JP2001043520A - Manufacture of magnetic head and manufacture of slider bar - Google Patents

Abstract

PROBLEM TO BE SOLVED: To control a damage to a recording medium and moreover to easily apply round shaped chamfering to the prescribed place with high accuracy without causing grain drop of crystal grain or the like e.g. in the state of a slider bar by especially chamfering the corner part and the side edge part of a slider into a round shape. SOLUTION: First, the part excepting at least the vicinity of the corner part F of the opposite surface to a slider 10 is covered with a mask, the vicinity of the corner part F which is not covered with the mask is ground by blasting abrasive grain, and whereby the chamfered surface 20 having a round shape is formed in the corner part F. Especially hereupon, the drop of grain from the chamfered surface 20 is prevented and the chamfered surface which is beautifully evened is formed by forming A, B and C surfaces by means of ion milling after chamfering.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head having a slider mounted on, for example, a hard disk drive, and a method of manufacturing a slider bar before manufacturing the magnetic head. Alternatively, the present invention relates to a magnetic head manufacturing method and a slider bar manufacturing method capable of chamfering a corner portion of a slider bar or the like with high processing accuracy.

[0002]

2. Description of the Related Art FIG. 10 is a perspective view showing a conventional magnetic head mounted on a hard disk drive or the like with a surface facing a recording medium facing upward.

In this magnetic head, the upstream side A is called a leading side with respect to the moving direction of the recording medium, and the downstream side B is called a leading side.
But it is called the trailing side.

[0004] Reference numeral 1 shown in FIG. 10 denotes a slider formed of a ceramic material or the like, and a thin film element section 6 for magnetic recording and / or reproduction is provided on the trailing side B end face of the slider 1. . Although not shown, the trailing side end face B is covered with, for example, an alumina film, and the thin film element section 6 is protected by the alumina film.

As shown in FIG. 10, an air groove 4 is formed on the surface of the slider 1 facing the recording medium.
A rail portion 5 is formed so as to surround the air groove 4. The surface of the rail portion 5 is called an ABS surface, and has a crown, for example.

The magnetic head shown in FIG. 10 is supported by a flexure (not shown) fixed to the tip of a load beam (not shown), and is urged against a recording medium by the elastic force of the load beam formed by a leaf spring. Have been.

This magnetic head is used for a so-called CSS (contact start / stop) system or a ramp load system hard disk device.

In the flying posture of the magnetic head, the leading side A has an inclined flying posture that is lifted above the recording medium higher than the trailing side B. In this floating posture, FIG.
A recording signal is written on the recording medium by the thin film element unit 6 indicated by “0”, or a magnetic signal from the recording medium is detected.

[0009]

In the conventional magnetic head shown in FIG. 10, the corner 1d of the surface of the slider 1 facing the recording medium has an acute angle. There is a problem that the recording medium is easily damaged when it comes into contact with the recording medium.

In the magnetic head shown in FIG. 10, an edge 1c between the surface of the slider 1 facing the recording medium and the leading end A, an edge 1b with the trailing end B, and both sides of the slider 1. Since the edge 1a with the side end face has a right angle, there is a problem that the recording medium is damaged even when the edge contacts the recording medium.

Conventionally, in order to solve the above problems,
After manufacturing the slider 1 shown in FIG. 10, the corner 1d and the edges 1a, 1b, 1c of the slider 1 are chamfered by, for example, machining.

However, after manufacturing the slider 1,
If chamfering must be performed on each slider 1, it is very difficult to perform chamfering on the slider 1 that has been chipped, so that the processing operation becomes very complicated, and the manufacturing efficiency of the slider 1 is increased. Cause a decrease. Also, it is extremely difficult to chamfer all the sliders 1 in the same manner in terms of accuracy, and there is also a problem that the chamfered shapes of the manufactured sliders 1 are likely to vary.

Therefore, when a plurality of sliders 1 are integrally formed, that is, in a state of a slider bar,
It is considered that if the chamfering is performed on the surface of each slider 1 facing the recording medium at the same time, the manufacturing efficiency can be increased and the variation in the chamfered shape can be suppressed.

FIG. 11 is a partial perspective view showing the state of the slider bar. The slider bar 7 shown in FIG. 11 is formed of a ceramic material such as alumina-titanium carbide (Al ₂ O ₃ —TiC), and a plurality of thin film elements are provided on the trailing side B end surface of the slider bar 7. A part 6 is provided. Although not shown, the thin film element section 6 is covered with an alumina film.

