JP2001052633A - Flat-plate display device with high aspect ratio spacer and manufacture of display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flat plate type display device including spacers having a high aspect ratio equipped with supporting walls and legs integrally formed through photo-exposure of a photosensititive substance and an etching process. SOLUTION: This flat plate type display device comprises an emitter part 15 including a lower base board 12 whereon a cathode electrode 14 and gate electrode 18 are formed, a display part 20 including an upper base board 22 whereon an electrode as transparent anode 24 coated with a fluorescent substance is formed, supporting walls 32a having a high aspect ratio provided for keeping the specified spacing between the emitter part 15 and display part 20, a plurality of spacers 32 having at least one supporting leg 32b protruding to the left and right orthogonal to the supporting walls 32a for supporting the walls 32a, and a sealing member 54 for vacuum sealing the peripheral zone of the emitter part 15 and display part 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display and a method of manufacturing the same, and more particularly, to a high aspect ratio having an improved structure for maintaining a space between an upper substrate and a lower substrate. Field Emission Display (F) including a spacer
ED) and a method for producing the same.

[0002]

2. Description of the Related Art Recently, a CRT (Cathode), which is a universal display device, has been developed due to an increase in the size of a display device and a trend of high resolution.
de Ray Tube) to LCD (Liquid)
Crystal Display), ELD (Elect
tro Luminescent Display),
PDP (Plasma Display Panel)
l) or VFD (Vacuum Fluoresc)
Research and development of a new flat panel display such as an ent display has been actively conducted.

[0003] However, the flat panel display described above has both advantages and disadvantages at the same time, but the FED, which is one of the new flat panel displays, can solve the disadvantages of another flat panel display described above almost simultaneously. Expected.

The FED has the advantage that the structure of the internal electrodes is simple, and the power consumption is small due to the cold cathode method. Also,
The FED has advantages such as high-speed operation, multiplex addressing, high resolution, optical viewing angle, high luminous intensity, and perfect color performance by using an internal support.

The FED generally includes a lower substrate, an upper substrate disposed to face the lower substrate, and a spacer disposed between the lower substrate and the upper substrate. A cathode electrode and a gate electrode having an emitter chip are formed on the lower substrate, and an anode electrode coated with a fluorescent material is formed on the upper substrate. In the FED, a spacer is interposed between the upper substrate and the lower substrate to be maintained at a predetermined interval, and the inside thereof is maintained at a high vacuum. When a strong electric field is formed between the cathode electrode, the gate electrode, and the anode electrode while maintaining a high vacuum between the upper substrate and the lower substrate, electrons are emitted from the emitter chip by quantum emission due to field emission due to field emission. Released.

A conventional FED spacer is formed by stacking a sealant or the like at a predetermined height by a screen printing technique and then sintering the sealant or by arranging pre-processed glass balls at predetermined intervals. . In addition, in order to form a spacer between the upper and lower substrates, an optical fiber is grown, or is stacked by a plating method using a photoresistor pattern, a groove is formed in the substrate and inserted into the groove, or a rod-shaped glass or the like is used. There was a method of standing ceramic.

However, in the method of forming the spacer using the screen printing technique, when the height of the spacer is 200 μm or more, the line width is widened and there are many restrictions in use. Also in the method using the glass ball (see U.S. Pat. No. 5,562,517), it is difficult to use the glass ball because its shape ratio is only one. Also, the technique of growing optical fibers is difficult to cut and fix, and the plating process is very complicated.

Further, a groove is formed in the upper substrate or the lower substrate disclosed in US Pat. No. 5,578,325 and US Pat. No. 5,708,325 to form a bar-shape.
In the method of forming a spacer having a shape of "aped" or "T", it is very difficult to dig a groove having a shape corresponding to the spacer in the upper substrate or the lower substrate. Also, as a method of digging a groove, there is a problem that it is very difficult to derive an electrode, and when the groove is formed in an upper substrate,
There is a difficulty that makes it almost impossible to spin coat the phosphor on its surface.

In the method in which a glass rod is set up between the two substrates and used as a spacer, the glass rod may be bent during sintering, or the emitter chip may be damaged if the glass rod falls down.

Generally, the spacer of the FED is located within an active region of the element and supports both substrates at a predetermined interval, and therefore has a strength enough to withstand the atmospheric pressure which is an external pressure. Must have. In addition, it is preferable that a structure that minimizes an area occupied by the spacer between the two substrates to suppress the spacer from affecting the display area is maximized.

However, when the width of the spacer is increased to withstand the external pressure, the area occupied by the spacer is increased, thereby affecting the display area. On the contrary, the influence on the display area is minimized. Therefore, when the width is reduced, the strength of the spacer to withstand external pressure is reduced. In particular, when a high-voltage phosphor is used, the height of the spacer is 1000
In such a case, the spacer has to have a shape ratio (height / width) of 10 or more, which is required to be at least μm.

[0012]

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, and a first object of the present invention is to provide a method for exposing and etching a photosensitive material. It is an object of the present invention to provide a flat panel display including a spacer having a high aspect ratio having a support wall and a support foot formed integrally.

It is a second object of the present invention to provide a method of manufacturing a flat panel display which is particularly suitable for a flat panel display including the high aspect ratio spacer.

A third object of the present invention is to provide a support column and a connecting wall having different heights by tilt exposure of a photosensitive material, and to allow smooth exhaust in an internal vacuum through a space between an emitter unit or a display unit. An object of the present invention is to provide a flat panel display including a lattice spacer.

