JP2001060301A - Reference tape for evaluation and its production as well as apparatus for production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To permit the execution of the sensitivity correction of a drop-out inspection machine meeting the depths and sizes of defects and to permit adequate production magnification and higher accuracy by having recessed parts as a result of processing of a magnetic recording layer in this magnetic recording layer. SOLUTION: The reference tape for evaluation is formed by having the magnetic recording layer on one surface of a base layer consisting of polyethylene terephthalate(PET) or aramid resin and further having an over-coating layer or under-coating layer and a back layer formed on the reverse surface of the magnetic recording layer. A multiplicity of grooves extending in the longitudinal direction of the tape are formed in plural rows on the magnetic recording layer of the tape and the sizes of processing line components is not particularly restricted. The many grooves (b) extending in a diagonal direction may be formed and the angles and sizes of the processing line components (b) are not restricted and the coexistence of the different components is equally good. The depths of the recessed parts of the grooves may be the same or the coexistence of the recessed parts of the different depths is equally well. The performance of the drop-out inspection machine may be adequately recognized without destroying the tape by using such tape.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a DDS (digital d
It belongs to the technical field of magnetic tapes such as ata storage) and DAT (digital audio tape). Specifically, it is an evaluation standard that can suitably perform sensitivity correction of dropout inspection machines and evaluation of recording / reproducing system of magnetic tape. The present invention relates to a tape, a method of manufacturing the same, and a manufacturing apparatus.

[0002]

2. Description of the Related Art Magnetic tapes used for DAT and DDS are basically made of PET (polyethylene terephthalate).
And the like, a base layer which is a film, a magnetic recording layer formed on one surface of the base layer, and a back formed on the opposite surface of the magnetic recording layer of the base layer for the purpose of improving transport stability and strength. It has a layer and the like.

[0003] In such a magnetic tape, defects in the magnetic recording layer due to scratches and the like occur during recording and reproduction.
It appears as a phenomenon such as a drop in recording magnetic force or output, a mistake in recording and reproduction, and is usually called a dropout. Therefore, it is ideal that the magnetic tape has no dropout, but the dropout is originally inevitable. Therefore, in the production of magnetic tape, using a drop-out inspection machine, at least one of the output drop and time width is measured the number of drop-outs exceeding a predetermined value, the number of magnetic tapes exceeding the threshold value Determined that the product was inappropriate (NG). In the case of a DAT or the like, a dropout inspection machine often uses a modified drive (recording / reproducing device) for a DAT or the like, and the threshold value of the number of dropouts differs depending on the type of tape.

In order to properly perform the above-described dropout inspection, it is necessary for the dropout inspection machine to accurately measure the number of dropouts exceeding a predetermined value. It must be set properly. Therefore, in the manufacture of magnetic tapes, a magnetic tape as a reference, that is, a reference tape for evaluation (hereinafter referred to as a reference tape) is prepared for each product type, and the sensitivity correction of a drop-out inspection machine is performed using the reference tape (hereinafter referred to as reference tape). Calibration).

However, it is not possible to know how large and deep a defect such a reference tape actually has in a magnetic recording layer. By analyzing the magnetic tape, the size and depth of the defect can be known. However, analysis requires observation using an electron microscope or magnetic phenomena, which results in the destruction of the magnetic tape, and the analyzed magnetic tape cannot be used as a reference tape. Only part of it is done.

Therefore, at present, it is not possible to correct the sensitivity of the drop-out inspection machine in accordance with the depth and size of the defect of the reference tape. There is a problem that a good quality control cannot be performed as a result.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the prior art, and to make it possible to correct the sensitivity of a dropout inspection machine according to the depth and size of a defect. By this, the performance of the dropout inspection machine was properly grasped, and the machine difference and the secular change were absorbed.
Perform more accurate dropout inspection to perform more suitable production management and production management, and quantitatively measure the performance of the recording / reproducing system of the magnetic tape and evaluate its high accuracy and proper evaluation. It is an object of the present invention to provide an evaluation reference tape that enables the evaluation to be performed, and a method and an apparatus for manufacturing an evaluation reference tape capable of efficiently producing the evaluation reference tape.

[0008]

In order to achieve the above object, the present invention provides a reference tape for evaluation, characterized in that the magnetic recording layer has a recess formed by processing the magnetic recording layer.

In the method of manufacturing a reference tape for evaluation according to the present invention, at least one of a visible laser beam and an ultraviolet laser beam is applied to a magnetic recording layer of the magnetic tape while conveying the magnetic tape in the longitudinal direction. A method for manufacturing a reference tape for evaluation, characterized in that a concave portion is formed by incident light and processing the magnetic recording layer.

In the method of manufacturing the evaluation reference tape, the laser beam incident on the magnetic recording layer of the magnetic tape is a plurality of laser beams divided and imaged by a multi-lens lens, and a plurality of laser beams divided by a dividing means. Book laser beam, laser beam scanned by optical scanning element,
It is preferable that the laser beam is at least one of a plurality of laser beams divided and imaged by using the dividing means and the multi-lens lens together.

Further, the apparatus for manufacturing a reference tape for evaluation according to the present invention comprises a light source for emitting at least one of a visible region laser beam and an ultraviolet region laser beam, and a laser beam emitted from the light source at a predetermined processing position. And an optical system that is incident on the processing position, and a conveying unit that conveys the magnetic tape in a longitudinal direction with the magnetic recording layer facing the upstream side of the optical path of the laser beam, and at the processing position,
Means for ensuring the flatness of the magnetic tape conveyed by the conveying means.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a reference tape for evaluation, a method of manufacturing the reference tape for evaluation, and a device for manufacturing the reference tape for evaluation of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings. explain.

The evaluation reference tape of the present invention has a magnetic recording layer on one side of a base layer (base film) made of PET, aramid resin, or the like, or further has an overcoat layer (protective layer), an undercoat layer, and a magnetic recording layer. A magnetic tape having a normal layer configuration, having a back layer (back coat layer) formed on the opposite surface of the layer, and a concave portion corresponding to a dropout of the magnetic tape in the magnetic recording layer, for example, a magnetic tape. A groove extending in the longitudinal direction and a groove extending in a direction oblique to the longitudinal direction of the magnetic tape (hereinafter, referred to as an oblique direction) are formed.

FIG. 1 conceptually shows a magnetic recording layer of a reference tape for evaluation (hereinafter referred to as a tape) of the present invention. FIG.
In the example shown in (A), a large number of grooves (working line segments a) extending in the longitudinal direction of the tape are formed in a plurality of rows in the magnetic recording layer of the tape. In this example, the size (length, width) of the processing line segment is not particularly limited, and the sizes of the processing line segments may be the same or different. The example shown in FIG. 1B is an example in which a large number of grooves (processing line segments b) extending in oblique directions are formed. In this example, the angle and the size of the processing line segment b are not particularly limited, and the angles and the sizes of the processing line segments may be all the same or different. Also,
In the present invention, the depths of the recesses such as the grooves may be the same, or the recesses having different depths may be mixed.

The tape of the present invention has a concave portion corresponding to such a dropout in the magnetic recording layer, preferably a concave portion having a known depth and size. Therefore, by using the tape of the present invention, the sensitivity correction of the dropout inspection machine can be performed according to the depth and size of the defect of the tape without breaking the tape. As a result, it is possible to properly grasp the performance of the dropout inspection machine, and perform a more accurate dropout inspection that absorbs the machine differences and changes over time to perform better magnetic tape quality control. It becomes possible. Further, by using such a tape of the present invention, inspection and evaluation of a recording / reproducing system of a magnetic tape can be performed more suitably.

In the tape of the present invention, the formation state (formation pattern) of the concave portion is not limited to the illustrated example, and various types can be used. For example, a groove extending in the width direction of the tape is formed. Alternatively, a large number of circular or rectangular concave portions may be formed. When the grooves are formed in the width direction or in the oblique direction, the grooves may be formed so as to penetrate the end in the width direction of the tape, or may be formed so as to cross the tape. Further, two or more grooves extending in the longitudinal direction, the width direction, and the oblique direction may be mixed, and in this case, the grooves may intersect.