Further, as shown in FIG.
A groove 9 is formed between the grooves 9, and the surface 8 of the slider bar 7 sandwiched between the grooves 9 is the surface to be the surface of the slider 1 shown in FIG. 10 that faces the recording medium.

Conventionally, the corners and side edges 9a of the opposing surfaces 8 formed on the slider bar 7 are chamfered by, for example, plasma etching using CF ₄ gas. The chamfered surface formed by the plasma etching as described above is formed as an inclined surface (taper surface).

However, when plasma etching is used for chamfering, there is a problem that the surface is roughened and the recording medium is damaged. Further, when the plasma etching causes a roughened surface to be formed on the slider bar 7 side formed of alumina titanium carbide, the trailing side B end surface which is cleanly processed by the plasma etching without causing surface roughening or the like. A step is likely to occur between the surface and the processing surface on the side of the alumina film (not shown) formed, and the flying characteristics of the magnetic head are lowered and the recording medium is easily damaged.

Further, when plasma etching is used, there is another problem that expensive equipment is required.

The present invention has been made to solve the above-mentioned conventional problems, and in particular, it is possible to suppress damage to a recording medium by chamfering corners and side edges of a slider into an R shape, and furthermore, A method of manufacturing a magnetic head and a method of manufacturing a slider bar, wherein the R-shaped chamfering process can be easily and accurately performed at a predetermined location in a state of a slider bar, for example, without occurrence of crystal particle shedding. It is intended to provide.

[0020]

SUMMARY OF THE INVENTION The present invention provides a slider,
In the method of manufacturing a magnetic head having a magnetic recording and / or reproducing element provided on a trailing side end surface of the slider, at least a corner of the opposing surface is provided on a surface of the slider opposing a recording medium. Covering the other part with a mask, and spraying abrasive grains on the surface of the slider facing the recording medium, thereby chamfering the corner of the facing surface not covered with the mask into an R shape. And a step of removing the mask.

In the present invention, in particular, in view of the fact that the corner of the slider facing the recording medium collides with the recording medium and easily damages the recording medium, at least the slider facing the recording medium may be damaged. The corners are chamfered into an R shape, thereby making it possible to effectively suppress damage to the recording medium.

As described above, in the present invention, chamfering is performed by spraying abrasive grains. By the spraying of the abrasive grains, the angular corners are first preferentially machined, and the corners of the opposing surface are chamfered into an R shape.

Further, in the present invention, the edge on the surface facing the recording medium and near the edge with the leading end is not covered with the mask, and the abrasive is sprayed, so that the edge is formed. It is preferable to perform chamfering into an R shape, or by spraying abrasive grains so as not to cover the vicinity of the edge with all the side end surfaces on the surface facing the recording medium with the mask. Preferably, the edge is chamfered into an R shape.

As described above, by chamfering both the corner of the facing surface of the slider and the edge with the side end surface into an R shape, it is possible to more effectively suppress damage to the recording medium. Has become. In the present invention, the mask is preferably a dry film.

According to the present invention, after a predetermined location on the surface facing the recording medium is covered with a mask and abrasive grains are sprayed, the ABS facing the surface facing the recording medium is ion-milled. Preferably, it is formed.

As described above, by spraying the abrasive grains,
After chamfering a predetermined portion of the opposing surface of the slider into an R shape, the ABS surface is formed by ion milling, so that the chamfered surface is also ion milled.

The surface processed by spraying the abrasive grains is apt to cause surface roughness, and there is a concern that the recording medium may be damaged. However, in the present invention, after the chamfering process is performed, ion milling is performed again. By shaving the processing surface, the processing surface can be cleanly leveled, and the problem of damage to the recording medium can be solved.

In particular, the problem of surface roughness of the machined surface due to spraying of abrasive grains is likely to occur on the machined surface of the slider formed of alumina titanium carbide. According to the present invention, by performing ion milling after the abrasive grains are sprayed, it is possible to appropriately prevent crystal grains from falling off the chamfered surface of the slider formed of alumina titanium carbide, and to perform trailing of the slider. As in the case of the alumina film covering the thin film element provided on the side end surface, it is possible to form a clean R-shaped chamfered surface without surface roughness.

In the present invention, a slider bar having a plurality of element portions formed on the trailing side end surface is formed, and a groove is formed between the element portions on a surface of the slider bar facing the recording medium. Thereafter, a step of covering a predetermined portion on each of the opposed surfaces between the grooves with a mask and spraying abrasive grains is performed, and in a final manufacturing process, the slider bar is cut from between the element portions to form individual magnetic elements. Preferably, a head is formed.