A fourth object of the present invention is to provide a method of manufacturing a flat panel display device which is particularly suitable for a flat panel display device including the lattice spacer.

[0016]

In order to achieve the above-mentioned first object of the present invention, the present invention provides an emitter including a lower substrate having a cathode electrode and a gate electrode formed thereon, and a phosphor material coated thereon. A display unit including an upper substrate on which a transparent anode electrode is formed, a support wall having a high aspect ratio for maintaining the emitter unit and the display unit at a predetermined interval, and a support wall for supporting the support wall. A plurality of spacers including at least one or more support feet protruding leftward and rightward in a vertical direction, and a sealing member for vacuum-sealing a periphery of the emitter and the display. Provided is a flat panel display characterized by the following.

The spacer is formed by exposing and etching a photosensitive material. The support wall has a rectangular, hexagonal or ladder-shaped cross section, and the support foot has a rectangular shape by vertical exposure. It has a cross section or a triangular cross section by tilt exposure. When the support wall has a ladder-shaped cross section, the support wall is arranged such that the narrow upper end faces the display unit.

According to one embodiment of the present invention, the length of the support wall of the spacer is longer than the length of the display area of the display unit, and the support feet are on both sides of the support wall located in a peripheral area outside the display area. The spacer is formed in a portion and has a one-letter shape longer than the display area.

According to another embodiment of the present invention, the length of the support wall of the spacer is shorter than the length of the display area of the display unit, and the support foot is formed of a support wall located in a peripheral area outside the display area. The spacer is formed on one side and has a one-letter shape shorter than the display area.

According to still another embodiment of the present invention, the length of the support wall of the spacer is shorter than the length of the display area of the display unit, and a plurality of support feet are provided in the display area in the entirety of the support wall. And the spacer has a shape of a fish bone projected at a predetermined interval.

Preferably, a plurality of fixing jigs having a groove into which one side of a support wall of at least one of the spacers is inserted to fix each of the spacers are formed in a peripheral region of the display unit or the emitter unit. Is done.

The support wall of the spacer has a height equal to or higher than the height of the support foot.

In order to achieve the second object of the present invention, the present invention provides an emitter unit including a lower substrate on which a cathode electrode and a gate electrode are formed, and a transparent anode coated with a fluorescent material. Providing a display unit including an upper substrate on which electrodes are formed, exposing and etching a photosensitive material, and vertically supporting the support wall having a high aspect ratio and supporting the support wall. Forming a plurality of spacers having at least one or more support feet protruding leftward and rightward in a direction, and arranging the plurality of spacers at a predetermined interval between the emitter unit and the display unit. And a step of sealing the periphery of the emitter section and the display section with a sealing member, and evacuating between the emitter section and the display section to form a vacuum state. To provide a method of manufacturing location.

The step of forming the spacer includes providing a photosensitive material having a predetermined thickness, a support line having a predetermined length, and extending leftward and rightward in a direction perpendicular to the support line. Disposing an exposure mask on the photosensitive material on which a pattern having at least one or more auxiliary lines having a shorter length than the support line is formed, and disposing the photosensitive material through the exposure mask. Exposing, heat-treating the exposed photosensitive material, and removing the exposed area of the heat-treated photosensitive material by an etching method to form along the support line. Simultaneously forming the supporting wall and the supporting foot formed along the auxiliary line.

According to one embodiment of the present invention, the step of exposing the photosensitive material includes tilting the angle θ (θ <tan (w
/ 2h); where w is the width of the auxiliary line and h is the thickness of the photosensitive material, which is performed by tilt exposure, or a tilt angle θ (θ> θ left and right with respect to the auxiliary line).
Here, tan (w / 2h); where w is the width of the auxiliary line and h is the thickness of the photosensitive material, is performed by tilt exposure.

According to another embodiment of the present invention, the step of exposing the photosensitive material includes tilting the support line at right and left with respect to a tilt angle θ ₁ (θ ₁ <tan (w / 2h); Is the width of the auxiliary line, h is the thickness of the photosensitive material, and the upper surface of the photosensitive material is subjected to tilt exposure, and a tilt angle θ ₂ (θ ₂ > ta) on the left and right with respect to the auxiliary line.
n (w / 2h); where w is the width of the auxiliary line, and h is the thickness of the photosensitive material, and the upper surface of the photosensitive material is subjected to tilt exposure.

Preferably, after the step of exposing the photosensitive material, the exposing mask is arranged on the bottom surface of the photosensitive material in correspondence with the exposure of the top surface, and the exposing mask is arranged on the bottom surface of the photosensitive material. The tilt angle θ ₁ (θ ₁ <ta) left and right with respect to the support line through the exposure mask
n (w / 2h): where w is the width of the auxiliary line and h is the thickness of the photosensitive material, and the method further includes tilt-exposing the bottom surface of the photosensitive material.

As the photosensitive material, SiO ₂ , Li _{2
O, Al 2 O 3, Na} 2 O, Ag 2 O, using a photosensitive glass containing CeO _2, In this case, the thickness of the photosensitive material is about approximately 0.2 to 2 mm.

Preferably, the step of providing the display unit includes a plurality of fixing jigs having an insertion groove in a peripheral region of the display unit, and at least one or more jigs for aligning the display unit and the emitter unit. The method may further include simultaneously forming an alignment mark, wherein the plurality of spacers are fixedly arranged by inserting one side of the spacer into an insertion groove of the fixing jig.

