JP2001074809A - Connection mechanism of test head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable to simply set a distance between a test head and an autohandler as a value conformable to their combination when a socket board is exchanged, by making it possible to set the distance between the test head and the autohandler easily and stepwise. SOLUTION: A protruding part 4 is so fixed to an autohandler 2 that the protruding part faces a test head 3. A receiving part 5 is fixed to the test head 3. The distance between the autohandler 2 and the test head 3 is kept constant by receiving the protruding part 4 with the receiving part 5. The fixing position of the receiving part 5 is made adjustable stepwise toward the protruding part 4, so that the distance between the autohandler and the test head is adjustable stepwise. A fitting member 6 and an L-shaped metal fixture 7 which position stepwise and fix the test head 3 may be installed in a rail 31 guiding the test head 13 toward the autohandler 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a test head for testing a device and a connection mechanism for connecting the test head to an auto-handler for classifying devices according to the test results of the test head.

[0002]

2. Description of the Related Art An IC test system used for testing a device such as a semiconductor includes a test head for testing a device, and an auto-handler for classifying the device according to the test result of the test head. Auto handlers and test heads are
There are various combinations depending on the variety.

[0003]

The test head and the auto-handler are provided with a measurement board for holding a device and an IC socket (electrode) on the surfaces facing each other. Since the test of the device is performed in a state where the auto-handler and the test head are connected, it is necessary to keep the distance between the test head and the auto-handler strictly.
Here, the test head has a configuration in which a socket board having an IC socket is replaced according to the type of device selected by the auto handler. The interval between the test head and the auto-handler was not constant, and it was necessary to manually set these intervals for each lot, and the connection between the test head and the auto-handler was not easy.

In view of the above circumstances, the present invention makes it possible to easily set the distance between the test head and the auto-handler, and to make it possible to adjust these distances in a stepwise manner. It is an object of the present invention to provide a connection mechanism of a test head which can easily set the distance of the test head to a value corresponding to the combination.

[0005]

In order to solve the above-mentioned problems, the invention according to claim 1 comprises a test head (3) for testing a device under test, and a test head which holds the device under test and is close to the test head. An auto-handler (eg, auto-handler 2) for connecting and classifying the device under test according to a test result; and a connection mechanism of a test head for connecting one of the auto-handler and the test head (eg, auto-handler). 2) a projection (4) attached to the other side; and a receiving section (5) attached to the other side to receive the projection and maintain a constant distance between the auto-handler and the test head.
And the mounting position of at least one of the protruding portion and the receiving portion (for example, the receiving portion 5) can be adjusted stepwise toward the other (for example, the protruding portion 4), so that the automatic The distance between the handler and the test head can be adjusted stepwise.

In the first aspect of the present invention, when the test head or the auto handler is brought close to the other party, the projecting portion projects toward the test head, so that the projecting portion first contacts the receiving portion. Therefore, the distance between the test head and the auto handler can be set mechanically, that is, easily. Here, since the mounting position of at least one of the protruding portion and the receiving portion can be adjusted stepwise toward the other, the distance between the test head and the auto handler can be adjusted stepwise. Therefore, according to the first aspect of the present invention, even if the socket board having the IC socket is replaced, the distance between the test head and the auto-handler is reduced by changing the mounting position of the receiving portion or the projecting portion. You can easily set the distance to fit the socket board.

According to a second aspect of the present invention, at least one of the test head and the auto-handler is configured to move along guide means (for example, the rail portion 31) and approach the other, so that the movement is reduced. It's easy.

According to a third aspect of the present invention, a test head for testing a device under test is detachably connected to the test head in a state close to the test head, and the devices under test are classified according to test results. A connection mechanism of a test head for connecting an auto-handler (for example, an auto-handler 2) to be connected, wherein at least one of the auto-handler or the test head (for example, the test head 3) moves the auto-handler or the test head toward the other. Guide means (eg, rail section 3)
1) and a positioning means (for example, a fitting member 6 and an L bracket 7) for positioning and fixing the auto handler or the test head on the guide means in a stepwise manner.

According to the third aspect of the invention, at least one of the auto handler and the test head can be positioned on the guide means in a stepwise manner. Is changed, the distance between the test head and the auto handler can be easily set to a distance suitable for the socket board.

[0010] More specifically, the positioning means in the invention according to claim 3 is, for example, as described in claim 4, a plurality of uneven portions (for example, notches 7c) provided on the side of the guide means. ), And a fitting member (6) attached to the test head and fitted into a part of the concave and convex portion to position and fix the test head. Here, the fitting member may be configured to fit into the concave portion of the uneven portion, or may be configured to fit into the convex portion.

