data for matching the intermediate position data with the guidance reference data (S15), and teaching coordinate values when the hand unit 6 is moved based on the correction data. And a fourth step (S18) of setting as data.

In this embodiment, the cassette 22 is exemplified as the object to be conveyed. However, the present invention is not limited to this, and various components and intermediate products may be used.

According to the above configuration, in the first step, the hand unit 6 is positioned at the gripping position and the guidance reference data is set to 1
After obtaining the number of times, if the operator performs an operation of positioning the hand unit 6 around the holding position, correction data is obtained based on the intermediate position data and the guidance reference data at the stop position, and based on the correction data. The hand unit 6 is moved to set the coordinate values as teaching data (second step to fourth step).
Process). Therefore, as compared with the case where all the teaching data is set while accurately positioning the hand unit 6 at the holding position as in the related art, the hand unit 6 may be roughly positioned over a wide range around the holding position. , Hand part 6
Operation becomes simple. With this, for example, even if the gripping position is a model in which the device is located in the back of the apparatus, the teaching operation can be easily performed, so that it is suitable for a general manufacturing factory having various types of manufacturing apparatuses. The teaching operation can be performed in a short time with high accuracy even if the operator is not a skilled worker.

Since the teaching data of the hand unit 6 is set based on the position and orientation of the hand unit 6, the teaching data of the hand unit 6 is set based on the result of detecting the position of the teaching mark as in the related art. Also, it is possible to reduce the influence of the manufacturing error of the transfer robot. Further, since the teaching operation can be performed while the hand unit 6 is mounted, it is possible to immediately shift to the actual transport operation after the teaching operation is completed.

In this embodiment, the position and orientation of the hand unit 6 are based on an image signal obtained when the camera 21 images the mark pattern of the teaching mark member 9 as shown in FIGS. The teaching mark member 9 and the camera 21 are provided on the hand-held unit 6 and the teaching pseudo-cassette 2 (pseudo-transport object) simulating the shapes of the cassette 22 (transport object), respectively. . Thus, the position and orientation of the hand unit 6 can be obtained by a simple configuration and method of photographing the teaching mark member 9 with the camera 21.

The teaching mark member 9 and the camera 21 are, as shown in FIG.
And the hand unit 6 may be provided. In this case, since the camera 21 is provided in the hand unit 6, an imaging signal and mark pattern data in a hand coordinate system with the camera 21 as an origin can be obtained. Can be omitted.

[0039]

According to a first aspect of the present invention, there is provided a method of teaching a transfer robot for setting coordinate values of a hand unit as teaching data when positioning the hand unit at a holding position of an object to be transferred. A first step of obtaining the position and orientation of the hand unit at the time of positioning as guidance reference data, and a second step of obtaining the position and orientation of the hand unit when the hand unit is stopped around the grip position as intermediate position data. A third step of obtaining correction data for matching the intermediate position data with the guidance reference data; and a fourth step of setting coordinate values when the hand unit is moved based on the correction data as the teaching data. And a process.

According to the above arrangement, after the hand unit is positioned at the gripping position and the guidance reference data is obtained once, if the operator performs an operation of positioning the hand unit around the gripping position, the stop position is determined. , Correction data is obtained based on the intermediate position data and the guidance reference data, and the hand is moved based on the correction data, and the coordinate values are set as teaching data. Therefore, as compared with the conventional case where all the teaching data is set while positioning at the grip position, the operation of the hand unit is simplified since the hand unit may be positioned over a wide range around the grip position. . With this, for example, even if the gripping position is a model in which the device is located in the back of the apparatus, the teaching operation can be easily performed, so that it is suitable for a general manufacturing factory having various types of manufacturing apparatuses. The teaching operation can be performed in a short time with high accuracy even if the operator is not a skilled worker.

Further, since the teaching data of the hand unit is set based on the position and orientation of the hand unit, the transfer of the teaching data of the hand unit based on the detection result of the position of the teaching mark as in the related art is performed. To be less affected by manufacturing errors of the robot. Further, since the teaching operation can be performed with the hand unit attached, an effect is provided that the operation can be immediately shifted to the actual transport operation after the teaching operation is completed.

According to a second aspect of the present invention, there is provided the method of teaching a transfer robot according to the first aspect, wherein the position and orientation of the hand portion is determined by an image signal when a mark pattern of the teaching mark member is captured by a camera. The teaching mark member and the camera are provided on one or the other of the hand unit and the simulated transfer object simulating the shapes of the transfer object.
According to the above configuration, there is an effect that the position and orientation of the hand unit can be obtained by a simple configuration and method of photographing the teaching mark member with a camera.

[Brief description of the drawings]

FIG. 1 is a perspective view of a transfer robot during teaching.

FIG. 2 is a perspective view of a hand unit.

FIG. 3 is a perspective view of a teaching pseudo cassette.

FIG. 4 is a perspective view of the cassette.

FIG. 5 is a block diagram of the robot controller during teaching.

FIG. 6 is a flowchart of a reference data creation routine.

FIG. 7 is a flowchart of a teaching data creation routine.

FIG. 8 is an explanatory diagram showing a process of obtaining guidance reference data.

FIG. 9 is an explanatory diagram illustrating a relationship between a stop position and a grip position of the hand unit.

FIG. 10 is an explanatory diagram showing the position and orientation of mark pattern data in a camera coordinate system.

FIG. 11 is an explanatory diagram showing the position and orientation of mark pattern data in a hand coordinate system.

FIG. 12 is an explanatory diagram showing a process of obtaining guidance reference data.

FIG. 13 is an explanatory diagram illustrating a conventional teaching method.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus 1a Stage 2 Pseudo-cassette for teaching 3 Transfer robot 4 Traveling trolley 5 Manipulator 6 Hand part 7 Shaft member 8 Claw member 9 Teaching mark member 10 Teaching mark 11 Computing part 12 Posture detecting part 13 Driving part 14 First communication part Reference Signs List 15 second communication unit 16 storage unit 17 signal bus 18 image processing device 19 teaching pendant 20 robot controller 21 camera 22 cassette 23 cassette body 24 support panel 25 temporary stage 26 frame

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3F059 AA01 AA14 BA02 BA08 BB07 DA02 DA08 DB06 DB08 DB09 DE06 FA01 FA05 FA08 FB12 FB16 5H269 AB17 AB21 AB33 BB09 CC09 FF06 JJ09 JJ20 KK03 KK08 NN18 QC10 SA03 SA08 SA12

Claims (2)

[Claims] 1. A method for teaching a transfer robot in which coordinate values of a hand unit when positioned at a grip position of an object to be transferred are set as teaching data, wherein the hand unit when the hand unit is positioned at the grip position. A first step of obtaining the position and orientation of the hand section as guidance reference data; a second step of obtaining the position and orientation of the hand section as intermediate position data when the hand section is stopped around the gripping position; A third step of obtaining correction data for matching the guidance reference data; and a fourth step of setting, as the teaching data, coordinate values when the hand unit is moved based on the correction data. The teaching method of the transfer robot. 2. The position and orientation of the hand unit is obtained based on an image signal when a mark pattern of a teaching mark member is captured by a camera, and the teaching mark member and the camera are provided by the hand. 2. The method for teaching a transfer robot according to claim 1, wherein the transfer robot is provided on one or the other of the dummy transfer target object simulating the shape of the section and the transfer target object.