According to another aspect of the present invention, there is provided an emitter including a lower substrate on which a cathode electrode and a gate electrode are formed, and a transparent anode electrode coated with a fluorescent material. A display unit including the upper substrate, a plurality of support columns having a high aspect ratio, located at intersections of horizontal and vertical lines at predetermined intervals in a display area of the display unit, and a pair of the support columns on the horizontal and vertical lines. Provided is a flat panel display device comprising: a grid spacer including a connection support wall formed between support columns; and a sealing member for vacuum-sealing a periphery of the emitter unit and the display unit.

The grid-type spacer is formed by tilt exposure and etching of a photosensitive material, and the connecting support wall has a lower height than the support pillar.

In order to achieve the fourth object of the present invention, the present invention provides a step of providing an emitter unit including a lower substrate on which a cathode electrode and a gate electrode are formed; Providing a display unit including an upper substrate on which a transparent anode electrode is formed; and a plurality of support columns having a high aspect ratio and located at intersections of horizontal and vertical lines at predetermined intervals in a display area of the display unit. Forming a grid-shaped spacer by tilt exposure and etching processes of a photosensitive material, comprising a plurality of connecting support walls formed between the pair of support columns on the horizontal and vertical lines; and Fixing the grid-shaped spacer between the display unit and the display unit, and sealing the periphery of the emitter unit and the display unit with a sealing member, and evacuating the inside to form a vacuum. To provide a method of manufacturing a flat panel display that.

Preferably, the step of forming the spacer includes providing a photosensitive material having a predetermined thickness, arranging an exposure mask having a lattice pattern formed on the photosensitive material. Tilt-exposing the photosensitive material on the top and bottom surfaces through front and back and left and right through an exposure mask, heat-treating the exposed photosensitive material, and exposing the exposed region of the heat-treated photosensitive material. Removed in the etching process, a plurality of support columns having a high aspect ratio and located at the intersection of horizontal and vertical lines at a predetermined interval in the display area of the display unit, and a pair of support columns on the horizontal and vertical lines And simultaneously forming a connecting support wall having a lower height than the support post. In this case, in the step of performing the tilt exposure, the tilt angle θ is larger than tan (w / 2h) (where w is the line width of the lattice pattern and h is the thickness of the photosensitive material). w / h).

[0034]

The spacer according to the present invention having such a structure has a supporting wall having a high aspect ratio and has supporting feet at the same time, so that it can be set up independently and can be easily fixed, and the height of the supporting wall and the supporting feet is high. Are different from each other, so that smooth evacuation is possible at the time of internal vacuum.

The above objects and other features and advantages of the present invention will become apparent from the following description of some preferred embodiments of the present invention to which reference is now made.

[0036]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a view showing a sectional structure of a field emission display according to the present invention. FIG.
In the above, reference numeral 10 denotes an emitter section or an emission section;
0 is an anode unit or a display unit.

Referring to FIG. 1, the emitter section 10 includes a lower glass substrate 12, a cathode electrode 14, an insulating layer 16, and a gate electrode 18. The cathode electrode 14 is formed on the lower glass substrate 12, and the insulating layer 16 is formed on the cathode electrode 14. A hole 17 in which the emitter chip 15 is located is formed in the insulating layer 16, and a part of the cathode electrode 14 is exposed through the hole 17. Insulating layer 16
An emitter tip 15 is formed on the exposed cathode electrode 14 in the hole 17. Emitter tip 15
Is a microchip, preferably having a conical or wedge shape.

The display section 20 is composed of an upper transparent glass substrate 2
2, including an anode electrode 24 and a fluorescent material 26; After the anode electrode 24 and the fluorescent material 26 are sequentially formed on the upper glass substrate 22, the upper glass substrate 22 is arranged to face the lower glass substrate 12. The glass substrate 22 is transparent, and the anode electrode 24 is also made of ITO (Indium).
It is formed of a transparent conductor such as Tin Oxide.

A predetermined distance must be maintained between the emitter section 10 and the display section 20. Emitter section 10
The space between the display and the display unit 20 is maintained in a high vacuum state of about 10 ⁻⁷ torr. When a high voltage is applied to the cathode electrode 14 and the anode electrode 24, a high electric field is formed between the emitter tip 15 and the anode electrode 24. Electrons are emitted from the surface of the emitter chip 15 to the space between the emitter section 10 and the display section 20 by field emission due to the turnover phenomenon. The emitted electrons are supplied to the anode electrode 24.
At a high speed, and the collision energy at this time causes visible light to be emitted from the collision portion of the fluorescent material 26.

The space between the emitter section 10 and the display section 20 is maintained in a high vacuum state, and the upper and lower substrates 12 and 22 are subjected to atmospheric pressure, which is an external pressure, respectively. A spacer must be formed between the emitter unit 10 and the display unit 20 to overcome the deformation force due to the difference between the atmospheric pressure and the internal pressure. In particular, when a high voltage is to be used, it is desirable that the height of the spacer is 1 mm (1000 μm) or more and the aspect ratio (ratio of height to width) is 10 or more. According to the present invention, such a spacer is made of a photosensitive material such as a photosensitive glass or a photosensitive ceramic having a thickness of about 1 mm through a photolithography process.