The shape (cross-sectional shape) of the concave portion is not particularly limited. For example, a rectangular shape as shown in FIG.
A triangular shape as shown in FIG. 2B, a semicircle (bow shape) as shown in FIG.

The size, depth, shape, forming angle, forming interval (longitudinal direction and width direction of the tape) of such a concave portion,
In a manufacturing method and a manufacturing apparatus of the present invention to be described later, a formation pattern and the like are determined by a beam spot diameter of a laser beam for processing a magnetic recording layer, a laser beam intensity, an intensity distribution (profile) of the beam spot, a pulse modulation frequency of the laser beam, By adjusting the scanning direction and scanning speed of the laser beam, the transport direction and transport speed of the tape, the mask pattern, and the like, selection and adjustment can be made as appropriate. In addition, the size, depth, shape, forming angle, forming interval, etc. of the concave portion depend on the tape width, track width, track angle (linear track or helical track), and the specifications of the dropout inspection machine. May be appropriately selected and set.

In any case, the recess is preferably formed so as to correspond to all the bands of the tape or all the tracks of each band. If you know what recesses (dropouts) exist in which tracks on the tape, you can use one roll of tape to correct the sensitivity of the dropout tester for various types of dropouts and record / reproduce magnetic tape. The system can be inspected and evaluated.

FIG. 3 shows such a (evaluation reference) tape of the present invention prepared using the manufacturing method of the present invention.
1 shows a conceptual diagram of a manufacturing apparatus of the present invention. Manufacturing apparatus 1 in illustrated example
Numeral 0 forms a groove (processing line or processing line segment) extending in the longitudinal direction of the tape as shown in FIG. 1A, and a light source 12 for emitting a laser beam and a pulse modulation It has an optical system having a device 14, a mirror 16, a beam expander 18, a beam profile shaper 20, and a multi-lens lens 22, and a tape transport means 24.

In such a manufacturing apparatus 10, the laser beam emitted from the light source 12 while the tape T is positioned at a predetermined processing position by the tape running means 24 and transported in the longitudinal direction (the direction of the arrow x in the drawing). Is incident on the processing position by an optical system, thereby forming a groove in the tape T.

The light source 12 is not particularly limited, and various light sources (laser oscillators) may be used as long as they emit an ultraviolet or visible laser beam having an output capable of processing the magnetic recording layer of the tape T. It is possible. In terms of workability, a laser beam having a short wavelength is more preferable, and a laser beam in the ultraviolet region is the best, but a laser beam in the visible region is preferable in terms of cost, safety, workability, and the like. Specifically, 488 nm or 515 nm argon laser, Y
A light source that emits a 532 nm laser beam obtained by converting the wavelength of an AG laser with an SHG (Second Harmonic Generation second harmonic generation) element is exemplified.

Further, by adjusting the output of the light source 12, that is, the intensity of the laser beam, the depth of the groove can be adjusted.

As described above, in the manufacturing apparatus 10 of the illustrated example, the optical system has the pulse modulator 14, the mirror 16, the beam expander 18, the beam profile shaper 20, and the multi-lens 22. The pulse modulator 14 corresponds to FIG.
The laser beam is pulse-modulated to form a processing line segment as shown in FIG. As the pulse modulator 14, known modulation means such as an AOM (acoustic optical modulator) can be used. In addition, the length of the groove and the interval between the grooves may be adjusted by adjusting the modulation period.

The laser beam is reflected by the mirror 16 in a predetermined direction, and then enters the beam expander 18. The manufacturing apparatus 10 splits one laser beam,
Although grooves are formed in the tape T, it is preferable that grooves can be formed corresponding to the tape T having various widths, and corresponding to the entire surface in the width direction, particularly, all the tracks of the tape T. However, in general, the diameter of the laser beam emitted from the light source is about 1 mm, and the tape T is thicker than that, so that the entire surface in the width direction of the tape T cannot be processed as it is. Therefore, in the manufacturing apparatus 10, the beam expander 18 is arranged, and the diameter of the laser beam emitted from the light source 12 is expanded. For example, when the laser beam emitted from the light source 12 is 1 mm and the width of the tape T is 0.5 inch, the diameter of the laser beam may be increased by about 15 to 20 times. Further, the diameter expansion rate of the laser beam in the beam expander 18 may be adjustable.

The laser beam expanded in diameter by the beam expander 18 is then sent to a beam profiler 20.
(Hereinafter, referred to as a molding device 20). Molding machine 20
Is to make the intensity of the laser beam almost uniform over the entire beam spot, that is, to make the intensity distribution of the laser beam almost uniform. Normally, the laser beam emitted from the light source 12 has an intensity distribution such as a Gaussian distribution. Therefore, if the laser beam is used to process the tape T, the depth of the groove will differ depending on the intensity distribution. for that reason,
By arranging the molding device 20, the intensity distribution of the laser beam can be made uniform and the depth of the groove to be formed can be made uniform, so that the sensitivity of the dropout inspection machine with higher accuracy and the evaluation of the recording / reproducing system can be evaluated. A workable (evaluation standard) tape T can be obtained.

As the molding device 20, for example, various optical filters can be used. For example, as shown in FIG. 4A, an isosceles triangle whose apex angle is obtuse is used as the light transmission region 20a. An example is a filter in which the apex angle is inside and the bottom side is combined to form a regular square, and the amount of transmitted light increases toward the periphery. FIG.
As shown in (B), there is also exemplified a filter formed by similarly combining elliptical arc-shaped light transmitting regions 20a in place of the isosceles triangle and increasing the amount of transmitted light toward the periphery. The filter having the above configuration is not limited to a regular square as shown in the illustrated example, but may be a pentagon or a polygon having a similar configuration.

As the molding device 20, the following optical system can be used. In this optical system, first, the laser beam expanded in diameter by the beam expander 18 is narrowed down by a cylindrical lens to form a linear (slit-shaped) laser beam extending in one direction (referred to as u direction). After dimming the linear laser beam with a slit extending in the same direction and having a wider passing area toward the end, the laser beam is collimated into a narrow beam by, for example, a set of cylindrical lenses. The diameter of the formed laser beam is expanded only in one direction by a cylindrical lens,
A linear laser beam extending in the v direction perpendicular to the direction is dim, and the light is modulated by a similar slit. Then, as in the u direction, the laser beam is collimated into a thin beam by a set of cylindrical lenses. This makes it possible to obtain a laser beam having a uniform light amount over almost the entire surface. As for the slit, a slit 80 (light amount adjusting means 72b) shown in FIG. 12 described later can be used. Also, if necessary,
The shaped beam may be expanded by a beam expander.

Or, conversely, if necessary, the molding machine 20
The laser beam may have an intensity distribution, and the depth of each groove may be appropriately adjusted (selected). Further, a groove having a depth corresponding to the intensity distribution of the laser beam may be formed without providing the molding device 20.

The laser beam is then applied to the multi-lens 22
Incident on. The multi-lens lens 22 is formed by arranging a large number of microball lenses and selfoc lenses in a direction perpendicular to the optical axis with its optical axis parallel to the laser beam. The light beam is divided, incident on a predetermined processing position, and imaged. Thus, the magnetic recording layer of the tape T is processed by the laser beam to form a groove or the like.

FIG. 5 is a schematic diagram showing one example of the structure viewed from the optical axis direction. As an example, as shown in FIG. 5A, the multi-lens lens in the illustrated example is a microball lens or a selfoc lens (hereinafter, both are collectively referred to as a lens) in a fine state of 5 × 5. As shown in FIG. 5 (B), the lenses are arranged in a state where the lens array line indicated by a dashed line is slightly inclined with respect to the transport direction x of the tape T. As a result, the tape T is transported only once (one pass) in the longitudinal direction, and as shown in FIG. 5B, a total of 25 rows of grooves (processing) extending in the width direction of the tape T are formed. A line segment a) can be formed.