In the state of a slider bar in which a plurality of sliders are integrated, the corners and side edges of the surface facing the recording medium are chamfered into an R shape by spraying the above-mentioned abrasive grains. After the abrasive grain spraying step, by forming the ABS surface by ion milling, it is possible to form a uniform chamfered surface with high processing accuracy on each slider,
Manufacturing efficiency can be improved.

The present invention also relates to a method of manufacturing a slider bar having a plurality of element sections for magnetic recording and / or reproduction on the trailing side end face. Forming a groove on the opposing surface, covering the opposing surface between the grooves with a mask on at least a portion other than the corner of the opposing surface, and spraying abrasive grains on the opposing surface And chamfering a corner of the facing surface that is not covered with the mask into an R shape.

In the present invention, the mask is used to prevent the mask from covering the vicinity of the edge between the groove portion and the surface facing each recording medium and the edge on the leading side. Preferably, the edge is chamfered into an R shape.Alternatively, on the surface facing each recording medium between the grooves, the vicinity of the edge with all side end surfaces is not covered with the mask. Preferably, the edge is chamfered into an R shape by spraying abrasive grains. This makes it possible to form an R-shaped chamfered surface with uniform processing accuracy at corners and side edges of a surface of the slider bar in which a plurality of sliders are integrated with each slider facing the recording medium, It is possible to improve manufacturing efficiency. In the present invention, the mask is preferably a dry film.

Further, according to the present invention, after a predetermined portion on the surface facing each recording medium between the grooves is covered with a mask and abrasive grains are sprayed, the surface facing the recording medium is ion milled. , ABS surface is preferably formed.

Thus, the chamfered surface formed on the slider bar made of alumina titanium carbide can be machined into a clean R shape without surface roughness, and the generation of crystal particles from the machined surface can occur. Can be suppressed.

[0035]

FIG. 1 is a perspective view showing a magnetic head mounted on a hard disk or the like according to an embodiment of the present invention with a surface facing a recording medium facing upward, and FIG. 2 is a perspective view showing a magnetic head shown in FIG. FIG. 3 is a sectional view taken along line 3-3 shown in FIG. 1.

The slider 10 of the magnetic head shown in FIG.
Is formed of a ceramic material such as alumina / titanium carbide or Si (silicon), an air groove 12 is formed on a surface 11 facing a recording medium, and a rail portion 1 surrounds the air groove 12.
3 are formed. The surface 13 of the rail is made of ABS
It is called a surface and is preferably crowned.
The rail portion 13 is formed by, for example, ion milling or the like, as described later.

As shown in FIG. 1, a thin film element section 14 is provided on an end surface (end) of the slider 10 on the trailing side B. The thin film element portion 14 is covered with an insulating protective film 22 made of, for example, alumina (Al2O3).

The thin film element section 14 includes a thin film magnetic element 15 formed by an MR head as a reproducing head and / or an inductive head as a recording head, and a coil formed in the thin film magnetic element 15. It is composed of a layer or an electrode layer and an electrode portion 16 which is conductively connected.

Next, the shape of the periphery of the opposing surface 11 of the slider 10 will be described below. First, as described above, the rail portion 13 is formed on the facing surface 11 of the slider 10, and a flat surface 21 formed one step lower than the rail portion 13 is formed around the rail portion 13. ing.

A chamfered surface 20 is formed from the periphery of the flat surface 21 to the side end surface of the slider 10.

Dotted lines C, D and E shown in FIG.
2 shows the shape of the slider 10 before chamfering is performed on the slider 10. In the present invention, for example, an edge (dotted line D) between the facing surface 11 and the trailing side B end surface before the chamfering is performed, an edge portion (dotted line C) with the leading side A end surface (dotted line C), and an edge with the left side end surface 19 (Dotted line E) and right end face 18
Abrasive particles of green carbon or the like are sprayed on the edge (dotted line E), and the edge (dotted line C, D, E) is gradually cut. In the present invention, finally, As shown in FIG. 1, a chamfered surface 20 is formed around the opposing surface 11 of the slider 10. As described above, the edge of the slider 11 is shaved by spraying abrasive grains, so that the corner F of the slider 11 is also shaved, and as shown in FIG. F is removed.