FIG. 2 is a plan view of a field emission display device including a full-bar shape spacer according to an embodiment of the present invention, and FIG. 3 is a half-shape of a field emission display according to another embodiment of the present invention. half-bar shape
e) shows a planar structure of a field emission display device including a spacer, and FIG. 4 shows a fish bone shape (r) according to another embodiment of the present invention.
ib shape) shows a planar structure of a field emission display including a spacer.

Each of the spacers 32, 34, 36 is provided with support walls 32a, 34a, 36a extending in the lateral direction with respect to the display unit 20 or the emitter unit 10, and the support walls 32a, 3a, 3a.
Support legs 32b, 34b, 36b projecting right and left in the direction perpendicular to 4a, 36a are included.

The fluorescent substance 26 formed on the display section 20 is arranged independently in each pixel in the display area 50 in a matrix. Accordingly, as shown in FIGS. 2 to 4, the spacers 32, 34, and 36 are located between the pixels in the display area 50 so as not to overlap with the fluorescent material 26.

The support feet 3 of the one-piece spacers 32, 34
One end on which the 2b and 34b are formed is located in a peripheral area 52 defined between the display area 50 and the sealing member 54, respectively. The one-piece spacers 32 and 34 are the display unit 2
The support feet 32b, 34b arranged on the zero at a constant pitch, for example, at intervals of several tens of mm, and located in the peripheral area 52, can be easily erected without falling left and right. The support legs 32b, 3
An adhesive such as a sealant is applied to 4b, and the linear spacers 32 and 34 are fixed on the display unit 20.

Since the full straight spacer 32 has both side edges extending to the peripheral area 52 across the display area 50, the length thereof is, for example, 5 cm or more, which is very large compared to a width of several tens μm. It may be long and bend within the display area 50. In order to avoid such a problem, the half linear spacer 3 whose length is reduced to half.
4 may be desirable. In FIG. 3, the half-shaped spacers 34 are located on the same line, but alternatively, the half-shaped spacers 34 may be arranged to cross each other.

The fish bone spacers 36 are arranged at predetermined intervals in an area between pixels in the display area 50. The fish bone spacer 36 has a shorter length when compared with the straight spacers 32 and 34, and a plurality of support feet 36b are formed at predetermined intervals over the entire support wall 36a. It is preferable that the distance between the support feet 36b is a pixel-to-pixel interval.

The spacer disposed between the emitter section 10 and the display section 20 may be a full linear spacer 32, a half linear spacer 34, a fish bone spacer 36, or a combination thereof. Can also be done. In this case, the spacers are arranged while maintaining an appropriate interval so that a specific region which is isolated by these spacers and is not evacuated is not generated in the display region 50 during evacuation.

The alignment mark or align key 40 is used to assemble the emitter section 10 and the display section 20.
When the thickness of the upper or lower substrate 22 or 12 is 1 mm or more, it is selected to align the two substrates 22 and 12.

FIG. 5 is a plan view showing a field emission display device including a full-shaped spacer having a fixing jig according to another embodiment of the present invention, and FIG. 6 is a plan view showing a fixing device according to another embodiment of the present invention. 1 shows a planar structure of a field emission display including a half-shaped spacer having a jig.

It is desirable to use a fixing jig 38 as shown in FIGS. 2 and 6 in order to more securely fix the linear spacers 32 and 34 on the substrate. The fixing jig 38 is installed in the peripheral area 52 and has an insertion groove 38a into which one end of the straight spacers 32 and 34 is inserted. The fixing jig 38 shown in FIGS. 2 and 6 may have a single insertion groove 38a or a plurality of insertion grooves. After one end of the one-piece spacers 32, 34 is inserted into the insertion groove 38a of the fixing jig 38, it is fixed with an adhesive such as a sealant.

It is preferable that the fixing jig 38 and the alignment mark 40 are simultaneously formed on the emitter section 10 and the display section 20 with an insulator or a photosensitive material by a usual photolithography technique.

According to the present invention, the linear spacer may have various structures such as a square, a triangle, a ladder, and a hexahedron as shown in FIGS.

The spacer according to the first embodiment of the present invention shown in FIG. 7 is formed by vertical exposure so that the cross section of the support wall and the support foot has a square shape. Therefore, the support wall 32a and the support foot 32b have the same height.

The supporting feet of the spacer according to the second embodiment of the present invention shown in FIG. 8 have a triangular cross section. In this case, the support wall 32a has a rectangular cross section. The spacer according to the second embodiment of the present invention is manufactured by the method shown in FIG.

Referring to FIG. 11, the exposure mask 60 includes an auxiliary line 64 for forming a support foot and a support line 62 for forming a support wall. In the mask pattern of the exposure mask 60, θ (θ
> Tan (w / 2h), where w means the width of the auxiliary line 64 and h means the thickness of the photosensitive material 70) at a tilt angle along the A and B directions. Is subjected to tilt exposure, the photosensitive material 70 is divided into an exposed area and an unexposed area. That is, of the non-exposed areas below the auxiliary line 64, the area serving as the support feet has a triangular cross section, and the area serving as the support wall below the support line 62 has a quadrangular cross section. Therefore, the height of the support foot is formed lower than the height of the support wall.

The spacer according to the third embodiment of the present invention shown in FIG. 9 has a support wall 32a having a ladder-shaped cross section and support legs 32b having a triangular cross section.