Here, the gap between the grooves can be adjusted by adjusting the angle between the transport direction x and the arrangement line of the lenses. However, in order to form the grooves efficiently, this angle must be adjusted for each lens. Must be set so that the optical axes (centers of the beam waists) do not overlap in the transport direction x. As shown in FIG. 6, when paying attention to the lens arrangement line in the A direction, if the number of multi-lens lenses in a row is N; and the angle between the transport direction x and the arrangement line is θ ₁ ; When satisfied, the optical axes of the lenses do not overlap in the transport direction x. sin [(2π / 3) + θ ₁ ] ≧ N · sin θ ₁ Therefore, the angle θ _{1 at} which the optical axes of the lenses do not overlap is θ ₁ ≦ tan ⁻¹ [｛sin (2π / 3)} / ｛N-cos (2π /
3)｝]

Similarly, when attention is paid to the lens arrangement line in the B direction, if the angle θ ₂ formed between the direction perpendicular to the transport direction x (Y direction) and the lens arrangement line satisfies the following equation: The optical axes of the lenses do not overlap in the transport direction x. θ ₂ ≦ tan ⁻¹ [｛sin (π / 3)} / ｛N-cos (π /
3)｝]

In the present invention, the lens arrangement of the multi-lens is not limited to the fine state shown in FIG. 5 and the like, and various kinds can be used. For example, a grid pattern shown in FIG. It may be one in which lenses are arranged in a shape,
Alternatively, one or a plurality of rows of lenses may be arranged in a direction having an angle with respect to the transport direction x. FIG.
As shown in the figure, when the lenses are arranged in a grid pattern, if the angle θ between the transport direction x (or Y direction) and the lens arrangement line satisfies the following equation, the optical axis of the lens in the transport direction x Do not overlap. θ ≦ tan ⁻¹ (1 / N) If necessary, one groove may be formed by a plurality of laser beams by overlapping the optical axis of the lens in the transport direction x to increase the processing strength. .

In the manufacturing apparatus 10, the tape T is transported in the longitudinal direction by the transport device 24 while the magnetic recording layer side (surface side) is positioned at a predetermined processing position toward the upstream of the laser beam optical path. (The sheet is conveyed in a predetermined direction so that the conveyance direction x matches the longitudinal direction.) The transport means 24
Transport driving means such as a capstan roller, a rewinder, and a winder (not shown), guide rollers 26 and 28,
And a tape flattener 30.

The tape flattener 30 abuts against the back surface of the tape T being conveyed, and positions (holds) the tape T at a predetermined processing position. The tape T forms a transport path that passes below the tape flattener 30 by guide rollers 26 and 28 that are arranged with the tape flatner 30 interposed therebetween in the transport direction x. Thus, the tape T is supported by the tape flattener 30 and is located at the processing position.

Here, in the present invention, the processing of the magnetic recording layer by the laser beam is a fine processing corresponding to the dropout of the magnetic tape (sensitivity correction of a dropout inspection machine). Is small, that is, the allowable range of the beam waist is very narrow. Therefore, the tape flattener 30 is required to position the tape T with high accuracy in the depth of focus direction of the multi-lens 22, preferably with an error of 10 μm or less.

As a preferable tape flattener 30 for realizing this, as shown in FIG. 8A, a triangular prism (blade blade type) that supports the tape T at a side (side edge) is used.
An example in which two or more sides are arranged in the transport direction x with the side sides orthogonal to the transport direction x is illustrated. In addition to this, FIG.
A tape flattener in which a plurality of semicircular (D-shaped) column supporting members that support the tape T on the side as shown in FIG. 8B are similarly arranged, and a tape on the side as shown in FIG. A tape flattener in which a plurality of cylindrical support members for supporting T are similarly arranged, and a plate (rectangular parallelepiped) -type tape flattener as shown in FIG.

As described above, the light is emitted from the light source 12, modulated by the pulse modulator 14,
Are reflected by the beam expander 18, the diameter of the laser beam is expanded by the beam expander 18, the intensity distribution is made uniform by the molding device 20, and the laser beam divided and modulated by the multi-lens 22 is incident and forms an image. Therefore, the tape T is transported in the longitudinal direction while being positioned at the processing position by the tape flattener 30 in a state where the front side is directed to the upstream of the laser beam optical path by the transport device 24. Is formed with a groove extending in the longitudinal direction.
Five rows of grooves are formed. Further, by adjusting the transport speed, it is also possible to adjust the groove formation density.

According to the present invention, the processing intensity, that is, the depth and size of the groove, and the formation density are adjusted by appropriately selecting the intensity of the laser beam, the beam spot size, the modulation frequency, and the transport speed. Therefore, the (evaluation reference) tape of the present invention having excellent characteristics as described above can be suitably and easily produced. It is preferable that the size and depth of the concave portion such as the groove formed in the tape T can be properly grasped. Here, according to the present invention, these can be adjusted by the processing strength and the tape transport speed, and if the same tape, under the same processing conditions, the same concave portion can be formed with good reproducibility. Even if the size and depth of the tape are not known, it is possible to perform sensitivity correction of a dropout inspection machine according to the size and depth of a tape defect, and to evaluate a recording / reproducing system of a magnetic tape.

In the present invention using a laser beam in the visible or ultraviolet region, both the thermal processing of the laser beam and the processing by ablation (dissociation and separation) by the laser beam occur in combination, and the magnetic recording layer Is considered to be processed.

In the present invention, the processing of the magnetic recording layer of the tape T often generates processing dust and gas such as dust. Therefore, it is preferable to provide a removing means for removing a processing residue and gas at the processing position, and a cleaning means for removing foreign matter attached to at least the front surface, preferably the front and back surfaces of the tape T, downstream of the processing position. Is preferably provided. Note that, as the removing unit, a suction unit such as a scrubber or a local exhaust unit may be used, and the cleaning unit may be a known method performed in the manufacture of a magnetic tape, such as a method using a cleaning tape. .

FIG. 9 shows the configuration of another example of the present invention. The example shown in FIG. 9 includes a sheet beam forming device 70, a light amount adjusting means 72, and a multi-lens lens 74 instead of the forming device 20 and the multi-lens lens 22 in the processing apparatus 10 shown in FIG. is there. Other than this, the present example has the same configuration as that of the processing apparatus 10, and thus the following description mainly focuses on different parts.

The multi-lens 74 is the same as the multi-lens 22 described above.
In the same manner as described above, the laser beam is imaged on the magnetic recording layer to perform processing. The example shown in FIG. 9 is not a finely-packed multi-lens but a single line as shown in FIG. A lens array arranged linearly is used as the multi-lens 74. In the illustrated example, a lens array similar to a row of lenses arranged in a 13 × 13 close-packed state is arranged so as to extend obliquely with respect to the width direction of the tape T. The dummy lens array 7 is disposed upstream of the tape T in the transport direction to ensure better alignment accuracy, positional accuracy, linearity, and the like of the multi-lens 74.
4a. Alternatively, an optical substrate having good flatness may be used instead of the dummy lens array 74a.

In the present invention, such a lens array-shaped multi-lens is not limited to a lens array corresponding to a densely packed state, and a plurality of lenses are arranged at a predetermined interval according to the interval and the number of concave portions to be formed. Various kinds of lens arrays arranged in (pitch) are available, and the arrangement is not limited to the arrangement in the oblique direction with respect to the width direction of the tape T, but may be arranged in the same direction as the width direction. There may be. Alternatively, only one row of the finely-filled multi-lens lens shown in FIG. 5 or the like may act on the optical path of the laser beam to be used as a lens array. When a closely packed lens array (or a closely packed multi-lens lens) is used as a multi-lens lens, the angle and the like of the lens array can be efficiently calculated by calculating in the same manner as described above. Processing is possible.