Further, the invention according to claim 3 or 4 is:
As described in claim 5, one of the auto-handler and the test head (for example, the auto-handler 2) has a protrusion (4) attached to the other (for example, the test head 3), and And a receiving portion (5) for receiving the protruding portion and keeping the distance between the auto-handler and the test head constant, wherein the mounting position of at least one of the protruding portion and the receiving portion is The distance between the auto-handler and the test head may be adjusted stepwise by making the adjustment stepwise toward the other side.

[0012] The invention according to claims 1, 2, and 5 provides:
According to a sixth aspect of the present invention, there is provided a configuration in which a recess (for example, a hole 52f) for fitting the other distal end portion is provided on a distal end surface of one of the protruding portion and the receiving portion (for example, the receiving portion 5). Is also good.

Further, according to the present invention, as described in claim 7, a fixing mechanism (for example, a hook 41c) for fixing the receiving portion and the projecting portion to each other.
And a hook 52g) may be provided. According to the seventh aspect of the present invention, since the fixing mechanism fixes the space between the receiving portion and the protruding portion, the test head and the auto handler are also fixed to each other. Therefore, the device is easily inserted into the IC socket, and the connection failure does not occur. As a result, the reliability of the IC test system is improved.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an IC test system 1 according to one embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic front view of an IC test system 1,
FIG. 2 is a schematic side view of the same. FIG. 3 is a schematic top view illustrating a connection structure between the auto handler 2 and the test head 3 of the IC test system 1. FIG. 4 is a schematic front view illustrating the configuration of the receiving portion 5 attached to the test head 3, and FIGS. 5 to 9 are diagrams illustrating the configuration of each component of the receiving portion 5. FIG. 10 is a schematic front view illustrating the configuration of the fitting member 6 attached to the test head 3, and FIG.
FIG. 4 is a schematic top view for explaining the configuration of the L bracket 7 attached to the test head table 30.

The IC test system 1 is shown in FIGS.
As shown in FIG. 3, the side surface 3 of the test head 3 that moves horizontally along the rail 31 (guide means) of the test head table 30.
c moves and approaches the side surface 2b of the well-known auto-handler 2 to connect the socket board 3b and the measurement board 2a. Here, test head 3
Is positioned and fixed on the test head table 30 by fitting the fitting member 6 attached to the lower part of the side surface of the test head 3 into the L fitting 7 attached in parallel with the rail 31 of the test head table 30. . Further, by fixing the protruding portions 4 attached to both sides of the side surface 2b and the receiving portions 5 attached to both sides of the side surface 3c in a state of being in contact with each other, the auto-handler 2 and the test head 3 are fixed.
The distance between is determined. In addition, IC socket 3
The socket board 3b having a is replaceable on the test head 3.

As shown in FIG. 3, the projection 4 has a cross section L.
A guide pin 42 is fixed to the lower side end 41 a of the U-shaped guide holder 41 so as to project vertically, and the side 41 b of the guide holder 41 is brought into contact with the side surface 2 b of the auto handler 2 via the reference plate 43. It is fixed.
For this reason, the guide pins 42 protrude toward the test head 3. Here, the tip of the guide pin 42 is formed in a conical shape, and is easily fitted into a hole 52f described later.

As shown in FIGS. 3 and 4, the receiving portion 5 has a guide plate 51 fixed to the side surface of the test head 3 and a projecting portion 4 covering the upper surface 51a of the guide plate 51 while covering the upper surface 51a. A guide block 52 that moves back and forth and is in direct contact with the protruding portion 4, a pin 53 that penetrates the upper portion 52b of the guide block 52 and fits on the upper surface of the guide plate 51, And a leaf spring 55 that pulls the pin 53 pulled up upward downward. That is,

As shown in the front view of FIG. 5, the guide plate 51 is a substantially rectangular steel thick plate. On the lower side of the side surface, the guide plate 51 is attached to the test head 3 using bolts and nuts. A plurality of holes 51b for fixing are provided, and a guide block 52 is provided on the upper side of the side surface.
Are provided at regular intervals at a plurality of screw holes 51c for fixing. The upper surface 51a has a rectangular parallelepiped notch 51d for fitting the tip of the pin 53 into a screw hole 51c.
For example, about five are provided at the same intervals.