Referring to FIG. 11, in the mask pattern of the exposure mask 60, the A direction and the B direction are set at a tilt angle θ ₁ (θ ₁ > tan (w / 2h)) on the left and right around the auxiliary line 64.
A first tilt exposure of the photosensitive material 70 along the direction,
Next, the tilt angle θ ₂ (θ ₂ <tan (w /
2h)), when the secondary tilt exposure is performed, the supporting feet (32
The cross section of the region to be b) is formed in a triangular shape and the support wall 32
The cross section of the region that becomes a is formed in a ladder shape. The ladder-shaped support wall 32a is arranged such that the narrow upper portion is in contact with the display portion 20 and the wide lower portion is in contact with the emitter portion 10 in order to minimize the area occupied by the spacers in the display region 50. Benefit.

The spacer according to the fourth embodiment of the present invention shown in FIG. 10 includes a support wall 32a having a hexagonal cross section and support legs 32b having a triangular cross section.

Referring to FIG. 11, in the mask pattern of the exposure mask 60, the A direction and the B direction are set at a tilt angle θ ₁ (θ ₁ > tan (w / 2h)) on the left and right around the auxiliary line 64.
After the first tilt exposure of the photosensitive material 70 along the direction, then the photosensitive material 70 at a tilt angle θ ₂ (<tan (w / 2h)) along the C and D directions around the support line 62. Is subjected to secondary tilt exposure. Next, when the exposure mask 60 is exposed on the bottom surface of the photosensitive material 70 in the same manner as the secondary tilt exposure, the cross section of the region that becomes the support foot 32b is formed as a triangle and the cross section of the region that becomes the support wall 32a is formed as a hexahedron. You.

A method of manufacturing a flat panel display device having the above-described spacer according to an embodiment of the present invention is as follows.

First, the emitter portion 10 having the cathode electrode 14 and the gate electrode 18 formed on the lower glass substrate 12 and the transparent anode electrode 24 having the fluorescent material 26 coated on the upper glass substrate 22 were formed by a usual method. The display unit 20 is provided.

Further, after chromium is applied to a quartz substrate, the chromium is patterned and patterned at a constant pitch of, for example, 60 mm.
An exposure mask 60 corresponding to a full linear spacer, a half linear spacer, and a fish bone spacer having a line width of 0 μm and a constant line width, for example, 30 μm, is prepared.

Next, a thickness of about 200 to 2,000 μm,
Preferably, a photosensitive material having a thickness of 1,000 μm is provided. Preferably, the photosensitive material 70 is SiO ₂ approximately 75-85%, Li ₂ O approximately 7 to 11%, _Al 2 _{O 3} substantially 3
６6%, about 1 to ₂ % of Na ₂ O, about 0.05 to about Ag ₂ O
This is a photosensitive glass having a typical composition of 0.15% and CeO _{2 of about} 0.01 to 0.04%.

An exposure mask 60 is aligned with the photosensitive material 70, and the photosensitive material 70 is exposed to ultraviolet light having a wavelength of about 312 nm. As described above, vertical or tilt exposure is performed according to the desired cross-sectional structure of the spacer. The following photochemical reaction occurs in the exposed area.

[0065] ^{Ce 3+ + hv (312nm) →} Ce 4+ + e - Ag + + e - → Ag in this way exposure is completed, at approximately 500 ° C. of about gradually raising the temperature to put the photosensitive material 70 into the furnace After the primary heat treatment for about one hour, the temperature is gradually raised to about 600 ° C., and the secondary heat treatment is performed for about one hour. Subsequent to the heat treatment process, the photosensitive material 70 is put into an approximately 10% HF solution, and the exposed portion where the photochemical reaction has occurred is removed by a wet etching process.

When the substrate is washed and dried after the etching process is completed, the supporting wall corresponding to the supporting line of the mask pattern has a rectangular, ladder-shaped cross section as shown in FIGS. Alternatively, the supporting foot, which is a hexahedron or the like and corresponds to the auxiliary line, is formed in a square or a triangle. Thus, a one-piece spacer having a support foot and a support wall is obtained.

After the obtained linear spacers are arranged at appropriate intervals on the display section 20 or the emitter section 10, they are fixed with an adhesive such as a sealant. When the fixing jig 38 is formed, the jig 38 is inserted into the insertion groove 38a of the fixing jig 38 and then fixed with a sealant.

The display unit 2 to which the spacer is fixed as described above
Another substrate is aligned with the zero or emitter portion 10 and placed so as to face each other, and sealed along the periphery of the two substrates with a sealing member such as a sealant. At this time, all the remaining parts except the exhaust holes for evacuating the inside are sealed. After a glass tube is connected to the exhaust hole at the time of the sealing process, the internal air between the display unit 20 and the emitter unit 10 is pumped to the outside through a vacuum tube through this glass tube to a high vacuum of about 10 ⁻⁷ torr. After that, the glass tube is finally tip-offed to complete a flat panel display.

FIG. 12 is a plan view showing a field emission display including a grid spacer according to another embodiment of the present invention. In the flat panel display according to the present embodiment, other parts except the lattice spacer 80 are the same as the above-described flat panel display, so the same parts are denoted by the same reference numerals, and detailed description will be omitted.

FIG. 13 is a partially enlarged perspective view of the lattice spacer of FIG. 12, FIG. 14 is a partially enlarged plan photograph of the lattice spacer of FIG. 12, and FIG. 15 is a partially enlarged side view of the lattice spacer of FIG. It is a photograph.

In FIGS. 12 and 13, the grid spacer 80 has a grid or mesh shape. A support column 82 is formed at each intersection, and a connecting wall 84 is formed between the support columns 82 to fix and support the support column 82. The grid spacer 80 is disposed in the display area 50.

