JP2001048562A - Scribe apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribe apparatus capable of drawing good scribe lines even with a small static load. SOLUTION: This scribe apparatus is equipped with a scribe body 10 having a contact member 13 contacting with work 100 and a vibration-generating member for imparting vibration to the member 13 in a crossing direction to a work surface and a support member 20 supporting the body 10 in a movable state in the vibrating direction. The apparatus is further equipped with a magnetic force retention mechanism 40 retaining the body 10 by magnetic force at a standard position in the moving direction of the body 10. The mechanism 40 has a first pair of magnets 41 and a second pair of magnets 42. Magnetic force imparted by the pair of magnets 41 to the body 10 and magnetic force imparted by the pair of magnets 41 to the body 10 are mutually reversed in the moving direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribe apparatus for forming a scribe line on a work surface of a brittle material such as a sheet glass or a ceramic plate.

[0002]

2. Description of the Related Art A conventional scribing apparatus for forming a scribe line on a work by generating vibration is disclosed in Japanese Patent Laid-Open No. 9-2784.
As disclosed in Japanese Patent No. 73, a static load is applied to a work by its own weight or a leaf spring of a scribe device to prevent a cutter from jumping from the work.

[0003]

However, in the method of applying a static load to a work by the weight of the scribe device,
Depending on the work, the static load becomes excessive, and horizontal cracks occur near the scribe line on the work surface,
If a good scribe cannot be formed, or if the static load is too small, the cutter jumps up from the work surface when vibrating, and there is a problem that continuity of microcracks cannot be secured. In the method of applying a static load to a workpiece by a leaf spring, the application of the static load largely depends on the natural frequency of the leaf spring, and resonance is easily generated between the leaf spring and the scribe main body. In some cases, the scribe line cannot be formed depending on conditions such as the work and the material of the work.

[0004]

In order to achieve the above object, a scribing apparatus according to the present invention comprises a scribe body having a cutter and a vibration generating member for applying vibration to the cutter, and a scribe body using a magnetic force. And support means for movably supporting the device.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a scribe device according to an embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the scribe device includes a scribe main body 10, a vertical base plate 20 as a support, and a scribe main body
Slide mechanism 30 for supporting the apparatus so that it can slide vertically.
The magnetic force holding mechanism 40 for holding the scribe main body 10 at a reference height (reference position) by magnetic force, and the base 20 as shown in FIG.
, A moving mechanism 50 for horizontally moving in a direction perpendicular to the paper surface, and a plate-shaped work 1 such as a plate glass or a ceramic plate.
And a table 60 on which the H.00 is set horizontally. The support means in the claims includes the slide mechanism 30 and the magnetic force holding mechanism 40.

[0006] As shown in FIG.
Reference numeral 0 denotes a body 11, a holder 12 supported by the body 11 so that it can slide in a small amount in the vertical direction, and a cutter 13 provided at the lower end of the holder 12 (a head, an abutting member, only in FIG. 1). And a vibration generating member 14 composed of two piezo actuators or the like for applying vertical vibration to the holder 12.

The body 11 has a vertically long box shape,
The holder 12 is housed therein. Holder 1
2 also has a vertically long box shape, in which the vibration generating member 14 is housed. The vibration generating member 14
Are formed in a vertically long shape and are coaxial with the body 11 and the holder 12 (the center axes thereof are indicated by L in the figure), and generate an axial vibration. As shown in FIG. 2, the lower end surface of the lower vibration generating member 14 contacts the bottom surface 12 a (contact portion) of the internal space of the holder 12.

The upper end of the holder 12 is guided by a guide member 15 provided at the upper end of the body 10 to the center axis L.
(Vertical direction, vibration direction). The lower end of the holder 12 is supported by a leaf spring 16 wrapped around the body 10 and a spherical ball 17 (pressurized supply member) made of an elastic material such as rubber or resin. The ball 17 is interposed between the receiving plate 18 fixed to the body 10 and the holder 12. The ball 17 urges the holder 12 upward with its elastic restoring force, and the bottom surface 12a of the internal space of the holder 12
A preload (a force in the direction of compressing the vibration generating member 14 in the axial direction) is applied to the vibration generating member 14 between the adjusting member 15 a screwed into the guide member 15.

The holder 12 is bifurcated and extends downward so as to straddle the leaf spring 16. Attachments 19 are provided at lower ends (tips) of the pair of extension portions.
The cutter 13 (contact member) is attached via a and 19b. The cutter 13 is disposed on the center axis L of the vibration generating member 14, and the lower end (tip) thereof is conical and sharp. At the lower end of the cutter 13, diamond particles having a pyramid shape are fixed. The vertices of the diamond grains face downward and come into contact with a surface of a workpiece 100 described later.

