JP2001053122A5 - - Google Patents
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- Publication number
- JP2001053122A5 JP2001053122A5 JP2000152942A JP2000152942A JP2001053122A5 JP 2001053122 A5 JP2001053122 A5 JP 2001053122A5 JP 2000152942 A JP2000152942 A JP 2000152942A JP 2000152942 A JP2000152942 A JP 2000152942A JP 2001053122 A5 JP2001053122 A5 JP 2001053122A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000152942A JP2001053122A (ja) | 1999-06-02 | 2000-05-24 | 表面電位に基づく孤立パターン検出方法及びその装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-155326 | 1999-06-02 | ||
| JP15532699 | 1999-06-02 | ||
| JP2000152942A JP2001053122A (ja) | 1999-06-02 | 2000-05-24 | 表面電位に基づく孤立パターン検出方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001053122A JP2001053122A (ja) | 2001-02-23 |
| JP2001053122A5 true JP2001053122A5 (de) | 2005-11-24 |
Family
ID=26483355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000152942A Pending JP2001053122A (ja) | 1999-06-02 | 2000-05-24 | 表面電位に基づく孤立パターン検出方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001053122A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100725453B1 (ko) | 2005-11-29 | 2007-06-07 | 삼성전자주식회사 | 기판의 스캐닝 방법, 결정 특성 검사 방법 및 장치 |
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2000
- 2000-05-24 JP JP2000152942A patent/JP2001053122A/ja active Pending