The connecting wall 84 of the lattice spacer 80 has a lower height than the supporting column 82. Accordingly, the display column 20 and the emitter unit 10 are maintained at a predetermined interval by the support columns 82, and the lattice-shaped connecting wall 84 has the upper end and the lower end thereof at the display unit 20.
Since the display regions 50 are connected to each other through the spaces because the display regions 50 are separated from the surface of the emitter unit 10 and cannot reach, the spaces are not completely isolated. Accordingly, such a structure facilitates the evacuation of the inside of the flat panel display at the time of vacuum.

FIGS. 14 and 15 are enlarged photographs of spacers obtained by tilt-exposing a photosensitive material having a thickness of about 1000 μm by the method according to the present invention. The grating pitch is approximately 600 μm, the line width is approximately 60 μm, and the result of tilt exposure and etching at approximately 11 ° front, rear, left and right on the top and bottom surfaces of the photosensitive material is shown. The upper and lower ends of the partition are located approximately 300 μm from the upper and lower ends of the support column, and the height of the partition is approximately 400 μm.

A method of manufacturing a field emission display according to a preferred embodiment of the present invention will be described with reference to FIGS.

First, as shown in FIG. 16, after chromium is applied to a quartz substrate, it is patterned and
An exposure mask 90 having a grid pattern 92 having a thickness of 0 μm and a line width of 60 μm is prepared.

An exposure mask 90 is aligned with the photosensitive material 70, and the photosensitive material is exposed to ultraviolet light having a wavelength of about 312 nm. As shown in FIG. 17, first, the left-right direction (A ′
And B ′ direction), the tilt exposure is performed at an angle of about 11 °.
Exposure is performed up to a 35 ° angle B ′ region.

Referring to FIG. 17, a portion that is not exposed during the tilt exposure in the left-right direction extends from immediately below the pattern 92 of the exposure mask 90 to the intersection of the incident light in the directions A ′ and B ′ near the bottom surface of the photosensitive material 70. That is, all the remaining portions are exposed except for the inverted triangular portion.

In the same manner, when the photosensitive material 70 is subjected to tilt exposure in the front-rear direction, as shown in FIG. 16, the photosensitive material 70 is exposed up to the 45 ° C 'region and the 135 ° D' region shown by oblique lines. . Accordingly, an unexposed area is formed in a wedge shape below the horizontal and vertical lines 92a, but at the intersection 9
In the case of 2b, an unexposed region remains in the shape of a quadrangular prism.

As described above, when the exposure on the upper surface of the photosensitive material 70 is completed, the exposure mask 90 is replaced with the photosensitive material 70.
Are rearranged on the bottom surface of the substrate so as to correspond to the above-described exposure arrangement on the top surface. When tilt exposure is performed in front, rear, left, and right directions as shown in FIG. Until the crossing point of the incident light in the direction, the portion which is not exposed by the right and left tilt exposure, that is, the remaining portion is exposed except for the triangular portion.
As a result, a diamond-shaped unexposed area remains along the grid-like horizontal and vertical lines 92a, and a square pillar-shaped unexposed area remains at the intersection 92b.

In order to perform the tilt exposure on the upper surface and the lower surface of the photosensitive material 70 so that the diamond-shaped cross section remains, the tilt angle θ is larger than tan (w / 2h) and tan (w /
Conditions smaller than h) must be satisfied.

When the left and right tilt exposure on the top and bottom surfaces of the photosensitive material 70 is completed, the photosensitive material 70 is placed in a furnace and heat-treated in the manner described above. After the heat treatment, the photosensitive material 70 is put into a 10% HF solution, and the determined exposed portions are removed by wet etching.

After washing and drying after the completion of the etching process, a portion corresponding to the line 92a of the grid pattern 92 has a rhombic connecting wall 84 as shown in FIG.
The portion corresponding to the intersection 92b of the pattern 92 is formed by the support pillar 82. Accordingly, a spacer 80 having a three-dimensional lattice shape as a whole is obtained.

The obtained grid spacer 80 is displayed on the display unit 20.
Alternatively, another substrate is arranged on the emitter unit 10, another substrate is aligned with the substrate on which the spacer 80 is installed, and the two substrates are arranged so as to face each other, and sealed along a peripheral portion of the two substrates with a sealing member such as a sealant. At this time, all the remaining portions are hermetically sealed, leaving an exhaust hole for evacuating the inside. A glass tube is connected to the exhaust hole during the sealing process. The internal air is pumped outside to the vacuum pump through the glass tube so that the space between the display unit 20 and the emitter unit 10 is 10 ⁻⁷ t.
After a high vacuum of about orr is reached, glass flat tubes are finally chipped up to complete a flat panel display.

[0084]

As described above, according to the present invention, in a flat panel display device having an emitter portion and a display portion, a spacer for maintaining a space between the emitter portion and the display portion is made of a photosensitive material. The assembly is easy because the spacer can be easily erected by its own supporting foot without any additional structure during the assembly in order to manufacture and install it on a substrate later with a simple structure.

Further, since the structures of the supporting columns and the connecting walls or the supporting walls and the supporting feet of the spacers having different heights can be simultaneously manufactured by tilt exposure, the exhaust of the internal air can be facilitated.

Further, a spacer for an apparatus using a high-voltage fluorescent material required to have a shape ratio of 10 or more can be easily obtained. It is possible to produce a display without damaging the material at all.