In the example shown in FIG. 9, the beam expander 18 collimates the laser beam. The sheet beam forming device 70 expands the diameter of the laser beam collimated by the beam expander 18 in only one direction,
This is a linear (slit-shaped) laser beam extending in one direction, which coincides with the arrangement direction of the multi-lens 74. Various known optical elements (combinations thereof) can be used as the sheet beam former 70 as long as it has such an action. For example, the sheet beam former 70 may be configured using a cylindrical lens. Alternatively, in this embodiment, without using the beam expander 18,
Alternatively, the further narrowed laser beam may be expanded in only one direction by a sheet beam forming device, and then collimated into a linear laser beam extending in one direction.

The laser beam linearized by the sheet beam forming device 70 enters the light amount adjusting means 72.
The light amount adjusting means 72 makes the light amount (light intensity distribution) of the laser beam entering each lens of the multi-lens lens 74 uniform over the entire area. As described above, since the laser beam has a Gaussian distribution, the linear laser beam obtained by the sheet beam shaper 70 has both ends from the center in the longitudinal direction according to the Gaussian distribution of the original laser beam. The light amount gradually decreases toward. On the other hand, by having the light amount adjusting means 72, the light amount of the laser beam incident on the multi-lens lens 74 is made uniform over the entire area, and it is possible to perform uniform processing on all the concave portions, thereby achieving high precision. The sensitivity of a simple drop-out inspection machine can be adjusted.

In addition, between the sheet beam forming device 70 and the light amount adjusting means 72, for example, a region having a half width or less of a linear laser beam is cut (shielded), and a region which does not contribute to the processing of the tape T is cut. For example, slits or the like for cutting unnecessary regions at both ends of the laser beam may be provided.

As the light amount adjusting means 72, various means can be used as long as the light amount of the laser beam entering each lens of the lens array-shaped multi-lens lens 74 can be made uniform over the entire area. As a preferred example, FIG.
The light amount adjusting means 72a shown in FIG.

FIG. 11 is a view of the light amount adjusting means 72a as viewed from the optical axis direction of the laser beam, and corresponds to each lens of the multi-lens lens 74, and has a circular shape whose center coincides with the optical axis of the corresponding lens. Have apertures 76, 76,... The aperture 76 has a diameter according to the light amount distribution in the longitudinal direction of the laser beam. The light amount adjusting means 72a uses the aperture 76 to make the light amount of the laser beam incident on each lens of the multi-lens lens 74 uniform over the entire area. As an example, the light amount is incident on each lens of the multi-eye lens 74. The light quantity of the laser beam is adjusted to the light quantity of the half width of the laser beam. The circle indicated by the dotted line 78 in the figure indicates the dummy lens array 74 a of the multi-lens 74.

In such light amount adjusting means 72a,
For example, when the amount of light incident on the end aperture 76 is the half width of the laser beam, the central aperture 76
In this case, the diameter of the central aperture 76 may be set to 60% of the end.
Processing of the magnetic recording layer requires a predetermined laser power. However, when the diameter of the beam incident on the lens decreases, the beam waist diameter increases and the workability deteriorates. The relationship between the beam waist diameter necessary for the above and the beam waist diameter of the actually incident laser beam is calculated and obtained in advance.

As the light amount adjusting means, besides the above, a light amount adjusting means 72b using a slit as shown in FIG. 12 is preferably used. Light intensity adjusting means 7 in the illustrated example
Reference numeral 2b denotes a slit plate that regulates the passage of a linear laser beam, and has a slit 80 extending in the same direction as the laser beam (the direction in which the multi-lens lenses 74 are arranged). The slit 80 has a configuration in which the amount of light passing therethrough (the width in the direction orthogonal to the linear direction) gradually decreases from the end to the center according to the light amount distribution of the linear laser beam. In the illustrated example, the multi-lens 7
The light amount of the laser beam incident on each lens of No. 4 is made uniform over the entire area. For example, similarly to the light amount adjusting means 72a, the light amount of the entire linear laser beam in the longitudinal direction is reduced to a half width. adjust.

The light quantity adjusting means 80 has a characteristic that it is easier to manufacture than the light quantity adjusting means 72 using the aperture 76, but the allowable depth may be shallow due to astigmatism of the beam. Care must be taken in the design.

The light amount adjusting means 72 may be arranged upstream of the multi-lens 74 as shown in the figure, or may be arranged downstream. However, the light amount adjusting means 72
Is arranged downstream of the multi-lens lens 74, the size of the aperture 76 and the slit 80 and the like are adjusted so that the light amount of the laser beam is uniform over the entire region in consideration of the narrowing of the laser beam by the multi-eye lens 74. It is necessary to set the shape and the like.

In the examples shown in FIG. 3 and FIG. 9, the laser beam is divided using the multi-lens lens 22 to form an image at the processing position. However, the present invention is not limited to this. Various configurations are possible.

For example, instead of the multi-lens lens 30, FIG.
3, a method utilizing an AOM (acousto-optic modulator) 32 and an imaging lens 34 is exemplified. In the example shown in FIG. 13, the tape T is transported in a direction perpendicular to the paper surface. In this example, AOM32
Is a laser beam splitting means, and a driver 36 inputs a plurality of frequency signals (or continuously oscillates frequency signals) to the AOM 32. As a result, a large number of black diffractions occur, and a laser beam is emitted at a large number of black angles. This plurality of laser beams,
By forming light beams parallel to each other by the imaging lens 34 and forming an image at the processing position, a plurality of grooves extending in the longitudinal direction can be formed as in the above-described example.

FIG. 14 shows another example. In this example, similarly, in the manufacturing apparatus 10 shown in FIG. 3 described above, instead of the multi-lens 22, the dividing means 38 and the imaging lens 40 are used.
Is used. Also in this example, the tape T is transported in a direction perpendicular to the paper surface. The dividing means 38 applies a coating for reflecting the laser beam on the inside of the parallel plane substrate 38a made of glass, and divides the laser beam using multiple reflection. The laser beam is incident on the dividing means 38 (parallel plane substrate 38a) as shown by the arrow a, and as shown in the drawing, is reflected in the parallel plane substrate 38a under the action of the coated reflective film 38b. By repeating, the laser beam is emitted as a divided laser beam. Therefore, the number of divisions can be set by the incident angle of the laser beam on the parallel plane substrate 38a. Exit surface 3
The laser beam emitted from 8c is imaged at the processing position by the imaging lens 40. As a result, a plurality of processing lines extending in the longitudinal direction can be formed on the magnetic recording layer of the tape T as described above.

In the example shown in FIG. 14, the intensity of the emitted laser beam may be adjusted by adjusting the reflectivity of the emission surface 38c opposite to the reflection film 38b of the parallel flat substrate 38a. The adjustment of the reflectance of the emission surface 38c may be performed on the entire surface or only in a region where the laser beam may enter. Further, a plurality of laser beams may be incident in the transport direction x, or the parallel planar substrate 38a
Injecting a plurality of laser beams having different angles of incidence into the laser beam, as in the above-described example, the formation density of the processing line can be improved,
Improvement of the processing strength may be measured. Further, in the examples shown in FIGS. 13 and 14, the beam expander 18 does not necessarily need to be arranged.

FIG. 15 shows another example of the manufacturing apparatus of the present invention. Although the transporting means is not shown in FIG. 15, the transporting means may be the same as that of the manufacturing apparatus 10 shown in FIG. 3 in this example. Also in FIG. 15, the tape T is transported in the direction of the arrow x.

The manufacturing apparatus 82 shown in FIG.
4, an intensity modulator 84, a beam waist position adjusting unit 86, a beam shaping unit 88, a mask 90, and a converging lens 92.

The light source 14 is the same as that of the manufacturing apparatus 10 shown in FIG. The intensity modulator 84 is a light source 1
The depth (working strength) of the concave portion is adjusted by adjusting the intensity of the laser beam emitted from Step 4.
As the intensity modulator 84, various known laser beam intensity modulation means such as AOM can be used. The light source 1
In the case where 4 is capable of direct modulation, the intensity modulator 84 need not be particularly provided.