In particular, in the present invention, the angular corners F and side edges (dotted lines C, D, E) are preferentially shaved by the chamfering process by spraying the abrasive grains, and the chamfered surface 20 Can be formed in an R shape.

As shown in FIG. 2, the slider 1 is moved from the air groove 12 between the rails 13 formed on the facing surface 11 and the outer end surfaces 13a, 13a of the rails 13.
0, a flat surface 21 having a predetermined width dimension is formed in the direction of the left end surface 19 and the right end surface 18.
, An R-shaped chamfered surface 20 is formed from the outer edge to the left end surface 19 and the right end surface 18.

As shown in FIG. 3, a flat surface 21 having a predetermined width is formed from the outer end surface 13b of the rail portion 13 formed on the facing surface 11 to the leading side A. An R-shaped chamfered surface 20 is formed from the edge to the leading end A.

Further, as shown in FIG. 3, an R-shaped chamfered surface 20 extends from the outer end surface 13c of the rail portion 13 formed on the facing surface 11 to the trailing side B end surface.
Are formed. In this embodiment, the flat surface 21 is not formed on the trailing side B than the outer end surface 13c of the rail portion 13, and from the outer end surface 13c,
An R-shaped chamfered surface 20 is formed on the trailing side B end surface, and a flat surface 21 having a predetermined width is formed from the outer end surface 13c of the rail portion 13 to the trailing side B. A structure in which an R-shaped chamfered surface 20 is formed from the outer edge of the flat surface 21 to the end surface of the trailing side B may be employed.

In the embodiment shown in FIG. 1, the corner F of the surface 11 facing the recording medium and the edges (dotted lines C, D, E) between the surface 11 and all the end surfaces are chamfered. Although processing is performed, in the present invention, at least a corner F of the facing surface 11 is sprayed with abrasive grains, and the chamfered surface 20 is formed in the corner F in an R shape.

The corner portion F of the facing surface 11 is a portion which is particularly easy to come into contact with the recording medium. By chamfering at least the corner portion F into an R shape, the corner portion F can be more effectively formed than a conventional magnetic head. Damage to the recording medium can be suppressed.

In the present invention, in addition to the corner F, the edge (dotted line C) between the facing surface 11 and the end face A on the leading side is preferably chamfered into an R-shape, thereby further improving the effect. Thus, damage to the recording medium can be suppressed.

As shown in FIG. 1, a corner portion F of the facing surface 11 and an edge portion between the facing surface 11 and the end surface on all sides (dotted lines C,
By forming the chamfered surface 20 having an R shape in (D, E), the entire periphery of the opposing surface 11 has no angular portion at all, and the damage to the recording medium can be suppressed most effectively. Can be.

However, since the thin film element portion 14 is provided on the trailing side B end face as shown in FIG. 1, if the thin film element portion 14 is cut off by chamfering,
The recording and / or reproduction characteristics of the thin film element section 14 are undesirably deteriorated.

In particular, as shown in FIG. 1 or FIG. 3, the thin-film magnetic element 15 composed of an MR head or an inductive head is formed to extend to the surface 11 facing the recording medium. If the opposing surface 11 on which the element 15 is formed is chamfered, the thin-film magnetic element 15 is damaged, leading to deterioration in characteristics.

For this reason, in the present invention, the opposing surface 11 on at least the thin-film magnetic element 15 provided on the trailing side B end face is covered with a mask before the chamfering is performed by spraying abrasive grains. It is necessary to prevent the thin film magnetic element 15 from being chamfered.

As shown in FIG. 1 or FIG.
0 thin-film magnetic element 1 provided on the trailing side B end face
Numeral 5 is covered with a protective film 22 such as an alumina film, and a rail portion 13 is formed on the facing surface 11 on which the thin-film magnetic element 15 is formed. The rail 13 extends further to the trailing side B than the thin-film magnetic element 15 and is also formed on the protective film 22.

As shown in FIG. 1 or 3, the outer end face 13 c of the rail portion 13 formed on the protective film 22 is further positioned on the surface 11 facing the protective film 22 on the trailing side B. A chamfered surface 20 having a shape is formed. As described above, at least the chamfered surface 20 is not formed on the facing surface 11 where the thin-film magnetic element 15 is formed, and the chamfered surface 20 is located on the trailing side B with respect to the position where the thin-film magnetic element 15 is formed. An R-shaped chamfered surface 20 is formed on the protective film 22 to be formed.

As described above, the rail 13 is formed on the facing surface 11 on which the thin-film magnetic element 15 is formed. The rail 13 is formed by, for example, ion milling. Is done.