Although the present invention has been described in detail with reference to embodiments, the present invention is not limited to the embodiments, and any person having ordinary knowledge in the technical field to which the present invention belongs may depart from the spirit and spirit of the present invention. Rather, the invention could be modified or changed.

[Brief description of the drawings]

FIG. 1 is a diagram showing a cross-sectional structure of a field emission display device.

FIG. 2 is a plan view illustrating an exemplary embodiment of a field emission display including a full-shape spacer according to the present invention;

FIG. 3 is a plan view illustrating an exemplary embodiment of a field emission display including a half-shaped spacer according to the present invention;

FIG. 4 is a plan view showing an embodiment of a field emission display including a fish bone spacer according to the present invention;

FIG. 5 is a plan view illustrating an exemplary embodiment of a field emission display device including a full linear spacer having a fixing jig according to the present invention;

FIG. 6 is a plan view illustrating a field emission display device including a half-shaped spacer having a fixing jig according to an embodiment of the present invention;

FIG. 7 is a partially cutaway perspective view of the straight spacer according to the first embodiment of the present invention;

FIG. 8 is a partially cutaway perspective view of a straight spacer according to a second embodiment of the present invention;

FIG. 9 is a partially cutaway perspective view of a straight spacer according to a third embodiment of the present invention.

FIG. 10 is a partially cutaway perspective view of a straight spacer according to a fourth embodiment of the present invention;

FIG. 11 is a view illustrating a state in which a photosensitive material for tilt-exposure for forming a linear spacer according to an embodiment of the present invention;

FIG. 12 is a plan view illustrating a planar structure of a field emission display including a grid spacer according to another embodiment of the present invention;

13 is a partially enlarged perspective view of the lattice spacer of FIG.

FIG. 14 is a partially enlarged plan photograph of the lattice spacer of FIG. 12;

FIG. 15 is a partially enlarged side view photograph of the lattice spacer of FIG. 12;

FIG. 16 is a view for explaining a mask pattern for forming the lattice spacer of FIG. 12 and a tilt exposure region of a photosensitive material.

FIG. 17 is a diagram illustrating tilt exposure on the upper surface of a photosensitive material for forming the grid spacer of FIG.

FIG. 18 is a view illustrating tilt exposure on the bottom surface of a photosensitive material for forming the grid spacer of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Emitter part 12 ... Lower glass substrate 14 ... Cathode electrode 15 ... Emitter chip 16 ... Insulating film 17 ... Gate hole 18 ... Gate electrode 20 ... Display part 22 ... Upper glass substrate 24 ... Anode electrode 26 ... Fluorescent substance 32 ... Fully L-shaped spacer 34 Half-shaped spacer 36 Fish bone spacer 32a, 34a, 36a Support wall 32b, 34b, 36b Support foot 38 Fixing jig 40 Alignment mark 50 Display area 52 Peripheral area 54 Sealing members 60, 90 Exposure mask 62 Support line 64 Auxiliary line 70 Photosensitive substance 80 Lattice spacer 82 Support column 84 Connecting wall 92 Grid pattern 92a Horizontal and vertical lines 92b Intersection

Claims (23)