The beam waist position adjusting means 86 adjusts the position of the beam waist (in the direction of the optical axis) of each laser beam divided by the mask 90 described later to the processing position. In the illustrated example, in the optical axis direction, the position at which the interval between the divided laser beams converged by the converging lens 92 is a predetermined interval is set as the processing position.
As a preferred embodiment, the position (interval) in the width direction of the tape T of each laser beam converged by the converging lens 92
However, the beam waist position is adjusted here, using the position of the track of the tape T as the processing position. For example, in the illustrated example, the tape T has 12 tracks, which will be described later. However, since the manufacturing apparatus 82 can input 12 laser beams to the tape T in the width direction, all the tracks of the tape T Laser beams are incident one by one. Therefore,
According to this aspect, a concave portion can be formed corresponding to each track of the tape T. Further, the processing position is adjusted by moving the optical system and the transport means of the tape T in the optical axis direction, and the number of laser beams incident in the width direction of the tape T is adjusted (up to 12 laser beams in the illustrated example). By adjusting the beam waist there, it is possible to suitably cope with tapes T of various widths and the number of tracks.

The beam waist position adjusting means 86 is not particularly limited, and various known means can be used. For example, an H.264 lens is used which can adjust the position on the optical axis and the distance between each other. ABC derived by Kogelnic
Means for adjusting the beam waist position based on the calculation using the D matrix is available.

The beam shaping means 88 expands the beam diameter of the laser beam to a predetermined size, and light intensity (intensity distribution) in a direction (beam spot) orthogonal to the optical axis.
Is made uniform over the entire surface. This makes it possible to make the depth (working strength) of the concave portion formed by each laser beam uniform, and to perform more accurate sensitivity correction of the dropout inspection machine and evaluation of the recording / reproducing system of the magnetic tape. . As the beam shaping unit 88, various combinations of optical elements and optical elements having the above-described functions can be used.
As an example, a combination of the molding machine 20 and the beam expander illustrated in the manufacturing apparatus 10 is exemplified.

The mask 90 is formed by two-dimensionally forming a plurality of apertures (openings) through which a laser beam passes on a light-shielding member. In the illustrated manufacturing apparatus 82,
With this mask 90, the laser beam expanded in diameter by the beam shaping means 86 is divided into a plurality of laser beams.

FIG. 16 is a schematic view of an example of the mask 90 when viewed from the optical axis direction. As shown in FIG. 16 (A), a total of 132 masks 90 are provided on the light-shielding plate material, 12 at equal intervals in the width direction of the tape T and 11 at equal intervals in the transport direction (arrow x direction). A plurality of square apertures 94 of the same size are formed, and the laser beam whose diameter is increased and the intensity distribution is made uniform by the beam forming means 88 is divided into 132 laser beams at the maximum. Therefore, the manufacturing apparatus 82 controls the tape T for up to 12 tracks.
Recesses can be formed corresponding to all the tracks.

Each aperture 94 individually has a liquid crystal shutter, and can independently switch between a state in which a laser beam can pass light (opening) and a state in which light is blocked (blocking). As shown in FIG. 16B, the aperture 94 is opened (the closed aperture 9 is opened).
4 is indicated by a dotted line), and the laser beam can be divided into a plurality by passing only that part of the laser beam.
That is, the manufacturing apparatus 82 in the illustrated example changes the pattern of the aperture 94 to be opened to change the pattern of the laser beam incident on the tape T, ie, the tape T by the laser beam.
The formation pattern of the concave portion can be arbitrarily changed. In addition, the liquid crystal shutter can shield the laser beam,
As long as it can withstand heat, a known shutter such as a liquid crystal shutter using a liquid crystal for high luminance can be used.

In the manufacturing apparatus 82, the mask constituting the laser beam dividing means is not limited to a mask having a liquid crystal shutter as shown in the illustrated example, and may be a mask having only an aperture having no liquid crystal shutter. Alternatively, an aperture having a liquid crystal shutter and an aperture having no liquid crystal shutter may coexist. An optical shutter other than the liquid crystal shutter can also be suitably used as long as it has sufficient responsiveness and heat resistance. However,
Regardless of the configuration, the number of apertures in the width direction is
It is preferable that the number is equal to or more than the total number of tracks of the tape T to be processed. In addition, as long as it has sufficient heat resistance and light shielding performance, a TFT (Tin Film Transi
A non-light emitting display such as a liquid crystal display such as a stor) may be used as a mask to form an aperture of an arbitrary shape at an arbitrary position.

The laser beam split by the mask 90 is converged by the converging lens 92, enters the tape T conveyed in the direction of the arrow x while being positioned at the processing position, and processes the magnetic recording layer to form a concave portion. I do. Note that the convergent lens 92 may be one whose refractive index (lens power) is adjustable. Here, as described above, the processing position is determined by setting the interval in the width direction of the laser beam converged by the converging lens 92 to the interval corresponding to each track of the tape T,
That is, the laser beam is set at a position where it is incident on each track of the tape T, and the beam waist of all the beams is adjusted to this position by the beam waist adjusting means 86.

In the manufacturing apparatus 82, the irradiation of the laser beam to the tape T is not performed continuously, but is repeated for a predetermined time (ie, processing) and non-irradiation.
It is done intermittently. The intermittent irradiation of the laser beam to the tape T may be performed by turning on / off the light source 14, adjusting the intensity by the intensity modulator 84, opening / blocking the aperture 94 in the mask 90, or the like.

The aperture 94 of the mask 90 has, for example, openings in the pattern shown in FIG.
Therefore, by a single irradiation of the laser beam onto the tape T, a concave portion is formed in a block as shown in FIG. 17 in accordance with the opening of the aperture 94, and the tape is intermittently irradiated with the laser beam. In the longitudinal direction of T,
This block-like pattern is formed continuously (three blocks are shown in the illustrated example).

Here, once (formation of a recess of one block)
If the irradiation time is too long, the concave portions formed by the laser beams passing through the apertures 94 arranged in the transport direction overlap in the transport direction of the tape T. If the non-irradiation time is too short, that is, if the intermittent irradiation repetition cycle is too short, block-like patterns formed continuously in the transport direction overlap.

The size of the laser beam passing through one aperture 94 in the longitudinal direction on the tape T (the aperture 94 is a square, so the width direction and the longitudinal direction are the same).
Is Db [m], and the interval (pitch) in the transport direction is Lp
[M], assuming that the length of the one block on the tape T in the longitudinal direction is La [m] and the running speed of the tape T during processing is St [m / sec], one time in the intermittent laser beam irradiation. If the irradiation time (processing time of one block) Pt [seconds] is set so as to satisfy Pt <Lp / St, the concave portion formed by the laser beam that has passed through the apertures 94 arranged in the transport direction is taped. T can be prevented from overlapping in the transport direction of T. Similarly, if the intermittent irradiation repetition cycle Pr [second] is set so as to satisfy Pr> La / St, it is possible to prevent blocks formed continuously from overlapping.

The above-mentioned Db on the tape T,
Lp and La, and furthermore, the size of the laser beam on the tape T in the width direction and the size of the block in the width direction are determined by the size of the aperture 94, the interval between the apertures 94,
Since it is determined by the size of the aperture forming region in the mask 90, the adjustment strength of the beam waist position adjusting means 86, the power of the converging lens 92, and the like, it is preferable that the size and interval of the aperture 94 and the size of the aperture forming region of the mask 90 be set. Is adjusted appropriately, and the tape T
A suitable concave portion is formed in the magnetic recording layer.

As is clear from the above description, according to the manufacturing apparatus 82, the aperture 94 in the mask 88
According to the aperture pattern of the laser beam and the intensity adjustment of the laser beam by the intensity modulator 84, etc., it is possible to manufacture a tape T (reference for evaluation) in which track, what kind of concave portion or dropout exists, is known. . Therefore, the sensitivity correction of the drop-out inspection machine can be suitably performed by using the tape T1, and the evaluation of the magnetic recording / reproducing system for various drop-outs corresponding to a plurality of, preferably all the tracks can be performed. It can be carried out.