In the present invention, in order to protect the thin-film magnetic element 15 also from the ion milling, the rail 1
At the time of forming 3, a mask serving as a pattern of the rail portion 13 is formed on the opposing surface 11 on which the thin-film magnetic element 15 is formed so that the thin-film magnetic element 15 is not affected by the ion milling. And the thin-film magnetic element 15
The rail portion 13 is formed on the opposing surface 11 where there is.

The electrode portion 16 electrically connected to the thin-film magnetic element 15 must also be protected from the influence of the abrasive particles sprayed during the chamfering process.

As shown in FIG. 1, the electrode portion 16 is formed by being buried in the protective film 22. By spraying abrasive grains, a corner portion F of the slider 10 on the trailing side B is formed.
Too much, the chamfering process is
Therefore, there is a risk that even the electrode portion 16 may be shaved, so it is necessary to appropriately adjust the shaving amount especially on the trailing side B end face.

Although the manufacturing method will be described later in detail, according to the present invention, chamfering by spraying abrasive grains is first performed, and then ABS surface processing such as formation of a rail portion 13 is performed on the facing surface 11 shown in FIG. Is preferably performed.

First, the slider 1 is sprayed with abrasive grains.
The chamfering process is performed on the corner F of the opposing surface 11 at 0 and, if necessary, the edges (dotted lines C, D, and E) of the side end surfaces.
In particular, when the slider 10 formed of alumina titanium carbide is chamfered, the processed surface is liable to be roughened, and problems such as falling of crystal grains and cracks are liable to occur.

However, if the ion milling is used to form the ABS after the step of spraying the abrasive grains, the roughened work surface is finely leveled by the ion milling. This prevents crystal grains from falling off the processed surface.

In the present invention, after a chamfering process is performed by spraying abrasive grains, a process of forming an ABS surface by ion milling is performed, so that a crystal is formed from the processed surface on the slider 10 side formed of alumina titanium carbide. The processing surface can be finished to a clean surface without occurrence of particles dropping or the like, and the processing surface on the slider side can be
The surface can be machined to a surface that is substantially free of surface roughness that is substantially the same as the machined surface on the side of the protective film 22 formed of an alumina film or the like formed on the end surface of the trailing side B.

As described above, in the magnetic head of the present invention, the chamfered surface 20 having an R shape may be formed at least at the corner portion F of the magnetic head. The shape of the rail portion 13 and the like formed on the 11 may be any shape.

Further, in the present invention, after a plurality of sliders 10 are cut into individual sliders 10 from a so-called slider bar in which the sliders 10 are integrally formed, each slider 10 may be chamfered. But each slider 10
In addition, in order to form a uniform chamfered surface with high machining accuracy and improve manufacturing efficiency, the present invention performs chamfering in the state of the slider bar as described below.

FIGS. 4 to 9 show process diagrams relating to a method of manufacturing a magnetic head (or slider bar) according to the present invention.

First, as shown in FIG. 4, an elongated slider bar 25 made of alumina titanium carbide is formed. A plurality of thin film element portions 14 are formed in a row on the trailing side B end surface of the slider bar 25,
Further, a protective film 26 made of an insulating material such as an alumina film is formed on the trailing side B end face of the thin film element portion 14.

Then, as shown in FIG.
A groove 28 is formed on the surface 27 facing the recording medium between the four spaces. The side edge 28a formed by the formation of the groove 28 is a portion to be the side edge of each slider 10.

In the process diagrams shown in FIGS. 5 to 9 described below, only the leftmost slider shown in FIG. 4 is shown in an enlarged manner. The same operation is performed not only on the leftmost slider shown in FIG. 4 but also on other slider portions.

As shown in FIG. 5, a mask 29 for chamfering is provided on the surface 27 facing each recording medium. This mask 29 is preferably, for example, a dry film. Alternatively, it may be a resist or the like.

As shown in FIG. 5, the area of the lower surface of the mask 29 provided on the opposing surface 27 is smaller than the area of the opposing surface 27. The region 29 not covered by the mask 29
a is formed.

However, in the present invention, at least the facing surface 27
It is sufficient that the vicinity of each corner 27a is not covered by the mask 29. Therefore, if the opposing surface 27 near the corner 27a is not covered by the mask 29, the shape of the mask 29 can be improved. The shape need not be a square as shown in FIG. By covering the area other than the vicinity of each corner 27a with the mask 29, only the corner 27a is appropriately chamfered by spraying abrasive grains in the next step.