[Claims] An emitter unit including a lower substrate on which a cathode electrode and a gate electrode are formed; a display unit including an upper substrate on which a transparent anode electrode coated with a fluorescent material is formed; In order to maintain at predetermined intervals,
A support wall having a high aspect ratio; a plurality of spacers including at least one or more support feet protruding leftward and rightward from the support wall to support the support wall; A flat panel display device comprising a sealing member for vacuum sealing a peripheral portion of the flat panel display. 2. The flat panel display according to claim 1, wherein the spacer is formed by exposing and etching a photosensitive material. 3. The support wall may have a rectangular, hexagonal or ladder-shaped cross section, and the support foot may have a rectangular cross section by vertical exposure or a triangular cross section by tilt exposure. The flat panel display according to claim 2. 4. The flat panel display according to claim 3, wherein when the cross section of the support wall is a ladder shape, a narrow upper end faces the display unit. 5. The support wall of the spacer is longer than the display area of the display unit, and the support feet are formed on both sides of the support wall located in a peripheral area outside the display area. The flat panel display according to claim 1, wherein the flat panel display has a one-letter shape longer than the display area. 6. A support wall of the spacer is shorter than a display area of the display unit, and the support foot is formed on one side of the support wall located in a peripheral area outside the display area. The flat panel display according to claim 1, wherein the flat panel display has a one-letter shape shorter than the display area. 7. A length of a support wall of the spacer is shorter than a length of a display area of the display unit, and a plurality of support feet project at predetermined intervals over the entire support wall in the display area. The flat panel display according to claim 1, wherein the flat panel display has a shape of a fish bone. 8. A plurality of fixing jigs having a groove into which one side of a support wall of at least one spacer is inserted to fix each of the spacers, in a peripheral region of the display unit or the emitter unit. The flat panel display according to claim 1, wherein: 9. The flat panel display according to claim 1, wherein the height of the support wall is greater than the height of the support foot. 10. Providing an emitter unit including a lower substrate on which a cathode electrode and a gate electrode are formed, and providing a display unit including an upper substrate on which a transparent anode electrode coated with a fluorescent material is formed. Exposing and etching the photosensitive material to provide a high aspect ratio support wall;
Forming a plurality of spacers having at least one support leg protruding leftward and rightward from the support wall to support the support wall; and forming a plurality of spacers between the emitter unit and the display unit. Arranging the plurality of spacers at a predetermined interval therebetween, and sealing the periphery of the emitter and the display with a sealing member to evacuate the emitter and the display to form a vacuum. A method for manufacturing a flat panel display device, comprising the steps of: 11. The step of forming the spacer includes providing a photosensitive material having a predetermined thickness, a support line having a predetermined length, and a left and right direction perpendicular to the support line. Disposing an exposure mask on the photosensitive material, the exposure mask having at least one auxiliary line having a length shorter than the support line and formed on the photosensitive material. Exposing the material, heat-treating the exposed photosensitive material, and removing the exposed region of the heat-treated photosensitive material by an etching method along the support line. The flat panel display according to claim 10, further comprising the step of simultaneously forming the support wall formed and the support feet formed along the auxiliary line. Production method. 12. The step of exposing the photosensitive substance,
Tilt angle θ (θ <tan (w / 2h); where w is the width of the auxiliary line and h is the thickness of the photosensitive material)
12. The method according to claim 11, wherein tilt exposure is performed. 13. The step of exposing the photosensitive substance,
Left and right tilt angles θ (θ> ta) with respect to the auxiliary line
12. The method according to claim 11, wherein tilt exposure is performed using n (w / 2h); where w is the width of the auxiliary line and h is the thickness of the photosensitive material. . 14. The step of exposing the photosensitive substance,
The tilt angle θ ₁ (θ ₁ <
where tan (w / 2h); where w is the width of the auxiliary line, and h is the thickness of the photosensitive material, the upper surface of the photosensitive material is tilt-exposed, and the left and right sides of the auxiliary line are tilted. Angle θ ₂ (θ ₂ > tan (w / 2h); where w
Is the width of the auxiliary line, and h is the thickness of the photosensitive material.
12. The method according to claim 11, wherein an upper surface of the photosensitive material is subjected to tilt exposure. 15. A step of disposing the exposure mask on the bottom surface of the photosensitive material corresponding to the exposure of the top surface after the step of exposing the photosensitive material, and disposing the exposure mask on the bottom surface of the photosensitive material. The tilt angle θ ₁ (θ ₁ <tan (w
/ 2h): where w is the width of the auxiliary line and h
15. The method of claim 14, further comprising tilt-exposing the bottom surface of the photosensitive material to a thickness of the photosensitive material. 16. The photosensitive material may be SiO.₂, Li
₂O, Al₂O₃, Na ₂O, Ag₂O, CeO₂Including
The photosensitive glass according to claim 10, wherein
Of manufacturing a flat panel display device. 17. The photosensitive material has a thickness of about 0.2 to 2
The method for manufacturing a flat panel display according to claim 10, wherein 18. The method of claim 18, wherein providing the display unit comprises: a plurality of fixing jigs having an insertion groove in a peripheral area of the display unit; and at least one alignment for aligning the display unit and the emitter unit. The flat panel display according to claim 10, further comprising a step of simultaneously forming a plurality of marks, wherein the plurality of spacers are fixedly arranged by inserting one side of the spacers into insertion grooves of the fixing jig. Manufacturing method. 19. An emitter section including a lower substrate on which a cathode electrode and a gate electrode are formed, a display section including an upper substrate on which a transparent anode electrode coated with a fluorescent material is formed, and a display area of the display section. A lattice shape including a plurality of support columns having a high aspect ratio and located at intersections of horizontal and vertical lines at predetermined intervals, and a connection support wall formed between the pair of support columns on the horizontal and vertical lines. A flat panel display device comprising: a spacer; and a sealing member for vacuum-sealing a peripheral portion between the emitter section and the display section. 20. The flat plate according to claim 19, wherein the grid spacer is formed by tilt exposure and etching of a photosensitive material, and the connecting support wall has a lower height than the support column. Display device. 21. Providing an emitter unit including a lower substrate on which a cathode electrode and a gate electrode are formed, and providing a display unit including an upper substrate on which a transparent anode electrode coated with a fluorescent material is formed. A plurality of support columns having a high aspect ratio and located at intersections of horizontal and vertical lines at predetermined intervals in the display area of the display unit, and a pair of the support columns on the horizontal and vertical lines; Forming a grid-type spacer by tilt exposure and etching processes of a photosensitive material, including a plurality of connection support walls; fixing the grid-type spacer between the emitter unit and the display unit; and A method of manufacturing a flat panel display device, further comprising the steps of: sealing a periphery of the emitter unit and the display unit with a sealing member, evacuating the inside and forming a vacuum state. 22. The step of forming the spacer, providing a photosensitive material having a predetermined thickness, arranging an exposure mask having a lattice pattern formed on the photosensitive material, Tilt-exposing the photosensitive material on the top and bottom through front and back and left and right through a mask, heat-treating the exposed photosensitive material, and exposing the exposed region of the heat-treated photosensitive material. Removed in the engraving step, a plurality of support columns having a high aspect ratio and located at the intersection of horizontal and vertical lines at a predetermined interval in the display area of the display unit, and a pair of support columns on the horizontal and vertical lines 22. The method of claim 21, further comprising simultaneously forming a connecting support wall having a height lower than that of the support pillar. 23. The tilt exposure step, wherein the tilt angle θ is greater than tan (w / 2h) (where w is the line width of the lattice pattern and h is the thickness of the photosensitive material). 23. The method according to claim 22, wherein the value is smaller than tan (w / h).