The guide block 52 is made of a rectangular parallelepiped steel material as shown in the top view of FIG. 6A, the end view of the protruding portion side of FIG. 6B, and the other end view of FIG. , Top 5
The body 52d is thinned by shaving from both side surfaces except for the end portion 2b and the end portion 52c on the protruding portion 4 side. The upper part 52b is provided with a hole 52a for passing the pin 53, and the body part 52d is provided with a plurality of holes 52e.
6C, and a hole 52f for receiving the guide pin 42 is provided on the end surface of the end portion 52c, as shown in the end view of the protruding portion side in FIG. 6C. That is, the guide block 52 is connected to the body 52d.
Is moved back and forth in a state where the lower surface of the upper portion 52b is in contact with the upper surface 51a of the guide plate 51, and after being positioned by the pin 53, the bolt is inserted from one side of the holes 52e and 51c. It is fixed to the test head 3 via the guide plate 51 by inserting and screwing the nut on the other side.

As shown in the front view of FIG.
In addition to inflating the head 53b of the rod-shaped pin main body 53a to improve operability, a flange member (flange) 53c is formed near the center of the pin main body 53a.

As shown in the top view of FIG. 8 (A) and the side view of FIG. 8 (B), the stopper 54 has a rectangular parallelepiped steel material disposed horizontally, and has one end formed at a right angle except for the upper part 54a. It has a notched shape. The upper portion 54a is in contact with the brim member 53c of the pin 53 to determine the upper limit of the movement of the pin 53. Note that the stopper 54 is
Are provided in the guide block 52 with bolts 54b.

As shown in FIG. 9, the leaf spring 55
On one end side, a substantially semicircular notch 55a is formed for fitting between the head 53b of the pin 53 and the brim member 53c. The size of the notch 55a is
It is larger than the diameter of a and smaller than the outer diameter of the brim member 53c.
The plate spring 55 is provided with through holes 55b for fixing the plate spring 55 to the guide block 52 with bolts.

That is, the pin 53 is connected to the guide block 52
When moving the guide block 52, the guide block 52 is opened because the guide block 52 is lifted upward, and after the guide block 52 is moved a required distance, the pin 53 uses the repulsive force of the leaf spring 55 applied from the brim member 53c to guide the guide block 52. The guide block 52 is positioned by being inserted into the notch 51d of the guide 52.

As shown in FIG. 3, the guide holder 4
A U-shaped hook 41c is attached to 1 and a J-shaped hook 52g that meshes with the hook 41c is attached to an end 52c of the guide block 52, respectively. These hooks 41c and 52g are for connecting the protruding portion 4 and the receiving portion 5, that is, the auto handler 2 and the test head 3.

The fitting member 6 is, as shown in FIG.
The test fixture 3 is fitted in a vertical groove of a fixture 6a provided at the lower end of the test head 3, and is rotatably held by the fixture 6a on a rotating shaft 6b. Here, the lower end of the fitting member 6 extends below the lower end of the fixture 6a, and can be fitted into a notch 7c of an L fitting 7 described later. Further, as shown in FIG. 11, the L bracket 7 has a bottom surface 7a.
For example, five notches 7c are provided at regular intervals,
When fixed to the rail portion 31, the side surface 7b is fixed to the outer side surface of the lower frame below the rail portion 31 so that the bottom surface 7a faces outward, when it is turned upside down.

According to the IC test system 1 having such a configuration, the test head 3 is moved toward the auto-handler 2 along the rail portion 31, and the guide pin 42 of the projecting portion 4 is inserted into the hole 52 f of the receiving portion 5. By fitting the hooks 41c and the hooks 52g, the distance between the test head 3 and the auto handler 2 can be easily set to a constant distance. Here, the guide block 52 of the receiving part 5 is shifted back and forth, and the pin 53 is fitted into the notch 51d and positioned, so that the distance that the receiving part 5 protrudes from the test head 3, that is, the auto-handler 2 and the test head 3 Can be easily and stepwise changed. Therefore, even if the set interval between the auto-handler 2 and the test head 3 is changed by replacing the socket board 3b of the test head 3, the position of the guide block 52 is changed in accordance with the change. The distance from the test head 3 can be changed.

The test head 3 on the frame
Can be easily and stepwise changed by the fitting member 6 and the L bracket 7, so that the
When the number of the notches 51d and the number of the notches 7c are five, the distance between the test head 3 and the test head 3 can be set to 5.times.5 = 25 ways, which greatly increases the degree of freedom.

Further, since the test head 3 and the socket board 3b are fixed by using the hooks 41c and 52g, the connection state is stabilized, and the contact failure of the device hardly occurs. Therefore, the reliability of the IC test system 1 is improved.