The slide mechanism 30 includes a guide 31 fixed vertically to the base plate 20 and a slider 3 supported by the guide 31 so as to be slidable in the vertical direction.
2 is provided. The body 11 is fixed in a vertically extending recess 32 a of the slider 32 in a state of being fitted therein. The slider 32 forms a part of the scribe main body 10.

The magnetic force holding mechanism 4 which is a feature of the present invention.
0 is the first magnet pair 41 disposed above the slider 32
And a second magnet pair 42 disposed below the slider 32. The first magnet pair 41 has a permanent magnet 41a fixed to the upper surface of the slider 32, and a permanent magnet 41b provided on the base plate 20 in a state of being separated from and facing the magnet 41a in the vertical direction.

The magnet 41b is provided as follows. That is, a horizontal plate 21 is fixed to the upper end of the base plate 20, and a position adjustment mechanism 43 (magnetic force adjustment mechanism) is attached to the horizontal plate 21.
Since the position adjusting mechanism 43 has the same structure as a well-known micrometer, it will not be described in detail, but a sleeve 43a fixed to the upper surface of the horizontal plate 21, an operating cylinder 43b provided on the outer periphery of the sleeve 43a, A spindle 43c capable of adjusting an amount of protrusion from the sleeve 43a in accordance with a rotation operation of the operation cylinder 43b. This spindle 43c
Extends downward through the horizontal plate 21, and the magnet 41b is fixed to the lower end thereof. Therefore, the height (position) of the magnet 41b is adjusted by adjusting the amount of protrusion of the spindle 43c by turning the operation cylinder 43b as described above.
Can be adjusted.

The magnets 41a and 41b are separated from each other so that the same poles (for example, N poles) face each other, and the repulsive force acting between the magnets 41a and 41b causes the scribe main body 10 including the slider 32 to move downward. , That is, toward the work 100.

The second magnet pair 42 also has a permanent magnet 42a fixed to the lower surface of the slider 32 and a permanent magnet 42b provided on the base plate 20 so as to be vertically opposed to the magnet 42a. I have. Similarly to the first magnet pair 41, the magnet 42b is provided below the slider 32 via the horizontal plate 22 fixed to the base plate 20 and the position adjusting mechanism 45 (magnetic force adjusting mechanism).
It is provided in. The sleeve 4 of the position adjusting mechanism 45
5a is fixed to the lower surface of the horizontal plate 22, and a spindle 45c projecting upward from the sleeve 45a penetrates the horizontal plate 22, and the magnet 42b is fixed to the upper end thereof. The amount of protrusion of the spindle 45c is adjusted by rotating the operation cylinder 45a, and thus the height (position) of the magnet 42b is adjusted.

The magnets 42a and 42b also face each other with the same poles facing each other. The repulsive force acting between the magnets 42a and 42b moves the scribe main body 10 including the slider 32 upward, that is, separates from the work 100. It is designed to bias in the direction. As is clear from the above description, the first magnet pair 41 and the second magnet pair 42 urge the scribe main body 10 in the vertical direction (the moving direction and the vibration direction of the slider main body 10) in opposite directions. I have. The magnets 41a, 41b, 42 of the magnet pairs 41, 42
a and 42b are arranged on an axis extending in the vertical direction.

The operation of the scribing device having the above configuration will be described. As described above, the work 100 is positioned on the horizontal table 60 and set horizontally. On the other hand, in the free state where the cutter 13 does not hit the workpiece 100, the scribe main body 10 is held at a reference height (reference position) in a floating state by the magnetic force of the magnet pairs 41 and 42 in the opposite directions.

The reference height of the scribe main body 10 and the strength of the magnetic force received when the scribe body 10 is displaced from the reference height are determined by the heights of the magnets 41b and 42b adjusted by the position adjustment mechanisms 43 and 45. The reference height of the scribe main body 10 is a height at which the sum of the weight of the scribe main body 10 and the repulsive force of the first magnet pair 41 is equal to the repulsive force of the second magnet pair 42. That is, when the scribe main body 10 is at the reference height, the repulsive force of the second magnet pair 42 is
Is greater than the repulsive force of the first magnet pair 41 by the weight of the first pair. The reference height of the scribe main body 10 is set to be slightly lower than the height when the tip of the cutter 43 rides on the surface of the work 100, for example, about several tens of microns. The distance between the magnets 41a and 41b and the distance between the magnets 42a and 42b when the scribe main body 10 is at the reference height are determined by the scribe main body 1.
0 determines the return force when displaced from the reference height.

The scribe main body 10 having the reference height set as described above is initially separated from the edge of the workpiece 100 in the horizontal direction. The base plate 20 is moved by the moving mechanism 50.
When the scribe main body 10 is horizontally moved toward the workpiece 100, the cutter 13 hits the edge of the workpiece 100 and then rides on the surface of the workpiece 100. At this time, the difference between the reference height of the scribe main body 10 and the height at the time of riding is determined in accordance with a desired static load described later, and the scribe body 10 can be easily climbed because it is not increased more than necessary.