Further, the mask 29 is prevented from being formed near each corner 27a of the facing surface 27 and near the edge 27b between the facing surface 27 and the end surface on the leading side A.
The mask 29 may be formed on the other facing surface 27. Thereby, the corner 27a and the edge 27b are appropriately chamfered by spraying abrasive grains in the next step.

As shown in FIG. 5, it is necessary to cover at least the opposing surface 27 on the thin-film magnetic element 15 provided on the trailing side B end surface of the slider bar 25 with the mask 29. This is to prevent the thin film magnetic element 15 from being scraped by the spraying of abrasive grains in the next step. The thin-film magnetic element 1
Since it is necessary to cover the top of the thin film magnetic element 15 with the mask 29, it is preferable that the mask 29 on the trailing side B be formed to extend over the protective film 26 covering the thin-film magnetic element 15.

Next, as shown in FIG. 6, abrasive grains are sprayed onto the surface 27 facing the recording medium, for example, in the direction of arrow G, so that the surface of the opposite surface 27 not covered with the mask 29 is chamfered. Process. For the abrasive grains, for example, green carbon or the like can be used.

By the spraying of the abrasive grains (powder beam), the angular portion 27a of the facing surface 27 shown in FIG. 5 and the edge with the side end surface are preferentially scraped off. As shown in FIG. 6, an R-shaped chamfered surface 20 is formed on the opposing surface 27 that is not covered by the mask 29.

As described above, in the present invention, it is sufficient that at least the vicinity of the corner 27a (see FIG. 5) of the opposing surface 27 is not covered by the mask 29. The corner 27a is preferentially scraped off, and an R-shaped chamfered surface 20 is formed at the corner 27a.

Further, according to the present invention, the facing surface 2 on the thin-film magnetic element 15 formed at least on the trailing side B end face.
7 must be covered with a mask 29, and the thin film magnetic element 15 is covered with the mask 29, so that the thin film magnetic element 15 is not affected by the spray of the abrasive grains. There is no problem that the F.15 is damaged.

Then, as shown in FIG.
When the mask 29 provided on the upper surface is removed, a flat surface 30 which is not affected at all by the spraying of the abrasive grains is left on the portion of the facing surface 27 where the mask 29 is formed.

Next, as shown in FIG. 8, a pattern 31 for forming an ABS is formed on the flat surface 30. This pattern 31 is formed of, for example, a resist or a dry film.

Note that, as shown in FIG.
Needs to be formed so as to extend over the opposing surface 27 on which the thin-film magnetic element 15 is formed. This is to effectively protect the thin-film magnetic element 15 from ion milling performed in the next step. The shape of the pattern 31 may be any shape.

Then, as shown in FIG.
Is subjected to ion milling. By the ion milling, the opposing surface 27 where the pattern 31 is not formed,
That is, the flat surface 30 and the chamfered surface 20 are cut off in a substantially similar shape under the influence of the ion milling.

As described above, the opposing surface 27 on which the pattern 31 is not formed is scraped off by ion milling, so that a form equivalent to the pattern 31 is left below the pattern 31 and the form is removed. , A portion to be the rail portion 13 shown in FIG.

As described above, the part not covered by the pattern 31 is cut off in a substantially similar shape,
As shown in FIG. 9, a flat surface 30 having substantially the same shape as the flat surface 30 shown in FIG. 8 is newly formed from the side end surface of the rail portion 13 formed below the pattern 31. A chamfered surface 20 having substantially the same shape as the chamfered surface 20 shown in FIG. 8 is newly formed from the outer edge of the flat surface 30.

Further, according to the present invention, after the chamfering process by spraying the abrasive grains described in the step of FIG. 6 is performed, and the ABS surface forming step by ion milling described in the step of FIG. 9 is performed, the ion milling is performed. Chamfered surface 20
Is smoothed to a clean surface where crystal grains do not fall off.

First, in the present invention, an R-shaped chamfered surface 20 is formed by performing chamfering by abrasive grain spraying. The surface onto which the abrasive grains have been sprayed is liable to be roughened. From the surface, problems such as falling of crystal grains and cracks (cracks) are likely to occur.

However, after spraying the abrasive grains,
By performing the ion milling for the ABS surface formation, the surface having the surface roughened is finely leveled by the ion milling, and the crystal grains do not fall off.
When the commercialized magnetic head is driven, the problem that the recording medium is damaged due to the shedding of the crystal grains or the like is solved.