Further, in the manufacturing apparatus 82, a signal indicating which track has a concave portion at which depth, a signal of an opening pattern of the mask 88, and the like are converted into a digital signal or a bar code by using a concave portion forming pattern. It is also possible to form a concave portion indicating these in the tape T in addition to the concave portion serving as a dropout.

FIG. 18 shows that the magnetic recording layer of the tape T
Another example of the manufacturing apparatus of the present invention for forming a groove extending in the longitudinal direction of the tape T as shown in FIG. Although the transporting means is not shown in FIG. 18, the transporting means may be the same as the manufacturing apparatus 10 shown in FIG. 3 in this example. Also in FIG. 18, the tape T is conveyed in a direction perpendicular to the paper surface.

A manufacturing apparatus 50 shown in FIG. 18 includes an LD array 52 having a laser diode (LD) that emits a visible or ultraviolet laser beam, preferably a blue laser beam, and an LD array 52. And a lens array 54 formed by arranging lenses for imaging each laser beam emitted from each LD at a processing position.
The LD array 52 and the lens array 54 are arranged such that the arrangement direction has an angle with respect to the transport direction x. Using such an optical system, the tape T is similarly conveyed in the longitudinal direction by the conveying means while a large number of laser beams are incident on the processing position. On the magnetic recording layer.

The lenses constituting the lens array 54 include a microball lens and a selfoc lens (GR).
IN lens) and the like. Also, the LD array 52
(Furthermore, the lens array 54) is not limited to one in which the LDs are arranged in a line, and may be arranged in a plurality in the transport direction. And grooves may be formed at a higher density.

In FIG. 19, as shown in FIG.
FIG. 2 shows a schematic view of a manufacturing apparatus for forming a groove (line segment) extending at an angle to the longitudinal direction. In the example illustrated in FIG. 19, many members are common to the manufacturing apparatus 10 illustrated in FIG. 3, and thus, the same members are denoted by the same reference numerals, and description thereof will be omitted.
Mainly in different parts.

The manufacturing apparatus 60 shown in FIG.
2, a pulse modulator 14, a mirror 16, an x-direction operation element 62, a Y-direction operation element 64, and a converging lens 66.
And transport means 24. That is, the manufacturing apparatus 60 is the beam expander 1 of the manufacturing apparatus 10.
8. An x-direction scanning element 62, a y-direction scanning element 64, and a converging lens 66 are arranged in place of the forming unit 20 and the multi-lens lens 22, so that the laser beam emitted from the light source 12 is required. According to the pulse modulator 14
, And is deflected by the mirror 16 and enters the x-direction scanning element 62.

The x-direction scanning element 62 is an optical scanning element that deflects and scans the laser beam in the same direction as the transport direction x. On the other hand, the y-direction scanning element 64 is an optical scanning element that deflects the laser beam scanned by the x-direction operation element 62 in the width direction orthogonal to the transport direction x (hereinafter, referred to as the y direction). The manufacturing apparatus 60 of the illustrated example scans the laser beam in an oblique direction by including the optical scanning element that deflects and scans the laser beam in a direction orthogonal to each other. The optical scanning element is not particularly limited, for example,
Various known optical deflectors such as a galvanometer mirror, a polygon mirror, and an AOD (acoustic optical deflector) can be used.

The laser beam obliquely deflected is represented by x
A convergent lens 66 such as an fθ lens having a sufficient area for a laser beam deflection scanning region by the directional scanning element 62 and the y-direction scanning element 64 and having lens power (refractive power) in both x and y directions. At a predetermined scanning position corresponding to the processing position with a predetermined beam spot diameter, and forms an image to define a scanning line. Here, as described above, since the tape T is transported in the longitudinal direction while being positioned at the processing position toward the upstream side of the laser beam optical path by the transport means 24, the magnetic recording layer of the tape T In FIG. 1B, grooves extending in an oblique direction as shown in FIG. 1B are continuously formed, and a large number of oblique directions are formed in the magnetic material layer only by transporting the tape T once in the longitudinal direction. Can be manufactured. The angle of the groove can be adjusted by adjusting the scanning direction changed by each scanning element.

In the embodiment shown, the optical scanning element is x
The present invention is not limited to the one having the light deflecting element in both the direction and the y direction, and may have only the light deflecting element for deflecting the laser beam in the y direction or the oblique direction.
As described above, since the tape T is conveyed in the longitudinal direction at the processing position, if the laser beam is scanned and incident in the y direction, the tape T is conveyed by the balance between the conveying speed of the tape T and the scanning speed of the laser beam. As a result, an oblique scanning line is defined on T, and a groove extending in an oblique direction can be formed.
Also, the scanning direction is the same direction (for example, the y direction),
By using a plurality of optical systems having different scanning directions (right to left, left to right, and the like), a groove as shown in FIG. 1B may be formed.

Further, while the tape is being conveyed, the laser beam is imaged in a line oblique to the conveying direction of the tape T by using an optical lens or the like having a lens power in one direction (that is, the optical path is changed). The groove extending in the oblique direction may be processed by pulse-modulating the laser beam (as a sheet (surface)).

In a system such as a multi-channel fixed head that performs recording / reproduction in parallel with the longitudinal direction of the tape, it is necessary to make the tape as short as possible, perform dropout measurement, and evaluate the system. It is important in the sense of shortening. Therefore, the tape T of the present invention
20, the processing line segment (concave portion) is divided into a plurality of groups (first group, second group..., N-th group) in the width direction according to the recording band of the tape T. May be formed. Further, in order to more suitably perform the calibration of the drop-out inspection machine and the evaluation of the recording / reproducing system of the magnetic tape, the processing line segments formed in the same group are formed by a predetermined pattern (for example, illustrated in FIG. As described above, it is preferable that the first group has a dotted line, the second group has an alternate long and short dash line..., And the N-th group has an alternate long and two short dashes line). It is more preferable to form a processing line segment. Furthermore, various drop-out levels, track Nos. And band Nos. Are recorded as digital signals on different processing line segments, and measurement is performed on each track and each band to determine the number of the track or band. The dropout level at can be determined immediately.

By using such a tape T,
When calibrating a multi-channel fixed head drop-out inspection machine or evaluating a magnetic tape recording / reproducing system,
Individual tests on a plurality of bands can be performed simultaneously in a short time. In particular, in a mode in which different processing line segments are formed within the same group, it is possible to inspect many tracks simultaneously in a short time for each band and each track in the band. Further, by forming different patterns in the longitudinal direction of the tape T, it is possible to detect at which position in the longitudinal direction and in the width direction the inconvenience has occurred, and to determine the band (track) and the longitudinal position.

The tape T divided into groups as described above and having a plurality of processing tracks corresponding to the recording tracks in each group can be obtained by using the above-described processing apparatus of the present invention in a plurality in the width direction of the tape T. Although it can be created by using, a processing apparatus shown below is exemplified as a preferable processing apparatus.

The processing apparatus 100 shown in FIG.
Is an apparatus suitable for manufacturing a tape T in which each processing line segment in a group is the same. The processing apparatus 100 in the illustrated example forms, for example, four groups of processing line segments corresponding to four recording bands, and basically includes a light source 14, a beam splitter 102, and four light modulators 104. (104
a, 104b, 104c, 104d) and the mirror 105
, Sheet beam shaper 106, multi-lens 108
And transport means 24. Since the transporting means 24 is the same as in the above-described example, the same members are denoted by the same reference numerals, and description thereof will be omitted.

The light source 14 is similar to the light source used in the above-described processing apparatus 10 and the like. The laser beam emitted from the light source 14 is split into a plurality (four in the illustrated example) of laser beams corresponding to the width direction of the tape T by the beam splitter 102 as shown in FIG. Therefore, in FIG. 21B, the tape T is transported in a direction substantially perpendicular to the paper surface.) The beam splitter 102 is not particularly limited, and various known beam splitters such as a beam splitter using a dielectric multilayer film can be used.
Further, in order to make the intensity of each laser beam split by the beam splitter uniform, a beam profiler may be arranged upstream of the beam splitter 102.
The same molding machine as the molding machine 20 of the processing apparatus 10 shown in FIG. 3 described above may be used.