The present invention is not limited to the above-described embodiment, but can be arbitrarily modified without departing from the spirit of the invention. For example, the receiving part 5 may be attached to the auto-handler 2 and the protruding part 4 may be attached to the test head 3. The number of the notches 51d and 7c can be set arbitrarily.

[0030]

As described above, according to the first and second aspects of the present invention, even if the socket board having the IC socket is replaced with another type, the mounting position of the receiving portion or the projecting portion is changed. Accordingly, the distance between the test head and the auto handler can be easily set to a distance suitable for the socket board.

According to the third and fourth aspects of the present invention,
At least one of the auto-handler and the test head can be positioned on the guide means in a stepwise manner. Therefore, even if the socket board is replaced with another type, the distance between the test head and the auto-handler is the distance suitable for the socket board. Easy to set up.

According to the seventh aspect of the present invention, the test head and the auto-handler are fixed to each other by the fixing mechanism, so that the connection state is stable and the contact of the device does not occur. The reliability of the test system is improved.

[Brief description of the drawings]

FIG. 1 is a schematic front view of an IC test system according to an embodiment of the present invention.

FIG. 2 is a schematic side view of the IC test system.

FIG. 3 is a schematic top view illustrating a connection structure between an auto handler and a test head of the IC test system.

FIG. 4 is a schematic front view illustrating a configuration of a receiving portion attached to a test head.

FIG. 5A is a front view illustrating the configuration of one part of a receiving portion, and FIG. 5B is a side view of the same.

FIG. 6A is a top view for explaining a configuration of one part of a receiving portion, and FIGS. 6B, 6C, and 6D are an end view, a front view, and a fixed end view on a protruding portion side, respectively. is there.

FIG. 7 is a front view illustrating the configuration of one part of a receiving unit.

FIGS. 8A and 8B are a top view and a side view, respectively, illustrating the configuration of one part of a receiving portion.

FIG. 9 is a top view illustrating a configuration of one part of a receiving unit.

FIG. 10 is a perspective view illustrating a configuration of a fitting member attached to a test head.

FIG. 11 is a schematic top view illustrating a configuration of an L-bracket attached to a test head table.

[Explanation of symbols]

 Reference Signs List 2 auto handler 3 test head 4 projecting part 5 receiving part 6 fitting member 7 L bracket (one component of positioning means) 7c notch (irregular part) 31 lower frame (guide means) 41c hook (one component of fixing mechanism) 52f Hole (dent) 52g Hook (one component of fixing mechanism)

Claims (7)

[Claims] 1. A test head for connecting a test head for testing a device under test, an auto-handler for holding the device under test in close proximity to the test head, and classifying the device under test according to test results. The connection mechanism, wherein one of the auto-handler or the test head, a protrusion attached to the other, and attached to the other, receiving the protrusion, the auto-handler and the test head And a receiving portion for keeping the distance of the constant distance between the auto-handler and the test device by allowing at least one of the mounting positions of the projecting portion and the receiving portion to be adjusted stepwise toward the other. A connection mechanism for a test head, wherein a distance from the head can be adjusted stepwise. 2. The test head connection mechanism according to claim 1, wherein at least one of the test head and the auto handler moves along guide means and approaches the other. mechanism. 3. A test head connection for connecting a test head for testing a device under test and an auto-handler detachably connected in proximity to the test head and classifying the device under test according to test results. A mechanism for guiding at least one of the auto-handler or the test head toward the other, and positioning the auto-handler or the test head on the guide means in a stepwise manner. A connection mechanism for a test head, comprising: positioning means for fixing. 4. The connection mechanism for a test head according to claim 3, wherein said positioning means is provided with a plurality of uneven portions provided on a side portion of said guide means, and is attached to said test head, and said uneven portion is provided. And a fitting member that fits into a part of the test head and positions and fixes the test head. 5. The connection mechanism for a test head according to claim 3, wherein the projection is attached to one of the auto handler and the test head toward the other, and the projection is attached to the other, and And a receiving portion for keeping a distance between the auto-handler and the test head constant by receiving a portion, and adjusting a mounting position of at least one of the projecting portion and the receiving portion stepwise toward the other. The distance between the auto-handler and the test head can be adjusted in a stepwise manner. 6. The connection mechanism for a test head according to claim 1, wherein the other end portion is fitted into one end surface of the projecting portion and the receiving portion. A connection mechanism for a test head. 7. A test head connecting mechanism according to claim 1, further comprising a fixing mechanism for fixing said receiving portion and said projecting portion to each other. Head connection mechanism.