Only the processing surface on the slider bar 25 side is
If the surface is roughened by spraying the abrasive grains, a step or the like is generated between the roughened surface and the processed surface on the side of the protective film 26, and the magnetic head commercialized in such a state is generated. In this case, the recording medium is easily damaged, and the flying characteristics are reduced.

On the other hand, in the present invention, after the abrasive grains are sprayed, ion milling for forming the ABS is performed, so that the processed surface on the slider bar 25 side is leveled cleanly. A highly accurate chamfered surface 20 can be formed.

As described above, the thin-film magnetic element 1 formed on the trailing side B end face of the slider bar 25
5 is covered with the pattern 31, the thin-film magnetic element 15 is not affected by the ion milling, and the thin-film magnetic element 15 is not affected by the ion milling.
However, there is no fear of being cut by the ion milling.
By forming the pattern 31 on the thin-film magnetic element 15, the rail portion 13 is formed on the facing surface 27 on the thin-film magnetic element 15.

Finally, by removing the pattern 31 shown in FIG.
Then, a slider bar 25 having a plurality of sliders having the ABS (rail portion 13) formed on the facing surface 27 is completed.

Also, the slider bar 25 shown in FIG.
In order to obtain the slider 10 shown in FIG.
Can be obtained by cutting each slider from the portion.

By performing chamfering by spraying abrasive grains in the state of the slider bar 25 in which a plurality of sliders are integrated as described above, a chamfered surface with uniform processing accuracy can be simultaneously applied to each slider. 20 can be formed, and the manufacturing efficiency can be improved.

Further, as compared with the conventional case using plasma etching or the like, it can be manufactured at lower cost.

As described above, according to the present invention, at least a portion other than the corner portion F (see FIG. 1) of the slider 10 is covered with a mask, and abrasive grains are sprayed, so that the R-shaped chamfered surface is formed on the corner portion F. 20. This makes it possible to reduce damage to the recording medium.

In the present invention, it is preferable that after forming the chamfered surface 20 by spraying abrasive grains on the slider 10, the opposing surface 27 of the slider 10 is subjected to the ABS surface processing by ion milling. Thus, the chamfered surface 20 is chamfered neatly. The problem of cracks (cracks) on the surface of the processing surface 20 and the shedding of crystal particles, etc., which are generated when the chamfered processing surface 20 is formed by the ion milling, is solved. However, in the present invention, the ABS may be formed first by ion milling, and then chamfering may be performed by spraying abrasive grains.

In the present invention, the chamfered surface 2 shown in FIG.
In order to form the slider 10 having zero, when the slider bar 25 in which a plurality of sliders are integrally formed,
It is preferable to perform the chamfering processing 20 on each slider. As a result, it is possible to suppress variations in processing accuracy in each slider, and it is possible to improve production efficiency. However, in the present invention, after forming the slider bar 25 shown in FIG.
May be cut into individual sliders, and the cut individual sliders may be subjected to chamfering and ABS surface processing shown in FIGS. 5 to 9.

[0097]

As described above in detail, according to the present invention, a mask is formed on at least a portion of the surface of the slider facing the recording medium other than near the corners, and the mask is covered with the abrasive by spraying abrasive grains. By chamfering the vicinity of the uncornered corner into an R shape, damage to the recording medium can be reduced.

In particular, in the present invention, after the chamfering, the ABS surface processing by ion milling is performed.
Surface roughness can be appropriately prevented. In addition, it is possible to form a clean and leveled processed surface in which crystal grains do not fall out due to the ion milling.

In the present invention, it is preferable that the above chamfering is performed in a state of a slider bar in which a plurality of sliders are integrally formed, whereby each slider is provided with a chamfered surface with uniform processing accuracy. It can be formed, and manufacturing efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a magnetic head mounted on a hard disk or the like according to an embodiment of the present invention with a surface facing a recording medium facing upward;

FIG. 2 is a sectional view taken along line 2-2 shown in FIG. 1;

FIG. 3 is a sectional view taken along line 3-3 shown in FIG. 1;

FIG. 4 is a partial perspective view of a slider bar showing a process of manufacturing a magnetic head according to the present invention.