In the illustrated example, four groups of processing line segments are formed by splitting the light beam by the beam splitter 102, but the present invention is not limited to this, and four light sources are used. Four groups of processing line segments may be formed. In this regard, the same applies to various examples described later.

The laser beams split by the beam splitter 102 are applied to the corresponding optical modulators 104.
a, 104b, 104c and 104d, and are intensity-modulated (processing on / off). Each of the optical modulators 104 has a signal source (driver) corresponding to the optical modulator 104.
Driven by a, b, c and d. Optical modulator 10
4 is not particularly limited, and various known light intensity modulators such as AOM can be used.

Each laser beam modulated by the optical modulator 104 is reflected in a predetermined direction by a mirror 105 (omitted in FIG. 21B) and enters a sheet beam shaper 106. The sheet beam shaper 106 is similar to the sheet beam shaper 70 shown in FIG. 9 described above, and separates each laser beam split by the beam splitter 102 and modulated by the light modulator 104 into a multi-lens 108. This is a linear laser beam that matches the arrangement direction of the (corresponding lens array 110). As in the example shown in FIG. 9, a beam expander for collimating a laser beam may be arranged upstream of the sheet beam shaper 106.

The laser beam linearized by the sheet beam forming device 104 enters the multi-lens lens 108. As shown in FIG. 22, the multi-lens 108 has a lens array 110 (110a, 110b, 110b) having a dummy lens array similar to the multi-lens 74 shown in FIG.
110c, 110d) are arranged via a spacer 112 in a direction orthogonal to the lens array 110.
Note that each lens array 110 may include a light amount adjusting unit, as in the example shown in FIG.

As shown in FIG. 22, such a multi-lens lens 108 is arranged such that the lens array 110 has a slight angle with respect to the tape T transport direction. The angle is set such that the lens arrays 110 (lines connecting the optical axes of the lenses of the lens array 110) do not overlap with the transport direction of the tape T. Therefore, the four linear laser beams incident on the corresponding lens arrays 110 are divided and imaged at different positions in the width direction of the tape T, are divided into four blocks, and each block has a plurality of laser beams. A processing line segment (14 blocks per block in the illustrated example) is formed.

As described above, each laser beam is intensity-modulated by the corresponding optical modulator 104.
By this modulation, the processing of the tape T is turned on / off,
Processing line segments of various patterns can be formed. Therefore, in the processing apparatus 100 of the illustrated example, the optical modulator 1
04 drive each other with duty or on
Modulator 1 corresponding to drive signals having different / off frequencies
By supplying the laser beam to the laser beam 04, the laser beams split by the beam splitter 102 can be individually intensity-modulated to form a processing line segment having a different pattern for each block. Further, by changing the modulation pattern by the optical modulator 104, it is possible to form different processing line segments in the longitudinal direction of the tape T (this is the same in an embodiment described later).

The processing apparatus 100 shown in FIG. 21 is an example suitable for producing a tape T in which the processing line segments in each block are the same. However, FIG. FIG. 1 shows a conceptual diagram of a processing apparatus suitable for preparation. Since the processing apparatus 120 shown in FIG. 23 has substantially the same configuration as the processing apparatus 100 shown in FIG. 21, the same members are denoted by the same reference numerals, and the following description mainly focuses on the different parts. To do.

The processing apparatus 120 shown in FIG. 23 similarly forms four groups of processing line segments.
As shown in (A), basically, the light source 14, the beam splitter 102, and the four light modulators 104 (104
a, 104b, 104c, 104d) and the mirror 105
, The sheet beam former 106 and the four multi-pattern disks 122 (122a, 122b, 122c, 1)
22d), the multi-lens 108, and the transport unit 24.

As is clear from the above description, the processing apparatus 120 shown in FIG.
And the multi-lens 108, except that a multi-pattern disk 122 is provided.
It has the same configuration as Therefore, the laser beam emitted from the light source 24 is divided into four laser beams in the substantially width direction of the tape T by the beam splitter 102 as shown in FIG. Modulated by the mirror 104, the mirror 105 (FIG. 23)
(Omitted in (B)), is reflected in a predetermined direction, is shaped into a linear laser beam in a predetermined direction by a sheet beam shaper 106, passes through a corresponding multi-pattern disk 122, and is The light enters the corresponding lens array 110, enters the tape T, forms an image, and processes the tape T.

FIG. 24 shows a multi-pattern disk 122.
1 shows a front view of an example. Multi pattern disk 122
Is a light-shielding disk formed with a plurality of slits 124 (16 at equal angular intervals in the illustrated example) radially from the center. In this embodiment, the multi-pattern disk 12
2 is arranged so that the slit 124 coincides with the lens array 110, and is rotated at a high speed by a motor 126 about the center O of the disk. Therefore, the linear laser beam passes through the multi-pattern disk 122 and processes the tape T only when the slit 124 and the lens array 110 coincide with each other. That is, in this embodiment, the light modulator 104 And multi-pattern disc 1
The processing is also turned on / off by the rotation of 22.

Here, as shown by the dotted lines in FIG. 24, the slits 124 are divided corresponding to the respective lenses of the lens array 110 (accordingly, 14 divisions in the illustrated example). It can be masked and shielded from light. In the illustrated example, as an example, a section painted black in the figure is masked. As described above, the passage of the laser beam, that is, the processing of the tape T,
The rotation of the multi-pattern disk 122 also causes
is turned off. Therefore, by changing the masking pattern of the section corresponding to each lens of the lens array 110, it is possible to change the incident pattern of the laser beam on each lens, and to form a plurality of different processing line segments in each block. Can be.

In the processing apparatus 120 in the illustrated example, the rotation speed of the multi-pattern disk 122 is not particularly limited, and may be appropriately determined according to the target processing pattern, the transport speed of the tape T during processing, and the like. 6000 rpm
It is preferably set to 12000 rpm. Further, the rotation speed of the multi-pattern disk 122 may be constant, or may be changed periodically or randomly, and the formation pattern of the processing line segment may be changed in the longitudinal direction of the tape T by adjusting the rotation speed.

FIG. 25 shows a conceptual diagram of another example of a processing apparatus suitable for producing a tape T having different processing line segments in a block. The processing device 130 shown in FIG.
Since the same members as those of the processing apparatus 100 shown in FIG. 21 are diversified, the same members are denoted by the same reference numerals, and the following description mainly focuses on the different parts.

The processing apparatus 130 shown in FIG. 25 similarly forms four groups of processing line segments. Basically, the light source 14, the beam splitter 102, and the four optical modulators 104 (104a, 104a, 104b, 104c, 104
d), mirror 105 and four beam deflectors 132
(132a, 132b, 132c, 132d) and four beam collimators 134 (134a, 134b, 13d).
4c, 134d) and four lens arrays 110 (11
0a, 110b, 110c, 110d) and the transporting means 2
4.

In the processing apparatus 130, the operation from the light source 14 to the mirror 105 is the same as in each of the above-described examples. That is, the laser beam emitted from the light source 24 is, as shown in FIG.
Is divided into a plurality (four in the illustrated example) of laser beams corresponding to the width direction, and the corresponding optical modulators 1
The modulated light is reflected by a mirror 105 (not shown in FIG. 26) in a predetermined direction.

The laser beams reflected by the mirrors 105 enter the corresponding beam deflectors 132. The beam deflector 132 is an optical deflector, and deflects and scans the laser beam modulated by the optical modulator 104 in the lens array direction of the corresponding lens array 110.

Here, in the embodiment shown in the figure, the beam deflector 132 is an optical deflector having a scanning speed of about 50 kHz to 500 kHz in frequency and capable of changing the scanning speed in time series. For example, an AOD (acoustic optical deflector) or the like is preferably used. The beam deflector 132 is
It is driven by the corresponding signal source S (Sa to Sd), and changes the scanning speed by controlling the driving signal from the signal source S.