As the cutter 13 rides on the surface of the workpiece 100, the scribe main body 10 is displaced upward from the reference height. With this displacement, the repulsive force of the first magnet pair 41 increases, and the repulsive force of the second magnet pair 42 weakens. Therefore, a force for returning to the reference height, that is, a downward force acts on the scribe main body 10, and this force is applied. The cutter 13 is pressed against the workpiece 100 as a static load.

The static load does not depend on the own weight of the scribe main body 10 but depends on the repulsive force of the first magnet pair 41 accompanying the displacement from the reference height. Therefore, the static load can be arbitrarily set by adjusting the position adjustment mechanisms 43 and 45, and can be adjusted according to the material and thickness of the work 100.

As described above, the cutter 13 is
By moving the scribe main body 10 by the moving mechanism 50 even after riding on the
Draw a trajectory along the 00 plane. A high-frequency voltage having the same phase is applied to the two vibration generating members 14 at or before the time when the cutter 13 rides on the cutter 13, and this is periodically expanded and contracted in the axial direction. The vibration of the holder 12 accompanying the periodic expansion and contraction of the vibration generating member 14 is transmitted to the workpiece 100 via the cutter 13. As a result, the cutter 13 forms a scribe line composed of continuous vertical microcracks on the surface of the workpiece 100 along the trajectory.

As described above, since the static load can be reduced, the occurrence of horizontal cracks near the scribe line can be prevented, and a good scribe line can be drawn. Further, the mass when transmitting the vibration energy from the vibration generating member 14 to the workpiece 100 is determined by the mass of the holder 12, the attachments 19a and 19b, and the cutter 13, and the mass for receiving the reaction force from the vibration generating member 14. Is determined by the masses of the body 11 and the slider 32, and these masses are optimally irrespective of the static load, that is, the vibration energy is transferred from the cutter 13 to the work 10
It can be chosen to be sufficiently heavy to transmit to zero. Further, the vibration received by the body 11 and the slider 32 from the vibration generating member 14 can be absorbed by the magnetic force of the magnet pairs 41 and 42 without the intervention of a spring material or the like, and the resonance can be suppressed to a minimum.

The work 100 on which the scribe line is formed as described above is removed from the table 60, and is broken along the scribe line by a breaker (not shown).

Note that the present invention is not limited to the above-described embodiment, and various modes are possible. The magnetic force holding mechanism may use an electromagnet instead of a permanent magnet. When an electromagnet is used, the magnetic force can be adjusted by adjusting the supply current. Further, the magnet pairs 41 and 42 may be arranged on the central axis L of the body 11, the holder 12, and the vibration generating member 14. A preload may be applied to the vibration generating member using a magnet pair instead of the leaf spring 16 and the ball 17. The scribe device may be tilted by 90 ° to make the vibration direction horizontal. In this case, the influence of gravity on the holding of the scribe main body 10 by the magnet pairs 41 and 42 is eliminated. Instead of the cutter 13 having a sharp tip, a rotatable cutter having a disk shape and having an edge over the entire circumference may be used.

[0025]

As described above, according to the present invention,
The static load applied to the cutter by the magnetic force can be optimized.

[Brief description of the drawings]

FIG. 1 is a side view showing an entire scribing apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of the scribe main body taken along line II-II in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Scribe body 13 Cutter (contact member) 14 Vibration generating member 20 Base plate (support part) 40 Magnetic force holding mechanism 41 1st magnet pair 42 2nd magnet pair 41a, 41b, 42a, 42b Magnet 43, 45 Position adjustment mechanism (Magnetic force adjustment mechanism)

Claims (6)

[Claims] 1. A scribing apparatus comprising: a scribing body having a cutter; a vibration generating member for imparting vibration to the cutter; and a supporting means for movably supporting the scribing body using magnetic force. 2. A scribing apparatus according to claim 1, wherein said supporting means includes a supporting portion and at least one pair of magnets provided on said supporting portion and said scribe main body, which repel each other. 3. The scribing device according to claim 2, wherein a plurality of the magnet pairs are arranged along an axis extending in a vibration direction. 4. The support means includes a first pair of magnets repelling each other and a second pair of magnets repulsing each other, wherein one magnet of each magnet pair is attached to the scribe body, and the other magnet is The magnetic force applied to the scribe body by the first magnet pair attached to the support member and the magnetic force applied to the scribe body by the second magnet pair are opposite to each other in the moving direction. Claim 1
A scribing device according to item 1. 5. A scribing apparatus according to claim 2, wherein said support means includes a magnetic force adjusting mechanism, and said magnetic force adjustment is performed by adjusting a position of a magnet pair. . 6. A scribing apparatus according to claim 2, wherein said support means has a magnetic force adjusting mechanism, and said magnetic force adjustment is performed by adjusting a current applied to an electromagnet. .