5 is a perspective view showing a portion of a slider formed on the leftmost side shown in FIG. 4, and is a process diagram performed after the manufacturing process shown in FIG. 4;

FIG. 6 is a process chart performed after the manufacturing process shown in FIG. 5;

7 is a process drawing performed after the manufacturing process shown in FIG. 6,

FIG. 8 is a process chart performed after the manufacturing process shown in FIG. 7;

FIG. 9 is a process chart performed after the manufacturing process shown in FIG. 8;

FIG. 10 is a perspective view showing a conventional magnetic head mounted on a hard disk or the like with a surface facing a recording medium facing upward;

FIG. 11 is a partial perspective view of a slider bar when chamfering is performed;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Slider 11, 27 Facing surface with recording medium 13 Rail part 14 Thin film element part 15 Thin film magnetic element 16 Electrode part 18 Right end face 19 Left end face 20 Chamfered surface 21, 30 Flat surface 22, 26 Protective film 25 Slider bar 28 Groove 29 Mask 31 Pattern A Leading side B Trailing side

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Toshihiko Sato 1-7 Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. F-term (reference) 5D042 NA02 PA01 PA05 PA09 QA02 QA03 RA02 RA04

Claims (13)

[Claims] 1. A method for manufacturing a magnetic head having a slider and a magnetic recording and / or reproducing element provided on an end surface of the slider on a trailing side, wherein the slider has a surface facing a recording medium. A step of covering at least a portion other than a corner of the facing surface with a mask; and spraying abrasive grains on a surface of the slider facing the recording medium to form a corner of the facing surface not covered by the mask. A step of chamfering a portion into an R shape, and a step of removing the mask. 2. An edge on the surface facing the recording medium and near the edge with the leading end is not covered with the mask, and the edge is formed into an R shape by spraying abrasive grains. 2. The method for manufacturing a magnetic head according to claim 1, wherein chamfering is performed. 3. An edge shape is formed by spraying abrasive grains so as not to cover the vicinity of the edge with all the side end faces on the surface facing the recording medium and spraying abrasive grains. 2. The method for manufacturing a magnetic head according to claim 1, wherein chamfering is performed. 4. The device according to claim 1, wherein at least the element portion provided on the trailing side end surface is covered with the mask, and the part of the element portion is not chamfered by spraying abrasive grains. Or a method for manufacturing a magnetic head. 5. The method according to claim 1, wherein the mask is a dry film. 6. A method according to claim 1, wherein a predetermined portion on a surface facing the recording medium is covered with a mask and abrasive particles are sprayed, and then an ABS is formed on the surface facing the recording medium by ion milling. Item 6. The method for manufacturing a magnetic head according to any one of Items 1 to 5. 7. A slider bar having a plurality of element portions formed on an end surface on a trailing side, and after forming a groove portion between each element portion and on a surface of the slider bar facing a recording medium, A step of covering predetermined portions on each of the opposing surfaces between the grooves with a mask and spraying abrasive grains, and in a final manufacturing step, cutting the slider bar from between the element portions to form individual magnetic heads Claims 1 to 6
The method for manufacturing a magnetic head according to any one of the above. 8. A method of manufacturing a slider bar having a plurality of element portions for magnetic recording and / or reproduction on an end surface on a trailing side, wherein a slider bar is provided between the element portions and on a surface of the slider bar facing a recording medium. Forming a groove, and covering at least a portion other than a corner of the facing surface with a mask on each of the facing surfaces between the grooves, spraying abrasive grains on the facing surface, A step of chamfering a corner of the opposing surface not covered with a mask into an R shape. 9. The method according to claim 1, wherein the mask is arranged so as not to cover the vicinity of the edge between the groove portion and the recording medium and the edge with the leading end surface, and the abrasive is sprayed onto the edge portion. 9. The method for manufacturing a slider bar according to claim 8, wherein chamfering is performed into an R shape. 10. A method according to claim 1, wherein the mask does not cover the vicinity of the edge between all the side faces on the surface facing each recording medium between the grooves, and sprays abrasive grains to the edge. The method for manufacturing a slider bar according to claim 8, wherein the portion is chamfered into an R shape. 11. The device according to claim 8, wherein at least the element portion provided on the trailing-side end surface is covered with the mask, and a part of the element portion is not chamfered by spraying abrasive grains. Or a method for manufacturing a slider bar. 12. The method according to claim 8, wherein the mask is a dry film. 13. A method according to claim 11, wherein a predetermined portion on the surface facing each recording medium between the grooves is covered with a mask and abrasive grains are sprayed, and then the ABS facing the recording medium is ion-milled. The method of manufacturing a slider bar according to claim 8, wherein the slider bar is formed.