JP2001053122A5 - - Google Patents

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Publication number
JP2001053122A5
JP2001053122A5 JP2000152942A JP2000152942A JP2001053122A5 JP 2001053122 A5 JP2001053122 A5 JP 2001053122A5 JP 2000152942 A JP2000152942 A JP 2000152942A JP 2000152942 A JP2000152942 A JP 2000152942A JP 2001053122 A5 JP2001053122 A5 JP 2001053122A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000152942A
Other languages
Japanese (ja)
Other versions
JP2001053122A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000152942A priority Critical patent/JP2001053122A/ja
Priority claimed from JP2000152942A external-priority patent/JP2001053122A/ja
Publication of JP2001053122A publication Critical patent/JP2001053122A/ja
Publication of JP2001053122A5 publication Critical patent/JP2001053122A5/ja
Pending legal-status Critical Current

Links

JP2000152942A 1999-06-02 2000-05-24 表面電位に基づく孤立パターン検出方法及びその装置 Pending JP2001053122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000152942A JP2001053122A (ja) 1999-06-02 2000-05-24 表面電位に基づく孤立パターン検出方法及びその装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15532699 1999-06-02
JP11-155326 1999-06-02
JP2000152942A JP2001053122A (ja) 1999-06-02 2000-05-24 表面電位に基づく孤立パターン検出方法及びその装置

Publications (2)

Publication Number Publication Date
JP2001053122A JP2001053122A (ja) 2001-02-23
JP2001053122A5 true JP2001053122A5 (enExample) 2005-11-24

Family

ID=26483355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000152942A Pending JP2001053122A (ja) 1999-06-02 2000-05-24 表面電位に基づく孤立パターン検出方法及びその装置

Country Status (1)

Country Link
JP (1) JP2001053122A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100725453B1 (ko) 2005-11-29 2007-06-07 삼성전자주식회사 기판의 스캐닝 방법, 결정 특성 검사 방법 및 장치

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