The laser beam deflected in the lens array direction of the lens array 110 by the beam deflector 132 is
The laser beam is incident on the corresponding beam collimator 134 and is converted into a laser beam parallel to the lens optical axis of the lens array 110.
Next, the light is incident / scanned on the corresponding lens array 110 to form an image on the tape T, and the tape T is processed. In addition,
As the beam collimator, various types of known types such as a combination of a normal coaxial spherical lens, a Galileo type, and a Kepler type can be used.

Here, as described above, the beam deflector 13
Reference numeral 2 denotes an optical deflector whose scanning speed is variable in a time series, so that the scanning time of the laser beam in each lens of the lens array 110, that is, the incident time of the laser beam to each lens of the lens array 110, is set for each lens. Can be changed. Further, the intensity of the laser beam is modulated by the optical modulator 104, and the on / off of the processing can be controlled. Accordingly, the processing control unit 136 controls the signal sources of the optical modulator 104 and the beam deflector 132,
By adjusting the modulation frequency of the optical modulator 104 and the scanning speed of the beam deflector 132, the number of processing points for each lens of the lens array 110 can be changed by a synergistic effect of both, and the processing line segment in the block can be reduced. Can be different from each other.

The above-described processing of the tape T according to the present invention may be performed at any time in the magnetic tape manufacturing process as long as the magnetic recording layer is formed. For example, before the tape is cut into a product width by a slitter. Or after cutting.

Although the evaluation reference tape and the method and apparatus for manufacturing the evaluation reference tape of the present invention have been described in detail above, the present invention is not limited to the above-described examples, and does not depart from the gist of the present invention. In the above, various improvements and changes may be made.

[0112]

As described above in detail, since the evaluation reference tape of the present invention has a concave portion in the magnetic recording layer,
By using this, the sensitivity correction of the dropout inspection machine and the evaluation of the magnetic recording / reproducing system of the magnetic tape can be performed according to the depth and size of the tape defect without destroying the evaluation reference tape. . Therefore, it is possible to properly grasp the performance of the dropout inspection machine, and to perform a more suitable dropout inspection, which absorbs the machine difference and the change with time, to perform better quality control of the magnetic tape, In addition, it is possible to quantitatively grasp the performance of the recording / reproducing system of the magnetic tape and to evaluate the suitable magnetic recording / reproducing system. Further, according to the manufacturing method and the manufacturing apparatus of the present invention, it is possible to efficiently manufacture the evaluation reference tape having such excellent characteristics.

[Brief description of the drawings]

FIGS. 1A and 1B are conceptual diagrams each showing an example of a groove (recess) formed in a magnetic recording layer of a reference tape for evaluation of the present invention.

FIGS. 2A, 2B and 2C are conceptual diagrams showing the shapes of grooves (recesses) formed in the magnetic recording layer of the evaluation reference tape of the present invention.

FIG. 3 is a conceptual diagram of an example of an apparatus for manufacturing a reference tape for evaluation of the present invention.

FIGS. 4A and 4B are conceptual diagrams of an example of a molding unit used in the evaluation reference tape manufacturing apparatus shown in FIG. 3;

FIGS. 5A and 5B are conceptual diagrams for explaining a multi-lens used in the manufacturing apparatus shown in FIG. 3;

FIG. 6 is a conceptual diagram for describing a multi-lens used in the manufacturing apparatus shown in FIG.

FIG. 7 is a conceptual diagram showing another example of the multi-lens used in the manufacturing apparatus shown in FIG.

FIGS. 8A, 8B, 8C, and 8D are conceptual diagrams of an example of a tape flattener used in the manufacturing apparatus shown in FIG.

FIG. 9 is a conceptual diagram of a part of another example of the evaluation reference tape manufacturing apparatus of the present invention.

10 is a conceptual diagram of an example of a multi-lens used in the apparatus for manufacturing the evaluation reference tape shown in FIG.

11 is a conceptual diagram of an example of a light amount adjusting unit used in the apparatus for manufacturing the evaluation reference tape shown in FIG.

FIG. 12 is a conceptual diagram of another example of the light amount adjusting means used in the apparatus for manufacturing the evaluation reference tape shown in FIG.

FIG. 13 is a conceptual diagram for explaining another example of the optical system used in the manufacturing apparatus shown in FIG.

14 is a conceptual diagram for explaining another example of the optical system used in the manufacturing apparatus shown in FIG.

FIG. 15 is a conceptual diagram of another example of the manufacturing apparatus of the present invention.

16A and 16B are schematic diagrams showing an example of a mask of the manufacturing apparatus shown in FIG.

17 is a conceptual diagram illustrating an example of an evaluation reference tape manufactured by the manufacturing apparatus illustrated in FIG.

FIG. 18 is a conceptual diagram of another example of the manufacturing apparatus of the present invention.

FIG. 19 is a conceptual diagram of another example of the manufacturing apparatus of the present invention.

FIG. 20 is a conceptual diagram showing another example of a groove (recess) formed in the magnetic recording layer of the evaluation reference tape of the present invention.

FIG. 21A is a conceptual diagram of another example of the manufacturing apparatus of the present invention, and FIG. 21B is a conceptual diagram for explaining the manufacturing apparatus shown in FIG.

22 is a conceptual diagram of a multi-lens lens of the manufacturing apparatus shown in FIG.

23A is a conceptual diagram of another example of the manufacturing apparatus of the present invention, and FIG. 23B is a conceptual diagram for explaining the manufacturing apparatus shown in FIG.

24 is a conceptual diagram of an example of a multi-pattern disk of the manufacturing apparatus shown in FIG.

FIG. 25 is a conceptual diagram of another example of the manufacturing apparatus of the present invention.

FIG. 26 is a conceptual diagram illustrating the manufacturing apparatus of FIG. 25.

[Explanation of symbols]

10, 50, 60, 82, 100, 120, 130 Manufacturing apparatus 12 Light source 14 Pulse modulator 16, 105 Mirror 18 Beam expander 20 (Beam profile) shaper 22, 74, 108 Multi-lens 24 Transporting means 26, 28 Guide roller 30 Tape flattener 32 AOM 34, 40 Imaging lens 36 Driver 38 Division means 52 LED array 54, 110 Lens array 62 X-direction scanning element 64 Y-direction scanning element 66, 92 Convergent lens 70, 106 Sheet beam shaper 72 (72a, 72b) Light amount adjusting means 76 Aperture 80 Slit 84 Intensity modulator 86 Beam waist position adjusting means 88 Beam shaper 90 Mask 94 Aperture 102 Beam splitter 104 Optical modulator 112 Spacer 122 Multi pattern Disk 124 slit 126 motor 132 beam deflector 134 beam collimator

Claims (4)

[Claims] 1. A reference tape for evaluation, characterized in that the magnetic recording layer has a recess formed by processing the magnetic recording layer. 2. A laser beam in a visible region and an ultraviolet region of a laser beam are incident on a magnetic recording layer of the magnetic tape while conveying the magnetic tape in a longitudinal direction, and the concave portion is formed by processing the magnetic recording layer. Forming a reference tape for evaluation. 3. A laser beam incident on a magnetic recording layer of the magnetic tape, a plurality of laser beams divided and imaged by a multi-lens, a plurality of laser beams divided by a dividing means, an optical scanning element. 3. The method for manufacturing a reference tape for evaluation according to claim 2, wherein the laser beam is at least one of a laser beam scanned in step (1) and a plurality of laser beams divided and imaged by using a dividing unit and a multi-lens lens together. 4. A light source for emitting at least one of a visible region laser beam and an ultraviolet region laser beam, an optical system for emitting a laser beam emitted from the light source to a predetermined processing position, and: Transport means for transporting the magnetic tape in the longitudinal direction with the magnetic recording layer facing upstream of the optical path of the laser beam, and means for ensuring the flatness of the magnetic tape transported by the transport means at the processing position An apparatus for manufacturing a reference tape for evaluation, comprising: